Simulation method and device of surface acoustic wave device and storage medium

Abstract

The invention provides a simulation method and device of a surface acoustic wave device and a storage medium. The simulation method comprises the following steps: acquiring a plurality of unit models of the surface acoustic wave device to be simulated; for each unit model, extracting a degree-of-freedom vector, a constraint vector and a system matrix of the unit model based on a finite element unit method; the constraint vector characterizes an electrical boundary condition applied to the surface acoustic wave device; determining a constraint Jacobian matrix of the unit model according to the degree-of-freedom vector and the constraint vector of the unit model; the constraint Jacobian matrix characterizes position information of a potential degree-of-freedom vector in the unit model in a system matrix; and on the basis of the constraint Jacobian matrix and the system matrix of each unit model, performing cascade processing on each unit model to obtain a simulation model of the surface acoustic wave device. Therefore, the position information of the electrode can be determined without constructing different electrode pattern coordinates for a device with each electrode pattern, the universality of the scheme is higher, and the simulation efficiency is also improved.

Description

Technical Field

[0001] The present invention relates to the technical field of surface acoustic wave simulation technology, and in particular to a simulation method, device and storage medium for a surface acoustic wave device. Background Art

[0002] See also Figure 1 The surface acoustic wave (SAW) resonator includes a supporting substrate, a piezoelectric film and a surface electrode arranged from bottom to top, wherein the surface electrode can be as follows: Figure 2 The structure shown includes an interdigital transducer (IDT) and a first reflection grid and a second reflection grid located on both sides thereof. The interdigital transducer includes a first terminal and a second terminal arranged alternately along the sound propagation direction, and a first bus bar and a second bus bar providing electrical connection, forming a periodic electrode array.

[0003] At present, the simulation of surface acoustic wave resonators is usually achieved by using the finite element method (FEM), which is specifically achieved by dividing the three-dimensional geometric structure of the device into finite element meshes and constructing finite element equations to solve all degrees of freedom on all meshes. However, the number of degrees of freedom contained in the device model (millions of degrees of freedom) far exceeds the memory and computing power of ordinary computers. Therefore, a slice model with additional periodic boundary conditions is usually used to replace the full-size device model, that is, the hierarchical cascade technology (HTC) is used to achieve the simulation of the device model.

[0004] Depending on the type of slice model, please refer to Figure 3 , HTC can be specifically divided into a longitudinal slice model and a transverse slice model. By further dividing the slice model, the unit model of the smallest unit can be obtained. The structures of these unit models are not the same, so when cascading them, it is necessary to determine their specific positions in the resonator in order to achieve accurate cascading. However, it is usually necessary to construct electrode coordinates first in order to identify the positions of each unit model, but since the surface electrode patterns of different resonators are flexible and changeable, this poses a direct challenge to the programming implementation and wide application of HCT technology. If the electrode pattern design changes each time the design is made, the code needs to consider the geometric modeling coordinate information of each design pattern in advance in the code writing. This method is unacceptable for the large-scale application of HCT technology and greatly reduces the simulation efficiency. Therefore, there is an urgent need to provide a coordinate-independent resonator patterned electrode degree of freedom identification method to improve simulation efficiency and expand its application scale. Summary of the invention

[0005] In order to solve the problems of the prior art, the embodiments of the present application provide a method, device and storage medium for simulating a surface acoustic wave device. The technical solution is as follows:

[0006] In one aspect, a method for simulating a surface acoustic wave device is provided, the method comprising:

[0007] Acquire multiple unit models of the surface acoustic wave device to be simulated;

[0008] For each of the unit models, the degree of freedom vector, constraint vector and system matrix of the unit model are extracted based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device;

[0009] Determine the constrained Jacobian matrix of the unit model according to the degree of freedom vector and the constraint vector of the unit model; the constrained Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix;

[0010] Based on the constrained Jacobian matrix and the system matrix of each unit model, the unit models are cascaded to obtain a simulation model of the surface acoustic wave device.

[0011] Optionally, the step of performing cascade processing on each of the unit models based on the constraint Jacobian matrix and the system matrix of each of the unit models to obtain a simulation model of the surface acoustic wave device includes:

[0012] Based on the imposed periodic boundary conditions, the system matrix and the constrained Jacobian matrix are rearranged to obtain a first updated system matrix and an updated Jacobian matrix, respectively; the updated Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the first updated system matrix;

[0013] Based on the updated Jacobian matrix of the unit model, elements corresponding to the potential degree of freedom vector in the first updated system matrix are accumulated to obtain a second updated system matrix;

[0014] Determine the two unit models to be cascaded;

[0015] cascading the two unit models to be cascaded based on the second updated system matrix of the two unit models to be cascaded to obtain a cascade model;

[0016] The cascade model is used as a unit model to be cascaded, and the target unit model is cascaded cyclically until there is no uncascaded unit model, thereby obtaining a simulation model of the surface acoustic wave device; the target unit model is two unit models to be cascaded.

[0017] Optionally, the degree of freedom vector includes a potential degree of freedom vector applied to an electrical terminal, a potential degree of freedom vector of an applied floating potential, and other degree of freedom vectors; the other degree of freedom vectors are degree of freedom vectors in the unit model except the potential degree of freedom vector;

[0018] The updated Jacobian matrix based on the unit model accumulates the elements corresponding to the potential degree of freedom vector in the first updated system matrix to obtain a second updated system matrix, including:

[0019] Determining attribute information of non-zero elements in the row elements of the updated Jacobian matrix;

[0020] Determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero element;

[0021] Based on the type and position information of the potential degree of freedom vector, the row and column elements corresponding to the potential degree of freedom vector in the first update system matrix are accumulated into one row and one column elements to obtain the second update system matrix.

[0022] Optionally, determining the attribute information of non-zero elements in the row elements of the updated Jacobian matrix; and determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero elements includes:

[0023] For each row element in the updated Jacobian matrix, determine whether the row elements of the updated Jacobian matrix contain only one non-zero element 1; if so, determine the potential degree of freedom vector corresponding to the non-zero element 1 as the potential degree of freedom vector of the electrical terminal; determine the position information of the potential degree of freedom vector of the electrical terminal based on the potential degree of freedom vector of the electrical terminal and the element value in the corresponding constraint vector;

[0024] Otherwise, determine whether the row elements still contain a non-zero element -1, and the row elements only contain two non-zero elements; if so, determine the potential degree of freedom vector corresponding to the non-zero element -1 as the potential degree of freedom vector of the floating potential; determine the position information of the potential degree of freedom vector of the floating potential based on the potential degree of freedom vector of the floating potential and the preset floating potential value, otherwise, stop the simulation.

[0025] Optionally, the updated Jacobian matrix based on the unit model accumulates the elements corresponding to the potential degree of freedom vector in the first updated system matrix to obtain a second updated system matrix; and determining two unit models to be cascaded includes:

[0026] Determine the two unit models to be cascaded;

[0027] In the case where there are inconsistent modeling regions between the two unit models to be cascaded, determining the degree of freedom vector corresponding to the inconsistent modeling region;

[0028] Eliminate the degree of freedom vectors corresponding to inconsistent modeling regions in the first updated system matrix of the two unit models to be cascaded using the Schur complement method, so as to obtain a third updated system matrix of the two unit models to be cascaded;

[0029] The elements corresponding to the potential degree of freedom vector in the third updated system matrix are accumulated based on the updated Jacobian matrix of the unit model to obtain the second updated system matrix.

[0030] Optionally, the second updating system matrix based on the two unit models to be cascaded, cascading the two unit models to be cascaded to obtain a cascade model, includes:

[0031] Expanding the second update system matrices of the two unit models to be cascaded respectively to align the degree of freedom vectors on the common cascade surface of the two unit models to be cascaded, and obtaining the fourth update system matrix of the two unit models to be cascaded;

[0032] Based on the fourth updated system matrix of the two unit models to be cascaded, the two unit models to be cascaded are cascaded to obtain a cascade model.

[0033] Optionally, the obtaining of a plurality of unit models of the surface acoustic wave device to be simulated includes:

[0034] Acquire multiple transverse slice models of the surface acoustic wave device to be simulated;

[0035] Slicing the plurality of transverse slice models respectively to obtain a plurality of unit models corresponding to each transverse slice model;

[0036] The method of performing cascade processing on each unit model based on the constraint Jacobian matrix and the system matrix of each unit model to obtain a simulation model of the surface acoustic wave device includes:

[0037] Based on the constraint Jacobian matrix and the system matrix of each unit model, the unit models located in the same row and having the same structure in multiple transverse slice models are sequentially cascaded to obtain multiple cascaded unit models;

[0038] A plurality of the cascade unit models are cascaded to obtain a simulation model of the surface acoustic wave device.

[0039] On the other hand, a simulation device for a surface acoustic wave device is provided.

[0040] An acquisition module, used for acquiring multiple unit models of the surface acoustic wave device to be simulated;

[0041] An extraction module, for extracting the degree of freedom vector, constraint vector and system matrix of each unit model based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device;

[0042] A determination module, used to determine the constrained Jacobian matrix of the unit model according to the degree of freedom vector and the constraint vector of the unit model; the constrained Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix;

[0043] The cascade module is used to perform cascade processing on each unit model based on the constrained Jacobian matrix and the system matrix of each unit model to obtain a simulation model of the surface acoustic wave device.

[0044] On the other hand, an electronic device is provided, comprising a processor and a memory, wherein the memory stores at least one instruction or at least one program, and the at least one instruction or the at least one program is loaded and executed by the processor to implement the simulation method of a surface acoustic wave device in any of the above aspects.

[0045] On the other hand, a computer-readable storage medium is provided, in which at least one instruction or at least one program is stored, and the at least one instruction or the at least one program is loaded and executed by a processor to implement a simulation method of a surface acoustic wave device as described in any of the above aspects.

[0046] On the other hand, a computer program product or a computer program is provided, the computer program product or the computer program includes computer instructions, the computer instructions are stored in a computer-readable storage medium. A processor of an electronic device reads the computer instructions from the computer-readable storage medium, and the processor executes the computer instructions, so that the electronic device performs the simulation method of the surface acoustic wave device of any one of the above aspects.

[0047] The embodiment of the present application obtains multiple unit models of the surface acoustic wave device to be simulated; for each unit model, the degree of freedom vector, constraint vector and system matrix of the unit model are extracted based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device; the constraint Jacobian matrix of the unit model is determined according to the degree of freedom vector and constraint vector of the unit model; the constraint Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix; based on the constraint Jacobian matrix and system matrix of each unit model, the unit models are cascaded to obtain the simulation model of the surface acoustic wave device. By first determining the constraint Jacobian matrix of the unit model, the position of the potential degree of freedom to which the electrical boundary conditions need to be added in the system matrix can be determined, so that when the system matrix is ​​transformed, the elements in the system matrix corresponding to the above potential degree of freedom can be quickly and accurately accumulated to realize subsequent simulation. Compared with the existing modeling method that requires different electrode coordinates to be established for each electrode pattern, it has the advantages of high simulation efficiency and strong universality. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0049] Figure 1 is a cross-sectional view of a surface acoustic wave device provided in an embodiment of the present application;

[0050] Figure 2 is a top view of a surface electrode provided in an embodiment of the present application;

[0051] Figure 3 is a top view of an interdigital transducer provided in an embodiment of the present application;

[0052] Figure 4 It is a three-dimensional model diagram of a surface acoustic wave device provided in an embodiment of the present application;

[0053] Figure 5 It is a schematic diagram of an implementation environment provided by an embodiment of the present application;

[0054] Figure 6 It is a flow chart of a simulation method of a surface acoustic wave device provided in an embodiment of the present application;

[0055] Figure 7 It is a schematic diagram of the cascading process of a unit model provided in an embodiment of the present application.

[0056] Figure 8 It is a structural block diagram of a simulation device for a surface acoustic wave device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0057] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0058] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or server that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0059] See also Figure 5 , which is a schematic diagram of an implementation environment provided by an embodiment of the present application, the implementation environment includes a terminal 50 and a simulation module 501 located on the terminal. The simulation module 501 implements the simulation process of the surface acoustic wave device, such as the segmentation of the surface acoustic wave device model, the construction of the system matrix equation, the processing of the system matrix, etc., and can finally simulate the required wave number domain vibration mode distribution results and the admittance of the device.

[0060] The terminal 50 includes but is not limited to mobile phones, computers, intelligent voice interaction devices, smart home appliances, vehicle terminals, aircraft, etc. The terminal 110 is installed with client software such as an application (Application, referred to as App) with content display function, which can be an independent application or a subroutine in the application.

[0061] It should be noted that the server involved in the embodiments of the present application can be an independent physical server, a server cluster or a distributed system composed of multiple physical servers, or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, CDN (Content Delivery Network) and big data and artificial intelligence platforms.

[0062] See also Figure 6 , which is a schematic flow chart of a simulation method for a surface acoustic wave device provided in an embodiment of the present application, which method can be applied to Figure 5 The simulation module of the surface acoustic wave device in the embodiment. It should be noted that this specification provides the method operation steps as described in the embodiment or flowchart, but more or fewer operation steps may be included based on routine or non-creative labor. The order of steps listed in the embodiment is only one way of executing the steps among many orders, and does not represent the only execution order. When the system or product is executed in practice, it can be executed in sequence or in parallel according to the method shown in the embodiment or the drawings (for example, in a parallel processor or multi-threaded processing environment). Specifically, Figure 6 As shown, the method may include:

[0063] S601: Acquire multiple unit models of a surface acoustic wave device to be simulated.

[0064] In the embodiment of the present application, step S601 can be specifically described as follows: first construct Figure 1 and 2 The device model of the surface acoustic wave device shown, wherein the structure of the surface electrode includes but is not limited to Figure 2 The structure shown in FIG. 1 may include more than one reflector on each side of the interdigitated electrode, or the reflector may include a plurality of suspended potentials ( Figure 2 Each reflector in the grating corresponds to a floating potential). For details, please refer to Figure 4 , the device model can be sliced ​​horizontally or vertically to form corresponding multiple horizontal slice models or multiple vertical slice models. Optionally, the multiple vertical slice models can be sliced ​​separately to obtain multiple unit models corresponding to each vertical slice model. It is also possible to slice the multiple horizontal slice models separately to obtain multiple unit models corresponding to each horizontal slice model. The embodiment of the present application mainly describes the simulation scheme of the horizontal slice model. The simulation scheme of the vertical slice model is the same as that of the horizontal slice model, except that the structural type of the unit model and the location of applying the periodic boundary conditions are different, which will not be elaborated here.

[0065] For example, please refer to Figure 4 , further slicing and segmenting the transverse slice model can obtain at least 7 unit models, a total of 4 types of unit models, namely, a unit model without surface electrodes on the surface, a unit model with bus bars on the surface, a unit model with only one electrical terminal on the surface, and a unit model with two electrical terminals on the surface. Optionally, the present application is not limited to the above 7-segment slicing method, and other slicing methods, such as 8-segment, 9-segment, etc., can be used according to different surface electrode structures.

[0066] S603: For each of the unit models, extract the degree of freedom vector, constraint vector and system matrix of the unit model based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device.

[0067] Exemplarily, the above device model is a three-dimensional model constructed based on a physical field. The unit model is meshed, and the mesh area of ​​the unit model is analyzed based on the finite element method (FEM). The stiffness matrix k and mass matrix M of the minimum mesh can be extracted, and the following finite element equation can be obtained:

[0068] A=K-ω 2 M

[0069] Wherein, ω represents the angular frequency parameter.

[0070] It can also be expressed as the following finite element equation:

[0071] A·X=F

[0072] A is the system matrix, with a size of N×N (N is the total number of degrees of freedom). F is the load vector, which is generated by meshing the unit structure, and when the linear constraint is not applied, the load vector is a zero vector; X is the degree of freedom vector.

[0073] Specifically, in the frequency domain finite element method, after the unit model is meshed, there are four physical field solutions to be solved at each grid point: (u, v, w, φ) T , where u, v, w are the X, Y, and Z components of the particle displacement respectively; φ is the electric potential at the grid point. The variables to be solved at all grid points are called degrees of freedom, and are arranged in a certain order as a degree of freedom vector.

[0074] In the embodiment of the present application, the electrical boundary conditions can be divided into two types according to the types of electrical terminals applied, one is a given potential applied to the electrical terminals (i.e., including the first terminal and the second terminal), and the other is an unknown potential applied to the floating potential (i.e., including the first reflector and the second reflector). Therefore, the degree of freedom vector of the unit model can include the potential degree of freedom vector applied to the electrical terminals, the potential degree of freedom vector of the applied floating potential, and the remaining degree of freedom vectors; the remaining degree of freedom vectors are the degree of freedom vectors in the unit model except the potential degree of freedom vector.

[0075] S605: Determine a constrained Jacobian matrix of the unit model according to the degree of freedom vector and the constraint vector of the unit model; the constrained Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix.

[0076] In the embodiment of the present application, for the finite element simulation model of the surface acoustic wave device, there are two common types of electrical terminals applied to the potential degree of freedom. The first is an electrical terminal with a given potential (i.e., including a first terminal and a second terminal), and the second is a floating potential with an unknown potential (i.e., including a first reflection grid and a second reflection grid).

[0077] Assuming that the given potential applied to the electrical terminal is set to V and the floating potential is set to U, the process of determining the constraint Jacobian matrix is ​​described below using matrix language.

[0078] For a unit model including only electrical terminals, the matrix equation of the constraint Jacobian matrix N determined based on the degree of freedom vector X and the constraint vector L can be expressed as follows:

[0079]

[0080] in, L=(V,…,V) T .

[0081] In the degrees of freedom vector X, is the potential freedom vector in which a given potential (V) is applied, i.e., φ 1,2,…,m =V. X1 is the remaining degree of freedom vector, and m is an integer greater than 2.

[0082] Correspondingly, the matrix equation corresponding to the system matrix of the unit model can be expressed as follows:

[0083]

[0084] Among them, q 1,2,…,m The potential degrees of freedom are The corresponding charge, q = {q1, q2, ..., q m}, F1 represents the remaining load vectors (i.e. the load vectors except q).

[0085] For the unit model including only the floating potential, the matrix equation of the constraint Jacobian matrix N determined based on the degree of freedom vector X and the constraint vector L can be expressed as follows:

[0086]

[0087] Where X = (X2, φ) T , L=(0,…,0) T .

[0088] In the degree of freedom vector X, φ={φ1,φ2,…,φ m} is the potential freedom vector in which a suspension potential simulating a short circuit is applied (the suspension potential is set to U), that is, -U+φ 1,2,…,m = 0. X2 is the remaining degree of freedom vector.

[0089] Correspondingly, the matrix equation corresponding to the system matrix of the unit model can be expressed as follows:

[0090]

[0091] Among them, q 1,2,…,m The potential degrees of freedom φ are 1,2,...,m The corresponding charge, q = {q1, q2, ..., q m}.

[0092] The general equation corresponding to the above constraint Jacobian matrix can be expressed as follows:

[0093]

[0094] in, are the potential freedom vectors of two given potentials (V1, V2), φ1={φ1,φ2,…,φ M},φ2={φ M+1 ,φ M+2 ,…,φ M+N} are the potential freedom degree vectors in which two floating potentials are applied (the floating potentials are set to U1 and U2 respectively), M is an integer greater than 2, and N is an integer greater than 2.

[0095] It can be seen that the constraint Jacobian matrix is ​​specifically a matrix generated according to the number of degrees of freedom to be constrained, and then based on the characteristics of the constraint Jacobian matrix, the specific position of the constrained degrees of freedom can be determined. The judgment process is described in detail below.

[0096] S607: Based on the constrained Jacobian matrix and the system matrix of each unit model, cascade processing is performed on each unit model to obtain a simulation model of the surface acoustic wave device.

[0097] In an exemplary embodiment, step S607 may specifically include: based on the applied periodic boundary conditions, rearranging the system matrix and the constrained Jacobian matrix to obtain a first updated system matrix and an updated Jacobian matrix, respectively; the updated Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the first updated system matrix; based on the updated Jacobian matrix of the unit model, accumulating the elements corresponding to the potential degree of freedom vector in the first updated system matrix to obtain a second updated system matrix; determining two unit models to be cascaded; based on the second updated system matrix of the two unit models to be cascaded, cascading the two unit models to be cascaded to obtain a cascaded model; using the cascaded model as the unit model to be cascaded, cyclically cascading the target unit model until there are no uncascaded unit models, to obtain a simulation model of the surface acoustic wave device; the target unit model is the two unit models to be cascaded.

[0098] For example, since the periodic boundary condition can specifically refer to the periodic boundary condition on the non-cascade surface of the unit model, please refer to Figure 7 Taking the unit model A as an example, the degree of freedom vector of the periodic boundary condition of the cascade surface can be respectively expressed as the front boundary degree of freedom vector X Af and the back boundary degree of freedom vector X Ab ; The degree of freedom vectors of the periodic boundary conditions on the non-cascade surface can be recorded as the left boundary degree of freedom vector X l ={x l1 ,x l2 ,…,x lm} and the right boundary freedom vector X r ={x r1 ,x r2 ,…,x rm}, and satisfy the equation system:

[0099] x l1,l2,…,lm =x r1,r2,…,rm

[0100] Then the corresponding constraint Jacobian matrix N and constraint vector L have the following form:

[0101]

[0102] Where X=(X0,X l ,X r ) T , L=(0,…,0) T, X0 represents the total degree of freedom vector of unit model A minus X l , X r The degrees of freedom vector other than .

[0103] Correspondingly, the matrix equation corresponding to the system matrix of the unit model can be expressed as follows:

[0104]

[0105] Where f={f1,f2,…,f m}.

[0106] It should be noted that, from the above formula, it can be seen that by adding the degrees of freedom on the periodic boundary conditions on both sides, the non-zero load vectors on the right side of the corresponding equation will cancel each other out, and can further participate in the subsequent steps. The above is only a simple example of the process of matrix processing the applied left and right boundary conditions separately. In fact, in this scheme, if there are non-cascade surface (i.e. left and right) periodic boundary conditions, as well as the boundary conditions of the electrical terminal or floating potential in the above example, then according to the arrangement of the degree of freedom vectors corresponding to the above boundary conditions, the corresponding constraint Jacobian matrix and system matrix are extracted according to the constraint vector, which are recorded as the updated Jacobian matrix and the first updated system matrix respectively.

[0107] Since the constraint Jacobian matrix corresponding to the unit model is specifically determined based on the arrangement of the degree of freedom vector and the constraint vector, when the arrangement of the degree of freedom vector or any one of the constraint vectors changes, the constraint Jacobian matrix corresponding to the unit model will be updated.

[0108] In the embodiment of the present application, the process of specifically determining the position of the potential degree of freedom vector, thereby realizing the accumulation processing of the first update system matrix, can be described as follows: determining the attribute information of the non-zero elements in the row elements of the updated Jacobian matrix; determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero elements; based on the type and position information of the potential degree of freedom vector, accumulating the row and column elements corresponding to the potential degree of freedom vector in the first update system matrix into 1 row and 1 column elements to obtain the second update system matrix. Specifically, the attribute information of the non-zero elements may include the number and position of the non-zero elements.

[0109] In an exemplary embodiment, the determining of the attribute information of the non-zero elements in the row elements of the updated Jacobian matrix; determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero elements, includes: for each row element in the updated Jacobian matrix, judging whether the row elements of the updated Jacobian matrix contain only one non-zero element 1; if so, determining the potential degree of freedom vector corresponding to the non-zero element 1 as the potential degree of freedom vector of the electrical terminal; determining the position information of the potential degree of freedom vector of the electrical terminal based on the potential degree of freedom vector of the electrical terminal and the element value in the corresponding constraint vector; otherwise, judging whether the row elements also contain a non-zero element -1, and the row elements contain only two non-zero elements; if so, determining the potential degree of freedom vector corresponding to the non-zero element -1 as the potential degree of freedom vector of the floating potential; determining the position information of the potential degree of freedom vector of the floating potential based on the potential degree of freedom vector of the floating potential and a preset floating potential value, otherwise, stopping the simulation. Based on this, the position of each potential degree of freedom in the system matrix can be identified, that is, which row and column of the potential degree of freedom is in the system matrix, so that when the system matrix is ​​subsequently transformed and accumulated, the corresponding elements of each potential degree of freedom in the system matrix can be accurately calculated, thereby improving the simulation efficiency. Optionally, the above two judgment processes have no substantial order of precedence, and usually only include two cases, one is that there is only one non-zero element 1 in the row, and the other is that there is only one non-zero element 1 and non-zero element -1 in the row, so the judgment of these two cases can be in no particular order.

[0110] Please refer to the general equation corresponding to the above constrained Jacobian matrix. It can be seen that each row of the constrained Jacobian matrix corresponds to a potential degree of freedom that needs to be identified. If there is only one non-zero element 1 among all the elements in the row, then the potential degree of freedom belongs to the electrical terminal of the given potential. Furthermore, by comparing the element value of the constraint vector corresponding to the potential degree of freedom (the value is equal to the set potential size), the number of the electrical terminal can be further distinguished; if there are only two non-zero elements among all the elements in the row, and their values ​​are 1 and -1 respectively, then the potential degree of freedom belongs to the floating potential degree of freedom. Furthermore, by comparing the position where the non-zero element -1 appears (-1 should be multiplied by the unknown potential U generated by the floating potential), the number of the floating potential can be distinguished.

[0111] Since the position of the non-zero element 1 in each row of the constrained Jacobian matrix indicates the position of the potential degree of freedom in the total degree of freedom vector, the above identification method based on the constrained Jacobian matrix and the constraint vector does not require any coordinate information of the patterned electrode. As long as the relevant electrical boundaries are correctly applied in the model, direct identification can be performed through the constrained Jacobian matrix.

[0112] It should be noted that this solution is aimed at a unit model with surface electrodes. If there are surface electrodes on the unit model, there will be a corresponding constrained Jacobian matrix. The system matrix corresponding to the unit model can be transformed based on the constrained Jacobian matrix. Otherwise, the system matrix of the unit model can be directly transformed in a conventional manner. Therefore, before step S603, it also includes a process of screening multiple unit models of the surface acoustic wave device to be simulated, that is, screening out the first unit model, and performing subsequent steps S603-S605 on the first unit model. This is not necessary for the second unit model, wherein the first unit model can be a unit model with an electrical terminal on the surface (such as a first electrical terminal, a second electrical terminal, a first floating potential and a second floating potential), and the second unit model can be a unit model other than the first unit model.

[0113] In an exemplary embodiment, the degree of freedom vector includes the potential degree of freedom vector applied to the electrical terminal, the potential degree of freedom vector of the applied floating potential, the boundary degree of freedom vector applied to the cascade surface, and the remaining degree of freedom vector; the remaining degree of freedom vector is the degree of freedom vector of the unit model except the potential degree of freedom vector and the boundary degree of freedom on the cascade surface. For details, please continue to refer to Figure 7 The unit models to be cascaded can be unit model A and unit model B. The boundary degree of freedom vectors on the cascade surface of the two include the front boundary degree of freedom vector X f and the back boundary degree of freedom vector X b .

[0114] In order to further improve the simulation efficiency, we can first determine whether there are inconsistent modeling areas in the two unit models to be cascaded. If so, we can first use the Schur complement method to eliminate the degrees of freedom of the inconsistent modeling areas, and then perform accumulation processing based on the eliminated system matrix. Figure 7 , there are inconsistent areas between unit model A and unit model B ( Figure 7 The electrode structure in the black coil in the unit model A), the degree of freedom corresponding to this inconsistent area can be recorded as X c, and it needs to be eliminated first through a Schur complement. Specifically, it can be explained as follows: the updated Jacobian matrix based on the unit model accumulates the elements corresponding to the potential degree of freedom vector in the first updated system matrix to obtain a second updated system matrix; determine the two unit models to be cascaded, including: determine the two unit models to be cascaded; in the case that there are inconsistent modeling areas in the two unit models to be cascaded, determine the degree of freedom vector corresponding to the inconsistent modeling area; use the Schur complement method to eliminate the degree of freedom vector corresponding to the inconsistent modeling area in the first updated system matrix of the two unit models to be cascaded, and obtain the third updated system matrix of the two unit models to be cascaded; based on the updated Jacobian matrix of the unit model, the elements corresponding to the potential degree of freedom vector in the third updated system matrix are accumulated to obtain the second updated system matrix. Optionally, before using the Schul complement method to eliminate the degree of freedom vectors corresponding to the inconsistent modeling areas in the two unit models to be cascaded, it is necessary to update the corresponding Jacobian matrix to eliminate the potential degrees of freedom corresponding to the inconsistent modeling areas in the Jacobian matrix, so as to ensure that the potential degrees of freedom indicated in the updated Jacobian matrix are in the same order as the potential degrees of freedom in the third updated system matrix. Therefore, the updated Jacobian matrix based on the unit model accumulates the elements corresponding to the potential degree of freedom vector in the third updated system matrix to obtain the second updated system matrix, including: if the degree of freedom vector corresponding to the inconsistent modeling area includes the potential degree of freedom vector, then the updated Jacobian matrix is ​​updated based on the potential degree of freedom vector eliminated by the Schul complement method to obtain the target Jacobian matrix; based on the target Jacobian matrix, the elements corresponding to the potential degree of freedom vector in the third updated system matrix are accumulated to obtain the second updated system matrix.

[0115] In another exemplary embodiment, the second updated system matrix based on the two unit models to be cascaded is used to cascade the two unit models to be cascaded to obtain a cascade model, including: in the case where there are inconsistent modeling areas in the two unit models to be cascaded, determining the degree of freedom vector corresponding to the inconsistent modeling area; using the Schur complement method to eliminate the degree of freedom vector corresponding to the inconsistent modeling area in the second updated system matrix of the two unit models to be cascaded, to obtain a third updated system matrix of the two unit models to be cascaded; based on the third updated system matrix of the two unit models to be cascaded, the two unit models to be cascaded are cascaded to obtain a cascade model. This embodiment can also be based on the second updated system matrix based on the updated constraint Jacobian matrix to perform corresponding processing, and the position information of the potential degree of freedom in the constraint Jacobian matrix can no longer be used later, and then the unit model can be eliminated and cascaded to further improve the simulation efficiency.

[0116] The following is a brief description of the Schur complement operation:

[0117] The finite element equation of the device model is expressed as follows:

[0118] A·X=F

[0119] Where X is the degree of freedom vector, which is a vector formed by the arrangement of all unknowns (also known as degrees of freedom) that need to be solved in the final finite element simulation, and F is the load vector.

[0120] By arranging the non-zero elements of the load vector together, the load vector can be rearranged to (0, F0), and the corresponding degree of freedom vector is also rearranged to (X sc ,X re ), where X sc That is the part to be eliminated. Accordingly, the above finite element system equation can be rewritten as:

[0121]

[0122] Applying Schur complement to the above equation, we can get the new equation:

[0123] B.X re =F0

[0124] It can be seen that after applying Schur's complement to the degree of freedom vector X, the number of degrees of freedom to be solved will decrease, and the matrix will change from the A matrix to the B matrix of a smaller size. sc The corresponding load vector element should be zero.

[0125] In both models, there are electrical freedom vectors belonging to the electrical terminals (V1, V2) with given potentials, which are denoted as and In model B, they are respectively and At the same time, part of the degree of freedom vectors in both models belong to the suspended potential degree of freedom, denoted as φ A and φ B , the front boundary degree of freedom vectors of the two models can be recorded as X Af and X Bf , the back boundary degree of freedom vector X Ab and X Bb ; Then, the finite element equations corresponding to unit models A and B can be expressed as follows:

[0126]

[0127] The degrees of freedom X corresponding to the inconsistent modeling area c After elimination, the finite element equations of unit models A and B can be expressed as follows:

[0128]

[0129] Among them, unit model B contains periodic boundary conditions and electrical boundary conditions, see Figure 7 , the degree of freedom vector on the back grid of unit model B is subject to the rear boundary condition, which can be recorded as X Bb , the electrical boundary condition with a given potential is applied in front of the unit model B, which can be expressed as Depending on the structure of the different unit models divided, the types of degrees of freedom contained and the applied boundary conditions are different, so the corresponding system matrices and finite element equations are also different. However, in this scheme, the applied boundary conditions are nothing more than the electrical boundary conditions and periodic boundary conditions exemplified above.

[0130] Optionally, A in the above finite element equation A2 That is, the third updated system matrix corresponding to unit model A, B B2 That is, the third updated system matrix corresponding to unit model B. Optionally, the third updated system matrix may be a matrix that has not been accumulated, and the third updated system matrix is ​​subsequently accumulated based on the updated Jacobian matrix of the unit model to further obtain the accumulated second updated system matrix of the two unit models.

[0131] Among them, the finite element equations after the accumulation of unit models A and B can be expressed as follows:

[0132]

[0133] Among them, A′ A That is, the second updated system matrix corresponding to the unit model A, A′ B That is the second updated system matrix corresponding to unit model B.

[0134] Specifically, taking unit model A as an example, its corresponding accumulation process can be described in matrix language as follows:

[0135] A A (abbreviated as A) (Abbreviated as There are m elements, and the remaining degree of freedom vector is recorded as x, which has (nm); n is greater than m, and n and m are both positive integers. The corresponding -q A1 Taking the accumulation of -q as an example, we first rewrite it into a block matrix form:

[0136]

[0137] The second row of the block matrix has the following relationship:

[0138]

[0139] Among them, P ij represents the i-th row and j-th column of the block matrix P; Q ij represents the i-th row and j-th column of the block matrix Q; x j Represents the j-th element of vector x.

[0140] Substituting in, and summing the subscript i, we have:

[0141]

[0142] For the first row of the block matrix, Substitute:

[0143]

[0144] Combining the above two formulas, we can get the accumulated system equation:

[0145]

[0146] Where p is the 1-row (nm)-column matrix obtained by adding all the rows of the P block matrix together:

[0147]

[0148] Where q is a 1-row, 1-column matrix (a number) obtained by adding all rows and columns of the Q block matrix together:

[0149]

[0150] Where n is the (nm) row and 1 column matrix obtained by adding all the columns of the N block matrix together:

[0151]

[0152] The same steps are performed for other potential degrees of freedom, and the following final form can be obtained after accumulation:

[0153]

[0154] The same is true for unit model B, which will not be elaborated here.

[0155] In X Ab =X BfUnder the condition of , the above-mentioned second update system matrix is ​​expanded, that is, the matrix elements in the expanded rows and columns in the second update system matrix are all 0, so as to align the degree of freedom vectors on the common cascade surface, and the second update system matrices of the two unit models to be cascaded are expanded respectively to align the degree of freedom vectors on the common cascade surface of the two unit models to be cascaded, so as to obtain the fourth update system matrix of the two unit models to be cascaded; based on the fourth update system matrix of the two unit models to be cascaded, the two unit models to be cascaded are cascaded to obtain a cascaded model.

[0156] After the expansion process, the fourth updated system matrix A″ of the unit models A and B can be obtained as follows: A and A″ B The corresponding finite element equations are:

[0157]

[0158] When φ A and φ B When they belong to the same suspension potential (the same applies to different suspension potentials, just add up the suspension potentials and list them in the degree of freedom vector), that is, U A =U B =U, the system matrix A″ corresponding to the cascaded model C after cascading C The finite element equation can be expressed as follows:

[0159]

[0160] Among them, the system matrix A″ C The finite element equation is the same as the above A″ A and A″ B The corresponding finite element equations have the following matrix relationship:

[0161] A″ C =A″ A +A″ B

[0162] X Cf =X Af

[0163] X Csc =X Ab =X Bf

[0164] X Cb =X Bb

[0165] Q C1 =∑q A1 +Σq B1

[0166] Q c2 =Σq A2 +∑q B2

[0167] Q φC =∑q φA +∑q φB

[0168] Later, you can Csc After some degrees of freedom are eliminated by Schur complement, a new cascade unit C can be obtained. The degree of freedom vector and finite element system equation of this unit are consistent with the unit model A or B before the cascade, that is, the finite element equation corresponding to the new cascade unit C can be expressed as:

[0169]

[0170] Therefore, a cascade loop can be constructed until the complete device model is cascaded.

[0171] In an exemplary embodiment, the unit models are cascaded based on the constrained Jacobian matrix and the system matrix of each unit model to obtain a simulation model of the surface acoustic wave device, including: based on the constrained Jacobian matrix and the system matrix of each unit model, the unit models located in the same row and with equal structures in multiple transverse slice models are cascaded in sequence to obtain multiple cascaded unit models; the multiple cascaded unit models are cascaded to obtain the simulation model of the surface acoustic wave device. The above only takes the transverse slice model as an example. In fact, it can also be used for the longitudinal slice model. The simulation efficiency can be greatly improved based on this two-step cascade method.

[0172] See also Figure 4 Taking the cascade of transverse slice models as an example, the complete transverse model will be divided into different modules (called unit models) according to different sections of the electrode part. Each unit model can first be cascaded by its own periodic unit model. In this process, the two unit models participating in the cascade are completely consistent, that is, Figure 4 The first cascade process is shown in FIG. When all unit blocks have completed their own cascade, different blocks are cascaded separately, as shown in FIG. Figure 4 The second cascade process shown in the figure finally forms a complete transverse slice model and performs an admittance solution. The admittance solution process can be a conventional solution process and will not be described in detail here.

[0173] The embodiment of the present application proposes a "coordinate-independent" method for identifying the degrees of freedom of patterned electrodes, which improves the existing HCT technology. Specifically, by first determining the constrained Jacobian matrix corresponding to the unit model, the position information of the potential degrees of freedom of the unit model can be determined. Subsequently, based on this, the system matrix can be transformed and processed to solve the corresponding simulation results. This method can be widely used in the simulation and design of surface acoustic wave resonators without the need for designers using this algorithm to perform separate adaptation work on the code for different device designs. While fully utilizing the simulation time consumption and memory usage advantages of the HCT algorithm, the present invention further improves the universality of the algorithm and can meet more flexible and changeable simulation needs.

[0174] Corresponding to the simulation methods of the surface acoustic wave device provided in the above-mentioned embodiments, the embodiment of the present application also provides a simulation device of the surface acoustic wave device. Since the simulation device of the surface acoustic wave device provided in the embodiment of the present application corresponds to the simulation methods of the surface acoustic wave device provided in the above-mentioned embodiments, the implementation methods of the simulation methods of the aforementioned surface acoustic wave devices are also applicable to the simulation device of the surface acoustic wave device provided in this embodiment, and will not be described in detail in this embodiment.

[0175] See also Figure 8 , which is a schematic diagram of the structure of a simulation device for a surface acoustic wave device provided in an embodiment of the present application, the device has the function of implementing the simulation method for the surface acoustic wave device in the above method embodiment, and the function can be implemented by hardware, or by hardware executing corresponding software. Figure 7 As shown, the simulation device 800 of the surface acoustic wave device may include:

[0176] An acquisition module 801 is used to acquire multiple unit models of a surface acoustic wave device to be simulated;

[0177] An extraction module 803 is used to extract the degree of freedom vector, constraint vector and system matrix of each unit model based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device;

[0178] A determination module 805 is used to determine the constrained Jacobian matrix of the unit model according to the degree of freedom vector and the constraint vector of the unit model; the constrained Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix;

[0179] The cascade module 807 is used to perform cascade processing on the unit models based on the constrained Jacobian matrix and the system matrix of each unit model to obtain a simulation model of the surface acoustic wave device.

[0180] In an exemplary embodiment, the cascade module is used to rearrange the system matrix and the constraint Jacobian matrix based on the applied periodic boundary conditions to obtain a first updated system matrix and an updated Jacobian matrix, respectively; the updated Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the first updated system matrix;

[0181] Based on the updated Jacobian matrix of the unit model, elements corresponding to the potential degree of freedom vector in the first updated system matrix are accumulated to obtain a second updated system matrix;

[0182] Determine the two unit models to be cascaded;

[0183] cascading the two unit models to be cascaded based on the second updated system matrix of the two unit models to be cascaded to obtain a cascade model;

[0184] The cascade model is used as a unit model to be cascaded, and the target unit model is cascaded cyclically until there is no uncascaded unit model, thereby obtaining a simulation model of the surface acoustic wave device; the target unit model is two unit models to be cascaded.

[0185] In an exemplary embodiment, the degree of freedom vector includes a potential degree of freedom vector applied to an electrical terminal, a potential degree of freedom vector of an applied floating potential, and other degree of freedom vectors; the other degree of freedom vectors are degree of freedom vectors in the unit model except the potential degree of freedom vector;

[0186] A cascade module, used to determine the attribute information of the non-zero elements in the row elements of the updated Jacobian matrix;

[0187] Determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero element;

[0188] Based on the type and position information of the potential degree of freedom vector, the row and column elements corresponding to the potential degree of freedom vector in the first update system matrix are accumulated into one row and one column elements to obtain the second update system matrix.

[0189] In an exemplary embodiment, the cascade module is used to determine, for each row element in the updated Jacobian matrix, whether the row elements of the updated Jacobian matrix contain only one non-zero element 1; if so, determine the potential degree of freedom vector corresponding to the non-zero element 1 as the potential degree of freedom vector of the electrical terminal; determine the position information of the potential degree of freedom vector of the electrical terminal based on the potential degree of freedom vector of the electrical terminal and the element value in the corresponding constraint vector;

[0190] Otherwise, determine whether the row elements still contain a non-zero element -1, and the row elements only contain two non-zero elements; if so, determine the potential degree of freedom vector corresponding to the non-zero element -1 as the potential degree of freedom vector of the floating potential; determine the position information of the potential degree of freedom vector of the floating potential based on the potential degree of freedom vector of the floating potential and the preset floating potential value, otherwise, stop the simulation.

[0191] In an exemplary embodiment, the cascading module is used to determine two unit models to be cascaded;

[0192] In the case where there are inconsistent modeling regions between the two unit models to be cascaded, determining the degree of freedom vector corresponding to the inconsistent modeling region;

[0193] Eliminate the degree of freedom vectors corresponding to inconsistent modeling regions in the first updated system matrix of the two unit models to be cascaded using the Schur complement method, so as to obtain a third updated system matrix of the two unit models to be cascaded;

[0194] The elements corresponding to the potential degree of freedom vector in the third updated system matrix are accumulated based on the updated Jacobian matrix of the unit model to obtain the second updated system matrix.

[0195] In an exemplary embodiment, the cascade module is used to respectively expand the second update system matrices of the two unit models to be cascaded, so as to align the degree of freedom vectors belonging to the common cascade surface of the two unit models to be cascaded, and obtain the fourth update system matrix of the two unit models to be cascaded;

[0196] Based on the fourth updated system matrix of the two unit models to be cascaded, the two unit models to be cascaded are cascaded to obtain a cascade model.

[0197] In an exemplary embodiment, the acquisition module is used to acquire a plurality of transverse slice models of the surface acoustic wave device to be simulated;

[0198] Slicing the plurality of transverse slice models respectively to obtain a plurality of unit models corresponding to each transverse slice model;

[0199] A cascading module, used for sequentially cascading unit models located in the same row and having the same structure in a plurality of transverse slice models based on the constraint Jacobian matrix and the system matrix of each unit model, to obtain a plurality of cascaded unit models;

[0200] A plurality of the cascade unit models are cascaded to obtain a simulation model of the surface acoustic wave device.

[0201] It should be noted that the device provided in the above embodiment, when implementing its functions, is only illustrated by the division of the above functional modules. In actual applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device is divided into different functional modules to complete all or part of the functions described above. In addition, the device and method embodiments provided in the above embodiment belong to the same concept, and the specific implementation process is detailed in the method embodiment, which will not be repeated here.

[0202] An embodiment of the present application provides an electronic device, which includes a processor and a memory, wherein the memory stores at least one instruction or at least one program, and the at least one instruction or the at least one program is loaded and executed by the processor to implement any one of the surface acoustic wave device simulation methods provided in the above method embodiments.

[0203] The memory can be used to store software programs and modules. The processor executes various functional applications and data processing by running the software programs and modules stored in the memory. The memory can mainly include a program storage area and a data storage area, wherein the program storage area can store an operating system, application programs required for functions, etc.; the data storage area can store data created according to the use of the device, etc. In addition, the memory can include a high-speed random access memory and can also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other volatile solid-state storage devices. Accordingly, the memory can also include a memory controller to provide the processor with access to the memory.

[0204] An embodiment of the present application also provides a computer-readable storage medium, which can be set in an electronic device to store at least one instruction or at least one program related to implementing a simulation method for a surface acoustic wave device. The at least one instruction or the at least one program is loaded and executed by the processor to implement any one of the simulation methods for surface acoustic wave devices provided in the above method embodiments.

[0205] The embodiment of the present application also provides a computer program product or a computer program, which includes a computer instruction stored in a computer-readable storage medium. The processor of the electronic device reads the computer instruction from the computer-readable storage medium, and the processor executes the computer instruction, so that the electronic device executes any one of the surface acoustic wave device simulation methods provided in the above method embodiments.

[0206] Optionally, in this embodiment, the above-mentioned storage medium may include but is not limited to: a USB flash drive, a read-only memory (ROM), a random access memory (RAM), a mobile hard disk, a magnetic disk or an optical disk, and other media that can store program codes.

[0207] It should be noted that the above-mentioned sequence of the embodiments of the present application is for description only and does not represent the advantages and disadvantages of the embodiments. The above-mentioned specific embodiments of this specification are described. Other embodiments are within the scope of the attached claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0208] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0209] A person skilled in the art will understand that all or part of the steps to implement the above embodiments may be accomplished by hardware or by instructing related hardware through a program, and the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a disk or an optical disk, etc.

[0210] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A method for simulating a surface acoustic wave device, characterized in that: The method comprises: Acquire multiple unit models of the surface acoustic wave device to be simulated; For each of the unit models, the degree of freedom vector, constraint vector and system matrix of the unit model are extracted based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device; Determine the constrained Jacobian matrix of the unit model according to the degree of freedom vector and the constraint vector of the unit model; the constrained Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix; Based on the constrained Jacobian matrix and the system matrix of each unit model, the unit models are cascaded to obtain a simulation model of the surface acoustic wave device.

2. The simulation method according to claim 1, characterized in that: The method of performing cascade processing on each of the unit models based on the constraint Jacobian matrix and the system matrix of each of the unit models to obtain a simulation model of the surface acoustic wave device includes: Based on the imposed periodic boundary conditions, the system matrix and the constrained Jacobian matrix are rearranged to obtain a first updated system matrix and an updated Jacobian matrix, respectively; the updated Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the first updated system matrix; Based on the updated Jacobian matrix of the unit model, elements corresponding to the potential degree of freedom vector in the first updated system matrix are accumulated to obtain a second updated system matrix; Determine the two unit models to be cascaded; cascading the two unit models to be cascaded based on the second updated system matrix of the two unit models to be cascaded to obtain a cascade model; The cascade model is used as a unit model to be cascaded, and the target unit model is cascaded cyclically until there is no uncascaded unit model, thereby obtaining a simulation model of the surface acoustic wave device; the target unit model is two unit models to be cascaded.

3. The simulation method according to claim 2, characterized in that: The degree of freedom vector includes a potential degree of freedom vector applied to the electrical terminal, a potential degree of freedom vector of an applied suspension potential, and other degree of freedom vectors; The remaining degree of freedom vectors are the degree of freedom vectors in the unit model except the potential degree of freedom vector; The updated Jacobian matrix based on the unit model accumulates the elements corresponding to the potential degree of freedom vector in the first updated system matrix to obtain a second updated system matrix, including: Determining attribute information of non-zero elements in the row elements of the updated Jacobian matrix; Determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero element; Based on the type and position information of the potential degree of freedom vector, the row and column elements corresponding to the potential degree of freedom vector in the first update system matrix are accumulated into one row and one column elements to obtain the second update system matrix.

4. The simulation method according to claim 3, characterized in that: Determining the attribute information of the non-zero elements in the row elements of the updated Jacobian matrix; Determining the type and position information of the potential degree of freedom vector based on the attribute information of the non-zero element includes: For each row element in the updated Jacobian matrix, determine whether the row elements of the updated Jacobian matrix contain only one non-zero element 1; if so, determine the potential degree of freedom vector corresponding to the non-zero element 1 as the potential degree of freedom vector of the electrical terminal; determine the position information of the potential degree of freedom vector of the electrical terminal based on the potential degree of freedom vector of the electrical terminal and the element value in the corresponding constraint vector; Otherwise, determine whether the row elements still contain a non-zero element -1, and the row elements only contain two non-zero elements; if so, determine the potential degree of freedom vector corresponding to the non-zero element -1 as the potential degree of freedom vector of the floating potential; determine the position information of the potential degree of freedom vector of the floating potential based on the potential degree of freedom vector of the floating potential and the preset floating potential value, otherwise, stop the simulation.

5. The simulation method according to claim 2, characterized in that: The updated Jacobian matrix based on the unit model accumulates the elements corresponding to the potential degree of freedom vector in the first updated system matrix to obtain a second updated system matrix; Determine the two unit models to be cascaded, including: Determine the two unit models to be cascaded; In the case where there are inconsistent modeling regions between the two unit models to be cascaded, determining the degree of freedom vector corresponding to the inconsistent modeling region; Eliminate the degree of freedom vectors corresponding to inconsistent modeling regions in the first updated system matrix of the two unit models to be cascaded using the Schur complement method, so as to obtain a third updated system matrix of the two unit models to be cascaded; Based on the updated Jacobian matrix of the unit model, elements corresponding to the potential degree of freedom vector in the third updated system matrix are accumulated to obtain the second updated system matrix.

6. The simulation method according to claim 5, characterized in that: The second updating system matrix based on the two unit models to be cascaded, cascading the two unit models to be cascaded to obtain a cascade model, comprises: Expanding the second update system matrices of the two unit models to be cascaded respectively to align the degree of freedom vectors on the common cascade surface of the two unit models to be cascaded, and obtaining the fourth update system matrix of the two unit models to be cascaded; Based on the fourth updated system matrix of the two unit models to be cascaded, the two unit models to be cascaded are cascaded to obtain a cascade model.

7. The simulation method according to claim 1, characterized in that: The step of obtaining a plurality of unit models of the surface acoustic wave device to be simulated comprises: Acquire multiple transverse slice models of the surface acoustic wave device to be simulated; Slicing the plurality of transverse slice models respectively to obtain a plurality of unit models corresponding to each transverse slice model; The method of performing cascade processing on each unit model based on the constraint Jacobian matrix and the system matrix of each unit model to obtain a simulation model of the surface acoustic wave device includes: Based on the constraint Jacobian matrix and the system matrix of each unit model, the unit models located in the same row and having the same structure in multiple transverse slice models are sequentially cascaded to obtain multiple cascaded unit models; A plurality of the cascade unit models are cascaded to obtain a simulation model of the surface acoustic wave device.

8. A simulation device for a surface acoustic wave device, characterized in that: The device comprises: An acquisition module, used for acquiring multiple unit models of the surface acoustic wave device to be simulated; An extraction module, for extracting the degree of freedom vector, constraint vector and system matrix of each unit model based on the finite element method; the constraint vector represents the electrical boundary conditions applied to the surface acoustic wave device; A determination module, used to determine the constrained Jacobian matrix of the unit model according to the degree of freedom vector and the constraint vector of the unit model; the constrained Jacobian matrix represents the position information of the potential degree of freedom vector in the unit model in the system matrix; The cascade module is used to perform cascade processing on each unit model based on the constrained Jacobian matrix and the system matrix of each unit model to obtain a simulation model of the surface acoustic wave device.

9. An electronic device, characterized in that: The method comprises a processor and a memory, wherein the memory stores at least one instruction or at least one program, and the at least one instruction or at least one program is loaded and executed by the processor to implement the simulation method of the surface acoustic wave device according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores at least one instruction or at least one program, and the at least one instruction or the at least one program is loaded and executed by a processor to implement the method for simulating a surface acoustic wave device according to any one of claims 1 to 7.

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