Power supply circuit with constant energy output, control method and coating process

Abstract

The invention relates to a constant energy output power supply circuit, a control method and a coating process, and the method comprises the steps: setting a set output value of a working mode, collecting an actual output value of a circuit, and comparing the real-time output value with the set output value; adjusting the real-time output value of the circuit until the real-time output value is the same as the set output value, and collecting the energy value output in the adjustment process; judging whether electric arc is generated or not according to the real-time output value of the acquisition circuit, if so, temporarily closing power supply output, and restarting the power supply for a period of time until the real-time output value reaches a set output value; if not, closing the power supply output when the accumulated energy value reaches the set output value. By adjusting the duty ratio of the inverter circuit, the output value of the power supply is equal to the set output value, the output energy value is accumulated in real time, the power supply stops outputting the accumulated output energy when the electric arc occurs, and the power supply can output the same energy value even if the set value is the same under different sputtering working conditions. And the quality consistency of different batches of sputtering film layers is ensured.

Description

Technical Field

[0001] The present invention relates to the field of power supply for film coating process, and in particular to a power supply circuit with constant energy output, a control method for constant energy output and a film coating process with constant energy output. Background Art

[0002] With the rapid development of the semiconductor industry, the performance of chips is getting higher and higher, and the demand for advanced processes is also growing. Correspondingly, the requirements for high-precision coating technology are also getting higher and higher, which has led to the vigorous development of sputtering coating equipment. Compared with early processes such as evaporation coating, the film thickness control of the sputtering coating process is easier to achieve, and the quality of the film is higher. Therefore, the high-end coating in the semiconductor industry basically adopts the sputtering coating process. The quality of the film layer has an extremely important influence on the performance of products such as semiconductor chips, and the power supply is a key equipment that affects the quality of sputtering coating. Therefore, the power supply has become more and more a research focus in the field of sputtering coating, especially how to ensure the consistency of the quality of different batches of films has become a top priority.

[0003] According to different application directions and power output forms, the existing sputtering power supplies can be roughly divided into DC sputtering power supplies, pulse sputtering power supplies and RF sputtering power supplies. Most sputtering power supplies have two modes: constant current output and constant voltage output, and a few have constant power output modes. In sputtering production, the sputtering process is generally determined according to different needs, the corresponding working mode of the power supply is selected, and the current value Is, voltage value Us or power value Ps and working time Ts of the power supply output are set. After the set power output value works Ts, turn off the power output to obtain the required film layer. Repeat the above setting values ​​when producing again, and it can be considered that the thickness of the produced film layer and other qualities are consistent.

[0004] Existing sputtering coating power supplies all assume that the power supply can maintain a constant output, so that a consistent film quality can be obtained within the same output time. However, under the complex working conditions of sputtering coating, it is basically impossible to guarantee that the same working conditions will be reproduced during two productions, and it is also impossible to guarantee that the output of the power supply will be exactly the same during two productions. In the sputtering coating process, the target material is bombarded with plasma generated by the abnormal glow discharge of the gas, so that the target material is deposited on the substrate to achieve coating. The generation of plasma is affected by various factors such as voltage, current, gas composition and gas pressure, magnetic field, temperature, etc., and the abnormal glow discharge area can easily enter the arc discharge area to generate an arc. When an arc is generated, in order to avoid affecting the coating, the power supply needs to pause the output for a period of time and then restart it. The pause time varies depending on the arc intensity. Therefore, even if all the set values ​​remain consistent, the same working conditions cannot be reproduced in two sputterings. This results in different degrees of fluctuation in the voltage value, current value or power value output by the power supply during the sputtering process, making it impossible to obtain a film layer of consistent quality even within the same time.

[0005] Figure 5 .1 and Figure 5 .2 shows the output power and energy diagrams of the existing sputtering power supply under different working conditions when working in constant power mode (the rules are similar when working in constant voltage or constant current mode), where the solid line is the output power of the power supply, corresponding to the P axis on the left, and the dotted line is the accumulated output energy of the power supply, corresponding to the E axis on the right. Figure 5 .1 and Figure 5 .2 The power supplies are all working in constant power mode, and the output power setting value is Ps, and the power output time is Ts. Figure 5 .1, after a period of time after the power supply is started, the output power rises to the set value Ps at T1 and maintains a constant power output of Ps. At T2, an arc occurs and the output power fluctuates. During the time period from T2 to T3, the power supply detects an arc and temporarily shuts off the output at T3. The output power of the power supply drops to 0 at T4. After a period of delay, the power supply restarts at T5 and the output power reaches the set value Ps again at T6. The power supply output power remains at Ps until the set working time Ts is reached and the output is shut off. At T7, the power supply output power drops to 0, completing the sputtering coating process. Figure 5 .1 The total output energy of the power supply in the sputtering coating process is E1. Figure 5 .2, all settings are the same as Figure 5 .1, but in Figure 5 .2 The power supply is temporarily shut down after the arc occurs (T5-T4) Figure 5 .1 Medium and long, while the sputtering process is completed and the output time is stopped Figure 5 .1 in Ts remain consistent, resulting in Figure 5.2 The total output energy E2 in the entire sputtering process is smaller than E1. Therefore, Figure 5 .2 Film quality and Figure 5 .1. Especially for the actual production process, the frequent occurrence of arcs causes large fluctuations in output power. At the same sputtering time Ts, the output energy varies greatly, and the consistency of film quality in different batches cannot be guaranteed. Summary of the invention

[0006] The technical problem to be solved by the present invention is that even if all the setting values ​​of the existing coating power supply are kept consistent, it is impossible to reproduce the same working conditions in two sputterings. This leads to different degrees of fluctuations in the voltage value, current value or power value output by the power supply during the sputtering process, making it impossible to obtain a film layer of consistent quality even in the same time. In view of the above-mentioned defects of the prior art, a power supply circuit with constant energy output, a control method for constant energy output and a coating process with constant energy output are provided.

[0007] In order to solve the above technical problems, the technical solution adopted by the present invention is: Constructing a power supply circuit with constant energy output, including a rectifier circuit, an input filter circuit, an inverter circuit, a transformer, an output filter circuit and a control circuit; Rectifier circuit: used to connect input AC power and rectify AC power into DC power; The input filter circuit is connected to the rectifier circuit and filters the rectified DC power to remove the pulsating component; An inverter circuit is connected to the input filter circuit and inverts the filtered DC current into a square wave; The transformer is connected to the inverter circuit and transmits the inverted square wave to the output filter circuit after stepping up and down the voltage; The output filter circuit is connected to the transformer to filter the current after voltage increase or decrease for output; The control circuit is connected to the output filter circuit and the inverter circuit, and obtains the current value and voltage value output by the output filter circuit. The control circuit calculates the obtained voltage value and current value to obtain the control amount, so as to control the conduction time of the inverter circuit and thus adjust the voltage value and current value output by the output filter circuit.

[0008] Preferably, the power supply circuit also includes an input circuit, which is used to input set voltage values ​​and current values. The control unit receives the current value and voltage value of the output filter circuit and compares them with the set voltage value and current value to make the current value and voltage value output by the output filter circuit equal to the set value.

[0009] Preferably, the rectifier circuit is composed of multiple groups of diodes, which are connected to three-phase input alternating current and rectified into direct current. The inverter circuit is composed of multiple groups of MOS tubes, the output current of the rectifier circuit is connected to the drain of the MOS tube, and the source is connected to the transformer. The output filter circuit is composed of multiple groups of diodes. The control circuit is connected to the output of the output filter circuit to obtain the output voltage value and current value. The control circuit is also connected to the human-computer interaction system, and the output mode and output value of the power supply are set through the human-computer interaction system.

[0010] Preferably, the control circuit is connected to the gate of the MOS tube, and changes the duty cycle of the output square wave of the inverter circuit by controlling the conduction time of the MOS tube, so that the output value of the output filter circuit is equal to the set output value. A voltage sensor and a current sensor are also arranged between the output filter circuit and the control circuit, and the voltage value and current value of the output filter circuit are obtained by the voltage sensor and the current sensor and transmitted to the control circuit. A multiplier is connected between the voltage sensor and the current sensor, and the real-time power is calculated by the multiplier and transmitted to the control circuit.

[0011] A control method for constant energy output is constructed, which connects the input AC power supply, rectifies the input AC power into DC power, then filters the rectified DC power to remove the pulsating component, inverts the filtered DC power into a square wave, and then performs step-up and step-down on the square wave and then filters it to obtain the output value, obtains the output voltage value and current value, and adjusts the conduction time during the inversion process to change the duty cycle of the inverter square wave to adjust the output value.

[0012] Preferably, the process of obtaining the voltage value and the current value of the output value and adjusting the conduction time during the inversion process further includes: Input the output mode and output value of the set power supply, compare the obtained output value with the set output value, and if they are different, adjust the conduction time during the inversion process to change the duty cycle of the inversion square wave until the obtained output value is equal to the set output value.

[0013] A constant energy output coating process is constructed, the coating process comprising the following steps: S1: Determine the sputtering process according to the requirements and select the corresponding working mode of the power supply; S2: Set the set output value of the working mode, collect the actual output value of the circuit in real time, and compare the real-time output value with the set output value; S3: adjusting the real-time output value of the circuit until the real-time output value is the same as the set output value, and collecting the energy value output during the adjustment process; S4: judging whether an arc is generated according to the real-time output value of the acquisition circuit, if an arc is generated, proceeding to step S5; if no arc is generated, directly proceeding to step S6; S5: temporarily shut down the power output, and the accumulated energy of the control module is 0 during the process of power reduction to 0, and then restart the power until the real-time output value reaches the set output value; S6: When the accumulated energy value reaches the set output value, the power output is turned off to complete a sputtering coating process.

[0014] Preferably, in step S2: setting the set output value of the working mode, collecting the actual output value of the circuit in real time, and comparing the real-time output value with the set output value, including: The acquisition circuit includes rectifying the input AC power into DC power, then filtering the rectified DC power to remove the pulsating component, inverting the filtered DC power into a square wave, and then filtering the square wave after stepping up and down to obtain a real-time output value, and comparing the real-time output value with the set output value.

[0015] Preferably, in step S2: input the output mode and output value of the set power supply, compare the obtained real-time output value with the set output value, and if they are different, adjust the conduction time during the inversion process to change the duty cycle of the inversion square wave until the obtained real-time output value is equal to the set output value.

[0016] Preferably, in step S5: temporarily shut down the power output, and in the process of reducing the power to 0, the accumulated energy of the control module is 0, and then the power is restarted until the real-time output value reaches the set output value; If the real-time output value is detected after the power is restarted and it is still determined that an arc is generated, step S5 is repeated until the real-time output value reaches the set output value and then the power output is turned off to complete a sputtering coating process.

[0017] The beneficial effects of the present invention are: the duty cycle of the inverter circuit is adjusted by the processor so that the output power of the power supply is equal to the set output value, and the energy value that has been output is accumulated in real time. When the power supply stops outputting due to conditions such as an arc, the accumulated output energy remains unchanged. Even under different sputtering conditions, as long as the set value is the same, the power supply can output the same energy value, thereby ensuring the quality consistency of different batches of sputtered film layers. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be further described below in conjunction with the accompanying drawings and embodiments. The drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work: Figure 1 The schematic diagram of the power supply circuit of the preferred embodiment of the present invention is as follows; Figure 2 A schematic diagram of the structure of a power supply circuit of a preferred embodiment of the present invention; Figure 3 A specific circuit schematic diagram of a power supply circuit of a preferred embodiment of the present invention; Figure 4 A schematic diagram of the coating process of a preferred embodiment of the present invention; Figure 5 The output power and energy variation of the sputtering coating power supply of the prior art and the present invention when the power is output at constant power is compared (wherein Figure 5 .1 and 5.2 are schematic diagrams of output power and energy changes of existing sputtering coating power supplies when the power output is constant; Figure 5 .3 and 5.4 are schematic diagrams of output power and energy in constant power and constant energy mode of the present invention). DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the following will be described clearly and completely in combination with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are partial embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the protection scope of the present invention.

[0020] A power supply circuit and control method for constant energy output according to a preferred embodiment of the present invention; Figure 1 As shown, it includes an input power supply 10, a rectifier circuit 11, an input filter circuit 12, an inverter circuit 13, a transformer 14 and an output filter circuit 15. After the input power supply 10 is connected to the mains, the rectifier circuit 11 rectifies the AC power into DC power, and then filters it through the input filter circuit 13 to obtain a better DC current. The filtered circuit inverts the full bridge into a square wave through the inverter circuit, and then filters it again through the output filter circuit to obtain a DC output. The power supply circuit also includes a voltage detection circuit 16 and a current detection circuit 17 connected to the output filter circuit. The voltage value of the DC output is detected by the voltage detection circuit, and the current value of the DC output is detected by the current detection circuit, and the detected voltage value and current value are transmitted to the control circuit 20. At the same time, the detected voltage value and current value are transmitted to the controller after obtaining the power of the DC output through the multiplier 17. It also includes an input circuit 19, which sets the output mode of the power supply circuit through the input circuit, which includes the output current value, voltage value, power value and output energy. The control circuit collects the current value, voltage value and power value of the DC output, calculates the control amount and controls the on-time of the inverter circuit 13, changes the duty cycle of the inverter circuit output square wave, so that the DC output value is equal to the set output value.

[0021] Specifically, Figure 2As shown, the input three-phase 380V AC is rectified into pulsating DC by diodes, and the pulsating DC is filtered out by input filtering to obtain DC with better quality. Then the DC-DC full bridge composed of input MOSFET is inverted into a square wave, and then the square wave is bucked and stepped up by the transformer and the DC output is obtained by the output filter circuit. The output mode, output value and output energy of the power supply are set by the human-computer interaction system, and the voltage value V and current value I of the DC output are collected by the voltage sensor and the current sensor. The voltage value V and the current value I are multiplied by the multiplier to obtain the output power P. The three are sampled and relatedly calculated by the microprocessor to obtain the control quantity. The microprocessor controls the conduction time of the MOSFET in the DC-DC module and changes the duty cycle of the DC-DC output square wave so that the output value is equal to the set output value.

[0022] Furthermore, if Figure 3 As shown, the rectifier circuit 11 is composed of six groups of diodes. Each group of lines of the input three-phase AC power is connected through two groups of diodes in parallel. The other end of the diode is connected to the first filter inductor L1. Both ends of the first filter inductor are connected to the first capacitor C1. The input filter circuit composed of the first filter inductor L1 and the first capacitor C1 can filter the pulsating DC and remove its pulsating component to obtain DC with better quality. The inverter circuit 13 is composed of four groups of transistors Q1, Q2, Q3, and Q4. The source of the transistor is connected to the two ends of the first capacitor C1, and the drain is connected to the transformer T1, so that the square wave is stepped up and down and then transmitted to the output filter circuit 15, which includes four groups of diodes D7, D8, D9, and D10. Every two groups are connected to one output end of the transformer to form an output, and the current value and voltage value of the DC output are obtained through the current sensor and the voltage sensor, and the current value and voltage value are transmitted to the control unit U1. At the same time, the power value of the DC output is calculated through the multiplier, and the power value of the DC output is transmitted to the control unit. The control unit can also directly obtain the current value and voltage value of the DC output and calculate its corresponding power value. At the same time, the output mode, output value, and output energy of the power supply set by the human-computer interaction system U2 are input, and the control unit calculates the sampled current value, voltage value, and power value to obtain the control amount, and controls the gate connected to the inverter circuit to control the conduction time of the inverter circuit, thereby changing the duty cycle of the square wave output by the inverter circuit so that the output value is equal to the set output value. The working mode of the power supply is set through the human-computer interaction interface, and the output value of the corresponding mode is set, such as the output voltage value, current value or power value and energy value. The microprocessor collects the output voltage value, current value and power value in real time and compares them with the set value, continuously controls the on and off of the MOSFET of the DC-DC module to make the output value equal to the set value, and calculates the energy value that has been output currently according to the collected information, until the accumulated energy reaches the set energy value, and then turns off the power output.

[0023] A coating process with constant energy output according to a preferred embodiment of the present invention; Figure 4 As shown, it includes the following steps: Step S1: Determine the sputtering process according to the requirements and select the working mode of the corresponding power supply; Step S2: setting the set output value of the working mode, collecting the actual output value of the circuit in real time, and comparing the real-time output value with the set output value; Step S3: adjusting the real-time output value of the circuit until the real-time output value is the same as the set output value, and collecting the energy value output during the adjustment process; Step S4: judging whether an arc is generated according to the real-time output value of the acquisition circuit, if an arc is generated, proceeding to step S5; if no arc is generated, directly proceeding to step S6; Step S5: temporarily shut down the power output, and when the power is reduced to 0, the accumulated energy of the control module is 0, and then the power is restarted until the real-time output value reaches the set output value; Step S6: When the accumulated energy value reaches the set output value, the power output is turned off to complete a sputtering coating process.

[0024] Furthermore, if Figure 4 As shown, first obtain the requirements of the sputtering process, determine the sputtering process according to the specific requirements, and select the corresponding working mode of the power supply. Set the working mode of the power supply through the human-computer interaction interface, and set the output value of the corresponding mode, such as the output voltage value, current value or power value and energy value. The microprocessor collects the output voltage value, current value and power value in real time and compares them with the set value, continuously controls the on and off of the MOSFET of the DC-DC module so that the output value is equal to the set value, and calculates the energy value that has been output according to the collected information. At the same time, the microprocessor determines whether an arc is generated based on the collected voltage value V and current value I, and temporarily turns off the power output when it is determined that an arc is generated. The energy accumulated by the microprocessor is 0 during the time period when the power output is turned off and the power is reduced to 0. As sputtering proceeds, the power output is turned off when the accumulated energy value reaches the set energy value, and a sputtering coating is completed. In the constant power mode, the sputtering process can ensure that the total energy output of each power supply in different production is equal to the set value, which also ensures the consistency of the film quality under different working conditions.

[0025] Further, Figure 5 .3 and Figure 5 .4 are schematic diagrams of output power and energy under different working conditions when the constant energy mode power supply of the present invention works in constant power mode (the rules are similar when working in constant voltage or constant current mode), wherein the solid line is the output power of the power supply, corresponding to the left P axis, and the dotted line is the accumulated output energy of the power supply, corresponding to the right E axis. Figure 5 .3 and Figure 5.4 The power supplies are all working in constant power mode, and the output power setting value is Ps, and the output energy is set to Es. Figure 5 .3, after a period of time after the power supply is started, the output power rises to the set value Ps at time T1 and maintains a constant power output of Ps. At time T2, an arc occurs and the output power fluctuates. During the time period from T2 to T3, the power supply detects an arc and temporarily turns off the output at time T3. The output power of the power supply drops to 0 at time T4. After a period of delay, the power supply is restarted at time T5 and the output power reaches the set value Ps again at time T6. The output power of the power supply remains at Ps until the accumulated output energy value of the microprocessor reaches the set energy value Es, when the output is turned off, that is, the power supply turns off the output at time T7. At time T8, the output power of the power supply drops to 0, completing the sputtering coating process. Figure 5 .3 The total output energy of the power supply during the entire sputtering process is Ee. Figure 5 .4, all settings are the same as Figure 5 .3, but in Figure 5 .4 The power supply temporarily stops outputting time (T5-T4) after the arc occurs. Figure 5 .3 medium length. After the output energy accumulated by the microprocessor reaches the set value Es, the power supply turns off the output. In this way, it is guaranteed Figure 5 .4 The total output energy in the entire sputtering process is also Ee. Therefore, Figure 5 .4 Film quality and Figure 5 .3. Even in the actual production process, arcs occur frequently, causing large fluctuations in output power. However, in the constant energy mode, no matter how the output value changes, the output energy of the power supply can be guaranteed to be the same each time, so that the consistency of the film quality of different batches is guaranteed.

[0026] It should be understood that the present invention is described by some embodiments, and those skilled in the art will appreciate that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.

Claims

1. A power supply circuit with constant energy output, comprising a rectifier circuit, an input filter circuit, an inverter circuit, a transformer, an output filter circuit and a control circuit; A rectifier circuit is used to connect the input AC power and rectify the AC power into DC power; The input filter circuit is connected to the rectifier circuit and filters the rectified DC power to remove the pulsating component; An inverter circuit is connected to the input filter circuit and inverts the filtered DC current into a square wave; The transformer is connected to the inverter circuit and transmits the inverted square wave to the output filter circuit after stepping up and down the voltage; The output filter circuit is connected to the transformer to filter the current after voltage increase or decrease for output, and is characterized by: The control circuit is connected to the output filter circuit and the inverter circuit, and obtains the current value and voltage value output by the output filter circuit. The control circuit calculates the obtained voltage value and current value to obtain the control amount, so as to control the conduction time of the inverter circuit and thus adjust the voltage value and current value output by the output filter circuit.

2. The power supply circuit according to claim 1, characterized in that: The power supply circuit also includes an input circuit, which is used to input set voltage values ​​and current values. The control unit receives the current value and voltage value of the output filter circuit and compares them with the set voltage value and current value to make the current value and voltage value output by the output filter circuit equal to the set value.

3. The power supply circuit according to claim 1, characterized in that: The rectifier circuit is composed of multiple groups of diodes, which are connected to three-phase input alternating current and rectified into direct current. The inverter circuit is composed of multiple groups of MOS tubes. The output current of the rectifier circuit is connected to the drain of the MOS tube, and the source is connected to the transformer. The output filter circuit is composed of multiple groups of diodes. The control circuit is connected to the output of the output filter circuit to obtain the output voltage value and current value. The control circuit is also connected to the human-computer interaction system, and the output mode and output value of the power supply are set through the human-computer interaction system.

4. The power supply circuit according to claim 3, characterized in that: The control circuit is connected to the gate of the MOS tube, and changes the duty cycle of the output square wave of the inverter circuit by controlling the conduction time of the MOS tube, so that the output value of the output filter circuit is equal to the set output value. A voltage sensor and a current sensor are also arranged between the output filter circuit and the control circuit. The voltage value and current value of the output filter circuit are obtained by the voltage sensor and the current sensor and transmitted to the control circuit. A multiplier is connected between the voltage sensor and the current sensor, and the real-time power is calculated by the multiplier and transmitted to the control circuit.

5. A control method for constant energy output, connecting an input AC power supply, rectifying the input AC power into DC power, filtering the rectified DC power to remove the pulsating component, inverting the filtered DC power into a square wave, and performing step-up and step-down on the square wave before filtering to obtain an output value, characterized in that: The output voltage and current values ​​are obtained and the conduction time during the inversion process is adjusted to change the duty cycle of the inversion square wave and thus adjust the output value.

6. The control method according to claim 5, characterized in that: The process of obtaining the voltage value and the current value of the output value and adjusting the conduction time during the inversion process also includes: Input the output mode and output value of the set power supply, compare the obtained output value with the set output value, and if they are different, adjust the conduction time during the inversion process to change the duty cycle of the inversion square wave until the obtained output value is equal to the set output value.

7. A constant energy output coating process, characterized in that: The coating process includes the following steps: S1: Determine the sputtering process according to the requirements and select the corresponding working mode of the power supply; S2: Set the set output value of the working mode, collect the actual output value of the circuit in real time, and compare the real-time output value with the set output value; S3: adjusting the real-time output value of the circuit until the real-time output value is the same as the set output value, and collecting the energy value output during the adjustment process; S4: judging whether an arc is generated according to the real-time output value of the acquisition circuit, if an arc is generated, proceeding to step S5; If no arc is generated, proceed directly to step S6; S5: temporarily shut down the power output, and the accumulated energy of the control module is 0 during the process of power reduction to 0, and then restart the power until the real-time output value reaches the set output value; S6: When the accumulated energy value reaches the set output value, the power output is turned off to complete a sputtering coating process.

8. The coating process according to claim 7, characterized in that: In step S2: setting the set output value of the working mode, collecting the actual output value of the circuit in real time, and comparing the real-time output value with the set output value, including: The acquisition circuit includes rectifying the input AC power into DC power, then filtering the rectified DC power to remove the pulsating component, inverting the filtered DC power into a square wave, and then filtering the square wave after stepping up and down to obtain a real-time output value, and comparing the real-time output value with the set output value.

9. The coating process according to claim 8, characterized in that: In step S2, the output mode and output value of the set power supply are input, and the obtained real-time output value is compared with the set output value. If they are different, the conduction time during the inversion process is adjusted to change the duty cycle of the inversion square wave until the obtained real-time output value is equal to the set output value.

10. The coating process according to claim 7, characterized in that: In step S5: temporarily shut down the power output, and in the process of reducing the power to 0, the accumulated energy of the control module is 0, and then the power is restarted until the real-time output power reaches the set power; If the real-time output value is detected after the power is restarted and it is still determined that an arc is generated, step S5 is repeated until the real-time output value reaches the set output value and then the power output is turned off to complete a sputtering coating process.

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