Technological air conditioner automatic control system and environment self-adaptive adjusting method

Abstract

The invention discloses a manufacturability air conditioner automatic control system and an environment self-adaption adjusting method. The temperature and humidity control of the technical air conditioner is adjusted through a dual PID algorithm, the control logic is strict, and the temperature or humidity is preferentially adjusted according to the actual situation; the control effect is good, and constant indoor temperature, humidity, pressure and the like are guaranteed; safety, high efficiency and energy conservation are achieved, and high energy waste is avoided; the automatic control degree of the system is high, and the control precision, the anti-interference capability and the reaction speed of the system are improved.

Description

Technical Field

[0001] The present invention relates to the field of technological air conditioning regulation, and in particular to a technological air conditioning automatic control system and an environmental self-adaptive regulation method. Background Art

[0002] In the cadmium telluride thin film solar industry, during magnetron sputtering coating, substrate temperature is one of the key process parameters that affect the quality and performance of the film. The increase in substrate temperature will increase the mobility of deposited particles on the substrate surface, so it has a great impact on the density, organizational structure, crystallization state, grain size, surface roughness and defects of the film. When the substrate temperature is low, the film is easy to form an amorphous structure, and the deposited atoms quickly lose kinetic energy and condense on the surface quickly. The surface formed in this way is relatively smooth and dense, but there will be more defects; when the temperature rises, the growth kinetic energy of the atoms increases, and the probability of crossing the surface barrier also increases. In particular, metal atoms are easier to crystallize. Such films have small internal stress, but the increase in grain volume will lead to an increase in the surface roughness of the film. For cadmium telluride thin film materials, the height of the substrate temperature directly affects the surface adhesion of the film, and thus affects the product yield. To control the substrate temperature within the allowable range, it is necessary to reduce the temperature interference of the surrounding environment as much as possible.

[0003] The existing magnetron sputtering process air conditioning system generally uses surface cooling and dehumidification in summer for air treatment; and coil heating and humidification in winter for air treatment. Temperature and humidity are coupled and affect each other. Most of its control schemes and control logic designs are not very good, and cannot accurately control indoor temperature, humidity, etc. It directly affects the substrate temperature, and then affects the diffusion ability of sputtered atoms in the substrate. The diffusion ability of sputtered atoms on the film surface affects the deposition of cadmium telluride film, and the high or low substrate temperature affects the adhesion of the film surface, which is easy to cause an increase in film defects or even film shedding. Summary of the invention

[0004] In view of this, in a first aspect, the present invention provides a process air-conditioning automatic control system, which controls temperature and humidity through a PLC controller and a control system in a linked manner to improve the operating efficiency of the air-conditioning.

[0005] In the second aspect, the present invention provides an environmental adaptive adjustment method for process air conditioning, which can eliminate the influence of interfering airflow through PID algorithm while considering the coupling of temperature and humidity, and accurately control the correlation adjustment relationship between temperature and humidity.

[0006] In order to solve the above technical problems, the present invention provides a technological air-conditioning automatic control system, which is characterized in that it includes: a combined air-conditioning unit control system, a data acquisition system and a PLC controller; the combined air-conditioning unit control system includes an air inlet duct, an air supply duct and a return air duct connected in sequence; the air inlet duct includes a first filter section, a second filter section and a third filter section in sequence; the first filter section is arranged on a side close to the entrance of the air inlet duct, and is provided with a ventilation duct; the other end of the return air duct is connected to the first filter section of the air inlet duct, and the data acquisition system includes a first sensor system and a second sensor system, which are arranged in sequence along the return air duct; a return air valve is also provided on the side of the return air duct close to the first filter section.

[0007] As an optional method, the first filter section includes a fresh air valve, a primary filter and a front surface cooler; the second filter section includes a medium efficiency filter, a rear surface cooler, a heat coil, a humidification section and a blower; the third filter section includes a high efficiency filter; wherein the ventilation duct is arranged between the front surface cooler and the medium efficiency filter, and includes a rotor, a rotor blower and a regeneration heating valve.

[0008] As an optional method, the first sensing system is an air supply parameter sensing system, which includes an air supply temperature sensor, an air supply humidity sensor and an air supply volume sensor; the second sensing system is an indoor parameter sensing system, which includes an indoor temperature sensor, an indoor humidity sensor and an indoor pressure difference sensor.

[0009] On the other hand, the present invention provides an environmental adaptive adjustment method for a process air conditioner, comprising: after the air conditioner is turned on, the temperature and humidity in the space are detected by a data acquisition system, and they are compared with preset values ​​respectively, and the control priorities of the temperature and humidity are obtained through PID calculation and adjusted respectively; wherein the temperature adjustment comprises: comparing to obtain a first temperature difference between the actual temperature and the preset temperature, and based on the first temperature difference, a PID calculation is used by a first controller to obtain a supply air temperature setting value; performing air flow interference processing on the space, comprising: measuring the actual value of the supply air temperature, and comparing it with the supply air temperature setting value to obtain a second temperature difference, and based on the comparison result, calculating the temperature control valve through the PID algorithm. opening value; and controlling the opening of the temperature valve by the second controller to change the water flow rate so that the indoor temperature reaches the preset temperature; humidity regulation includes: converting the indoor relative humidity and the actual temperature into the indoor dew point temperature, comparing it with the preset dew point temperature to obtain a first humidity difference, and using the first controller to use PID calculation to obtain the supply air dew point setting value based on the first humidity difference; performing air flow interference processing on the space, including: measuring the actual value of the supply air dew point, comparing it with the supply air dew point setting value to obtain a second humidity difference, and based on the comparison result, calculating the opening value of the humidity control valve by the PID algorithm; and controlling the opening of the humidity valve by the second controller to change the steam flow rate so that the indoor temperature reaches the preset dew point value.

[0010] As an optional method, the control priority determination of temperature and humidity includes the following steps:

[0011] An indoor temperature sensor is used to measure the indoor temperature, which is compared with the indoor temperature setting value, and a first deviation value is calculated by a PID controller;

[0012] An indoor humidity sensor is used to measure the indoor humidity, which is compared with the indoor humidity set value, and a second deviation value is calculated by a PID controller;

[0013] Compare the first deviation value with the second deviation value, and prioritize the attribute with the larger value.

[0014] As an option, in temperature control,

[0015] The first temperature difference is calculated as:

[0016] Te(set)=Tr(set)-Troom

[0017] The supply air temperature setpoint is calculated as follows:

[0018]

[0019] The calculation of valve opening is: Te(t) = Tset-Tout

[0020]

[0021] Among them, Troom is the indoor temperature, Tr(set) is the indoor temperature setting value, Te(set) is the first temperature difference, Tset is the supply air temperature setting value, Tout is the actual supply air temperature value, Te(t) is the second temperature difference, and Tu(t) is the valve opening value.

[0022] As an optional method, the temperature control valve is a rear surface cooling valve and / or a heating valve, which is used to change the water flow of the rear surface cooler and / or the heater; the adjustment process is:

[0023] When the supply air temperature Tout ≥ the supply air temperature setting value Tset, gradually close the heating valve to 0, and then gradually open the rear surface cooling valve;

[0024] If the supply air temperature Tout is less than the supply air temperature setting value Tset, the rear surface cooling valve is gradually closed, and then the heating valve is gradually opened.

[0025] As an option, in humidity control,

[0026] The calculation method of the first moisture difference is:

[0027] Re(set)=Rr(set)-Rroom

[0028] The supply air dew point setpoint is calculated as follows:

[0029]

[0030] The calculation of valve opening is:

[0031] Re(t)=Rset-Rout

[0032]

[0033] Among them, Rroom is the indoor dew point temperature, Rr(set) is the indoor dew point temperature setting value, Re(set) is the first humidity difference, Rset is the supply air dew point temperature setting value, Rout is the actual supply air dew point temperature, Re(t) is the second humidity difference, and Ru(t) is the valve opening value.

[0034] As an optional method, the humidity control valve is a cooling dehumidification device and / or a heating valve, which is used to change the steam flow of the rotary dehumidifier and / or humidifier; the adjustment process is:

[0035] When the air supply dew point value Rout≥the air supply dew point setting value Tset, the humidification valve is gradually closed to 0, and then the rotary dehumidification is gradually opened;

[0036] If the supply air dew point value Tout is less than the supply air dew point setting value Tset, the rotary dehumidifier is gradually closed and the humidification valve is gradually opened.

[0037] As an optional method, adaptive regulation also includes pressure difference control and air supply volume control:

[0038] The pressure difference control uses the environmental pressure difference sensor to measure the environmental pressure difference, and then transmits the workshop pressure difference value to the PLC controller, and then compares it with the environmental pressure difference set value, and automatically adjusts the size of the fresh air valve through calculation to ensure that the environmental pressure difference is constant;

[0039] The air supply volume control is to use the air supply volume sensor to measure the air supply volume, and then transmit the air supply volume value to the PLC controller, and then compare it with the air supply volume set value, and automatically adjust the frequency of the blower inverter through calculation to ensure constant air supply volume.

[0040] The beneficial effects of the present invention are:

[0041] The present invention adjusts the temperature and humidity control of the process air conditioner through a dual PID algorithm. The control logic is strict and the temperature or humidity is preferentially adjusted according to the actual situation. The control effect is good and the constant indoor temperature, humidity, pressure, etc. are ensured. The invention is safe, efficient and energy-saving and avoids a high waste of energy. The system has a high degree of automatic control and improves the control accuracy, the system's anti-interference ability and the response speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 A schematic diagram of the structure of a process air conditioning automatic control system provided in Example 1 of the present invention;

[0043] Figure 2 A schematic diagram of temperature control logic in priority determination provided in Example 2 of the present invention;

[0044] Figure 3 This is a logic diagram of humidity control in priority judgment provided in Example 2 of the present invention.

[0045] Reference numerals and their corresponding relationships:

[0046] 1-Fresh air valve, 2-Primary filter, 3-Front surface cooler, 4-Medium efficiency filter, 5-Rear surface cooler, 6-Heat coil, 7-Humidification section, 8-Supply fan, 9-High efficiency filter, 10-Return air valve, 11-Indoor temperature sensor, 12-Indoor humidity sensor, 13-Indoor pressure difference sensor, 14-Supply air temperature sensor, 15-Supply air humidity sensor, 16-Supply air volume sensor, 17-Inlet duct, 18-Supply air duct, 19-Return air duct, 20-Rotary ventilation valve, 21-Rotary, 22-Rotary supply fan, 23-Regeneration heating valve. DETAILED DESCRIPTION

[0047] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with specific implementation methods.

[0048] Example 1

[0049] See also Figure 1 This embodiment provides a process air conditioning automatic control system, including a combined air conditioning unit control system, a data acquisition system and a PLC controller; the combined air conditioning unit control system includes an air inlet duct 17, an air supply duct 18 and a return air duct 19 connected in sequence; the air inlet duct 17 includes a first filter section, a second filter section and a third filter section in sequence; the first filter section is arranged on the side close to the entrance of the air inlet duct 17, and is provided with a ventilation duct; the other end of the return air duct 19 is connected to the first filter section of the air inlet duct 17, the data acquisition system includes a first sensor system and a second sensor system, which are arranged along the return air duct 19 in sequence; the return air duct 19 is also provided with a return air valve 10 on the side close to the first filter section. The PLC controller adopts Siemens S7-1500 series, which is respectively connected with an indoor temperature sensor 11, an indoor humidity sensor 12, a workshop pressure difference sensor, a supply air temperature sensor 14, a supply air humidity sensor 15, a supply air volume sensor 16, a fresh air valve 1, a front surface cooling valve, a rear surface cooling valve, a heating valve, a humidifying valve, a supply air fan 8 and a human-computer interaction device.

[0050] Specifically, the first filter section includes a fresh air valve 1, a primary filter 2 and a front cooler 3; the second filter section includes a medium filter 4, a rear cooler 5, a heat coil 6, a humidification section 7 and a blower 8; the third filter section includes a high-efficiency filter 9; wherein the ventilation duct is arranged between the front cooler 3 and the medium filter 4, and includes a rotor 21, a rotor blower 22 and a regeneration heating valve 23. Among them, the primary filter 2 is divided into four grades: G1, G2, G3 and G4, and is mainly used in the primary filter section of the clean room to filter dust particles larger than 5μm. The medium filter 4 is divided into five grades: F5, F6, F7, F8 and F9, and is mainly used in the intermediate filter section of the clean room to filter dust particles larger than 1-5μm. The high-efficiency filter 9 is divided into four levels: H10, H11, H12, and H13. It is mainly used in the advanced filtration section of the clean room to filter dust particles larger than 0.3μm.

[0051] Please refer again Figure 1 The air supply port is connected to the air inlet duct 17 through a return air duct 19 provided with a return air valve 10, and the outlet of the return air duct 19 is located between the front surface cooler 3 and the medium efficiency filter 4. The air supply temperature sensor 14, the air supply humidity sensor 15, and the air supply volume sensor 16 provided in the air supply duct 18 are used to detect the air supply temperature, the air supply humidity, and the air supply volume, respectively.

[0052] In addition, this embodiment is also provided with a human-computer interaction device, and a Siemens TP-1200 touch screen can be used. The initial parameter setting values ​​such as temperature, humidity, air supply volume, and workshop pressure difference can be preset in the PLC controller through the human-computer interaction device. In this implementation, the PLC controller can detect whether the filter is blocked. A pressure difference switch is installed at the front and rear ends of the primary filter 2, the medium-efficiency filter 4, and the high-efficiency filter 9, and the filter is blocked by the pressure difference signal of the air supply intensity passing through the corresponding filter. If the air supply intensity pressure difference signal ≥ the set value, it is judged that the filter is blocked. And, it is also used to detect whether the air blower 8 is faulty. A pressure difference sensor is installed at the front and rear ends of the air blower 8, and the air supply intensity pressure difference signal passing through the corresponding filter is used to judge whether the air blower 8 is started. If the air supply intensity pressure difference signal < the set value, it is judged that the air blower 8 is faulty.

[0053] Example 2

[0054] See also Figure 2-Figure 3 , This embodiment provides an environmental adaptive adjustment method for a process air conditioner, including: after the air conditioner is turned on, the temperature and humidity in the space are detected by a data acquisition system, and the temperature and humidity are compared with preset values ​​respectively, and the control priorities of the temperature and humidity are obtained by PID calculation and adjusted respectively;

[0055] The temperature regulation includes: comparing an actual temperature with a preset temperature to obtain a first temperature difference, and obtaining an air supply temperature setting value through a first controller using a PID calculation based on the first temperature difference.

[0056] Afterwards, the air flow interference processing is performed on the space, including: measuring the actual value of the supply air temperature, comparing it with the supply air temperature setting value to obtain a second temperature difference, and based on the comparison result, calculating the opening value of the temperature control valve through the PID algorithm; and controlling the opening of the temperature valve through the second controller to change the water flow so that the indoor temperature reaches the preset temperature;

[0057] Humidity adjustment includes: converting the indoor relative humidity and actual temperature into the indoor dew point temperature, comparing it with the preset dew point temperature to obtain a first humidity difference, and using a first controller to calculate the air supply dew point set value based on the first humidity difference using PID calculation.

[0058] The airflow interference treatment is performed on the space, including: measuring the actual value of the supply air dew point, comparing it with the supply air dew point set value to obtain a second humidity difference, and based on the comparison result, calculating the opening value of the humidity control valve through a PID algorithm; and controlling the opening of the humidity valve through a second controller to change the steam flow so that the indoor dew point reaches a preset value.

[0059] For implementation in this embodiment, please refer to Figure 2 and Figure 3 , the control priority judgment of temperature and humidity includes the following steps:

[0060] The indoor temperature is measured by an indoor temperature sensor, compared with the indoor temperature set value, and the first deviation value is calculated by the PID controller:

[0061] That is, the indoor temperature is measured by the indoor temperature sensor installed in the workshop, and then compared with the indoor temperature set value Tr(t), and a deviation value PID1 (0-27648) is calculated by the PID controller using the classic PID algorithm; the calculation process is:

[0062] Te(t)=Tr(t) Ty(t)

[0063]

[0064] Among them, Ty(t) is the actual value of indoor temperature, Tr(t) is the set value of indoor temperature, Te(t) is the temperature deviation, and Tu(t) is the deviation value PID1 (0-27648).

[0065] Then, the indoor humidity is measured by the indoor humidity sensor, which is compared with the indoor humidity set value, and the second deviation value is calculated by the PID controller:

[0066] That is, the indoor humidity is measured by the indoor humidity sensor installed in the workshop, and then compared with the indoor humidity set value Rr(t), and a deviation value PID2 (0-27648) is calculated by the PID controller using the classic PID algorithm; the calculation process is:

[0067] Rθ(t)=Rr(t)-Ry(t)

[0068]

[0069] Among them, Ry(t) is the actual value of indoor humidity, Rr(t) is the set value of indoor humidity, Re(t) is the humidity deviation, and Ru(t) is the deviation value PID2 (0-27648).

[0070] In this way, the PLC controller determines the value of PID1 and PID2. If PID1 ≥ PID2, the temperature is adjusted first; otherwise, the humidity is adjusted first. Temperature and humidity adjustment is real-time adjustment to achieve precise control of temperature and humidity.

[0071] After determining that temperature control is required, the temperature control method is:

[0072] The air-conditioned room is affected by disturbances such as heat radiation from indoor equipment. The indoor temperature Troom is measured by an indoor temperature sensor installed in the workshop, and then compared with the indoor temperature set value Tr(set) to obtain a first temperature difference Te(set). A supply air temperature set value Tset is calculated by the main controller (i.e., the first controller) using a classic PID algorithm; the controlled object (rear cooler or heater) is affected by disturbances such as airflow temperature difference. The supply air temperature Tout is measured by a supply air temperature sensor installed on the air supply duct, and then compared with the calculated supply air temperature set value Tset to obtain a second temperature difference Te(t). The valve opening value (0-100%) is calculated by the sub-controller (i.e., the second controller) using a classic PID algorithm. As the opening of the temperature control valve (rear cooler valve or heating valve) is controlled, the water flow in the controlled object (rear cooler or heater) is changed, and finally the indoor temperature Troom is equal to the set temperature value Tr(set).

[0073] At the same time, in order to avoid temperature abnormality caused by excessive opening and closing, the air conditioner of this embodiment performs slow bidirectional adjustment when adaptively adjusting the environment. Specifically, when the supply air temperature Tout ≥ the supply air temperature setting value Tset, the heating valve is gradually closed to 0, and then the rear surface cooling valve is gradually opened; if the supply air temperature Tout < the supply air temperature setting value Tset, the rear surface cooling valve is gradually closed, and then the heating valve is gradually opened. In this way, the auxiliary controller in the method described in this embodiment has the function of "coarse adjustment", while the main controller has the function of "fine adjustment". The two cooperate with each other, and the control effect is significantly higher than that of a single-loop control system, while reducing energy waste.

[0074] In the above temperature control, the first temperature difference is calculated as:

[0075] Te(set)=Tr(set)-Troom

[0076] The supply air temperature setpoint is calculated as follows:

[0077]

[0078] The calculation of valve opening is:

[0079] Te(t)=Tset-Tout

[0080]

[0081] Among them, Troom is the indoor temperature, Tr(set) is the indoor temperature setting value, Te(set) is the first temperature difference, Tset is the supply air temperature setting value, Tout is the actual supply air temperature value, Te(t) is the second temperature difference, and Tu(t) is the valve opening value.

[0082] In addition, in humidity control, when the temperature remains unchanged, the greater the absolute humidity of the air, the higher the relative humidity, and the smaller the absolute humidity, the lower the relative humidity; when the water vapor content in the air remains unchanged, the higher the temperature, the lower the relative humidity; the lower the temperature, the higher the relative humidity. The humidity sensor measures relative humidity. In order to accurately control the humidity, first convert the relative humidity and actual temperature into dew point temperature. The conversion formula is as follows:

[0083] X = (0.66077 + (7.5 × dry bulb temperature / (237.3 + dry bulb temperature)) + (lg (relative temperature) - 2)

[0084] Then dew point temperature = ((0.66077-X)×237.3) / (X-8.16077)

[0085] Among them, the dry bulb temperature is taken in degrees Celsius, such as 25 for 25℃, and the relative humidity is taken in percentage, such as 50% for 50%.

[0086] Based on the above, in the humidity control of this embodiment, the air-conditioned room is affected by disturbances such as indoor heating instruments and equipment. The indoor humidity is measured by an indoor humidity sensor installed in the workshop, and converted into the indoor dew point temperature Rroom according to the above formula, and converted into the indoor dew point temperature setting value Rr(set) according to the set values ​​of the indoor temperature and humidity. Then, the indoor dew point temperature Rroom is compared with the indoor dew point temperature setting value Rr(set) to obtain the first humidity difference Re(set), and a supply air dew point setting value Rset is calculated by the main controller using the classic PID algorithm; the control object (rotary dehumidification device or humidifier) The supply air humidity sensor installed on the air supply duct measures the supply air humidity and converts it into the supply air dew point temperature Rout. Then, it is compared with the calculated supply air dew point set value Rset to obtain the second humidity difference Re(t). The valve opening value (0-100%) is calculated by the sub-controller using the classic PID algorithm. As the opening of the humidity control valve (rotary dehumidifier or heating valve) changes, the steam flow (water flow) in the controlled object (rotary dehumidifier or humidifier) ​​is changed, and finally the indoor dew point Rroom is equal to the set dew point value Rr(set), that is, the indoor humidity is equal to the set humidity value.

[0087] The rotary dehumidifier is composed of a rotary ventilation valve, a rotary blower, a regeneration heating valve, and a rotary wheel. The rotary wheel is divided into two parts: one part is used as a moisture absorption functional area when it is located in the dehumidification area, and the other part is used as a drying functional area when it is located in the regeneration area. The working process is as follows: when the humidity is too high, turn on the rotary dehumidifier. First open the rotary ventilation valve, then turn on the rotary blower, and the rotary wheel also starts to rotate. According to the calculated valve opening value, the regeneration heating valve is turned on to perform dehumidification.

[0088] At the same time, in order to avoid abnormal humidity caused by excessive opening and closing, the air conditioner of this embodiment performs slow two-way adjustment when adaptively adjusting the environment. Specifically, when the supply air dew point value Rout≥the supply air dew point setting value Tset, the humidification valve is gradually closed to 0, and then the rotary dehumidification is gradually opened; if the supply air dew point value Tout<the supply air dew point setting value Tset, the rotary dehumidification is gradually closed, and then the humidification valve is gradually opened.

[0089] In the above humidity control process, the calculation method of the first humidity difference is:

[0090] Re(set)=Rr(set)-Rroom

[0091] The supply air dew point setpoint is calculated as follows:

[0092]

[0093] The calculation of valve opening is:

[0094] Re(t)=Rset-Rout

[0095]

[0096] Among them, Rroom is the indoor dew point temperature, Rr(set) is the indoor dew point temperature setting value, Re(set) is the first humidity difference, Rset is the supply air dew point temperature setting value, Rout is the actual supply air dew point temperature, Re(t) is the second humidity difference, and Ru(t) is the valve opening value.

[0097] In addition, through the combination of the pressure difference sensor and the air supply sensor, the adaptive regulation of this embodiment also includes pressure difference control and air supply volume control:

[0098] The pressure difference control uses the environmental pressure difference sensor to measure the environmental pressure difference, and then transmits the workshop pressure difference value to the PLC controller, and then compares it with the environmental pressure difference set value, and automatically adjusts the size of the fresh air valve through calculation to ensure that the environmental pressure difference is constant;

[0099] The air supply volume control is to use the air supply volume sensor to measure the air supply volume, and then transmit the air supply volume value to the PLC controller, and then compare it with the air supply volume set value, and automatically adjust the frequency of the blower inverter through calculation to ensure constant air supply volume.

[0100] The above are only preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be regarded as limiting the present invention, and the protection scope of the present invention should be based on the scope defined by the claims. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the spirit and scope of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A process air conditioning automatic control system, characterized in that: include: Combined air conditioning unit control system, data acquisition system and PLC controller; The combined air conditioning unit control system comprises an air inlet duct, an air supply duct and an air return duct connected in sequence; The air inlet duct includes a first filter section, a second filter section and a third filter section in sequence; the first filter section is arranged on a side close to the inlet of the air inlet duct, and is provided with a ventilation duct; The other end of the return air duct is connected to the first filter section of the air inlet duct. The data acquisition system includes a first sensor system and a second sensor system, which are sequentially arranged along the return air duct. A return air valve is also arranged on one side of the return air duct close to the first filter section.

2. A process air conditioning automatic control system according to claim 1, characterized in that: The first filter section includes a fresh air valve, a primary filter and a front surface cooler; the second filter section includes a medium-efficiency filter, a rear surface cooler, a heat coil, a humidification section and a blower; the third filter section includes a high-efficiency filter; wherein the ventilation duct is arranged between the front surface cooler and the medium-efficiency filter, and includes a rotor, a rotor blower and a regeneration heating valve.

3. A process air conditioning automatic control system according to claim 1, characterized in that: The first sensing system is an air supply parameter sensing system, which includes an air supply temperature sensor, an air supply humidity sensor and an air supply volume sensor; the second sensing system is an indoor parameter sensing system, which includes an indoor temperature sensor, an indoor humidity sensor and an indoor pressure difference sensor.

4. A method for environmental self-adaptation of process air conditioning, characterized in that: include: After the air conditioner is turned on, the temperature and humidity in the space are detected through the data acquisition system, which are compared with the preset values ​​respectively. The control priority of temperature and humidity is obtained through PID calculation and adjusted respectively; Among them, temperature regulation includes: Comparing the actual temperature with the preset temperature to obtain a first temperature difference, and obtaining a supply air temperature setting value by using a first controller through a PID calculation based on the first temperature difference; Performing airflow interference processing on the space, including: measuring the actual value of the supply air temperature, comparing it with the supply air temperature setting value to obtain a second temperature difference, and calculating the opening value of the temperature control valve through a PID algorithm based on the comparison result; and controlling the opening of the temperature valve through a second controller to change the water flow so that the indoor temperature reaches a preset temperature; Humidity regulation includes: After converting the indoor relative humidity and the actual temperature into the indoor dew point temperature, the indoor relative humidity and the actual temperature are compared with the preset dew point temperature to obtain a first humidity difference, and based on the first humidity difference, a PID calculation is performed by a first controller to obtain a supply air dew point set value; The airflow interference treatment is performed on the space, including: measuring the actual value of the supply air dew point, comparing it with the supply air dew point set value to obtain a second humidity difference, and based on the comparison result, calculating the opening value of the humidity control valve through a PID algorithm; and controlling the opening of the humidity valve through a second controller to change the steam flow so that the indoor dew point reaches a preset value.

5. The method for environmental self-adaptation of process air conditioning according to claim 4, characterized in that: The control priority determination of temperature and humidity includes the following steps: An indoor temperature sensor is used to measure the indoor temperature, which is compared with the indoor temperature setting value, and a first deviation value is calculated by a PID controller; An indoor humidity sensor is used to measure the indoor humidity, which is compared with the indoor humidity set value, and a second deviation value is calculated by a PID controller; The first deviation value is compared with the second deviation value, and the attribute with the larger value is adjusted preferentially.

6. The method for environmental self-adaptation of process air conditioning according to claim 4, characterized in that: In temperature control, The first temperature difference is calculated as follows: Te(set)=Tr(set)-Troom The supply air temperature setpoint is calculated as follows: The calculation of valve opening is: Te(t)=Tset-Tout Among them, Troom is the indoor temperature, Tr(set) is the indoor temperature setting value, Te(set) is the first temperature difference, Tset is the supply air temperature setting value, Tout is the actual supply air temperature value, Te(t) is the second temperature difference, and Tu(t) is the valve opening value.

7. The method for environmental self-adaptation of process air conditioning according to claim 6, characterized in that: The temperature control valve is a rear surface cooling valve and / or heating valve, which is used to change the water flow of the rear surface cooler and / or heater; the adjustment process is: When the supply air temperature Tout ≥ the supply air temperature setting value Tset, gradually close the heating valve to 0, and then gradually open the rear surface cooling valve; If the supply air temperature Tout is less than the supply air temperature setting value Tset, gradually close the rear surface cooling valve and then gradually open the heating valve.

8. The method for environmental self-adaptation of process air conditioning according to claim 4, characterized in that: In humidity control, The first humidity difference is calculated as follows: Re(set)=Rr(set)-Rroom The supply air dew point setpoint is calculated as follows: The calculation of valve opening is: Re(t)=Rset-Rout Among them, Rroom is the indoor dew point temperature, Rr(set) is the indoor dew point temperature setting value, Re(set) is the first humidity difference, Rset is the supply air dew point temperature setting value, Rout is the actual supply air dew point temperature, Re(t) is the second humidity difference, and Ru(t) is the valve opening value.

9. The method for environmental self-adaptation of process air conditioning according to claim 8, characterized in that: The humidity control valve is a cooling dehumidification device and / or a heating valve, which is used to change the steam flow of the rotary dehumidifier and / or humidifier; its adjustment process is: When the air supply dew point value Rout≥the air supply dew point setting value Tset, the humidification valve is gradually closed to 0, and then the rotary dehumidification is gradually opened; If the supply air dew point value Tout is less than the supply air dew point setting value Tset, the rotary dehumidifier is gradually closed and the humidification valve is gradually opened.

10. The method for environmental self-adaptation of process air conditioning according to claim 4, characterized in that: Adaptive regulation also includes pressure difference control and air supply volume control: The pressure difference control is to use the environmental pressure difference sensor to measure the environmental pressure difference, and then transmit the workshop pressure difference value to the PLC controller, and then compare it with the environmental pressure difference set value, and automatically adjust the size of the fresh air valve through calculation to ensure that the environmental pressure difference is constant; The air supply volume control is to use an air supply volume sensor to measure the air supply volume, then transmit the air supply volume value to the PLC controller, and then compare it with the air supply volume set value, and automatically adjust the frequency of the air supply fan inverter through calculation to ensure a constant air supply volume.

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