The invention relates to a device for realizing accurate patterning transfer of a
microstructure through air pressure type vibration-assisted
ultraviolet nano-imprinting, and belongs to the field of ultra-precision
machining. The device comprises an outer closed compartment, a lifting platform, an xyz-axis displacement micro-motion platform, a vibration platform, an imprinting device, an
ultraviolet light curing device, a substrate, a supporting frame, an air pressure device and a tray. An impressing film is fixed through a
machine cover, an impressing device is installed in an outer closed compartment through a partition plate, a lifting platform and an xyz-axis displacement micro-motion platform are matched to control a substrate on a tray to be attached to the impressing device, an air pressure device can increase air pressure to provide impressing force to achieve impressing, and a vibration platform assists in impressing glue filling and demolding. And the
ultraviolet light curing device is used for carrying out
ultraviolet light irradiation curing, demolding is carried out after curing is completed, and
microstructure transfer of the upper template of the imprinting film is completed. According to the device, patterning transfer of a large-area
microstructure is achieved through gas imprinting, imprinting force is controlled through air pressure, imprinting efficiency, the
filling rate and fidelity are improved, and damage to the imprinting device and a template is reduced.