Chemical liquid supply device

Abstract

The invention relates to a chemical liquid supply device. The chemical liquid supply device comprises a liquid supply unit, the liquid supply unit comprises at least two liquid supply assemblies, each liquid supply assembly comprises a liquid supply tank, a driving pipeline and a liquid supply pipeline, the liquid supply tank is provided with a first gas inlet and a first liquid outlet, the driving pipeline is communicated with the first gas inlet and used for injecting driving gas into the liquid supply tank through the first gas inlet, and the liquid supply pipeline is communicated with the first gas inlet; the liquid supply pipeline is communicated with the liquid supply tank so that the liquid chemicals in the liquid supply tank can be output from the first liquid outlet under the action of air pressure generated by the driving gas, and the liquid supply pipeline is communicated with the first liquid outlet and used for conveying the liquid chemicals output from the first liquid outlet to the downstream; the control unit is in communication connection with the driving pipeline and the liquid supply pipeline of each liquid supply assembly and used for controlling the driving pipeline and the liquid supply pipeline of each liquid supply assembly to be connected or disconnected.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a chemical liquid supply device. Background Art

[0002] The semiconductor industry requires the use of a variety of chemical liquids. For example, in the semiconductor vapor deposition process, a chemical liquid supply device is required to transport liquid chemicals to the reaction chamber so that chemical vapor deposition can be performed in the reaction chamber. The accuracy and stability of the liquid chemical delivery device directly affects the thickness and composition of the thin film material grown on the semiconductor substrate during chemical vapor deposition, thereby directly affecting the performance of the semiconductor chip.

[0003] Generally, chemical liquid supply devices cannot automatically and continuously supply multiple chemicals, but can only supply a single chemical. When the type of chemical needs to be changed, the liquid supply pipeline needs to be cleaned frequently, resulting in serious waste of chemicals and low production efficiency. Summary of the invention

[0004] Based on this, it is necessary to provide a chemical liquid supply device that can reduce the frequency of cleaning pipelines, thereby avoiding chemical waste and improving production efficiency in order to address the above problems.

[0005] A chemical liquid supply device, comprising:

[0006] A liquid supply unit, comprising at least two liquid supply components, each of which comprises a liquid supply tank, a driving pipeline and a liquid supply pipeline, the liquid supply tank having a first air inlet and a first liquid outlet, the driving pipeline being in communication with the first air inlet and used for injecting a driving gas into the liquid supply tank through the first air inlet, so that the liquid chemical in the liquid supply tank is output from the first liquid outlet under the action of the air pressure generated by the driving gas, and the liquid supply pipeline being in communication with the first liquid outlet and used for transporting the liquid chemical output from the first liquid outlet to a downstream; and

[0007] The control unit is communicatively connected with the driving pipeline and the liquid supply pipeline of each liquid supply component, and is used for controlling the connection or disconnection of the driving pipeline and the liquid supply pipeline of each liquid supply component.

[0008] In some embodiments, the liquid supply pipeline of each of the liquid supply components includes a main liquid supply pipeline and a plurality of branch liquid supply pipelines, one end of the main liquid supply pipeline is connected to the first liquid outlet, and each of the branch liquid supply pipelines is connected to the main liquid supply pipeline and is used to transport the liquid chemical in the main liquid supply pipeline to the downstream;

[0009] The main liquid supply line is communicatively connected with the control unit so that the control unit can control the main liquid supply line to be turned on or off.

[0010] In some embodiments, the liquid supply pipeline also includes a third control valve installed on the main liquid supply pipeline, and the liquid supply assembly also includes a gas-liquid separation pipeline, the gas-liquid separation pipeline includes a first connecting pipeline, a gas-liquid separator and a second connecting pipeline, the gas-liquid separator has a second liquid inlet, a second liquid outlet and a first exhaust port, the gas-liquid separator is used to perform gas-liquid separation on the liquid chemical entering through the second liquid inlet, and discharge the separated gas through the first exhaust port; the first connecting pipeline is connected between a portion of the liquid supply main pipeline located upstream of the third control valve and the second liquid inlet, and the second connecting pipeline is connected between a portion of the liquid supply main pipeline located downstream of the third control valve and the second liquid outlet.

[0011] In some embodiments, the gas-liquid separator further has a vacuum port, and the gas-liquid separation pipeline further includes a vacuum pipeline, which is connected to the vacuum port and is used to vacuum the gas-liquid separator through the vacuum port.

[0012] In some embodiments, each of the liquid supply components further comprises a raw liquid tank, a liquid pipeline and a ventilation pipeline, the raw liquid tank has a second air inlet and a liquid inlet and outlet, and the liquid supply tank also has a first liquid inlet;

[0013] The liquid-passing pipeline is connected between the liquid inlet and outlet and the first liquid inlet, one end of the ventilation pipeline is connected to the drive pipeline, and the other end of the ventilation pipeline is connected to the second air inlet; the ventilation pipeline and the liquid-passing pipeline are both communicatively connected to the control unit so that the control unit can control the ventilation pipeline and the liquid-passing pipeline to be turned on or off.

[0014] In some of the embodiments, each of the liquid supply components also includes a purge pipeline for providing a purge gas, the purge pipeline is connected to the ventilation pipeline, the liquid pipeline, the drive pipeline and the liquid supply pipeline, and the purge pipeline is communicatively connected to the control unit so that the control unit can control the purge pipeline to be turned on or off.

[0015] In some embodiments, each of the liquid supply components also includes an exhaust pipeline, which is connected to the liquid pipeline, the ventilation pipeline, the drive pipeline and the liquid supply pipeline, and the exhaust pipeline is communicatively connected to the control unit so that the control unit can control the exhaust pipeline to be turned on or off.

[0016] In some embodiments, the exhaust pipeline includes a vacuum generator, an air intake pipe, an exhaust pipe and a connecting pipe. The vacuum generator has a third air intake port connected to the air intake pipe, a second exhaust port connected to the exhaust pipe and a negative pressure port connected to the connecting pipe. The air intake pipe is used to provide control gas to the third air intake port. The exhaust pipe is used to discharge the gas entering the vacuum generator through the third air intake port and the negative pressure port. The vacuum generator can generate negative pressure at the negative pressure port when positive pressure is input to the third air intake port. The connecting pipe is connected to the liquid pipeline, the ventilation pipeline, the drive pipeline and the liquid supply pipeline.

[0017] In some embodiments, the exhaust pipeline also includes a one-way valve installed on the connecting pipe, and the one-way valve is used to allow the gas and / or liquid in the connecting pipe to flow in a direction close to the negative pressure port, and prevent the gas and / or liquid in the connecting pipe from flowing in a direction away from the negative pressure port.

[0018] In some embodiments, the liquid supply assembly also includes a liquid replenishment pipeline for providing liquid chemicals, the liquid replenishment pipeline is connected to the liquid inlet and outlet, and the liquid replenishment pipeline is communicatively connected to the control unit so that the control unit can control the liquid replenishment pipeline to be turned on or off.

[0019] In actual use, the above-mentioned chemical liquid supply device can store different types of liquid chemicals in the liquid supply tank of each liquid supply component. When the downstream equipment needs one or several liquid chemicals, the control unit controls the driving pipeline and the liquid supply pipeline of the corresponding one or several liquid supply components to be connected, so that the driving pipeline of the one or several liquid supply components transports the driving gas to the liquid supply tank, so that the gas pressure in the liquid supply tank increases and the liquid chemical in the liquid supply tank is pushed out from the first liquid outlet. The liquid chemical output from the first liquid outlet is transported to the downstream equipment through the liquid supply pipeline, thereby realizing the provision of one or several different types of liquid chemicals to the downstream equipment.

[0020] In this way, the chemical liquid supply device in the present application can, under the control of the control unit, selectively provide one or more liquid chemicals to the downstream equipment through one or several liquid supply components, thereby avoiding the need to clean the pipeline before providing different types of liquid chemicals to the downstream equipment, greatly reducing the frequency of cleaning the pipeline, reducing chemical waste, and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the structure of a chemical liquid supply device in one embodiment of the present application;

[0022] Figure 2 for Figure 1A schematic structural diagram of one of the liquid supply components of the liquid supply unit of the chemical liquid supply device shown;

[0023] Figure 3 for Figure 1 A schematic structural diagram of another liquid supply component of the liquid supply unit of the chemical liquid supply device shown;

[0024] Figure 4 for Figure 1 A schematic structural diagram of another liquid supply component of the liquid supply unit of the chemical liquid supply device shown;

[0025] Figure 5 for Figure 1 The schematic diagram of the structure of the control unit of the chemical liquid supply device is shown. DETAILED DESCRIPTION

[0026] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0027] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0029] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0030] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0031] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0032] See also Figure 1 and Figure 2The present application provides a chemical liquid supply device for providing liquid chemicals to downstream equipment. The chemical liquid supply device includes a liquid supply unit 10 and a control unit 30. The liquid supply unit 10 includes at least two liquid supply components 20, and each liquid supply component 20 can provide liquid chemicals to downstream equipment simultaneously or at different times. Each liquid supply component 20 includes a liquid supply tank 21, a drive pipeline 22 and a liquid supply pipeline 23. The liquid supply tank 21 has a first air inlet a1 and a first liquid outlet a2. The drive pipeline 22 is connected to the first air inlet a1 of the liquid supply tank 21, and the drive pipeline 22 is used to inject a driving gas into the liquid supply tank 21 through the first air inlet a1, so that the liquid chemical in the liquid supply tank 21 is output from the first liquid outlet a2 under the action of the air pressure generated by the driving gas. The liquid supply pipeline 23 is in communication with the first liquid outlet a2 of the liquid supply tank 21, and the liquid supply pipeline 23 is used to transport the liquid chemical outputted from the first liquid outlet a2 to the downstream equipment, that is, to achieve the purpose of providing the liquid chemical to the downstream equipment. The control unit 30 is in communication connection with the drive pipeline 22 and the liquid supply pipeline 23 of each liquid supply component 20, and is used to control the drive pipeline 22 and the liquid supply pipeline 23 of each liquid supply component 20 to be turned on or off respectively.

[0033] In actual use, the above-mentioned chemical liquid supply device can store different types of liquid chemicals in the liquid supply tank 21 of each liquid supply component 20. When the downstream equipment needs one or several liquid chemicals, the control unit 30 controls the corresponding one or several liquid supply components 20 The drive pipeline 22 and the liquid supply pipeline 23 are connected, so that the drive pipeline 22 of the one or several liquid supply components 20 delivers the driving gas to the liquid supply tank 21, so that the gas pressure in the liquid supply tank 21 increases and the liquid chemical in the liquid supply tank 21 is pushed out from the first liquid outlet a2. The liquid chemical output from the first liquid outlet a2 is delivered to the downstream equipment through the liquid supply pipeline 23, thereby realizing the provision of one or several different types of liquid chemicals to the downstream equipment.

[0034] In this way, the chemical liquid supply device in the present application can, under the control of the control unit 30, selectively provide one or more liquid chemicals to the downstream equipment through one or several liquid supply components 20, thereby avoiding the need to clean the pipeline before providing different types of liquid chemicals to the downstream equipment, greatly reducing the frequency of cleaning the pipeline, reducing the waste of chemicals, and improving production efficiency.

[0035] It should be noted that the control unit 30 of the chemical liquid supply device in the present application can control each liquid supply component 20 to independently deliver different types of liquid chemicals to the downstream equipment, that is, it realizes the automatic provision of different types of liquid chemicals to the downstream equipment simultaneously or at different times, greatly improves the degree of automation, and is conducive to further improving production efficiency.

[0036] It should also be noted that the driving pipeline 22 has a first connector 227, and the driving pipeline 22 is connected to an external driving gas source through the first connector 227, so that the external driving gas source provides driving gas to the driving pipeline 22. The external driving gas source can be a gas supply device that can output driving gas, and the specific structure is not limited here. The driving gas can be helium, and of course it can also be other gases that do not react chemically with liquid chemicals, which are not limited here.

[0037] In the embodiment of the present application, the liquid supply pipeline 23 of each liquid supply assembly 20 includes a liquid supply main pipeline 231 and a plurality of liquid supply branch pipelines 233. One end of the liquid supply main pipeline 231 is connected to the first liquid outlet a2 of the liquid supply tank 21, and each liquid supply branch pipeline 233 is connected to the liquid supply main pipeline 231. Each liquid supply branch pipeline 233 is used to transport the liquid chemicals in the liquid supply main pipeline 231 to multiple downstream devices respectively. The liquid supply main pipeline 231 is connected to the control unit 30 so that the control unit 30 can control the liquid supply main pipeline 231 to be turned on or off. In this way, when it is necessary to provide liquid chemicals to the downstream equipment, the control unit 30 controls the liquid supply main pipeline 231 to be turned on, so that the liquid chemicals in the liquid supply tank 21 enter each liquid supply branch pipeline 233 through the liquid supply main pipeline 231 under the action of the gas pressure generated by the driving gas, and then are transported to multiple downstream devices respectively, that is, liquid chemicals are provided to multiple downstream devices at the same time, which is conducive to further improving production efficiency. When there is no need to supply liquid chemicals to the downstream equipment, the control unit 30 controls the main liquid supply line 231 to be cut off.

[0038] It should be noted that the number of liquid supply branch pipes 233 included in the liquid supply pipeline 23 of each liquid supply component 20 can be 1, 2, 3, 4 or 5, etc., and the number of liquid supply branch pipes 233 included in the liquid supply pipeline 23 of each liquid supply component 20 can be the same or different, which is not limited here.

[0039] Specifically in the embodiment, the liquid supply pipeline 23 also includes a first control valve 232 installed on the main liquid supply pipeline 231, and the first control valve 232 is communicatively connected with the control unit 30, so that the control unit 30 can control the first control valve 232 to open or close, thereby realizing the control of the main liquid supply pipeline 231 to be turned on or off. In this way, when the control unit 30 controls the first control valve 232 to be opened, the main liquid supply pipeline 231 is turned on, and when the control unit 30 controls the first control valve 232 to be closed, the main liquid supply pipeline 231 is turned off.

[0040] Specifically in the embodiment, the liquid supply pipeline 23 also includes a second control valve 235 installed on each liquid supply branch pipeline 233, and each second control valve 235 is connected to the control unit 30 in communication, so that the control unit 30 can control each second control valve 235 to open or close, thereby realizing the control of each liquid supply branch pipeline 233 to be turned on or off. In this way, when it is necessary to transport the liquid supply to the downstream, the control unit 30 controls the corresponding second control valve 235 to open, so that the corresponding liquid supply branch pipeline 233 is turned on. When the liquid supply is completed, the control unit 30 controls the corresponding second control valve 235 to close, so that the corresponding liquid supply branch pipeline 233 is turned off.

[0041] Specifically in the embodiment, the liquid supply pipeline 23 also includes a first manual valve 237 installed on each liquid supply branch pipeline 233, and each first manual valve 237 is used to control the conduction or cutoff of each liquid supply branch pipeline 233. When the chemical liquid supply device is in a non-working state such as shutdown for maintenance or standby, each first manual valve 237 can be manually closed to cut off each liquid supply branch pipeline 233, so that even if the first control valve 232 and the second control valve 235 are opened due to abnormality or misoperation of the control unit 30, the liquid supply branch pipeline 233 will not be conducted. Before the liquid supply operation is required, each first manual valve 237 can be manually opened to facilitate the subsequent liquid supply operation under the control of the control unit 30.

[0042] See also Figure 3 and Figure 4Specifically in the embodiment, the liquid supply pipeline 23 also includes a third control valve 234 installed on the main liquid supply pipeline 231, and the liquid supply assembly 20 also includes a gas-liquid separation pipeline 24. The gas-liquid separation pipeline 24 is used to perform gas-liquid separation on the liquid chemicals flowing through the main liquid supply pipeline 231 to remove the gas carried in the liquid chemicals (i.e., remove bubbles). Specifically, the gas-liquid separation pipeline 24 includes a first connecting pipeline 241, a gas-liquid separator 242 and a second connecting pipeline 243. The gas-liquid separator 242 has a second liquid inlet, a second liquid outlet and a first exhaust port. The gas-liquid separator 242 is used to perform gas-liquid separation on the liquid chemicals entering from the second liquid inlet, and discharge the separated gas from the first exhaust port. The first connecting pipeline 241 is connected between the portion of the main liquid supply pipeline 231 located upstream of the third control valve 234 and the second liquid inlet of the gas-liquid separator 242, and the second connecting pipeline 243 is connected between the portion of the main liquid supply pipeline 231 located downstream of the third control valve 234 and the second liquid outlet of the gas-liquid separator 242. In this way, when bubbles exist in the liquid chemical, the third control valve 234 is closed, so that the liquid chemical entering the main liquid supply pipeline 231 enters the gas-liquid separator 242 through the first connecting pipeline 241 and the second liquid inlet and undergoes gas-liquid separation, and the separated gas is discharged from the first exhaust port of the gas-liquid separator 242. The liquid chemical that has completed gas-liquid separation enters the second connecting pipeline 243 from the second liquid outlet of the gas-liquid separator 242, and then returns to the main liquid supply pipeline 231 from the second connecting pipeline 243, and then is supplied to each downstream device through each liquid supply branch pipeline 233.

[0043] Further, the third control valve 234 is connected to the control unit 30 for communication, so that the control unit 30 can control the third control valve 234 to be opened or closed. When the control unit 30 controls the third control valve 234 to be closed, the liquid chemical in the main liquid supply line 231 enters the gas-liquid separator 242 through the first connecting line 241 for gas-liquid separation, and the liquid chemical after gas-liquid separation enters the main liquid supply line 231 again through the second connecting line 243, and then is transported to each downstream device through each liquid supply branch line 233. When the control unit 30 controls the third control valve 234 to be opened, the liquid chemical in the main liquid supply line 231 directly enters each liquid supply branch line 233, and then is transported to each downstream device.

[0044] Further, the gas-liquid separation pipeline 24 also includes a fourth control valve 245 installed on the first connecting pipeline 241 and a fifth control valve 246 installed on the second connecting pipeline 243. The control unit 30 is connected to the fourth control valve 245 and the fifth control valve 246 in communication, so that the control unit 30 can control the fourth control valve 245 and the fifth control valve 246 to open or close. When the control unit 30 controls the fourth control valve 245 and the fifth control valve 246 to open, and controls the third control valve 234 to close, the liquid chemical entering the liquid supply main pipeline 231 passes through the first connecting pipeline 241, the gas-liquid separator 242 and the second connecting pipeline 243 in sequence and then returns to the liquid supply pipeline 23, and then enters each liquid supply branch pipeline 233. When the control unit 30 controls the fourth control valve 245 and the fifth control valve 246 to close, and controls the third control valve 234 to open, the liquid chemical entering the liquid supply main pipeline 231 is directly transported to each liquid supply branch pipeline 233 along the liquid supply main pipeline 231.

[0045] Furthermore, the gas-liquid separator 242 also has a vacuum port, and the gas-liquid separation pipeline 24 also includes a vacuum pipeline 244, one end of which is connected to the vacuum port of the gas-liquid separator 242, and the other end of the vacuum pipeline 244 has a second connector 245. The vacuum pipeline 244 is connected to an external vacuum device through the second connector 245, so that the external vacuum device can vacuum the inside of the gas-liquid separator 242 through the vacuum pipeline 244 and the vacuum port, so that the inside of the gas-liquid separator 242 is in a negative pressure state, which is conducive to improving the gas-liquid separation effect of the gas-liquid separator 242 on liquid chemicals. It should be noted that the specific structure of the gas-liquid separator 242 is a relatively mature existing technology and is not limited here.

[0046] It should also be noted that the gas-liquid separation pipeline 24 is not necessary and can be configured according to process requirements, and is not particularly limited here. In other words, some of the liquid supply components 20 can be configured with the gas-liquid separation pipeline 24, and the remaining liquid supply components 20 can not be configured with the gas-liquid separation pipeline 24. Alternatively, all liquid supply components 20 can be configured with the gas-liquid separation pipeline 24. Alternatively, all liquid supply components 20 can not be configured with the gas-liquid separation pipeline 24.

[0047] Please see again Figure 2As shown, in the embodiment of the present application, each liquid supply assembly 20 further includes a raw liquid tank 25, a liquid passage line 26 and a ventilation line 27. The raw liquid tank 25 has a second air inlet b1 and a liquid inlet and outlet b2, and the liquid supply tank 21 also has a first liquid inlet a3. The liquid passage line 26 is connected between the liquid inlet and outlet b2 of the raw liquid tank 25 and the first liquid inlet a3 of the liquid supply tank 21. One end of the ventilation line 27 is connected to the drive line 22, and the other end of the ventilation line 27 is connected to the second air inlet b1 of the raw liquid tank 25. The liquid passage line 26 and the ventilation line 27 are both communicatively connected to the control unit 30, so that the control unit 30 can control the liquid passage line 26 and the ventilation line 27 to be turned on or off respectively.

[0048] In this way, when it is necessary to inject liquid chemicals into the liquid supply tank 21, the control unit 30 controls the ventilation pipeline 27 and the liquid pipeline 26 to be connected, so that the driving gas transported by the driving pipeline 22 can enter the raw liquid tank 25 through the ventilation pipeline 27, thereby increasing the gas pressure in the raw liquid tank 25 and pushing the liquid chemicals in the raw liquid tank 25 out of the liquid inlet and outlet b2. The liquid chemicals output from the liquid inlet and outlet b2 enter the liquid supply tank 21 through the liquid pipeline 26 and the first liquid inlet a3, thereby realizing the injection of the liquid chemicals in the raw liquid tank 25 into the liquid supply tank 21. When it is not necessary to inject liquid chemicals into the liquid supply tank 21, the control unit 30 controls the ventilation pipeline 27 and the liquid pipeline 26 to be closed.

[0049] Specifically in the embodiment, the sixth control valve 221 and the seventh control valve 227 are sequentially installed on the drive pipeline 22 from upstream to downstream. The ventilation pipeline 27 is connected to the portion of the drive pipeline 22 between the sixth control valve 221 and the seventh control valve 227. The eighth control valve 271 is installed on the ventilation pipeline 27. The sixth control valve 221, the seventh control valve 227 and the eighth control valve 271 are all connected to the control unit 30 for communication, so that the control unit 30 can control the sixth control valve 221, the seventh control valve 227 and the eighth control valve 271 to open or close. In this way, when the control unit 30 controls the sixth control valve 221 and the seventh control valve 227 to open and the eighth control valve 271 to close, the driving gas can enter the liquid supply tank 21 through the driving pipeline 22, thereby pushing the liquid chemical in the liquid supply tank 21 into the liquid supply pipeline 23. When the control unit 30 controls the sixth control valve 221 and the eighth control valve 271 to open and the seventh control valve 227 to close, the driving gas in the driving pipeline 22 can enter the raw liquid tank 25 through the ventilation pipeline 27, thereby pushing the liquid chemical in the raw liquid tank 25 to be injected into the liquid supply tank 21 through the liquid pipeline 26. When the control unit 30 controls the sixth control valve 221 to close, the driving gas cannot enter the raw liquid tank 25 or the liquid supply tank 21, and at this time, it is impossible to supply liquid to the downstream equipment and it is impossible to inject the liquid chemical in the raw liquid tank 25 into the liquid supply tank 21.

[0050] Furthermore, a first pressure detector 273 and a first pressure regulating valve 272 are also installed on the ventilation pipeline 27, and the first pressure detector 273 is located downstream of the first pressure regulating valve 272. The first pressure detector 273 is used to detect the air pressure in the ventilation pipeline 27, and the first pressure regulating valve 272 is used to adjust the air pressure in the ventilation pipeline 27. In this way, the first pressure regulating valve 272 can be adjusted according to the detection result of the first pressure detector 273 until the air pressure in the ventilation pipeline 27 is adjusted to the target range or target value.

[0051] Furthermore, the drive pipeline 22 is also equipped with a second pressure detector 225 and a second pressure regulating valve 223, and the second pressure detector 225 is located downstream of the second pressure regulating valve 223, and the seventh control valve 227 is located downstream of the pressure detector. The ventilation pipeline 27 is connected to the portion of the drive pipeline 22 between the second pressure regulating valve 223 and the sixth control valve 221. In this way, the second pressure regulating valve 223 can be adjusted according to the detection result of the second pressure detector 225 until the air pressure in the drive pipeline 22 is adjusted to the target range or target value.

[0052] In the embodiment of the present application, each liquid supply assembly 20 further includes a purge pipeline 28 for conveying purge gas. The purge pipeline 28 is connected to the vent pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23, so that the purge pipeline 28 conveys purge gas to the vent pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23, so that the vent pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23 are flushed with the purge gas to ensure that the vent pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23 are clean. The purge pipeline 28 is communicatively connected to the control unit 30 so that the control unit 30 can control the purge pipeline 28 to be turned on or off. Thus, when flushing is required, the control unit 30 controls the flushing pipeline 28 to be connected, so that the flushing gas in the flushing pipeline 28 can enter the ventilation pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23 for flushing. When the flushing is completed, the control unit 30 controls the flushing pipeline 28 to be closed, so that the flushing gas in the flushing pipeline 28 cannot enter the ventilation pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23.

[0053] It should be noted that the purge pipeline 28 has a third connector 283, and the purge pipeline 28 is connected to an external purge gas source through the third connector 283. The external purge gas source is used to provide purge gas to the purge pipeline 28. The external purge gas source can be a gas supply device capable of outputting purge gas, which is not limited here. The purge gas can be high-purity nitrogen, and of course can also be other high-purity gases that do not react with liquid chemicals, which is not limited here.

[0054] Specifically in the embodiment, a ninth control valve 281 is installed on the flushing pipeline 28. The ninth control valve 281 is connected to the control unit 30 for communication, so that the communication unit can control the ninth control valve 281 to be opened or closed. When the control unit 30 controls the ninth control valve 281 to be opened, the flushing pipeline 28 is connected, so that the flushing gas in the flushing pipeline 28 can enter the ventilation pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23 for flushing. When the control unit 30 controls the ninth control valve 281 to be closed, the flushing pipeline 28 is cut off, so that the flushing gas in the flushing pipeline 28 cannot enter the ventilation pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23.

[0055] Specifically in the embodiment, each liquid supply assembly 20 further includes an exhaust pipeline 29, which is connected to the liquid pipeline 26, the ventilation pipeline 27, the drive pipeline 22 and the liquid supply pipeline 23. The exhaust pipeline 29 is connected to the control unit 30 so that the control unit 30 can control the exhaust pipeline 29 to be turned on or off. In this way, when the control unit 30 controls the exhaust pipeline 29 to be turned on, the exhaust pipeline 29 discharges the gas and bubbles in the liquid pipeline 26, the ventilation pipeline 27, the drive pipeline 22 and the liquid supply pipeline 23 connected thereto. When the control unit 30 controls the exhaust pipeline 29 to be turned off, the exhaust pipeline 29 stops exhausting.

[0056] In some embodiments, the exhaust pipeline 29 includes a vacuum generator 291, an air inlet pipe 292, an exhaust pipe 293 and a connecting pipe 294. The vacuum generator 291 has a third air inlet port connected to the air inlet pipe 292, a second exhaust port connected to the exhaust pipe 293 and a negative pressure port connected to the connecting pipe 294. The air inlet pipe 292 is used to provide control gas to the third air inlet port of the vacuum generator 291, and the exhaust pipe 293 is used to exhaust the gas entering the vacuum generator 291 through the third air inlet port and the negative pressure port. The connecting pipe 294 is connected to the liquid pipeline 26, the ventilation pipeline 27, the drive pipeline 22 and the liquid supply pipeline 23. The vacuum generator 291 can generate negative pressure at the negative pressure port when positive pressure is input into the third air inlet, so that under the action of the negative pressure, suction force can be generated on the gas in the liquid pipeline 26, the ventilation pipeline 27, the drive pipeline 22 and the liquid supply pipeline 23 through the connecting pipe 294, and then the gas in the liquid pipeline 26, the ventilation pipeline 27, the drive pipeline 22 and the liquid supply pipeline 23 is sucked into the vacuum generator 291 through the negative pressure port, and then discharged through the exhaust pipe 293.

[0057] It can be understood that since the ventilation pipeline 27 and the drive pipeline 22 are respectively connected to the raw liquid tank 25 and the liquid supply tank 21, when the exhaust pipe 293 is exhausted, the gas in the raw liquid tank 25 and the liquid supply tank 21 will also be discharged, avoiding the situation where only the excess gas in the pipeline is discharged while the excess gas in the raw liquid tank 25 and the liquid supply tank 21 is not discharged.

[0058] It should be noted that one end of the air inlet pipe 292 has a fourth connector 2922, and the air inlet pipe 292 is connected to the external control gas source through the fourth connector 2922. The other end of the air inlet pipe 292 is connected to the third air inlet of the vacuum generator 291. In this way, the control gas provided by the external control gas source can enter the vacuum generator 291 through the air inlet pipe 292 and the third air inlet in sequence. The control gas can be nitrogen, and of course it can also be other gases that do not react chemically with liquid chemicals, which is not limited here.

[0059] Furthermore, the air intake pipe 292 is connected to the control unit 30 for communication, so that the control unit 30 can control the air intake pipe 292 to be turned on or off. When the control unit 30 controls the air intake pipe 292 to be turned on, the air intake pipe 292 conveys the control gas to enter the vacuum generator 291 from the third air intake port, so that the vacuum generator 291 generates negative pressure at the negative pressure port. Under the suction effect of the negative pressure generated at the negative pressure port, the gas in the liquid pipeline 26, the ventilation pipeline 27, the drive pipeline 22 and the liquid supply pipeline 23 enters the vacuum generator 291 through the connecting pipe 294 and the negative pressure port in turn, and then is discharged from the exhaust pipe 293. When the control unit 30 controls the air intake pipe 292 to be turned off, the control gas cannot enter the vacuum generator 291 from the third air intake port, so the negative pressure port of the vacuum generator 291 does not generate negative pressure, and then stops exhausting.

[0060] Furthermore, a tenth control valve 2921 is installed on the air intake pipe 292, and the tenth control valve 2921 is connected to the control unit 30 in communication, so that the control unit 30 can control the tenth control valve 2921 to be opened or closed. When the control unit 30 controls the tenth control valve 2921 to be opened, the air intake pipe 292 is connected, thereby achieving exhaust. When the control unit 30 controls the tenth control valve 2921 to be closed, the air intake pipe 292 is cut off, thereby stopping exhaust.

[0061] Furthermore, the exhaust pipeline 29 also includes a one-way valve 2941 installed on the connecting pipe 294, which is used to allow the gas and / or liquid in the connecting pipe 294 to flow in a direction close to the negative pressure port, and to prevent the gas and / or liquid in the connecting pipe 294 from flowing in a direction away from the negative pressure port, that is, the one-way valve 2941 is used to prevent the gas and / or liquid in the connecting pipe 294 from flowing back.

[0062] Further, the connecting pipe 294 includes a connecting main pipe 295, a first connecting branch pipe 296 and a second connecting branch pipe 297. One end of the connecting main pipe 295 is connected to the negative pressure port of the vacuum generator 291, and the other end is connected to the first connecting branch pipe 296 and the second connecting branch pipe 297. The end of the first connecting branch pipe 296 away from the connecting main pipe 295 is connected to the ventilation pipeline 27 and the liquid pipeline 26, and the end of the second connecting branch pipe 297 away from the connecting main pipe 295 is connected to the driving pipeline 22 and the liquid supply main pipeline 231 of the liquid supply pipeline 23. The above-mentioned one-way valve 2941 is installed on the connecting main pipe 295 to control the backflow of gas and / or liquid in the connecting main pipe 295.

[0063] Furthermore, a twelfth control valve d1 is installed on the first connecting branch pipe 296, and the twelfth control valve d1 is used to control the connection or cutoff of the first connecting branch pipe 296. Thus, when the twelfth control valve d1 is opened, the first connecting branch pipe 296 is connected; when the twelfth control valve d1 is closed, the first connecting branch pipe 296 is cut off.

[0064] The second connecting branch pipe 297 is provided with a thirteenth control valve d4, which is used to control the conduction or cut-off of the second connecting branch pipe 297. Thus, when the thirteenth control valve d4 is opened, the second connecting branch pipe 297 is conducted; when the thirteenth control valve d4 is closed, the second connecting branch pipe 297 is cut off.

[0065] Furthermore, a third pressure detector d2 is installed on the first connecting branch pipe 296 for real-time monitoring of the air pressure in the first connecting branch pipe 296. A fourth pressure detector d3 is installed on the second connecting branch pipe 297 for real-time monitoring of the air pressure in the second connecting branch pipe 297.

[0066] It should be noted that the exhaust pipeline 29 is not limited to the structure including the vacuum generator 291. In other embodiments, the exhaust pipeline 29 may also adopt other structures as long as it can discharge the excess gas in each pipeline, the raw liquid tank 25 and the liquid supply tank 21. No special limitation is made here. Figure 3 As shown, one end of the exhaust pipeline 29 is connected to the external negative pressure source, and the other end of the exhaust pipeline 29 is respectively connected to the ventilation pipeline 27, the liquid pipeline 26, the drive pipeline 22 and the liquid supply pipeline 23, so that the negative pressure generated by the external negative pressure source is used to suck each pipeline, the raw liquid tank 25 and the liquid supply tank 21, and then the excess gas in each pipeline, the raw liquid tank 25 and the liquid supply tank 21 is discharged. It can be understood that the external negative pressure source can be an air pump or other equipment that can generate negative pressure, which is not limited here. The conduction or cutoff of the exhaust pipeline 29 can be controlled by installing a control valve on the exhaust pipeline 29. The specific structure is not limited here, as long as it can achieve the discharge of excess gas in each pipeline, the raw liquid tank 25 and the liquid supply tank 21.

[0067] Please continue to see Figure 2 In an embodiment of the present application, the liquid supply assembly 20 further includes a liquid replenishment pipeline 41 for providing liquid chemicals, and the liquid replenishment pipeline 41 is connected to the liquid inlet and outlet b2 of the original liquid tank 25, so that the liquid chemicals transported by the liquid replenishment pipeline 41 can enter the original liquid tank 25 through the liquid inlet and outlet b2, thereby realizing the injection of liquid chemicals into the original liquid tank 25. The liquid replenishment pipeline 41 is communicatively connected with the control unit 30, so that the control unit 30 can control the liquid replenishment pipeline 41 to be turned on or off. In this way, when the control unit 30 controls the liquid replenishment pipeline 41 to be turned on, the liquid replenishment pipeline 41 transports the liquid chemicals into the original liquid tank 25 through the liquid inlet and outlet b2, thereby realizing the liquid replenishment of the original liquid tank 25. When the control unit 30 controls the liquid replenishment pipeline 41 to be turned off, the liquid replenishment pipeline 41 cannot transport the liquid chemicals into the original liquid tank 25, that is, the liquid replenishment of the original liquid tank 25 is stopped.

[0068] Specifically in the embodiment, an eleventh control valve 411 is installed on the liquid infusion pipeline 41, and the eleventh control valve 411 is communicatively connected with the control unit 30, so that the control unit 30 can control the opening or closing of the eleventh control valve 411. When the control unit 30 controls the eleventh control valve 411 to open, the liquid infusion pipeline 41 is connected. When the control unit 30 controls the eleventh control valve 411 to close, the liquid infusion pipeline 41 is cut off.

[0069] Furthermore, a second manual valve 413 is installed on the liquid replenishment pipeline 41, and the second manual valve 413 is used to control the conduction or cutoff of the liquid replenishment pipeline 41. In this way, when the chemical liquid supply device is in a non-operating state such as shutdown for maintenance or standby, the liquid replenishment pipeline 41 can be cut off by manually closing the second manual valve 413, so that the liquid replenishment pipeline 41 will not be conducted even if the eleventh control valve 411 is opened due to abnormality or misoperation of the control unit 30. Before liquid replenishment is required, the second manual valve 413 can be opened manually to facilitate the subsequent liquid replenishment operation under the control of the control unit 30.

[0070] It should be noted that the liquid replenishment pipeline 41 is not necessary and can be configured according to the process requirements, and is not particularly limited here. That is to say, part of the liquid supply components 20 can be equipped with the liquid replenishment pipeline 41, and the remaining part of the liquid supply components 20 can not be equipped with the liquid replenishment pipeline 41. It is also possible that all liquid supply components 20 are equipped with the liquid replenishment pipeline 41. It is also possible that all liquid supply components 20 are not equipped with the liquid replenishment pipeline 41. In the liquid supply component 20 that is not equipped with the liquid replenishment pipeline 41, when the liquid chemical in the raw liquid tank 25 is used up, the raw liquid tank 25 filled with liquid chemicals can be used to replace the empty raw liquid tank 25.

[0071] See also Figure 5As shown, in the embodiment of the present application, the control unit 30 includes a control module (not shown), a compressed air pipeline 32 and a solenoid valve group 36. One end of the compressed air pipeline 32 has a fourth connector 321, and the compressed air pipeline 32 is connected to an external compressed air source through the fourth connector 321, so that the external compressed air source can provide compressed air to the compressed air pipeline 32. The above-mentioned control valves (i.e., the first to thirteenth control valves d4) are all pneumatic valves, and the compressed air pipeline 32 is connected to the above-mentioned control valves (i.e., the first to thirteenth control valves d4) through the solenoid valve group 36. The solenoid valve group 36 is connected to the control module in communication, and the control module controls each control valve to be connected or cut off with the compressed air pipeline 32 by controlling the on and off of each solenoid valve in the solenoid valve group 36, so as to achieve the purpose of controlling each control valve to be opened or closed. It can be understood that when the compressed air pipeline 32 is connected to a certain control valve, the control valve is opened under the driving action of the compressed air in the compressed air pipeline 32. When the compressed air pipeline 32 is cut off from a certain control valve, the control valve is closed. The above-mentioned external compressed air source can be a compressor, and of course can also be other equipment that can generate compressed air, which is not limited here.

[0072] Furthermore, a fourth pressure regulating valve 33 and a fifth pressure detector 34 are sequentially installed on the compressed air pipeline 32 from upstream to downstream. The fifth pressure detector 34 is used to monitor the air pressure in the compressed air pipeline 32 in real time, and the fourth pressure regulating valve 33 is used to adjust the air pressure in the compressed air pipeline 32 according to the air pressure value detected by the fifth pressure detector 34 until the air pressure in the compressed air pipeline 32 reaches a preset pressure range or a preset pressure value.

[0073] Specifically in the embodiment, the control unit 30 further includes a blowing pipeline 37, and the blowing pipeline 37 is used to blow nitrogen into the chamber where the control module is installed, so that a positive pressure is formed in the chamber where the control module is installed.

[0074] Furthermore, a fifth pressure regulating valve 38 is installed on the air blowing pipeline 37. The fifth pressure regulating valve 38 is used to adjust the air pressure in the air blowing pipeline 37 until the air pressure in the air blowing pipeline 37 reaches a preset pressure range or a preset pressure value.

[0075] It should be noted that the control unit 30 also includes a start button and an emergency stop button which are communicatively connected to the control module. The operator can start and stop the chemical liquid supply device by operating the start button and the emergency stop button respectively.

[0076] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0077] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A chemical liquid supply device, characterized in that: include: A liquid supply unit (10) comprises at least two liquid supply assemblies (20), each of the liquid supply assemblies (20) comprising a liquid supply tank (21), a drive pipeline (22) and a liquid supply pipeline (23), the liquid supply tank (21) having a first air inlet (a1) and a first liquid outlet (a2), the drive pipeline (22) being in communication with the first air inlet (a1) and being used to inject a drive gas into the liquid supply tank (21) through the first air inlet (a1), so that the liquid chemical in the liquid supply tank (21) is discharged from the first liquid outlet (a2) under the action of the air pressure generated by the drive gas, and the liquid supply pipeline (23) being in communication with the first liquid outlet (a2) and being used to transport the liquid chemical discharged from the first liquid outlet (a2) to a downstream; and A control unit (30) is communicatively connected with the driving pipeline (22) and the liquid supply pipeline (23) of each of the liquid supply components (20), and is used to control the opening or closing of the driving pipeline (22) and the liquid supply pipeline (23) of each of the liquid supply components (20).

2. The chemical liquid supply device according to claim 1, characterized in that: The liquid supply pipeline (23) of the liquid supply assembly (20) comprises a main liquid supply pipeline (231) and a plurality of branch liquid supply pipelines (233); one end of the main liquid supply pipeline (231) is in communication with the first liquid outlet (a2); each of the branch liquid supply pipelines (233) is in communication with the main liquid supply pipeline (231) and is used to transport the liquid chemical in the main liquid supply pipeline (231) to the downstream; The main liquid supply line (231) is communicatively connected to the control unit (30) so that the control unit (30) can control the main liquid supply line (231) to be turned on or off.

3. The chemical liquid supply device according to claim 2, characterized in that: The liquid supply pipeline (23) further comprises a third control valve (234) installed on the main liquid supply pipeline (231). The liquid supply assembly (20) further comprises a gas-liquid separation pipeline (24). The gas-liquid separation pipeline (24) comprises a first connecting pipeline (241), a gas-liquid separator (242) and a second connecting pipeline (243). The gas-liquid separator (242) has a second liquid inlet, a second liquid outlet and a first exhaust port. The gas-liquid separator (242) is used to perform gas-liquid separation on the liquid chemical entering through the second liquid inlet, and to exhaust the separated gas through the first exhaust port. The first connecting pipeline (241) is connected between a portion of the main liquid supply pipeline (231) located upstream of the third control valve (234) and the second liquid inlet, and the second connecting pipeline (243) is connected between a portion of the main liquid supply pipeline (231) located downstream of the third control valve (234) and the second liquid outlet.

4. The chemical liquid supply device according to claim 3, characterized in that: The gas-liquid separator (242) also has a vacuum port, and the gas-liquid separation pipeline (24) also includes a vacuum pipeline (244). The vacuum pipeline (244) is connected to the vacuum port and is used to vacuum the gas-liquid separator (242) through the vacuum port.

5. The chemical liquid supply device according to claim 1, characterized in that: Each of the liquid supply components (20) further comprises a raw liquid tank (25), a liquid pipeline (26) and a ventilation pipeline (27); the raw liquid tank (25) has a second air inlet (b1) and a liquid inlet and outlet (b2); and the liquid supply tank (21) also has a first liquid inlet (a3); The liquid-passing pipeline (26) is connected between the liquid inlet and outlet (b2) and the first liquid inlet (a3); one end of the ventilation pipeline (27) is connected to the drive pipeline (22), and the other end of the ventilation pipeline (27) is connected to the second air inlet (b1); the ventilation pipeline (27) and the liquid-passing pipeline (26) are both communicatively connected to the control unit (30), so that the control unit (30) can control the ventilation pipeline (27) and the liquid-passing pipeline (26) to be turned on or off.

6. The chemical liquid supply device according to claim 5, characterized in that: Each of the liquid supply components (20) further comprises a purge pipeline (28) for providing a purge gas, wherein the purge pipeline (28) is in communication with the ventilation pipeline (27), the liquid pipeline (26), the drive pipeline (22) and the liquid supply pipeline (23), and the purge pipeline (28) is in communication with the control unit (30) so that the control unit (30) can control the purge pipeline (28) to be turned on or off.

7. The chemical liquid supply device according to claim 5, characterized in that: Each of the liquid supply components (20) further comprises an exhaust pipeline (29), wherein the exhaust pipeline (29) is in communication with the liquid pipeline (26), the ventilation pipeline (27), the drive pipeline (22) and the liquid supply pipeline (23), and the exhaust pipeline (29) is in communication connection with the control unit (30) so that the control unit (30) can control the exhaust pipeline (29) to be turned on or off.

8. The chemical liquid supply device according to claim 7, characterized in that: The exhaust pipeline (29) comprises a vacuum generator (291), an air intake pipe (292), an exhaust pipe (293) and a connecting pipe (294); the vacuum generator (291) has a third air intake port connected to the air intake pipe (292), a second exhaust port connected to the exhaust pipe (293) and a negative pressure port connected to the connecting pipe (294); The air inlet pipe (292) is used to provide control gas to the third air inlet, and the exhaust pipe (293) is used to exhaust the gas entering the vacuum generator (291) through the third air inlet and the negative pressure port. The vacuum generator (291) can generate negative pressure at the negative pressure port when positive pressure is input to the third air inlet. The connecting pipe (294) is connected to the liquid pipeline (26), the ventilation pipeline (27), the drive pipeline (22) and the liquid supply pipeline (23).

9. The chemical liquid supply device according to claim 8, characterized in that: The exhaust pipeline (29) also includes a one-way valve (2941) installed on the connecting pipe (294), and the one-way valve (2941) is used to allow the gas and / or liquid in the connecting pipe (294) to flow in a direction close to the negative pressure port, and prevent the gas and / or liquid in the connecting pipe (294) from flowing in a direction away from the negative pressure port.

10. The chemical liquid supply device according to claim 5, characterized in that: The liquid supply assembly (20) further comprises a liquid replenishment pipeline (41) for providing liquid chemicals, wherein the liquid replenishment pipeline (41) is in communication with the liquid inlet and outlet (b2); the liquid replenishment pipeline (41) is in communication connection with the control unit (30) so that the control unit (30) can control the liquid replenishment pipeline (41) to be turned on or off.

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