Mapping device and loading port device

Abstract

The invention provides a mapping device which detects the accommodation state of an object in a container capable of accommodating the object at a predetermined interval in a first direction, and is provided with: a mapping frame which moves in the first direction and a second direction; a first detection unit having a pair of first protrusions protruding from the mapping frame by a first length in the second direction and disposed at a first interval in a third direction, and a first sensor unit provided in the vicinity of each tip of the pair of first protrusions; and a second detection unit that has a pair of second protrusions protruding from the mapping frame by a second length longer than the first length, and a second sensor unit disposed at different positions at a predetermined distance from the first detection unit, the second protrusions protruding from the mapping frame by a second length longer than the first length. And a pair of second sensor parts disposed at the same position as the first convex parts in the third direction, the second sensor parts being provided in the vicinity of the respective front ends of the pair of second convex parts.

Description

Technical Field

[0001] The present disclosure relates to a mapping device and a loadport device. Background Art

[0002] In a device that delivers a plate-like object such as a substrate, such as a load port device, a mapping device is provided to detect the storage state of the object stored in a container. The mapping device detects the number and position of the objects stored in the container, and detects whether the objects are normally stored in the container (see Patent Document 1). The objects detected by the mapping device include thin plate-like materials such as glass substrates in addition to silicon substrates or parts processed thereon.

[0003] On the other hand, as the objects transported in semiconductor processing plants become larger or thinner, containers and the objects contained in the containers are becoming more diverse. For example, a container containing 200 mm (8-inch) silicon wafers and a container containing 300 mm (12-inch) silicon wafers may be circulated in a semiconductor processing plant at the same time, and the two containers are switched and sent to a predetermined load port device. In this case, as a mapping device provided in the load port, a mapping device corresponding to both 200 mm silicon wafers and 300 mm silicon wafers is required.

[0004] However, if one attempts to apply a conventional mapping device corresponding to a container for accommodating 200 mm silicon wafers to a container for accommodating 300 mm silicon wafers, if there are 300 mm silicon wafers protruding from some containers, even if the protrusion amount is within the permissible range for 200 mm silicon wafers, there may be a problem of collision between the detection unit of the mapping device and the silicon wafer. The reason for this is that, in the conventional mapping device corresponding to a container for accommodating 200 mm silicon wafers, the permissible range of protrusion of the silicon wafer becomes smaller when applied to 300 mm silicon wafers.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2011-35384 Summary of the invention

[0008] Problems to be solved by the invention

[0009] The present disclosure relates to a mapping device and a load port device that can prevent collision between an object and a sensor even when applied to a plurality of objects of different sizes.

[0010] Technical solutions to solve problems

[0011] In order to achieve the above-mentioned object, a first aspect of the present disclosure provides a mapping device for detecting a storage state of a plurality of objects in a container capable of storing the plurality of objects at predetermined intervals along a first direction, wherein:

[0012] a mapping frame that moves along the first direction and a second direction that is substantially perpendicular to the first direction;

[0013] a first detection unit having a pair of first protrusions and a first sensor unit, the pair of first protrusions protruding from the mapping frame by a first length in the second direction and arranged at a first interval in a third direction substantially perpendicular to the first direction and the second direction; and a first sensor unit provided near each front end of the pair of first protrusions; and

[0014] A second detection unit, which has a pair of second protrusions and a second sensor unit, and is arranged at a position different from the first detection unit at a prescribed distance in the first direction, the pair of second protrusions protruding from the mapping frame in the second direction by a second length longer than the first length, and is arranged in the third direction at the same position as the first protrusion, and the second sensor unit is provided near each front end of the pair of second protrusions.

[0015] The mapping device of the first viewpoint of the present disclosure has a first detection unit and a second detection unit arranged at different positions at a predetermined distance relative to the overlapping direction of the object, that is, the first direction, and the protrusion length (second length) of the second protrusion is longer than the protrusion length (first length) of the first protrusion. Since the first detection unit has a short protrusion length, it can avoid contact with the object protruding from the container and detect the object that may collide with the second detection unit with a long protrusion length, and prevent the collision between the object and the second detection unit through appropriate actions of the mapping frame, etc. In addition, by making the positions of the first protrusion and the second protrusion in the third direction the same, the opening width of the container of the object with a small size can be maximized to expand the interval between the second protrusions, and the permissible range of protrusion of the object can be expanded.

[0016] In addition, for example, a second aspect of the present disclosure provides a mapping device for detecting a storage state of a plurality of objects in a container capable of storing the plurality of objects at predetermined intervals along a first direction, wherein:

[0017] a mapping frame movable in a second direction substantially perpendicular to the first direction and to the first direction;

[0018] a first detection unit including a pair of first protrusions and a first sensor unit, the pair of first protrusions protruding from the mapping frame by a first length in the second direction and arranged at a first interval in a third direction substantially perpendicular to the first direction and the second direction, the first sensor unit being provided near each front end of the pair of first protrusions; and

[0019] A second detection unit includes a pair of second protrusions and a second sensor unit, and is arranged at a position different from the first detection unit at a prescribed distance in the first direction, the pair of second protrusions protruding from the mapping frame in the second direction by a second length longer than the first length, and being arranged at a second interval narrower than the first interval in the third direction, and the second sensor unit is provided near each front end of the pair of second protrusions.

[0020] The mapping device of the second viewpoint of the present disclosure is similar to the mapping device of the first viewpoint, and includes a first detection unit and a second detection unit that are arranged at different positions at a predetermined distance relative to the overlapping direction of the object, i.e., the first direction, and the protrusion length (second length) of the second protrusion is longer than the protrusion length (first length) of the first protrusion. Since the first detection unit has a short protrusion length, it can avoid contact with the object protruding from the container and detect the object that may collide with the second detection unit with a long protrusion length, and prevent the collision between the object and the second detection unit through appropriate actions of the mapping frame, etc. In addition, by making the second interval of the second protrusion narrower than the first interval of the first protrusion, the overlap of the upper surface of the first direction of the container for accommodating small-sized objects and the first protrusion when viewed from above is avoided, and the second protrusion can pass through the upper surface of the container in the up-down direction, so that the movement of the mapping frame can be simplified.

[0021] In addition, for example, the first direction may be a downward direction, and the first detection unit may be arranged below the second detection unit by the predetermined distance.

[0022] The first direction may be an upward direction, and the first detection unit may be arranged above the second detection unit by the predetermined distance.

[0023] In the mapping device of the present disclosure, the first direction can be any direction, but can be suitably applied to a mapping device in which the first direction, which is the moving direction of the mapping frame during detection, is downward or upward.

[0024] In addition, for example, the mapping device of the present disclosure may include a storage unit that stores a detection result of the object performed by the second detection unit.

[0025] The second detection unit can detect the number, position, etc. of objects contained in the container, and detect whether the objects are normally contained in the container. Therefore, by having a storage unit for storing its detection results, devices such as loading port devices can easily utilize the detection results of the second detection unit after detection.

[0026] In addition, for example, the mapping device of the present invention may include a movement control unit, and when a detection result of the object performed by the first detection unit, i.e., a first detection result, is input, and the first detection result represents the detection of the object performed by the first sensor unit, the movement of the mapping frame is stopped from the time of detection of the object by the first sensor unit and before the mapping frame moves the specified distance.

[0027] By operating the movement control unit in this way, even when there is an object with a large protrusion in a container containing a large object, the movement of the mapping frame can be stopped before the second detection unit collides with the object. In addition to the movement control unit that stops the movement of the mapping frame, a movement control unit that slows down the movement of the mapping frame or changes the direction of the movement method is also considered.

[0028] Furthermore, for example, the mapping device of the present disclosure may include a third detection unit having a shorter distance from a central axis of the container parallel to the first direction to a detection position than the first detection unit and the second detection unit.

[0029] Such a mapping device, if there is an object protruding so large that it may even collide with the first detection unit, can detect the object through the third detection unit and control the movement of the mapping frame to prevent the object from colliding with the first and second detection units.

[0030] The present disclosure provides a load port device having:

[0031] Any mapping device as described above;

[0032] a placing portion on which the container is placed; and

[0033] A door opens and closes the lid of the container.

[0034] The mapping device disclosed in the present invention can be used in any device, for example, in a semiconductor factory such as a load port device provided in a semiconductor processing device, and can be suitably used as a part of an interface unit for transferring substrates etc. using a container. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of a load port device having a mapping device according to the first embodiment of the present disclosure.

[0036] Figure 2 Yes means Figure 1 The loadport apparatus shown has an enlarged stereoscopic view of the major portions of the mapping apparatus.

[0037] Figure 3 This is a front view of the main part of the mapping device viewed in the direction opposite to the second direction.

[0038] Figure 4 This is a plan view of the main parts of the mapping device as viewed along the first direction.

[0039] Figure 5 This is a conceptual diagram for explaining the shapes of the first convex portion and the second convex portion of the mapping device.

[0040] Figure 6 This is a conceptual diagram for explaining a state in which a mapping device detects objects of different sizes.

[0041] Figure 7 It means by Figure 1 An explanatory diagram (partial cross-sectional view) of the first stage of the detection operation performed by the mapping device shown.

[0042] Figure 8 It means by Figure 1 An explanatory diagram (partial cross-sectional view) of the second stage of the detection operation performed by the mapping device shown.

[0043] Fig. 9 It means by Figure 1 An explanatory diagram (partial cross-sectional view) of the third stage of the detection operation performed by the mapping device shown.

[0044] Fig.10 This is a conceptual diagram comparing the mapping device according to the comparative example and the first embodiment.

[0045] Fig.11 This is a conceptual diagram comparing the mapping device of the first embodiment and the mapping device of the second embodiment.

[0046] Fig.12 This is a schematic perspective view of the main part of the mapping device according to the second embodiment of the present disclosure as viewed from obliquely above.

[0047] Fig.13 This is a schematic perspective view of the main part of the mapping device according to the second embodiment of the present disclosure as viewed diagonally from below.

[0048] Fig.14 It is a conceptual diagram showing the detection axes of the respective detection units in the mapping device according to the second embodiment. DETAILED DESCRIPTION

[0049] First embodiment

[0050] Hereinafter, the present invention will be described based on the embodiments shown in the drawings. Figure 1 1 is a schematic perspective view of a load port device 10 having a mapping device 20 according to a first embodiment of the present disclosure. The mapping device 20 of this embodiment is provided around a door 15 of the load port device 10. The mapping device 20 detects a first container 70 (see FIG. 1 ) as a container contained in the load port device 10. Figure 7 ) and the second container 90 (refer to Figure 6 ) as the object substrate or silicon wafer (for example, the first object 81a (refer to Figure 7 ) and the second object 82a (refer to Figure 6 ) etc.)’s accommodation status.

[0051] The load port device 10 is installed in an EFEM (not shown) or the like in a semiconductor factory for use. The load port device 10 functions as an interface for transferring objects such as silicon wafers contained in a first container 70 and a second container 90 and transported in a semiconductor factory from the first container 70 and the second container 90 to a predetermined semiconductor processing device. In addition, as the first container 70 and the second container 90 for containing the first object 81a and the second object 82a, FOUP, FOSB, SMIF, open wafer cassette, etc. can be cited.

[0052] In the load port device 10 and the mapping device 20 of the first embodiment, a FOUP capable of accommodating a plurality of first objects 81a, which are 300 mm (12 inch) silicon wafers, is exemplified as the first container 70, and a second container 90 is exemplified. An open wafer cassette capable of accommodating a second object 82a, which is a 200 mm (8 inch) silicon wafer, is exemplified for explanation. However, the objects and containers whose storage status is detected by the mapping device 20 are not limited to the first objects 81a, the second objects 82a, the first container 70, and the second container 90, and may be a combination of other objects and containers of different sizes or shapes.

[0053] Figure 7 It means by Figure 1 FIG. 2 is an explanatory diagram (partial cross-sectional view) of the first stage of the detection operation performed by the mapping device 20 shown in FIG. Figure 7 As shown, the first container 70 can accommodate a plurality of first objects 80a at predetermined intervals along the negative Z-axis direction as the first direction. In addition, the first container 70 has a main opening 70a formed on the side of the first container 70 for taking out the first objects 80a.

[0054] like Figure 1As shown, the load port device 10 includes, in addition to the mapping device 20, a loading portion 19 for loading the first container and the second container 90 for accommodating objects, a frame portion 16 installed in a manner to close the opening of the EFEM, and a cover 74 for opening and closing the first container 70 (see FIG. Figure 8 and Fig. 9 ) and the door 15 of the frame opening of the frame portion 16. In addition, the mapping device 20 is not limited to the items provided in the load port device 10, and can also be used to detect the storage state of the first and second objects 81a, 82a in containers or shelves other than the first container 70 and the second container 90 that store the first and second objects 81a, 82a.

[0055] Figure 2 Yes means Figure 1 FIG. 2 is an enlarged perspective view of the main parts of the mapping device 20. Figure 2 As shown, the mapping device 20 includes a mapping frame 28 including a horizontal portion 28a, a first detection portion 30, and a second detection portion 40. Figure 1 The third detection unit 50 shown, or Figure 7 to Figure 9 The mapping control unit 29 including the storage unit 25, the movement control unit 26, the calculation unit 27, etc., the first movement mechanism 22, the second movement mechanism 24, etc. shown are all elements that can be arbitrarily selected to be included or not included.

[0056] In addition, if Figure 1 and Figure 7 to Figure 9 As shown, in the description of the loading port device 10 and the mapping device 20, the up-down direction is set as the Z-axis direction, the direction perpendicular to the Z-axis and in which the loading portion 19 approaches and separates from the frame portion 16 is set as the Y-axis direction, and the direction perpendicular to the Z-axis and the Y-axis is set as the X-axis direction. In addition, in the mapping device 20 of the first embodiment, the first direction coincides with the negative direction of the Z-axis, the second direction coincides with the negative direction of the Y-axis, and the third direction coincides with the negative direction of the X-axis. However, in the mapping device of other embodiments, the first to third directions may coincide with the negative direction of the Y-axis. Figure 1 The mapping device 20 is in the opposite direction as shown.

[0057] like Figure 2 As shown, the first detection unit 30 and the second detection unit 40 of the mapping device 20 are installed in the mapping frame 28 on the horizontal portion 28a extending in the substantially horizontal direction, that is, the third direction. Figure 1 As shown, in the mapping frame 28, the load port device 10, the door 15 or the door 15 is arranged near the opening of the frame portion 16 which can be closed and opened.

[0058] like Figure 1 and Figure 7As shown, when the door 15 closes the opening of the frame portion 16, the mapping frame 28 is arranged at a position different from the opening of the frame portion 16 by a predetermined distance toward the positive direction of the Y axis. Figure 7 to Figure 9 As shown, when detecting the storage state of the first object 81a in the first container 70, the mapping framework 28 is Figure 1 and Figure 7 The state shown in FIG. 1 moves in a second direction (negative direction of the Y axis) which is substantially perpendicular to the first direction, and then moves in the first direction (negative direction of the Z axis) (refer to FIG. 1 ). Figure 8 and Fig. 9 ).

[0059] like Figure 2 As shown, the first detection unit 30 is arranged below (on the negative side of the Z axis) the second detection unit 40. The first detection unit 30 includes a pair of first protrusions 33a, 33b protruding from the horizontal portion 28a of the mapping frame 28 by a first length L1 in the second direction (on the negative side of the Y axis), and first sensor units 34a, 34b provided near the respective front ends of the pair of first protrusions 33a, 33b.

[0060] The first detection unit 30 includes a pair of first protrusions 33a and 33b, which are arranged at a first interval W1 in a third direction (X-axis negative direction) perpendicular to the first direction and the second direction. One of the first sensor units 34a and 34b includes a light emitting element, and the other includes a light receiving element. The first detection unit 30 detects objects 81a and 82a that protrude from the storage position of the first and second containers 70 and 90 exceeding a predetermined length by detecting objects 81a and 82a that cover the first detection axis 32 connecting the pair of first sensor units 34a and 34b.

[0061] Figure 3 2 is a front view of the main part of the mapping device 20 viewed in the direction opposite to the second direction (from the negative direction side to the positive direction side of the Y axis). Figure 2 and Figure 3 As shown in FIG. 1 , the second detection unit 40 is arranged above the first detection unit 30 (on the positive side of the Z axis). Figure 2 As shown, the second detection unit 40 has a pair of second protrusions 43a, 43b protruding from the horizontal portion 28a of the mapping frame 28 in the second direction (negative direction side of the Y axis) by a second length L2 longer than the first length L1, and second sensor portions 44a, 44b arranged near the front ends of the pair of second protrusions 43a, 43b.

[0062] The pair of second protrusions 43a and 43b of the second detection unit 40 are arranged at the same position as the pair of first protrusions 33a and 33b in the third direction (negative direction of the X axis) perpendicular to the first direction and the second direction. One of the second sensor units 44a and 44b has a light emitting element, and the other has a light receiving element. The second detection unit 40 detects the storage state of the objects 81a and 82a by detecting the position or time when the objects 81a and 82a cover the second detection axis 42 connecting the pair of second sensor units 44a and 44b.

[0063] like Figure 3 As shown in FIG. 1 , the second detection unit 40 is arranged at a position different from the first detection unit 30 by a predetermined distance L11 in the first direction (negative direction of the Z axis). Figure 3 As shown, the second detection axis 42 of the second detection unit 40 is arranged above (in the opposite direction to the first direction) the first detection axis 32 of the first detection unit 30 by a predetermined distance L11 in the first direction (negative direction of the Z axis).

[0064] Figure 4 2 is a top view of the main part of the mapping device 20 observed along the first direction (from the positive direction side to the negative direction side of the Z axis). Figure 4 As shown, the first detection axis 32 of the first detection unit 30 is separated from the horizontal portion 28a of the mapping frame 28 by a length L12 in the second direction (negative direction of the Y axis), and the second detection axis 42 of the second detection unit 40 is separated from the horizontal portion 28a of the mapping frame 28 by a length L22 in the second direction (negative direction of the Y axis). In addition, Figure 4 The length L12, length L22, and the difference between the length L12 and the length L22 are shown relative to Figure 2 The first length L1, the second length L2, and the difference between the first length L1 and the second length L2 may be slightly different or the same.

[0065] Figure 5 2 is a conceptual diagram for explaining the shapes of the first convex portion 33b and the second convex portion 43b of the mapping device 20. Figure 5 As shown in FIG. 1 , the first convex portion 33b and the second convex portion 43b are both part of the sensor mounting portion 60, and the first convex portion 33b and the second convex portion 43b are formed of an integral component. The sensor mounting portion 60 is fixed to the horizontal portion 28a of the mapping frame 28 by bolts or the like. However, the shapes of the first convex portion 33b and the second convex portion 43b of the mapping device 20 are not limited to the following. Figure 5 In the shape shown, the first protrusion 33b and the second protrusion 43b may be formed by separate components.

[0066] Figure 6This is a conceptual diagram for explaining the state in which the mapping device 20 detects the first object 81a and the second object 82a of different sizes. Figure 6 As shown, the opening width W12 of the second container 90 for accommodating the second object 82a of a small size in the third direction (the negative direction of the X axis) is narrower than the opening width of the first container 70 for accommodating the first object 81a of a large size. Therefore, in the mapping device 20 used for both the first object 81a and the second object 82a of different sizes, in order for the second convex portions 43a and 43b to enter the second container 90 of a narrow opening width, there is a restriction that the interval in the third direction of the second convex portions 43a and 43b, that is, the first interval W1, cannot be larger than the opening width W12 of the second container 90.

[0067] Fig.10 This is a conceptual diagram comparing a mapping device 920 of a comparative example having only the second detection unit 40 and the mapping device 20 of the embodiment. Fig.10 (a)~ Fig.10 (c) shows the positional relationship between the first detection unit 30, the second detection unit 40 and the third detection unit 50 and the first object 81a, 81ab, 81ac and the second object 82ab during the detection operation. Fig.10 As shown in (a), even if the mapping device 920 has only the second detection unit 40 but no first detection unit, if only the second object 82a of a small size is detected, the permissible range of the protrusion amount (position deviation amount in the positive direction of the Y axis) of the object is large. That is, if only the second object 82a is detected, even if the mapping device 920 of the comparative example is not provided by the frame portion 16 (refer to Figure 1 ) etc. (when the protrusion amount is detected by the third detection shaft 52 of the third detection unit 50 (when the second object 82a is at a position closer to the standard position represented by the solid line than the second object 82ab represented by the double-dashed line), no contact between the second protrusions 43a, 43b and the second object 82a occurs.

[0068] However, if Fig.10 As shown in (b), when the mapping device 920 detects a large first object 81a, the permissible range of the protrusion amount of the object is smaller than when the second object 82a is small. That is, when detecting the first object 81a, in the mapping device 920 of the comparative example, even if the first object 81a is not disposed on the frame portion 16 (refer to Figure 1) etc., may also cause the second convex portions 43a, 43b to contact the first object 81ab as shown by the double-dashed line, as shown by the arrow 99. In addition, if the mapping device is dedicated to the first object 81a of a large size, the interval between the second convex portions 43a, 43b in the third direction can be increased to correspond to it, but in a dual-purpose mapping device, it is difficult to increase the interval between the second convex portions 43a, 43b.

[0069] Therefore, if Figure 3 As shown, the mapping device 20 of the first embodiment includes a first detection unit 30 (hatch line), and the first detection unit 30 has first protrusions 33a and 33b whose protrusion length (first length L1) in the second direction (Y-axis negative direction side) is shorter than that of the second detection unit 40. Fig.10 As shown in (c), since the protrusion length in the second direction of the first detection portion 30 is shorter than that of the second detection portion 40, if the protrusion amount is not detected by the third detection axis 52 of the third detection portion 50 (the position of the first object 81a which is closer to the standard position shown by the solid line than the first object 81ab shown by the double dotted line), there is no contact between the first protrusions 33a, 33b and the first object 81a.

[0070] like Fig.10 As shown in (c), the first detection axis 32 of the first detection unit 30 is located between the second detection axis 42 of the second detection unit 40 and the third detection axis 52 of the third detection unit 50 in the second direction. Thus, the first detection unit 30 can detect an object (in the middle of the first detection axis 52) with a protruding amount that may contact the second convex portions 43a and 43b, even though it is not detected by the third detection unit 50 (third detection axis 52), for a large first object 81a. Fig.10 When the first detection unit 30 detects such first objects 81ab and 81ac, the mapping device 20 can prevent the second protrusions 43a and 43b from contacting the first object 81a by stopping the movement (descending) of the mapping frame 28.

[0071] In addition, the third detection unit 50 is arranged from the container center axis 76 (see Figure 1 ) to the third detection axis 52 (refer to Fig.10 ) is longer than the shortest distance from the container center axis 76 to the first detection axis 32 which is the detection position of the first detection unit 30 and the second detection axis 42 which is the detection position of the second detection unit 40. Figure 1As shown, the third detection portion 50 has, for example, a third detection axis 52 that passes through the vicinity of the center of the opening of the frame portion 16 and extends in the Z-axis direction.

[0072] Below, use Figure 7 to Figure 9 , an example of the detection operation of the storage state of the first object 81a performed by the mapping device 20 is described. Figure 7 81a in the mapping device 20. Figure 7 In the first stage shown, the first container 70 containing a plurality of first objects 81a is placed on the placement section 19 of the load port device 10, but the cover 74 of the first container 70 is closed and the first container 70 is not connected to the frame section 16 of the load port device 10. Figure 7 In the state shown, the mapping device 20 itself has not started the detection action.

[0073] Figure 8 2 shows the second stage of the detection operation of the substrate 80 in the mapping device 20. Figure 8 In the second stage shown, the first container 70 placed on the placement portion 19 is connected to the frame portion 16, and the cover 74 of the first container 70 is opened through the door 15. Figure 7 As shown, after the door 15 is engaged with the cover 74 of the first container 70 in the state of being engaged with the frame portion 16, as shown in FIG. Figure 8 As shown, the door 15 is introduced to the positive direction side of the Y axis by the third moving mechanism 23, and the cover 74 of the first container 70 is opened.

[0074] Furthermore, the second moving mechanism 24 of the mapping device 20 moves the horizontal portion 28a of the mapping frame 28 in the second direction (the negative direction of the Y axis) to insert at least a portion of the first detection unit 30 and the second detection unit 40 fixed to the horizontal portion 28a of the mapping frame 28 into the first container 70. Figure 6 As shown, the second detection axis 42 of the second detection unit 40 is arranged above the first object 81 a accommodated in the first container 70 .

[0075] In addition, the second moving mechanism 24 moves the horizontal portion 28a of the mapping frame 28 in the Y-axis direction by rotating the mapping frame 28 or moving the mapping frame 28 parallel to the Y-axis direction. In addition, the second moving mechanism 24 moves the horizontal portion 28a of the mapping frame 28 in the second direction (Y-axis negative direction side) independently of the opening operation of the door 15 performed by the third moving mechanism 23.

[0076] Fig. 9 3 shows the third stage of the detection operation of the first object 81a performed by the mapping device 20. Fig. 9In the third stage shown in FIG. 1 , the mapping frame 28 is moved in the first direction (negative direction of the Z axis) by the first moving mechanism 22 so that Figure 8 The first and second detection units 30 and 40 are arranged at a position higher than the first object 81a accommodated in the uppermost shelf. Fig. 9 As shown, the first object 81a is moved to a position lower than the first object 81a accommodated in the shelf at the lowest stage.

[0077] That is, the first moving mechanism 22 moves the first detection unit 30 and the second detection unit 40 along the first direction as the arrangement direction in such a manner that the second detection axis 42 intersects the first object 81a as the detection target one by one in sequence. At this time, the second sensor units 44a and 44b of the second detection unit 40 are moved to Figure 7 to Figure 9 The computing unit 27 of the mapping device 20 shown in the figure outputs a detection signal that changes with shielding by the first object 81 a. The mapping device 20 also includes a sensor position detection unit 21 that detects the position of the second detection unit 40 in the Z-axis direction and outputs it to the computing unit 27 .

[0078] The calculation unit 27 detects the storage state of the first object 81a stored in the first container 70 using the detection signal from the second detection unit 40 and the position information from the sensor position detection unit 21. Figure 7 to Figure 9 As shown, the mapping device 20 includes a mapping control unit 29 including a calculation unit 27, a storage unit 25, a movement control unit 26, etc. The mapping control unit 29 is composed of, for example, a microcontroller or a memory.

[0079] The storage unit 25 stores the second detection result, which is the detection result of the first object 81a by the second detection unit 40. The first detection result, which is the detection result of the first object 81a contained in the first container 70 by the first detection unit 30, is input to the movement control unit 26. Furthermore, when the first detection result indicates the detection of the first object 81a by the first sensor units 34a and 34b, the movement control unit 26 moves the mapping frame 28 downward by a predetermined distance L11 (refer to Figure 3 ), the movement of the mapping frame 28 can be stopped before the movement control unit 26 is completed. In addition, the movement and stopping of the mapping frame 28 performed by the movement control unit 26 can be performed directly from the mapping control unit 29, and can also be performed from the mapping control unit 29 via the loading port control unit 18 that controls the entire loading port device 10.

[0080] In addition, the second object 82a (see Figure 6 ) can also be detected in the same manner as the second object 82a described above. Fig.10 As shown in (a), when all the second objects 82a that may collide with the second convex parts 43a and 43b can be detected by the third detection unit 50, the detection may be performed without operating the first detection unit 30. In addition, for example, when the second container 90 for accommodating the second objects 82a is an open wafer cassette, the mapping device 20 or the load port device 10 may rotate the second container 90 on the placement unit 19 by 90 degrees to change the arrangement direction of the second objects 82a from the Y-axis direction to the Z-axis direction.

[0081] The mapping device 20 of the present embodiment has a first detection unit 30 and a second detection unit 40 which are arranged at different positions at a predetermined distance L11 with respect to a first direction (negative direction of the Z axis) which is an overlapping direction of objects, and the protruding length (second length L2) of the second protrusions 43a and 43b is longer than the protruding length (first length L1) of the first protrusions 33a and 33b. Since the first detection unit 30 has a short protruding length, it is possible to avoid contact with the objects 81a and 82a protruding from the storage position of the container and detect the objects 81a and 82a which may collide with the second detection unit 40 with a long protruding length, and prevent the collision of the objects 81a and 82a and the second detection unit 40 through appropriate actions of the mapping frame 28 and the like. In addition, by making the positions of the first protrusions 33a and 33b and the second protrusions 43a and 43b in the third direction (negative direction of the X axis) the same, it is possible to maximize the use of the opening width W12 (refer to Figure 6 ) is used to enlarge the interval (W1) in the third direction between the second protrusions 43a and 43b. Although it is used together with the second object 82a, the allowable range of the protrusion amount (position deviation amount in the positive direction of the Y axis) of the first object 81a can be expanded.

[0082] Second embodiment

[0083] Fig.11 This is a conceptual diagram comparing the mapping device 20 of the first embodiment and the mapping device 120 of the second embodiment. Fig.11 (a) shows the shapes of the first convex parts 33a, 33b and the second convex parts 43a, 43b of the mapping device 20 of the first embodiment and the first direction surface 92 of the second container 90 overlapped with each other. Fig.11 As shown in (a), in the first mapping device 20, the interval between the second convex portions 43a and 43b in the third direction is substantially consistent with the first interval W1 between the first convex portions 33a and 33b in the third direction. In this case, the interval between the second convex portions 43a and 43b in the third direction can be lengthened, but when viewed from the Z-axis direction, the front ends of the second convex portions 43a and 43b partially overlap with the first direction upper surface 92 of the second container 90.

[0084] Therefore, in Fig.11 In (b), as shown by arrow 97, in the mapping device 20, when the first detection unit 30 and the second detection unit 40 are inserted into the second container 90, it is necessary to do so after the height of the first detection unit 30 and the second detection unit 40 matches the first direction upper surface 92 of the second container 90. On the other hand, Fig.11 (c) shows the shape of the first convex parts 133a and 133b and the second convex parts 143a and 143b of the mapping device 120 of the second embodiment superposed on the shape of the upper surface 92 in the first direction of the second container 90.

[0085] like Fig.11 As shown in (c), in the mapping device 120 of the second embodiment, the pair of second protrusions 143a and 143b of the second detection unit 140 are arranged in the third direction with a second interval W2 narrower than the first interval W1. In the mapping device 120, when viewed from the Z-axis direction, Fig.11 Unlike (a), the front ends of the second protrusions 143 a and 143 b do not overlap with the first direction upper surface 92 of the second container 90 .

[0086] Therefore, in Fig.11 In (d), as shown by arrow 98, in the mapping device 120, when the first detection unit 30 and the second detection unit 40 are inserted into the second container 90, the first detection unit 30 and the second detection unit 40 may be lowered in the Z-axis direction without matching the height of the first detection unit 30 and the second detection unit 40 with the first direction upper surface 92 of the second container 90. In such a mapping device 120, for example, the movement of the mapping frame 28 during detection can be made common when the detection is performed on the first object 81a accommodated in the first container 70 and when the detection is performed on the second object 82a accommodated in the second container 90.

[0087] Fig.12 is a schematic perspective view showing the main parts of the mapping device 120 according to the second embodiment. Fig.13 FIG. 1 is a partial enlarged view of the first convex portion 133b and the first sensor portion 134b and the second convex portion 143b and the second sensor portion 144b in the mapping device 120. Fig.12 and Fig.13 As shown, the mapping device 120 is also connected to Figure 2 The mapping device 20 shown also includes a first detection unit 130 and a second detection unit 140 .

[0088] like Fig.12As shown, the first detection unit 130 includes a pair of first protrusions 133a, 133b protruding from the horizontal portion 28a of the mapping frame 28 by a first length L1 in the second direction (the negative direction of the Y axis), and first sensor units 134a, 134b provided near the front ends of the pair of first protrusions 133a, 133b. The pair of first protrusions 133a, 133b of the first detection unit 130 are arranged at a first interval W1 in a third direction (the negative direction of the X axis) perpendicular to the first direction and the second direction (see FIG. Fig.11 (c)).

[0089] One of the first sensor parts 134a and 134b has a light emitting element, and the other has a light receiving element. The first detection part 130 detects the objects 81a and 82a that protrude from the storage positions of the first and second containers 70 and 90 exceeding a predetermined length by detecting the objects 81a and 82a that cover the first detection axis 132 connecting the pair of first sensor parts 134a and 134b.

[0090] In addition, if Fig.12 As shown in FIG. 1 , the second detection unit 140 is disposed above the first detection unit 130 (on the positive Z-axis direction side). Fig.12 and Fig.13 As shown, the second detection unit 140 includes a pair of second protrusions 143a, 143b protruding from the horizontal portion 28a of the mapping frame 28 in the second direction (Y-axis negative direction side) by a second length L2 longer than the first length L1, and second sensor units 144a, 144b provided near the respective front ends of the pair of second protrusions 143a, 143b. The pair of second protrusions 143a, 143b of the second detection unit 140 are arranged in the third direction with a second interval W2 narrower than the first interval W1 (see Fig.11 (c)). In addition, Figure 3 Similarly to the mapping device 20 shown, the second detection unit 140 is arranged at a position different from the first detection unit 30 by a predetermined distance in the first direction (Z-axis negative direction). The second detection unit 140 detects the storage state of the objects 81a and 82a by detecting the position or time when the objects 81a and 82a cover the second detection axis 142 connecting the pair of second sensor units 144a and 144b.

[0091] Fig.14 The positional relationship between the first detection unit 130 and the second detection unit 140 and the first objects 81a, 81ab, and 81ac during the detection operation is shown. Fig.14 The first detection unit 130 shown is also Fig.10Similarly, the first detection unit 30 shown in the figure can detect an object (in the position of the first object 81a) of a large size that is not detected by the third detection shaft 52 of the third detection unit but may contact the protruding amount of the second convex parts 143a and 143b. Fig.14 The first object 81ab and the first object 81ac are located intermediate between the first object 81ab and the first object 81ac.

[0092] However, in Fig.14 In the mapping device 120 shown in FIG. 1 , the second interval W2 in the third direction of the second detection unit 140 is greater than Fig.10 The interval (first interval W1) in the third direction of the second detection unit 40 in the mapping device 20 shown in (c) is narrow. Therefore, the mapping device 120 has a narrower allowable range of the protrusion amount of the first object that does not contact the second protrusions 143a and 143b of the second detection unit 140 than the mapping device 20, and it is necessary to narrow the interval in the Y-axis direction between the first detection axis 132 and the second detection axis 142.

[0093] The mapping device 120 of the second embodiment is similar to the mapping device 20 except that the pair of second protrusions 143a and 143b of the second detection unit 140 are arranged with a second interval W2 narrower than the first interval W1. Regarding the common points with the mapping device 20, the mapping device 120 achieves the same effects as the mapping device 20.

[0094] The present invention has been described above by showing the embodiments, but the present invention is not limited to the above-mentioned embodiments, and of course also includes other embodiments or modified examples. For example, in the mapping device 20, 120, the first direction is the downward direction, and the first detection unit 30, 130 is arranged below the second detection unit 40, 140 by a specified distance L11, but it can also be the opposite, the first direction is upward, and the first detection unit is arranged above the second detection unit by a specified distance. When the first direction is downward, the mapping frame 28 of the mapping device 20, 120 detects the objects 81a, 82a while moving downward. On the other hand, when the first direction is upward, the mapping frame of the mapping device detects the object while moving upward.

[0095] In addition, the shape of the sensor mounting portion 60 or the mapping frame 28 of the mapping device 20 or 120 is not limited to Figure 5 or Fig.13 As shown, it can be appropriately changed according to the shapes of the first and second sensor parts 33a, 33b, 133a, 133b, 34a, 34b, 134a, 134b, etc. In addition, the first detection axis 32, 132 and the second detection axis 42, 142 of the first detection part 30, 130 and the second detection part 40, 140 can also be parallel to the third direction, but can also be inclined relative to the third direction or the horizontal direction.

[0096] The first sensor unit 33a, 33b, 133a, 133b and the second sensor unit 43a, 43b, 143a, 143b are not limited to the combination of light-emitting elements and light-receiving elements, but may also be a combination of light-emitting elements, light-receiving elements and reflecting elements, or a combination of a generating unit and a detecting unit for electromagnetic waves other than light, etc.

[0097] Description of Reference Numerals

[0098] 10... Loading port device

[0099] 15...Door

[0100] 16……Framework

[0101] 18……Loading port control unit

[0102] 19……Loading section

[0103] 20, 120... Mapping device

[0104] 21……Sensor position detection unit

[0105] 22……First moving mechanism

[0106] 23……The third moving mechanism

[0107] 24... Second moving mechanism

[0108] 25……Storage

[0109] 26……Mobile Control Department

[0110] 27……Calculation unit

[0111] 28……Mapping Framework

[0112] 28a……Horizontal

[0113] 29……Mapping control unit

[0114] 30, 130...First Detection Department

[0115] 32, 132...First detection axis

[0116] 33a, 33b, 133a, 133b ... first convex portion

[0117] 34a, 34b, 134a, 134b ... first sensor unit

[0118] L1...first length

[0119] W1……First interval

[0120] L12, L11, L22...length

[0121] 40, 140... Second detection unit

[0122] 42, 142... Second detection axis

[0123] 43a, 43b, 143a, 143b ... second convex portion

[0124] 44a, 44b, 144a, 144b ... second sensor unit

[0125] L2... Second length

[0126] R2...Second test result

[0127] 50……The third detection department

[0128] 52……The third detection axis

[0129] 70...First Container

[0130] 70a... Main opening

[0131] 74... Cover

[0132] 76……Container center axis

[0133] 81a……First object

[0134] 82a……The second object

[0135] 90...Second container

[0136] 92……First direction upper surface

[0137] W12...Opening width

[0138] 97, 98, 99...arrows

Claims

1. A mapping device, wherein: A mapping device for detecting a storage state of a plurality of objects in a container capable of storing the plurality of objects at predetermined intervals along a first direction, comprising: a mapping frame that moves along the first direction and a second direction that is substantially perpendicular to the first direction; a first detection unit including a pair of first protrusions and a first sensor unit, wherein the pair of first protrusions protrude from the mapping frame by a first length in the second direction and are arranged at a first interval in a third direction substantially perpendicular to the first direction and the second direction, and wherein the first sensor unit is provided near each front end of the pair of first protrusions; as well as A second detection unit, which has a pair of second protrusions and a second sensor unit, and is arranged at a position different from the first detection unit at a prescribed distance in the first direction, the pair of second protrusions protruding from the mapping frame in the second direction by a second length longer than the first length, and is arranged in the third direction at the same position as the first protrusion, and the second sensor unit is provided near each front end of the pair of second protrusions.

2. The mapping device according to claim 1, wherein: The first direction is a downward direction, and the first detection unit is arranged below the second detection unit by the predetermined distance, or, The first direction is an upward direction, and the first detection unit is arranged above the second detection unit by the predetermined distance.

3. The mapping device according to claim 1, wherein: The device includes a storage unit that stores a second detection result that is a detection result of the object by the second detection unit.

4. The mapping device according to claim 1, in, The invention comprises: a movement control unit which, when a first detection result as a detection result of the object performed by the first detection unit is input and the first detection result indicates detection of the object performed by the first sensor unit, stops the movement of the mapping frame from the time when the object is detected by the first sensor unit and before the mapping frame moves the specified distance.

5. The mapping device according to claim 1, wherein: The invention comprises a third detection portion having a shortest distance from a central axis of the container parallel to the first direction to a detection position longer than that of the first detection portion and the second detection portion.

6. A load port device, wherein: have: The mapping device according to any one of claims 1 to 5; a placing portion on which the container is placed; and A door opens and closes the lid of the container.

7. A mapping device, wherein: A mapping device for detecting a storage state of a plurality of objects in a container capable of storing the plurality of objects at predetermined intervals along a first direction, comprising: a mapping frame movable along the first direction and a second direction substantially perpendicular to the first direction; a first detection unit including a pair of first protrusions and a first sensor unit, wherein the pair of first protrusions protrude from the mapping frame by a first length in the second direction and are arranged at a first interval in a third direction substantially perpendicular to the first direction and the second direction, and wherein the first sensor unit is provided near each front end of the pair of first protrusions; as well as A second detection unit includes a pair of second protrusions and a second sensor unit, and is arranged at a position different from the first detection unit at a prescribed distance in the first direction, the pair of second protrusions protruding from the mapping frame in the second direction by a second length longer than the first length, and being arranged at a second interval narrower than the first interval in the third direction, and the second sensor unit is provided near each front end of the pair of second protrusions.

8. The mapping device according to claim 7, wherein: The first direction is a downward direction, and the first detection unit is arranged below the second detection unit by the predetermined distance, or, The first direction is an upward direction, and the first detection unit is arranged above the second detection unit by the predetermined distance.

9. The mapping device according to claim 7, wherein: The device includes a storage unit that stores a second detection result that is a detection result of the object by the second detection unit.

10. The mapping device according to claim 7, in, The invention comprises: a movement control unit which, when a first detection result as a detection result of the object performed by the first detection unit is input and the first detection result indicates detection of the object performed by the first sensor unit, stops the movement of the mapping frame from the time when the object is detected by the first sensor unit and before the mapping frame moves the specified distance.

11. The mapping device according to claim 7, wherein: The invention comprises a third detection portion having a shortest distance from a central axis of the container parallel to the first direction to a detection position longer than that of the first detection portion and the second detection portion.

12. A load port device, wherein: have: The mapping device according to any one of claims 7 to 11; a placing portion on which the container is placed; and A door opens and closes the lid of the container.

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