Bearing with film sensor

Abstract

The invention discloses a bearing with a film sensor, and relates to a bearing and an accessory for the bearing. The bearing monitoring sensor aims to solve the problems that an existing bearing monitoring sensor is separated from a bearing and is large in size, so that the bearing is complex in structure, large in occupied space and insufficient in reliability, and comprises a bearing inner ring, a bearing outer ring and a film sensor. The thin film sensor comprises a sensing layer and an insulating layer; one side surface of the sensing layer is fixed on the side wall of the bearing through the insulating layer; the side wall of the bearing is the outer ring side wall of the bearing inner ring, the outer ring side wall of the bearing outer ring or the end surface side wall of the bearing mounting surface; the bearing operation parameter detection device can acquire an electric signal generated by the sensing layer and convert the electric signal to obtain a bearing operation parameter; the bearing operation parameters are temperature parameters, vibration parameters and acceleration parameters of the bearing.

Description

Technical Field

[0001] The invention relates to a bearing and an accessory for the bearing. Background Art

[0002] The existing integration methods of bearing monitoring sensors are mainly separated designs of sensors and bearings, mostly in the form of external hanging, mosaic, adhesive sheet and other structures. These sensors are almost all hard and large in size. There are the following problems:

[0003] (1) The sensor needs to be installed and wired independently, which increases the complexity of the bearing structure;

[0004] (2) The sensor usually takes up additional space and introduces external connecting wires, which limits the compact design and application of the bearing;

[0005] (3) The sensor is separated from the bearing, and interference and loss are inevitable during signal transmission, which affects the accuracy and reliability of monitoring. Summary of the invention

[0006] The purpose of the present invention is to overcome the problems that the existing bearing monitoring sensor is separated from the bearing and has a large volume, resulting in a complex bearing structure, a large space occupation and insufficient reliability, and to provide a bearing with a thin film sensor.

[0007] A bearing with a thin film sensor of the present invention comprises a bearing inner ring and a bearing outer ring, and also comprises a thin film sensor;

[0008] The thin film sensor includes a sensing layer and an insulating layer;

[0009] One side of the sensing layer is fixed on the side wall of the bearing through the insulating layer; the side wall of the bearing is the outer ring side wall of the inner ring of the bearing, the outer ring side wall of the outer ring of the bearing, or the end face side wall of the bearing mounting surface;

[0010] The bearing operation parameter detection device can collect the electrical signal generated by the sensing layer and convert it into the bearing operation parameters; the bearing operation parameters are the temperature parameters, vibration parameters and acceleration parameters of the bearing.

[0011] The beneficial effects of the present invention are:

[0012] The bearing with a thin film sensor of the present invention can construct or integrate the thin film sensor in situ on the surface of the bearing or other devices through the integrated design of the thin film sensor and the bearing, so as to realize intelligent monitoring of the bearing state. The structure of the bearing is simplified, space is saved, and the sensor is protected from interference from the external environment, and no additional maintenance and care are required. It can also provide long-term and stable bearing internal state monitoring performance, and can also realize real-time monitoring and feedback, with high reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of a bearing with a thin film sensor of the present invention;

[0014] Figure 2 It is a schematic diagram of electrical connection between a thin film sensor in a bearing with a thin film sensor and a bearing operation parameter detection device of the present invention;

[0015] Figure 3 It is a schematic diagram of the planar structure of a temperature sensor in a bearing having a thin film sensor according to the present invention;

[0016] Figure 4 It is a schematic diagram of the planar structure of a vibration sensor in a bearing having a thin film sensor according to the present invention;

[0017] Figure 5 This is a physical picture of a bearing with a thin film sensor according to the present invention, in which the thin film sensor is a temperature sensor. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0020] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention. Specific implementation method 1

[0022] A bearing with a thin film sensor in this embodiment includes a bearing inner ring and a bearing outer ring, and also includes a thin film sensor 1;

[0023] The thin film sensor 1 comprises a sensing layer 1-1 and an insulating layer 1-2;

[0024] One side of the sensing layer 1-1 is fixed to the side wall of the bearing through the insulating layer 1-2; the side wall of the bearing is the outer ring side wall of the inner ring of the bearing, the outer ring side wall of the outer ring of the bearing, or the end face side wall of the bearing mounting surface;

[0025] The sensing layer 1 - 1 can be electrically connected to the input end of the bearing operation parameter detection device.

[0026] Specifically, Figure 1 ( Figure 1In order to highlight the thin film sensor, the ratio of the thin film sensor to the bearing is increased), and the bearing shown in 2 of this embodiment is a bearing that combines the surface in-situ thin film sensor with the bearing surface partition design. And a variety of thin film sensors are distributed in an array on the bearing surface. They are mainly distributed in the circumferential and axial directions of the inner ring and / or the outer ring of the bearing. For example, the sensor arrangement area is designed in the circumferential direction, and arranged in an array with equal spacing and equal angles. For example, it is arranged at intervals of 30° and 5mm. And in the axial direction, it is arranged in parallel with an interval of 1mm.

[0027] Among them, the thin film sensor is generated by magnetron sputtering on the bearing surface. First, after the bearing surface is cleaned, the magnetron sputtering technology is used to deposit the insulating layer 1-2 on the bearing surface. Then the sensing layer 1-1 is deposited on the insulating layer 1-2 by magnetron sputtering technology. After the deposition of the sensing layer 1-1 and the insulating layer 1-2, post-processing steps such as heat treatment can be performed to further improve the crystallinity and stability of the film. The sensing layer 1-1 and the insulating layer 1-2 are very thin, usually at the nanometer or micrometer level, which can realize the in-situ integration of the sensor and the bearing, and the sensor can be arranged more compactly on the bearing surface, saving space and protecting the sensor from interference from the external environment.

[0028] Through the above steps, a thin film sensor can be prepared on the surface of the bearing, and the sensing layer 1-1 in the thin film sensor can be used in the bearing operation parameter detection device 2 to measure various bearing operation parameters such as temperature, vibration and acceleration. For example, the resistance of the sensing layer 1-1 can change with temperature, and the resistance value increases linearly with the increase of temperature, and the resistance value is measured (using Ohm's law: R=V / I). The bearing operation parameter detection device 2 uses the temperature coefficient of the sensing layer 1-1 to convert the measured resistance value into a temperature value. The insulating layer 1-2 of the thin film sensor is used for electrical insulation between the sensing layer 1-1 and the bearing surface to ensure that the sensor works stably and reliably. At the same time, it also provides necessary mechanical support for the sensing layer 1-1.

[0029] The above-mentioned bearing operation parameter detection device 2 includes a signal processing and analysis unit, which processes and analyzes the collected electrical parameters to extract useful information, and a control unit (which can be a PLC or other type of controller) for controlling the operation process of the entire detection device, such as starting and stopping the electrical parameter collection. Specific implementation method 2

[0031] This embodiment is a further description of the first embodiment. In this embodiment, the thin film sensor 1 further includes a protective layer 1-3;

[0032] The protection layer 1 - 3 covers the other side of the sensing layer 1 - 1 .

[0033] The other technical features of this embodiment are exactly the same as those of the first embodiment.

[0034] Specifically, Figure 1 , 2 As shown, the thin film sensor 1 of this embodiment adopts a "sandwich" structure formed by three layers of insulating layer 1-2-sensing layer 1-1-protective layer 1-3 along the radial direction of the bearing; by adjusting the material combination of insulating layer 1-2-sensing layer 1-1-protective layer 1-3 in the sensor structure, the measurement of indicators such as temperature, vibration, and acceleration can be achieved. That is, the protective layer 1-3 can be further deposited on the sensing layer 1-1 by magnetron sputtering technology, so that the sensing layer 1-1 is sandwiched between the protective layer 1-3 and the insulating layer 1-2.

[0035] The protective layer 1-3 can slow down the oxidation rate of the sensing layer 1-1, preventing the exposed sensing layer 1-1 from being gradually oxidized at high temperatures, thereby affecting the performance of the thin film sensor. It can also improve the corrosion resistance of the thin film sensor. And the use of a protective layer 1-3 with high hardness and high wear resistance can also prevent the sensing layer 1-1 from being physically damaged. Specific implementation method three

[0037] This embodiment is a further explanation of the second embodiment. In this embodiment, the thin film sensor 1 is a temperature sensor;

[0038] The insulating layer 1-2 and the protective layer 1-3 of the temperature sensor are both ceramic layers;

[0039] The sensing layer 1 - 1 of the temperature sensor is a metal layer.

[0040] The other technical features of this embodiment are exactly the same as those of the second embodiment.

[0041] Specifically, when the temperature changes, the resistance value of the sensing layer 1-1 changes. By measuring this resistance change, the current temperature can be determined. The measurement is usually performed by connecting the two ends of the sensing layer 1-1 (such as Figure 3 As shown, there is a conductive sheet for external cable) to collect voltage and current, and then use existing algorithms such as Ohm's law to calculate the resistance value. The bearing operation parameter detection device 2 can convert the resistance value into temperature through the temperature-resistance curve obtained by pre-calibration. Specific implementation method four

[0043] This embodiment is a further explanation of the third embodiment. In this embodiment, there are multiple temperature sensors.

[0044] A plurality of temperature sensors are evenly distributed around the outer ring side wall of the bearing outer ring.

[0045] The other technical features of this embodiment are exactly the same as those of the third embodiment.

[0046] Specifically, Figure 1 , 3 As shown in Figure 5, the bearing of this embodiment has multiple thin film temperature sensors, and the thin film temperature sensors are suitable for use on bearings, which are components with limited space and frequent movement. They can fit well on the outer ring of the bearing without affecting the normal operation of the bearing, while providing high-precision temperature measurement. Because the bearing is running at high speed, local overheating may occur due to friction or poor lubrication. Multiple thin film temperature sensors can detect these local hot spots in time. They are evenly distributed on the outer ring side wall of the outer ring of the bearing, and can monitor the temperature of the entire outer ring of the bearing in real time. The distributed sensing method can capture local temperature changes more accurately and avoid missing temperature anomalies in different parts of the bearing.

[0047] The temperature sensor can not only be set up in the above manner, but can also be installed in different parts of the bearing based on design and actual needs. For example, it can be arranged axially to monitor the temperature distribution of the bearing in different directions. Specific implementation method five

[0049] This embodiment is a further explanation of the second embodiment. In this embodiment, the thin film sensor 1 is a vibration sensor;

[0050] The insulating layer 1-2 and the protective layer 1-3 of the vibration sensor are both ceramic layers;

[0051] The sensing layer 1 - 1 of the vibration sensor is a metal layer.

[0052] The other technical features of this embodiment are exactly the same as those of the second embodiment.

[0053] Specifically, when mechanical vibration occurs on the bearing surface where the vibration sensor is located, the sensing layer 1-1 will be subjected to stress or deformation, and sense the mechanical vibration through the piezoelectric effect or the resistance strain effect. For example, in the resistance strain effect, the resistance of the metal changes with the change of deformation. The deformation caused by vibration causes a slight change in the resistance of the metal, and this change can be converted into an electrical signal. The bearing operation parameter detection device 2 obtains physical quantities such as the amplitude and frequency of the vibration by collecting the electrical signal. Specific implementation method 6

[0055] This embodiment is a further description of the fifth embodiment. In this embodiment, the number of the vibration sensor is at least one;

[0056] At least one vibration sensor is arranged on the outer ring side wall of the inner ring of the bearing and is arranged along the axial direction of the bearing.

[0057] The other technical features of this embodiment are exactly the same as those of embodiment five.

[0058] Specifically, Figure 4 As shown, in this embodiment, the vibration sensor is arranged on the outer ring side wall of the inner ring of the bearing, which can directly sense the vibration inside the bearing. Since the inner ring of the bearing is connected to the rotating shaft, it can more directly reflect the vibration signal generated when the equipment is running. The vibration sensor is arranged along the axial direction of the bearing, which can better monitor the axial vibration. When the bearing is running, especially when the load is uneven or the bearing is improperly positioned, axial vibration may be generated. Through the axial arrangement, these vibrations in different directions can be more comprehensively monitored and detected.

[0059] Multiple sensors can be used to work simultaneously to improve the sensitivity of vibration detection and enhance monitoring accuracy.

[0060] The vibration sensor can not only be set up in the above-mentioned manner, but can also be installed in different parts of the bearing based on design and actual needs. For example, it can be set in the radial direction to detect the radial vibration of the bearing. Specific implementation method seven

[0062] This embodiment is a further explanation of the second embodiment. In this embodiment, the thin film sensor 1 is an acceleration sensor;

[0063] The insulating layer 1-2 and the protective layer 1-3 of the acceleration sensor are both ceramic layers;

[0064] The sensing layer 1 - 1 of the acceleration sensor is a metal layer.

[0065] The other technical features of this embodiment are exactly the same as those of the second embodiment.

[0066] Specifically, when the bearing where the acceleration sensor is located is subjected to external acceleration, the sensing layer 1-1 of the acceleration sensor senses the mechanical strain or pressure change caused by the acceleration change, thereby generating an electrical signal. The electrical signal can reflect the magnitude and direction of the acceleration. The bearing operation parameter detection device 2 collects the electrical signal and converts the electrical signal into the value of acceleration based on the existing algorithm. Specific implementation method eight

[0068] This embodiment is a further explanation of the seventh embodiment. In this embodiment, there are multiple acceleration sensors.

[0069] A plurality of acceleration sensors are fixed on the end faces of the bearing inner ring and / or the bearing outer ring.

[0070] The other technical features of this embodiment are exactly the same as those of embodiment seven.

[0071] Specifically, multiple acceleration sensors are fixed on the end faces of the inner ring and / or outer ring of the bearing, which can be closer to the moving parts and directly sense the acceleration changes generated by the bearing during operation, thereby improving the monitoring accuracy. They can also be evenly distributed to ensure uniform monitoring of the vibration and acceleration of the entire bearing, which helps capture vibration signals in different directions and positions, thereby improving the accuracy and efficiency of fault diagnosis. Specific implementation method nine

[0073] This embodiment is a further description of one of the embodiments 1 to 8. In this embodiment, the insulating layer 1-2 and the protective layer 1-3 are both alumina ceramic layers;

[0074] The sensing layer 1 - 1 is a platinum metal layer or a silver metal layer.

[0075] The other technical features of this embodiment are exactly the same as any one of embodiments one to eight.

[0076] Specifically, platinum, as a conductive material, has high conductivity and stability, while silver is the best known conductive material with extremely high conductivity. For temperature sensors, the platinum and silver sensing layer 1-1 can effectively convert temperature changes into resistance changes, and has excellent linearity, that is, the linear relationship between temperature changes and resistance changes is more obvious. For vibration sensors and acceleration sensors, since platinum and silver have high conductivity, they can quickly respond to strain changes and convert them into electrical signals, ensuring the sensitivity and accuracy of the sensor when monitoring small strains.

[0077] As a ceramic material, alumina has excellent electrical insulation properties, can effectively prevent current leakage, protect the electrical safety of the sensor, and improve the stability and reliability of the signal. It has high hardness and wear resistance, so that the thin film sensor can resist wear and corrosion in the bearing work and extend the service life.

[0078] This embodiment is a further description of the ninth embodiment. In this embodiment, the thickness of the insulating layer 1-2 is 150 μm to 200 μm, the thickness of the protective layer 1-3 is 150 μm to 200 μm, and the thickness of the sensing layer 1-1 is 100 μm to 150 μm.

[0079] The other technical features of this embodiment are exactly the same as those of embodiment nine.

[0080] Through the above-mentioned design of in-situ thin-film sensors and partitioned layout, the present invention achieves the goal of integrating bearings and thin-film sensors, and realizes the in-situ integration of multiple thin-film sensors and bearings, and the goal of real-time monitoring of various bearing performances. The sensor is integrated into the bearing surface, and through the design of arrayed thin-film sensors and partitioned sensor layout, the goal of integrating bearings and thin-film sensors is achieved, and the in-situ integration of multiple types of sensors and bearings is achieved, and the goal of real-time monitoring of various bearing performances is achieved.

[0081] Although the present invention is described herein with reference to specific embodiments, it should be understood that these embodiments are merely examples of the principles and applications of the present invention. It should therefore be understood that many modifications may be made to the exemplary embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that the features of the various dependent claims and herein may be combined in a manner different from that described in the original claims. It should also be understood that the features described in conjunction with the individual embodiments may be used in other embodiments.

Claims

1. A bearing with a thin film sensor, comprising a bearing inner ring and a bearing outer ring, characterized in that: Also includes a thin film sensor (1); The thin film sensor (1) comprises a sensing layer (1-1) and an insulating layer (1-2); One side surface of the sensing layer (1-1) is fixed on the side wall of the bearing through the insulating layer (1-2); the side wall of the bearing is the outer ring side wall of the inner ring of the bearing, the outer ring side wall of the outer ring of the bearing, or the end face side wall of the bearing mounting surface; The bearing operation parameter detection device (2) can collect the electrical signal generated by the sensing layer (1-1) and convert it into the bearing operation parameters; the bearing operation parameters are the temperature parameters, vibration parameters and acceleration parameters of the bearing.

2. A bearing with a thin film sensor according to claim 1, characterized in that: The thin film sensor (1) further comprises a protective layer (1-3); The protective layer (1-3) covers the other side of the sensing layer (1-1).

3. A bearing with a thin film sensor according to claim 2, characterized in that: The thin film sensor (1) is a temperature sensor; The insulating layer (1-2) and the protective layer (1-3) of the temperature sensor are both ceramic layers; The sensing layer (1-1) of the temperature sensor is a metal layer.

4. A bearing with a thin film sensor according to claim 3, characterized in that: The number of the temperature sensors is multiple; A plurality of temperature sensors are evenly distributed around the outer ring side wall of the bearing outer ring.

5. A bearing with a thin film sensor according to claim 2, characterized in that: The thin film sensor (1) is a vibration sensor; The insulating layer (1-2) and the protective layer (1-3) of the vibration sensor are both ceramic layers; The sensing layer (1-1) of the vibration sensor is a metal layer.

6. A bearing with a thin film sensor according to claim 5, characterized in that: The number of the vibration sensor is at least one; At least one vibration sensor is arranged on the outer ring side wall of the inner ring of the bearing and is arranged along the axial direction of the bearing.

7. A bearing with a thin film sensor according to claim 2, characterized in that: The thin film sensor (1) is an acceleration sensor; The insulating layer (1-2) and the protective layer (1-3) of the acceleration sensor are both ceramic layers; The sensing layer (1-1) of the acceleration sensor is a metal layer.

8. A bearing with a thin film sensor according to claim 7, characterized in that: The number of the acceleration sensors is multiple; A plurality of acceleration sensors are fixed on the end faces of the bearing inner ring and / or the bearing outer ring.

9. A bearing with a thin film sensor according to any one of claims 3 to 8, characterized in that: The insulating layer (1-2) and the protective layer (1-3) are both alumina ceramic layers; The sensing layer (1-1) is a platinum metal layer or a silver metal layer.

10. A bearing with a thin film sensor according to claim 9, characterized in that: The thickness of the insulating layer (1-2) is 150 μm to 200 μm, the thickness of the protective layer (1-3) is 150 μm to 200 μm, and the thickness of the sensing layer (1-1) is 100 μm to 150 μm.

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