Control method and system based on PMUT array

Abstract

The invention discloses a control method based on a PMUT array and a related device, and relates to the technical field of biosensing, and the method comprises the steps: excitation equipment sends an imaging excitation signal to a PMUT array chip at the imaging moment of reaching a control period, the PMUT array chip responds to the imaging excitation signal to emit an incident sound wave, and returns an imaging receiving signal after receiving a reflected sound wave, and the imaging receiving signal is transmitted to the PMUT array chip; and the excitation equipment performs ultrasonic imaging based on the imaging receiving signal. And when the target driving moment of the control cycle is reached, a driving excitation signal of the target driving moment is sent to the PMUT array chip, and the PMUT array chip responds to the driving excitation signal of the target driving moment to send out target ultrasound to drive the micro-nano robot to move. The control period comprises one imaging moment and at least one driving moment which are arranged according to time sequence. According to the method, imaging and driving are alternately executed through different frequencies in a control period, and self-sensing control over the micro-nano robot is achieved.

Description

Technical Field

[0001] The present application relates to the field of biosensor technology, and in particular to a control method and system based on a PMUT array. Background Art

[0002] Remote control technology and imaging technology of micro-nano robots are the key to achieving their non-invasive operation and precise treatment in vivo. When manipulating micro-nano robots in deep tissues, the external field is required to have a large penetration depth.

[0003] At present, the control systems of micro-nano robots mainly include magnetic drive control systems and acoustic drive control systems. Among them, the magnetic materials of magnetic micro-nano robots will have adverse effects on organisms, so acoustic drive control systems are widely used to control micro-nano robots in organisms. However, the existing acoustic drive control systems lack the ability to dynamically control micro-nano robots, have low control diversity, and cannot support ultrasonic micro-nano robots to flexibly perform complex tasks in organisms. Summary of the invention

[0004] In view of the above problems, this application provides a PMUT array-based control method and related devices to achieve the purpose of improving the imaging accuracy and control accuracy of micro-nano robots through PMUT array control. The specific scheme is as follows:

[0005] In a first aspect, the present application provides a PMUT array-based control method, which is applied to a PMUT array-based control system, wherein the control system includes a PMUT array chip and an excitation device, wherein the PMUT array chip integrates at least one PMUT array, including:

[0006] The excitation device sends an imaging excitation signal of the imaging moment to the PMUT array chip when the imaging moment of the preset control cycle is reached; the control cycle includes an imaging moment and at least one driving moment arranged in time sequence, and the imaging excitation signal includes a preset imaging frequency;

[0007] The PMUT array chip responds to the imaging excitation signal, emits an incident sound wave, and after receiving the reflected sound wave, returns an imaging reception signal to the excitation device; the reflected sound wave includes a reflected sound signal of the incident sound wave at the micro-nano robot;

[0008] The excitation device performs ultrasonic imaging based on the imaging reception signal to generate a positioning ultrasonic image;

[0009] When the target driving moment of the control cycle is reached, the excitation device sends a driving excitation signal of the target driving moment to the PMUT array chip; wherein the target driving moment includes any driving moment, and the driving excitation signal includes a driving frequency and voltage amplitude and phase information corresponding to each array element;

[0010] The PMUT array chip responds to the driving excitation signal at the target driving moment, emits target ultrasound to construct a target spatial sound field at the target driving moment, and the target spatial sound field is used to drive the micro-nano robot to move.

[0011] In a possible implementation, when the imaging moment of a preset control cycle is reached, the excitation device sends an imaging excitation signal of the imaging moment to the PMUT array chip, including:

[0012] When the excitation device determines that the preset low-frequency imaging condition is met, the imaging excitation signal generated at the imaging moment is a low-frequency excitation signal, and the imaging frequency included in the low-frequency excitation signal is a high-frequency parameter lower than the preset imaging frequency threshold;

[0013] When the excitation device determines that the preset high-frequency imaging condition is met, the imaging excitation signal generated at the imaging moment is a high-frequency excitation signal, and the imaging frequency included in the high-frequency excitation signal is a low-frequency parameter higher than the imaging frequency threshold.

[0014] In a possible implementation, the PMUT array chip integrates at least one PMUT array and a corresponding signal transceiver module;

[0015] The PMUT array chip responds to the imaging excitation signal, emits an incident sound wave, and returns an imaging reception signal to the excitation device after receiving the reflected sound wave, including:

[0016] The signal transceiver module receives the imaging excitation signal through a receiving circuit, responds to the imaging excitation signal through a transmitting circuit, and sends an electrical pulse signal to the PMUT array;

[0017] The PMUT array emits the incident sound wave based on the electrical pulse signal;

[0018] The PMUT array sends an electrical pulse signal to the signal transceiver module based on the reflected sound wave of the incident sound wave;

[0019] The signal transceiver module receives the electric pulse signal through the receiving circuit, and sends the imaging receiving signal to the excitation device in response to the electric pulse signal through the transmitting circuit.

[0020] In a possible implementation, the excitation device performs ultrasonic imaging based on the imaging reception signal to generate a positioning ultrasonic image, including:

[0021] The excitation device receives a plurality of the imaging reception signals, performs ultrasonic imaging based on the plurality of the imaging reception signals, and generates the positioning ultrasonic image.

[0022] In a possible implementation, when the target driving moment of the control cycle is reached, the excitation device sends a driving excitation signal of the target driving moment to the PMUT array chip, including:

[0023] When the excitation device reaches the target driving moment of the control cycle, based on the target operation of the control cycle, the target position corresponding to the target driving moment is obtained; the target operation of the control cycle is used to instruct the micro-nano robot to move along the target route to the target terminal position of the control cycle, and the target route includes the target positions corresponding to each driving moment;

[0024] The excitation device calculates the voltage amplitude and phase information applied to each array element in the PMUT array chip based on the target position by using a back-projection algorithm;

[0025] The excitation device acquires a preset low-frequency driving frequency, where the low-frequency driving frequency is a frequency parameter lower than a preset driving frequency threshold;

[0026] The excitation device generates a driving excitation signal at the target driving moment, wherein the driving excitation signal at the target driving moment includes the low-frequency driving frequency and voltage amplitude and phase information on each array element.

[0027] In a possible implementation, the excitation device calculates the voltage amplitude and phase information applied to each array element in the PMUT array chip based on the target position by using a back-projection algorithm, including:

[0028] Constructing a virtual sound field based on the initial position and target position of the micro-nano robot at the target driving moment;

[0029] Based on the acoustic tweezers theory and the virtual sound field, determining the target space point corresponding to the position of the center of the high sound pressure focus point in the control space;

[0030] The function value of the target control function corresponding to the target space point is set to 1 to generate a first equation;

[0031] The function values ​​of the target control function corresponding to the spatial points in the control space other than the target spatial point are set to 0, to generate a second equation;

[0032] Solving a joint equation using a back-projection algorithm to obtain ideal voltage amplitude and ideal phase information of each array element, wherein the joint equation includes the first equation and the second equation;

[0033] Based on the ideal voltage amplitude and the ideal phase information of each array element, the voltage amplitude and phase information applied to each array element in the PMUT array chip are respectively obtained.

[0034] In a possible implementation, a PMUT array-based control method further includes:

[0035] The excitation device acquires a target operation instruction, wherein the target operation instruction includes a target pattern, and the target pattern is used to indicate the end positions of the plurality of micro-nano robots;

[0036] After the excitation device performs ultrasonic imaging based on the imaging reception signal and generates a positioning ultrasonic image, it generates a target operation of the control cycle based on the target pattern and the positioning result, and the positioning result includes the imaging position of each of the micro-nano robots indicated by the positioning ultrasonic image.

[0037] A second aspect of the present application provides a PMUT array-based control system, comprising: a PMUT array chip and an excitation device;

[0038] The excitation device is used for:

[0039] When the imaging moment of the preset control cycle is reached, the imaging excitation signal of the imaging moment is sent to the PMUT array chip, and ultrasonic imaging is performed based on the imaging reception signal to generate a positioning ultrasonic image; the control cycle includes an imaging moment and at least one driving moment arranged in time, and the imaging excitation signal includes a preset imaging frequency;

[0040] When the target driving moment of the control cycle is reached, a driving excitation signal of the target driving moment is sent to the PMUT array chip; wherein the target driving moment includes any driving moment, and the driving excitation signal includes a driving frequency and voltage amplitude and phase information corresponding to each array element;

[0041] The PMUT array chip is used for:

[0042] In response to the imaging excitation signal, an incident sound wave is emitted, and after receiving a reflected sound wave, the imaging reception signal is returned to the excitation device; the reflected sound wave includes a reflected sound signal of the incident sound wave at the micro-nano robot;

[0043] In response to the driving excitation signal at the target driving moment, a target ultrasound is emitted to construct a target spatial sound field at the target driving moment, and the target spatial sound field is used to drive the micro-nano robot to move.

[0044] The third aspect of the present application provides an integrated chip, characterized in that at least one PMUT array is integrated, and the integrated chip is used to implement the steps performed by the PMUT array chip in any one of the PMUT array-based control methods.

[0045] A fourth aspect of the present application provides an electronic device, characterized in that it includes at least one processor and a memory connected to the processor, wherein:

[0046] The memory is used to store computer programs;

[0047] The processor is used to execute the computer program so that the electronic device can implement any step of stimulating the device to perform in a PMUT array-based control method.

[0048] By means of the above technical scheme, the present application provides a control method and related device based on PMUT array, which are applied to a control system based on PMUT array. The control system includes a PMUT array chip and an excitation device. When the imaging moment of the control cycle is reached, the excitation device sends an imaging excitation signal to the PMUT array chip. The PMUT array chip responds to the imaging excitation signal and sends an incident sound wave. After receiving the reflected sound wave, the imaging receiving signal is returned. The excitation device performs ultrasonic imaging based on the imaging receiving signal. When the target driving moment of the control cycle is reached, the driving excitation signal of the target driving moment is sent to the PMUT array chip. The PMUT array chip responds to the driving excitation signal of the target driving moment and sends the target ultrasound to drive the micro-nano robot to move. The control cycle includes an imaging moment and at least one driving moment arranged in time. The method alternately performs imaging and driving of the micro-nano robot at different frequencies within a control cycle, realizes self-sensing control of the micro-nano robot, and improves the control accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. Throughout the accompanying drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and the originals and elements are not necessarily drawn to scale.

[0050] Figure 1 A schematic diagram of multi-frequency characteristics of a dual-frequency PMUT array provided in an embodiment of the present application;

[0051] Figure 2 A schematic diagram of particle motion provided in an embodiment of the present application;

[0052] Figure 3 A schematic diagram of acoustic potential energy analysis and motion state demonstration provided in an embodiment of the present application;

[0053] Figure 4 A schematic diagram of a distribution pattern of controlled objects in different spatial sound field modes provided in an embodiment of the present application;

[0054] Figure 5 A schematic diagram of the structure of a PMUT array-based control system provided in an embodiment of the present application;

[0055] Figure 6 A flow chart of a PMUT array-based control method provided in an embodiment of the present application;

[0056] Figure 7a A schematic diagram of a specific structure of a control system based on a PMUT array provided in an embodiment of the present application;

[0057] Figure 7b A flowchart of a specific implementation method of a PMUT array-based control method provided in an embodiment of the present application;

[0058] Figure 8 A schematic diagram of an ultrasonic imaging result provided in this embodiment;

[0059] Fig. 9 A signal interaction diagram of a PMUT array-based control method provided in an embodiment of the present application;

[0060] Fig.10 A schematic diagram of a back-projection algorithm provided in an embodiment of the present application;

[0061] Fig.11 A schematic diagram of a control result provided in an embodiment of the present application;

[0062] Fig.12 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0063] The following describes the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. The terms used in the implementation method section of the present application are only used to explain the specific embodiments of the present application, and are not intended to limit the present application.

[0064] The embodiments of the present application are described below in conjunction with the accompanying drawings. Those skilled in the art will appreciate that, with the development of technology and the emergence of new scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems.

[0065] The terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and need not be used to describe a specific order or sequential order. It should be understood that the terms used in this way can be interchangeable under appropriate circumstances, which is only to describe the distinction mode adopted by the objects of the same attributes when describing in the embodiments of the present application. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, so that the process, method, system, product or equipment comprising a series of units need not be limited to those units, but may include other units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0066] The present application can be applied to the field of biosensor technology. The remote control technology and imaging technology of micro-nano robots are the key to achieving their non-invasive operation and precise in vivo treatment. When manipulating micro-nano robots in deep tissues, the external field is required to have a large penetration depth.

[0067] The control system of micro-nano robots mainly includes magnetic drive control system and acoustic drive control system. The magnetic micro-nano robot controlled by the magnetic drive control system shows excellent movement ability in the body, but the magnetic material of the magnetic micro-nano robot will have adverse effects on the body. The ultrasonic micro-nano robot driven by the acoustic drive control system has high biocompatibility. The acoustic drive control system generates standing waves through multiple transducers or creates a spatial sound field through a holographic lens to control the ultrasonic micro-nano robot. However, the existing acoustic drive control system lacks the ability to dynamically control the micro-nano robot, has low control diversity, and cannot support the ultrasonic micro-nano robot to flexibly perform complex tasks in the body. Table 1 shows the control parameters of the control method of the micro-nano robot.

[0068] Table 1 Micro-nano robot control parameters

[0069]

[0070] The imaging system of the micro-nano robot is the basis of its positioning and navigation. The imaging technology used by the imaging system includes magnetic field imaging technology with magnetic field as energy, optical imaging technology with light as energy, ionizing radiation imaging technology with ionizing radiation as energy, and ultrasound imaging technology with ultrasound as energy. Table 2 shows the data items of imaging technology applied to micro-nano robots. It can be seen from Table 2 that imaging methods such as magnetic resonance imaging (MRI), light reflection imaging, and CT imaging provide high spatial resolution, but low temporal resolution, resulting in the inability to perform real-time imaging. The fluorescence imaging method has low temporal and spatial resolution. Although the X-ray imaging method can achieve high temporal and spatial resolution, it has poor biocompatibility and is often accompanied by the risk of ionizing radiation.

[0071] As can be seen from Table 2, the pulse echo imaging method of ultrasound imaging technology has high temporal resolution, can realize real-time imaging, has high biocompatibility, and its implementation complexity is simple and easy to implement, but its spatial resolution is low.

[0072] Table 2 Microrobot medical imaging technology

[0073]

[0074] According to research, in order to address the technical shortcomings of ultrasonic micro-nano robots, such as low control diversity and poor flexibility, a programmable ultrasonic array can be used to configure the amplitude and phase of each array element in the array in real time, dynamically construct a holographic sound field in the target area, and finely control the micro-nano robots in the body with high flexibility. The technical shortcomings of low spatial resolution of ultrasonic imaging technology can be improved by using ultrasonic arrays or increasing the imaging frequency. It can be seen that the use of an ultrasonic array system constructed by an ultrasonic array can meet the needs of control and imaging at the same time. Based on the ultrasonic array system, the integrated technology of control and self-sensing (self-imaging monitoring) can be realized, and the driving equipment running the control system and the imaging equipment running the imaging system need not interfere with each other and be integrated in a limited space, thereby realizing the autonomous driving of the micro-nano robot in the body.

[0075] It should be noted that the ultrasonic array is composed of multiple array elements arranged in a certain form. The ultrasonic array currently used in the ultrasonic array system is mainly based on the traditional block ceramic ultrasonic array. Through an external multi-channel programmable pulse transmitting and receiving system, the phase and amplitude of the signal on each array element are adjusted to obtain a specified sound field, and can be used to receive echo signals to indicate the position of the controlled object, that is, the micro-nano robot, in real time.

[0076] In the prior art, block ceramic ultrasonic arrays are used to realize the control of micro-nano robots. However, the cutting process in the block ceramic ultrasonic array limits the size of a single array element, and the spacing between adjacent array elements is greater than its wavelength, which seriously affects the accuracy of the sound field control, and thus affects the accuracy of the control. Furthermore, the bulk piezoelectric ceramics are large in size. If the array is expanded to a larger number of elements, it will bring a larger volume, and it requires an external complex and large electronic system, which limits the flexibility of the entire control system. In addition, the multi-channel drive of the block ceramic ultrasonic array has high power consumption, which is difficult to meet the needs of long-term control and imaging monitoring. In addition, the block ceramic ultrasonic array also has the disadvantages of high cost and poor coupling with air and water.

[0077] For example, a control method based on a 30MHz high-frequency linear ultrasonic array in the prior art proposes an ultrasonic array made of interdigitally bonded bulk piezoelectric ceramic plates, with 256 array elements, an array element spacing of 50um, a control depth of 7.3mm, and a polymethylpentene lens manufactured above the array to achieve elevation focusing. Under a 30Vpp excitation voltage, the array can simply converge cells and manipulate the target to move in a single axis. This prior art uses a linear array, and the target control has freedom in only one direction. The additional external lens increases the complexity of the system, and the high frequency limits the possibility of in vivo application.

[0078] For another example, another ultrasound array in the prior art is a 3MHz, 64-element 2D matrix array, which is made of PZT-5H bulk ceramics through traditional cutting technology, with an element spacing of 0.75mm and an array aperture of 6mm. When excited by a voltage higher than 12V, the array can perform multi-dimensional translation, rotation, orientation, suspension, and assembly of living cells and organisms. They used the array to manipulate the directional movement of larvae, the on-demand assembly of kidney organoids, and the aggregation and precise movement of engineered bacteria in mouse blood vessels.

[0079] Another example is a time-reversal-based self-navigating 3D acoustic tweezers system in the prior art, which consists of a 1.04 MHz, 256-unit 2D matrix array with an array element spacing of 2.8 mm and an array aperture of 4.5 cm. The matrix array is first driven by an imaging pulse, and the echo signal from the particle is reconstructed into a 3D ultrasound image to indicate the current position of the particle. The navigation system instructs the acoustic beam to capture the particle by importing the position information in real time. The system can achieve controllable operation and monitoring of the target through the skull.

[0080] It can be seen that due to the difficulty in integrating block ceramic arrays and the difficulty in reducing the spacing between array elements, the freedom of control and spatial resolution of the micro-nano robot are limited, and due to the limitation of imaging frequency, the system cannot reconstruct images of smaller targets.

[0081] The inventors of this application have conducted in-depth research on various ultrasonic arrays and found that the PMUT (Piezoelectric Micromachined Ultrasonic Transducer) array is a micro-machined ultrasonic array that utilizes the piezoelectric effect. It is composed of multiple PMUT array elements. Each PMUT array element is usually composed of a top electrode, a piezoelectric layer, a bottom electrode, a structural layer (elastic layer) and a substrate. Among them, the piezoelectric layer is the key part of generating ultrasonic waves. It uses the piezoelectric effect to convert electrical energy into mechanical energy to generate ultrasonic waves. The structural layer is used to support the piezoelectric layer and transmit ultrasonic waves. The PMUT array can achieve high-resolution ultrasonic imaging because each array element can independently transmit and receive ultrasonic waves, thereby providing more information. By rationally designing and arranging the PMUT array, three-dimensional ultrasonic imaging can be achieved to obtain more detailed information. Compared with traditional ultrasonic arrays, the PMUT array has lower power consumption. The use of MEMS (Micro-Electro-Mechanical Systems) technology in PMUT arrays allows flexible configuration of ultrasound arrays from multiple small films, and the manufacture of large-area, high-density arrays at low cost. Therefore, PMUT arrays also have the characteristics of low difficulty in integration with electronic arrays and high integration.

[0082] Therefore, the present application provides a manipulation system based on a PMUT array, which breaks through the limitations on the manipulation freedom and spatial resolution of micro-nano robots by taking advantage of the low power consumption, low integration difficulty, and high-density device characteristics of the PMUT array.

[0083] Furthermore, in order to ensure that ultrasound can still provide a sufficiently large force after passing through the biological barrier, the excitation frequency (i.e., driving frequency) used to drive the micro-nano robot is required to be lower than the preset driving frequency threshold. The highest frequency (driving frequency threshold) currently used for ultrasonic regulation in vivo has reached 3MHz. For in vivo imaging technology, it is usually necessary to select a higher imaging frequency within the imaging frequency range to achieve improved resolution and better imaging effects. The imaging frequency range commonly used in medical diagnosis is 2-15MHz. Within this imaging frequency range, a higher imaging frequency will lead to improved resolution.

[0084] It can be seen that the difference in the requirements for driving frequency and imaging frequency makes it difficult for existing ultrasound arrays to achieve control and imaging functions.

[0085] In this regard, the inventors of this application conducted in-depth research on various ultrasonic arrays and found that: 1. The PMUT array has multi-frequency characteristics. The PMUT array is a thin film device. According to the thin film vibration theory, a single-sized PMUT array will have multiple vibration modes corresponding to multiple resonant frequencies. Figure 1A schematic diagram of multi-frequency characteristics of a dual-frequency PMUT array provided in an embodiment of the present application, wherein the ordinate is the vibration velocity and the abscissa is the vibration frequency, such as Figure 1 As shown, the dual-frequency PMUT array has two resonance peaks, the corresponding first resonance frequency is a low frequency of 2.3 MHz, and the second resonance frequency is a high frequency of 9.4 MHz.

[0086] 2. According to Gor'kov's acoustic radiation force theory, an object in an acoustic field always moves toward a position with lower acoustic potential energy. When the particle size is much smaller than the wavelength, the (gradient) acoustic radiation force Frad acting on a spherical object in a fluid is the negative gradient of the time-averaged acoustic potential energy, expressed as:

[0087] ;

[0088] ;

[0089] Where pin is the incident sound pressure, vin is the incident sound particle velocity, a is the radius of the object, and k0 is the compressibility of the medium. f1 and f2 are the monopole coefficient and dipole coefficient respectively:

[0090] ;

[0091] ;

[0092] Where PP is the particle density and P0 is the compressibility coefficient of the particle.

[0093] Based on the above Gor'kov theory, for particles with different sizes, densities, and sound speeds, the relationship between particle behavior and its density and sound speed is analyzed. Figure 2 Schematic diagram of particle motion provided in the embodiment of the present application, wherein the horizontal axis represents the particle density (in kg / m 3 )), the ordinate represents the particle sound velocity (unit: (m / s)), the potential energy of the particles on the curve S0 is 0, the high potential energy of the particles above the curve S0 is at a high sound pressure position, and the high potential energy of the particles below the curve S0 is at a low sound pressure position. That is, particles with a larger density or sound velocity tend to move toward a high sound pressure position in the sound field, and vice versa.

[0094] In this regard, the PMUT focusing model constructed by finite element modeling uses simulation software to model the excitation state of the PMUT array, simulates the ultrasonic waves of different intensities emitted when the PMUT array is excited, and records the movement of the simulated controlled object. Figure 3 shown. Figure 3A schematic diagram of acoustic potential energy analysis and motion state demonstration provided for an embodiment of the present application, wherein acoustic potential energy is marked with different colors from low to high, red represents high acoustic potential energy, blue represents low acoustic potential energy, and white circles represent controlled objects. The controlled objects include object a and object b, wherein object a has a density ρ1=1050kg / m3, a sound velocity c1=2350m / s, object b has a density ρ2=1050kg / m3, a sound velocity c2=1027m / s, and object a and object b are in different motion states.

[0095] Figure 3 (a) in the figure corresponds to object a, and illustrates the distribution of acoustic potential energy in the horizontal section Ma in the simulation environment on the right and the motion state of object a before and after the PMUT array excitation. As shown in (a), the movement of object a before and after the excitation is from high acoustic potential energy to low acoustic potential energy.

[0096] Figure 3 (b) corresponds to object b, and illustrates the distribution of acoustic potential energy in the horizontal section Mb in the simulation environment on the right before and after the PMUT array excitation, as well as the motion state of object b. As shown in (b), the motion of object b before and after the excitation is from low acoustic potential energy to high acoustic potential energy.

[0097] In summary, object a is at a high potential energy at a high sound pressure location and will be repelled by the focus, while object b will be captured by the focus. Therefore, by controlling the phase information of each array element in the PMUT array, different spatial sound fields can be constructed, thereby realizing diversified manipulation of micro-nano robots. Figure 4 A schematic diagram of a distribution pattern of controlled objects in different spatial sound field modes provided in an embodiment of the present application, specifically, Figure 4 , four controlled object distribution patterns formed by four control modes of the spatial sound field through the PMUT array are exemplified.

[0098] Based on the above research, an embodiment of the present application provides a control system based on a PMUT array, which realizes the control and imaging of a micro-nano robot through the multi-frequency characteristics of the PMUT array, thereby realizing self-sensing control of the micro-nano robot.

[0099] Figure 5 A schematic diagram of the structure of a control system based on a PMUT array provided in an embodiment of the present application is shown in FIG. Figure 5 As shown, the PMUT array-based control system includes an excitation device and a PMUT array chip, wherein the PMUT array chip integrates at least one PMUT array. Figure 5 The control system shown in the figure, the embodiment of the present application provides a control method based on the PMUT array, Figure 6A flow chart of a control method based on a PMUT array provided in an embodiment of the present application is shown as follows: Figure 6 As shown, the method includes:

[0100] S601. When the imaging time of the preset control cycle is reached, the excitation device sends an imaging excitation signal of the imaging time to the PMUT array chip.

[0101] In this embodiment, the control cycle includes an imaging moment and at least one driving moment arranged in chronological order. The imaging excitation signal includes a preset imaging frequency.

[0102] In this embodiment, the imaging frequency is selected from the imaging frequency range, and the specific imaging frequency is determined based on environmental parameters and imaging requirements. For example, in a scenario where high resolution is required, a frequency within the imaging frequency range that is higher than a preset imaging frequency threshold is selected, wherein the imaging frequency threshold is the minimum frequency required to achieve high resolution.

[0103] S602, the PMUT array chip responds to the imaging excitation signal, emits an incident sound wave, and after receiving the reflected sound wave, returns an imaging reception signal to the excitation device.

[0104] In this embodiment, the reflected sound wave includes a reflected sound signal of the incident sound wave at the micro-nano robot. The high-frequency receiving signal is an electrical signal obtained by converting the reflected sound wave.

[0105] S603: The excitation device performs ultrasonic imaging based on the imaging reception signal to generate a positioning ultrasonic image.

[0106] In this embodiment, positioning ultrasound imaging is used to visualize the micro-nano robot to achieve positioning of the micro-nano robot based on ultrasound imaging.

[0107] S604: When the target driving moment of the control cycle is reached, the excitation device sends a driving excitation signal of the target driving moment to the PMUT array chip.

[0108] In this embodiment, the target driving time includes any driving time. The driving excitation signal includes the driving frequency and the voltage amplitude and phase information corresponding to each array element.

[0109] The driving frequency is a preset low-frequency parameter, and the low-frequency parameter is selected from a driving frequency range lower than the driving frequency threshold. The specific low-frequency parameter selection method is determined based on environmental parameters and driving requirements. The phase information corresponding to each array element is generated based on the target position at the target driving moment. The target position is the position on the target trajectory corresponding to the target driving moment.

[0110] S605. The PMUT array chip responds to the driving excitation signal at the target driving moment to emit target ultrasound to construct a target spatial sound field at the target driving moment to drive the micro-nano robot to move.

[0111] It can be seen from the above technical scheme that the present application provides a control method based on PMUT array, the excitation device sends an imaging excitation signal at the imaging moment to the PMUT array chip when the imaging moment of the preset control cycle is reached, the PMUT array chip responds to the imaging excitation signal, emits an incident sound wave, and after receiving the reflected sound wave, returns a high-frequency receiving signal to the excitation device, the excitation device performs ultrasonic imaging on the micro-nano robot based on the high-frequency receiving signal, generates a positioning ultrasound image, and when the target driving moment of the control cycle is reached, sends a driving excitation signal at the target driving moment to the PMUT array chip, the PMUT array chip responds to the driving excitation signal at the target driving moment and emits a target ultrasound to construct a target spatial sound field at the target driving moment to drive the micro-nano robot to move. The control cycle includes an imaging moment and at least one driving moment arranged in time, and the imaging excitation signal includes a preset imaging frequency, and the driving excitation signal includes a preset driving frequency and the voltage amplitude and phase information corresponding to each array element. It can be seen that this method is based on the multi-frequency characteristics of the PMUT array. Within one control cycle, one ultrasonic imaging and at least one ultrasonic drive are performed in sequence, thereby realizing the self-sensing control of the micro-nano robot by the PMUT array chip. At the imaging moment of each control cycle, the micro-nano robot is ultrasonically imaged based on the imaging excitation signal, and the driving excitation signal at each driving moment is generated or adjusted based on the positioning ultrasonic image, thereby realizing self-sensing control of the micro-nano robot and improving the control accuracy.

[0112] Figure 7a A specific structural diagram of a PMUT array-based control system provided in an embodiment of the present application is shown in FIG. Figure 7a As shown, the manipulation system includes a micro-nano robot, a PMUT array chip, and an excitation device, wherein the PMUT array chip is an integrated PMUT array ( Figure 7aThe invention relates to an integrated chip of a signal transceiver module (with a PMUT array as an example) and a signal transceiver module. It should be noted that the signal transceiver module may include a transmitting circuit and a receiving circuit, for example, the transmitting circuit and the receiving circuit may be a COMS circuit. The excitation device may be a terminal device such as a mobile phone, a tablet computer, a wearable device, a vehicle-mounted device, an augmented reality (AR) / virtual reality (VR) device, a notebook computer, an ultra-mobile personal computer (UMPC), a netbook, a personal digital assistant (PDA), etc., or a server device such as a single-point server and a server cluster, and the embodiments of the present application do not impose any restrictions on this.

[0113] based on Figure 7a The control system shown in the embodiment of the present application provides a specific implementation method of the control method based on the PMUT array. Based on the multi-frequency characteristics of the PMUT array, this method can realize the control of the micro-nano robot through high-frequency imaging and low-frequency driving, thereby improving the spatial resolution and driving accuracy of ultrasonic imaging. Figure 7b A flowchart of a specific implementation method of a PMUT array-based control method provided in an embodiment of the present application is shown in FIG. Figure 7b As shown, this method specifically includes:

[0114] S701. When the imaging time of a preset control cycle is reached, the high-frequency imaging module in the excitation device sends a high-frequency excitation signal at the imaging time to the signal transceiver module.

[0115] In this embodiment, the high-frequency excitation signal is used to control the signal transceiver module to send an electrical pulse signal to the PMUT array. The high-frequency excitation signal includes a preset high-frequency imaging frequency, an excitation voltage, and the number of transmitted sine wave cycles. Among them, the imaging frequency is a high-frequency parameter higher than the preset imaging frequency threshold. For example, the high-frequency excitation signal includes an imaging frequency of 7MHz, an excitation voltage of 3Vpp, and a number of transmitted sine wave cycles of 1. It should be noted that the imaging frequency threshold is the minimum frequency value that ensures that the spatial resolution reaches the preset high resolution.

[0116] In this embodiment, the control cycle includes an imaging moment and at least one driving moment arranged in chronological order.

[0117] S702 , the signal transceiver module receives the high-frequency excitation signal through the receiving circuit, responds to the high-frequency excitation signal through the transmitting circuit, and sends an electrical pulse signal to the PMUT array.

[0118] S703. After receiving the electrical pulse signal, the PMUT array emits an incident sound wave based on the electrical pulse signal.

[0119] In this embodiment, the incident sound wave includes an acoustic pulse wave.

[0120] S704 , the PMUT array receives the reflected sound wave, and sends an electrical pulse signal to the signal transceiver module based on the reflected sound wave.

[0121] In this embodiment, the reflected sound wave is obtained by reflecting the incident sound wave at the micro-nano robot.

[0122] S705 , the signal transceiver module receives the electrical pulse signal through the receiving circuit, and sends a high-frequency receiving signal to the high-frequency imaging module through the transmitting circuit in response to the electrical pulse signal.

[0123] S706: The high-frequency imaging module generates a positioning ultrasound image at the imaging moment based on the high-frequency received signal.

[0124] S701 to S706 are the ultrasonic imaging stage of a PMUT array-based control method provided in an embodiment of the present application. In the imaging stage, the PMUT array chip responds to the imaging excitation signal, i.e., the high-frequency excitation signal, emitted by the excitation device, and after receiving the reflected sound wave, returns the high-frequency receiving signal to the excitation device so that the excitation device performs ultrasonic imaging on the micro-nano robot based on the high-frequency receiving signal. Since the imaging frequency carried in the high-frequency excitation signal is a high-frequency parameter, high-frequency imaging can be achieved, thereby improving the spatial resolution of ultrasonic imaging.

[0125] like Figure 8 As shown, Figure 8 A schematic diagram of an ultrasonic imaging result provided in this embodiment uses high-frequency 7 MHz excitation to image the micro-nano robot in the body. Due to the difference in acoustic impedance between the micro-nano robot and the liquid environment, the image (circular frame) and position of the micro-nano robot can be clearly presented.

[0126] S707. When the target driving moment of the control cycle is reached, the low-frequency control module in the excitation device generates a low-frequency excitation signal of the target driving moment based on the target operation.

[0127] In this embodiment, the target driving moment is any driving moment in the control cycle, and the target operation of the control cycle is used to instruct the micro-nano robot to move along the target route to the target end position of the control cycle, wherein the target route includes the target position corresponding to each driving moment in the control cycle. The low-frequency excitation signal includes the driving frequency and the voltage amplitude and phase information corresponding to each array element. The driving frequency is a preset low-frequency parameter (lower than the preset driving frequency threshold), such as 2.3MHz. The voltage amplitude is a preset voltage value, such as 3Vpp.

[0128] In this embodiment, a virtual sound field is constructed based on the initial position and target position of the micro-nano robot. Based on the virtual sound field, the phase information corresponding to each array element is calculated by a back-projection algorithm, wherein if the target driving moment is not the first driving moment, the initial position is the target position at the previous driving moment. If the target driving moment is the first driving moment, the initial position is the position of the micro-nano robot at the imaging moment, i.e., the imaging position.

[0129] It should be noted that the target operation can be generated in response to an input operation, for example, the low-frequency control module generates a target operation that instructs the micro-nano robot to move to the target end point along the trajectory formed by the target positions corresponding to each target driving moment, after receiving the position information of the target end point input by the operator through the input device. Alternatively, the target operation can be automatically planned based on the position of each micro-nano robot indicated by the positioning ultrasound image and the end point position of each micro-nano robot indicated by the target pattern in the received target operation instruction.

[0130] S708. The low-frequency control module sends a low-frequency excitation signal at the target driving moment to the signal transceiver module.

[0131] S709 , the signal transceiver module receives the low-frequency excitation signal through the receiving circuit, and sends an electrical pulse signal to the PMUT array through the transmitting circuit in response to the low-frequency excitation signal.

[0132] S710, the PMUT array emits target ultrasound according to the electrical pulse signal to construct a target spatial sound field at the target driving moment to drive the micro-nano robot to move to the target position.

[0133] S707~S710 are the ultrasonic driving stage of a control method based on a PMUT array provided in an embodiment of the present application. In the driving stage, the PMUT array chip responds to the ultrasonic excitation signal emitted by the excitation device, that is, the low-frequency excitation signal, to emit a target ultrasound to construct a target spatial sound field at the driving moment. Since the low-frequency excitation signal includes the driving frequency and the voltage amplitude and phase information corresponding to each array element, wherein the driving frequency is a low-frequency parameter, and the phase information includes the phase information and voltage amplitude calculated based on the virtual sound field using the back-projection algorithm. Therefore, the target spatial sound field at the driving moment constructed based on the target ultrasound can realize driving the micro-nano robot to the target position. It can be seen that this method realizes the low-frequency drive of the micro-nano robot by controlling the PMUT array chip by flexibly configuring the low-frequency excitation signal at each driving moment, thereby improving the driving accuracy and flexibility. The flexible configuration of the control accuracy can be realized through the configuration of the control cycle, while taking into account the reduction of power consumption.

[0134] It can be seen from the above technical scheme that the present application provides a control method based on the PMUT array. At the imaging moment, the PMUT array chip responds to the high-frequency excitation signal emitted by the excitation device and emits an incident sound wave. After receiving the reflected sound wave, the PMUT array chip returns a high-frequency receiving signal to the excitation device so that the excitation device performs ultrasonic imaging of the micro-nano robot based on the high-frequency receiving signal. After the ultrasonic micro-nano robot is accurately positioned through ultrasonic imaging, the target ultrasound is emitted at each driving moment in response to the low-frequency excitation signal emitted by the excitation device, and the target spatial sound field at the driving moment is constructed to drive the micro-nano robot to move along the moving trajectory indicated by the target operation, thereby realizing precise driving of the ultrasonic micro-nano robot. Among them, one control cycle includes an imaging moment and at least one driving moment arranged in sequence. Therefore, through the configuration of the control cycle, the PMUT array chip sends out a high-frequency excitation signal and a low-frequency driving signal according to the timing indicated by the control cycle. The high-frequency excitation signal is used to achieve a high-resolution ultrasonic imaging, and the low-frequency driving signal is used to achieve at least one ultrasonic drive by positioning the position information fed back in real time by the ultrasonic image. Thus, the PMUT array chip can realize self-sensing control of the micro-nano robot, and the visualization of the control process of the micro-nano robot is realized at the imaging moment of each control cycle. Based on the visualization result, the low-frequency driving signal at each driving moment is generated or adjusted, and the imaging accuracy and driving accuracy are improved at the same time.

[0135] Fig. 9 A signal interaction diagram of a PMUT array-based control method provided in an embodiment of the present application is shown in FIG. Fig. 9 As shown, the computer sends out a high-frequency excitation signal (high frequency 7MHz, 3Vpp, 1 cycle), controls the CMOS circuit to send an electrical pulse signal to the PMUT array, and the PMUT array converts the received electrical pulse signal into an acoustic pulse wave, and sends out an incident acoustic wave. The acoustic pulse wave is reflected at the ultrasonic micro-nano robot to form an acoustic reflection signal, that is, a reflected acoustic wave. The acoustic reflection signal returns to the PMUT array, and the acoustic reflection signal is converted into a high-frequency receiving signal by the CMOS circuit and transmitted to the computer. The computer performs ultrasonic imaging, image processing, and target positioning of the micro-nano robot based on the high-frequency receiving signal, and further visualizes the ultrasonic imaging of the micro-nano robot to locate the position of the micro-nano robot.

[0136] Based on the positioning results of the micro-nano robot and the set target operation, the computer generates a driving instruction corresponding to each driving moment in a control cycle, and uses a back-projection algorithm based on the target operation to obtain a low-frequency excitation signal corresponding to each driving instruction, wherein the target operation includes movement or patterning, and patterning refers to driving multiple micro-nano robots to their respective target positions at the same time to form a target pattern. The driving instruction at the driving moment instructs each micro-nano robot to move to the target position at the driving moment.

[0137] Specifically, the excitation device (such as a computer) calculates the voltage amplitude and phase information that needs to be applied to each element in the PMUT array at the driving moment based on the back-projection algorithm according to the driving instruction, and obtains the low-frequency excitation signal corresponding to the driving moment.

[0138] Fig.10 A schematic diagram of a back-projection algorithm provided in an embodiment of the present application. Fig.10 As shown, this method is used to determine the phase information and voltage amplitude of the array channel located at the plane point (m, n, p) of the ultrasonic PMUT array at the target driving time t, thereby generating the target space acoustic field at time t in the control space above the PMUT array, and driving the micro-nano robot to complete directional movement at time t. In order to achieve the above goal, the target driving time is set as the first driving time after the imaging time, and the target space acoustic field of any point (x, y, z) in the control space at time t is recorded as P(x, y, z, t). According to the position of the micro-nano robot indicated by the imaging time t, the acoustic tweezers theory gives the corresponding control target space point (x0, y0, z0) at time t as the location of the center of the high sound pressure focus point. The projection algorithm assumes that the target control function C(x0, y0, z0, t) is 1, and the target control function at the location of the non-high sound pressure focus point center is 0. Substituting the target control function C(x, y, z, t) into the algorithm formula, according to the sound propagation theory, the ideal voltage amplitude and phase information that needs to be applied to any array channel in the PMUT array at the target driving time t can be reversely deduced. Next, the device is stimulated according to Generate a low-frequency excitation signal to approximate The voltage amplitude and phase The signal is transmitted to the transmitting circuit, which sends out an electrical pulse signal to control the PMUT array. The actual 3D spatial sound field P (x, y, z, t) is constructed through the vibration of the PMUT array, and the micro-nano robot is driven to complete the movement at time t according to the driving instructions.

[0139] It should be noted that a complete manipulation may include multiple manipulation cycles. Each manipulation cycle achieves the target operation of the manipulation cycle through one ultrasonic imaging and multiple ultrasonic drives. The target operation of this manipulation cycle can be adjusted through the positioning ultrasonic image of each manipulation cycle to adjust the driving excitation signal corresponding to each driving moment in this manipulation cycle. Specifically, the computer will alternately perform ultrasonic imaging and ultrasonic drive according to a preset alternating cycle, and will continuously adjust the driving excitation signal according to the ultrasonic image positioning results to achieve self-sensing control of the micro-nano robot, so as to achieve the purpose of controlling the micro-nano robot to move along the trajectory indicated by the target operation to achieve the target operation in each manipulation cycle.

[0140] For example, the target manipulation cycle includes one ultrasonic imaging and three ultrasonic drivings, that is, the target manipulation cycle includes:

[0141] The computer-controlled integrated chip (PMUT array chip) emits incident sound waves at time t (imaging time) and returns high-frequency receiving signals. After ultrasonic imaging is achieved, a driving signal sequence is generated based on the target operation. The driving signal sequence includes a driving instruction T1 at time t+1, a driving instruction T2 at time t+2, and a driving instruction T3 at time t+3, wherein T1 indicates driving each ultrasonic micro-nano robot to move to its respective first target position, T2 indicates driving each micro-nano robot to its respective second target position, and T3 indicates driving each micro-nano robot to its respective third target position. The driving instructions in the driving signal sequence are issued in sequence to drive each micro-nano robot to move along its respective first target position, second target position, and third target position, completing the target operation of this control cycle.

[0142] At the imaging time of the next control cycle of the target control cycle, the control result of the target control cycle is imaged. Fig.11 A schematic diagram of a control result provided in an embodiment of the present application is shown as follows: Fig.11 As shown in the figure, after excitation, under the excitation voltage of 3Vpp, a 2.3MHz driving frequency is used to apply delay (phase information) to each element of the PMUT array to construct a spatial focused sound field. After three ultrasonic drives, multiple micro-nano robots form a dot pattern at the focal position due to the repulsion of high sound pressure (through Fig.11 (marked by the dotted rectangular box in the figure).

[0143] It should be noted that by flexibly configuring the driving excitation signals for different types of micro-nano robots and constructing different sound fields, diversified control of different types of micro-nano robots can be achieved, so that different types of micro-nano robots present different patterns.

[0144] In summary, based on the large-area and high-density array of PMUT array elements, the back-projection method is used to control the distribution of the sound field to achieve the control diversity of the micro-nano robot. Based on the large-area and high-density array of PMUT elements, the multi-aperture beam synthesis technology is used to achieve high-precision imaging monitoring of micro-nano robots, and high-temporal resolution and high-spatial resolution imaging monitoring of micro-nano robots are achieved. The highly integrated and low-power PMUT array chip is used to perform self-sensing control on the micro-nano robot, realizing a long-term wearable self-sensing control system. In practical applications, in order to address the problem of low target control accuracy due to low element density and small number of elements in traditional block ceramic arrays, the PMUT array in the control system provided by the embodiment of the present application provides an extremely high element density and a large area of ​​PMUT elements, thereby improving the sound field accuracy and thus improving the control accuracy. In order to solve the problem that traditional block ceramic arrays are difficult to integrate and the entire acoustic tweezers system is bulky, the integrated PMUT array chip in the control system provided by the embodiment of the present application makes the entire system miniaturized. In response to the traditional method of achieving imaging and control at the same frequency, the control method provided by the embodiment of the present application uses the same PMUT array to achieve two frequencies, namely low-frequency control and high-frequency imaging, which greatly takes into account both imaging accuracy and control accuracy.

[0145] It should be noted that the PMUT array-based control method provided in this application may also include other specific implementation methods:

[0146] For example, in an optional embodiment, a PMUT array chip integrates multiple PMUT arrays. Aiming at the small size and fast movement of micro-nano robots, a beamforming method of a multi-aperture PMUT ultrasound array is constructed. Multiple PMUT arrays are spatially distributed to optimize the ultrasound transmission sequence, receiving sequence and multi-aperture PMUT ultrasound image reconstruction. When multiple PMUT arrays simultaneously acquire ultrasound images of a large area, the expanded imaging range makes it easier to capture fast-moving micro-nano robots. In the imaging stage, the high-frequency imaging module generates a positioning ultrasound image at the imaging moment based on the high-frequency receiving signals corresponding to the multiple PMUT arrays received. Multiple PMUT arrays can be used to image the same area. After the images are superimposed, the signal increases while the noise remains unchanged, further improving the spatial resolution and the positioning accuracy of small-sized micro-nano robots.

[0147] It can be seen that this method breaks through the limitations on the control freedom and spatial resolution of the micro-nano robot through the low power consumption, low integration difficulty and high density of the PMUT array. For another example, in an optional embodiment, the excitation device in the control system also includes a low-frequency imaging module, and the PMUT array chip integrates a low-frequency PMUT array and a high-frequency PMUT array. In the imaging stage, if the preset low-frequency imaging conditions are met, a low-frequency imaging excitation signal is sent through the low-frequency imaging module, and the low-frequency PMUT array responds to the low-frequency imaging excitation signal to send an incident sound wave and receives a reflected sound wave, and then returns a low-frequency imaging receiving signal. The low-frequency imaging module realizes low-frequency ultrasonic imaging based on the low-frequency imaging receiving signal. If the preset high-frequency imaging conditions are met, a high-frequency imaging excitation signal is sent through the high-frequency imaging module, and the high-frequency PMUT array responds to the high-frequency imaging excitation signal to send an incident sound wave and receives a reflected sound wave, and then returns a high-frequency imaging receiving signal. The high-frequency imaging module realizes high-frequency ultrasonic imaging based on the high-frequency imaging receiving signal. Among them, the low-frequency imaging conditions include that the micro-nano robot is a far-field micro-nano robot, and the high-frequency imaging conditions include that the micro-nano robot is a near-field micro-nano robot.

[0148] Since low-frequency ultrasound can achieve far-field low-resolution imaging while high-frequency ultrasound is conducive to high-precision near-field imaging, the multi-frequency characteristics of PMUT can be used to achieve variable-frequency imaging, that is, low-frequency excitation signals are used to locate far-field micro-nano robots, and high-frequency excitation signals are used to locate near-field micro-nano robots, thereby meeting the positioning needs of micro-nano robots at different distances.

[0149] An integrated chip is also provided in an embodiment of the present application. The integrated chip integrates at least one PMUT array. The integrated chip is used to implement any step performed by the PMUT array chip in the PMUT array-based control method provided in an embodiment of the present application.

[0150] The present application also provides an electronic device in an embodiment. Fig.12 As shown, it shows a schematic diagram of the structure of an electronic device suitable for implementing the embodiment of the present application. The electronic device in the embodiment of the present application may include but is not limited to fixed terminals such as mobile phones, laptops, PDAs (personal digital assistants), PADs (tablet computers), desktop computers, etc. Fig.12 The electronic device shown is merely an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0151] like Fig.12As shown, the electronic device may include a processing device (e.g., a central processing unit, a graphics processing unit, etc.) 1201, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 1202 or a program loaded from a storage device 1208 to a random access memory (RAM) 1203. When the electronic device is powered on, various programs and data required for the operation of the electronic device are also stored in the RAM 1203. The processing device 1201, the ROM 1202, and the RAM 1203 are connected to each other via a bus 1204. An input / output (I / O) interface 1205 is also connected to the bus 1204.

[0152] Typically, the following devices may be connected to the I / O interface 1205: an input device 1206 including, for example, a touch screen, a touch pad, a keyboard, a mouse, a camera, a microphone, an accelerometer, a gyroscope, etc.; an output device 1207 including, for example, a liquid crystal display (LCD), a speaker, a vibrator, etc.; a storage device 1208 including, for example, a memory card, a hard disk, etc.; and a communication device 1209. The communication device 1209 may allow the electronic device to communicate with other devices wirelessly or by wire to exchange data. Although Figure 6 An electronic device having various devices is shown, but it should be understood that it is not required to implement or possess all the devices shown. More or fewer devices may be implemented or possessed instead.

[0153] An embodiment of the present application also provides a computer program product including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements any step of the stimulation device in the PMUT array-based control method provided in the embodiment of the present application.

[0154] A computer-readable storage medium is also provided in an embodiment of the present application. The storage medium carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement any step of the stimulation device in the PMUT array-based control method provided in the embodiment of the present application.

[0155] It should also be noted that the device embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed over multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. In addition, in the drawings of the device embodiments provided by the present application, the connection relationship between the modules indicates that there is a communication connection between them, which may be specifically implemented as one or more communication buses or signal lines.

[0156] Through the description of the above implementation mode, the technicians in the field can clearly understand that the present application can be implemented by means of software plus necessary general hardware, and of course, it can also be implemented by special hardware including special integrated circuits, special CPUs, special memories, special components, etc. In general, all functions completed by computer programs can be easily implemented by corresponding hardware, and the specific hardware structure used to implement the same function can also be various, such as analog circuits, digital circuits or special circuits. However, for the present application, software program implementation is a better implementation mode in more cases. Based on such an understanding, the technical solution of the present application is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a readable storage medium, such as a computer floppy disk, a U disk, a mobile hard disk, a ROM, a RAM, a disk or an optical disk, etc., including a number of instructions to enable a computer device (which can be a personal computer, a training device, or a network device, etc.) to execute the methods described in each embodiment of the present application.

[0157] In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. When implemented by software, all or part of the embodiments may be implemented in the form of a computer program product.

[0158] The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a training device, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, training device, or data center. The computer-readable storage medium may be any available medium that a computer can store or a data storage device such as a training device, a data center, etc. that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive (SSD)), etc.

Claims

1. A control method based on PMUT array, characterized in that: Applicable to a PMUT array-based control system, the control system comprising a PMUT array chip and an excitation device, the PMUT array chip integrating at least one PMUT array, including: The excitation device sends an imaging excitation signal of the imaging moment to the PMUT array chip when the imaging moment of the preset control cycle is reached; the control cycle includes an imaging moment and at least one driving moment arranged in time sequence, and the imaging excitation signal includes a preset imaging frequency; The PMUT array chip responds to the imaging excitation signal, emits an incident sound wave, and after receiving the reflected sound wave, returns an imaging reception signal to the excitation device; the reflected sound wave includes a reflected sound signal of the incident sound wave at the micro-nano robot; The excitation device performs ultrasonic imaging based on the imaging reception signal to generate a positioning ultrasonic image; When the target driving moment of the control cycle is reached, the excitation device sends a driving excitation signal of the target driving moment to the PMUT array chip; wherein the target driving moment includes any driving moment, and the driving excitation signal includes a driving frequency and voltage amplitude and phase information corresponding to each array element; The PMUT array chip responds to the driving excitation signal at the target driving moment, emits target ultrasound to construct a target spatial sound field at the target driving moment, and the target spatial sound field is used to drive the micro-nano robot to move.

2. The PMUT array-based control method according to claim 1, characterized in that: The excitation device sends an imaging excitation signal at the imaging moment to the PMUT array chip when the imaging moment of the preset control cycle is reached, including: When the excitation device determines that the preset low-frequency imaging condition is met, the imaging excitation signal generated at the imaging moment is a low-frequency excitation signal, and the imaging frequency included in the low-frequency excitation signal is a high-frequency parameter lower than the preset imaging frequency threshold; When the excitation device determines that the preset high-frequency imaging condition is met, the imaging excitation signal generated at the imaging moment is a high-frequency excitation signal, and the imaging frequency included in the high-frequency excitation signal is a low-frequency parameter higher than the imaging frequency threshold.

3. The PMUT array-based control method according to claim 2, characterized in that: The PMUT array chip integrates at least one PMUT array and a corresponding signal transceiver module; The PMUT array chip responds to the imaging excitation signal, emits an incident sound wave, and returns an imaging reception signal to the excitation device after receiving the reflected sound wave, including: The signal transceiver module receives the imaging excitation signal through a receiving circuit, responds to the imaging excitation signal through a transmitting circuit, and sends an electrical pulse signal to the PMUT array; The PMUT array emits the incident sound wave based on the electrical pulse signal; The PMUT array sends an electrical pulse signal to the signal transceiver module based on the reflected sound wave of the incident sound wave; The signal transceiver module receives the electric pulse signal through the receiving circuit, and sends the imaging receiving signal to the excitation device through the transmitting circuit in response to the electric pulse signal.

4. The PMUT array-based control method according to claim 3, characterized in that: The excitation device performs ultrasonic imaging based on the imaging reception signal to generate a positioning ultrasonic image, including: The excitation device receives a plurality of the imaging reception signals, performs ultrasonic imaging based on the plurality of the imaging reception signals, and generates the positioning ultrasonic image.

5. The PMUT array-based control method according to claim 1, characterized in that: When the target driving moment of the control cycle is reached, the excitation device sends a driving excitation signal of the target driving moment to the PMUT array chip, including: When the excitation device reaches the target driving moment of the control cycle, based on the target operation of the control cycle, the target position corresponding to the target driving moment is obtained; the target operation of the control cycle is used to instruct the micro-nano robot to move along the target route to the target terminal position of the control cycle, and the target route includes the target positions corresponding to each driving moment; The excitation device calculates the voltage amplitude and phase information applied to each array element in the PMUT array chip based on the target position by using a back-projection algorithm; The excitation device acquires a preset low-frequency driving frequency, where the low-frequency driving frequency is a frequency parameter lower than a preset driving frequency threshold; The excitation device generates a driving excitation signal at the target driving moment, wherein the driving excitation signal at the target driving moment includes the low-frequency driving frequency and voltage amplitude and phase information on each array element.

6. The PMUT array-based control method according to claim 5, characterized in that: The excitation device calculates the voltage amplitude and phase information applied to each array element in the PMUT array chip based on the target position by using a back-projection algorithm, including: Constructing a virtual sound field based on the initial position and target position of the micro-nano robot at the target driving moment; Based on the acoustic tweezers theory and the virtual sound field, determining the target space point corresponding to the position of the center of the high sound pressure focus point in the control space; The function value of the target control function corresponding to the target space point is set to 1 to generate a first equation; The function values ​​of the target control function corresponding to the spatial points in the control space other than the target spatial point are set to 0, to generate a second equation; Solving a joint equation using a back-projection algorithm to obtain ideal voltage amplitude and ideal phase information of each array element, wherein the joint equation includes the first equation and the second equation; Based on the ideal voltage amplitude and the ideal phase information of each array element, the voltage amplitude and phase information applied to each array element in the PMUT array chip are respectively obtained.

7. The PMUT array-based control method according to claim 6, characterized in that: The PMUT array-based control method further includes: The excitation device acquires a target operation instruction, wherein the target operation instruction includes a target pattern, and the target pattern is used to indicate the end positions of the plurality of micro-nano robots; After the excitation device performs ultrasonic imaging based on the imaging reception signal and generates a positioning ultrasonic image, it generates a target operation of the control cycle based on the target pattern and the positioning result, and the positioning result includes the imaging position of each of the micro-nano robots indicated by the positioning ultrasonic image.

8. A control system based on PMUT array, characterized in that: include: PMUT array chip and excitation equipment; The excitation device is used for: At the imaging moment of the preset control cycle, an imaging excitation signal of the imaging moment is sent to the PMUT array chip, and ultrasonic imaging is performed based on the imaging reception signal to generate a positioning ultrasonic image; the control cycle includes an imaging moment and at least one driving moment arranged in chronological order, and the imaging excitation signal includes a preset imaging frequency; When the target driving moment of the control cycle is reached, a driving excitation signal of the target driving moment is sent to the PMUT array chip; wherein the target driving moment includes any driving moment, and the driving excitation signal includes a driving frequency and voltage amplitude and phase information corresponding to each array element; The PMUT array chip is used for: In response to the imaging excitation signal, an incident sound wave is emitted, and after receiving a reflected sound wave, the imaging reception signal is returned to the excitation device; the reflected sound wave includes a reflected sound signal of the incident sound wave at the micro-nano robot; In response to the driving excitation signal at the target driving moment, a target ultrasound is emitted to construct a target spatial sound field at the target driving moment, and the target spatial sound field is used to drive the micro-nano robot to move.

9. An integrated chip, characterized in that: At least one PMUT array is integrated, and the integrated chip is used to implement the steps performed by the PMUT array chip in the PMUT array-based manipulation method as described in any one of claims 1 to 7.

10. An electronic device, characterized in that: The method comprises at least one processor and a memory connected to the processor, wherein: The memory is used to store computer programs; The processor is used to execute the computer program so that the electronic device can implement the steps performed by the stimulation device in the PMUT array-based manipulation method as described in any one of claims 1 to 7.

Images