Micro electro mechanical system gyroscope

Abstract

The invention discloses a micro-electro-mechanical system gyroscope, and belongs to the technical field of sensors. The gyroscope comprises a substrate, a mass block group, a driving assembly, a detection assembly, a feedback assembly and a frequency modulation assembly, the mass block set comprises a plurality of first mass blocks and a plurality of second mass blocks, the driving assembly is used for providing driving force for the first mass blocks, and the first mass blocks drive the second mass blocks connected with the first mass blocks to vibrate. The detection assembly is used for detecting the vibration of the plurality of first mass blocks in the Z-axis direction and the vibration of the plurality of second mass blocks in the X-axis and Y-axis directions; the feedback assembly is used for forming a feedback signal based on the vibration, detected by the detection assembly, of each mass block and generating corresponding feedback force to the corresponding mass block; the frequency modulation assembly is used for adjusting the detection frequencies of the plurality of first mass blocks and the plurality of second mass blocks. The gyroscope has frequency modulation and feedback functions, and is beneficial to improving the sensitivity and stability of gyroscope devices.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a micro-electromechanical system gyroscope. Background Art

[0002] Gyroscopes are inertial devices used to measure the angular velocity of an object moving along the X, Y, and Z axes. Currently, MEMS (micro electro mechanical systems) gyroscopes are widely used. MEMS gyroscopes are inertial devices manufactured based on micro-electromechanical technology, and are small in size, highly reliable, low in cost, and suitable for mass production.

[0003] In the related art, a three-axis micro-electromechanical system gyroscope (patent authorization number is CN102636162B) is provided, including a substrate and a gyroscope body arranged on the substrate. The gyroscope body includes a plane detection unit and a Z-axis detection unit, the plane detection unit includes a plurality of first mass blocks and a driving electrode, the plurality of first mass blocks include an X-axis detection mass block and a Y-axis detection mass block; the Z-axis detection unit includes a second mass block, the second mass block is connected to the first mass block, and the driving electrode is used to drive the first mass block to vibrate along the X-axis and Y-axis directions. The detection electrodes include X-axis, Y-axis and Z-axis detection electrodes. Since the X-axis and Y-axis Coriolis accelerations are along the Z-axis direction, and the Z-axis Coriolis accelerations are along the X-axis and Y-axis directions, the X-axis and Y-axis detection electrodes detect the changes caused by the movement of the first mass block in the Z-axis direction, and the Z-axis detection electrode detects the changes caused by the movement of the second mass block in the X-axis and Y-axis directions, so as to realize the detection of the angular velocity of the gyroscope.

[0004] However, the above gyroscope structure can only detect the displacement change of the mass block in each axis direction, and cannot realize the frequency modulation and feedback functions of the gyroscope, resulting in poor sensitivity and stability of the gyroscope device. Summary of the invention

[0005] In view of the above problems, the present invention is proposed to provide a micro-electromechanical system gyroscope that overcomes the above problems or at least partially solves the above problems. The gyroscope not only has a driving component and a detection component, but also has a feedback component and a frequency modulation component, which can realize the frequency modulation and feedback functions of the gyroscope in the X, Y, and Z axis directions, which is beneficial to improving the sensitivity and stability of the gyroscope device.

[0006] The present invention provides a micro-electromechanical system gyroscope, comprising:

[0007] substrate;

[0008] A mass block group, the mass block group comprising a plurality of first mass blocks and a plurality of second mass blocks, the plurality of first mass blocks being suspended on the substrate through an anchor structure, and the plurality of first mass blocks being coupled and connected to each other; the second mass blocks being arranged on the first mass blocks, and the second mass blocks being connected to the first mass blocks through a driving beam;

[0009] A driving assembly, used for driving the plurality of first mass blocks to vibrate along the X-axis and Y-axis directions parallel to the end surface of the substrate; the plurality of second mass blocks vibrate along the X-axis and Y-axis directions driven by the plurality of first mass blocks;

[0010] A detection component, used for detecting vibrations of the plurality of first mass blocks in a Z-axis direction perpendicular to the end surface of the substrate, and for detecting vibrations of the plurality of second mass blocks in X-axis and Y-axis directions;

[0011] A feedback component, configured to form a feedback signal based on the vibrations of the plurality of first mass blocks and the plurality of second mass blocks detected by the detection component, and generate corresponding feedback forces to corresponding mass blocks;

[0012] The frequency modulation component is used to adjust the detection frequency of the plurality of first mass blocks and the plurality of second mass blocks.

[0013] Optionally, the driving component includes multiple groups of driving electrodes arranged in one-to-one correspondence with the multiple first mass blocks, each group of driving electrodes includes a fixed driving electrode and a movable driving electrode, the fixed driving electrode is fixedly arranged on the substrate, and the movable driving electrode is connected to the corresponding first mass block.

[0014] Optionally, the detection component includes a plurality of detection electrodes arranged in one-to-one correspondence with the plurality of first mass blocks and the plurality of second mass blocks;

[0015] The plurality of detection electrodes include X-axis detection electrodes and Y-axis detection electrodes arranged corresponding to the first mass blocks, and the X-axis detection electrodes and the Y-axis detection electrodes are used to detect vibrations of the plurality of first mass blocks in a Z-axis direction perpendicular to the end surface of the substrate;

[0016] The plurality of detection electrodes further include Z-axis detection electrodes arranged corresponding to the respective second mass blocks, and the Z-axis detection electrodes are used to detect vibrations of the plurality of second mass blocks in the directions of the X-axis and the Y-axis.

[0017] Optionally, each of the X-axis detection electrodes includes a fixed X-axis detection electrode and a movable X-axis detection electrode, the fixed X-axis detection electrode is fixedly arranged on the substrate, the movable X-axis detection electrode is connected to the corresponding first mass block, and the fixed X-axis detection electrode and the movable X-axis detection electrode constitute a planar capacitor structure with a variable gap; the Y-axis detection electrode has the same structure as the X-axis detection electrode;

[0018] Each of the Z-axis detection electrodes includes a fixed Z-axis detection electrode and a movable Z-axis detection electrode, the fixed Z-axis detection electrode is fixedly arranged on the substrate, the movable Z-axis detection electrode is connected to the corresponding second mass block, and the fixed Z-axis detection electrode and the movable Z-axis detection electrode constitute a comb-tooth capacitor structure.

[0019] Optionally, the feedback component includes a plurality of feedback electrodes arranged in one-to-one correspondence with the plurality of first mass blocks and the plurality of second mass blocks;

[0020] The multiple feedback electrodes include an X-axis feedback electrode and a Y-axis feedback electrode arranged corresponding to each of the first mass blocks, and the X-axis feedback electrode and the Y-axis feedback electrode are used to generate corresponding feedback forces to the corresponding first mass blocks based on the vibrations of the multiple first mass blocks in the Z-axis direction perpendicular to the end surface of the substrate detected by the detection component;

[0021] The multiple feedback electrodes also include Z-axis feedback electrodes arranged corresponding to each of the second mass blocks, and the Z-axis feedback electrodes are used to generate corresponding feedback forces to the corresponding second mass blocks based on the vibrations of the multiple second mass blocks in the X-axis and Y-axis directions detected by the detection component.

[0022] Optionally, each of the X-axis feedback electrodes includes a fixed X-axis feedback electrode and a movable X-axis feedback electrode, the fixed X-axis feedback electrode is fixedly arranged on the substrate, the movable X-axis detection electrode is connected to the corresponding first mass block, and the fixed X-axis feedback electrode and the movable X-axis feedback electrode constitute a planar capacitor structure with a variable gap; the Y-axis feedback electrode has the same structure as the X-axis feedback electrode;

[0023] Each of the Z-axis feedback electrodes includes a fixed Z-axis feedback electrode and a movable Z-axis feedback electrode, the fixed Z-axis feedback electrode is fixedly arranged on the substrate, the movable Z-axis feedback electrode is connected to the corresponding second mass block, and the fixed Z-axis feedback electrode and the movable Z-axis feedback electrode constitute a comb-tooth capacitor structure.

[0024] Optionally, the frequency modulation component includes a plurality of frequency modulation electrodes arranged in one-to-one correspondence with the plurality of first mass blocks and the plurality of second mass blocks;

[0025] The plurality of frequency modulation electrodes include a first frequency modulation electrode arranged corresponding to each of the first mass blocks, the first frequency modulation electrode being used to adjust the driving frequency of the corresponding first mass block;

[0026] The multiple frequency modulation electrodes further include a Z-axis frequency modulation electrode arranged corresponding to each second mass block, and the Z-axis frequency modulation electrode is used to adjust the driving frequency of the corresponding second mass block.

[0027] Optionally, first frequency modulation electrodes corresponding one-to-one to the plurality of first mass blocks are formed on the substrate;

[0028] Each of the Z-axis frequency modulation electrodes includes a fixed Z-axis frequency modulation electrode and a movable Z-axis frequency modulation electrode. The fixed Z-axis frequency modulation electrode is fixedly arranged on the substrate. The movable Z-axis frequency modulation electrode is connected to the corresponding second mass block. The fixed Z-axis frequency modulation electrode and the movable Z-axis frequency modulation electrode constitute a comb-tooth capacitor structure.

[0029] Optionally, the gaps between the comb teeth of the comb-tooth capacitor structure formed by the fixed Z-axis frequency modulation electrode and the movable Z-axis frequency modulation electrode are the same.

[0030] Optionally, the mass block group includes four of the first mass blocks and four of the second mass blocks;

[0031] The four first mass blocks are symmetrically distributed about the center of the substrate, and one second mass block is disposed on two adjacent first mass blocks.

[0032] The technical solution provided in the embodiments of the present invention has at least the following technical effects or advantages:

[0033] A micro-electromechanical system gyroscope provided by an embodiment of the present invention not only has a driving component and a detection component, which can drive the vibration of each mass block of the gyroscope in the X-axis and Y-axis directions and detect the angular velocity of the gyroscope, but also has a feedback component and a frequency modulation component. The feedback component can form a feedback signal through a measurement and control circuit for the vibration of each mass block in the X-axis, Y-axis and Z-axis directions detected by the detection component, and generate a corresponding feedback force to the corresponding mass block. The frequency modulation component can adjust the detection frequency of each mass block in the X-axis, Y-axis and Z-axis directions, realize the frequency modulation and feedback functions of the gyroscope in the X-axis, Y-axis and Z-axis directions, thereby facilitating the improvement of the sensitivity and stability of the gyroscope device.

[0034] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] By reading the detailed description of the preferred embodiment below, various other advantages and benefits will become clear to those of ordinary skill in the art. The accompanying drawings are only used for the purpose of illustrating the preferred embodiment and are not considered to be limitations of the present invention. In addition, the same reference symbols are used to represent the same components throughout the accompanying drawings.

[0036] In the attached picture:

[0037] Figure 1 is a schematic diagram of a micro-electromechanical system gyroscope provided by an embodiment of the present invention;

[0038] Figure 2 yes Figure 1 A partial enlarged schematic diagram of the structure. DETAILED DESCRIPTION

[0039] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below with reference to the accompanying drawings.

[0040] Figure 1 is a schematic diagram of a micro-electromechanical system gyroscope provided by an embodiment of the present invention, such as Figure 1 As shown, the MEMS gyroscope includes: a substrate 10 , a mass block group 20 , a driving component 30 , a detection component 40 , a feedback component 50 and a frequency modulation component 60 .

[0041] The mass block group 20 includes a plurality of first mass blocks 21 and a plurality of second mass blocks 22. The plurality of first mass blocks 21 are suspended on the substrate 10 through an anchor structure 211, and the plurality of first mass blocks 21 are coupled and connected to each other. The second mass block 22 is disposed on the first mass block 21, and the second mass block 22 is connected to the first mass block 21 through a driving beam.

[0042] The driving assembly 30 is used to drive the plurality of first mass blocks 21 to vibrate along the X-axis and Y-axis directions parallel to the end surface of the substrate 10 ; the plurality of second mass blocks 22 are driven by the plurality of first mass blocks 21 to vibrate along the X-axis and Y-axis directions.

[0043] A detection assembly 40, for detecting vibrations of the plurality of first mass blocks 21 in a Z-axis direction perpendicular to the end surface of the substrate 10, and for detecting vibrations of the plurality of second mass blocks 22 in X-axis and Y-axis directions;

[0044] A feedback component 50, used to form a feedback signal based on the vibrations of the plurality of first mass blocks 21 and the plurality of second mass blocks 22 detected by the detection component, and generate corresponding feedback forces to the corresponding mass blocks;

[0045] The frequency modulation component 60 is used to adjust the detection frequency of the plurality of first mass blocks 21 and the plurality of second mass blocks 22 .

[0046] A three-dimensional space coordinate system including an X-axis, a Y-axis, and a Z-axis is established with the center point of the substrate 10 as the origin. The X-axis and the Y-axis are parallel to the end surface of the substrate 10 , and the Z-axis is perpendicular to the end surface of the substrate 10 .

[0047] In this embodiment, the plurality of first mass blocks 21 may be connected by coupling elastic beams. The coupling elastic beams are cross-shaped beams to achieve coupling connection between the plurality of first mass blocks 21. Each first mass block 21 may be connected to the anchor structure 211 by a cantilever beam.

[0048] For example, Figure 1 As shown, the mass block group 20 includes four first mass blocks 21 symmetrically distributed about the center of the gyroscope structure, which are respectively recorded as the first driving mass block 21a, the second driving mass block 21b, the third driving mass block 21c and the fourth driving mass block 21d. Among them, the first driving mass block 21a and the third driving mass block 21c are arranged symmetrically about the negative direction of the X-axis; the second driving mass block 21b and the fourth driving mass block 21d are arranged symmetrically about the positive direction of the X-axis; the first driving mass block 21a and the second driving mass block 21b are arranged symmetrically about the positive direction of the Y-axis; the third driving mass block 21c and the fourth driving mass block 21d are arranged symmetrically about the negative direction of the Y-axis; the first driving mass block 21a and the fourth driving mass block 21d are arranged symmetrically about the center; the third driving mass block 21c and the second driving mass block 21b are arranged symmetrically about the center.

[0049] Optional, such as Figure 1 As shown, the mass block group 20 includes four second mass blocks 22 , and one second mass block 22 is disposed on two adjacent first mass blocks 21 .

[0050] Among them, the four second mass blocks 22 include a first Z-axis mass block 22a located on the first driving mass block 21a and the second driving mass block 21b, a second Z-axis mass block 22b located on the first driving mass block 21a and the third driving mass block 21c, a third Z-axis mass block 22c located on the third driving mass block 21c and the fourth driving mass block 21d, and a fourth Z-axis mass block 22d located on the second driving mass block 21b and the fourth driving mass block 21d.

[0051] Optionally, the driving component 30 includes multiple groups of driving electrodes (D-, D+) arranged in one-to-one correspondence with multiple first mass blocks 21, each group of driving electrodes includes a fixed driving electrode and a movable driving electrode, the fixed driving electrode is fixedly arranged on the substrate 10, and the movable driving electrode is connected to the corresponding first mass block 21.

[0052] It should be noted that each group of driving electrodes 31 may also include two driving electrodes with opposite polarities. Figure 1 As shown, D- and D+ in the figure are two driving electrodes with opposite polarities.

[0053] Optionally, the detection component 40 includes a plurality of detection electrodes arranged in one-to-one correspondence with the plurality of first mass blocks 21 and the plurality of second mass blocks 22 .

[0054] like Figure 1 As shown, the plurality of detection electrodes include X-axis detection electrodes (Xs-, Xs+) and Y-axis detection electrodes (Ys+, Ys-) arranged corresponding to the first mass blocks 21, and the X-axis detection electrodes and the Y-axis detection electrodes are used to detect the vibration of the plurality of first mass blocks 21 in the Z-axis direction perpendicular to the end surface of the substrate 10. In this embodiment, the plurality of first mass blocks 21 will generate vibration in the Z-axis direction under the action of the Coriolis force generated by the angular velocity in the X-axis or Y-axis direction.

[0055] The plurality of detection electrodes further include Z-axis detection electrodes (Zs−, Zs+) arranged corresponding to each second mass block 22 , and the Z-axis detection electrodes are used to detect vibrations of the plurality of second mass blocks 22 in the X-axis and Y-axis directions.

[0056] Alternatively, if Figure 1 As shown, each X-axis detection electrode includes a fixed X-axis detection electrode and a movable X-axis detection electrode, the fixed X-axis detection electrode is fixedly arranged on the substrate, the movable X-axis detection electrode is connected to the corresponding first mass block, and the fixed X-axis detection electrode and the movable X-axis detection electrode constitute a flat plate capacitor structure with a variable gap; the Y-axis detection electrode has the same structure as the X-axis detection electrode.

[0057] Each Z-axis detection electrode includes a fixed Z-axis detection electrode and a movable Z-axis detection electrode. The fixed Z-axis detection electrode is fixedly arranged on the substrate, and the movable Z-axis detection electrode is connected to the corresponding second mass block. The fixed Z-axis detection electrode and the movable Z-axis detection electrode form a comb-tooth capacitor structure.

[0058] Alternatively, if Figure 1 As shown, the gyroscope may further include drive detection electrodes (DS+, DS-) for detecting vibrations of the plurality of first mass blocks 21 in the Z-axis direction perpendicular to the end surface of the substrate 10. The structure of the drive detection electrodes (DS+, DS-) is the same as that of the Y-axis detection electrodes and the X-axis detection electrodes.

[0059] Optionally, the feedback component 50 includes a plurality of feedback electrodes arranged in one-to-one correspondence with the plurality of first mass blocks 21 and the plurality of second mass blocks 22 .

[0060] The multiple feedback electrodes include X-axis feedback electrodes (Xb-, Xb+) and Y-axis feedback electrodes (Yb-, Yb+) arranged corresponding to each first mass block 21, and the X-axis feedback electrodes (Xb-, Xb+) and the Y-axis feedback electrodes (Yb-, Yb+) are used to generate corresponding feedback forces to the corresponding first mass blocks 21 based on the vibrations of the multiple first mass blocks 21 in the Z-axis direction detected by the detection component 40;

[0061] The multiple feedback electrodes also include Z-axis feedback electrodes (Zb-, Zb+) arranged corresponding to each second mass block 22. The Z-axis feedback electrodes are used to generate corresponding feedback forces to the corresponding second mass blocks 22 based on the vibrations of the multiple second mass blocks 22 in the X-axis and Y-axis directions detected by the detection component.

[0062] In this embodiment, the feedback component 50 further includes a measurement and control circuit, which can form a feedback signal through the measurement and control circuit and generate a feedback force to the corresponding mass block through the feedback electrode.

[0063] Optionally, each X-axis feedback electrode includes a fixed X-axis feedback electrode and a movable X-axis feedback electrode, the fixed X-axis feedback electrode is fixedly arranged on the substrate 10, the movable X-axis detection electrode is connected to the corresponding first mass block 21, and the fixed X-axis feedback electrode and the movable X-axis feedback electrode constitute a flat plate capacitor structure with a variable gap; the Y-axis feedback electrode has the same structure as the X-axis feedback electrode.

[0064] Each Z-axis feedback electrode includes a fixed Z-axis feedback electrode and a movable Z-axis feedback electrode. The fixed Z-axis feedback electrode is fixedly arranged on the substrate 10, and the movable Z-axis feedback electrode is connected to the corresponding second mass block 22. The fixed Z-axis feedback electrode and the movable Z-axis feedback electrode constitute a comb-tooth capacitor structure.

[0065] Optionally, the frequency modulation component 60 includes a plurality of frequency modulation electrodes arranged in one-to-one correspondence with the plurality of first mass blocks 21 and the plurality of second mass blocks 22 .

[0066] The multiple frequency modulation electrodes include first frequency modulation electrodes (not shown in the figure) arranged corresponding to each first mass block 21, and the first frequency modulation electrodes are used to adjust the driving frequency of the corresponding first mass block;

[0067] The multiple frequency modulation electrodes further include Z-axis frequency modulation electrodes (Zf+, Zf−) arranged corresponding to each second mass block 22 , and the Z-axis frequency modulation electrodes are used to adjust the driving frequency of the corresponding second mass block 22 .

[0068] Optionally, first frequency modulation electrodes corresponding to the plurality of first mass blocks 21 are formed on the substrate 10 .

[0069] Each Z-axis FM electrode includes a fixed Z-axis FM electrode and a movable Z-axis FM electrode. The fixed Z-axis FM electrode is fixedly arranged on the substrate 10, and the movable Z-axis FM electrode is connected to the corresponding second mass block 22. The fixed Z-axis FM electrode and the movable Z-axis FM electrode constitute a comb-tooth capacitor structure.

[0070] It should be noted that, in the present embodiment, mass block electrodes (Pm) corresponding one-to-one to the plurality of first mass blocks 21 are also provided on the substrate 10, and areas other than other electrodes (including fixed X-axis feedback electrodes, fixed Y-axis feedback electrodes, fixed X-axis detection electrodes, fixed Y-axis detection electrodes, fixed drive electrodes and mass block electrodes) on the substrate 10 can all be set as first frequency modulation electrodes.

[0071] Figure 2 yes Figure 1 A partial structural enlarged schematic diagram of Figure 2 As shown, the gaps between the comb teeth of the comb-tooth capacitor structure formed by the fixed Z-axis frequency modulation electrode and the movable Z-axis frequency modulation electrode are the same, which is beneficial to reducing the side effect of feedback force generated between the frequency modulation comb teeth.

[0072] The technical solutions in the above embodiments of the present application have at least the following technical effects or advantages:

[0073] A micro-electromechanical system gyroscope provided by an embodiment of the present invention not only has a driving component and a detection component, which can drive the vibration of each mass block of the gyroscope in the X-axis and Y-axis directions and detect the angular velocity of the gyroscope, but also has a feedback component and a frequency modulation component. The feedback component can form a feedback signal through a measurement and control circuit for the vibration of each mass block in the X-axis, Y-axis and Z-axis directions detected by the detection component, and generate a corresponding feedback force to the corresponding mass block. The frequency modulation component can adjust the detection frequency of each mass block in the X-axis, Y-axis and Z-axis directions, realize the frequency modulation and feedback functions of the gyroscope in the X-axis, Y-axis and Z-axis directions, thereby facilitating the improvement of the sensitivity and stability of the gyroscope device.

[0074] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0075] Similarly, it should be understood that in order to streamline the present disclosure and aid in understanding one or more of the various inventive aspects, in the above description of exemplary embodiments of the present invention, various features of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. However, this disclosed method should not be interpreted as reflecting the intention that the claimed invention requires more features than those explicitly recited in each claim. More specifically, as reflected in the claims below, inventive aspects lie in less than all the features of the individual embodiments disclosed above. Therefore, the claims that follow the specific embodiment are hereby expressly incorporated into the specific embodiment, with each claim itself serving as a separate embodiment of the present invention.

[0076] It should be noted that the above embodiments illustrate the present invention rather than limit it, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbol between brackets shall not be construed as a limitation on the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "one" or "an" preceding a component does not exclude the presence of a plurality of such components. The present invention may be implemented by means of hardware comprising a number of different components and by means of a suitably programmed computer. In a unit claim enumerating a number of devices, several of these devices may be embodied by the same hardware item. The use of the words first, second, and third, etc., does not indicate any order. These words may be interpreted as names.

Claims

1. A micro-electromechanical system gyroscope, characterized in that: include: substrate; A mass block group, comprising a plurality of first mass blocks and a plurality of second mass blocks, wherein the plurality of first mass blocks are suspended on the substrate through an anchor structure, and the plurality of first mass blocks are coupled and connected to each other; the second mass blocks are arranged on the first mass blocks, and the second mass blocks are connected to the first mass blocks through a driving beam; A driving assembly, used for driving the plurality of first mass blocks to vibrate along the X-axis and Y-axis directions parallel to the end surface of the substrate; the plurality of second mass blocks vibrate along the X-axis and Y-axis directions driven by the plurality of first mass blocks; A detection component, used for detecting vibrations of the plurality of first mass blocks in a Z-axis direction perpendicular to the end surface of the substrate, and for detecting vibrations of the plurality of second mass blocks in X-axis and Y-axis directions; A feedback component, configured to form a feedback signal based on the vibrations of the plurality of first mass blocks and the plurality of second mass blocks detected by the detection component, and generate corresponding feedback forces to corresponding mass blocks; The frequency modulation component is used to adjust the detection frequency of the plurality of first mass blocks and the plurality of second mass blocks.

2. The micro-electromechanical system gyroscope according to claim 1, characterized in that: The driving component includes a plurality of groups of driving electrodes arranged in one-to-one correspondence with the plurality of first mass blocks, each group of the driving electrodes includes a fixed driving electrode and a movable driving electrode, the fixed driving electrode is fixedly arranged on the substrate, and the movable driving electrode is connected to the corresponding first mass block.

3. The micro-electromechanical system gyroscope according to claim 1, characterized in that: The detection component includes a plurality of detection electrodes arranged in one-to-one correspondence with the plurality of first mass blocks and the plurality of second mass blocks; The plurality of detection electrodes include X-axis detection electrodes and Y-axis detection electrodes arranged corresponding to the first mass blocks, and the X-axis detection electrodes and the Y-axis detection electrodes are used to detect vibrations of the plurality of first mass blocks in a Z-axis direction perpendicular to the end surface of the substrate; The plurality of detection electrodes further include Z-axis detection electrodes arranged corresponding to the respective second mass blocks, and the Z-axis detection electrodes are used to detect vibrations of the plurality of second mass blocks in the directions of the X-axis and the Y-axis.

4. The micro-electromechanical system gyroscope according to claim 3, characterized in that: Each of the X-axis detection electrodes comprises a fixed X-axis detection electrode and a movable X-axis detection electrode, wherein the fixed X-axis detection electrode is fixedly arranged on the substrate, the movable X-axis detection electrode is connected to the corresponding first mass block, and the fixed X-axis detection electrode and the movable X-axis detection electrode form a planar capacitor structure with a variable gap; the Y-axis detection electrode has the same structure as the X-axis detection electrode; Each of the Z-axis detection electrodes includes a fixed Z-axis detection electrode and a movable Z-axis detection electrode, the fixed Z-axis detection electrode is fixedly arranged on the substrate, the movable Z-axis detection electrode is connected to the corresponding second mass block, and the fixed Z-axis detection electrode and the movable Z-axis detection electrode constitute a comb-tooth capacitor structure.

5. The MEMS gyroscope according to claim 1, characterized in that: The feedback component includes a plurality of feedback electrodes arranged in one-to-one correspondence with the plurality of first mass blocks and the plurality of second mass blocks; The multiple feedback electrodes include an X-axis feedback electrode and a Y-axis feedback electrode arranged corresponding to each of the first mass blocks, and the X-axis feedback electrode and the Y-axis feedback electrode are used to generate corresponding feedback forces to the corresponding first mass blocks based on the vibrations of the multiple first mass blocks in the Z-axis direction perpendicular to the end surface of the substrate detected by the detection component; The multiple feedback electrodes also include Z-axis feedback electrodes arranged corresponding to each of the second mass blocks, and the Z-axis feedback electrodes are used to generate corresponding feedback forces to the corresponding second mass blocks based on the vibrations of the multiple second mass blocks in the X-axis and Y-axis directions detected by the detection component.

6. The MEMS gyroscope according to claim 5, characterized in that: Each of the X-axis feedback electrodes comprises a fixed X-axis feedback electrode and a movable X-axis feedback electrode, the fixed X-axis feedback electrode is fixedly arranged on the substrate, the movable X-axis detection electrode is connected to the corresponding first mass block, and the fixed X-axis feedback electrode and the movable X-axis feedback electrode form a planar capacitor structure with a variable gap; the Y-axis feedback electrode has the same structure as the X-axis feedback electrode; Each of the Z-axis feedback electrodes includes a fixed Z-axis feedback electrode and a movable Z-axis feedback electrode, the fixed Z-axis feedback electrode is fixedly arranged on the substrate, the movable Z-axis feedback electrode is connected to the corresponding second mass block, and the fixed Z-axis feedback electrode and the movable Z-axis feedback electrode constitute a comb-tooth capacitor structure.

7. The MEMS gyroscope according to claim 1, characterized in that: The frequency modulation component includes a plurality of frequency modulation electrodes arranged in one-to-one correspondence with the plurality of first mass blocks and the plurality of second mass blocks; The plurality of frequency modulation electrodes include a first frequency modulation electrode arranged corresponding to each of the first mass blocks, the first frequency modulation electrode being used to adjust the driving frequency of the corresponding first mass block; The multiple frequency modulation electrodes further include a Z-axis frequency modulation electrode arranged corresponding to each second mass block, and the Z-axis frequency modulation electrode is used to adjust the driving frequency of the corresponding second mass block.

8. The MEMS gyroscope according to claim 7, characterized in that: The substrate is provided with first frequency modulation electrodes corresponding to the plurality of first mass blocks one by one; Each of the Z-axis frequency modulation electrodes includes a fixed Z-axis frequency modulation electrode and a movable Z-axis frequency modulation electrode. The fixed Z-axis frequency modulation electrode is fixedly arranged on the substrate. The movable Z-axis frequency modulation electrode is connected to the corresponding second mass block. The fixed Z-axis frequency modulation electrode and the movable Z-axis frequency modulation electrode constitute a comb-tooth capacitor structure.

9. The MEMS gyroscope according to claim 8, characterized in that: The gaps between the comb teeth of the comb-tooth capacitor structure formed by the fixed Z-axis frequency modulation electrode and the movable Z-axis frequency modulation electrode are the same.

10. The MEMS gyroscope according to claim 1, characterized in that: The mass block group includes four of the first mass blocks and four of the second mass blocks; The four first mass blocks are symmetrically distributed about the center of the substrate, and one second mass block is disposed on two adjacent first mass blocks.

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