Covering cavity of MPCVD equipment for diamond cultivation

Abstract

The invention discloses a covering cavity of MPCVD equipment for diamond cultivation. The covering cavity comprises an upper cover, a container, annular glass, a growth table, a first cooling structure, a second cooling structure, a third cooling structure, a first sealing structure and a second sealing structure. The upper cover covers the top end of the container, a reaction chamber is formed between the upper cover and the container, the first sealing structure is arranged at the joint of the top end of the upper cover and the bottom end of the container, and the first sealing structure is used for sealing the joint of the upper cover and the container. Through the first cooling structure, the second cooling structure and the third cooling structure, the upper cover, the container and the growth table can be cooled, the situation that normal operation of the device is affected due to the fact that the temperature of the device is too high is avoided, and meanwhile the first sealing structure and the second sealing structure can be cooled; therefore, the first sealing structure and the second sealing structure are prevented from aging easily due to too high temperature to affect the sealing performance of the device.

Description

Technical Field

[0001] The invention relates to the technical field of MPCVD equipment, in particular to a covering cavity of an MPCVD equipment for diamond cultivation. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is a method for growing artificial diamonds. This method places a seed crystal in a vacuum chamber and introduces a carbon-containing mixed gas containing nitrogen, methane and hydrogen. Methane is the source of carbon atoms for synthetic diamonds, while nitrogen acts as a catalyst to increase the growth rate of diamonds. Hydrogen can inhibit the formation of graphite. Under the action of microwave plasma, the carbon-containing gas is dissociated and carbon atoms are deposited on the diamond substrate to form a diamond film.

[0003] For example, the patent with patent number CN116695099B includes a base plate, a cover plate lifting drive device, an upper sealing cover, a lower sealing plate, a first water cooling component and a growth table lifting drive device; the upper sealing cover is connected to the cover plate lifting drive device; the upper sealing cover and the lower sealing plate form a reaction chamber; the lower sealing plate is provided with a diamond growth table, and the diamond growth table is provided with a lifting groove and a positioning ring; the positioning ring is sleeved in the lifting groove; the growth table lifting drive device is connected to the positioning ring, and the first water cooling component is used to cool the positioning ring.

[0004] Although the above device can cool the positioning ring during diamond growth, it cannot cool the upper sealing cover and the lower sealing plate, and the cooling effect of the device is poor. Summary of the invention

[0005] In view of the above-mentioned defects, the purpose of the present invention is to propose a cover chamber for an MPCVD device for diamond cultivation, so as to solve the problem that the existing MPCVD device cannot cool the upper sealing cover and the lower sealing plate and the cooling effect of the device is poor.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A cover chamber of an MPCVD device for diamond cultivation, comprising an upper cover, a container, an annular glass, a growth platform, a first cooling structure, a second cooling structure, a third cooling structure, a first sealing structure and a second sealing structure;

[0008] The upper cover is covered on the top of the container, a reaction chamber is formed between the upper cover and the container, and the first sealing structure is provided at the connection between the top of the upper cover and the bottom of the container, and the first sealing structure is used to seal the connection between the upper cover and the container;

[0009] The first cooling structure is disposed on the upper cover, and the first cooling structure is used to cool the upper cover and the first sealing structure;

[0010] The annular glass is arranged on the inner bottom wall of the container, the growth platform is arranged on the top of the annular glass, the second sealing structure is arranged at the connection between the bottom end of the annular glass and the inner bottom wall of the container, and the second sealing structure is arranged at the connection between the top end of the annular glass and the bottom end of the growth platform, and the second sealing structure is used to seal the connection between the annular glass, the container and the growth platform;

[0011] The second cooling structure is arranged on the container, and the second cooling structure is used to cool the container, the first sealing structure and the second sealing structure located at the bottom end of the annular glass;

[0012] The third cooling structure is arranged on the growth platform, and is used to cool the growth platform and the second sealing structure located at the top of the annular glass.

[0013] Preferably, the first cooling structure comprises a first water cooling cavity and a second water cooling cavity arranged inside the upper cover;

[0014] The outer surface of the upper cover is provided with a first water inlet, a first water outlet, a second water inlet and a second water outlet, the first water inlet and the first water outlet are connected to the first water cooling chamber, and the second water inlet and the second water outlet are connected to the second water cooling chamber;

[0015] The first water inlet is located below the first water outlet, and the second water inlet and the second water outlet are located at the top of the upper cover.

[0016] Preferably, an air inlet cavity is provided inside the upper cover, and the air inlet cavity is located between the first water-cooling cavity and the second water-cooling cavity;

[0017] An air inlet is provided at the top of the upper cover, and the air inlet is communicated with the air inlet cavity. A plurality of air outlets are provided on the inner bottom wall of the air inlet cavity, and the plurality of air outlets are all arranged through the inner top wall of the upper cover.

[0018] Preferably, the first sealing structure comprises a first annular sealing groove and a second annular sealing groove arranged at the top end of the container, and first sealing rings are installed in both the first annular sealing groove and the second annular sealing groove;

[0019] An annular vacuum groove is provided at the top of the container, the annular vacuum groove is located between the first annular sealing groove and the second annular sealing groove, an air vent is provided on the inner bottom wall of the annular vacuum groove, and the air vent is connected to the first annular sealing groove and the second annular sealing groove;

[0020] A first air pumping hole is provided above the annular vacuum groove. The first air pumping hole is arranged at the bottom end of the upper cover. The first air pumping hole is connected to an external first air pumping device.

[0021] Preferably, an annular microwave shielding groove is provided at the top of the container, a microwave shielding ring is provided in the annular microwave shielding groove, the first annular sealing groove is located on the inner side of the second annular sealing groove, and the annular microwave shielding groove is located on the inner side of the first annular sealing groove;

[0022] The top of the container is provided with an air storage hole connected with the first annular sealing groove, the air storage hole is located between the first annular sealing groove and the annular microwave shielding groove, and the air storage hole is connected with the reaction chamber.

[0023] Preferably, the second sealing structure includes two third annular sealing grooves, one of which is arranged on the inner bottom wall of the container, and the other is arranged on the bottom end of the growth platform, the upper and lower ends of the annular glass are respectively embedded in the corresponding third annular sealing grooves, and a second sealing ring is provided between the annular glass and the third annular sealing groove.

[0024] Preferably, the second cooling structure comprises a third water cooling chamber and a fourth water cooling chamber arranged inside the container;

[0025] The third water-cooling chamber is located directly below the first annular sealing groove and the second annular sealing groove, and the fourth water-cooling chamber is located directly below the third annular sealing groove of the container;

[0026] The outer surface of the container is provided with a third water inlet, a third water outlet, a fourth water inlet and a fourth water outlet, the third water inlet and the third water outlet are connected to the third water cooling chamber, and the fourth water inlet and the fourth water outlet are connected to the fourth water cooling chamber.

[0027] Preferably, a molybdenum ring is detachably mounted on the top of the growth platform, and the third cooling structure comprises a fifth water-cooling cavity and a sixth water-cooling cavity arranged on the growth platform, and the fifth water-cooling cavity and the sixth water-cooling cavity are connected through a plurality of through holes;

[0028] A circulation pipeline is provided at the bottom end of the growth table, a microwave injection hole connected to the reaction chamber is provided at the bottom end of the container, the microwave injection hole is located in the inner circle of the annular glass, the circulation pipeline passes through the microwave injection hole and extends to the outside of the container, the water inlet end of the circulation pipeline is connected to the fifth water-cooling cavity, and the water outlet end of the circulation pipeline is connected to the sixth water-cooling cavity.

[0029] Preferably, the circulation pipeline includes a first water pipe, a second water pipe is provided on the outside of the first water pipe, a third water pipe is provided on the outside of the second water pipe, the first water pipe, the second water pipe and the third water pipe are fixedly connected to the bottom end of the growth platform, a water outlet channel connected to the sixth water cooling chamber is formed between the first water pipe and the second water pipe, and a water inlet channel connected to the fifth water cooling chamber is formed between the second water pipe and the third water pipe.

[0030] Preferably, a groove is provided on the inner bottom wall of the container, the top of the groove is detachably covered with a sealing plate, the top of the sealing plate is provided with a plurality of second air pumping holes connected with the groove, the plurality of second air pumping holes are arranged around the outside of the annular glass, and the groove is connected with an external second air pumping device.

[0031] The technical solution provided by the present invention may include the following beneficial effects:

[0032] By setting up the first cooling structure, the second cooling structure and the third cooling structure, the upper cover, the container and the growth table can be cooled to prevent the normal operation of the device from being affected by excessively high temperature. At the same time, the first sealing structure and the second sealing structure can also be cooled to prevent the first sealing structure and the second sealing structure from being easily aged due to excessively high temperature and affecting the sealing of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0034] Figure 2 It is a schematic diagram of the internal structure of the upper cover of the present invention being covered on the container;

[0035] Figure 3 The present invention Figure 2 A magnified view of area A in;

[0036] Figure 4 The present invention Figure 2 A magnified view of area B in FIG.

[0037] Figure 5 It is a bottom view of the internal structure of the first water-cooling chamber and the second water-cooling chamber of the upper cover of the present invention;

[0038] Figure 6 It is a schematic structural diagram of the top of the container of the present invention;

[0039] Figure 7 The present invention Figure 6 A magnified view of region C in FIG.

[0040] Figure 8 It is a structural schematic diagram of the bottom of the container of the present invention;

[0041] Fig. 9 is a schematic diagram of the internal structure of the third water-cooling chamber of the present invention;

[0042] Fig.10 is a top view of the internal structure of the sixth water-cooling chamber of the present invention;

[0043] Fig.11 It is a schematic diagram of the internal structure of the observation window base of the present invention.

[0044] Among them: 1. Upper cover; 11. First water inlet; 12. First water outlet; 13. Second water inlet; 14. Second water outlet; 15. Air inlet cavity; 151. Air outlet; 152. Air inlet; 16. First air extraction hole; 161. First air extraction device; 17. Observation window; 171. Mounting groove; 1711. Annular protrusion; 172. Observation channel; 173. Baffle; 174. Observation hole; 175. Extension; 176. Observation glass; 18. First mounting hole; 19. Positioning hole; 2. Container; 21. First annular sealing groove; 211. First sealing ring; 212. Air storage hole; 22. Second annular sealing groove; 23. Third annular sealing groove; 231. Second sealing ring; 24. Annular vacuum groove; 241. Ventilation hole; 25, annular microwave shielding groove; 251, microwave shielding ring; 26, groove; 27, sealing plate; 271, second exhaust hole; 272, second exhaust device; 28, microwave injection hole; 29, positioning column; 3, annular glass; 4, growth table; 41, fifth water-cooling cavity; 42, sixth water-cooling cavity; 43, through hole; 44, molybdenum ring; 5, first water-cooling cavity; 6, second water-cooling cavity; 61, fin plate group; 7, third water-cooling cavity; 71, third water inlet; 72, third water outlet; 8, fourth water-cooling cavity; 81, fourth water inlet; 82, fourth water outlet; 9, circulation pipeline; 91, first water pipe; 92, second water pipe; 93, third water pipe; 94, water outlet channel; 95, water inlet channel; 10, lifting mechanism. DETAILED DESCRIPTION

[0045] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0046] In the description of the present invention, it is necessary to understand that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance.

[0047] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] Below is the attached figure Figures 1 to 11 The technical solution of the present invention is further illustrated by specific implementation methods.

[0049] like Figure 1-11 As shown, a cover chamber of an MPCVD device for diamond cultivation includes an upper cover 1, a container 2, an annular glass 3, a growth platform 4, a first cooling structure, a second cooling structure, a third cooling structure, a first sealing structure and a second sealing structure;

[0050] The upper cover 1 covers the top of the container 2, a reaction chamber is formed between the upper cover 1 and the container 2, and the first sealing structure is provided at the connection between the top of the upper cover 1 and the bottom of the container 2, and the first sealing structure is used to seal the connection between the upper cover 1 and the container 2;

[0051] The first cooling structure is disposed on the upper cover 1, and the first cooling structure is used to cool the upper cover 1 and the first sealing structure;

[0052] The annular glass 3 is arranged on the inner bottom wall of the container 2, and the growth platform 4 is arranged on the top of the annular glass 3. The second sealing structure is provided at the connection between the bottom end of the annular glass 3 and the inner bottom wall of the container 2, and the second sealing structure is provided at the connection between the top end of the annular glass 3 and the bottom end of the growth platform 4. The second sealing structure is used to seal the connection between the annular glass 3, the container 2 and the growth platform 4.

[0053] The second cooling structure is disposed on the container 2, and is used to cool the container 2, the first sealing structure and the second sealing structure located at the bottom end of the annular glass 3;

[0054] The third cooling structure is disposed on the growth platform 4 , and is used to cool the growth platform 4 and the second sealing structure located at the top of the annular glass 3 .

[0055] By setting up the first cooling structure, the second cooling structure and the third cooling structure, the upper cover 1, the container 2 and the growth table 4 can be cooled down to prevent the normal operation of the device from being affected by excessive temperature. At the same time, the first sealing structure and the second sealing structure can also be cooled down to prevent the first sealing structure and the second sealing structure from being easily aged due to excessive temperature and affecting the sealing of the device.

[0056] Furthermore, it also includes a lifting mechanism 10, the upper cover 1 is installed at the lifting end of the lifting mechanism 10, and the lifting mechanism 10 is used to drive the upper cover 1 to rise and fall, so as to drive the upper cover 1 to cover the container 2 and drive the upper cover 1 away from the container 2 to facilitate the user's use.

[0057] Preferably, the top edge of the upper cover 1 is provided with a plurality of first mounting holes 18, the top edge of the container 2 is provided with second mounting holes corresponding to the plurality of first mounting holes 18, the top edge of the container 2 is symmetrically provided with a plurality of positioning posts 29, the top edge of the upper cover 1 is provided with positioning holes 19 corresponding to the plurality of positioning posts 29, when the upper cover 1 is covered on the top of the container 2, the first mounting holes 18 and the second mounting holes are fixedly connected by fasteners, the positioning posts 29 are inserted into the positioning holes 19, and the upper cover 1 and the container 2 can be conveniently sealed and docked by the cooperation of the positioning posts 29 and the positioning holes 19; optionally, the fasteners are bolts, which can facilitate the disassembly and assembly between the container 2 and the upper cover 1.

[0058] like Figure 2 As shown, the first cooling structure includes a first water cooling chamber 5 and a second water cooling chamber 6 arranged inside the upper cover 1;

[0059] The outer surface of the upper cover 1 is provided with a first water inlet 11, a first water outlet 12, a second water inlet 13 and a second water outlet 14, the first water inlet 11 and the first water outlet 12 are connected to the first water cooling chamber 5, and the second water inlet 13 and the second water outlet 14 are connected to the second water cooling chamber 6;

[0060] The first water inlet 11 is located below the first water outlet 12 , and the second water inlet 13 and the second water outlet 14 are located at the top of the upper cover 1 .

[0061] Specifically, the first water inlet 11 is located below the first water outlet 12, and the second water inlet 13 and the second water outlet 14 are located at the top of the upper cover 1, so that after the coolant fills the first water cooling chamber 5 and the second water cooling chamber 6, it flows out from the first water outlet 12 and the second water outlet 14 respectively, so that the coolant is fully in contact with the upper cover 1 to take away the heat of the upper cover 1, thereby making the cooling and heat dissipation effect of the upper cover 1 better.

[0062] Furthermore, the side wall of the upper cover 1 is provided with a plurality of observation windows 17, and part of the window bodies of some of the observation windows 17 are located in the first water-cooling chamber 5. The arranged observation windows 17 can facilitate the user to observe the growth of diamonds inside the reaction chamber, and the heat of the observation windows 17 can be taken away by the coolant of the first water-cooling chamber 5 to cool the observation windows 17.

[0063] Furthermore, Fig.11 As shown, the top of the observation window base 17 is located outside the upper cover 1, and an observation glass 176 is detachably installed on the top of the observation window base 17. The bottom of the observation window base 17 is located inside the upper cover 1. A mounting groove 171 is provided on the top of the observation window base 17, and an observation channel 172 is provided at the bottom end of the inner wall of the mounting groove 171. The observation channel 172 runs through the bottom end of the observation window base 17, and a baffle 173 is installed on the inner side wall of the observation channel 172. The baffle 173 is used to cover the observation channel 172, and an observation hole 174 is provided on the baffle 173. The edge of the observation hole 174 extends downward to form an extension portion 175, and a gap is left between the extension portion 175 and the observation channel 172.

[0064] A sealing gasket is installed in the mounting groove 171, and the sealing gasket is tightly connected to the observation glass 176 and the mounting groove 171 respectively. The sealing gasket is made of copper, and the observation window base 17 is made of stainless steel. An annular protrusion 1711 is convexly provided on the inner bottom wall of the mounting groove 171, and the sealing gasket is tightly connected to the annular protrusion 1711.

[0065] Specifically, during diamond manufacturing, microwaves in the reaction chamber enter the observation channel 172, part of the microwaves enter the gap between the extension portion 175 and the observation channel 172, and part of the microwaves enter the extension portion 175. When the microwaves in the gap encounter the baffle 173, they will be blocked by the baffle 173 and reflected back. The reflected microwaves pass through the gap and enter the observation channel 172. The phase of the reflected microwaves is opposite to the phase of the microwaves entering the observation channel 172 from the reaction chamber. Therefore, the reflected microwaves will offset part of the microwaves entering the observation channel 172 from the reaction chamber, thereby reducing the amount of microwaves entering the extension portion 175 through the observation channel 172. The amount of microwaves entering the extension portion 175 will gradually attenuate in the extension portion 175 when passing through the extension portion 175, so that the amount of microwaves entering the observation glass 176 is very small, thereby reducing the temperature of the observation glass 176 and increasing the service life of the observation window 17.

[0066] It is worth noting that the connection between the observation glass 176 and the observation window base 17 can be sealed by the provided sealing gasket, thereby preventing outside air from entering the observation window through the gap between the connection between the glass 176 and the observation window base 17.

[0067] It is also worth mentioning that when installing the sealing gasket, the sealing gasket is installed in the mounting groove 171 by squeezing the sealing gasket. At the same time, since the hardness of copper is less than that of stainless steel, the contact position between the sealing gasket and the annular protrusion 1711 will be deformed and shrink inward, so that the sealing gasket and the annular protrusion 1711 fit tightly together, thereby improving the sealing between the sealing gasket and the mounting groove 171 and preventing outside air from entering the observation window through the gap between the sealing gasket and the mounting groove 171.

[0068] like Figure 2 and 5 As shown, an air inlet cavity 15 is provided inside the upper cover 1, and the air inlet cavity 15 is located between the first water cooling cavity 5 and the second water cooling cavity 6;

[0069] An air inlet 152 is provided at the top of the upper cover 1 , and the air inlet 152 is communicated with the air inlet cavity 15 . A plurality of air outlet holes 151 are provided on the inner bottom wall of the air inlet cavity 15 , and the plurality of air outlet holes 151 are all provided through the inner top wall of the upper cover 1 .

[0070] Specifically, when manufacturing diamonds, the reaction gas needs to be filled into the gas inlet chamber 15 through the gas inlet 152 , and the reaction gas enters the reaction chamber through a plurality of gas outlet holes 151 .

[0071] It is worth noting that a plurality of gas outlet holes 151 are arranged in a circular array on the inner bottom wall of the gas inlet cavity 15 , so that the reaction gas can enter the reaction chamber from the gas inlet cavity 4 evenly.

[0072] like Figure 3 and 7 As shown, the first sealing structure includes a first annular sealing groove 21 and a second annular sealing groove 22 arranged at the top of the container 2, and a first sealing ring 211 is installed in each of the first annular sealing groove 21 and the second annular sealing groove 22;

[0073] An annular vacuum groove 24 is provided at the top of the container 2, and the annular vacuum groove 24 is located between the first annular sealing groove 21 and the second annular sealing groove 22. An air vent 241 is provided on the inner bottom wall of the annular vacuum groove 24, and the air vent 241 is connected to the first annular sealing groove 21 and the second annular sealing groove 22.

[0074] A first air extraction hole 16 is provided above the annular vacuum groove 24 . The first air extraction hole 16 is disposed at the bottom end of the upper cover 1 . The first air extraction hole 16 is communicated with an external first air extraction device 161 .

[0075] Specifically, when evacuating, the gas on the outer side of the sealing ring 211 in the first annular sealing groove 21 and the gas on the inner side of the sealing ring 211 in the second annular sealing groove 22 enter the annular vacuum groove 24 through the vent hole 241, and the gas in the annular vacuum groove 24 is extracted by the first exhaust device 161 through the first exhaust hole 16, so that the connection between the container 2 and the upper cover 1 is more tightly fitted together, and under the action of the sealing ring 211, external air is prevented from entering the reaction chamber through the connection between the container 2 and the upper cover 1.

[0076] like Figure 3 and 7 As shown, an annular microwave shielding groove 25 is provided at the top of the container 2, a microwave shielding ring 251 is provided in the annular microwave shielding groove 25, the first annular sealing groove 21 is located on the inner side of the second annular sealing groove 22, and the annular microwave shielding groove 25 is located on the inner side of the first annular sealing groove 21;

[0077] The top of the container 2 is provided with an air storage hole 212 connected to the first annular sealing groove 21 . The air storage hole 212 is located between the first annular sealing groove 21 and the annular microwave shielding groove 25 . The air storage hole 212 is connected to the reaction chamber.

[0078] Specifically, the microwave shielding ring 251 can be provided to prevent microwave leakage in the reaction chamber from affecting the external environment and the deposition of diamonds.

[0079] It is worth noting that when the first air extraction device 161 is evacuated, the upper and lower ends of the sealing ring 211 are respectively tightly attached to the upper cover 1 and the container 2 to achieve sealing because the sealing ring 211 is deformed so as to realize sealing. Therefore, the air inside the sealing ring 211 of the first annular sealing groove 21 cannot be evacuated through the gap between the sealing ring 211 and the upper cover 1 and the container 2. This part of the air will gradually flow into the reaction chamber along the gap between the container 2 and the upper cover 1, affecting the vacuum environment in the reaction chamber, thereby affecting the deposition of diamonds. Therefore, the air storage hole 211 is connected to the reaction chamber through the arranged air storage hole 211. When the reaction chamber is evacuated, the air inside the sealing ring 211 of the first annular sealing groove 21 can flow into the reaction chamber through the air storage hole 2112 and be evacuated, thereby avoiding the air remaining inside the sealing ring 211 of the first annular sealing groove 21.

[0080] like Figure 2 and 4 As shown, the second sealing structure includes two third annular sealing grooves 23, one of which is arranged on the inner bottom wall of the container 2, and the other is arranged on the bottom end of the growth platform 4, the upper and lower ends of the annular glass 3 are respectively embedded in the corresponding third annular sealing grooves 23, and a second sealing ring 231 is provided between the annular glass 3 and the third annular sealing groove 23.

[0081] Specifically, by embedding the annular glass 3 and the third annular sealing groove 23, the annular glass can be easily installed between the growth table 4 and the inner bottom wall of the container 2, and sealed by the second sealing ring 231. The annular glass 3 and the second sealing ring 231 are used to ensure the vacuum environment of the reaction chamber and the normal transmission of microwaves.

[0082] like Figure 2 , 8 As shown in FIG. 9 , the second cooling structure includes a third water cooling chamber 7 and a fourth water cooling chamber 8 disposed inside the container 2;

[0083] The third water-cooling chamber 7 is located directly below the first annular sealing groove 21 and the second annular sealing groove 22, and the fourth water-cooling chamber 8 is located directly below the third annular sealing groove 23 of the container 2;

[0084] The outer surface of the container 2 is provided with a third water inlet 71, a third water outlet 72, a fourth water inlet 81 and a fourth water outlet 82, the third water inlet 71 and the third water outlet 72 are connected to the third water cooling chamber 7, and the fourth water inlet 81 and the fourth water outlet 82 are connected to the fourth water cooling chamber 8.

[0085] Specifically, the coolant enters the third water-cooling chamber 7 through the third water inlet 71, and flows out from the third water outlet 72 to take away the heat of the container 2, so as to cool down the first sealing ring 211 in the first annular sealing groove 21 and the second annular sealing groove 22 at the top of the container 2, so as to prevent the first sealing ring 211 from being in a high-temperature environment and being easily aged; the coolant enters the fourth water-cooling chamber 8 through the fourth water inlet 81 and then flows out through the fourth water outlet 82, so as to take away the heat of the container 2, so as to cool down the second sealing ring 231 in the third annular sealing groove 23 of the container 2, so as to prevent the second sealing ring 231 from being in a high-temperature environment and being easily aged, thereby improving the sealing stability of the device.

[0086] It is worth noting that the third water inlet 71, the fourth water inlet 81 and the fourth water outlet 82 are all located at the bottom end of the container 2, the third water outlet 72 is located at the top end of the side wall of the container 2, and the third water inlet 71 is located above the third water outlet 72, so that the coolant can fill the third water cooling chamber 7 and then flow out from the third water outlet 72, so that the coolant can fully contact the third water cooling chamber 7 to achieve a good cooling effect.

[0087] like Figure 2 , 4 , 8, 9 and 10, a molybdenum ring 44 is detachably mounted on the top of the growth table 4, and the third cooling structure includes a fifth water-cooling cavity 41 and a sixth water-cooling cavity 42 arranged on the growth table 4, and the fifth water-cooling cavity 41 and the sixth water-cooling cavity 42 are connected through a plurality of through holes 43;

[0088] A circulation pipeline 9 is provided at the bottom end of the growth table 4, and a microwave injection hole 28 connected to the reaction chamber is provided at the bottom end of the container 2. The microwave injection hole 28 is located in the inner circle of the annular glass 3. The circulation pipeline 9 passes through the microwave injection hole 28 and extends to the outside of the container 2. The water inlet end of the circulation pipeline 9 is connected to the fifth water-cooling chamber 41, and the water outlet end of the circulation pipeline 9 is connected to the sixth water-cooling chamber 42.

[0089] Specifically, the coolant enters the fifth water-cooling chamber 41 through the water inlet end of the circulation pipeline 9 and then enters the sixth cold water chamber 42 through a plurality of through holes 43. The coolant in the sixth cold water chamber 42 flows out through the water outlet end of the circulation pipeline 4, and can take away the heat of the growth table 4 to reduce the temperature of the third annular sealing groove 23 and the molybdenum ring 41 of the growth table 4, thereby cooling the third sealing ring 231 at the third annular sealing groove 23 of the growth table 4, so as to reduce the temperature of the third sealing ring 231 at the upper and lower ends of the annular glass 3, so as to avoid the third sealing ring 231 from being too hot and aging easily, thereby affecting the sealing effect of the device.

[0090] Furthermore, microwaves can be injected into the annular glass 3 through the microwave injection hole 28, and then the microwaves can pass through the annular glass 3 and enter the reaction chamber without causing air to flow into the reaction chamber.

[0091] Furthermore, the sixth water-cooling chamber 42 and the second water-cooling chamber 6 are both provided with a plurality of fin plate groups 61, and gaps are left between adjacent fin plate groups 61; the plurality of fin plate groups 61 of the second water-cooling chamber 6 are arranged on the inner bottom wall of the second water-cooling chamber 6; the fifth water-cooling chamber 41 is located below the sixth water-cooling chamber 42, the plurality of fin plate groups 61 in the sixth water-cooling chamber 42 are arranged on the inner top wall of the sixth water-cooling chamber 42, and the plurality of through holes 43 surround the outside of the plurality of fin plate groups 61 arranged in the sixth water-cooling chamber 42; each group of the fin plate groups 61 includes a plurality of arc plates, and the plurality of arc plates of the plurality of groups of the fin plate groups 61 are coaxially arranged, and gaps are left between adjacent arc plates.

[0092] It is understandable that by setting up several fin plate groups 61, the coolant inside the sixth water-cooling chamber 42 and the second water-cooling chamber 6 can contact the fin plate group 61, thereby increasing the contact area between the coolant and the sixth water-cooling chamber 42 and the second water-cooling chamber 6 to achieve a better cooling effect.

[0093] It is worth noting that, since diamond grows on the top of the growth table 4, the temperature at the molybdenum ring 41 is higher, and the top of the growth table 4 is in contact with the molybdenum ring 41, and therefore a plurality of fin plate groups 61 in the sixth water-cooling chamber 42 are arranged on the inner top wall of the sixth water-cooling chamber 42, which can better transfer the heat of the molybdenum ring 41 to the fin plate group 61, thereby achieving a good cooling effect through the contact between the coolant and the fin plate group 61.

[0094] like Figure 4 As shown, the circulation pipeline 9 includes a first water pipe 91, the outer sleeve of the first water pipe 91 is provided with a second water pipe 92, the outer sleeve of the second water pipe 92 is provided with a third water pipe 93, the first water pipe 91, the second water pipe 92 and the third water pipe 93 are fixedly connected to the bottom end of the growth table 4, and a water outlet channel 94 connected to the sixth water cooling chamber 42 is formed between the first water pipe 91 and the second water pipe 92, and a water inlet channel 95 connected to the fifth water cooling chamber 41 is formed between the second water pipe 92 and the third water pipe 93.

[0095] Specifically, the coolant enters the fifth water-cooling chamber 41 through the water inlet channel between the second water pipe 92 and the third water pipe 93, the coolant in the fifth water-cooling chamber 41 enters the sixth water-cooling chamber 42 through the plurality of through holes 93, and the coolant in the sixth water-cooling chamber 42 passes through the gaps between the plurality of fin plate groups 61 and then flows out through the water outlet channel 94 between the first water pipe 91 and the second water pipe 92, so that the coolant flows in the fifth water-cooling chamber 41 and the sixth water-cooling chamber 42 to take away the heat of the growth table 4.

[0096] like Figure 2 As shown, a groove 26 is provided on the inner bottom wall of the container 2, and a sealing plate 27 is detachably covered on the top of the groove 26. A plurality of second air pumping holes 271 connected to the groove 26 are provided on the top of the sealing plate 27. The plurality of second air pumping holes 271 are arranged around the outside of the annular glass 3, and the groove 26 is connected to an external second air pumping device 272.

[0097] Specifically, the air in the reaction chamber enters the groove 26 through the plurality of second air extraction holes 271 and is then extracted by the second air extraction device 272 , so that a vacuum environment is formed in the reaction chamber.

[0098] Furthermore, the sealing plate 27 is detachably covered on the top of the groove 26 by bolts, so that the sealing plate 27 can be easily removed to clean the groove 26, thereby preventing impurities generated during the diamond growth process from entering the groove 26 through the second exhaust hole 271 and affecting the vacuum pumping of the device.

[0099] The technical principle of the present invention is described above in conjunction with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations herein, those skilled in the art can associate other specific implementations of the present invention without paying creative labor, and these methods will fall within the scope of protection of the present invention.

Claims

1. A cover chamber for an MPCVD device for diamond cultivation, characterized in that: It comprises an upper cover (1), a container (2), an annular glass (3), a growth platform (4), a first cooling structure, a second cooling structure, a third cooling structure, a first sealing structure and a second sealing structure; The upper cover (1) covers the top end of the container (2), a reaction chamber is formed between the upper cover (1) and the container (2), and the first sealing structure is provided at the connection between the top end of the upper cover (1) and the bottom end of the container (2), and the first sealing structure is used to seal the connection between the upper cover (1) and the container (2); The first cooling structure is arranged on the upper cover (1), and the first cooling structure is used to cool the upper cover (1) and the first sealing structure; The annular glass (3) is arranged on the inner bottom wall of the container (2), the growth platform (4) is arranged on the top of the annular glass (3), the second sealing structure is provided at the connection between the bottom end of the annular glass (3) and the inner bottom wall of the container (2), and the second sealing structure is provided at the connection between the top end of the annular glass (3) and the bottom end of the growth platform (4), and the second sealing structure is used to seal the connection between the annular glass (3), the container (2) and the growth platform (4); The second cooling structure is arranged on the container (2), and is used to cool the container (2), the first sealing structure and a second sealing structure located at the bottom end of the annular glass (3); The third cooling structure is arranged on the growth platform (4), and is used to cool the growth platform (4) and the second sealing structure located at the top of the annular glass (3).

2. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 1, characterized in that: The first cooling structure comprises a first water cooling chamber (5) and a second water cooling chamber (6) arranged inside the upper cover (1); The outer surface of the upper cover (1) is provided with a first water inlet (11), a first water outlet (12), a second water inlet (13) and a second water outlet (14); the first water inlet (11) and the first water outlet (12) are connected to the first water cooling chamber (5); the second water inlet (13) and the second water outlet (14) are connected to the second water cooling chamber (6); The first water inlet (11) is located below the first water outlet (12), and the second water inlet (13) and the second water outlet (14) are located at the top of the upper cover (1).

3. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 2, characterized in that: An air intake cavity (15) is provided inside the upper cover (1), and the air intake cavity (15) is located between the first water cooling cavity (5) and the second water cooling cavity (6); The top of the upper cover (1) is provided with an air inlet (152), the air inlet (152) is communicated with the air inlet cavity (15), the inner bottom wall of the air inlet cavity (15) is provided with a plurality of air outlet holes (151), and the plurality of air outlet holes (151) are all arranged through the inner top wall of the upper cover (1).

4. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 1, characterized in that: The first sealing structure comprises a first annular sealing groove (21) and a second annular sealing groove (22) arranged at the top end of the container (2), and a first sealing ring (211) is installed in each of the first annular sealing groove (21) and the second annular sealing groove (22); An annular vacuum groove (24) is provided at the top of the container (2), the annular vacuum groove (24) is located between the first annular sealing groove (21) and the second annular sealing groove (22), an air vent (241) is provided on the inner bottom wall of the annular vacuum groove (24), and the air vent (241) is connected to the first annular sealing groove (21) and the second annular sealing groove (22); A first air extraction hole (16) is provided above the annular vacuum groove (24); the first air extraction hole (16) is arranged at the bottom end of the upper cover (1); and the first air extraction hole (16) is connected to an external first air extraction device (161).

5. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 4, characterized in that: The top of the container (2) is provided with an annular microwave shielding groove (25), a microwave shielding ring (251) is provided inside the annular microwave shielding groove (25), the first annular sealing groove (21) is located on the inner side of the second annular sealing groove (22), and the annular microwave shielding groove (25) is located on the inner side of the first annular sealing groove (21); The top of the container (2) is provided with an air storage hole (212) which is connected to the first annular sealing groove (21); the air storage hole (212) is located between the first annular sealing groove (21) and the annular microwave shielding groove (25); and the air storage hole (212) is connected to the reaction chamber.

6. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 4, characterized in that: The second sealing structure comprises two third annular sealing grooves (23), wherein one of the third annular sealing grooves (23) is arranged on the inner bottom wall of the container (2), and the other third annular sealing groove (23) is arranged on the bottom end of the growth platform (4); the upper and lower ends of the annular glass (3) are respectively embedded in the corresponding third annular sealing grooves (23); and a second sealing ring (231) is arranged between the annular glass (3) and the third annular sealing groove (23).

7. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 6, characterized in that: The second cooling structure comprises a third water cooling chamber (7) and a fourth water cooling chamber (8) arranged inside the container (2); The third water-cooling chamber (7) is located directly below the first annular sealing groove (21) and the second annular sealing groove (22), and the fourth water-cooling chamber (8) is located directly below the third annular sealing groove (23) of the container (2); The outer surface of the container (2) is provided with a third water inlet (71), a third water outlet (72), a fourth water inlet (81) and a fourth water outlet (82); the third water inlet (71) and the third water outlet (72) are in communication with the third water cooling chamber (7); and the fourth water inlet (81) and the fourth water outlet (82) are in communication with the fourth water cooling chamber (8).

8. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 1, characterized in that: A molybdenum ring (44) is detachably mounted on the top of the growth platform (4); the third cooling structure comprises a fifth water cooling cavity (41) and a sixth water cooling cavity (42) arranged on the growth platform (4); the fifth water cooling cavity (41) and the sixth water cooling cavity (42) are connected via a plurality of through holes (43); A circulation pipeline (9) is provided at the bottom end of the growth platform (4); a microwave injection hole (28) connected to the reaction chamber is provided at the bottom end of the container (2); the microwave injection hole (28) is located in the inner circle of the annular glass (3); the circulation pipeline (9) passes through the microwave injection hole (28) and extends to the outside of the container (2); the water inlet end of the circulation pipeline (9) is connected to the fifth water cooling chamber (41); and the water outlet end of the circulation pipeline (9) is connected to the sixth water cooling chamber (42).

9. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 8, characterized in that: The circulation pipeline (9) comprises a first water pipe (91), a second water pipe (92) is sheathed on the outside of the first water pipe (91), a third water pipe (93) is sheathed on the outside of the second water pipe (92), the first water pipe (91), the second water pipe (92) and the third water pipe (93) are fixedly connected to the bottom end of the growth platform (4), a water outlet channel (94) communicating with the sixth water cooling chamber (42) is formed between the first water pipe (91) and the second water pipe (92), and a water inlet channel (95) communicating with the fifth water cooling chamber (41) is formed between the second water pipe (92) and the third water pipe (93).

10. The cover chamber of the MPCVD equipment for diamond cultivation according to claim 1, characterized in that: The inner bottom wall of the container (2) is provided with a groove (26), the top end of the groove (26) is detachably covered with a sealing plate (27), the top end of the sealing plate (27) is provided with a plurality of second air extraction holes (271) connected to the groove (26), the plurality of second air extraction holes (271) are arranged around the outside of the annular glass (3), and the groove (26) is connected to an external second air extraction device (272).

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