Device and method for cleaning filler of cooling tower of single crystal furnace

Abstract

The invention belongs to the technical field of cooling tower cleaning, and particularly relates to a single crystal furnace cooling tower filler cleaning device and a single crystal furnace cooling tower filler cleaning method. A drying blowing assembly in a primary descaling device firstly blows wet dirt in cooling tower filler dry, and a vibration assembly in the primary descaling device shatters dry large-particle dirt in the cooling tower filler into pieces; the drying and purging assembly also blows the shattered large-particle dirt in the cooling tower filler out of the cooling tower filler; a chemical agent reacting with the stubborn water scale is stored in an agent storage assembly in the secondary descaling device, an agent spraying assembly communicates with the agent storage assembly, and the agent spraying assembly is used for spraying the chemical agent in the agent storage assembly into the cooling tower filler, so that the chemical agent chemically reacts with the water scale in the cooling tower filler; therefore, stubborn scale in the cooling tower filler is removed; according to the device and the method provided by the invention, the efficiency is improved while the cooling tower filler is cleaned more cleanly.

Description

Technical Field

[0001] The invention belongs to the technical field of cooling tower cleaning, and in particular relates to a single crystal furnace cooling tower filler cleaning device and a method thereof. Background Art

[0002] The single crystal furnace used in semiconductor wafer factories is produced all year round, and the cooling water of the single crystal furnace needs to be supplied for a long time. Considering the long-term use of the cooling tower, the fillers and coils in the tower are prone to scale and crystallization of reagents. The traditional single crystal furnace cooling tower cleaning method is manual cleaning. Manual cleaning of the cooling tower filler requires drying the cooling tower, removing the filler, cleaning the scale attached to the filler, and assembling the filler. It takes up to a week to clean the filler of a cooling tower, which affects production efficiency and greatly increases labor costs.

[0003] To this end, the Chinese invention patent with patent number CN202411399694.0 discloses a cleaning device for a cooling tower, including a water tank, a first motor is fixed in the water tank, a disc is fixed at the output end of the first motor, a convex shaft is fixed on the disc, and a vibration cleaning mechanism is arranged above the disc. The vibration cleaning mechanism is used in conjunction with an angle-adjustable flushing mechanism. During the cleaning process of the cooling tower filler, the water flow can produce shear stress on the impurities bonded to the filler, thereby ensuring the flushing effect of the filler. With the vibration mechanism, it is convenient to shake off the impurities bonded to the filler, and through the vibration effect, the impurities in the filler gap can be effectively shaken off, thereby ensuring the cleaning effect of the filler. However, the flushing mechanism and the vibration cleaning mechanism can only flush the surface impurities of the filler, and a large amount of scale on the internal filler cannot be cleaned. Long-term scaling affects the fluidity of the cooling water and reduces the cooling capacity of the cooling tower. Summary of the invention

[0004] In view of this, the present invention provides a single crystal furnace cooling tower filler cleaning device and method thereof to solve the technical problem that the flushing mechanism and vibration cleaning mechanism in the prior art can only flush the surface impurities of the filler, but a large amount of scale in the internal filler cannot be cleaned.

[0005] To achieve the above objectives, this application adopts the following scheme: A single crystal furnace cooling tower filler cleaning device comprises a fixing frame, a primary descaling device and a secondary descaling device, wherein the fixing frame is detachable and surrounds the surface of the cooling tower, the primary descaling device and the secondary descaling device are both detachably arranged on the fixing frame, the primary descaling device is used to remove large particles of dirt in the cooling tower filler, and the secondary descaling device is used to remove stubborn scale in the cooling tower filler: The primary descaling device comprises a drying and blowing assembly and a vibrating assembly, both of which can be detachably arranged on the fixing frame, the drying and blowing assembly is used to dry the wet dirt inside the cooling tower filler, the vibrating assembly is used to break the dry large particles of dirt inside the cooling tower filler, and the drying and blowing assembly is also used to blow the broken large particles of dirt inside the cooling tower filler out of the cooling tower filler; The secondary descaling device includes a chemical spraying component and a chemical storage component. The chemical spraying component is connected to the chemical storage component. The chemical spraying component is used to spray the chemical in the chemical storage component into the cooling tower filler, so that the chemical reacts chemically with the scale in the cooling tower filler.

[0006] Preferably, at least four retractable support parts are connected along the vertical direction of the fixed frame, and the retractable support parts include two fixed rods and a connecting rod, one end of the two fixed rods are respectively connected to the top and bottom of the fixed frame, and the two ends of the connecting rod are respectively connected to the other ends of the two fixed rods by pins.

[0007] Preferably, the fixed frame is provided with an annular slide rail surrounding the outer side of the cooling tower and at least two sliding frames slidably arranged on the annular slide rail, a plurality of mounting plates are arranged on the sliding frame, and the plurality of mounting plates are distributed at intervals along the longitudinal direction of the sliding frame, and the drying and purge assembly and the vibration assembly are detachably arranged on any of the mounting plates.

[0008] Preferably, it further comprises a plurality of blowing racks, wherein the plurality of blowing racks are detachably arranged on the sliding rack, and the plurality of blowing racks have flow guide channels inside.

[0009] Preferably, the vibration component includes a vibration motor and a vibration contact, one end of the vibration contact is arranged at the output end of the vibration motor, and the surface of the vibration contact is wrapped with a flexible material.

[0010] Preferably, the medicine storage assembly includes a medicine storage box and a pH detector, and the pH detector is disposed in the medicine storage box.

[0011] Preferably, the medicine spraying assembly includes a pressure pump and a medicine delivery pipe, a plurality of nozzles are arranged at intervals on the medicine delivery pipe, the inlet of the pressure pump is connected to the medicine storage box, and the outlet of the pressure pump is connected to the inlet end of the medicine delivery pipe.

[0012] A method for cleaning a packing of a single crystal furnace cooling tower comprises a primary descaling step and a secondary descaling step: The primary descaling step comprises the following steps: S11. Drying the wet dirt inside the pre-cleaned cooling tower filler so that the wet dirt is dry dirt; S12. Vibrating the dry dirt to break the dry dirt, and blowing the broken dry dirt out of the packing; The secondary descaling step comprises the following steps: S21. Prepare scale cleaning agent; S22. Spraying the scale cleaning agent onto the interior of the packing and the coil of the cooling tower after the primary descaling step for a first period of time; S23. After spraying for the first time period, the pre-cleaning cooling tower spray system is turned on for a predetermined time to accelerate the circulation reaction of the scale cleaning agent, and the pre-cleaning cooling tower spray system is turned off after the circulation reaction is completed.

[0013] Preferably, the scale cleaning agent is a citric acid solution with a pH of 5 to 6.

[0014] Preferably, the first duration is 4 hours to 8 hours.

[0015] The technical solution adopted in this application can achieve the following beneficial effects: In a single crystal furnace cooling tower filler cleaning device and method provided by the present invention, a fixing frame is detachably arranged around the surface of the cooling tower. First, the large particles of dirt inside the cooling tower filler are removed by using the primary descaling device: the dry purge component in the primary descaling device arranged on the fixing frame first dries the wet dirt inside the cooling tower filler, and the vibration component in the primary descaling device breaks the dry large particles of dirt inside the cooling tower filler. At the same time, the dry purge component is also used to blow the broken large particles of dirt inside the cooling tower filler out of the cooling tower filler; then, the stubborn scale in the cooling tower filler is removed by the secondary descaling device: the secondary descaling device The chemical storage component in the agent storage component stores chemical agents that react with the stubborn scale, and the agent spraying component is connected to the agent storage component. The agent spraying component is used to spray the chemical agents in the agent storage component into the cooling tower filler, so that the chemical agents react chemically with the scale in the cooling tower filler, thereby removing the stubborn scale in the cooling tower filler; compared with the cooling tower filler cleaning device in the prior art, the device provided by the present invention can clean the stubborn scale inside the cooling tower filler, and clean it more thoroughly; compared with the manual cleaning method of cooling tower filler in the prior art, the method provided by the present invention is more efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the single crystal furnace cooling tower filler cleaning device in the present invention.

[0017] Figure 2 It is an axonometric view of the single crystal furnace cooling tower filler cleaning device of the present invention.

[0018] Figure 3 It is a schematic diagram of the structure of the sliding frame in the single crystal furnace cooling tower filler cleaning device of the present invention.

[0019] Figure 4 It is a schematic diagram of the structure of the vibration component in the single crystal furnace cooling tower filler cleaning device of the present invention.

[0020] Figure 5 It is a schematic structural diagram of the blast rack in the single crystal furnace cooling tower filler cleaning device of the present invention.

[0021] Figure 6 It is a front view of the secondary descaling device in the single crystal furnace cooling tower filler cleaning device of the present invention.

[0022] Figure 7 It is a side view of the secondary descaling device in the single crystal furnace cooling tower filler cleaning device of the present invention.

[0023] Figure 8 It is a rear view of the secondary descaling device in the single crystal furnace cooling tower filler cleaning device of the present invention.

[0024] In the figure, a fixed frame 100, a retractable support part 110, a fixed rod 111, a connecting rod 112, a sliding frame 120, a mounting plate 121, a blower frame 130, a primary descaling device 200, a drying and blowing assembly 210, a vibration motor 221, a vibration contact 222, a vibration assembly 220, a secondary descaling device 300, a chemical spraying assembly 310, a pressure pump 311, a chemical conveying member 312, a nozzle 313, a chemical storage assembly 320, a cooling tower 400, and a filler 410. DETAILED DESCRIPTION

[0025] In order to facilitate the understanding of the present application, the present application will be described more comprehensively below in conjunction with the accompanying drawings. And the preferred implementation of the present application is given. However, the present application can be implemented in many different forms and is not limited to the implementation described herein. On the contrary, the purpose of providing these implementations is to make the disclosure of the present application more thoroughly and comprehensively understood.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0027] Please see Figures 1 to 8The present embodiment provides a cleaning device for the packing 410 of a single crystal furnace cooling tower 400, comprising a fixing frame 100, a primary descaling device 200 and a secondary descaling device 300. The fixing frame 100 is detachably mounted around the surface of the cooling tower 400. The primary descaling device 200 and the secondary descaling device 300 are both detachably mounted on the fixing frame 100. The primary descaling device 200 is used to remove large particles of dirt in the packing 410 of the cooling tower 400. The secondary descaling device 300 is used to remove stubborn scale in the packing 410 of the cooling tower 400. The primary descaling device 200 includes a drying and blowing assembly 210 and a vibration assembly 220, both of which can be detachably mounted on the fixing frame 100, the drying and blowing assembly is used to dry the wet dirt inside the packing 410 of the cooling tower 400, the vibration assembly 220 is used to break the dry large particles of dirt inside the packing 410 of the cooling tower 400, and the drying and blowing assembly 210 is also used to blow the broken large particles of dirt inside the packing 410 of the cooling tower 400 out of the packing 410 of the cooling tower 400; The secondary descaling device 300 includes a chemical spraying component 310 and a chemical storage component 320. The chemical spraying component 310 is connected to the chemical storage component 320. The chemical storage component 320 stores chemical agents that react with the stubborn scale. The chemical spraying component 310 is used to spray the chemical agents in the chemical storage component 320 into the filling 410 of the cooling tower 400, so that the chemical agents react chemically with the scale in the filling 410 of the cooling tower 400.

[0028] In this embodiment, the fixing frame 100 may be an inner and outer two-layer structure, one is to increase the stability of the fixing frame 100, and the other is to facilitate the selection of installation positions of the drying and purge component 210, the vibration component 220, the medicine spraying component 310 and the medicine storage component 320, so that each component can cooperate better. The drying and purge component 210 may be a fan, a blower, or a combination of a blower and infrared baking. In this embodiment, the drying and purge component 210 is an industrial fan.

[0029] When in use, the fixing frame 100 is first detachably arranged on the surrounding surfaces of the pre-cleaned cooling tower 400, and the drying and blowing assembly 210, the vibration assembly 220, the medicine spraying assembly 310 and the medicine storage assembly 320 are respectively installed on the fixing frame 100, and the packing 410 of the cooling tower 400 is cleaned in a modular manner. Since the dirt in the packing 410 of the cooling tower 400 is in a wet state, it is not easy to clean, and it takes a long time, generally 4 to 5 days, to dry naturally, so it is necessary to start the industrial fan to blow it to a dry state; then, start the vibration assembly 220 to vibrate the packing 410 of the cooling tower 400 to break the dry dirt inside the packing 410, and at the same time, the industrial fan continues to purge the packing 410 of the cooling tower 400 to blow the broken dirt out of the packing 410. At this time, most of the dirt inside the packing 410 has been cleaned, however, vibration cannot remove the stubborn scale inside the packing 410. Continuous vibration will damage the packing 410. Therefore, the industrial fan and the vibration component 220 stop working, and the agent spraying component 310 and the agent storage component 320 are started. The agent storage component 320 stores chemical agents that react with the stubborn scale. The agent spraying component 310 sprays the chemical agents in the agent storage component 320 into the packing 410, and the chemical agents react chemically with the stubborn scale inside the packing 410. After the reaction is completed, the packing 410 is simply rinsed.

[0030] Compared with the cleaning device for the cooling tower 400 filler 410 in the prior art, the device provided by the present invention can clean the stubborn scale inside the cooling tower 400 filler 410 more thoroughly.

[0031] In order to facilitate the cleaning of the fillers 410 of the cooling towers 400 at different heights and to facilitate the disassembly of the fixing frame 100, in some preferred embodiments, at least four retractable support parts 110 are connected along the vertical direction of the fixing frame 100, and the retractable support part 110 includes two fixing rods 111 and a connecting rod 112, one end of the two fixing rods 111 is respectively connected to the top and the bottom of the fixing frame 100, and the two ends of the connecting rod 112 are respectively connected to the other ends of the two fixing rods 111 by bolts. When the fixing frame 100 needs to be set around the pre-treated cooling tower 400, it is only necessary to connect the fixing rods 111 and the connecting rods 112 by bolts respectively, and when disassembling, it is also only necessary to remove it, and because the height of the fixing frame 100 can be adjusted, it can be applied to cooling towers 400 of different heights.

[0032] Considering that after cleaning one module, the drying and purge assembly 210, the vibration assembly 220, the agent spray assembly 310 and the agent storage assembly 320 need to be disassembled and then installed in the next module, which is not convenient on the one hand and affects the efficiency on the other hand. In some preferred embodiments, the fixed frame 100 is provided with an annular slide rail surrounding the outer side of the cooling tower 400 and at least two sliding frames 120 slidably arranged on the annular slide rail, and the sliding frame 120 is provided with a plurality of mounting plates 121, and the plurality of mounting plates 121 are longitudinally spaced and distributed along the sliding frame 120, and the drying and purge assembly 210 and the vibration assembly 220 can be detachably arranged on any of the mounting plates 121. The drying and purge assembly 210 and the vibration assembly 220 can be detachably arranged on the mounting plate 121. When cleaning one module and needing to clean the next module, it is only necessary to slide the sliding frame 120, thereby improving the cleaning efficiency.

[0033] Considering that the gas of the drying and blowing assembly 210 is relatively dispersed when blowing, which affects its efficiency, in some optional embodiments, a plurality of blowing racks 130 are further included, and the plurality of blowing racks 130 are detachably arranged on the sliding rack 120, and the plurality of blowing racks 130 have guide channels inside. When working, after the drying and blowing assembly 210 is started, the airflow generated passes through the guide channels inside the blowing racks 130 and is distributed inside the filler 410, so that the dirt inside the filler 410 can be quickly dried, and the broken objects inside the filler 410 can be quickly blown out.

[0034] In order to ensure that the central part of the packing 410 of the cooling tower 400 can also be cleaned thoroughly, in some preferred embodiments, the vibration assembly 220 includes a vibration motor 221 and a vibration contact 222, one end of the vibration contact 222 is arranged at the output end of the vibration motor 221, and the surface of the vibration contact 222 is wrapped with a flexible material. The other end of the vibration contact can extend into the packing 410, and when the vibration motor 221 is working, the vibration of the vibration contact 222 can break the dirt in the central part of the packing 410. Considering that when the vibration contact vibrates, the packing 410 may be damaged due to the excessive vibration intensity, in some preferred embodiments, the surface of the vibration contact 222 is wrapped with a flexible material to avoid damage to the packing 410.

[0035] Specifically, the medicine storage component 320 includes a medicine storage box and a pH detector. The pH detector is disposed in the medicine storage box, and the pH detector is used to detect the pH of the chemical agent in the medicine storage box.

[0036] In some specific embodiments, the drug spraying assembly 310 includes a pressure pump 311 and a drug delivery member 312, and a plurality of nozzles 313 are arranged at intervals on the drug delivery member 312. The inlet of the pressure pump 311 is connected to the drug storage box, and the outlet of the pressure pump 311 is connected to the inlet end of the drug delivery member 312. The pressure pump 311 and the drug delivery member 312 are both arranged on the mounting plate 121, and a plurality of bifurcated delivery pipes are arranged on the drug delivery member 312, and each of the bifurcated delivery pipes is provided with a nozzle 313. When in use, the plurality of nozzles 313 spray chemical agents on the filler 410 at the same time to improve work efficiency.

[0037] A single crystal furnace cooling tower 400 filler 410 cleaning method in the present application can be understood by those skilled in the art through reading and its essence, and thus the method can be implemented by using different devices. However, in order to make the method concrete and easy to understand, the method will be explained in conjunction with the above-mentioned single crystal furnace cooling tower 400 filler 410 cleaning device. However, the method can still be implemented by other devices. Similarly, the protection scope of the method is not limited to and does not depend on the above-mentioned single crystal furnace cooling tower 400 filler 410 cleaning device.

[0038] A method for cleaning a packing 410 of a single crystal furnace cooling tower 400 includes a primary descaling step and a secondary descaling step: The primary descaling step comprises the following steps: S11. Drying the wet dirt inside the filler 410 in the pre-cleaning cooling tower 400 so that the wet dirt is dry dirt; S12. Vibrating the dry dirt to break the dry dirt, and blowing the broken dry dirt out of the filler 410; The secondary descaling step comprises the following steps: S21. Prepare scale cleaning agent; S22. Spraying the scale cleaning agent onto the interior of the filler 410 and the coil of the cooling tower 400 after the primary descaling step for a first period of time; S23. After spraying for the first time period, the spray system of the pre-cleaning cooling tower 400 is turned on for a predetermined time to accelerate the circulation reaction of the scale cleaning agent, and the spray system of the pre-cleaning cooling tower 400 is turned off after the circulation reaction is completed.

[0039] In a specific implementation process, first, the fixing frame 100 is set around the filler 410 of the pre-cleaning cooling tower 400, and the drying and purge component 210 (industrial fan) is used to dry the moist dirt inside the filler 410 in the pre-cleaning cooling tower 400, which can be dried for 1 to 2 days; after the dirt inside the filler 410 is dried, the vibration contact is extended into the filler 410, and the filler 410 is vibrated to break the dry dirt inside the filler 410, and at the same time, the drying and purge component 210 blows the broken dirt to blow the broken materials out of the filler 410. Then, add the scale cleaning agent into the agent storage box, and use the pressure pump 311, the agent conveying member 312 and the nozzle 313 to spray the scale cleaning agent in the agent storage box into the filler 410. The scale cleaning agent can chemically react with the scale in the filler 410, thereby removing the scale in the filler 410. Compared with the method of manually cleaning the filler 410 of the cooling tower 400 in the prior art, the method provided by the present invention is more efficient.

[0040] The scale cleaning agent is a citric acid solution with a pH of 5 to 6. The citric acid solution is added into the agent storage box, and the pH of the citric acid solution is detected. When the pH of the citric acid solution is 5 to 6, the citric acid solution is sprayed into the filler 410.

[0041] Specifically, the first time length is 4 hours to 8 hours. When the citric acid solution is sprayed into the filler 410 for a long time, the citric acid solution may corrode the filler 410 and shorten the durability of the filler 410. When the citric acid solution is sprayed into the filler 410 for a short time, it may not be possible to completely remove the scale inside the filler 410. Therefore, it is more appropriate for the first time length to be 4 hours to 8 hours, which can remove the scale inside the filler 410 and ensure that the seasoning is not corroded.

[0042] The following specific experimental examples are used to further illustrate the technical solutions and technical effects of the present invention. It should be noted that the following experimental examples are only for further explaining the present invention and do not limit the technical solutions of the present invention.

[0043] Experimental example Step 1: using an industrial fan to dry the wet dirt in the pre-cleaned cooling tower 400 filler 410, using a vibration motor 221 to vibrate the dried dirt in the filler 410 to break the dry dirt in the filler 410, and using the industrial fan to blow the broken dirt out of the filler 410; Step 2: Spray the interior of the filler 410 after the first step with a citric acid solution having a pH of 6 for 8 hours. After the spraying is completed, open the pre-cleaning cooling tower 400 spray system for a preset hour to accelerate the circulation reaction of the scale cleaning agent. After the circulation reaction is completed, close the pre-cleaning cooling tower 400 spray system.

[0044] According to statistics, the total time for cleaning the packing 410 of a cooling tower 400 in this embodiment is 4 days, and there is no dirt or scale inside the packing 410 after cleaning.

[0045] Blank example The difference between this blank example and the above-mentioned embodiment is that: the internal filler 410 of the pre-cleaning cooling tower 400 is removed for manual cleaning by manual cleaning.

[0046] According to statistics, the total time for cleaning a cooling tower 400 filler 410 in this blank example is 10 days. There is no dirt or scale inside the filler 410 after cleaning. It takes a long time and increases costs.

[0047] Comparative Example 1 The difference between this comparative example 1 and the above-mentioned embodiment is that only the first step is adopted, and the second step is not adopted to clean the internal filler 410 of the pre-cleaning cooling tower 400.

[0048] According to statistics, the total time for cleaning the packing 410 of a cooling tower 400 in this comparative example 1 is 3 days. After cleaning, there is no dirt inside the packing 410 but there is scale, and the cleaning is not thorough enough.

[0049] Comparative Example 2 The difference between this comparative example 2 and the above-mentioned embodiment is that only the second step is adopted, and the first step is not adopted to clean the internal filler 410 of the pre-cleaning cooling tower 400.

[0050] According to statistics, the total time for cleaning a cooling tower 400 filler 410 in this comparative example 2 is 8 days. There is no dirt or scale inside the filler 410 after cleaning, but it takes a long time and wastes a lot of citric acid solution, which increases the cost.

[0051] Therefore, only by first using the first step of drying the dirt inside the filler 410 and then removing it by vibration, and then using chemical agents in the second step to remove the scale inside the filler 410, can the time used to clean the filler 410 of a cooling tower 400 be the shortest, the efficiency be the highest, and the cleaned filler 410 be cleaner.

[0052] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or substitutions within the technical scope disclosed by the present invention, and these modifications or substitutions should be included in the protection scope of the present invention.

Claims

1. A single crystal furnace cooling tower filler cleaning device, characterized in that: It includes a fixing frame, a primary descaling device and a secondary descaling device. The fixing frame can be detachably surrounded on the surface of the cooling tower. Both the primary descaling device and the secondary descaling device can be detachably arranged on the fixing frame. The primary descaling device is used to remove large particles of dirt in the cooling tower filler, and the secondary descaling device is used to remove stubborn scale in the cooling tower filler: The primary descaling device comprises a drying and blowing assembly and a vibrating assembly, both of which can be detachably arranged on the fixing frame, the drying and blowing assembly is used to dry the wet dirt inside the cooling tower filler, the vibrating assembly is used to break the dry large particles of dirt inside the cooling tower filler, and the drying and blowing assembly is also used to blow the broken large particles of dirt inside the cooling tower filler out of the cooling tower filler; The secondary descaling device includes a chemical spraying component and a chemical storage component. The chemical storage component stores chemical agents that react with the stubborn scale. The chemical spraying component is connected to the chemical storage component. The chemical spraying component is used to spray the chemical agent in the chemical storage component into the cooling tower filler, so that the chemical agent reacts chemically with the scale in the cooling tower filler.

2. The single crystal furnace cooling tower filler cleaning device according to claim 1 is characterized in that: At least four retractable support parts are connected along the vertical direction of the fixed frame, and the retractable support parts include two fixed rods and a connecting rod. One ends of the two fixed rods are respectively connected to the top and bottom of the fixed frame, and the two ends of the connecting rod are respectively connected to the other ends of the two fixed rods with pins.

3. The single crystal furnace cooling tower filler cleaning device according to claim 1 is characterized in that: The fixed frame is provided with an annular slide rail surrounding the outer side of the cooling tower and at least two sliding frames slidably arranged on the annular slide rail, the sliding frame is provided with a plurality of mounting plates, and the plurality of mounting plates are distributed at intervals along the longitudinal direction of the sliding frame, and the drying and purge assembly and the vibration assembly are detachably arranged on any of the mounting plates.

4. The single crystal furnace cooling tower filler cleaning device according to claim 1, characterized in that: It also includes a plurality of blowing frames, which are detachably arranged on the sliding frame, and the plurality of blowing frames have flow guide channels inside.

5. The single crystal furnace cooling tower filler cleaning device according to claim 1, characterized in that: The vibration component comprises a vibration motor and a vibration contact, one end of the vibration contact is arranged at the output end of the vibration motor, and the surface of the vibration contact is wrapped with a flexible material.

6. The single crystal furnace cooling tower filler cleaning device according to claim 1, characterized in that: The medicine storage component includes a medicine storage box and a pH detector, and the pH detector is arranged in the medicine storage box.

7. The single crystal furnace cooling tower filler cleaning device according to claim 6, characterized in that: The medicine spraying assembly comprises a pressure pump and a medicine conveying member, on which a plurality of nozzles are arranged at intervals, the inlet of the pressure pump is connected to the medicine storage box, and the outlet of the pressure pump is connected to the inlet end of the medicine conveying pipe.

8. A method for cleaning packing of a single crystal furnace cooling tower, characterized in that: It includes primary descaling step and secondary descaling step: The primary descaling step comprises the following steps: S11. Drying the wet dirt inside the pre-cleaned cooling tower filler so that the wet dirt is dry dirt; S12. Vibrating the dry dirt to break the dry dirt, and blowing the broken dry dirt out of the packing; The secondary descaling step comprises the following steps: S21. Prepare scale cleaning agent; S22. Spraying the scale cleaning agent onto the interior of the packing and the coil of the cooling tower after the primary descaling step for a first period of time; S23. After spraying for the first time period, the pre-cleaning cooling tower spray system is turned on for a predetermined time to accelerate the circulation reaction of the scale cleaning agent, and the pre-cleaning cooling tower spray system is turned off after the circulation reaction is completed.

9. The method for cleaning the packing of a single crystal furnace cooling tower according to claim 8, characterized in that: The scale cleaning agent is a citric acid solution with a pH of 5 to 6.

10. The method for cleaning the packing of a single crystal furnace cooling tower according to claim 8, characterized in that: The first duration is 4 hours to 8 hours.

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