Substrate transfer method, substrate transfer system, and readable storage medium

Abstract

The invention provides a substrate handover method, a substrate handover system and a readable storage medium. The method comprises the steps that a closed-loop mode is adopted to control a lifting mechanism to move to a first target station; an open-loop mode is adopted to control the lifting mechanism to output corresponding output force in each forward output open-loop control period according to a first preset forward output force rule until the position of the lifting mechanism reaches or is higher than a second target station, when a first preset condition is met, vacuum of the lifting mechanism is started, and after the lifting mechanism adsorbs the substrate to be transferred, the vacuum of the lifting mechanism is started; closing the vacuum of a bearing piece for bearing the substrate to be connected; and adopting an open-loop mode to control the lifting mechanism to output corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met. According to the invention, the problem of adaptability of the machine to different types of substrates can be solved, smooth output in the handover process is ensured, and stable handover of the substrates is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing and manufacturing, and in particular to a substrate handover method, a substrate handover system and a readable storage medium. Background Art

[0002] As semiconductor processes become increasingly sophisticated and productivity requirements continue to expand, the automation requirements for semiconductor manufacturing equipment are also increasing. In semiconductor equipment, the substrate handover system cooperates with the transfer robot to realize the substrate handover function. When the substrate handover system hands over the substrate, it is necessary to change the position of the suction nozzle by lifting and lowering the substrate lifting mechanism (E-pin) to adsorb and release the substrate.

[0003] In the process of substrate handover between the substrate handover system and the transfer robot, the weight of the substrate will affect the actual position of the bottom of the substrate, and thus affect the first target handover station. In addition, the basic types of substrates actually used include: smiley face substrates (such as Figure 1a As shown), corrugated substrate (such as Figure 1b As shown), crying face-shaped substrate (such as Figure 1c ) and planar substrates (such as Figure 1d The warpage of different types of substrates varies greatly, and the flatness is usually between 100μm and 3mm. Therefore, the type of substrate will also have a great impact on the actual handover position. In addition, the rubber ring of the suction cup will also affect the actual first target handover position of the substrate.

[0004] If the handover position is not appropriate during the handover process, vacuum leakage will occur, affecting adsorption or causing the substrate to move. In the prior art, the lifting mechanism (E-pin) is controlled by a position ring. However, the release of the suction cup rubber ring is affected by the substrate material, the warping amount of the substrate, and the warping shape, resulting in uncertainty in the actual release time and release speed, and the smoothness of the handover process cannot be guaranteed. The lifting mechanism (E-pin) is prone to a large output in a short period of time, resulting in unreliable handover process, inability to complete the stable transfer of the substrate, and excessive output damaging the circuit on the substrate.

[0005] Specifically, since there is still residual vacuum suction after the vacuum of the suction cup is disconnected, and it is impossible to detect the moment when the vacuum suction actually disappears. In addition, it is impossible to predict the movement trajectory of the substrate under the action of the deformation elastic force of the substrate, the elastic force of the rubber ring, and the residual vacuum suction during the release of the substrate from the suction cup. Therefore, it is impossible to know in advance the closed-loop target position of each calculation moment of the detachment process, and thus it is impossible to achieve the smooth detachment of the substrate from the suction cup during the entire unloading stage. If the lifting time is too early, the motor of the lifting mechanism (E-pin) will not be able to lift up, or it will be broken; if the lifting time is too late, the lifting mechanism (E-pin) and the contact part of the substrate will remain in a low position, and the contact part between the outer ring of the substrate and the rubber ring has been detached under the action of the rubber ring, which is prone to vibration and the lifting of the substrate. In addition, since the prior art does not take into account the impact of substrate warping, it cannot guarantee a smooth handover of the substrate.

[0006] It should be noted that the information disclosed in the background technology section of the invention is only intended to deepen the understanding of the general background technology of the invention, and should not be regarded as an admission or suggestion in any form that the information constitutes prior art already known to those skilled in the art. Summary of the invention

[0007] The object of the present invention is to provide a substrate handover method, a substrate handover system and a readable storage medium, which can solve the adaptability problem of a machine to different types of substrates, ensure smooth output during the handover process, and achieve smooth handover of substrates.

[0008] To achieve the above object, the present invention provides a substrate handover method, comprising:

[0009] The lifting mechanism is controlled to move to a first target station in a closed-loop mode, wherein the first target station is located below the substrate to be delivered and the height difference between the first target station and the load station when the lifting mechanism just contacts the substrate to be delivered is within a first preset range;

[0010] The lifting mechanism is controlled in an open-loop mode to output a corresponding force in each forward force open-loop control cycle according to a first preset forward force rule until the position of the lifting mechanism reaches or is higher than a second target position, and when a first preset condition is met, the vacuum of the lifting mechanism is turned on, and after the lifting mechanism absorbs the substrate to be delivered, the vacuum of the carrier for carrying the substrate to be delivered is turned off, wherein the second target position is located above the loading position, and the height difference between the two is equal to a first preset value;

[0011] The lifting mechanism is controlled in an open-loop mode to output a corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met.

[0012] Optionally, the adopting open-loop mode to control the lifting mechanism to output a corresponding output in each forward output open-loop control cycle according to a first preset forward output rule until the position of the lifting mechanism reaches or exceeds a second target position includes:

[0013] Controlling the lifting mechanism to output a corresponding output force in each forward output open-loop control cycle according to a first preset forward output sub-rule until the lifting mechanism absorbs the substrate to be delivered;

[0014] The lifting mechanism is controlled to output a corresponding force in each forward force open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred according to a second preset forward force sub-rule, until the position of the lifting mechanism reaches or is higher than the second target position.

[0015] Optionally, controlling the lifting mechanism to output a corresponding output in each forward output open-loop control cycle according to a first preset forward output sub-rule until the lifting mechanism absorbs the substrate to be delivered includes:

[0016] According to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred.

[0017] Optionally, when the first preset condition is met, turning on the vacuum of the lifting mechanism includes:

[0018] When the open-loop control reaches a first preset output increment maximum open-loop control cycle, the vacuum of the lifting mechanism is turned on;

[0019] According to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred, including:

[0020] Determine the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the first preset output cycle increment;

[0021] According to the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle, control the lifting mechanism to output a corresponding output in the corresponding forward output open-loop control cycle until the first preset output increment maximum open-loop control cycle is reached;

[0022] The lifting mechanism is controlled to output the output corresponding to the first preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred.

[0023] Optionally, the step of determining the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the first preset output cycle increment includes:

[0024] Determining a first initial open-loop output according to the output of the lifting mechanism in the previous closed-loop control cycle and a first preset output increment;

[0025] The output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle is determined according to the first initial open-loop output and the first preset output cycle increment.

[0026] Optionally, controlling the lifting mechanism to output a corresponding force in each forward force open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred according to a second preset forward force sub-rule until the position of the lifting mechanism reaches or is higher than the second target position includes:

[0027] According to the output of the lifting mechanism in the previous forward force open-loop control cycle and the increase in the second preset output cycle, the lifting mechanism is controlled to output a corresponding output in each forward force open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target position.

[0028] Optionally, according to the output of the lifting mechanism in the previous positive output open-loop control cycle and the increase in the second preset output cycle, controlling the lifting mechanism to output a corresponding output in each positive output open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target position, includes:

[0029] Determining a second initial open-loop output according to the output of the lifting mechanism in the previous forward output open-loop control cycle and a second preset output increment;

[0030] According to the second initial open-loop output and the second preset output cycle increment, determine the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred and the second preset output increment maximum open-loop control cycle;

[0031] According to the output of the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred and the second preset output increment maximum open-loop control cycle, the lifting mechanism is controlled to output the corresponding output in the corresponding positive output open-loop control cycle until the second preset output increment maximum open-loop control cycle is reached;

[0032] The lifting mechanism is controlled to output the output corresponding to the second preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the position of the lifting mechanism reaches or exceeds the second target position.

[0033] Optionally, the output corresponding to the maximum open-loop control period of the second preset output increment is greater than the output when the lifting mechanism belt piece is closed-loop and stationary at the second target workstation.

[0034] Optionally, the adopting of an open-loop mode to control the lifting mechanism to output a corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met includes:

[0035] According to the output of the lifting mechanism in each reverse output open-loop control cycle and the first target number of reverse output open-loop control cycles, the lifting mechanism is controlled to output the corresponding output in each reverse output open-loop control cycle until the movement speed of the lifting mechanism is less than or equal to 0, or the number of reverse output open-loop control cycles reaches the first target number.

[0036] To achieve the above object, the present invention also provides another substrate handover method, comprising:

[0037] A closed-loop control method is adopted to control the lifting mechanism to move to a third target station, wherein the lifting mechanism adsorbs the substrate to be delivered, the third target station is located above a carrier for carrying the substrate to be delivered, and the height difference between the third target station and the carrying station when the carrier just contacts the substrate to be delivered is within a second preset range;

[0038] The lifting mechanism is controlled in an open-loop mode to output a corresponding force in each positive force open-loop control cycle according to a second preset positive force rule until the position of the lifting mechanism reaches or is lower than a fourth target position, and when the second preset condition is met, the vacuum of the carrier is turned on, and after the carrier absorbs the substrate to be transferred, the vacuum of the lifting mechanism is turned off, wherein the fourth target position is located below the carrier position, and the height difference between the fourth target position and the carrier position is equal to the second preset value;

[0039] The lifting mechanism is controlled in an open-loop mode to output a corresponding output according to a second preset reverse output rule until a second preset closed-loop control switching condition is met.

[0040] In order to achieve the above-mentioned purpose, the present invention also provides a substrate handover system, including a carrier, a lifting mechanism, a vacuum device and a controller, wherein the lifting mechanism and the vacuum device are both communicatively connected to the controller, the carrier is used to carry the substrate, and the vacuum device is used to control the vacuum pressure of the lifting mechanism and the carrier, and the controller includes a processor and a memory, and a computer program is stored in the memory. When the computer program is executed by the processor, the substrate handover method described in any one of the above items is implemented.

[0041] To achieve the above object, the present invention further provides a readable storage medium, wherein the readable storage medium stores a computer program, and when the computer program is executed by a processor, the substrate handover method described in any one of the above items is implemented.

[0042] Compared with the prior art, the substrate handover method, substrate handover system and readable storage medium provided by the present invention have the following beneficial effects:

[0043] The substrate handover method provided by the present invention first adopts a closed-loop mode to control the lifting mechanism to move to a first target station, wherein the first target station is located below the substrate to be handed over and the height difference between the first target station and the load station when the lifting mechanism just contacts the substrate to be handed over is within a first preset range; then adopts an open-loop mode to control the lifting mechanism to output a corresponding output in each forward output open-loop control cycle according to a first preset forward output rule until the position of the lifting mechanism reaches or is higher than a second target station, and when the first preset condition is met, the vacuum of the lifting mechanism is turned on, and after the lifting mechanism adsorbs the substrate to be handed over, the vacuum of the carrier used to support the substrate to be handed over is turned off, wherein the second target station is located above the load station, and the height difference between the two is equal to a first preset value; finally, the open-loop mode is used to control the lifting mechanism to output a corresponding output according to a first preset reverse output rule until the first preset closed-loop control switching condition is met. Therefore, the substrate handover method provided by the present invention sets a trigger condition to perform open-loop control or closed-loop control under different conditions, so as to ensure that the lifting mechanism can smoothly lift the substrate and ensure that the substrate will not be lifted up, thereby realizing a smooth handover of the substrate, minimizing the force on the substrate during the handover process, and ensuring that the substrate will not be damaged during the handover process, effectively solving the adaptability problem of the machine to different types of substrates. In addition, the substrate handover method provided by the present invention controls the lifting mechanism in an open-loop mode to output the corresponding output according to the first preset forward output rule in each forward output open-loop control cycle until the position of the lifting mechanism reaches or exceeds the second target position, and after the position of the lifting mechanism reaches or exceeds the second target position, controls the lifting mechanism in an open-loop mode to output the corresponding output according to the first preset reverse output rule until the first preset closed-loop control switching condition is met, thereby not only ensuring that the lifting mechanism outputs smoothly during the handover process of the substrate, thereby further realizing a smooth handover of the substrate, but also allowing the handover position to be within a certain error range. In addition, the present invention uses a closed-loop mode to control the lifting mechanism to move to the first target position (that is, to a position close to the substrate to be transferred), thereby ensuring that the lifting mechanism is definitely below the substrate to be transferred and will not cause movement errors due to obstruction by the substrate; after the position of the lifting mechanism reaches or exceeds the second target position (at this time the suction column has adsorbed the substrate), the lifting mechanism is controlled in an open-loop mode to output the corresponding output according to the first preset reverse output rule, which can reduce the forward speed of the lifting mechanism, thereby ensuring that the closed-loop control process can be directly switched to subsequently, so as to ensure that the transfer of the substrate can be completed smoothly.

[0044] Since the substrate handover system and the readable storage medium provided by the present invention belong to the same inventive concept as the substrate handover method provided by the present invention, the substrate handover system and the readable storage medium provided by the present invention at least have all the beneficial effects of the substrate handover method provided by the present invention. For details, please refer to the relevant description above, so the beneficial effects of the substrate handover system and the readable storage medium provided by the present invention will not be described one by one here. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1a is a schematic diagram of a smiley face-shaped substrate;

[0046] Figure 1b is a schematic diagram of a corrugated substrate;

[0047] Figure 1c A schematic diagram of a crying face-shaped substrate;

[0048] Figure 1d is a schematic diagram of a planar substrate;

[0049] Figure 2 A schematic diagram of a process flow of a substrate handover method according to an embodiment of the present invention;

[0050] Figure 3 A schematic diagram of a process of taking a film by a lifting mechanism provided in one embodiment of the present invention;

[0051] Figure 4 A schematic diagram of the structure of a suction cup provided for a specific example of the present invention;

[0052] Figure 5 A single-loop control mode data transmission link diagram provided for a specific example of the present invention;

[0053] Figure 6 A data transmission link diagram of a dual-loop control method provided for a specific example of the present invention;

[0054] Figure 7 A schematic diagram of the output change of the lifting mechanism in the open loop stage 1 provided by an embodiment of the present invention;

[0055] Figure 8 A schematic diagram of the output change of the lifting mechanism in the open loop stage 2 provided by an embodiment of the present invention;

[0056] Fig. 9 A schematic flow chart of a substrate handover method provided in another embodiment of the present invention;

[0057] Fig.10 A schematic diagram of a process of placing a film by a lifting mechanism provided in one embodiment of the present invention;

[0058] Fig.11A schematic diagram of the block structure of a substrate handover system provided in one embodiment of the present invention;

[0059] Fig.12 A schematic diagram of the block structure of a controller provided in one embodiment of the present invention.

[0060] The reference numerals are as follows:

[0061] Carrying member-10; sealing ring-11; through hole-12; vacuum hole-13;

[0062] Lifting mechanism - 20;

[0063] Vacuum device - 30;

[0064] Controller-40; processor-41; communication interface-42; memory-43; communication bus-44. DETAILED DESCRIPTION

[0065] The following is a further detailed description of the substrate handover method, substrate handover system and readable storage medium proposed in the present invention in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings are in a very simplified form and use non-precise proportions, which are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention. In order to make the purposes, features and advantages of the present invention more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention. Any modification of the structure, change of the proportional relationship or adjustment of the size, in the case of the same or similar effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical content disclosed by the present invention. The specific design features of the present invention disclosed herein include, for example, specific dimensions, directions, positions and shapes, which will be determined in part by the specific environment to be applied and used. And, in the embodiments described below, sometimes the same figure mark is used to represent the same part or part with the same function between different drawings, and its repeated description is omitted. In this specification, similar reference numerals and letters are used to refer to similar items, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures. In addition, if the method described herein includes a series of steps, the order of these steps presented herein is not necessarily the only order in which these steps can be performed, and some of the steps described may be omitted and / or some other steps not described herein may be added to the method.

[0066] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements. The singular forms "a", "an" and "the" include plural referents, the term "or" is generally used in a sense including "and / or", the term "several" is generally used in a sense including "at least one", the term "at least two" is generally used in a sense including "two or more", and the term "plurality" is generally used in a sense including "at least two".

[0067] It should also be noted that, in the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0068] The core idea of ​​the present invention is to provide a substrate handover method, a substrate handover system and a readable storage medium, which can solve the adaptability problem of the machine to different types of substrates, ensure smooth output during the handover process, and achieve smooth handover of the substrate.

[0069] Please continue to refer to Figure 2 , which is a schematic diagram of the process of a substrate handover method provided by an embodiment of the present invention. The substrate handover method provided in this embodiment is used to take a sheet (unload a sheet), such as Figure 2 As shown, the substrate handover method provided in this embodiment includes the following steps:

[0070] Step S110, controlling the lifting mechanism to move to a first target station in a closed-loop mode, wherein the first target station is located below the substrate to be transferred and a height difference between the first target station and a loading station when the lifting mechanism just contacts the substrate to be transferred is within a first preset range.

[0071] Step S120, adopting an open-loop mode to control the lifting mechanism to output a corresponding output in each forward output open-loop control cycle according to a first preset forward output rule until the position of the lifting mechanism reaches or is higher than a second target station, and when a first preset condition is met, turning on the vacuum of the lifting mechanism, and after the lifting mechanism adsorbs the substrate to be transferred, turning off the vacuum of the carrier for supporting the substrate to be transferred, wherein the second target station is located above the load station, and the height difference between the two is equal to a first preset value.

[0072] Step S130: adopting an open-loop mode to control the lifting mechanism to output a corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met.

[0073] Therefore, the substrate handover method provided in this embodiment sets trigger conditions to perform open-loop control or closed-loop control under different conditions, so as to ensure that the lifting mechanism can smoothly lift the substrate and ensure that the substrate will not be lifted up, thereby achieving a smooth handover of the substrate, minimizing the force on the substrate during the handover process, ensuring that the substrate will not be damaged during the handover process, and effectively solving the adaptability problem of the machine to different types of substrates. In addition, the substrate handover method provided by the present invention controls the lifting mechanism in an open-loop mode to output the corresponding output according to the first preset forward output rule in each forward output open-loop control cycle until the position of the lifting mechanism reaches or exceeds the second target position, and after the position of the lifting mechanism reaches or exceeds the second target position, controls the lifting mechanism in an open-loop mode to output the corresponding output according to the first preset reverse output rule until the first preset closed-loop control switching condition is met, thereby not only ensuring that the lifting mechanism outputs smoothly during the handover of the substrate, thereby further achieving a smooth handover of the substrate, but also allowing the position to be within a certain error range. In addition, the present invention uses a closed-loop mode to control the lifting mechanism to move to the first target position (that is, to a position close to the substrate to be transferred), thereby ensuring that the lifting mechanism is definitely below the substrate to be transferred and will not cause movement errors due to obstruction by the substrate; after the position of the lifting mechanism reaches or exceeds the second target position (at this time the suction column has adsorbed the substrate), the lifting mechanism is controlled in an open-loop mode to output the corresponding output according to the first preset reverse output rule, which can reduce the forward speed of the lifting mechanism, thereby ensuring that the closed-loop control process can be directly switched to subsequently, so as to ensure that the transfer of the substrate can be completed smoothly.

[0074] It should be noted that, as can be understood by those skilled in the art, the substrate handover method provided in this embodiment is suitable for a lifting mechanism (E-pin or EPIN) to receive a substrate (take up a substrate, put down a substrate) from a carrier (suction cup or robot fork) for carrying a substrate.

[0075] Please continue to refer to Figure 3 , which is a schematic diagram of the process of taking a film by a lifting mechanism provided by an embodiment of the present invention. Figure 3 As shown, in this embodiment, the closed-loop mode is mainly applicable to the lifting mechanism (E-pin or EPIN) independently moving to the bottom of the substrate (the first closed-loop movement, hereinafter referred to as closed-loop stage 1), and the lifting mechanism (E-pin or EPIN) moving with the film to other stations after taking the film (the second closed-loop movement), and the open-loop mode is mainly applicable to the transfer process of the substrate. It should also be noted that, as can be understood by those skilled in the art, after the first preset closed-loop control switching condition is met, the lifting mechanism will be triggered to enter the second closed-loop movement to control the lifting mechanism to move to other stations. In addition, it should be noted that although Figure 3 The description is made by taking the substrate to be bonded as a silicon wafer as an example, but as can be understood by those skilled in the art, the present invention does not limit the specific type of the substrate to be bonded.

[0076] Further, as can be understood by those skilled in the art, the load station load_pos when the lifting mechanism just contacts the substrate to be handed over can be obtained by calibration before the handover. It should be noted that the present invention does not limit the minimum and maximum values ​​of the first preset range. The minimum value of the first preset range can be 0, and the specific value of the maximum value of the first preset range can be adjusted according to actual conditions, as long as the minimum and maximum values ​​of the first preset range can satisfy the position where the first target station can be stably closed-loop operated under all extreme conditions. For example, the height difference between the first target station and the load station can be 0.5mm. At this time, the following relationship is satisfied between the first target station load_pos_sub and the load station load_pos:

[0077] load_pos_sub=load_pos-0.5mm

[0078] It should also be noted that the present invention does not limit the specific value of the first preset value. The first preset value can be determined by the maximum warping amount of the substrate and the maximum height difference of the rubber ring beyond the suction cup / piece fork (the first preset value can be equal to the sum of the maximum warping amount of the substrate and the maximum height difference of the rubber ring beyond the suction cup / piece fork). For example, the first preset value can be 3mm. At this time, the second target station (the station lifted by the lifting mechanism with the sheet) load_pos_sup and the load station load_pos satisfy the following relationship:

[0079] load_pos_sup=load_pos+0.3mm

[0080] Furthermore, the lifting mechanism includes a suction column (a suction nozzle is provided on the top of the suction column), a motor, a grating ruler, a guide rail, etc. The motor can drive the suction column to move up and down on the guide rail. The number of the suction columns is multiple, for example, the number of the suction columns is three, and the grating ruler is used for position feedback control (the displacement of the suction column can be measured by the grating ruler). Please continue to refer to Figure 4 , which is a schematic diagram of the structure of a suction cup provided by a specific example of the present invention. Figure 4 As shown, the suction cup has a through hole 12 opened along the axial direction, and the through hole 12 is arranged one by one with the suction column, and the suction column can pass through the through hole 12 to achieve the connection of the substrate. Figure 4 As shown, the suction cup is provided with a plurality of sealing rings 11, and the plurality of sealing rings 11 are distributed in a concentric ring shape on the suction cup. Figure 4 As shown, the suction cup is also provided with a plurality of vacuum holes 13. It should be noted that more structures of the lifting mechanism, the suction cup and the manipulator fork can refer to the relevant contents known to those skilled in the art, and will not be described in detail here. In addition, it should be noted that, as those skilled in the art can understand, the closed-loop control process of the lifting mechanism can be in two forms: single loop (position loop) and double loop (speed loop + position loop).

[0081] Please continue to refer to Figure 5 , a specific example of the present invention provides a single-loop (position loop) control mode data (including hardware signals, software calculation parameters) transmission link diagram. The servo cycle used in this control mode can be selected according to the specific hardware. Taking the servo cycle of 400us as an example, Figure 5As shown in the figure, when the mode switch is switched to the closed-loop mode, the grating ruler position calculation, speed calculation, position set point calculation, and PID controller calculation (the motor output is calculated based on the position set point calculation results and the grating ruler position calculation results) are completed every 400us, and then the power amplifier unit outputs current according to the calculation results of the PID controller, thereby driving the motor to move. When the mode switch is switched to the open-loop mode, the grating ruler position calculation and speed calculation are completed every 400us, and the motor output calculated by the handover scene force output unit according to the preset rules is directly sent to the power amplifier unit to output the corresponding current, thereby driving the motor to move.

[0082] Please continue to refer to Figure 6 , which is a data transmission link diagram (including hardware signals and software calculation parameters) of a dual-loop (speed loop + position loop) control mode provided by a specific example of the present invention. The servo cycle used by the outer loop (position loop) and the inner loop (speed loop) of this control mode can be selected according to the specific hardware. For example, taking the servo cycle of the outer loop (position loop) as 400us and the servo cycle of the inner loop (speed loop) as 50us, as Figure 6 As shown, when the mode switch is switched to the closed-loop mode, the position set point calculation and the position loop PID controller calculation (the speed difference is calculated according to the position set point calculation result and the grating ruler position calculation result) are completed every 400us, and the grating ruler position calculation, speed calculation and speed loop PID controller (the motor output is calculated according to the speed calculation result and the speed difference calculated by the position loop PID controller) are completed every 50us, and then the power amplifier unit outputs current according to the calculation result of the speed loop PID controller, thereby driving the motor to move; when the mode switch is switched to the open-loop mode, the grating ruler position calculation and speed calculation are completed every 400us, and the motor output calculated by the handover scene force output unit according to the preset rules is directly sent to the power amplifier unit to output the corresponding current, thereby driving the motor to move.

[0083] It should be noted that, as those skilled in the art can understand, the specific principles of the single-loop control method and the dual-loop control method listed above are the same as the prior art. For details, reference can be made to the relevant content in the field of closed-loop control known to those skilled in the art, and no further explanation will be given here. It should also be noted that, as those skilled in the art can understand, the speed calculation can be obtained by taking the difference between the position of the current cycle and the previous cycle (the calculation result of the grating ruler position), or by using a state estimation method based on Kalman filtering, or by directly using a speed sensor, and the present invention does not limit this.

[0084] In some exemplary embodiments, the step S120, controlling the lifting mechanism in an open-loop mode to output a corresponding output in each forward output open-loop control cycle according to a first preset forward output rule until the position of the lifting mechanism reaches or exceeds the second target position, includes:

[0085] Controlling the lifting mechanism to output a corresponding output force in each forward output open-loop control cycle according to a first preset forward output sub-rule until the lifting mechanism absorbs the substrate to be delivered;

[0086] The lifting mechanism is controlled to output a corresponding force in each forward force open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred according to a second preset forward force sub-rule, until the position of the lifting mechanism reaches or is higher than the second target position.

[0087] Therefore, after the lifting mechanism moves to the first target station, the lifting mechanism is first controlled to output a corresponding output according to the first preset positive output sub-rule in each positive output open-loop control cycle until the lifting mechanism adsorbs the substrate to be transferred; and then the lifting mechanism is controlled to output a corresponding output according to the second preset positive output sub-rule in each positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target station. This can not only ensure that the lifting mechanism can smoothly lift the substrate to be transferred after adsorbing the substrate to be transferred, effectively solve the influence of substrate warping, and realize smooth transfer of the substrate, but also allow the station to be within a certain error range.

[0088] It should be noted that, for the sake of convenience of description, the open-loop stage of "controlling the lifting mechanism to output a corresponding output according to the first preset positive output sub-rule in each forward output open-loop control cycle until the lifting mechanism adsorbs the substrate to be transferred" is referred to as open-loop stage 1 or open-loop contact stage, and the open-loop stage of "controlling the lifting mechanism to output a corresponding output according to the second preset positive output sub-rule in each forward output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred until the position of the lifting mechanism reaches or exceeds the second target position" is referred to as open-loop stage 2 or open-loop additional force application stage.

[0089] In addition, it should be noted that, as can be understood by those skilled in the art, in the open-loop process, the current position of the lifting mechanism will be polled in each forward output open-loop control cycle to see whether it meets the conditions for the end of the open-loop. The conditions for the end of the open-loop are that the current position of the lifting mechanism reaches or exceeds (is higher than) the second target station load_pos_sup (under the normal process, the lifting mechanism sequentially passes through the first closed-loop motion → open-loop stage 1 → open-loop stage 2 → reverse output stage → second closed-loop motion), and the moment when the vacuum of the suction cup / manipulator fork is turned off is the start time of the open-loop stage 2. However, there are abnormal situations, such as the vacuum of the suction cup / manipulator is abnormally disconnected before the end of the open-loop stage 1. In abnormal situations, there is no open-loop stage 2. In the open-loop stage 1, as long as the position of the lifting mechanism reaches or exceeds (is higher than) the second target station (the station where the lifting mechanism lifts up with a sheet) load_pos_sup, the reverse output stage is entered, and then the second closed-loop motion is triggered when the first preset closed-loop control switching condition is met. In the present invention, the reverse output stage is used as a pre-motion for the second closed-loop motion to meet the triggering condition for the second closed-loop motion.

[0090] In some exemplary embodiments, controlling the lifting mechanism to output a corresponding output force in each forward output open-loop control cycle according to a first preset forward output sub-rule until the lifting mechanism absorbs the substrate to be transferred includes:

[0091] According to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred.

[0092] Therefore, by controlling the lifting mechanism to output a corresponding output in each positive output open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle, until the lifting mechanism adsorbs the substrate to be transferred, it can be effectively ensured that the output of the lifting mechanism gradually increases in the open-loop stage after the lifting mechanism moves to the first target station until the lifting mechanism adsorbs the substrate to be transferred, thereby ensuring that the output of the lifting mechanism is smooth during the transfer of the substrate, thereby further achieving a smooth transfer of the substrate.

[0093] In some exemplary embodiments, when the first preset condition is met, turning on the vacuum of the lifting mechanism includes:

[0094] When the open-loop control reaches the maximum open-loop control period of the first preset output increment, the vacuum of the lifting mechanism is turned on.

[0095] Specifically, when the lifting mechanism moves to the first target position load_pos_sub in a closed loop, the open loop phase 1 is triggered (the initial output value of the open loop phase 1 is greater than or equal to the output of the previous closed loop control cycle), and after a period of open loop (open loop to the first preset output increment maximum open loop control cycle n max ), the lifting mechanism opens the vacuum until the lifting mechanism absorbs the substrate. In particular, if the zero position repeatability of the lifting mechanism is very good, and it can be ensured that the position where the lifting mechanism contacts the suction cup or the position where the robot fork contacts at this time satisfies load_pos_sub=load_pos, it can be simplified as follows: the lifting mechanism moves to load_pos and then opens the loop to output force, and after a period of open-loop output, opens the vacuum until the lifting mechanism absorbs the substrate.

[0096] It should be noted that, as can be understood by those skilled in the art, the first preset output increment maximum open-loop control period n max It is determined by the vacuum value of the lifting mechanism measured by the sensor and the vacuum adsorption standard of the lifting mechanism. It should also be noted that, as can be understood by those skilled in the art, the time required for the lifting mechanism to open the vacuum until the lifting mechanism adsorbs the substrate is determined by the actual adsorption speed. Specifically, the vacuum sensor of the lifting mechanism can be polled until the detection result of the vacuum sensor of the lifting structure reaches a certain threshold, then it is determined that the lifting mechanism is adsorbed to the substrate, and the time at this time is recorded as the nth 1end A forward output open-loop control cycle.

[0097] It should also be noted that, as can be understood by those skilled in the art, in some other embodiments, the lifting mechanism may also open the vacuum first and then open the loop output. Specifically, the vacuum may be opened between the first preset output increment maximum open-loop control period from the closed-loop stage 1 to the open-loop stage 1. The specific timing of opening the vacuum may be determined by the length of the vacuum pipeline and the switching speed of the solenoid valve.

[0098] In some exemplary embodiments, the method of controlling the lifting mechanism to output a corresponding output force in each positive output open-loop control cycle according to the output force of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle until the lifting mechanism absorbs the substrate to be transferred includes:

[0099] Determine the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the first preset output cycle increment;

[0100] According to the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle, the lifting mechanism is controlled to output a corresponding output in the corresponding forward output open-loop control cycle until the first preset output increment maximum open-loop control cycle ends;

[0101] The lifting mechanism is controlled to output the output corresponding to the first preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred.

[0102] Therefore, in the open-loop stage 1, the output of the lifting mechanism is first controlled to gradually increase until the first preset output increment maximum open-loop control cycle ends (the lifting mechanism opens the vacuum), and then the output of the lifting mechanism is controlled to remain unchanged until the lifting mechanism is adsorbed to the substrate, thereby further ensuring that the output of the lifting mechanism is smooth, further achieving a smooth handover of the substrate, and effectively preventing the circuit on the substrate from being damaged due to excessive output.

[0103] In some exemplary embodiments, determining the output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle and the first preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the first preset output cycle increment includes:

[0104] Determining a first initial open-loop output according to the output of the lifting mechanism in the previous closed-loop control cycle and a first preset output increment;

[0105] The output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle is determined according to the first initial open-loop output and the first preset output cycle increment.

[0106] Specifically, please refer to Figure 7 , which is a schematic diagram of the output change of the lifting mechanism in the open loop stage 1 provided by an embodiment of the present invention. Figure 7 As shown, F init is the initial value of the output of the open-loop stage 1 (i.e., the first initial open-loop output), which can be equal to the output F at the previous closed-loop control cycle (i.e., at the end of the closed-loop stage 1). cend Or the output F in the previous closed-loop control cycle cend On the basis of appropriate increase Δ init (The first preset output increment, Δ init ≥0), that is, F init =F cend +Δ init .

[0107] Assumption Δ f is the change in force per cycle of the preset open-loop stage 1 (i.e., the increase in the first preset output cycle), n is the number of cycles from the cut-loop (switching to the open-loop mode) to the current one (i.e., the number of cycles of the current forward output open-loop control), n max is the maximum cycle of force increase in the open-loop stage 1 (i.e., the first preset maximum open-loop control cycle of output increment), then in the open-loop stage 1, the output F of the lifting mechanism in the nth positive output open-loop control cycle can be calculated according to the following formula: n :

[0108]

[0109] It can be seen that in the open-loop stage 1, the output of the lifting mechanism has nothing to do with the position of the lifting mechanism, and it is only necessary to switch the output according to the above formula.

[0110] It should be noted that if Figure 7 As shown, n 1end It represents the last positive output open-loop control cycle of the open-loop stage 1, that is, the positive output open-loop control cycle at the end of the open-loop stage 1. It should also be noted that, as can be understood by those skilled in the art, in the open-loop stage 1, the position calculation and the speed calculation are still being executed.

[0111] In some exemplary embodiments, controlling the lifting mechanism to output a corresponding force in each forward force open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred according to a second preset forward force sub-rule until the position of the lifting mechanism reaches or is higher than the second target position includes:

[0112] According to the output of the lifting mechanism in the previous forward force open-loop control cycle and the increase in the second preset output cycle, the lifting mechanism is controlled to output a corresponding output in each forward force open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target position.

[0113] Therefore, after the lifting mechanism absorbs the substrate, the output of the lifting mechanism is further increased on the basis of the open-loop stage 1, and the vacuum of the suction cup / robotic arm fork is closed at the same time, so that the lifting mechanism can smoothly lift the substrate to ensure that the substrate can smoothly detach from the suction cup / robotic arm fork, thereby further ensuring the smooth transfer of the substrate.

[0114] In some exemplary embodiments, according to the output of the lifting mechanism in the previous positive output open-loop control cycle and the second preset output cycle increase, controlling the lifting mechanism to output a corresponding output in each positive output open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target position, includes:

[0115] Determining a second initial open-loop output according to the output of the lifting mechanism in the previous forward output open-loop control cycle and a second preset output increment;

[0116] According to the second initial open-loop output and the second preset output cycle increment, determine the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred and the second preset output increment maximum open-loop control cycle;

[0117] According to the output of the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred and the second preset output increment maximum open-loop control cycle, the lifting mechanism is controlled to output the corresponding output in the corresponding positive output open-loop control cycle until the second preset output increment maximum open-loop control cycle is reached;

[0118] The lifting mechanism is controlled to output the output corresponding to the second preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the position of the lifting mechanism reaches or exceeds the second target position.

[0119] Please continue to refer to Figure 8 , which is a schematic diagram of the output change of the lifting mechanism in the open loop stage 2 provided by an embodiment of the present invention. Figure 8 As shown, F 2init is the initial output value of the open-loop stage 2 (i.e., the second initial open-loop output), which can be equal to the output F of the previous positive output open-loop control cycle 1end (i.e. the output at the end of open-loop stage 1), or the output F at the previous positive output open-loop control cycle 1end On the basis of appropriate increase Δ 2init (Second preset output increment, Δ 2init ≥0), that is, F 2init =F 1end +Δ 2init .

[0120] Assumption Δ 2f is the change in force per cycle of the preset open-loop stage 2 (i.e., the increase in the second preset output cycle), Δ 2fand the first preset output cycle increase Δ f Can be the same or different, n 2max is the maximum cycle of force increase in the open-loop stage 2 (i.e., the second preset maximum open-loop control cycle of output increment), then in the open-loop stage 2, the output F of the lifting mechanism in the nth (n represents the number of cycles from the cut-loop to the current) positive output open-loop control cycle (i.e., the current number of positive output open-loop control cycles) can be calculated according to the following formula: n :

[0121]

[0122] Since the vacuum of the suction cup or the robot fork has been released in the open-loop stage 2, if the position of the lifting mechanism has not reached load_pos_sup (the lifting position with the sheet) during this process, the output force will continue to be increased or maintained to complete the open-loop transfer of the substrate at this stage, otherwise the open-loop stage 2 will be terminated.

[0123] In some exemplary embodiments, the output corresponding to the maximum open-loop control period of the second preset output increment is greater than the output when the lifting mechanism belt piece is closed-loop and stationary at the second target position.

[0124] Therefore, by setting the output corresponding to the maximum open-loop control period of the second preset output increment to be greater than the output when the lifting mechanism belt is closed-loop and stationary at the second target station, it can be ensured that the lifting mechanism can drive the substrate to overcome the gravity of the substrate, the gravity of the lifting mechanism itself and the movement resistance, so as to have an upward movement speed when reaching load_pos_sup (belt lifting station).

[0125] In some exemplary embodiments, the step S130, controlling the lifting mechanism in an open-loop mode to output a corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met, includes:

[0126] According to the output of the lifting mechanism in each reverse output open-loop control cycle and the first target number of reverse output open-loop control cycles, the lifting mechanism is controlled to output the corresponding output in each reverse output open-loop control cycle until the movement speed of the lifting mechanism is less than or equal to 0, or the number of reverse output open-loop control cycles reaches the first target number.

[0127] As the output of open-loop stage 2 gradually increases, it is possible that the lifting mechanism lifts up the substrate during the stage of increasing output, or it is possible that the lifting mechanism lifts up the substrate when the output reaches a constant value. In this process, the lifting mechanism gradually takes the sheet away from the suction cup / manipulator fork, but the termination condition of open-loop stage 2 (the position of the lifting mechanism is equal to or higher than load_pos_sup) has not been met. At this time, the lifting mechanism has an upward speed. Since when the position of the lifting mechanism reaches load_pos_sup (the position of the sheet lifting position), the forward speed (upward speed) of the movement cannot be directly switched to the closed-loop mode, and the forward speed (upward speed) can be eliminated by the reverse output. In the reverse force output stage, the lifting mechanism may first move upward beyond load_pos_sup (the belt-piece lifting position), and then may continue to move upward until the speed is 0, and the lifting mechanism may also move downward until the speed is 0; when the final speed is 0, the position of the lifting mechanism may be higher than load_pos_sup (the belt-piece lifting position) or lower than load_pos_sup (the belt-piece lifting position), but is generally near load_pos_sup (the belt-piece lifting position).

[0128] It should be noted that, as can be understood by those skilled in the art, the output referred to in the closed-loop stage 1, the open-loop stage 1, the open-loop stage 2 and the reverse output stage refers to the output of the E-pin motor (lifting mechanism motor) itself in the vertical direction after being amplified by the mechanical structure. For example, due to the use of a lead screw and a wedge-shaped slider, the force acting in the vertical direction is inconsistent with the output of the motor, and an equivalent conversion is required. The specific equivalent conversion process can refer to the relevant content known to those skilled in the art, and will not be described in detail here. The reverse in the reverse output stage refers to the total resultant force of the output of the E-pin motor (lifting mechanism motor) in the vertical direction, the gravity of the lifting mechanism moving components, the gravity of the substrate, etc., which is negative, opposite to the resultant force of the initial upward movement, until the lifting mechanism speed is reduced to less than or equal to 0 at the end of the cycle (at this time the lifting mechanism is near the load_pos_sup position), triggering the entry into closed-loop control.

[0129] In some exemplary embodiments, the output of the lifting mechanism in each reverse output open-loop control cycle and / or the first target number of reverse output open-loop control cycles are determined according to a preset constraint equation.

[0130] Specifically, the reverse output value can be fixed, and the number of reverse output open-loop control cycles required can be calculated by a preset constraint equation (i.e., calculating the first target number of reverse output open-loop control cycles) to reduce the speed of the lifting mechanism to 0. The first target number of reverse output open-loop control cycles can also be fixed, and the number of outputs required can be calculated by a preset constraint equation (i.e., calculating the output of the lifting mechanism in each reverse output open-loop control cycle) to reduce the speed of the lifting mechanism to 0.

[0131] The preset constraint equation is as follows:

[0132]

[0133] in, Represents the estimated mass of the substrate to be delivered, with a possible range of is the maximum substrate mass, is the minimum substrate mass, m p is the mass of the E-pin motion component (lifting mechanism motion component), F is the total mass of the base plate plus the E-pin motion component (lifting mechanism motion component), p is the reverse force of the lifting mechanism in the vertical direction, F sum is the total force in the reverse output stage, Δ t is the time of reverse output, v 0switch is the speed of the lifting mechanism at the end of the last positive output open-loop control cycle (i.e., the end of open-loop stage 2), and Δv is the speed difference between the lifting mechanism at the end of reverse output and the end of the last positive output open-loop control cycle (i.e., the end of open-loop stage 2).

[0134] For example, when the mass of the substrate to be transferred is unknown (for example, the first time the substrate is transferred from the robot to the suction cup), the lifting mechanism takes the substrate from the suction cup. At this time, the speed is upward, and the output of the lifting mechanism can be set to 0 (not limited to 0, and can be adjusted according to actual needs). The gravity of the lifting mechanism and the substrate is used to decelerate, with a maximum deceleration of 30 reverse output open-loop control cycles (30 is the first target number of reverse output open-loop control cycles with a deceleration of 0 determined based on the median mass of the substrate to be transferred and based on the above-mentioned preset constraint equation). If the speed of the lifting mechanism is reduced to 0 within 30 reverse output open-loop control cycles, it is switched to closed-loop control at the moment of the reverse output open-loop control cycle with a deceleration of 0; if the speed of the lifting mechanism is still not reduced to 0 after more than 30 reverse output open-loop control cycles (but is basically around 0), it is forced to switch to closed-loop control, thereby completing the closed-loop cutting process with the initial upward velocity of the strip reduced to 0.

[0135] When the mass of the substrate to be delivered can be input in advance by the outside world or estimated at the time of the first delivery, before the second closed loop is cut, the output of the lifting mechanism is set to 0 (not limited to 0, it can be adjusted according to actual needs), and the lifting mechanism and the gravity of the substrate are used to decelerate, and the maximum deceleration time is Δ t (Based on Δ t The first target number of the reverse output open-loop control cycle can be determined), then according to the above preset constraint equation, If in Δ t When the speed of the internal lifting mechanism is reduced to 0, the closed-loop control is switched at the end of the reverse output open-loop control cycle; if the speed of the internal lifting mechanism is reduced to 0, the closed-loop control is switched at the end of the reverse output open-loop control cycle; t If the speed of the inner lifting mechanism has not been reduced to 0 (but is already basically close to 0), it is forced to switch to closed-loop control, thereby completing the closed-loop cutting process in which the initial upward velocity of the belt piece is reduced to 0.

[0136] Please continue to refer to Fig. 9 , which is a schematic flow chart of a substrate handover method provided by another embodiment of the present invention. The substrate handover method provided by this embodiment is used for placing a wafer (loading a wafer), such as Fig. 9 As shown, the substrate handover method provided in this embodiment includes the following steps:

[0137] Step S210, using a closed-loop control method to control the lifting mechanism to move to a third target station, wherein the lifting mechanism adsorbs the substrate to be transferred, the third target station is located above a carrier for carrying the substrate to be transferred, and the height difference between the third target station and the carrying station when the carrier just contacts the substrate to be transferred is within a second preset range.

[0138] Step S220, adopting an open-loop mode to control the lifting mechanism to output a corresponding output in each forward output open-loop control cycle according to a second preset forward output rule until the position of the lifting mechanism reaches or is lower than a fourth target station, and when the second preset condition is met, turning on the vacuum of the carrier, and after the carrier absorbs the substrate to be transferred, turning off the vacuum of the lifting mechanism, wherein the fourth target station is located below the carrier station, and the height difference between the two is equal to the second preset value.

[0139] Step S230: adopting an open-loop mode to control the lifting mechanism to output a corresponding output according to a second preset reverse output rule until a second preset closed-loop control switching condition is met.

[0140] Therefore, the substrate handover method provided in this embodiment can realize the smooth handover of the substrate by setting the trigger condition to perform open-loop control or closed-loop control under different conditions, and reduce the force on the substrate during the handover as much as possible, ensure that the substrate will not be damaged during the handover, and effectively solve the adaptability problem of the machine to different types of substrates. In addition, the substrate handover method provided by the present invention controls the lifting mechanism in an open-loop mode to output the corresponding output according to the second preset forward output rule in each forward output open-loop control cycle after the lifting mechanism moves to the third target station, and after the position of the lifting mechanism reaches or is lower than the fourth target station, controls the lifting mechanism in an open-loop mode to output the corresponding output according to the second preset reverse output rule until the second preset closed-loop control switching condition is met, thereby not only ensuring that the lifting mechanism has a smooth output during the handover of the substrate, thereby further realizing the smooth handover of the substrate, but also allowing the handover station to be within a certain error range. In addition, the substrate handover method provided in this embodiment can reduce the movement speed of the lifting mechanism by adopting an open-loop mode to control the lifting mechanism to output the corresponding output according to the second preset reverse output rule after the position of the lifting mechanism reaches or is lower than the fourth target position, thereby ensuring that the closed-loop control process can be directly switched to subsequently to ensure that the substrate handover can be completed smoothly.

[0141] It should be noted that, as can be understood by those skilled in the art, the bearing position when the bearing member just contacts the substrate to be handed over can be obtained by calibration before the handover. Furthermore, the present invention does not limit the minimum and maximum values ​​of the second preset range, the minimum value of the second preset range can be 0, and the specific value of the maximum value of the second preset range can be adjusted according to actual conditions, as long as the minimum and maximum values ​​of the second preset range can satisfy the position where the third target position can be stably closed-loop operated under all extreme conditions. It should also be noted that the present invention does not limit the specific value of the second preset value, the second preset value can be determined by the maximum warping amount of the substrate and the maximum height difference of the rubber ring below the suction cup / fork (the first preset value can be equal to the sum of the maximum warping amount of the substrate and the maximum height difference of the rubber ring below the suction cup / fork)

[0142] Please continue to refer to Fig.10 , which is a schematic diagram of the process of placing a film by a lifting mechanism provided by an embodiment of the present invention. Fig.10As shown, in this embodiment, the closed-loop mode is mainly applicable to the lifting mechanism (E-pin) independently moving to the position close to the suction cup / manipulator fork just touching the substrate (the first closed-loop movement, hereinafter referred to as closed-loop stage 1) and the lifting mechanism (E-pin) moving to other positions without the film after the film is released (the second closed-loop movement), and the open-loop mode is mainly applicable to the transfer process of the substrate. It should also be noted that, as can be understood by those skilled in the art, after the second preset closed-loop control switching condition is met, the lifting mechanism will be triggered to enter the second closed-loop movement to control the lifting mechanism to move to other positions.

[0143] In some exemplary embodiments, the step S220, controlling the lifting mechanism in an open-loop mode to output a corresponding output in each forward output open-loop control cycle according to a second preset forward output rule until the position of the lifting mechanism reaches or is lower than a fourth target position, includes:

[0144] Controlling the lifting mechanism to output a corresponding force in each forward force open-loop control cycle according to a third preset forward force sub-rule until the carrier absorbs the substrate to be delivered;

[0145] The lifting mechanism is controlled to output a corresponding force in each forward force open-loop control cycle after the carrier absorbs the substrate to be transferred according to a fourth preset forward force sub-rule, until the position of the lifting mechanism reaches or is lower than the fourth target position.

[0146] In some exemplary embodiments, controlling the lifting mechanism to output a corresponding force in each forward force open-loop control cycle according to a third preset forward force sub-rule until the carrier absorbs the substrate to be transferred includes:

[0147] According to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the third preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle until the carrier absorbs the substrate to be transferred.

[0148] In some exemplary embodiments, when the second preset condition is met, opening the vacuum of the carrier includes:

[0149] When the open-loop control reaches the third preset output increment maximum open-loop control cycle, the vacuum of the bearing member is turned on.

[0150] In some exemplary embodiments, the method of controlling the lifting mechanism to output a corresponding force in each positive force open-loop control cycle according to the force output of the lifting mechanism in the previous closed-loop control cycle and the increase in the third preset force output cycle until the carrier absorbs the substrate to be transferred includes:

[0151] Determine the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the third preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the third preset output cycle increment;

[0152] According to the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the third preset output increment maximum open-loop control cycle, control the lifting mechanism to output a corresponding output in the corresponding forward output open-loop control cycle until the third preset output increment maximum open-loop control cycle is reached;

[0153] The lifting mechanism is controlled to output the force corresponding to the first preset force increment maximum open-loop control cycle in each subsequent forward force output open-loop control cycle until the supporting member absorbs the substrate to be transferred.

[0154] In some exemplary embodiments, determining the output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle and the third preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the third preset output cycle increment includes:

[0155] Determining a third initial open-loop output according to the output of the lifting mechanism in the previous closed-loop control cycle and a third preset output increment;

[0156] The output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the third preset output increment maximum open-loop control cycle is determined according to the third initial open-loop output and the third preset output cycle increment.

[0157] In some exemplary embodiments, controlling the lifting mechanism to output a corresponding force in each forward force open-loop control cycle after the carrier absorbs the substrate to be transferred according to a fourth preset forward force sub-rule until the position of the lifting mechanism reaches or is lower than the fourth target position includes:

[0158] According to the output of the lifting mechanism in the previous forward force open-loop control cycle and the increase in the fourth preset output cycle, the lifting mechanism is controlled to output a corresponding output in each forward force open-loop control cycle after the carrier adsorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is lower than the fourth target position.

[0159] In some exemplary embodiments, according to the output of the lifting mechanism in the previous positive output open-loop control cycle and the fourth preset output cycle increment, controlling the lifting mechanism to output a corresponding output in each positive output open-loop control cycle after the carrier absorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is lower than the fourth target position, includes:

[0160] Determining a fourth initial open-loop output according to the output of the lifting mechanism in the previous forward output open-loop control cycle and a fourth preset output increment;

[0161] According to the fourth initial open-loop output and the fourth preset output cycle increment, determine the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the carrier absorbs the substrate to be transferred and the fourth preset output increment maximum open-loop control cycle;

[0162] According to the output of the corresponding output of the lifting mechanism in each positive force open-loop control cycle between the first positive force open-loop control cycle after the carrier absorbs the substrate to be transferred and the fourth preset output increment maximum open-loop control cycle, the lifting mechanism is controlled to output the corresponding output in the corresponding positive force open-loop control cycle until the fourth preset output increment maximum open-loop control cycle is reached;

[0163] The lifting mechanism is controlled to output the output corresponding to the fourth preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the position of the lifting mechanism reaches or is lower than the fourth target position.

[0164] In some exemplary embodiments, the output corresponding to the fourth preset output increment maximum open-loop control period is less than the output when the lifting mechanism belt piece is closed-loop and stationary at the fourth target station.

[0165] In some exemplary embodiments, the adopting open-loop mode to control the lifting mechanism to output a corresponding output according to a second preset reverse output rule until a second preset closed-loop control switching condition is met includes:

[0166] According to the output of the lifting mechanism in each reverse output open-loop control cycle and the second target number of reverse output open-loop control cycles, the lifting mechanism is controlled to output the corresponding output in each reverse output open-loop control cycle until the movement speed of the lifting mechanism is greater than or equal to 0, or the number of reverse output open-loop control cycles reaches the second target number.

[0167] In some exemplary embodiments, the output of the lifting mechanism in each reverse output open-loop control cycle and / or the second target number of reverse output open-loop control cycles are determined according to a preset constraint equation.

[0168] It should be noted that, as those skilled in the art can understand, since the film placement (loading) process is the reverse process of the film removal (unloading) process, the substrate handover method provided in this embodiment is not described in detail. For more information about the substrate handover method provided in this embodiment, refer to the substrate handover method provided in the previous embodiment for adaptive understanding.

[0169] It should also be noted that, during the film loading process, when the lifting mechanism places the film and the suction cup is ready to cut the second closed loop, the speed is downward at this time. Therefore, the conditions for cutting the second closed loop during the film loading process are different from those for cutting the second closed loop during the film unloading process. That is, during the film loading process, the output of the lifting mechanism is upward. For example, in the reverse output stage, the output of the lifting mechanism can be twice the gravity of the E-pin motion component (twice the gravity of the lifting mechanism motion component), and the maximum deceleration is 30 reverse output open-loop control cycles (30 is the second target number of reverse output open-loop control cycles with a deceleration of 0 determined according to the median mass of the substrate to be delivered and the preset constraint equation). If the speed of the lifting mechanism is reduced to 0 within 30 reverse output open-loop control cycles, it is switched to closed-loop control at the moment of the reverse output open-loop control cycle with a deceleration of 0; if the speed of the lifting mechanism is still not reduced to 0 after more than 30 reverse output open-loop control cycles (but is basically near 0), it is forced to switch to closed-loop control, so as to complete the closed-loop cutting process without a film with an initial downward velocity reduced to 0.

[0170] Based on the same inventive concept, the present invention also provides a substrate handover system, please refer to Fig.11 , which is a schematic diagram of the block structure of a substrate handover system provided by an embodiment of the present invention. Fig.11 As shown, the substrate delivery system provided by the present invention includes a carrier 10, a lifting mechanism 20, a vacuum device 30 and a controller 40. The lifting mechanism 20 and the vacuum device 30 are both connected to the controller 40 for communication. The carrier 10 is used to carry the substrate, and the vacuum device 30 is used to control the vacuum pressure of the lifting mechanism 20 and the carrier 10. Please continue to refer to Fig.12 , which is a block diagram of the controller 40 provided in one embodiment of the present invention. Fig.12As shown, the controller 40 includes a processor 41 and a memory 43, and a computer program is stored in the memory 43. When the computer program is executed by the processor 41, the substrate handover method described in any of the above embodiments is implemented. Since the substrate handover system provided by the present invention and the substrate handover method provided by the present invention belong to the same inventive concept, the substrate handover system provided by the present invention at least has all the beneficial effects of the substrate handover method provided by the present invention. For details, please refer to the relevant descriptions above, so the beneficial effects of the substrate handover system provided by the present invention will not be repeated here.

[0171] Please continue to refer to Fig.12 ,like Fig.12 As shown, the controller 40 also includes a communication interface 42 and a communication bus 44, wherein the processor 41, the communication interface 42, and the memory 43 communicate with each other through the communication bus 44. The communication bus 44 can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The communication bus 44 can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, only one thick line is used in the figure, but it does not mean that there is only one bus or one type of bus. The communication interface 42 is used for communication between the above-mentioned controller 40 and other devices.

[0172] Furthermore, the processor 41 may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor, etc. The processor 41 is the control center of the controller 40, and various interfaces and lines are used to connect various parts of the entire controller 40.

[0173] Furthermore, the memory 43 can be used to store the computer program, and the processor 41 implements various functions of the controller 40 by running or executing the computer program stored in the memory 43 and calling the data stored in the memory 43. The memory 43 may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable memory (PROM), electrically programmable memory (EPROM), electrically erasable programmable memory (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, random access memory is available in a variety of forms, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous random access memory (SDRAM), double data rate synchronous random access memory (DDRSDRAM), enhanced synchronous random access memory (ESDRAM), synchronous link (Synchlink) dynamic random access memory (SLDRAM), memory bus (Rambus) direct random access memory (RDRAM), direct memory bus dynamic random access memory (DRDRAM), and memory bus dynamic random access memory (RDRAM), etc.

[0174] The present invention also provides a readable storage medium, wherein a computer program is stored in the readable storage medium, and when the computer program is executed by a processor, the substrate handover method described in any of the above embodiments can be implemented. Since the readable storage medium provided by the present invention and the substrate handover method provided by the present invention belong to the same inventive concept, the readable storage medium provided by the present invention at least has all the beneficial effects of the substrate handover method provided by the present invention, and the specifics can be referred to the relevant descriptions above, so the beneficial effects of the readable storage medium provided by the present invention will not be described one by one here.

[0175] Further, the readable storage medium provided by the present invention can adopt any combination of one or more computer-readable media. The readable medium can be a computer-readable signal medium or a computer-readable storage medium. The computer-readable storage medium can be, for example, but not limited to, a system, device or component of electricity, magnetism, light, electromagnetic, infrared or semiconductor, or any combination of the above. More specific examples (non-exhaustive enumeration) of computer-readable storage media include: an electrical connection with one or more wires, a portable computer hard disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this article, a computer-readable storage medium can be any tangible medium containing or storing a program, which can be used by an instruction execution system, a device or a device or used in combination with it.

[0176] It should be noted that a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer-readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. A computer-readable signal medium may also be any computer-readable medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device. The program code contained on the computer-readable medium may be transmitted using any suitable medium, including but not limited to wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0177] In summary, compared with the prior art, the substrate handover method, substrate handover system and readable storage medium provided by the present invention have the following beneficial effects:

[0178] The present invention sets trigger conditions to perform open-loop control or closed-loop control under different conditions, thereby achieving a smooth handover of the substrate, minimizing the force on the substrate during the handover process, ensuring that the substrate will not be damaged during the handover process, and effectively solving the adaptability problem of the machine to different types of substrates. In addition, the present invention controls the lifting mechanism in an open-loop mode after the lifting mechanism moves to the first target station / the third target station, and outputs the corresponding output in each forward output open-loop control cycle according to the first preset forward output rule / the second preset forward output rule until the position of the lifting mechanism reaches or exceeds the second target station / reaches or is lower than the fourth target station, and after the position of the lifting mechanism reaches or exceeds the second target station / reaches or is lower than the fourth target station, controls the lifting mechanism in an open-loop mode according to the first preset reverse output rule / the second preset reverse output rule to output the corresponding output until the first preset closed-loop control switching condition / the second preset closed-loop control switching condition is met, thereby not only ensuring that the lifting mechanism outputs smoothly during the handover of the substrate, thereby further achieving a smooth handover of the substrate, but also allowing the station to be within a certain error range. In addition, the present invention can reduce the movement speed of the lifting mechanism by adopting an open-loop mode to control the lifting mechanism to output the corresponding output according to the first preset reverse output rule / the second preset reverse output rule after the position of the lifting mechanism reaches or is higher than the second target position / reaches or is lower than the fourth target position, thereby ensuring that the closed-loop control process can be directly switched to subsequently to ensure that the handover of the substrate can be completed smoothly.

[0179] It should be noted that the computer program code for performing the operation of the present invention may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0180] It should also be noted that the devices and methods disclosed in the embodiments of this article can also be implemented in other ways. The device implementation described above is only schematic. For example, the flowcharts and block diagrams in the accompanying drawings show the possible architecture, functions and operations of the devices, methods and computer program products according to multiple embodiments of this article. In this regard, each box in the flowchart or block diagram can represent a part of a module, program or code, and the module, program segment or part of the code contains one or more executable instructions for implementing the specified logical function, and the module, program segment or part of the code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two consecutive boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flowchart, and the combination of boxes in the block diagram and / or flowchart can be implemented by a dedicated hardware-based system for performing a specified function or action, or can be implemented with a combination of dedicated hardware and computer instructions. In addition, the functional modules in the various embodiments of this document may be integrated together to form an independent part, or each module may exist independently, or two or more modules may be integrated to form an independent part.

[0181] It should be noted that the above description is only a description of the preferred embodiment of the present invention, and is not any limitation on the scope of the present invention. Any changes and modifications made by a person skilled in the art in the field of the present invention based on the above disclosure are within the scope of protection of the present invention. Obviously, a person skilled in the art can make various changes and modifications to the invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations fall within the scope of the present invention and its equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A substrate handover method, characterized in that: include: The lifting mechanism is controlled to move to a first target station in a closed-loop mode, wherein the first target station is located below the substrate to be delivered and the height difference between the first target station and the load station when the lifting mechanism just contacts the substrate to be delivered is within a first preset range; The lifting mechanism is controlled in an open-loop mode to output a corresponding force in each forward force open-loop control cycle according to a first preset forward force rule until the position of the lifting mechanism reaches or is higher than a second target position, and when a first preset condition is met, the vacuum of the lifting mechanism is turned on, and after the lifting mechanism absorbs the substrate to be delivered, the vacuum of the carrier for carrying the substrate to be delivered is turned off, wherein the second target position is located above the loading position, and the height difference between the two is equal to a first preset value; The lifting mechanism is controlled in an open-loop mode to output a corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met.

2. The substrate transfer method according to claim 1, characterized in that: The method of controlling the lifting mechanism in an open-loop mode to output a corresponding output according to a first preset forward output rule in each forward output open-loop control cycle until the position of the lifting mechanism reaches or exceeds a second target position includes: Controlling the lifting mechanism to output a corresponding output force in each forward output open-loop control cycle according to a first preset forward output sub-rule until the lifting mechanism absorbs the substrate to be delivered; The lifting mechanism is controlled to output a corresponding force in each forward force open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred according to a second preset forward force sub-rule, until the position of the lifting mechanism reaches or is higher than the second target position.

3. The substrate transfer method according to claim 2, characterized in that: The step of controlling the lifting mechanism to output a corresponding force in each forward force open-loop control cycle according to a first preset forward force sub-rule until the lifting mechanism absorbs the substrate to be transferred comprises: According to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred.

4. The substrate transfer method according to claim 3, characterized in that: When the first preset condition is met, turning on the vacuum of the lifting mechanism comprises: When the open-loop control reaches a first preset output increment maximum open-loop control cycle, the vacuum of the lifting mechanism is turned on; According to the output of the lifting mechanism in the previous closed-loop control cycle and the increase in the first preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred, including: Determine the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the first preset output cycle increment; According to the output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle, control the lifting mechanism to output a corresponding output in the corresponding forward output open-loop control cycle until the first preset output increment maximum open-loop control cycle is reached; The lifting mechanism is controlled to output the output corresponding to the first preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the lifting mechanism absorbs the substrate to be transferred.

5. The substrate transfer method according to claim 4, characterized in that: The step of determining the output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle and the first preset output increment maximum open-loop control cycle according to the output of the lifting mechanism in the previous closed-loop control cycle and the first preset output cycle increment includes: Determining a first initial open-loop output according to the output of the lifting mechanism in the previous closed-loop control cycle and a first preset output increment; The output of the lifting mechanism in each forward output open-loop control cycle between the first forward output open-loop control cycle and the first preset output increment maximum open-loop control cycle is determined according to the first initial open-loop output and the first preset output cycle increment.

6. The substrate transfer method according to claim 2, characterized in that: The step of controlling the lifting mechanism to output a corresponding force in each positive force open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred according to a second preset positive force sub-rule until the position of the lifting mechanism reaches or is higher than the second target position includes: According to the output of the lifting mechanism in the previous forward force open-loop control cycle and the increase in the second preset output cycle, the lifting mechanism is controlled to output a corresponding output in each forward force open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target position.

7. The substrate transfer method according to claim 6, characterized in that: According to the output of the lifting mechanism in the previous positive output open-loop control cycle and the increase in the second preset output cycle, the lifting mechanism is controlled to output a corresponding output in each positive output open-loop control cycle after the lifting mechanism absorbs the substrate to be transferred, until the position of the lifting mechanism reaches or is higher than the second target position, including: Determining a second initial open-loop output according to the output of the lifting mechanism in the previous forward output open-loop control cycle and a second preset output increment; According to the second initial open-loop output and the second preset output cycle increment, determine the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred and the second preset output increment maximum open-loop control cycle; According to the output of the corresponding output of the lifting mechanism in each positive output open-loop control cycle between the first positive output open-loop control cycle after the lifting mechanism adsorbs the substrate to be transferred and the second preset output increment maximum open-loop control cycle, the lifting mechanism is controlled to output the corresponding output in the corresponding positive output open-loop control cycle until the second preset output increment maximum open-loop control cycle is reached; The lifting mechanism is controlled to output the output corresponding to the second preset output increment maximum open-loop control cycle in each subsequent forward output open-loop control cycle until the position of the lifting mechanism reaches or exceeds the second target position.

8. The substrate transfer method according to claim 7, characterized in that: The output corresponding to the maximum open-loop control period of the second preset output increment is greater than the output when the lifting mechanism belt piece is closed-loop and stationary at the second target position.

9. The substrate transfer method according to claim 1, characterized in that: The method of controlling the lifting mechanism in an open-loop mode to output a corresponding output according to a first preset reverse output rule until a first preset closed-loop control switching condition is met includes: According to the output of the lifting mechanism in each reverse output open-loop control cycle and the first target number of reverse output open-loop control cycles, the lifting mechanism is controlled to output the corresponding output in each reverse output open-loop control cycle until the movement speed of the lifting mechanism is less than or equal to 0, or the number of reverse output open-loop control cycles reaches the first target number.

10. A substrate handover method, characterized in that: include: A closed-loop control method is adopted to control the lifting mechanism to move to a third target station, wherein the lifting mechanism adsorbs the substrate to be delivered, the third target station is located above a carrier for carrying the substrate to be delivered, and the height difference between the third target station and the carrying station when the carrier just contacts the substrate to be delivered is within a second preset range; The lifting mechanism is controlled in an open-loop mode to output a corresponding force in each positive force open-loop control cycle according to a second preset positive force rule until the position of the lifting mechanism reaches or is lower than a fourth target position, and when the second preset condition is met, the vacuum of the carrier is turned on, and after the carrier absorbs the substrate to be transferred, the vacuum of the lifting mechanism is turned off, wherein the fourth target position is located below the carrier position, and the height difference between the fourth target position and the carrier position is equal to the second preset value; The lifting mechanism is controlled in an open-loop mode to output a corresponding output according to a second preset reverse output rule until a second preset closed-loop control switching condition is met.

11. A substrate handover system, characterized in that: The invention comprises a carrier, a lifting mechanism, a vacuum device and a controller, wherein the lifting mechanism and the vacuum device are both connected to the controller for communication, the carrier is used to carry a substrate, the vacuum device is used to control the vacuum pressure of the lifting mechanism and the carrier, the controller comprises a processor and a memory, a computer program is stored in the memory, and when the computer program is executed by the processor, the substrate handover method described in any one of claims 1 to 10 is implemented.

12. A readable storage medium, characterized in that: The readable storage medium stores a computer program, and when the computer program is executed by a processor, the substrate handover method according to any one of claims 1 to 10 is implemented.

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