Special gas mixing system and special gas mixing method
By designing a special gas mixing system and using a rotary mixing device to achieve uniform mixing of gases, the problems of difficulty and high risk of special gas mixing in the prior art are solved, and efficient and safe gas production is achieved.
Patent Information
- Application Number
- CN202411652325.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-19
- Publication Date
- 2025-02-25
AI Technical Summary
The existing special gas mixing technology has problems of operational difficulties and high risks, especially in cylinder transfer and bottle rolling operations, where there is a risk of leakage and explosion.
A special gas mixing system is designed, including a special gas mixing device with special gas inlet, balanced gas inlet, special gas pumping port and vacuum pumping port. The uniform mixing device is used to achieve uniform gas mixing, eliminating the subsequent rolling operation of filling the cylinder.
It realizes efficient and uniform mixing of gases, reduces the frequent movement of filling cylinders during gas distribution, reduces the risk of leakage and explosion, saves equipment costs, and improves the production efficiency of special gases.
Smart Images
Figure CN119499956A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of special gas mixing, and in particular to a special gas mixing system and a special gas mixing method. Background Art
[0002] Specialty gases refer to pure gases, high-purity gases, or binary or multi-component mixed gases prepared from high-purity single gases that are used in specific fields and have special requirements for gases. They can usually be divided into electronic gases, standard gases, environmental protection gases, medical gases, welding gases, sterilization gases, etc., and are widely used in electronics, electricity, petrochemicals, mining, steel, non-ferrous metal smelting, thermal engineering, biochemistry, environmental monitoring, medical research and diagnosis, food preservation and other fields.
[0003] The mixing technology of special gases is a key step to ensure the uniformity of gas mixtures, especially in the production of standard gases. The quality of the mixing technology directly affects the uniformity and stability of the gas, and further affects the use effect and safety of the gas.
[0004] At present, for the production of special gases, the component gases are filled first, then the balance gas, and finally the filled cylinders are placed in a bottle rolling machine to rotate it around the axis to achieve the mixing of special gases. Since the special gases must be mixed after being filled into the cylinders, it takes a lot of time to transfer and roll the cylinders during the production of special gases; for high-pressure gas cylinders, there are uncertain risks (such as collision, falling, etc.) during the handling and transfer process, which may cause leakage and explosion.
[0005] In summary, how to effectively solve the problems of difficult and high-risk special gas mixing operations is an issue that technical personnel in this field urgently need to solve. Summary of the invention
[0006] The purpose of the present invention is to provide a special gas mixing system and a special gas mixing method, which can directly achieve uniform mixing of the component gases in the mixed gas during the component gas mixing process, eliminate the subsequent bottle rolling operation of filling cylinders, and reduce the frequent movement of filling cylinders during the gas mixing process.
[0007] In order to solve the above technical problems, the present invention provides the following technical solutions:
[0008] A special gas mixing system comprises a special gas mixing device having a special gas inlet, a balancing gas inlet, a special gas extraction port and a vacuum extraction port, wherein the special gas inlet is connected to each component gas through a plurality of component gas filling pipelines, the balancing gas inlet is connected to the balancing gas through a balancing gas pipeline, and the special gas extraction port is connected to a special gas storage cylinder through a gas extraction pipeline; and also comprises a weighing device arranged on each of the component gas filling pipelines, a vacuum exhaust device connected to the vacuum extraction port, and a rotating mixing device installed in the special gas mixing device.
[0009] Optionally, the special gas mixing device includes a mixing chamber and a mixing chamber separated by a partition, the rotating mixing device is installed in the mixing chamber, the mixing chamber and the mixing chamber are both provided with the balancing gas inlet and the vacuum outlet, the mixing chamber is provided with the special gas inlet, the mixing chamber is provided with the special gas outlet, and the partition is provided with a cavity connecting valve that enables the gas in the mixing chamber to enter the mixing chamber.
[0010] Optionally, there are multiple mixing chambers, each of which is separated by the partition, wherein the initial mixing chamber is the one initially filled with component gas, and the intermediate mixing chamber is sequentially connected between the initial mixing chamber and the mixing chamber, and the balancing gas is filled successively from the initial mixing chamber, the intermediate mixing chamber and the mixing chamber.
[0011] Optionally, the partition is slidably connected to the inner wall of the special gas mixing device to squeeze the gas in the inflation mixing chamber into the mixing chamber or inject it into the lower intermediate mixing chamber close to one side of the mixing chamber.
[0012] Optionally, the weighing device includes an electronic balance, an intermediate gas storage bottle placed on the electronic balance, and an injection piston cylinder connected to the gas outlet of the intermediate gas storage bottle, and the original component gas storage bottle is connected to the intermediate gas storage bottle.
[0013] Optionally, the rotary mixing device includes a rotary precession shaft and a rotary vane connected to the rotary precession shaft, the rotary precession shaft passes through the front and rear end covers of the special gas mixing device and the partition, and the partition is sealed with the inner wall of the special gas mixing device, the front end cover, the rear end cover and the rotary precession shaft through a solid dynamic sealing mechanism.
[0014] The present invention provides a special gas mixing method applied to any of the special gas mixing systems described above, comprising the steps of:
[0015] Perform vacuum operation on the space inside the pipeline and special gas mixing device;
[0016] Filling each component gas into the special gas mixing device;
[0017] Filling the balance gas into the special gas mixing device;
[0018] Controlling the rotating mixing device to mix the gas in the special gas mixing device;
[0019] Pump out the mixed gas.
[0020] Optionally, the method for filling each component gas into the special gas mixing device comprises:
[0021] The component gases in the original component gas storage cylinders are transferred into the intermediate gas storage cylinders, and the actual filling amount of the component gases is measured by an electronic balance;
[0022] The component gas in the intermediate gas storage bottle enters the injection piston cylinder, and the injection amount of the component gas in the injection piston cylinder is determined by the reading of the electronic balance;
[0023] Pressing the component gases in the injection piston cylinder into the mixing chamber of the special gas mixing device through the piston;
[0024] Evacuate the component gas filling pipelines.
[0025] Optionally, charging the balance gas into the special gas mixing device comprises:
[0026] The initial mixing chamber or the lower intermediate mixing chamber connected to the initial mixing chamber is initially filled with balancing gas.
[0027] The balance gas is secondary diluted and prepared in the intermediate mixing chamber or / and the mixing chamber.
[0028] Optionally, the balancing gas pipeline includes a first balancing gas pipeline and a second balancing gas pipeline arranged in parallel, the first balancing gas pipeline is connected to a balancing gas pipeline bypass valve, the second balancing gas pipeline is connected to a mass flow controller, and the balancing gas is charged into the special gas mixing device, comprising:
[0029] Opening the cavity connecting valves between the initial mixing chamber and the lower intermediate mixing chamber in sequence, and driving the partition to move so that the gas in the initial mixing chamber is injected into the lower intermediate mixing chamber;
[0030] The balance gas is first charged through the first balance gas pipeline one by one. After the balance gas is first charged, the total pressure of the mixed gas is 70-80% of the target mixed gas pressure;
[0031] Open the cavity connecting valve between the final intermediate mixing cavity and the mixing cavity, and drive the partition to move so that the gas in the final intermediate mixing cavity can be injected into the mixing cavity;
[0032] The balance gas is diluted and prepared twice through the second balance gas pipeline, and the mixed gas pressure reaches the target pressure.
[0033] The beneficial effect of the present invention is that the component gases are charged into the rotary chamber through the corresponding component gas filling pipelines, and the balance gas is charged into the rotary chamber through the balance gas pipeline, and each component gas and the balance gas are mixed in the rotary chamber. A weighing device is arranged on each component gas filling pipeline, and the component gas filling amount is controlled by the weighing device, and the control accuracy is high. The rotary mixing device is installed in the special gas mixing device, and the balance gas is filled after the component gas 1 to the component gas n are metered and mixed, and the special gas is efficiently produced by the rotary mixing device. The special gas extraction port is connected to the special gas storage cylinder through the extraction pipeline, and the mixed gas is extracted through the special gas extraction port.
[0034] The special gas mixing system and special gas mixing method provided by the present invention have a special gas rotating mixing device, which can directly achieve uniform mixing of the component gases in the mixed gas during the component gas mixing process, eliminating the subsequent bottle rolling operation of filling cylinders, saving gas distribution time, reducing the frequent movement of filling cylinders during the gas distribution process, reducing the risk of leakage and explosion of filling cylinders, saving equipment costs, and at the same time improving the production efficiency of special gases. BRIEF DESCRIPTION OF THE DRAWINGS
[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0036] FIG1 is a schematic structural diagram of a special gas mixing system provided in a specific embodiment of the present invention;
[0037] FIG2 is a schematic diagram of the structure of the special gas mixing device in FIG1 ;
[0038] Fig. 2a is an enlarged view of I in Fig. 2;
[0039] FIG2b is a schematic diagram of the M direction in FIG2;
[0040] FIG3 is a flow chart of a special gas mixing method provided in a specific embodiment of the present invention;
[0041] FIG4 is a schematic diagram of the filling component gas 1;
[0042] FIG5 is a schematic diagram of the filling component gas 2;
[0043] 6a-6e are schematic diagrams of the operation of filling the balance gas during the percentage-level special gas mixing process;
[0044] 7a-7d are schematic diagrams of the operation of filling the balance gas during the ppm level special gas mixing process.
[0045] Reference numerals:
[0046] 1-Balancing gas stop valve, 2-Balancing gas purifier, 3-Balancing gas one-way valve, 4-Balancing gas pipeline vacuum stop valve, 5-Balancing gas pipeline bypass valve, 6-Mass flow controller, 7-Balancing gas pipeline diaphragm valve, 8-Component gas 1 vacuum stop valve, 9-First stop valve, 10-Injection piston cylinder air inlet stop valve, 11-Injection piston cylinder vacuum stop valve, 12-Special gas mixing stop valve, 13-Injection piston cylinder, 14-Component gas 1 electronic balance, 15-Component gas 1 intermediate cylinder, 16 - component gas 1 intermediate cylinder inlet and outlet stop valve, 17-component gas 1 one-way valve, 18-component gas 1 filter, 19-component gas 1 needle valve, 20-component gas 1 stop valve, 21-component gas 2 stop valve, 22-component gas n stop valve, 23-component gas 1 cylinder, 24-component gas 2 cylinder, 25-component gas n cylinder, 26-vacuum pump, 27-special gas mixing device, 28-second stop valve, 29-third stop valve, 30-component gas 2 one-way valve, 31-component gas 2 filter, 3 2-component gas 2 needle valve, 33-component gas n one-way valve, 34-component gas n filter, 35-component gas n needle valve, 36-component gas 2 electronic balance, 37-component gas 2 intermediate cylinder, 38-component gas 2 intermediate cylinder inlet and outlet stop valve, 39-component gas n electronic balance, 40-component gas n intermediate cylinder, 41-component gas n intermediate cylinder inlet and outlet stop valve, 42-V1 cavity vacuum stop valve, 43-V2 cavity vacuum stop valve, 44-V3 cavity vacuum stop valve, 45-V4 Cavity vacuum stop valve, 46-second cavity connecting valve, 47-third cavity connecting valve, 48-balanced gas pressure transmitter; 49-special gas outlet valve, 50-V2 cavity emptying valve, 51-V3 cavity emptying valve, 52-V4 cavity emptying valve, 53-end cover, 54-O-type seal, 55-solid dynamic seal, 56-partition, 57-special gas booster, 58-rotary vane, 59-special gas bypass valve, 60-special gas stop valve, 61-screw, 62-rotating precession shaft, 63-first cavity connecting valve. DETAILED DESCRIPTION
[0047] The core of the present invention is to provide a special gas mixing system and a special gas mixing method, which can directly achieve uniform mixing of the component gases in the mixed gas during the component gas mixing process, eliminating the subsequent bottle rolling operation of filling cylinders and reducing the frequent movement of filling cylinders during the gas mixing process.
[0048] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0049] Please refer to Figures 1 to 2b, Figure 1 is a structural schematic diagram of a special gas mixing system provided by a specific embodiment of the present invention; Figure 2 is a structural schematic diagram of the special gas mixing device in Figure 1; Figure 2a is an enlarged view of I in Figure 2; Figure 2b is a schematic diagram of the M direction in Figure 2.
[0050] In a specific embodiment, the special gas mixing system provided by the present invention includes a special gas mixing device having a special gas inlet, a balancing gas inlet, a special gas extraction port M and a vacuum extraction port. The special gas inlet is connected to each component gas through a plurality of component gas filling pipelines, the balancing gas inlet is connected to the balancing gas through a balancing gas pipeline, and the special gas extraction port M is connected to a special gas storage cylinder through a gas extraction pipeline; it also includes a weighing device arranged on each component gas filling pipeline, a vacuum exhaust device connected to the vacuum extraction port, and a rotating mixing device installed in the special gas mixing device.
[0051] In the above structure, the special gas mixing system includes a special gas mixing device, a weighing device, a vacuum exhaust device, and a rotary mixing device.
[0052] The rotary chamber of the special gas mixing device is provided with a special gas inlet, a balance gas inlet, a special gas extraction port M and a vacuum extraction port. Multiple component gas filling pipelines connect the corresponding component gas and the special gas inlet, and the component gas is filled into the rotary chamber through the corresponding component gas filling pipeline. The balance gas pipeline connects the balance gas and the balance gas inlet, and the balance gas is filled into the rotary chamber through the balance gas pipeline, and each component gas and the balance gas are mixed in the rotary chamber. The special gas extraction port M is connected to the special gas storage bottle through the exhaust pipeline, and the mixed gas is extracted through the special gas extraction port M. The vacuum exhaust device is connected to the vacuum extraction port, and the internal space of the pipeline and the special gas mixing device is evacuated through the vacuum exhaust device.
[0053] Exemplarily, as shown in FIG1 , the balancing gas (N2 / Ar / H2etc.) of the present invention comes from a high-pressure gas storage tank, connected to the inlet of the balancing gas stop valve 1, and the outlet of the balancing gas stop valve 1 is connected to the inlet of the balancing gas purifier 2. The outlet of the balancing gas purifier 2 is connected to the inlet of the balancing gas check valve 3, and the outlet of the balancing gas check valve 3 is simultaneously connected to the inlet of the mass flow controller 6, the inlet of the balancing gas pipeline vacuum stop valve 4, and the inlet of the balancing gas pipeline bypass valve 5.
[0054] The outlet of the vacuum stop valve 4 of the balancing gas pipeline is simultaneously connected to the outlet of the vacuum stop valve 42 of the V1 chamber, the outlet of the vacuum stop valve 43 of the V2 chamber, the outlet of the vacuum stop valve 44 of the V3 chamber, the outlet of the vacuum stop valve 45 of the V4 chamber, the outlet of the vacuum stop valve 8 of the component gas 1, the outlet of the vacuum stop valve 11 of the injection piston cylinder, and the vacuum port of the vacuum pump 26. The outlet of the bypass valve 5 of the balancing gas pipeline is simultaneously connected to the outlet of the mass flow controller 6 and the inlet of the diaphragm valve 7 of the balancing gas pipeline. The outlet of the diaphragm valve 7 of the balancing gas pipeline is respectively connected to the balance gas inlet G1 of the V1 chamber, the balance gas inlet G2 of the V3 chamber, and the balance gas inlet G3 of the V4 chamber in the special gas mixing device 27. The inlet of the vacuum stop valve 42 of the V1 chamber is connected to the vacuum port A of the V1 chamber, the inlet of the vacuum stop valve 43 of the V2 chamber is connected to the vacuum port B of the V2 chamber, the inlet of the vacuum stop valve 44 of the V3 chamber is connected to the vacuum port C of the V3 chamber, and the inlet of the vacuum stop valve 45 of the V4 chamber is connected to the vacuum port D of the V4 chamber. The exhaust port of the vacuum pump 26 is connected to the atmosphere. A balancing gas pressure transmitter 48 may be connected to the connecting pipeline between the outlet of the balancing gas one-way valve 3 and the inlet of the balancing gas pipeline vacuum stop valve 4.
[0055] The inlet of the component gas 1 stop valve 20 is connected to the component gas 1 cylinder 23, and the outlet of the component gas 1 stop valve 20 is simultaneously connected to the inlet of the first stop valve 9, the outlet of the second stop valve 28, and the inlet of the component gas 1 check valve 17. The outlet of the first stop valve 9 is simultaneously connected to the inlet of the component gas 1 vacuum stop valve 8, the outlet of the component gas 1 needle valve 19, the outlet of the component gas n intermediate cylinder inlet and outlet stop valve 41, the outlet of the component gas n needle valve 35, the outlet of the component gas 2 intermediate cylinder inlet and outlet stop valve 38, the outlet of the component gas 2 needle valve 32, the outlet of the component gas 1 intermediate cylinder inlet and outlet stop valve 16, and the inlet of the injection piston cylinder air intake stop valve 10. The inlet and outlet of the component gas 1 intermediate cylinder 15 is connected to the inlet of the component gas 1 intermediate cylinder inlet and outlet stop valve 16. The outlet of the component gas 1 check valve 17 is connected to the inlet of the component gas 1 filter 18, and the outlet of the component gas 1 filter 18 is connected to the inlet of the component gas 1 needle valve 19. The outlet of the injection piston cylinder air intake stop valve 10 is connected to the air intake of the injection piston cylinder 13. The inlet of the injection piston cylinder vacuum stop valve 11 is connected to the vacuum port of the injection piston cylinder 13. The gas outlet of the injection piston cylinder 13 is connected to the inlet of the special gas mixing stop valve 12, and the outlet of the special gas mixing stop valve 12 is simultaneously connected to the component gas inlet P1 of the V3 cavity and the component gas inlet P2 of the V4 cavity.
[0056] The inlet of the component gas 2 stop valve 21 is connected to the component gas 2 cylinder 24, and the outlet of the component gas 2 stop valve 21 is simultaneously connected to the inlet of the second stop valve 28, the outlet of the third stop valve 29, and the inlet of the component gas 2 check valve 30. The inlet of the third stop valve 29 is connected to the outlet of the next-level component gas stop valve and the inlet of the next-level component gas check valve.
[0057] The outlet of component gas 2 check valve 30 is connected to the inlet of component gas 2 filter 31, and the outlet of component gas 2 filter 31 is connected to the inlet of component gas 2 needle valve 32. The inlet and outlet of component gas 2 intermediate cylinder 37 are connected to the inlet and outlet stop valve 38 of component gas 2 intermediate cylinder.
[0058] The inlet of the component gas stop valve 22 is connected to the component gas cylinder 25, and the outlet of the component gas stop valve 22 is simultaneously connected to the inlet of the upper-level stop valve and the inlet of the component gas check valve 33. The outlet of the component gas check valve 33 is connected to the inlet of the component gas filter 34, and the outlet of the component gas filter 34 is connected to the inlet of the component gas needle valve 35. The inlet and outlet of the component gas intermediate cylinder 40 are connected to the inlet of the component gas intermediate cylinder inlet and outlet stop valve 41. The component gas enters the component gas intermediate cylinder 40, and the actual filling amount of the component gas is measured by the component gas electronic balance 39.
[0059] The outlet of the special gas outlet valve 49 is simultaneously connected to the inlet of the special gas stop valve 60 and the inlet of the special gas bypass valve 59. The outlet of the special gas stop valve 60 is connected to the inlet of the special gas booster 57, and the outlet of the special gas booster 57 and the outlet of the special gas bypass valve 59 are simultaneously connected to the filling system.
[0060] The weighing device is installed on each component gas filling pipeline, and the component gas filling amount is controlled by the weighing device, with high control accuracy. The rotary mixing device is installed in the special gas mixing device. After the component gas 1 to component gas n are metered and mixed, the balance gas is filled in, and the efficient production of special gas is realized through the rotary mixing device.
[0061] The special gas mixing system provided by the present invention has a special gas rotating mixing device, which can directly achieve uniform mixing of the component gases in the mixed gas during the component gas mixing process, eliminating the subsequent bottle rolling operation of filling cylinders, saving time consumed in gas distribution, reducing the frequent movement of filling cylinders during the gas distribution process, reducing the risk of leakage and explosion of filling cylinders, saving equipment costs, and at the same time improving the production efficiency of special gases.
[0062] On the basis of the above-mentioned specific embodiments, the special gas mixing device includes a mixing chamber and a mixing chamber separated by a partition 56, the rotating mixing device is installed in the mixing chamber, and the mixing chamber and the mixing chamber are both provided with a balancing gas inlet and a vacuum outlet, the mixing chamber is provided with a special gas inlet, the mixing chamber is provided with a special gas outlet M, and the partition 56 is provided with a cavity connecting valve that can allow the gas in the mixing chamber to enter the mixing chamber.
[0063] In a specific embodiment, the structure of the special gas mixing device 27 is shown in Figure 2. The main body of the special gas mixing device 27 is composed of a rotary chamber, an end cover 53, a partition 56, a first cavity connecting valve 63, a second cavity connecting valve 46, and a third cavity connecting valve 47. The rotary chamber includes a mixing chamber and a mixing chamber, and the mixing chamber and the mixing chamber are divided by a partition 56. The component gas and the balance gas enter the mixing chamber for mixing, and the gas enters the mixing chamber after mixing. A rotating mixing device is provided in the mixing chamber to mix the special gas to meet the component ratio requirements. After mixing, the special gas is transported into the filling system through the special gas extraction port M.
[0064] Based on the above embodiment, a rotary chamber is used for gas distribution, which has a compact structure and high space utilization rate. The gas is distributed in the mixing chamber and then enters the mixing chamber for mixing. At the same time, the component gases and the balance gas enter the mixing chamber for gas distribution. The gas distribution and mixing are carried out simultaneously in the two cavities to achieve continuous distribution of special gases, thereby achieving continuous and efficient production of special gases.
[0065] On the basis of the above-mentioned specific embodiments, there are multiple mixing chambers, and each mixing chamber is separated by a partition 56. The initial mixing chamber is the one that is initially filled with component gas, and the intermediate mixing chamber is sequentially connected between the initial mixing chamber and the mixing chamber. The balancing gas is filled in sequence from the initial mixing chamber, the intermediate mixing chamber and the mixing chamber.
[0066] In a specific embodiment, in the structure of the special gas mixing device 27, three partitions 56 divide the rotary chamber into four parts: V1 chamber, V2 chamber, V3 chamber, and V4 chamber, wherein the V1 chamber is provided with three through holes: vacuum port A, special gas extraction port M, and balance gas inlet G1. The special gas extraction port M is connected to the inlet of the special gas outlet valve 49.
[0067] The V1 cavity is provided with a rotating vane 58, and the mixed gas rotates for 10 to 15 minutes through the rotating vane 58 to meet the component ratio requirements and achieve uniform mixing of the special gas. After uniform mixing, the special gas is transported into the filling system through the special gas extraction port M.
[0068] The V2 chamber is provided with a vacuum port B, an atmosphere connection port N, a component gas inlet P0, and a balance gas inlet G2. The atmosphere connection port N is connected to the inlet of the V2 chamber exhaust valve 50, and the outlet of the V2 chamber exhaust valve 50 is connected to the atmosphere.
[0069] The V3 chamber is provided with a vacuum port C, an atmosphere connection port O, a component gas inlet P1, and a balance gas inlet G3. The atmosphere connection port O is connected to the inlet of the V3 chamber exhaust valve 51, and the outlet of the V2 chamber exhaust valve 50 is connected to the atmosphere.
[0070] The V4 chamber is provided with a vacuum port D, an atmosphere connection port P, a component gas inlet P2, and a balance gas inlet G4. The atmosphere connection port P is connected to the inlet of the V4 chamber exhaust valve 52, and the outlet of the V4 chamber exhaust valve 52 is connected to the atmosphere.
[0071] The functions are different. The partition 56 can be moved to introduce the gas into the next cavity. For example, to configure the percentage gas, the three cavities V3, V2, and V1 are used, and the gas introduction order is V3-V2-V1; to configure the ppm level mixed special gas, the four cavities V4, V3, V2, and V1 are used, and the gas introduction order is V4-V3-V2-V1.
[0072] Based on the above embodiment, the balance gas is filled from the initial mixing chamber, the intermediate mixing chamber and the mixing chamber in sequence to gradually dilute the component gas. The multi-chamber is set to separate the multi-step dilution process in space. When configuring low-concentration component gas, the component gas accuracy is higher, and continuous and efficient gas distribution and mixing are achieved.
[0073] Based on the above-mentioned specific embodiments, the partition 56 is slidably connected to the inner wall of the special gas mixing device to squeeze the gas in the inflation mixing chamber into the mixing chamber or inject it into the lower intermediate mixing chamber close to one side of the mixing chamber.
[0074] In a specific embodiment, in a special gas mixing device, the partition 56 is connected to the inner wall by sliding, and the partition 56 slides along the inner wall of the rotary chamber. The relative position of the partition 56 and the rotary chamber changes to adjust the size of the space in the chamber where the gas is located, thereby changing the pressure in the chamber, and by squeezing the gas in the gas-filled mixing chamber, the gas is effectively transported to the mixing chamber or injected into the lower intermediate mixing chamber near one side of the mixing chamber. By driving the gas flow by moving the partition 56, not only can the fine control of the gas flow and pressure be achieved; it can also speed up the movement of the gas, reduce the mixing time, and improve the efficiency of the mixing process.
[0075] Based on the above specific embodiments, the weighing device includes an electronic balance, an intermediate gas storage bottle placed on the electronic balance, and an injection piston cylinder connected to the gas outlet of the intermediate gas storage bottle, and the original component gas storage bottle is connected to the intermediate gas storage bottle.
[0076] In a specific embodiment, in a special gas mixing system, the function of the weighing device is to accurately measure the mass of the gas in the intermediate gas storage bottle to ensure that the proportion and quality of the mixed gas meet the requirements. The weighing device includes an electronic balance, an intermediate gas storage bottle and an injection piston cylinder. The original component gas is stored in the original component gas storage bottle, and the original component gas storage bottle is connected to the intermediate gas storage bottle. The component gas can enter the intermediate gas storage bottle from the original component gas storage bottle. The electronic balance is used to accurately measure the weight change of the intermediate gas storage bottle. The electronic balance has high precision and can detect very small mass changes, thereby ensuring that the proportion of gas mixing is accurate. The intermediate gas storage bottle is placed on the electronic balance for temporary storage of the component gas. The gas outlet of the gas storage bottle is connected to the injection piston cylinder for controlling the flow and mixing of the gas. The injection piston cylinder is connected to the gas outlet of the intermediate gas storage bottle to push the component gas out of the gas storage bottle and enter the mixing chamber or the lower intermediate mixing chamber. The movement of the injection piston cylinder can accurately control the flow and pressure of the gas to ensure the uniformity and stability of the mixed gas.
[0077] Based on the above embodiment, the quantitative measurement of component gas 1 to component gas n adopts a high-precision electronic balance (mg range for percentage-level component gas; μg range for ppm-level component gas), and the mass of the gas is accurately measured by the electronic balance to achieve a very precise mixing ratio of special gases to meet specific industrial application requirements; at the same time, the flow of gas is accurately controlled by the injection piston cylinder to achieve high-precision gas mixing. Through this high-precision weighing and mixing technology, the quality and consistency of special gases can be ensured, thereby improving the quality and performance of special gases.
[0078] Based on the above-mentioned specific embodiments, the rotary mixing device includes a rotary precession shaft 56 and a rotary vane 58 connected to the rotary precession shaft 56. The rotary precession shaft 56 passes through the front and rear end covers 53 and the partition 56 of the special gas mixing device. The partition 56 and the inner wall, front end cover, rear end cover and rotary precession shaft 56 of the special gas mixing device are sealed by a solid dynamic sealing mechanism 55.
[0079] In a specific embodiment, in order to achieve efficient mixing of gases, a rotary mixing device is provided in the special gas mixing device. The rotary mixing device is composed of a rotary precession shaft 62 and a rotary vane 58. The rotary precession shaft 62 transmits the rotary motion to the partition 56 through the solid dynamic sealing mechanism 55. The rotary vane 58 and the partition 56 are threadedly connected by a screw 61, and the partition 56 drives the rotary vane 58 to rotate. The rotary precession shaft generates power through rotation to promote gas mixing. The rotary motion of the rotary vane 58 can generate a variety of complex flow patterns such as convection, shear, and diffusion in the mixing chamber, thereby achieving rapid and uniform mixing of gases and meeting the special gas mixing process that requires precise control of the gas ratio.
[0080] The end cover 53 and the rotary chamber are sealed with an O-ring 54. The rotary precession shaft 62 and the end cover 53, the partition 56 of the V1 chamber, the V2 chamber, the V3 chamber, and the V4 chamber are sealed with a solid dynamic sealing mechanism 55, and the partition 56 and the rotary chamber are sealed with a solid dynamic sealing mechanism 55. The front end cover, the rear end cover and the side wall of the rotary chamber are made of strong materials to withstand the pressure that may be generated during the mixing process. The front end cover, the rear end cover and the side wall of the rotary chamber are sealed with a solid dynamic sealing mechanism 55.
[0081] The solid dynamic sealing mechanism can ensure that the rotating precession shaft 62 and the partition 56 will not leak gas during the rotation process, and ensure that the gas in the rotating chamber will not leak out. The solid dynamic sealing mechanism usually includes a rubber sealing ring, a fluoroplastic sealing ring or other high-performance sealing materials, which can provide a good sealing effect between the rotating shaft and the fixed component, while withstanding certain pressure and temperature changes. In order to ensure the long-term stable operation of the mixing device, the solid dynamic sealing mechanism needs to be regularly inspected and maintained.
[0082] Please refer to Figures 3-7d, Figure 3 is a flow chart of a special gas mixing method provided in a specific embodiment of the present invention; Figures 4-7d are schematic diagrams of gas distribution operations in an embodiment of the present invention. The present application also provides a special gas mixing method applied to any of the above-mentioned special gas mixing systems, which may include the following steps:
[0083] S100, vacuum the space inside the pipeline and the special gas mixing device;
[0084] In actual application, all valves of the special gas mixing system are closed before use, and the space in the pipeline and the special gas mixing device 27 needs to be replaced and vacuumed to ensure that the volume concentration of impurity gas in the pipeline does not exceed 1ppm (μmolmol -1 ).
[0085] Specifically, step 1, open the vacuum pump 26, the balance gas pipeline bypass valve 5, the balance gas pipeline diaphragm valve 7, the component gas 1 needle valve 19, the component gas 2 needle valve 32, the component gas n needle valve 35, the injection piston cylinder intake stop valve 10, the special gas mixing stop valve 12, the first cavity connecting valve 63, the second cavity connecting valve 46, the third cavity connecting valve 47, the balance gas stop valve 1, the component gas 1 stop valve 20, the component gas 2 stop valve 21, the component gas n stop valve 22, the special gas bypass valve 59, the special gas stop valve 60, and use 1.5atm (A) balance gas (N2 / Ar) to purge the system pipeline for 2 to 2.5h;
[0086] Step 2, close the balance gas stop valve 1, component gas 1 stop valve 20, component gas 2 stop valve 21, component gas n stop valve 22, special gas bypass valve 59, special gas stop valve 60; open the balance gas pipeline vacuum stop valve 4, component gas 1 vacuum stop valve 8, first stop valve 9, second stop valve 28, third stop valve 29, V1 chamber vacuum stop valve 42, V2 chamber vacuum stop valve 43, V3 chamber vacuum stop valve 44, V4 chamber vacuum stop valve 45, and vacuumize the system pipeline of the device of the present invention to 0.1pa. Close all valves;
[0087] Step 3: Repeat steps 1 and 2 2 to 3 times to ensure that the volume concentration of impurity gas in the system pipeline does not exceed 1ppm (μmolmol -1 ). Close all valves in the system and keep the vacuum pump 26 open.
[0088] S110, charging each component gas into a special gas mixing device;
[0089] In practical applications, after the pipeline of the special gas mixing system is purified, the special gas mixing process begins. The special gas mixing system can have two sets of gas mixing processes according to the difference in volume concentration of the component gas ratio. The first one is percentage-level special gas mixing; the second one is ppm-level special gas mixing.
[0090] The following is an example of percentage-level special gas mixing.
[0091] The present invention takes ternary gas (two-component gas) as an example, but is not limited to ternary gas, to illustrate the percentage-level special gas mixing process.
[0092] The gas inlets and outlets of the intermediate steel cylinder 15 of the processed qualified component gas 1 and the intermediate steel cylinder 37 of the component gas 2 are respectively connected to the inlet and outlet stop valves 16 of the intermediate steel cylinder of the component gas 1 and the inlet and outlet stop valves 38 of the intermediate steel cylinder of the component gas 2.
[0093] It should be noted that the filling sequence is determined according to the partial pressure of the component gases, and generally the filling sequence of the component gases is from low pressure to high pressure. In the embodiment of the present invention, the partial pressure of component gas 1 is less than the partial pressure of component gas 2.
[0094] Component gas 1 is filled, as shown in Figure 4.
[0095] Step 1: Slowly open the component gas 1 stop valve 20, the component gas 1 needle valve 19, and the component gas 1 intermediate cylinder inlet and outlet stop valve 16, and the component gas 1 enters the component gas 1 intermediate cylinder 15. The actual filling amount of the component gas 1 is measured by the component gas 1 electronic balance 14. The actual filling amount of the component gas 1 intermediate cylinder 15 is generally 1.3 to 1.7 times the target component gas demand. After the component gas 1 intermediate cylinder 15 is filled, the component gas 1 needle valve 19 is closed.
[0096] Step 2: Slowly open the injection piston cylinder air inlet stop valve 10, and the component gas 1 in the component gas 1 intermediate cylinder 15 slowly enters the injection piston cylinder 13. The injection amount of the component gas 1 in the injection piston cylinder 13 is determined by the reading of the component gas 1 electronic balance 14. After the injection of the component gas 1 is completed, close the injection piston cylinder air inlet stop valve 10 and the component gas 1 intermediate cylinder inlet and outlet stop valves 16.
[0097] Step 3: Open the special gas mixing stop valve 12, and the component gas 1 in the injection piston cylinder 13 is pressed into the special gas mixing device 27V3 cavity through the piston. After the injection of the component gas 1 is completed, close the special gas mixing stop valve 12, and the piston of the injection piston cylinder 13 returns to its original position.
[0098] Step 4, open the component gas 1 vacuum stop valve 8 and the injection piston cylinder vacuum stop valve 11, vacuum the component gas 1 filling pipeline to 0.1 Pa, and then close the above valves.
[0099] Similar to the filling of component gas 1, component gas 2 is filled, as shown in Figure 5.
[0100] Step 1: Slowly open the component gas 2 stop valve 21, the component gas 2 needle valve 32, and the component gas 2 intermediate cylinder inlet and outlet stop valve 38, and the component gas 2 enters the component gas 2 intermediate cylinder 37. The actual filling amount of the component gas 2 is measured by the component gas 2 electronic balance 36. The actual filling amount of the component gas 2 intermediate cylinder 37 is generally 1.3 to 1.7 times the target component gas demand. After the component gas 2 intermediate cylinder 37 is filled, the component gas 2 needle valve 32 is closed.
[0101] Step 2: Slowly open the injection piston cylinder air inlet stop valve 10, and the component gas 2 in the component gas 2 intermediate cylinder 37 slowly enters the injection piston cylinder 13. The injection amount of the component gas 2 in the injection piston cylinder 13 is determined by the reading of the component gas 2 electronic balance 36. After the injection of the component gas 2 is completed, close the injection piston cylinder air inlet stop valve 10 and the component gas 2 intermediate cylinder inlet and outlet stop valves 38.
[0102] Step 3: Open the special gas mixing stop valve 12, and the component gas 2 in the injection piston cylinder 13 is pressed into the special gas mixing device 27V3 cavity through the piston. After the injection of the component gas 2 is completed, close the special gas mixing stop valve 12, and the piston of the injection piston cylinder 13 returns to its original position.
[0103] Step 4, open the component gas 1 vacuum stop valve 8 and the injection piston cylinder vacuum stop valve 11, vacuum the component gas 1 filling pipeline to 0.1 Pa, and then close the above valves.
[0104] S120, charging the balance gas into the special gas mixing device;
[0105] In practical application, balance gas is filled, as shown in Figure 6.
[0106] Step 1: After the component gas 1 and the component gas 2 are injected into the V3 chamber, the second chamber connecting valve 46 is opened, and the rightmost partition 56 in FIG5 is driven to move leftward until it fits into the adjacent partition 56 on its left side, and the mixed gas of the component gas 1 and the component gas 2 is injected into the V2 chamber. The second chamber connecting valve 46 is closed, and the partition 56 is reset.
[0107] Step 2: Open the balance gas stop valve 1, the balance gas pipeline diaphragm valve 7, and the balance gas pipeline bypass valve 5, and quickly inject the balance gas into the V2 cavity. Close the balance gas pipeline bypass valve 5 and the balance gas pipeline diaphragm valve 7.
[0108] Here, it is emphasized that the balance gas is injected into the V2 chamber and the V1 chamber twice. When injected into the V2 chamber, it passes through the balance gas pipeline bypass valve 5; when injected into the V1 chamber, it passes through the mass flow controller 6. Furthermore, after the balance gas is injected into the V2 chamber, the total pressure of the mixed gas is 70-80% of the target mixed gas pressure; after the balance gas is injected into the V1 chamber, the mixed gas pressure reaches the target pressure.
[0109] Step 3: Open the first cavity connecting valve 63, drive the partition 56 to move leftward until it fits with the adjacent partition 56 on its left side, and inject the mixed gas in the V2 cavity into the V1 cavity. Close the first cavity connecting valve 63, and reset the partition 56.
[0110] Step 4: Turn on the mass flow controller 6 and inject the balance gas into the V1 cavity at a certain controllable flow rate. The mass flow controller 6 can effectively control the injection amount of the balance gas, thereby ensuring that the volume concentration deviation of the special gas component gas is small.
[0111] S130, controlling the rotating mixing device to mix the gas in the special gas mixing device;
[0112] In practical applications, the rotary precession shaft 62 transmits the rotary motion to the partition 56 through the solid dynamic sealing mechanism 55. The partition 56 drives the rotary vane 58 to rotate to mix the special gas in the V1 chamber.
[0113] S140, extracting the mixed gas.
[0114] In actual application, the special gas outlet valve 49 is opened, and after being evenly mixed, the special gas has two flow paths: the first is to open the special gas stop valve 60, and the special gas is pressurized by the special gas booster 57 and then goes to the filling system; the second is to open the special gas bypass valve 59, and after being evenly mixed, the special gas goes directly to the filling system.
[0115] By applying the technical solution provided in the embodiment of the present invention, the uniform mixing of the various component gases in the mixed gas can be directly achieved during the component gas mixing process, eliminating the subsequent rolling operation of filling the cylinder, saving equipment costs and improving the production efficiency of special gases. In addition, the balance gas is measured using a mass flow controller, and the quantitative measurement of component gas 1 to component gas n uses a high-precision electronic balance (mg range for percentage-level component gas; μg range for ppm-level component gas); after the component gas 1 to component gas n are measured and mixed, the balance gas is added, and the efficient production of special gas is achieved through a rotating mixing device.
[0116] On the basis of the above-mentioned specific embodiments, each component gas is charged into the special gas mixing device. The method for charging each component gas includes:
[0117] The component gases in the original component gas storage cylinders are transferred into the intermediate gas storage cylinders, and the actual filling amount of the component gases is measured by an electronic balance;
[0118] The component gas in the intermediate gas storage bottle enters the injection piston cylinder, and the injection amount of the component gas in the injection piston cylinder is determined by the reading of the electronic balance;
[0119] The component gases in the injection piston cylinder are pressed into the mixing chamber of the special gas mixing device through the piston;
[0120] Evacuate the component gas filling pipelines.
[0121] For the convenience of description, the above steps are combined for explanation below, and are explained using a ppm-level special gas mixing example.
[0122] In practical applications, ternary gas (two-component gas) is taken as an example to illustrate ppm-level special gas mixing. Before gas distribution, all system valves are closed. The ppm-level special gas mixing of the present invention adopts a three-dilution configuration method (not limited to), and the component gas is at the percentage level after one dilution, 1000ppm level after two dilutions, and ppm level after three dilutions. In the embodiment, the two-component gas has a volume concentration of ppm, and the volume concentrations of the two components are close.
[0123] A single dilution preparation includes:
[0124] First, component gas 1 is filled, which is the same as the percentage-level special gas mixing embodiment, as shown in Figure 4.
[0125] Step 1: Slowly open the component gas 1 stop valve 20, the component gas 1 needle valve 19, and the component gas 1 intermediate cylinder inlet and outlet stop valve 16, and the component gas 1 enters the component gas 1 intermediate cylinder 15. The actual filling amount of the component gas 1 is measured by the component gas 1 electronic balance 14. The actual filling amount of the component gas 1 intermediate cylinder 15 is generally 1.3 to 1.7 times the target component gas demand. After the component gas 1 intermediate cylinder 15 is filled, the component gas 1 needle valve 19 is closed.
[0126] Step 2: Slowly open the injection piston cylinder air inlet stop valve 10, and the component gas 1 in the component gas 1 intermediate cylinder 15 slowly enters the injection piston cylinder 13. The injection amount of the component gas 1 in the injection piston cylinder 13 is determined by the reading of the component gas 1 electronic balance 14. After the injection of the component gas 1 is completed, close the injection piston cylinder air inlet stop valve 10 and the component gas 1 intermediate cylinder inlet and outlet stop valves 16.
[0127] Step 3: Open the special gas mixing stop valve 12, and the component gas 1 in the injection piston cylinder 13 is pressed into the special gas mixing device 27V4 cavity through the piston. After the injection of the component gas 1 is completed, close the special gas mixing stop valve 12, and the piston of the injection piston cylinder 13 returns to its original position.
[0128] Step 4, open the component gas 1 vacuum stop valve 8 and the injection piston cylinder vacuum stop valve 11, vacuum the component gas 1 filling pipeline to 0.1 Pa, and then close the above valves.
[0129] Second, similar to the filling of component gas 1, component gas 2 is filled, as shown in FIG. 5 .
[0130] Step 1: Slowly open the component gas 2 stop valve 21, the component gas 2 needle valve 32, and the component gas 2 intermediate cylinder inlet and outlet stop valve 38, and the component gas 2 enters the component gas 2 intermediate cylinder 37. The actual filling amount of the component gas 2 is measured by the component gas 2 electronic balance 36. The actual filling amount of the component gas 2 intermediate cylinder 37 is generally 1.3 to 1.7 times the target component gas demand. After the component gas 2 intermediate cylinder 37 is filled, the component gas 2 needle valve 32 is closed.
[0131] Step 2: Slowly open the injection piston cylinder air inlet stop valve 10, and the component gas 2 in the component gas 2 intermediate cylinder 37 slowly enters the injection piston cylinder 13. The injection amount of the component gas 2 in the injection piston cylinder 13 is determined by the reading of the component gas 2 electronic balance 36. After the injection of the component gas 2 is completed, close the injection piston cylinder air inlet stop valve 10 and the component gas 2 intermediate cylinder inlet and outlet stop valves 38.
[0132] Step 3: Open the special gas mixing stop valve 12, and the component gas 2 in the injection piston cylinder 13 is pressed into the special gas mixing device 27V4 cavity through the piston. After the injection of component gas 2 is completed, close the special gas mixing stop valve 12, and the piston of the injection piston cylinder 13 returns to its original position.
[0133] Step 4, open the component gas 1 vacuum stop valve 8 and the injection piston cylinder vacuum stop valve 11, vacuum the component gas 1 filling pipeline to 0.1 Pa, and then close the above valves.
[0134] Based on the above embodiment, the quantitative measurement of component gas 1 to component gas n adopts a high-precision electronic balance (mg range for percentage-level component gas; μg range for ppm-level component gas), and the mass of the gas is accurately measured by the electronic balance to achieve a very precise mixing ratio of special gases to meet specific industrial application requirements; at the same time, the flow of gas is accurately controlled by the injection piston cylinder to achieve high-precision gas mixing. Through this high-precision weighing and mixing technology, the quality and consistency of special gases can be ensured, thereby improving the quality and performance of products.
[0135] On the basis of the above-mentioned specific embodiments, the balance gas is charged into the special gas mixing device, including:
[0136] The initial filling of the balancing gas is carried out in the initial mixing chamber or the lower intermediate mixing chamber connected to the initial mixing chamber.
[0137] The balance gas is secondary diluted and prepared in the intermediate mixing chamber or / and the mixing chamber.
[0138] In practical applications, the balance gas is filled in sequence from the initial mixing chamber, the intermediate mixing chamber and the mixing chamber to gradually dilute the component gas. When configuring low-concentration component gas, the component gas accuracy is higher, achieving continuous and efficient gas distribution and mixing.
[0139] On the basis of the above-mentioned specific embodiments, the balancing gas pipeline includes a first balancing gas pipeline and a second balancing gas pipeline arranged in parallel, a balancing gas pipeline bypass valve is connected to the first balancing gas pipeline, and a mass flow controller is connected to the second balancing gas pipeline, and the balancing gas is charged into the special gas mixing device, including:
[0140] The cavity connecting valves between the initial mixing chamber and the lower intermediate mixing chamber are opened in sequence, and the partition 56 is driven to move so that the gas in the initial mixing chamber is injected into the lower intermediate mixing chamber;
[0141] The balance gas is first charged through the first balance gas pipeline one by one. After the balance gas is first charged, the total pressure of the mixed gas is 70-80% of the target mixed gas pressure;
[0142] Open the cavity connecting valve between the final intermediate mixing cavity and the mixing cavity, and drive the partition 56 to move so that the gas in the final intermediate mixing cavity can be injected into the mixing cavity;
[0143] The balance gas is diluted and prepared twice through the second balance gas pipeline, and the mixed gas pressure reaches the target pressure.
[0144] For the convenience of description, the above steps are combined for explanation below, and are explained using a ppm-level special gas mixing example.
[0145] The balance gas filling process includes:
[0146] Open the balancing gas stop valve 1, the balancing gas pipeline diaphragm valve 7, and the balancing gas pipeline bypass valve 5, and quickly inject the balancing gas into the V4 chamber. When the pressure in the V4 chamber reaches the specified value, close the balancing gas pipeline bypass valve 5 and the balancing gas pipeline diaphragm valve 7.
[0147] The secondary dilution preparation process is shown in Figure 7:
[0148] Step 1: Open the third cavity connecting valve 47, drive the partition 56 in FIG. 7a to move rightward until it fits with the end cover 53, and inject the mixed gas in the V4 cavity into the V3 cavity. Close the third cavity connecting valve 47, and reset the partition 56.
[0149] Step 2, open the balancing gas pipeline diaphragm valve 7 and the mass flow controller 6, and quickly inject the balancing gas into the V3 chamber. When the pressure in the V3 chamber reaches the specified value, close the balancing gas pipeline bypass valve 5 and the balancing gas pipeline diaphragm valve 7.
[0150] Three dilution preparation process:
[0151] Step 1: Open the second cavity connecting valve 46, drive the partition 56 in FIG. 7b to move leftward until it fits with the left partition 56, and inject the mixed gas in the V3 cavity into the V2 cavity. Close the second cavity connecting valve 46, and reset the partition 56.
[0152] Step 2, open the balancing gas pipeline diaphragm valve 7 and the mass flow controller 6, and quickly inject the balancing gas into the V2 chamber. When the pressure in the V2 chamber reaches the specified value, close the balancing gas pipeline bypass valve 5 and the balancing gas pipeline diaphragm valve 7.
[0153] Step 3: Open the first cavity connecting valve 63, drive the partition 56 in FIG. 7c to move leftward until it fits with the left partition 56, and inject the mixed gas in the V2 cavity into the V1 cavity. Close the first cavity connecting valve 63, and reset the partition 56. The balance gas filling is completed.
[0154] After the balance gas is filled, the rotating precession shaft 62 transmits the rotational motion to the partition 56 through the solid dynamic sealing mechanism 55, as shown in Figure 7d. The partition 56 drives the rotary vane 58 to rotate to mix the product special gas in the V1 cavity.
[0155] Open the product special gas outlet valve 49, and after uniform mixing, the product special gas has two flow paths: the first flow path, open the product special gas stop valve 60, and the product special gas is pressurized by the product special gas booster 57 and then goes to the filling system; the second flow path, open the product special gas bypass valve 59, and after uniform mixing, the product special gas goes directly to the filling system.
[0156] Based on the above embodiment, the balance gas is filled from the initial mixing chamber, the intermediate mixing chamber and the mixing chamber in sequence to gradually dilute the component gas. The multi-chamber is set to separate the multi-step dilution process in space. When configuring low-concentration component gas, the component gas accuracy is higher, and continuous and efficient gas distribution and mixing are achieved.
[0157] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.
[0158] The above is a detailed introduction to the special gas mixing system and the special gas mixing method provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A special gas mixing system, characterized in that: It includes a special gas mixing device with a special gas inlet, a balancing gas inlet, a special gas extraction port and a vacuum extraction port. The special gas inlet is connected with each component gas through a plurality of component gas filling pipelines, the balancing gas inlet is connected with the balancing gas through a balancing gas pipeline, and the special gas extraction port is connected with a special gas storage cylinder through a gas extraction pipeline; it also includes a weighing device arranged on each of the component gas filling pipelines, a vacuum exhaust device connected to the vacuum extraction port, and a rotating mixing device installed in the special gas mixing device.
2. The special gas mixing system according to claim 1, characterized in that: The special gas mixing device includes a mixing chamber and a mixing chamber separated by a partition. The rotating mixing device is installed in the mixing chamber. The mixing chamber and the mixing chamber are both provided with the balancing gas inlet and the vacuum outlet. The mixing chamber is provided with the special gas inlet, the mixing chamber is provided with the special gas outlet, and the partition is provided with a cavity connecting valve that enables the gas in the mixing chamber to enter the mixing chamber.
3. The special gas mixing system according to claim 2, characterized in that: There are multiple mixing chambers, and each mixing chamber is separated by the partition. The initial mixing chamber is the one that is initially filled with component gas, and the intermediate mixing chamber is sequentially connected to the initial mixing chamber and the mixing chamber. The balancing gas is filled in sequence from the initial mixing chamber, the intermediate mixing chamber and the mixing chamber.
4. The special gas mixing system according to claim 3, characterized in that: The partition is slidably connected to the inner wall of the special gas mixing device to squeeze the gas in the inflation mixing chamber into the mixing chamber or inject it into the lower intermediate mixing chamber close to one side of the mixing chamber.
5. The special gas mixing system according to claim 1, characterized in that: The weighing device comprises an electronic balance, an intermediate gas storage bottle placed on the electronic balance, and an injection piston cylinder connected to the gas outlet of the intermediate gas storage bottle, and the original component gas storage bottle is connected to the intermediate gas storage bottle.
6. The special gas mixing system according to claim 2, characterized in that: The rotary mixing device includes a rotary precession shaft and a rotary vane connected to the rotary precession shaft. The rotary precession shaft passes through the front and rear end covers of the special gas mixing device and the partition. The partition is sealed with the inner wall of the special gas mixing device, the front end cover, the rear end cover and the rotary precession shaft through a solid dynamic sealing mechanism.
7. A special gas mixing method applied to the special gas mixing system according to any one of claims 1 to 6, characterized in that: Includes steps: Perform vacuum operation on the space inside the pipeline and special gas mixing device; Filling each component gas into the special gas mixing device; Filling the balance gas into the special gas mixing device; Controlling the rotating mixing device to mix the gas in the special gas mixing device; Pump out the mixed gas.
8. The special gas mixing method according to claim 7, characterized in that: The method for filling each component gas into the special gas mixing device comprises: The component gases in the original component gas storage cylinders are transferred into the intermediate gas storage cylinders, and the actual filling amount of the component gases is measured by an electronic balance; The component gas in the intermediate gas storage bottle enters the injection piston cylinder, and the injection amount of the component gas in the injection piston cylinder is determined by the reading of the electronic balance; Pressing the component gases in the injection piston cylinder into the mixing chamber of the special gas mixing device through the piston; The component gas filling pipelines are vacuumed.
9. The method for mixing special gases according to claim 7, characterized in that: The step of charging the balance gas into the special gas mixing device comprises: The initial mixing chamber or the lower intermediate mixing chamber connected to the initial mixing chamber is initially filled with balancing gas. The balance gas is secondary diluted and prepared in the intermediate mixing chamber or / and the mixing chamber.
10. The special gas mixing method according to claim 9, characterized in that: The balancing gas pipeline comprises a first balancing gas pipeline and a second balancing gas pipeline arranged in parallel, the first balancing gas pipeline is connected with a balancing gas pipeline bypass valve, the second balancing gas pipeline is connected with a mass flow controller, and the balancing gas is charged into the special gas mixing device, comprising: Opening the cavity connecting valves between the initial mixing chamber and the lower intermediate mixing chamber in sequence, and driving the partition to move so that the gas in the initial mixing chamber is injected into the lower intermediate mixing chamber; The balance gas is first charged through the first balance gas pipeline one by one. After the balance gas is first charged, the total pressure of the mixed gas is 70-80% of the target mixed gas pressure; Open the cavity connecting valve between the final intermediate mixing cavity and the mixing cavity, and drive the partition to move so that the gas in the final intermediate mixing cavity can be injected into the mixing cavity; The balance gas is diluted and prepared twice through the second balance gas pipeline, and the mixed gas pressure reaches the target pressure.