Exhaust pressure pulsation adjusting device for vacuum unit and vacuum unit with exhaust pressure pulsation adjusting device

Abstract

The invention relates to the technical field of vacuum units, in particular to an exhaust pressure pulsation adjusting device for a vacuum unit and the vacuum unit comprising the exhaust pressure pulsation adjusting device. The adjusting mechanism comprises a cylindrical structural part and an adjusting buffering body. And a second airflow channel is formed among the air inlet end of the cylindrical structural part, the inner cavity and the communicating hole. The adjusting buffer main body is arranged in an inner cavity of the cylindrical structural part and divides the cylindrical structural part into a buffer area and a pneumatic buffer area. In the exhaust process, the buffering body is adjusted in a self-adaptive mode according to the pressure difference condition between the buffering area and the pneumatic buffering area to conduct separation of the airflow channels, and impact and acting force on a pipeline are small. When the exhaust pressure is too large, the adjusting and buffering body can conduct damping and buffering, and the purpose of adjusting exhaust pressure pulsation can be achieved. The exhaust pressure pulsation adjusting device has the advantages of being small in space size, good in sealing performance, simple in structure and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum units, and in particular to an exhaust pressure pulsation regulating device for a vacuum unit and a vacuum unit thereof. Background Art

[0002] As a device for creating a vacuum state, vacuum units are widely used in various industrial fields. The vacuum unit is composed of multiple vacuum equipment, and adjacent vacuum equipment is connected by pipes. At present, each vacuum equipment includes a vacuum pump, a valve, a pipeline and a control system, and the vacuum pump has an intake pipe connected to the container (or the exhaust pipe of the adjacent vacuum pump) and an exhaust pipe that can exhaust gas toward the adjacent vacuum pump (or the outside world), thereby reducing the air pressure in the container and creating the required vacuum environment. In the working process of suction, compression and exhaust, as the intake pressure decreases and the flow rate is unstable, periodic fluctuations occur, and then exhaust pressure pulsation occurs. Since the vacuum unit is in a closed space, that is, the vacuum unit integrates multiple vacuum equipment in a closed space, the air flow pulsation of the vacuum unit during operation will not only reduce the volumetric efficiency of the unit and increase the power consumption of the unit, but also when the gas pressure changes rapidly in the closed space, it will produce periodic forces on the wall, pipeline and other components of the vacuum unit, induce vibration noise, and seriously affect the fatigue life of the pipelines between adjacent vacuum equipment. Summary of the invention

[0003] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides an exhaust pressure pulsation regulating device for a vacuum unit, which solves the technical problem that the vibration noise induced by the exhaust pressure pulsation of the vacuum unit will seriously affect the fatigue life of the pipelines between adjacent vacuum equipment.

[0004] In order to achieve the above object, the main technical solutions adopted by the present invention include:

[0005] In a first aspect, an embodiment of the present invention provides an exhaust pressure pulsation regulating device for a vacuum unit, comprising an outer shell having two ends respectively connected to an exhaust port and a pipeline of a vacuum main engine, and a regulating mechanism disposed in the outer shell and fixedly connected to the outer shell;

[0006] The adjustment mechanism comprises a cylindrical structure member and an adjustment buffer body which is coaxially arranged with the outer shell and closed at both ends;

[0007] A first air flow channel connected to the pipeline is formed between the outer wall of the cylindrical structure and the inner wall of the outer shell;

[0008] An air inlet end connected to the inner cavity of the cylindrical structure is provided at one end of the cylindrical structure, a connecting hole connected to the inner cavity of the cylindrical structure is provided on the circumferential side wall of the cylindrical structure, and a second air flow channel is formed between the air inlet end, the inner cavity of the cylindrical structure and the connecting hole;

[0009] The regulating buffer body is arranged in the inner cavity of the cylindrical structure, and the communicating hole is located between the regulating buffer body and the air inlet end, and the regulating buffer body divides the cylindrical structure into two parts: a buffer zone and a pneumatic buffer zone;

[0010] During the exhaust process, the regulating buffer body can move toward / away from one side of the communicating hole along the axial movement of the cylindrical structure to open / close the communicating hole, and can selectively determine whether the second airflow channel is connected to the first airflow channel according to the pressure difference between the buffer zone and the pneumatic buffer zone;

[0011] When the connecting hole is opened and the second air flow channel is connected to the first air flow channel, the regulating buffer body can also perform shock absorption and buffering according to the exhaust pressure of the exhaust port.

[0012] Optionally, the regulating mechanism also includes an annular cylindrical wall that can extend axially along the air inlet end toward one side of the regulating buffer body and an extension sleeve with a blocking end face that is sleeved on the outside of the annular cylindrical wall, a serpentine extension channel is formed between the annular cylindrical wall, the extension sleeve and the inner wall of the tubular structural member, a buffer zone is formed between the blocking end face of the extension sleeve and the regulating buffer body, and the serpentine extension channel, the buffer zone and the connecting hole form the second airflow channel.

[0013] Optionally, the radial opening width of the air inlet end is greater than the radial opening width of the first air flow channel.

[0014] Optionally, the ratio of the radial opening width of the air inlet end to the radial opening width of the first air flow channel is 5-6:1.

[0015] Optionally, the adjustment buffer body includes a spring and a piston cylinder;

[0016] An adjustment hole communicating with the outside is formed on the outer wall of one end of the cylindrical structure close to the pipeline, and the adjustment hole passes through the cylindrical structure and the outer shell and communicates with the outside;

[0017] The piston cylinder is arranged at one end of the cylindrical structure close to the pipeline, and a spatially adjustable buffer zone is formed between the end surface of the piston cylinder and the end surface of the extension sleeve, and a pneumatic buffer zone is formed between the piston cylinder and the inner wall of one end surface of the cylindrical structure close to the pipeline, and the pneumatic buffer zone is communicated with the adjustment hole;

[0018] The spring is arranged in the pneumatic buffer zone, and one end of the spring abuts against the inner wall of one end surface of the pipe, and the other end abuts against the piston cylinder. When the exhaust pressure changes, the pressure difference between the pneumatic buffer zone and the buffer zone changes, and the connecting hole is opened / closed by compression and release of the spring.

[0019] Optionally, the piston cylinder comprises an abutting end surface, a first cylinder wall and a second cylinder wall respectively extending on both sides of the abutting end surface;

[0020] The first tube wall is used to close the communicating hole, and the second tube wall and the abutting end surface form an abutting space for accommodating the spring.

[0021] Optionally, the regulating mechanism further comprises a gas regulator which is capable of regulating the buffering force of the pneumatic buffer zone according to the exhaust pressure of the exhaust port and is in communication with the pneumatic buffer zone;

[0022] When the exhaust pressure of the exhaust port is higher than the external atmospheric pressure, the gas regulator inflates the gas toward the pneumatic buffer zone through the regulating hole to increase the pressure of the pneumatic buffer zone;

[0023] When the exhaust pressure of the exhaust port is below the external atmospheric pressure, the gas regulator draws a vacuum through the regulating hole to reduce the pressure of the pneumatic buffer zone.

[0024] Optionally, the outer shell and the cylindrical structure are connected via fixed ribs.

[0025] Optionally, the air inlet end and the air outlet end of the outer shell are both kf vacuum joints, and the outer shell is detachably connected to the exhaust port of the vacuum main engine and the air inlet of the pipeline through the kf vacuum joint.

[0026] On the other hand, a vacuum unit includes multiple vacuum equipment, an exhaust pressure pulsation regulating device for the vacuum unit and a pipeline. The exhaust pressure pulsation regulating device for the vacuum unit is arranged at the exhaust port of the vacuum equipment, and adjacent vacuum equipment are connected in sequence through the exhaust pressure pulsation regulating device and the pipeline.

[0027] The beneficial effects of the present invention are as follows: the exhaust pressure pulsation regulating device for a vacuum unit of the present invention is installed between the exhaust port and the pipeline of the vacuum equipment, that is, the gas in the vacuum equipment passes through the first airflow channel formed between the outer sleeve and the cylindrical structure of the regulating mechanism and the second airflow channel formed by the cylindrical structure itself. During the exhaust process, the second airflow channel can be selectively judged whether it is connected to the first airflow channel according to the pressure difference between the buffer zone and the pneumatic buffer zone, that is, the regulating buffer body is adaptively used to separate the airflow channel, and the airflow channel can be selectively used, and the impact and force on the pipeline are small. Further, when the exhaust pressure is too large, the connecting hole is opened, and when the second airflow channel is connected to the first airflow channel, the regulating buffer body can also perform shock absorption and buffering, that is, by establishing a buffer chamber, the purpose of regulating the exhaust pressure pulsation can be achieved, and the problem of vibration and noise induced by the exhaust pressure pulsation of the vacuum unit is solved. In addition, the exhaust pressure pulsation regulating device has the characteristics of small space volume, good sealing, simple structure, etc., not only has strong operability in manufacturing and installation, but also has vibration reduction and noise reduction effect, thereby ensuring the service life of the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a cross-sectional three-dimensional structural schematic diagram of the exhaust pressure pulsation regulating device for a vacuum unit of the present invention;

[0029] Figure 2 for Figure 1 Schematic diagram of the plane structure in (the state where the communicating hole is opened);

[0030] Figure 3 for Figure 1 Schematic diagram of the plane structure in (the state where the connecting hole is closed);

[0031] Figure 4 It is a pressure stable static vector cloud diagram of the exhaust pressure pulsation regulating device for a vacuum unit of the present invention (the exhaust pressure is greater than the pneumatic buffer zone pressure);

[0032] Figure 5 for Figure 4 A schematic diagram of the buffer zone enlargement;

[0033] Figure 6 It is a pressure stable static vector cloud diagram (the exhaust pressure is less than the set pneumatic buffer pressure);

[0034] Figure 7 To simulate the pneumatic buffer state one;

[0035] Figure 8 To simulate the pneumatic buffer state 2;

[0036] Fig. 9To simulate the aerodynamic buffer state three.

[0037] Description of Reference Numerals

[0038] 1: Outer shell;

[0039] 2: adjustment mechanism; 21: cylindrical structural member; 211: air inlet end; 212: connecting hole; 213: adjustment hole; 22: adjustment buffer body; 221: spring; 222: piston cylinder; 2221: abutment end surface; 2222: first cylinder wall; 2223: second cylinder wall; 23: first air flow channel; 24: second air flow channel; 25: buffer zone; 26: pneumatic buffer zone; 27: annular cylinder wall; 28: extension sleeve;

[0040] 3: kf vacuum connector. DETAILED DESCRIPTION

[0041] In order to better explain the present invention and facilitate understanding, the present invention is described in detail below through specific implementation modes in conjunction with the accompanying drawings.

[0042] See attached Figure 1-3 As shown, a vacuum unit proposed in an embodiment of the present invention includes a plurality of vacuum equipment, an exhaust pressure pulsation regulating device for the vacuum unit and a pipeline. The exhaust pressure pulsation regulating device for the vacuum unit is arranged at the exhaust port of the vacuum equipment, and adjacent vacuum equipment are connected in sequence through the exhaust pressure pulsation regulating device and the pipeline. The exhaust pressure pulsation regulating device for the vacuum unit includes an outer shell 1 whose two ends are respectively connected to the exhaust port and the pipeline of the vacuum main engine, and an adjusting mechanism 2 arranged in the outer shell 1 and fixedly connected to the outer shell 1. The adjusting mechanism 2 includes a cylindrical structure 21 coaxially arranged with the outer shell 1 and closed at both ends, and an adjusting buffer body 22. A first airflow channel 23 connected to the pipeline is formed between the outer wall of the cylindrical structure 21 and the inner wall of the outer shell 1. An air inlet end 211 connected to the inner cavity of the cylindrical structure 21 is provided at one end thereof, a connecting hole 212 connected to the inner cavity of the cylindrical structure 21 is provided on the circumferential side wall of the cylindrical structure 21, and a second air flow channel 24 is formed between the air inlet end 211, the inner cavity of the cylindrical structure 21 and the connecting hole 212. The regulating buffer body 22 is disposed in the inner cavity of the cylindrical structure 21, and the connecting hole 212 is located between the regulating buffer body 22 and the air inlet end 211. The regulating buffer body 22 divides the cylindrical structure 21 into two parts: a buffer zone 25 and a pneumatic buffer zone 26.

[0043] During the exhaust process, the buffer body 22 can be adjusted to move toward / away from one side of the connecting hole 212 along the axial movement of the cylindrical structure 21 to open / close the connecting hole 212, and whether the second airflow channel 24 is connected to the first airflow channel 23 can be selectively determined based on the pressure difference between the buffer zone 25 and the pneumatic buffer zone 26.

[0044] Specifically, the piston cylinder 222 closes and opens the communication hole through a spring under the action of the gas pressure difference between the buffer zone 25 and the pneumatic buffer zone 26 .

[0045] When the gas pressure in the buffer zone 25 is less than or equal to the pneumatic buffer zone 26 , the spring 221 maintains a stationary state, the piston cylinder 222 closes the passage between the buffer zones 25 , and the gas enters the second air flow channel 24 and cannot pass through the buffer zone 25 to merge with the gas in the first air flow channel 23 .

[0046] When the gas pressure in the buffer zone 25 is greater than that in the pneumatic buffer zone 26 , the elastic force of the spring 221 remains in a compressed state, and the air pressure compresses the spring 221 to cause the piston cylinder 222 to open the connecting hole between the first air flow channel 23 and the buffer zone 25 , and the gas enters the second air flow channel 24 , passes through the buffer zone 25 and merges with the gas in the first air flow channel 23 .

[0047] When the connecting hole 212 is opened and the second air flow channel 24 is connected to the first air flow channel 23 , the adjusting buffer body 22 can also perform shock absorption and buffering according to the exhaust pressure of the exhaust port.

[0048] The exhaust pressure pulsation regulating device for a vacuum unit of the present invention is installed between the exhaust port of the vacuum equipment and the pipeline, that is, the gas in the vacuum equipment passes through the first airflow channel 23 formed between the outer sleeve and the tubular structure of the regulating mechanism and the second airflow channel 24 formed by the tubular structure 21 itself. During the exhaust process, it can be selectively judged whether the second airflow channel 24 is connected to the first airflow channel 23 according to the pressure difference between the buffer zone 25 and the pneumatic buffer zone 26, that is, the regulating buffer body 22 is adaptively used to separate the airflow channels, and the airflow channels can be used selectively, and the impact and force on the pipeline are small. Furthermore, when the exhaust pressure is too large, the connecting hole 212 is opened, and when the second airflow channel 24 is connected to the first airflow channel 23, the regulating buffer body 22 can also perform shock absorption and buffering, that is, by establishing a buffer chamber, the purpose of regulating the exhaust pressure pulsation can be achieved, and the problem of vibration noise induced by the exhaust pressure pulsation of the vacuum unit is solved. In addition, the exhaust pressure pulsation regulating device has the characteristics of small space volume, good sealing, simple structure, etc. It is not only easy to manufacture and install, but also has the effect of reducing vibration and noise, thereby ensuring the service life of the pipeline. The existing silencer uses sound-absorbing materials (such as glass wool, rock wool, etc.) and special structures (such as expansion chambers, resonance chambers, etc.) to reduce noise, that is, the pressure to be eliminated is locked to a fixed value and cannot be adjusted. Compared with the existing silencer, in this embodiment, the exhaust pressure pulsation regulating device adjusts the flow state and pressure changes of the gas to reduce the air pressure pulsation, and at the same time can make the pressure of the air pressure system more stable. The large buffer tank is connected to the outside of the vacuum unit equipment and occupies a large volume. Compared with the large buffer tank, this embodiment eliminates the structural restrictions and can be directly connected between the pipeline and the exhaust port.

[0049] Furthermore, the regulating mechanism 2 also includes an annular cylindrical wall 27 that can extend axially along the air inlet end 211 toward one side of the regulating buffer body 22, and an extension sleeve 28 with a blocking end face that is sleeved on the outside of the annular cylindrical wall 27. A serpentine extension channel is formed between the annular cylindrical wall 27, the extension sleeve 28 and the inner wall of the cylindrical structure 21, and a buffer zone 25 is formed between the blocking end face of the extension sleeve 28 and the regulating buffer body 22. The serpentine extension channel, the buffer zone 25 and the connecting hole 212 form a second airflow channel 24. In this embodiment, two flow channels, the first airflow channel 23 and the second airflow channel 24, and a buffer chamber are designed. By optimizing the length difference between the two channels, the time difference between the pressure pulsation in the first airflow channel 23 and the pressure pulsation in the second airflow channel 24 can be changed to enter the buffer chamber, thereby adjusting the pressure pulsation. The buffer chamber changes the air pressure of the pneumatic buffer zone 26 by pneumatic control to meet the needs of the user's current state.

[0050] Further, the radial opening width of the air inlet end 211 is greater than the radial opening width of the first air flow channel 23. Further, the ratio of the radial opening width of the air inlet end 211 to the radial opening width of the first air flow channel 23 is 5-6:1. The first air flow channel 23 is directly connected to the pipeline, and the second air flow channel 24 is connected to the pipeline through the buffer zone 25.

[0051] In this embodiment, the width of the second airflow channel 24 is much greater than that of the first airflow channel 23. According to the kinetic theory of gas, it is easier for gas to pass through the second airflow channel 24. The gas in the second airflow channel 24 is buffered in the buffer zone 25 and then merges with the gas in the first airflow channel 23 through the connecting hole.

[0052] Furthermore, the adjustment buffer body 22 includes a spring 221 and a piston cylinder 222. The connecting hole 212 divides the cylindrical structure 21 into a buffer zone 25 part close to the exhaust port and a pneumatic buffer zone 26 part close to the pipeline. The outer wall of the end of the cylindrical structure 21 close to the pipeline is provided with an adjustment hole 213 connected to the outside world. The adjustment hole 213 passes through the cylindrical structure 21 and the outer shell 1 to communicate with the outside world. The piston cylinder 222 is arranged at the end of the cylindrical structure 21 close to the pipeline, and a spatially adjustable buffer zone 25 is formed between the end face of the piston cylinder 222 and the end face of the extension sleeve 28. A pneumatic buffer zone 26 is formed between the piston cylinder 222 and the inner wall of the end face of the cylindrical structure 21 close to the pipeline, and the pneumatic buffer zone 26 is connected to the adjustment hole 213. The spring 221 is arranged in the pneumatic buffer 26, and one end of the spring 221 is against the inner wall of one end surface of the pipe, and the other end is against the piston cylinder 222. When the exhaust pressure changes, the pressure difference between the pneumatic buffer 26 and the buffer 25 changes. Through the compression and release of the spring 221, the gas energy is consumed to open / close the connecting hole 212.

[0053] Specifically, a closed vacuum unit exhaust pressure pulsation regulating device includes an outer shell, an inner channel sleeve, a buffer chamber, a pneumatic buffer zone 26, a connecting hole, a piston cylinder 222, and a spring; the inner sleeve divides the airflow channel into a first airflow channel 23 and a second airflow channel 24; the second airflow channel 24 is an extended air channel, and the first airflow channel 23 is an initial channel. The vacuum unit exhaust pressure pulsation regulating device uses a method of separating the air channel and establishing a buffer chamber. Based on the pneumatic damping principle and the sound wave interference theory, the buffer zone pressure can be adjusted to achieve a balance with the exhaust pressure of the working process. The exhaust pressure fluctuation is offset by the compression and relaxation of the spring to achieve the purpose of regulating the exhaust pressure pulsation and solve the problem of vibration noise induced by the exhaust pressure pulsation of the vacuum unit.

[0054] In this embodiment, when the exhaust pressure changes, the pressure difference between the gas buffer zone and the buffer zone 25 changes, and the compression and relaxation process of the spring 221 consumes gas energy and plays a buffering role. When the exhaust pressure increases from small to large, the pressure difference between the gas buffer zone and the buffer zone 25 increases from small to large, and the elastic force of the spring 221 increases from small to large, thereby reducing the gas impact. When the exhaust pressure decreases, the pressure difference between the gas buffer zone 26 and the buffer zone 25 decreases, the elastic force of the spring 221 decreases, and the buffering effect decreases. When the exhaust pressure increases, the pressure difference between the gas buffer zone and the buffer zone 25 increases, the elastic force of the spring 221 increases, and the buffering effect increases. In the initial state, the gas buffer zone is at atmospheric pressure. At this time, the spring 221 is not compressed and remains stationary, and the piston cylinder 222 blocks the connecting hole 212 to close the first airflow channel 23 and the second airflow channel 24 (see Figure 3 As shown). Connected to the pipeline, then, the exhaust pressure of the vacuum exhaust port continues to increase. At this time, the pressure difference between the gas buffer zone 26 and the buffer zone 25 increases, the elastic force of the spring 221 increases, and the piston cylinder 222 moves downward to open the connecting hole, so that the first airflow channel 23 and the second airflow channel 24 can be transported at the same time. When the pressure of the vacuum exhaust port decreases, at this time, the pressure difference between the gas buffer zone and the buffer zone 25 increases, the elastic force of the spring 221 increases, and the piston cylinder 222 moves downward to block the connecting hole so that the first airflow channel 23 and the second airflow channel 24 are closed. It can automatically adapt to the pressure pulsation situation (buffering when the pressure is large, and only the first airflow channel 23 is used for buffering when the pressure is small). Further, the piston cylinder 222 includes an abutting end face 2221, a first cylinder wall 2222 and a second cylinder wall 2223 extending on both sides of the abutting end face 2221. The first cylinder wall 2222 is used to close the connecting hole 212, and the second cylinder wall 2223 and the abutting end face 2221 form an abutting space for accommodating the spring 221.

[0055] Furthermore, the regulating mechanism 2 also includes a gas regulator which is capable of adjusting the buffering force of the pneumatic buffer zone 26 according to the exhaust pressure of the exhaust port and is connected to the pneumatic buffer zone 26 .

[0056] Specifically, when the exhaust pressure of the exhaust port is above the outside atmospheric pressure, the gas regulator inflates toward the pneumatic buffer zone 26 through the regulating hole 213 to increase the pressure of the pneumatic buffer zone 26. When the exhaust pressure of the exhaust port is below the outside atmospheric pressure, the gas regulator draws a vacuum through the regulating hole 213 to reduce the pressure of the pneumatic buffer zone 26.

[0057] Furthermore, the outer shell 1 and the cylindrical structure 21 are connected via fixed ribs, which facilitates the installation and molding of the product.

[0058] Furthermore, the air inlet end 211 and the exhaust end of the outer shell 1 are both kf vacuum connectors 3, and the outer shell 1 is detachably connected to the exhaust port of the vacuum host and the air inlet of the pipeline through the kf vacuum connector 3. The air inlet end and the exhaust end of the outer shell 1 are designed as kf vacuum connectors, which is convenient for connecting pipelines.

[0059] See also Figure 4-9 This is a simulation verification of the exhaust pressure pulsation regulating device for the vacuum unit in this embodiment.

[0060] Specifically Figure 4-5 As shown, here is a static cloud diagram of the exhaust pressure being greater than the pressure of the pneumatic buffer zone, which compresses the spring 221 to stabilize the operation, verifying the gas dynamic theory, and when the connecting hole 212 is opened, the gas is more likely to pass through the second air flow channel 24. In the buffering process of the buffer zone 25, most of the gas consumes energy through the vortex and then merges with the first air flow channel 23, and a small part of the gas directly passes through the connecting hole 212.

[0061] Figure 6 It is a pressure stable static vector cloud diagram (the exhaust pressure is less than the set pneumatic buffer pressure). At this time, the exhaust pressure is less than the set pneumatic buffer pressure, the connecting hole 212 is not connected, and the gas only passes through the first airflow channel 23.

[0062] In this embodiment, Figure 7 In order to simulate the effect of the buffer zone 25 created by the pneumatic buffer zone 26, the pressure outlet is set at the position of the piston cylinder 222. Figure 7 The pneumatic buffer state is simulated to be set to a pressure inlet of 10000Pa and a pressure outlet of 8000Pa. At this time, it can be considered that the pressure of the pneumatic buffer is 8000Pa. When the pressure of the pneumatic buffer 26 is less than the exhaust pressure, the gas gathers here and impacts the pneumatic buffer. In this case, the piston cylinder 222 gradually opens the opening of the connecting hole 212, so that the pressure of the pneumatic buffer 26 increases.

[0063] The pressure of the buffer zone 25 increases to 10000Pa under the compression of the spring 221, and the pressure of the pneumatic buffer zone 26 is equal to the exhaust pressure. Figure 8 shown.

[0064] like Figure 8 As shown, when the exhaust pressure is equal to the pressure of the pneumatic buffer zone 26, the gas no longer impacts the pneumatic buffer zone 26 and is discharged normally.

[0065] like Fig. 9As shown, the pressure of the pneumatic buffer zone is set to 10000 Pa, and the pressure inlet is 8000 Pa. At this time, the gas is recoiled from the pneumatic buffer zone 26 to the buffer zone 25. It can be explained that when the exhaust pressure is less than the pressure of the pneumatic buffer zone 26, the piston cylinder 222 will gradually reduce the opening of the connecting hole 212, and the pressure of the pneumatic buffer zone 26 is reduced, so that the pressure of the pneumatic buffer zone 26 is equal to the exhaust pressure.

[0066] pass Figure 7 , Figure 8 , Fig. 9 The static process is used to describe the dynamic process of exhaust, and the situation at each key position is described respectively. It should be noted that the exhaust pressure of the vacuum unit is a fluctuating process, and the exhaust pressure pulsation regulating device for the vacuum unit in this embodiment can adjust itself at different exhaust pressures to buffer the gas.

[0067] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0068] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0069] In the present invention, unless otherwise clearly specified and limited, when a first feature is “on” or “below” a second feature, it may be that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above”, “above” or “above” a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it may simply mean that the first feature is higher in level than the second feature. When a first feature is “below”, “below” or “below” a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it may simply mean that the first feature is lower in level than the second feature.

[0070] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0071] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may alter, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. An exhaust pressure pulsation regulating device for a vacuum unit, characterized in that: It comprises an outer shell (1) whose two ends are respectively connected to the exhaust port and the pipeline of the vacuum main machine, and an adjustment mechanism (2) arranged in the outer shell (1) and fixedly connected to the outer shell (1); The adjustment mechanism (2) comprises a cylindrical structure (21) which is coaxially arranged with the outer shell (1) and has closed ends, and an adjustment buffer body (22); A first air flow channel (23) connected to the pipeline is formed between the outer wall of the cylindrical structure (21) and the inner wall of the outer shell (1); An air inlet end (211) communicating with the inner cavity of the cylindrical structure (21) is provided at one end of the cylindrical structure (21); a communication hole (212) communicating with the inner cavity of the cylindrical structure (21) is provided on the circumferential side wall of the cylindrical structure (21); a second air flow channel (24) is formed between the air inlet end (211), the inner cavity of the cylindrical structure (21) and the communication hole (212); The regulating buffer body (22) is arranged in the inner cavity of the cylindrical structure (21), and the communicating hole (212) is located between the regulating buffer body (22) and the air inlet end (211), and the regulating buffer body (22) divides the cylindrical structure (21) into two parts: a buffer zone (25) and a pneumatic buffer zone (26); During the exhaust process, the regulating buffer body (22) can move toward or away from one side of the communicating hole (212) along the axial movement of the cylindrical structure (21) to open or close the communicating hole (212), and can selectively determine whether the second airflow channel (24) is connected to the first airflow channel (23) according to the pressure difference between the buffer zone (25) and the pneumatic buffer zone (26); When the exhaust pressure is too high, the connecting hole (212) is opened, and the second air flow channel (24) is connected to the first air flow channel (23), and the regulating buffer body (22) can also perform shock absorption and buffering.

2. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 1, characterized in that: The regulating mechanism (2) further comprises an annular cylindrical wall (27) which can extend axially along the air inlet end (211) toward one side of the regulating buffer body (22), and an extension sleeve (28) having a blocking end face which is sleeved on the outside of the annular cylindrical wall (27); a serpentine extension channel is formed between the annular cylindrical wall (27), the extension sleeve (28) and the inner wall of the tubular structural member (21); a buffer zone (25) is formed between the blocking end face of the extension sleeve (28) and the regulating buffer body (22); and the serpentine extension channel, the buffer zone (25) and the connecting hole (212) form the second airflow channel (24).

3. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 2, characterized in that: The radial opening width of the air inlet end (211) is greater than the radial opening width of the first air flow channel (23).

4. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 3, characterized in that: The ratio of the radial opening width of the air inlet end (211) to the radial opening width of the first air flow channel (23) is 5-6:

1.

5. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 2, characterized in that: The regulating buffer body (22) comprises a spring (221) and a piston cylinder (222); An adjustment hole (213) communicating with the outside is formed on the outer wall of one end of the cylindrical structure (21) close to the pipeline, and the adjustment hole (213) passes through the cylindrical structure (21) and the outer shell (1) to communicate with the outside; The piston cylinder (222) is arranged at one end of the cylindrical structure (21) close to the pipeline, and a spatially adjustable buffer zone (25) is formed between the end surface of the piston cylinder (222) and the end surface of the extension sleeve (28), and a pneumatic buffer zone (26) is formed between the piston cylinder (222) and the inner wall of one end surface of the cylindrical structure (21) close to the pipeline, and the pneumatic buffer zone (26) is connected to the adjustment hole (213); The spring (221) is arranged in the pneumatic buffer zone (26), and one end of the spring (221) abuts against the inner wall of one end surface of the pipe, and the other end abuts against the piston cylinder (222). When the exhaust pressure changes, the pressure difference between the pneumatic buffer zone (26) and the buffer zone (25) changes, and the connecting hole (212) is opened / closed by compression and release of the spring (221).

6. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 5, characterized in that: The piston cylinder (222) comprises an abutting end surface (2221), a first cylinder wall (2222) and a second cylinder wall (2223) respectively extending on both sides of the abutting end surface (2221); The first tube wall (2222) is used to close the connecting hole (212), and the second tube wall (2223) and the abutting end surface (2221) form an abutting space for accommodating the spring (221).

7. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 6, characterized in that: The regulating mechanism (2) further comprises a gas regulator which is capable of regulating the buffering force of the pneumatic buffer zone (26) according to the exhaust pressure of the exhaust port and is connected to the pneumatic buffer zone (26); When the exhaust pressure of the exhaust port is higher than the external atmospheric pressure, the gas regulator inflates the pneumatic buffer zone (26) through the regulating hole (213) to increase the pressure of the pneumatic buffer zone (26); When the exhaust pressure of the exhaust port is below the external atmospheric pressure, the gas regulator draws a vacuum through the regulating hole (213) to reduce the pressure of the pneumatic buffer zone (26).

8. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 7, characterized in that: The outer shell (1) and the cylindrical structural member (21) are connected via fixed ribs.

9. The exhaust pressure pulsation regulating device for a vacuum unit according to claim 1, characterized in that: The air inlet end (211) and the air outlet end of the outer shell (1) are both kf vacuum joints (3), and the outer shell (1) is detachably connected to the exhaust port of the vacuum main machine and the air inlet of the pipeline via the kf vacuum joint (3).

10. A vacuum unit, characterized in that: It comprises a plurality of vacuum equipment, an exhaust pressure pulsation regulating device and a pipeline for a vacuum unit as described in any one of claims 1 to 9, wherein the exhaust pressure pulsation regulating device for a vacuum unit is arranged at the exhaust port of the vacuum equipment, and adjacent vacuum equipment are connected in sequence through the exhaust pressure pulsation regulating device and the pipeline.

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