Transfer equipment and vacuum treatment equipment

Abstract

The present invention belongs to the technical field of semiconductor transfer, and discloses a transfer device and a vacuum processing equipment. The transfer device includes a carrier, a drive assembly and a plurality of trays. The tray is used to carry workpieces, and each tray is movably connected to the carrier through an adjustment assembly, and the plurality of adjustment assemblies are used to drive the plurality of trays to move in different directions; the drive assembly is arranged on the carrier and connected to the plurality of adjustment assemblies to simultaneously drive the plurality of adjustment assemblies to move in different directions. When the transfer device is in use, the orientation and spacing of a plurality of workpieces can be adjusted by only relying on a set of drive assemblies in cooperation with a plurality of adjustment assemblies, which effectively reduces the complexity of the overall structure, and is also conducive to reducing the cost of adjusting the orientation and spacing of the workpieces.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor transportation, and in particular to a transportation device and a vacuum processing equipment. Background Art

[0002] Semiconductors and other workpieces need to be placed in a vacuum environment during process production, so the vacuum sealing requirements during the workpiece transmission process are relatively high, so a special transmission structure will be configured for transmission.

[0003] In the prior art, the workpieces are transported by a robot, which is installed at the bottom of the vacuum chamber. The execution end of the robot is equipped with a corresponding grasping structure to accurately grasp each workpiece and place it at the corresponding workstation.

[0004] However, the gripping and placement of the robot can only be completed within a specific range, and the orientation of the workpiece and the spacing between adjacent workpieces cannot be adjusted. Therefore, multiple sets of drive structures are required to achieve the adjustment of the orientation and spacing of the workpieces, resulting in a complex structure and high cost of the overall vacuum processing equipment. Summary of the invention

[0005] The purpose of the present invention is to provide a transfer device and a vacuum processing equipment, which solves the problem in the prior art that the adjustment of the orientation and spacing of the workpiece during transfer requires the setting of multiple sets of driving structures, resulting in a complex overall structure of the vacuum processing equipment and high cost.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a transport device comprising:

[0008] Loading platform;

[0009] A plurality of pallets, each of which is used to carry workpieces, and each of which is movably connected to the carrying platform via an adjustment component, and the adjustment component is used to drive the pallet to move, and the movement directions of the plurality of pallets are different;

[0010] A driving component, the driving component is disposed on the carrying platform and connected to the plurality of adjustment components to simultaneously drive the plurality of adjustment components to move in different directions;

[0011] The adjustment component comprises:

[0012] A rotating disk, rotatably connected to the bearing platform and connected to the driving assembly, the driving assembly is used to drive the rotating disk to rotate, and the tray is slidably connected to the rotating disk;

[0013] A pushing gear, fixed to the bearing platform;

[0014] A pushing rack is fixed to the tray and meshes with the pushing gear, and pushes the tray to slide while the tray rotates synchronously.

[0015] Optionally, the adjustment component further includes:

[0016] The conveying disc is fixed to the rotating disc. One of the conveying disc and the tray is provided with a slide rail, and the other is provided with a slider which can be slidably connected with the slide rail.

[0017] Optionally, the rotating disk is a rotating gear meshing with the driving assembly.

[0018] Optionally, the driving assembly comprises:

[0019] A plurality of driving gears are rotatably connected to the carrier platform, the plurality of driving gears are meshed in sequence, and each of the driving gears is meshed with one of the adjustment components;

[0020] The driving rack is slidably connected to the bearing platform and meshes with one of the driving gears.

[0021] Optionally, the driving assembly further includes:

[0022] An elastic limiting member has one end connected to the bearing platform and the other end connected to the driving rack.

[0023] Optionally, the transfer device further comprises:

[0024] A first limiting block, movably connected to the carrying platform;

[0025] The second limit block is fixedly disposed on any of the adjustment components and can abut against the first limit block to lock the rotation of the adjustment component.

[0026] Optionally, the adjustment assembly drives the tray to rotate eccentrically.

[0027] In a second aspect, the present invention further provides a vacuum reaction device, comprising:

[0028] Vacuum processing chamber;

[0029] The transfer device as described in any one of the first aspects is arranged in the vacuum processing chamber to adjust the orientation of multiple workpieces and the distance between adjacent workpieces.

[0030] Optionally, the vacuum reaction equipment comprises:

[0031] The driving member is arranged outside the vacuum processing chamber, and the driving end of the driving member is arranged in the vacuum processing chamber and connected with the driving component.

[0032] Optionally, in an initial state, a driving end of the driving member is spaced apart from the driving assembly.

[0033] Beneficial effects of the present invention:

[0034] First, by connecting the driving component to the adjustment components of multiple trays at the same time, when adjusting the orientation and spacing of the workpieces, it is only necessary to operate the driving component, and the driving component can drive the rotating disks of the multiple adjustment components to move at the same time, and the rotating disk can synchronously drive the tray to rotate, and the multiple rotating disks can be arranged around the circumference of the driving component, so that the driving component can drive the multiple rotating disks to rotate in different directions when it moves, and the tray can drive the push rack to rotate synchronously, and the push rack is in a meshing state with the push gear, and the push gear is fixed on the carrier, then as the push rack rotates, the push gear can squeeze the push gear, and the push gear will generate a force that reacts on the push rack to push the push rack to translate relative to the rotating disk, and the push rack can drive the tray to slide synchronously, so that the orientation of the workpieces on the multiple trays and the spacing between adjacent workpieces can be changed. Moreover, since the tray, the adjustment component and the driving component are all integrated on the carrier, the transfer device can be transported as a whole, and it can be directly transported in the transition chamber or the transfer chamber after supporting multiple wafers. When the transfer device is in use, it can adjust the orientation and spacing of multiple workpieces by relying on only one set of driving components and multiple adjustment components, which effectively reduces the complexity of the overall structure and is also beneficial to reducing the cost of adjusting the orientation and spacing of the workpieces.

[0035] Secondly, by setting up the transfer device, the transfer device containing the workpiece can be quickly and conveniently transported to the designated location. The transfer device can also directly adjust the orientation and spacing of multiple workpieces, so there is no need to set up multiple sets of drive structures, thereby effectively reducing the overall structural complexity of the vacuum processing equipment, and is also conducive to reducing the manufacturing cost of the vacuum processing equipment.

[0036] Thirdly, the adjustment component in the transfer device can drive the pallet to complete the rotation of the pallet in a smaller space, ensuring that the space occupied by the pallet during use is smaller, effectively improving the adaptability of the transfer device, and the movement trajectories of the pallets do not interfere with each other, thereby achieving a wider range and more precise adjustment of the orientation and spacing of the workpiece when it is transferred in the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is a top view of a transfer device in an embodiment of the present invention;

[0038] Figure 2 is a cross-sectional view of a transfer device in an embodiment of the present invention;

[0039] Figure 3It is a schematic structural diagram of the adjustment component of the transfer device driving the tray to rotate in an embodiment of the present invention;

[0040] Figure 4 is a top view of the transfer device after the tray is hidden in the embodiment of the present invention;

[0041] Figure 5 is a cross-sectional view of a vacuum processing apparatus according to an embodiment of the present invention.

[0042] In the figure:

[0043] 1. Carrying platform; 2. Driving assembly; 21. Driving rack; 211. Elastic limiter; 22. Driving gear; 23. Push plate; 3. Tray; 31. Initial position; 32. End position; 33. Boundary line rotation trajectory; 4. Adjustment assembly; 41. Rotating disk; 42. Pushing gear; 43. Pushing rack; 44. Conveying disk; 45. Slide rail; 46. Slider; 5. First limit block; 6. Second limit block; 7. Vacuum processing chamber; 8. Driving member. DETAILED DESCRIPTION

[0044] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0045] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0047] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0048] The embodiments of the present invention disclose a transfer device and a vacuum processing equipment.

[0049] Reference Figure 1 and Figure 2 The transfer device includes a carrying platform 1, a driving component 2 and a plurality of pallets 3. The pallets 3 are used to carry workpieces. Each pallet 3 is movably connected to the carrying platform 1 through an adjusting component 4. The adjusting component 4 is used to drive the pallet 3 to move, and the movement directions of the plurality of pallets 3 are different. The driving component 2 is arranged on the carrying platform 1 and is connected to the plurality of adjusting components 4 to simultaneously drive the plurality of adjusting components 4 to move in different directions.

[0050] Specifically, the carrier 1 can be block-shaped, and its shape can be adapted to the conveying structure so that the carrier 1 can be transported in the corresponding path, such as between the transition chamber and the transmission chamber. A plurality of trays 3 are arranged at intervals on the carrier 1, and each tray 3 can carry a workpiece. In this embodiment, the workpiece is a semiconductor element. The shape of the tray 3 can be adjusted according to the shape of the workpiece, and the present invention does not limit this. Each tray 3 is separately configured with a set of adjustment components 4, and the adjustment components 4 can drive the tray 3 to rotate and translate when in action, and the translation direction and rotation direction of the plurality of trays 3 are different. Taking two trays 3 as an example, the two trays 3 can translate in the direction of approaching or moving away from each other, and one of the trays 3 can rotate clockwise, while the other tray 3 can rotate counterclockwise. The activity mode of three or even more trays 3 is the same as described above, and can be specifically designed according to the actual position of the tray 3 and the orientation of the workpiece to be adjusted, and the present invention does not limit this.

[0051] Only one drive assembly 2 is provided and is located between multiple trays 3 so that it can be connected to multiple adjustment assemblies 4 at the same time. The drive assembly 2 can use a gear set as a transmission structure, for example, the direction of the force can be changed by meshing multiple gears in sequence, so that multiple trays 3 can move in different directions. The drive assembly 2 can also use a belt transmission structure for transmission, such as providing multiple sets of transmission shafts and transmission belts, connecting multiple sets of transmission shafts in sequence through transmission belts, and adjusting the installation position of the transmission shaft according to the actual driving requirements to be met, so that multiple trays 3 can also move in different directions. The specific structure of the drive assembly 2 can be designed according to the actual transmission requirements, installation space, manufacturing difficulty and cost.

[0052] By connecting the drive assembly 2 with the adjustment assemblies 4 of multiple pallets 3 at the same time, when adjusting the orientation and spacing of the workpieces, it is only necessary to operate the drive assembly 2, and the drive assembly 2 can drive the multiple adjustment assemblies 4 to act simultaneously, and the multiple adjustment assemblies 4 can synchronously drive the multiple pallets 3 to move in different directions, thereby changing the orientation of the workpieces on the multiple pallets 3 and the spacing between adjacent workpieces. Moreover, since the pallets 3, the adjustment assemblies 4 and the drive assembly 2 are all integrated on the support platform 1, the transfer device can be transported as a whole, so it can be directly transported in the transition chamber or the transfer chamber after supporting multiple workpieces. When the transfer device is in use, it only relies on a set of drive assemblies 2 to cooperate with multiple adjustment assemblies 4 to achieve the adjustment of the orientation and spacing of multiple workpieces, which effectively reduces the complexity of the overall structure, and is also conducive to reducing the cost of achieving the orientation and spacing adjustment of the workpieces.

[0053] Reference Figure 3 , the adjustment component 4 drives the tray 3 to rotate eccentrically. Taking two trays 3 and two adjustment components 4 as an example, one adjustment component 4 drives the corresponding tray 3 to rotate eccentrically clockwise, while the other adjustment component 4 drives the corresponding tray 3 to rotate eccentrically counterclockwise. The initial position 31 of the tray 3 and the terminal position 32 of the tray 3 need to be rotated 180°, and the upper and lower endpoints on one side of the tray 3 are used to make the boundary line rotation trajectory 33 of the tray 3. The boundary line rotation trajectory 33 is irregular, and the boundary line rotation trajectory 33 is the space that the tray 3 needs to occupy during the rotation process. It can be seen from the boundary line rotation trajectory 33 that the adjustment component 4 can drive the tray 3 to complete the rotation of the tray in a smaller space, ensuring that the space occupied by the tray 3 during use is smaller, and can be adapted to various environments, thereby effectively improving the adaptability of the transfer device. In addition, the movement trajectories of the two trays 3 do not interfere with each other, and the tray 3 can move better inside the cavity, realizing a larger range and more precise adjustment of the orientation and spacing of the workpiece when it is transferred in the cavity.

[0054] Reference Figure 4 Optionally, the adjustment assembly 4 includes a rotating disk 41, a pushing gear 42 and a pushing rack 43. The rotating disk 41 is rotatably connected to the carrier 1 and connected to the driving assembly 2, the driving assembly 2 is used to drive the rotating disk 41 to rotate, and the tray 3 is slidably connected to the rotating disk 41; the pushing gear 42 is fixed to the carrier 1; the pushing rack 43 is fixed to the tray 3 and meshes with the pushing gear 42, and pushes the tray 3 to slide while the tray 3 rotates synchronously.

[0055] Specifically, the rotating disk 41 can be a belt pulley, which is connected to the driving assembly 2 through a belt, and the driving assembly 2 can drive it to rotate. The rotating disk 41 can also be a rotating gear, which is meshed with the driving assembly 2. In the present embodiment, the rotating disk 41 is a rotating gear. The bottom wall of the rotating disk 41 is rotatably connected to the bearing platform 1 through a rotating shaft, and its top wall is slidably connected to the tray 3 through structures such as tracks, and the tray 3 can rotate synchronously with the rotating disk 41. A rotating rod is arranged in the center of the rotating disk 41, the lower end of the rotating rod is fixedly connected to the bearing platform 1, and the upper end passes through the rotating disk 41 and is provided with a push gear 42, which is fixedly connected to the rotating rod. The push rack 43 is fixed on the bottom wall of the tray 3 and meshes with the push gear 42.

[0056] By providing the rotating disk 41, the pushing gear 42 and the pushing rack 43, when the driving assembly 2 drives the rotating disk 41 to rotate, the rotating disk 41 can synchronously drive the tray 3 to rotate. Multiple rotating disks 41 can be arranged around the circumference of the driving assembly 2, so that the driving assembly 2 can drive multiple rotating disks 41 to rotate in different directions when in operation. In simple terms, when the driving assembly 2 drives the rotating disk 41 on one side to rotate clockwise, the rotating disk 41 on the other side of the driving assembly 2 will synchronously rotate counterclockwise.

[0057] As the tray 3 rotates, the tray 3 can drive the pushing rack 43 to rotate synchronously, and the pushing rack 43 is in a meshing state with the pushing gear 42, and the pushing gear 42 is fixed to the supporting platform 1 through a rotating rod. As the pushing rack 43 rotates, the pushing rack 43 can squeeze the pushing gear 42, and the pushing gear 42 will generate a force that reacts on the pushing rack 43 to push the pushing rack 43 to translate relative to the rotating disk 41, and the pushing rack 43 can drive the tray 3 to slide synchronously, and the sliding direction can be designed in a way that the spacing is adjusted according to actual needs. For example, the two trays 3 can be close to or away from each other, etc., so that the synchronous rotation and sliding of the trays 3 can be achieved.

[0058] Optionally, the adjustment assembly 4 further includes a conveying disc 44. The conveying disc 44 is fixed to the rotating disc 41, and one of the conveying disc 44 and the tray 3 is provided with a slide rail 45, and the other is provided with a slider 46 that can be slidably connected to the slide rail 45.

[0059] Specifically, a conveying disc 44 is fixed on the top wall of the rotating disc 41, and a slider 46 is fixed on the top wall of the conveying disc 44. The sliders 46 can be arranged in two rows at intervals, and each row includes two sliders 46 distributed at intervals. Two parallel slide rails 45 are arranged at intervals on the bottom wall of the tray 3, and one slide rail 45 corresponds to a row of sliders 46 and forms a sliding connection. Both ends of the slide rail 45 do not extend out of the edge of the tray 3 to reduce the possibility of interference caused by the slide rail 45.

[0060] By providing the conveying plate 44, sufficient space can be provided for the slide rails 45 and the sliders 46, and the external force on the rotating plate 41 can be reduced, ensuring that the rotating plate 41 can rotate smoothly under the drive of the driving assembly 2. The provision of the slide rails 45 and the sliders 46 allows the tray 3 to be subjected to uniform force during the sliding process, ensuring that the tray 3 can move stably.

[0061] Reference Figure 2 and Figure 4 Optionally, the driving assembly 2 includes a driving rack 21 and a plurality of driving gears 22. The plurality of driving gears 22 are rotatably connected to the carrier 1, the plurality of driving gears 22 are meshed in sequence, and each driving gear 22 is meshed with an adjustment assembly 4. The driving rack 21 is slidably connected to the carrier 1 and meshed with one of the driving gears 22.

[0062] Specifically, the number of driving gears 22 can be the same as that of the adjustment assembly 4, that is, each driving assembly 2 is only meshed with the rotating disk 41 of one adjustment assembly 4. The driving rack 21 can be meshed with any of the driving gears 22. The driving rack 21 can be equipped with a cylinder as a power source alone, or a motor can be set as a power source and cooperate with a lead screw and other structures to drive the driving rack 21 to slide. In this embodiment, two driving gears 22 are provided, and one driving gear 22 is meshed with the rotating disk 41 of one adjustment assembly 4. The driving rack 21 is fixedly provided with a push plate 23, which extends along the length direction of the driving rack 21. A connecting end is provided at one end of the push plate 23 away from the driving rack 21, and the connecting end is used to connect with a driving element such as a cylinder.

[0063] By providing a driving rack 21 and multiple driving gears 22, when the driving rack 21 is driven to move, the driving rack 21 can drive the driving gear 22 to rotate, thereby simultaneously driving multiple driving gears 22 to rotate, thereby driving multiple adjustment components 4 to produce corresponding actions.

[0064] Optionally, the driving assembly 2 further includes an elastic limiting member 211 . One end of the elastic limiting member 211 is connected to the supporting platform 1 , and the other end of the elastic limiting member 211 is connected to the driving rack 21 .

[0065] Specifically, one end of the elastic limiter 211 is fixedly connected to the support platform 1, and the other end is fixed to the driving rack 21. The fixed connection can be achieved by welding or bonding, or by hooking or clamping. In the initial state, the elastic limiter 211 always maintains an elastic tendency to generate a continuous elastic force on the driving rack 21, thereby limiting the driving rack 21 in the initial state. The elastic tendency can be generated by the elastic limiter 211 in a tensile state, or by the elastic limiter 211 in a compressed state, depending on the installation position of the elastic limiter 211, and the installation position can be designed according to the actual range of movement of the driving rack 21 and the installation space, which is not limited by the present invention. The elastic limiter 211 can be a spring or an elastic rod, which is not limited by the present invention.

[0066] By providing the elastic limiting member 211 , the movement of the driving rack 21 can be limited, thereby ensuring that the position of the driving rack 21 is locked in the initial state, thereby avoiding the possibility of the driving rack 21 moving in the event of an accidental touch.

[0067] Optionally, the transfer device further comprises a first limit block 5 and a second limit block 6. The first limit block 5 is movably connected to the carrying platform 1; the second limit block 6 is fixedly arranged on any adjustment component 4 and can abut against the first limit block 5 to lock the rotation of the adjustment component 4.

[0068] Specifically, the first limit block 5 is fixed on the support platform 1 by screwing or clamping, so that the installation position of the first limit block 5 can be adjusted in the circumferential direction of the adjustment component 4. At the initial position 31, the rotation angle of the rotating disk 41 of the adjustment component 4 is 0°, and the first limit block 5 is fixedly installed on the support platform 1. At this time, the first limit block 5 is just pressed against the second limit block 6 to ensure that the initial position 31 of the rotating disk 41 is fixed. Similarly, multiple first limit blocks 5 can be distributed around the rotating disk 41 at intervals in the circumferential direction. In this embodiment, two first limit blocks 5 are symmetrically arranged, that is, one of the first limit blocks 5 is located at the position when the rotation angle of the rotating disk 41 is 0°, and the other first limit block 5 is located at the position when the rotation angle of the rotating disk 41 is 180°.

[0069] By setting the first limit block 5 and the second limit block 6, hard limits are formed at the initial position 31 and the final position 32 of the rotation of the rotating disk 41, and the initial position 31 and the final position 32 can be made more accurate by adjusting the first limit block 5, so as to ensure that the rotating disk 41 can drive the workpiece to rotate within the specified angle range, thereby smoothly changing the orientation of the workpiece. Moreover, the first limit block 5 and the second limit block 6 only need to be set in one group of adjustment components 4, because multiple adjustment components 4 are connected through the drive component 2, when one group of adjustment components 4 is locked by the first limit block 5 and the second limit block 6, the drive component 2 and the remaining adjustment components 4 will be locked at the same time.

[0070] Reference Figure 5 The vacuum reaction equipment includes a vacuum processing chamber 7 and a transfer device as in the above embodiment, and the transfer device is arranged in the vacuum processing chamber 7 to adjust the orientation of multiple workpieces and the distance between adjacent workpieces.

[0071] By setting up the transfer device, the transfer device containing the workpieces can be quickly and conveniently transported to the designated location. The transfer device can also directly adjust the orientation and spacing of multiple workpieces, so there is no need to set up multiple sets of drive structures, thereby effectively reducing the overall structural complexity of the vacuum processing equipment and also helping to reduce the manufacturing cost of the vacuum processing equipment.

[0072] The vacuum reaction device comprises a driving member 8 . The driving end of the driving member 8 is arranged in the vacuum processing chamber 7 and connected to the driving assembly 2 .

[0073] Specifically, the driving member 8 can be a cylinder, whose cylinder body is fixed on the outside of the vacuum processing chamber 7, and the piston rod of the cylinder can pass through the cavity wall of the vacuum processing chamber 7 and extend into the vacuum processing chamber 7 to abut against the push plate 23 of the driving component 2. When the piston rod of the cylinder is extended, it can abut against the push plate 23 and push the driving rack 21 to move. And the driving end of the driving member 8 is not directly connected to the driving rack 21, so that the transfer device will not cause pulling on the driving end when moving. A sealing member can be provided at the position where the driving member 8 passes through the vacuum processing chamber 7 to ensure that the vacuum processing chamber 7 has good airtightness as a whole. In other embodiments, the driving member 8 can also be a motor with a transmission structure such as a lead screw, which can also realize the pushing of the driving rack 21 to move.

[0074] In the initial state, the driving end of the driving member 8 is spaced from the driving assembly 2. That is, when the transfer device is sent to the vacuum processing equipment, the driving end of the driving member 8 does not contact the push plate 23 of the driving assembly 2, ensuring that the power is disconnected. Similarly, when the transfer device leaves, the driving end of the driving member 8 is also spaced from the push plate 23 of the driving assembly 2. The push plate 23 is pulled by the elastic limiter 211 and other structures to reset the driving rack 21 and keep it in the initial state, so as to ensure that the overall mobility of the transfer device is high.

[0075] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A transfer device, characterized in that: include: A carrying platform (1); A plurality of pallets (3), the pallets (3) being used to carry workpieces, each of the pallets (3) being movably connected to the carrying platform (1) via an adjustment component (4), the adjustment component (4) being used to drive the pallet (3) to move, and the movement directions of the plurality of pallets (3) being different; A driving assembly (2), the driving assembly (2) being arranged on the supporting platform (1), the driving assembly (2) comprising a gear set or a belt transmission structure, the gear set or the belt transmission structure being connected to the plurality of adjustment assemblies (4) so ​​as to simultaneously drive the plurality of adjustment assemblies (4) to move in different directions; The adjustment component (4) comprises: A rotating disk (41) is rotatably connected to the carrier platform (1) and connected to the driving assembly (2), wherein the driving assembly (2) is used to drive the rotating disk (41) to rotate, and the tray (3) is slidably connected to the rotating disk (41); A pushing gear (42) fixed to the supporting platform (1); A pushing rack (43) is fixed to the tray (3) and meshes with the pushing gear (42), and pushes the tray (3) to slide while the tray (3) rotates synchronously.

2. The transfer device according to claim 1, characterized in that: The adjustment component (4) further comprises: A conveying disc (44) is fixed to the rotating disc (41); one of the conveying disc (44) and the tray (3) is provided with a slide rail (45), and the other is provided with a slider (46) that can be slidably connected to the slide rail (45).

3. The transfer device according to claim 2, characterized in that: The rotating disk (41) is a rotating gear meshing with the driving assembly (2).

4. The transfer device according to claim 1, characterized in that: The driving assembly (2) comprises: A plurality of driving gears (22) are rotatably connected to the support platform (1), the plurality of driving gears (22) are meshed in sequence, and each of the driving gears (22) is meshed with one of the adjustment components (4); A driving rack (21) is slidably connected to the support platform (1) and meshes with one of the driving gears (22).

5. The transfer device according to claim 4, characterized in that: The driving assembly (2) further comprises: An elastic limiting member (211) has one end connected to the bearing platform (1) and the other end connected to the driving rack (21).

6. The transfer device according to claim 1, characterized in that: The transfer device also includes: A first limiting block (5) movably connected to the supporting platform (1); The second limit block (6) is fixedly arranged on any one of the adjustment components (4) and can abut against the first limit block (5) to lock the rotation of the adjustment component (4).

7. The transfer device according to any one of claims 1 to 6, characterized in that: The adjustment component (4) drives the tray (3) to rotate eccentrically.

8. Vacuum reaction equipment, characterized in that: include: A vacuum treatment chamber (7); The transfer device according to any one of claims 1 to 7 is arranged in the vacuum processing chamber (7) to adjust the orientation of multiple workpieces and the distance between adjacent workpieces.

9. The vacuum reaction equipment according to claim 8, characterized in that: The vacuum reaction equipment comprises: A driving member (8) is arranged outside the vacuum processing chamber (7), and a driving end of the driving member (8) is inserted into the vacuum processing chamber (7) and connected to the driving component (2).

10. The vacuum reaction equipment according to claim 9, characterized in that: In an initial state, a driving end of the driving member (8) is spaced apart from the driving assembly (2).

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