Differential pressure sensor and differential pressure detection device

Abstract

The invention discloses a differential pressure sensor and a differential pressure detection device. The differential pressure sensor comprises a first module, a second module and a flexible connecting piece. The first module includes: a first block having a first cavity; a first diaphragm attached to the first block; the first pressure sensor and the second pressure sensor are installed in the first cavity of the first block. The second module includes: a second block having a second cavity; and a second diaphragm attached to the second block. The flexible connecting piece is in a hollow tubular shape and is connected between the first block body and the second block body, so that the first module can float relative to the second module. The first pressure sensor is communicated with the first cavity and used for detecting the pressure of the first fluid, and the second pressure sensor is communicated with the second cavity through the flexible connecting piece and used for detecting the pressure of the second fluid. The position error between the connecting ends of the first pipeline and the second pipeline of a client can be absorbed, so that the differential pressure sensor can be easily mounted on the pipeline of the client.

Description

Technical Field

[0001] The invention relates to a differential pressure sensor and a differential pressure detection device comprising the differential pressure sensor. Background Art

[0002] In the prior art, a differential pressure sensor is usually used to detect the fluid pressure difference in the first pipeline and the second pipeline of the customer. One end of the differential pressure sensor is connected to the connection end of the first pipeline, and the other end is connected to the connection end of the second pipeline. In the prior art, the relative position between the two ends of the differential pressure sensor is fixed and cannot float relative to each other. This requires that the relative position between the connection end of the first pipeline and the connection end of the second pipeline of the customer must be accurate. However, in actual applications, it is difficult to accurately ensure the relative position between the connection end of the first pipeline and the connection end of the second pipeline, which makes it difficult to install the differential pressure sensor on the customer's pipeline. Summary of the invention

[0003] The purpose of the present invention is to solve at least one aspect of the above-mentioned problems and defects in the prior art.

[0004] According to one aspect of the present invention, a differential pressure sensor is provided. The differential pressure sensor comprises: a first module, a second module and a flexible connector. The first module comprises: a first block having a first cavity for accommodating a first fluid; a first diaphragm attached to the first block for transmitting the pressure in a first pipeline to the first fluid in the first cavity; a first pressure sensor installed in the first cavity of the first block; and a second pressure sensor installed in the first cavity of the first block. The second module comprises: a second block having a second cavity for accommodating a second fluid; and a second diaphragm attached to the second block for transmitting the pressure in a second pipeline to the second fluid in the second cavity. The flexible connector is in the shape of a hollow tube and is connected between the first block and the second block so that the first module can float relative to the second module. The first pressure sensor is connected to the first cavity for detecting the pressure of the first fluid, and the second pressure sensor is connected to the second cavity via the flexible connector for detecting the pressure of the second fluid.

[0005] According to an exemplary embodiment of the present invention, the first pressure sensor has a first detection hole, which is connected to the first cavity to detect the first fluid pressure; the second pressure sensor has a second detection hole, which is connected to the second cavity via the flexible connector to detect the second fluid pressure.

[0006] According to another exemplary embodiment of the present invention, the flexible connector includes: a first connecting end, connected to the first block and connected to the second pressure sensor fluid; a second connecting end, connected to the second block and connected to the second cavity fluid; and a flexible connecting portion, connected between the first connecting end and the second connecting end, a connecting hole being formed on the first block, and the first connecting end of the flexible connector is connected to the second pressure sensor fluid via the connecting hole.

[0007] According to another exemplary embodiment of the present invention, a first mounting portion is formed on the first block, and the first connecting end of the flexible connector is embedded in the first mounting portion of the first block to achieve a connection between the two; a second mounting portion is formed on the second block, and the second connecting end of the flexible connector is embedded in the second mounting portion of the second block to achieve a connection between the two.

[0008] According to another exemplary embodiment of the present invention, the first connection end and the second connection end of the flexible connector are welded to the first block and the second block, respectively.

[0009] According to another exemplary embodiment of the present invention, the flexible connection portion of the flexible connection piece is in a bellows shape and the tube wall thereof is smaller than a predetermined value, so that the flexible connection portion can be bent, twisted, stretched or compressed.

[0010] According to another exemplary embodiment of the present invention, the flexible connection portion of the flexible connection member is a thin-walled tube with a wall thickness less than a predetermined value, so that the flexible connection portion can be elastically deformed in its axial and radial directions.

[0011] According to another exemplary embodiment of the present invention, the first block has two axially opposite sides, the first cavity has an opening formed on one side of the first block, the first diaphragm is attached to one side of the first block and closes the opening of the first cavity; the first mounting portion is formed on the other side of the first block and is connected to the communicating hole.

[0012] According to another exemplary embodiment of the present invention, the second block has two axially opposite sides, the second cavity has an opening formed on one side of the second block, the second diaphragm is attached to one side of the second block and closes the opening of the second cavity; an axially extending accommodating hole is formed on the other side of the second block, and the second mounting portion connects the second cavity and the accommodating hole; at least a portion of the flexible connection portion of the flexible connector is accommodated in the accommodating hole, and the inner diameter of the accommodating hole is larger than the outer diameter of the flexible connection portion to allow the flexible connection portion to move radially.

[0013] According to another exemplary embodiment of the present invention, the first block and the second block are spaced apart by a predetermined distance in the axial direction, so as to allow the first block and the second block to move in a direction approaching each other in the axial direction by the predetermined distance.

[0014] According to another exemplary embodiment of the present invention, a first fluid filling passage is formed on the first block, and the first fluid filling passage is communicated with the first cavity and is used to fill the first cavity with the first fluid.

[0015] According to another exemplary embodiment of the present invention, the first module further includes: a first sealing ball welded to the inlet of the first fluid-filled passage to seal the inlet of the first fluid-filled passage.

[0016] According to another exemplary embodiment of the present invention, a second fluid filling passage is formed on the second block, and the second fluid filling passage is communicated with the second cavity for filling the second cavity with the second fluid.

[0017] According to another exemplary embodiment of the present invention, the second module further includes: a second sealing ball welded to the inlet of the second fluid-filled passage to seal the inlet of the second fluid-filled passage.

[0018] According to another exemplary embodiment of the present invention, the first module further comprises: a first welding ring for welding a peripheral portion of the first diaphragm to one side of the first block and for welding the first module to a connecting end of a first pipe.

[0019] According to another exemplary embodiment of the present invention, the second module further includes: a second welding ring for welding a peripheral portion of the second diaphragm to one side of the second block and for welding the second module to a connecting end of a second pipe.

[0020] According to another exemplary embodiment of the present invention, the first module further includes: an insert, inserted into the first cavity, for reducing the amount of the first fluid that needs to be filled in the first cavity.

[0021] According to another exemplary embodiment of the present invention, the first module also includes: a first pin passing through the first block and fixed to the first block; and a first lead electrically connected between the first pressure sensor and the first pin, and the first pin is used to output a first fluid pressure signal detected by the first pressure sensor.

[0022] According to another exemplary embodiment of the present invention, the second module also includes: a second pin passing through the first block and fixed to the first block; and a second lead electrically connected between the second pressure sensor and the second pin, and the second pin is used to output a second fluid pressure signal detected by the second pressure sensor.

[0023] According to another exemplary embodiment of the present invention, the first connection end and the second connection end of the flexible connector are L-shaped tubes, the flexible connection portion of the flexible connector is L-shaped tube or straight tube and its two ends are respectively connected to the first connection end and the second connection end.

[0024] According to another exemplary embodiment of the present invention, the first connection end and the second connection end of the flexible connector are in a straight tube shape, the flexible connection portion of the flexible connector is in an L-shaped tube shape or a straight tube shape and its two ends are respectively connected to the first connection end and the second connection end.

[0025] According to another exemplary embodiment of the present invention, the axis of the first module and the axis of the first connecting end of the flexible connector are located in a first plane, the axis of the second module and the axis of the second connecting end of the flexible connector are located in a second plane, and there is a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 degrees to 360 degrees.

[0026] According to another exemplary embodiment of the present invention, the flexible connector is an integrally formed single component.

[0027] According to another exemplary embodiment of the present invention, the first connection end, the second connection end and the flexible connection part of the flexible connector are three independent components that are separately molded and connected to each other; the two ends of the flexible connection part of the flexible connector are respectively welded to the first connection end and the second connection end of the flexible connector.

[0028] According to another exemplary embodiment of the present invention, the first connection end and the second connection end of the flexible connector are respectively sealed and connected to the first block and the second block through a glass packaging process; or the first connection end and the second connection end of the flexible connector are respectively welded to the first block and the second block.

[0029] According to another aspect of the present invention, a pressure difference detection device is provided. The pressure difference detection device comprises: the aforementioned pressure difference sensor; a pressure signal acquisition device electrically connected to the first pressure sensor and the second pressure sensor of the pressure difference sensor, and used to acquire a first fluid pressure signal detected by the first pressure sensor and a second fluid pressure signal detected by the second pressure sensor; and a pressure difference calculation device, which calculates the difference between the first fluid pressure and the second fluid pressure according to the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

[0030] In the aforementioned exemplary embodiments according to the present invention, the first module of the differential pressure sensor can float relative to the second module, thereby absorbing the position error between the connecting end of the first pipeline and the connecting end of the second pipeline of the customer, so that the differential pressure sensor can be easily installed on the customer's pipeline.

[0031] Other objects and advantages of the present invention will become apparent from the following description of the present invention with reference to the accompanying drawings, which will help to provide a comprehensive understanding of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A perspective schematic diagram showing a differential pressure sensor according to an exemplary embodiment of the present invention;

[0033] Figure 2 A perspective schematic diagram showing a differential pressure sensor according to an exemplary embodiment of the present invention when viewed from one end;

[0034] Figure 3 A perspective schematic diagram showing a differential pressure sensor according to an exemplary embodiment of the present invention when viewed from another end;

[0035] Figure 4 A perspective exploded cross-sectional view showing a differential pressure sensor according to an exemplary embodiment of the present invention;

[0036] Figure 5 A three-dimensional assembly cross-sectional view showing a differential pressure sensor according to an exemplary embodiment of the present invention;

[0037] Figure 6 A planar assembly cross-sectional view showing a differential pressure sensor according to an exemplary embodiment of the present invention;

[0038] Figure 7 An exploded schematic diagram showing a first module of a differential pressure sensor according to an exemplary embodiment of the present invention;

[0039] Figure 8 A perspective schematic diagram showing a differential pressure sensor according to a first variation embodiment of the present invention;

[0040] Fig. 9 A perspective schematic diagram showing a differential pressure sensor according to a second variation embodiment of the present invention;

[0041] Fig.10 A perspective schematic diagram showing a differential pressure sensor according to a third variation embodiment of the present invention;

[0042] Fig.11 A perspective schematic diagram showing a differential pressure sensor according to a fourth variation embodiment of the present invention;

[0043] Fig.12 A perspective schematic diagram showing a differential pressure sensor according to a fifth variation embodiment of the present invention;

[0044] Fig.13 A perspective schematic diagram showing a differential pressure sensor according to a sixth variation embodiment of the present invention;

[0045] Fig.14 A perspective schematic diagram showing a differential pressure sensor according to a seventh variation embodiment of the present invention;

[0046] Fig.15 A schematic perspective view of a differential pressure sensor according to an eighth variation embodiment of the present invention is shown. DETAILED DESCRIPTION

[0047] The technical solution of the present invention is further specifically described below by examples and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals indicate the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the overall inventive concept of the present invention and should not be construed as a limitation of the present invention.

[0048] In addition, in the detailed description below, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the disclosed embodiments. However, it is apparent that one or more embodiments may be implemented without these specific details. In other cases, known structures and devices are embodied in a schematic manner to simplify the accompanying drawings.

[0049] According to an overall technical concept of the present invention, a differential pressure sensor is provided. The differential pressure sensor includes: a first module, a second module and a flexible connector. The first module includes: a first block having a first cavity for accommodating a first fluid; a first diaphragm attached to the first block for transmitting the pressure in a first pipeline to the first fluid in the first cavity; a first pressure sensor installed in the first cavity of the first block; and a second pressure sensor installed in the first cavity of the first block. The second module includes: a second block having a second cavity for accommodating a second fluid; and a second diaphragm attached to the second block for transmitting the pressure in a second pipeline to the second fluid in the second cavity. The flexible connector is in the shape of a hollow tube and is connected between the first block and the second block, so that the first module can float relative to the second module. The first pressure sensor is connected to the first cavity for detecting the pressure of the first fluid, and the second pressure sensor is connected to the second cavity via the flexible connector for detecting the pressure of the second fluid.

[0050] According to another general technical concept of the present invention, a pressure difference detection device is provided. The pressure difference detection device includes: the aforementioned pressure difference sensor; a pressure signal acquisition device electrically connected to the first pressure sensor and the second pressure sensor of the pressure difference sensor, used to acquire a first fluid pressure signal detected by the first pressure sensor and a second fluid pressure signal detected by the second pressure sensor; and a pressure difference calculation device, which calculates the difference between the first fluid pressure and the second fluid pressure based on the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

[0051] Figure 1 A perspective schematic diagram showing a differential pressure sensor according to an exemplary embodiment of the present invention; Figure 2 A perspective schematic diagram showing a differential pressure sensor according to an exemplary embodiment of the present invention when viewed from one end; Figure 3 A perspective schematic diagram showing a differential pressure sensor according to an exemplary embodiment of the present invention when viewed from another end; Figure 4 A perspective exploded cross-sectional view showing a differential pressure sensor according to an exemplary embodiment of the present invention; Figure 5 A perspective assembly cross-sectional view of a differential pressure sensor according to an exemplary embodiment of the present invention is shown.

[0052] like Figures 1 to 5As shown, in an exemplary embodiment of the present invention, a differential pressure sensor is disclosed. The differential pressure sensor includes: a first module 1, a second module 2 and a flexible connector 3. The first module 1 includes: a first block 10, a first diaphragm 12, a first pressure sensor 17 and a second pressure sensor 18. The first block 10 has a first cavity 11 for accommodating a first fluid. The first diaphragm 12 is attached to the first block 10 for transferring the pressure in the first pipe (not shown) to the first fluid in the first cavity 11. The first pressure sensor 17 is installed in the first cavity 11 of the first block 10. The second pressure sensor 18 is installed in the first cavity 11 of the first block 10. The second module 2 includes: a second block 20 and a second diaphragm 22. The second block 20 has a second cavity 21 for accommodating a second fluid. The second diaphragm 22 is attached to the second block 20 for transferring the pressure in the second pipe (not shown) to the second fluid in the second cavity 21.

[0053] like Figures 1 to 5 As shown, in the illustrated embodiment, the flexible connector 3 is in a hollow tubular shape and has a hollow inner cavity 301. The flexible connector 3 is connected between the first block 10 and the second block 20, so that the first module 1 can float relative to the second module 2. In the illustrated embodiment, the first pressure sensor 17 is connected to the first cavity 11 for detecting the first fluid pressure in the first cavity 11, and the second pressure sensor 18 is connected to the second cavity 21 via the flexible connector 3 for detecting the second fluid pressure in the second cavity 21.

[0054] like Figures 1 to 5 As shown, in the illustrated embodiment, since the first module 1 can float relative to the second module 2, the relative position error between the connecting ends of the first pipe and the second pipe can be absorbed, so that the first module 1 and the second module 2 can be easily connected to the connecting ends of the first pipe and the second pipe.

[0055] like Figures 1 to 5 As shown, in the illustrated embodiment, the first pressure sensor 17 has a first detection hole 171, which is connected to the first cavity 11 to detect the pressure of the first fluid. The second pressure sensor 18 has a second detection hole 181, which is connected to the second cavity 21 via the flexible connector 3 to detect the pressure of the second fluid. In the illustrated embodiment, the first pressure sensor 17 and the second pressure sensor 18 are both a micro-electromechanical system, usually referred to as MEMS (Micro-Electro-Mechanical System). The first fluid and the second fluid can be silicone oil or other suitable fluids.

[0056] like Figures 1 to 5As shown, in the illustrated embodiment, the flexible connector 3 includes: a first connection end 31, a second connection end 32 and a flexible connection portion 33. The first connection end 31 is connected to the first block 10 and is in fluid communication with the second pressure sensor 18. The second connection end 32 is connected to the second block 20 and is in fluid communication with the second cavity 21. The flexible connection portion 33 is connected between the first connection end 31 and the second connection end 32. A communication hole 102 is formed on the first block 10, and the first connection end 31 of the flexible connector 3 is in fluid communication with the second pressure sensor 18 via the communication hole 102.

[0057] like Figures 1 to 5 As shown, in the illustrated embodiment, a first mounting portion 101 is formed on the first block 10, and the first connecting end 31 of the flexible connector 3 is embedded in the first mounting portion 101 of the first block 10 to achieve connection between the two. A second mounting portion 201 is formed on the second block 20, and the second connecting end 32 of the flexible connector 3 is embedded in the second mounting portion 201 of the second block 20 to achieve connection between the two.

[0058] like Figures 1 to 5 As shown, in the illustrated embodiment, the first connection end 31 and the second connection end 32 of the flexible connector 3 are welded to the first block 10 and the second block 20, respectively. In the illustrated embodiment, the flexible connector 3 further includes: a first annular welding strip portion 311 and a second annular welding strip portion 312. The first annular welding strip portion 311 is located between the outer wall surface of the first connection end 31 and the inner wall surface of the first mounting portion 101, so as to weld the two together in a sealed manner. The second annular welding strip portion 312 is located between the outer wall surface of the second connection end 32 and the inner wall surface of the second mounting portion 201, so as to weld the two together in a sealed manner.

[0059] Figure 6 A planar assembly cross-sectional view showing a differential pressure sensor according to an exemplary embodiment of the present invention; Figure 7 An exploded schematic diagram of a first module 1 of a differential pressure sensor according to an exemplary embodiment of the present invention is shown.

[0060] like Figures 1 to 7 As shown, in the illustrated embodiment, the flexible connection portion 33 of the flexible connection member 3 is in the shape of a corrugated tube and its tube wall is smaller than a predetermined value, so that the flexible connection portion 33 can be bent, twisted, stretched or compressed.

[0061] However, please note that the structure and shape of the flexible connection part 33 of the flexible connection member 3 of the present invention are not limited to the illustrated embodiment. For example, in another exemplary embodiment of the present invention, the flexible connection part 33 of the flexible connection member 3 may be a thin-walled tube with a wall thickness less than a predetermined value, so that the flexible connection part 33 can be elastically deformed in its axial and radial directions. This also enables the flexible connection part 33 to be bent, twisted, stretched or compressed.

[0062] like Figures 1 to 7 As shown, in the illustrated embodiment, the flexible connector 3 can be a tubular component made of steel or copper. Of course, the flexible connector 3 can also be a tubular component made of other suitable materials.

[0063] like Figures 1 to 7 As shown, in the illustrated embodiment, the first block 10 has two axially opposite sides, the first cavity 11 has an opening formed on one side of the first block 10, the first diaphragm 12 is attached to one side of the first block 10 and closes the opening of the first cavity 11; the first mounting portion 101 is formed on the other side of the first block 10 and is connected to the connecting hole 102.

[0064] like Figures 1 to 7 As shown, in the illustrated embodiment, the second block 20 has two axially opposite sides, the second cavity 21 has an opening formed on one side of the second block 20, and the second diaphragm 22 is attached to one side of the second block 20 and closes the opening of the second cavity 21. An axially extending receiving hole 202 is formed on the other side of the second block 20, and the second mounting portion 201 communicates with the second cavity 21 and the receiving hole 202. At least a portion of the flexible connection portion 33 of the flexible connection member 3 is received in the receiving hole 202, and the inner diameter of the receiving hole 202 is greater than the outer diameter of the flexible connection portion 33 to allow the flexible connection portion 33 to move radially.

[0065] like Figures 1 to 7 As shown, in the illustrated embodiment, the first block 10 and the second block 20 are spaced apart by a predetermined distance d in the axial direction, so as to allow the first block 10 and the second block 20 to move in a direction approaching each other in the axial direction by the predetermined distance d.

[0066] like Figures 1 to 7 As shown, in the illustrated embodiment, a first fluid filling passage 14 is formed on the first block 10 , and the first fluid filling passage 14 is communicated with the first cavity 11 for filling the first cavity 11 with the first fluid.

[0067] like Figures 1 to 7 As shown, in the illustrated embodiment, the first module 1 further includes a first sealing ball 15 , which is welded to the inlet of the first fluid-filled passage 14 to seal the inlet of the first fluid-filled passage 14 .

[0068] like Figures 1 to 7 As shown, in the illustrated embodiment, a second fluid filling passage 24 is formed on the second block 20 , and the second fluid filling passage 24 is communicated with the second cavity 21 for filling the second cavity 21 with the second fluid.

[0069] like Figures 1 to 7 As shown, in the illustrated embodiment, the second module 2 further includes a second sealing ball 25 , which is welded to the inlet of the second fluid-filled passage 24 to seal the inlet of the second fluid-filled passage 24 .

[0070] like Figures 1 to 7 As shown, in the illustrated embodiment, the first module 1 further comprises a first welding ring 13 for welding the peripheral portion of the first diaphragm 12 to one side of the first block 10 and for welding the first module 1 to the connecting end of the first pipeline of the customer.

[0071] like Figures 1 to 7 As shown, in the illustrated embodiment, the second module 2 further includes a second welding ring 23 for welding the peripheral portion of the second diaphragm 22 to one side of the second block 20 and for welding the second module 2 to the connecting end of the second pipeline of the customer.

[0072] like Figures 1 to 7 As shown, in the illustrated embodiment, the first module 1 further includes an insert 16, which is inserted into the first cavity 11 to reduce the amount of the first fluid that needs to be filled in the first cavity 11. In this way, the filling amount of the first fluid can be reduced, and the detection accuracy of the first fluid pressure can be improved.

[0073] like Figures 1 to 7 As shown, in the illustrated embodiment, the first module 1 further includes a first pin 173 and a first lead 172. The first pin 173 passes through the first block 10 and is fixed to the first block 10. The first lead 172 is electrically connected between the first pressure sensor 17 and the first pin 173. The first pin 173 is used to output the first fluid pressure signal detected by the first pressure sensor 17.

[0074] like Figures 1 to 7 As shown, in the illustrated embodiment, the second module 1 further includes: a second pin 183 and a second lead 182. The second pin 183 passes through the first block 10 and is fixed to the first block 10. The second lead 182 is electrically connected between the second pressure sensor 18 and the second pin 183. The second pin 183 is used to output the second fluid pressure signal detected by the second pressure sensor 18.

[0075] Please note that the present invention is not limited to Figure 1-7 The embodiments shown, for example, Figures 8 to 15 Eight different variations are shown.

[0076] Figure 8 A perspective schematic diagram showing a differential pressure sensor according to a first variation embodiment of the present invention; Fig. 9 A schematic perspective view of a differential pressure sensor according to a second variation embodiment of the present invention is shown.

[0077] like Figure 8 and Fig. 9 As shown, in the illustrated embodiment, the first connection end 31 and the second connection end 32 of the flexible connector 3 are L-shaped tubes, and the flexible connection portion 33 of the flexible connector 3 is a straight tube with its two ends respectively connected to the first connection end 31 and the second connection end 32.

[0078] like Figure 8 and Fig. 9 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connection end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connection end 32 of the flexible connector 3 are located in a second plane. Figure 8 and Fig. 9 As shown, there may be a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 to 360 degrees. Figure 8 90 degrees shown, Fig. 9 0 degrees as shown or other suitable angles.

[0079] like Figure 8 and Fig. 9 As shown, in the illustrated embodiment, the first connection end 31, the second connection end 32 and the flexible connection portion 33 of the flexible connector 3 are three separate components that are formed separately and connected to each other. The two ends of the flexible connection portion 33 of the flexible connector 3 are respectively welded to the first connection end 31 and the second connection end 32 of the flexible connector 3. The first connection end 31 and the second connection end 32 of the flexible connector 3 are respectively sealed and connected to the first block 10 and the second block 20 through a glass packaging process.

[0080] Fig.10 A perspective schematic diagram showing a differential pressure sensor according to a third variation embodiment of the present invention; Fig.11 A schematic perspective view of a differential pressure sensor according to a fourth variation embodiment of the present invention is shown.

[0081] like Fig.10 and Fig.11 As shown, in the illustrated embodiment, the first connection end 31 and the second connection end 32 of the flexible connector 3 are L-shaped tubes, and the flexible connection portion 33 of the flexible connector 3 is L-shaped tube and its two ends are respectively connected to the first connection end 31 and the second connection end 32.

[0082] like Fig.10 and Fig.11 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connection end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connection end 32 of the flexible connector 3 are located in a second plane. Figure 8 and Fig. 9 As shown, there may be a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 to 360 degrees. Fig.10 90 degrees shown, Fig.11 0 degrees as shown or other suitable angles.

[0083] like Fig.10 and Fig.11 As shown, in the illustrated embodiment, the first connection end 31, the second connection end 32 and the flexible connection portion 33 of the flexible connector 3 are three separate components that are formed separately and connected to each other. The two ends of the flexible connection portion 33 of the flexible connector 3 are respectively welded to the first connection end 31 and the second connection end 32 of the flexible connector 3. The first connection end 31 and the second connection end 32 of the flexible connector 3 are respectively sealed and connected to the first block 10 and the second block 20 through a glass packaging process.

[0084] Fig.12 A perspective schematic diagram showing a differential pressure sensor according to a fifth variation embodiment of the present invention; Fig.13 A schematic perspective view of a differential pressure sensor according to a sixth variation embodiment of the present invention is shown.

[0085] like Fig.12 and Fig.13 As shown, in the illustrated embodiment, the first connection end 31 and the second connection end 32 of the flexible connector 3 are L-shaped tubes, and the flexible connection portion 33 of the flexible connector 3 is a straight tube with its two ends respectively connected to the first connection end 31 and the second connection end 32.

[0086] like Fig.12 and Fig.13 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connection end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connection end 32 of the flexible connector 3 are located in a second plane. Fig.12 and Fig.13 As shown, there may be a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 to 360 degrees. Fig.12 90 degrees shown, Fig.13 0 degrees as shown or other suitable angles.

[0087] like Fig.12 and Fig.13As shown, in the illustrated embodiment, the flexible connector 3 is an integrally formed single component, that is, the first connection end 31, the second connection end 32 and the flexible connection portion 33 of the flexible connector 3 are integrally formed. The first connection end 31 and the second connection end 32 of the flexible connector 3 are welded to the first block 10 and the second block 20, respectively.

[0088] Fig.14 A perspective schematic diagram showing a differential pressure sensor according to a seventh variation embodiment of the present invention; Fig.15 A schematic perspective view of a differential pressure sensor according to an eighth variation embodiment of the present invention is shown.

[0089] like Fig.14 and Fig.15 As shown, in the illustrated embodiment, the first connection end 31 and the second connection end 32 of the flexible connector 3 are L-shaped tubes, and the flexible connection portion 33 of the flexible connector 3 is L-shaped tube and its two ends are respectively connected to the first connection end 31 and the second connection end 32.

[0090] like Fig.14 and Fig.15 As shown, in the illustrated embodiment, the axis of the first module 1 and the axis of the first connection end 31 of the flexible connector 3 are located in a first plane. The axis of the second module 2 and the axis of the second connection end 32 of the flexible connector 3 are located in a second plane. Fig.14 and Fig.15 As shown, there may be a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 to 360 degrees. Fig.14 90 degrees shown, Fig.15 0 degrees as shown or other suitable angles.

[0091] like Fig.14 and Fig.15 As shown, in the illustrated embodiment, the flexible connector 3 is an integrally formed single component, that is, the first connection end 31, the second connection end 32 and the flexible connection portion 33 of the flexible connector 3 are integrally formed. The first connection end 31 and the second connection end 32 of the flexible connector 3 are welded to the first block 10 and the second block 20, respectively.

[0092] like Figures 1 to 7As shown, in another exemplary embodiment of the present invention, a pressure difference detection device is also disclosed. The pressure difference detection device includes: the aforementioned pressure difference sensor, a pressure signal acquisition device (not shown) and a pressure difference calculation device (not shown). The pressure signal acquisition device is electrically connected to the first pressure sensor 17 and the second pressure sensor 18 of the pressure difference sensor, and is used to acquire the first fluid pressure signal detected by the first pressure sensor 17 and the second fluid pressure signal detected by the second pressure sensor 18. The pressure difference calculation device calculates the difference between the first fluid pressure and the second fluid pressure based on the first fluid pressure signal and the second fluid pressure signal acquired by the pressure signal acquisition device.

[0093] Those skilled in the art will appreciate that the embodiments described above are exemplary and may be improved upon by those skilled in the art. The structures described in the various embodiments may be freely combined without causing any conflicts in structure or principle, and these changes should fall within the scope of protection of the present invention.

[0094] Although the present invention has been described in conjunction with the accompanying drawings, the embodiments disclosed in the accompanying drawings are intended to exemplify the preferred implementations of the present invention and should not be construed as limiting the present invention.

[0095] Although some embodiments of the general inventive concept have been shown and described, it will be appreciated by those skilled in the art that changes may be made to these embodiments without departing from the principles and spirit of the general inventive concept, the scope of which is defined in the claims and their equivalents.

[0096] It should be noted that the word "comprising" does not exclude other elements or steps, and the word "a" or "an" does not exclude a plurality. In addition, any element reference signs in the claims shall not be construed as limiting the scope of the present invention.

Claims

1. A differential pressure sensor, characterized in that: include: The first module (1) comprises: A first block (10) having a first cavity (11) for containing a first fluid; a first diaphragm (12), attached to the first block (10), for transmitting the pressure in the first pipe to the first fluid in the first chamber (11); a first pressure sensor (17) mounted in the first cavity (11) of the first block (10); and a second pressure sensor (18) mounted in the first cavity (11) of the first block (10), The second module (2) includes: a second block (20) having a second chamber (21) for containing a second fluid; and a second diaphragm (22) attached to the second block (20) for transmitting the pressure in the second pipe to the second fluid in the second chamber (21); and a flexible connector (3) in the form of a hollow tube and connected between the first block (10) and the second block (20), so that the first module (1) can float relative to the second module (2), The first pressure sensor (17) is connected to the first chamber (11) for detecting the first fluid pressure, and the second pressure sensor (18) is connected to the second chamber (21) via the flexible connection (3) for detecting the second fluid pressure.

2. The differential pressure sensor according to claim 1, characterized in that: The first pressure sensor (17) has a first detection hole (171), and the first detection hole (171) is connected to the first chamber (11) to detect the first fluid pressure; The second pressure sensor (18) has a second detection hole (181), and the second detection hole (181) is connected to the second chamber (21) via the flexible connection member (3) to detect the second fluid pressure.

3. The differential pressure sensor according to claim 1, characterized in that: The flexible connecting member (3) comprises: A first connection end (31), connected to the first block (10) and in fluid communication with the second pressure sensor (18); a second connection end (32) connected to the second block (20) and in fluid communication with the second chamber (21); and a flexible connection portion (33) connected between the first connection end (31) and the second connection end (32), A communication hole (102) is formed on the first block (10), and the first connection end (31) of the flexible connection member (3) is in fluid communication with the second pressure sensor (18) via the communication hole (102).

4. The differential pressure sensor according to claim 3, characterized in that: A first mounting portion (101) is formed on the first block (10), and the first connecting end (31) of the flexible connecting member (3) is embedded in the first mounting portion (101) of the first block (10) to achieve connection between the two; A second mounting portion (201) is formed on the second block (20), and the second connecting end (32) of the flexible connector (3) is embedded in the second mounting portion (201) of the second block (20) to achieve connection between the two.

5. The differential pressure sensor according to claim 3, characterized in that: The first connecting end (31) and the second connecting end (32) of the flexible connecting member (3) are welded to the first block (10) and the second block (20) respectively.

6. The differential pressure sensor according to claim 3, characterized in that: The flexible connection part (33) of the flexible connection piece (3) is in the shape of a corrugated tube and its tube wall is smaller than a predetermined value, so that the flexible connection part (33) can be bent, twisted, stretched or compressed.

7. The differential pressure sensor according to claim 3, characterized in that: The flexible connection part (33) of the flexible connection member (3) is a thin-walled tube with a wall thickness less than a predetermined value, so that the flexible connection part (33) can be elastically deformed in its axial and radial directions.

8. The differential pressure sensor according to claim 4, characterized in that: The first block (10) has two axially opposite sides, the first cavity (11) has an opening formed on one side of the first block (10), and the first diaphragm (12) is attached to one side of the first block (10) and closes the opening of the first cavity (11); The first mounting portion (101) is formed on the other side of the first block (10) and is communicated with the communication hole (102).

9. The differential pressure sensor according to claim 4, characterized in that: The second block (20) has two axially opposite sides, the second cavity (21) has an opening formed on one side of the second block (20), and the second diaphragm (22) is attached to one side of the second block (20) and closes the opening of the second cavity (21); An axially extending receiving hole (202) is formed on the other side of the second block (20), and the second mounting portion (201) communicates with the second cavity (21) and the receiving hole (202); At least a portion of the flexible connection portion (33) of the flexible connection member (3) is accommodated in the accommodation hole (202), and the inner diameter of the accommodation hole (202) is greater than the outer diameter of the flexible connection portion (33) to allow the flexible connection portion (33) to move radially.

10. The differential pressure sensor according to claim 3, characterized in that: The first block (10) and the second block (20) are spaced apart by a predetermined distance (d) in the axial direction, so as to allow the first block (10) and the second block (20) to move in a direction approaching each other in the axial direction by the predetermined distance (d).

11. The differential pressure sensor according to claim 1, characterized in that: A first fluid filling passage (14) is formed on the first block (10), and the first fluid filling passage (14) is communicated with the first cavity (11) and is used for filling the first cavity (11) with the first fluid.

12. The differential pressure sensor according to claim 11, characterized in that: The first module (1) further comprises: A first sealing ball (15) is welded to the inlet of the first fluid-filled passage (14) to seal the inlet of the first fluid-filled passage (14).

13. The differential pressure sensor according to claim 1, characterized in that: A second fluid filling passage (24) is formed on the second block (20), and the second fluid filling passage (24) is communicated with the second cavity (21) and is used for filling the second cavity (21) with the second fluid.

14. The differential pressure sensor according to claim 13, characterized in that: The second module (2) further comprises: A second sealing ball (25) is welded to the inlet of the second fluid-filled passage (24) to seal the inlet of the second fluid-filled passage (24).

15. The differential pressure sensor according to claim 1, characterized in that: The first module (1) further comprises: A first welding ring (13) is used for welding the peripheral portion of the first diaphragm (12) to one side of the first block (10) and for welding the first module (1) to the connecting end of the first pipeline.

16. The differential pressure sensor according to claim 1, characterized in that: The second module (2) further comprises: A second welding ring (23) is used for welding the peripheral portion of the second diaphragm (22) to one side of the second block (20) and for welding the second module (2) to the connecting end of the second pipe.

17. The differential pressure sensor according to claim 1, characterized in that: The first module (1) further comprises: An insert (16) is inserted into the first cavity (11) and is used to reduce the amount of the first fluid that needs to be filled in the first cavity (11).

18. The differential pressure sensor according to claim 1, characterized in that: The first module (1) further comprises: A first pin (173) passing through the first block (10) and fixed to the first block (10); and A first lead (172) is electrically connected between the first pressure sensor (17) and the first pin (173), The first pin (173) is used to output a first fluid pressure signal detected by the first pressure sensor (17).

19. The differential pressure sensor according to claim 1, characterized in that: The second module (1) further comprises: A second pin (183) passing through the first block (10) and fixed to the first block (10); and A second lead (182) is electrically connected between the second pressure sensor (18) and the second pin (183), The second pin (183) is used to output a second fluid pressure signal detected by the second pressure sensor (18).

20. The differential pressure sensor according to claim 3, characterized in that: The first connection end (31) and the second connection end (32) of the flexible connector (3) are in an L-shaped tube shape, and the flexible connection portion (33) of the flexible connector (3) is in an L-shaped tube shape or a straight tube shape, and its two ends are respectively connected to the first connection end (31) and the second connection end (32).

21. The differential pressure sensor according to claim 3, characterized in that: The first connection end (31) and the second connection end (32) of the flexible connection piece (3) are in the shape of a straight tube, and the flexible connection portion (33) of the flexible connection piece (3) is in the shape of an L-shaped tube or a straight tube, with its two ends respectively connected to the first connection end (31) and the second connection end (32).

22. The differential pressure sensor according to claim 20 or 21, characterized in that: The axis of the first module (1) and the axis of the first connecting end (31) of the flexible connector (3) are located in a first plane, the axis of the second module (2) and the axis of the second connecting end (32) of the flexible connector (3) are located in a second plane, and there is a predetermined angle between the first plane and the second plane, and the predetermined angle is within the range of 0 degrees to 360 degrees.

23. The differential pressure sensor according to claim 3, characterized in that: The flexible connecting piece (3) is a single component formed in one piece.

24. The differential pressure sensor according to claim 3, characterized in that: The first connection end (31), the second connection end (32) and the flexible connection portion (33) of the flexible connection member (3) are three independent components that are separately formed and connected to each other; Two ends of the flexible connection portion (33) of the flexible connection member (3) are respectively welded to the first connection end (31) and the second connection end (32) of the flexible connection member (3).

25. The differential pressure sensor according to claim 23 or 24, characterized in that: The first connection end (31) and the second connection end (32) of the flexible connection member (3) are respectively sealedly connected to the first block (10) and the second block (20) through a glass encapsulation process; or The first connection end (31) and the second connection end (32) of the flexible connection member (3) are welded to the first block (10) and the second block (20) respectively.

26. A pressure difference detection device, characterized in that: include: The differential pressure sensor according to any one of claims 1 to 25; a pressure signal acquisition device, electrically connected to the first pressure sensor (17) and the second pressure sensor (18) of the differential pressure sensor, and used for acquiring a first fluid pressure signal detected by the first pressure sensor (17) and a second fluid pressure signal detected by the second pressure sensor (18); and The pressure difference calculation device calculates the difference between the first fluid pressure and the second fluid pressure according to the first fluid pressure signal and the second fluid pressure signal collected by the pressure signal collection device.

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