Single-cavity passive air bag

Abstract

The invention relates to the technical field of semiconductors, in particular to a single-cavity passive air bag, which comprises a body, and the body comprises a shell, an air film and a piston; an air chamber is formed between the air film and the piston, and the side wall of the shell corresponding to the air chamber is communicated with a breather pipe; the bearing platform is arranged above the gas film and fixedly connected with the gas film, and the upper end of the bearing platform has an extra bearing area; the adjusting assembly comprises a driving end and an executing end, the executing end is located in the shell and connected with the piston, and the executing end is acted by the driving end to adjust the volume of the air chamber and change the rigidity and inherent frequency of the passive air bag. And meanwhile, the volume of the air chamber can be finely adjusted to meet the rigidity requirement of the air bag in different working environments, and certain bearing capacity is achieved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a single-cavity passive airbag. Background Art

[0002] The semiconductor manufacturing process involves many precise mechanical and electronic operations, such as wafer processing, etching, photolithography, ion implantation, etc. These steps need to be carried out in a clean room and are very sensitive to slight changes in the environment. Even slight vibrations can have a significant impact on the product yield, so passive vibration isolators need to be added to key parts for effective isolation. At the same time, during the packaging process, the chips on the wafer need to be packaged into various packaging forms, such as DIP, QFP, BGA, etc., which also requires packaging equipment to have high precision and high reliability.

[0003] After a traditional airbag is generated, its stiffness and damping are fixed and cannot be adjusted. At the same time, environmental interference is relatively complex, which will affect the stiffness and carrying capacity of the airbag. In addition, the contact area of ​​the airbag itself is difficult to change, and the natural frequency of the airbag itself cannot be adjusted. The natural frequency of the airbag can only be changed by changing the structural parameters of the airbag. In the prior art, the natural frequency of the airbag is changed by changing the volume of the air chamber by inflation or deflation or adding auxiliary airbags. However, the above method cannot adjust the natural frequency of the airbag according to different working conditions and also requires additional space.

[0004] Therefore, the present application develops a single-chamber passive airbag to solve the problems existing in the prior art. Summary of the invention

[0005] The purpose of the present invention is to provide a single-cavity passive airbag to solve the problem in the prior art that the airbag is difficult to change its own stiffness and cannot have a strong stiffness while ensuring the airbag's own carrying capacity.

[0006] The technical solution of the present invention is: a single-chamber passive airbag, comprising:

[0007] The main body comprises a shell, an air film and a piston; an air chamber is formed between the air film and the piston, and a vent pipe is connected to the shell side wall corresponding to the air chamber;

[0008] A bearing platform is arranged above the air film and fixedly connected to the air film, and the upper end of the bearing platform has an additional bearing area;

[0009] The regulating component comprises a driving end and an executing end. The executing end is located in the housing and connected to the piston. The driving end is used to adjust the volume of the air chamber and change the stiffness and natural frequency of the passive airbag.

[0010] Preferably, the air film includes a mounting surface, an abutment surface and a connecting surface. The mounting surface is arranged between the shell and the supporting platform and surrounds the top of the air chamber in a ring shape. The abutment surface is fitted with the bottom end of the supporting platform. The outer contour of the abutment surface is connected to the inner contour of the mounting surface through the connection and forms a chamber with the outer wall surface of the supporting platform.

[0011] Preferably, the connecting surface extends from an inner contour of the mounting surface toward an outer contour of the abutting surface and is arranged at an inclination.

[0012] Preferably, the executing end includes a transverse movement part and a pair of lifting parts, the transverse movement part is located between the pair of lifting parts, the transverse movement part is rotationally connected to the driving end through a control rod, and a through hole is provided on the side wall of the shell corresponding to the position of the control rod for controlling the rotation of the control rod and the movement of the transverse movement part. The contact surface between the transverse movement part and the lifting part is an inclined surface. When the driving end drives the control rod to rotate, the transverse movement part moves radially along the shell and slides relative to the two lifting parts, so that the lifting part rises or falls, thereby changing the volume of the air chamber.

[0013] Preferably, a slide groove is provided on the inclined surface of the transverse moving part, and a protrusion matching the slide groove is correspondingly provided on the inclined surface of the lifting part. When the slide groove matches the protrusion, the lifting part and the transverse moving part fit tightly.

[0014] Preferably, the transverse displacement portion is provided with a groove along the axial direction of the shell, a guide column is provided in the groove, the guide column is arranged along the axial direction of the shell, the end of the control rod away from the driving end penetrates the radial direction of the guide column and is rotationally connected to the guide column, and a limit block is also provided at the end away from the driving end.

[0015] Preferably, a sleeve is provided on a surface of the piston in contact with the execution end and on the bottom of the housing. The sleeve is sleeved on both ends of the guide column. When the lifting part moves, the sleeve slides along the axial direction of the guide column.

[0016] Preferably, a plurality of sealing rings are provided on the outer wall surface of the piston, and the sealing rings are tightly fitted with the inner wall of the air chamber.

[0017] Preferably, a sensor is provided at the bottom of the housing for measuring the height of the piston, thereby adjusting the volume of the air chamber.

[0018] Compared with the prior art, the advantages of the present invention are:

[0019] (1) Through the relative movement of the lateral moving part and the lifting part, the lifting part drives the piston to move up and down, thereby changing the volume of the air chamber. At the same time, the volume of the air chamber can also be fine-tuned to meet the stiffness requirements of the airbag under different working environments and have a certain load-bearing capacity;

[0020] (2) The air film is arranged between the bearing platform and the shell to improve the air tightness of the air chamber, and the air film and the outer wall surface of the bearing platform form a chamber. After the air chamber is inflated, the connecting surface of the air film is deformed in the direction of the chamber and supported on the outer wall surface of the bearing platform and the inner wall surface of the shell, providing radial support force to prevent the bearing platform from lateral movement or dislocation;

[0021] (3) A groove and a guide column are provided on the transverse moving part. The control rod is rotatably connected to the guide column. When the transverse moving part moves, the guide column moves in the groove, thereby reducing the space occupied by the end of the transverse moving part. In this way, not only can the natural frequency of the airbag be adjusted in a confined space, but the occupation of the confined space can also be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described below in conjunction with the accompanying drawings and embodiments:

[0023] Figure 1 This is a schematic diagram of the internal structure of a single-chamber passive airbag according to the present invention;

[0024] Figure 2 This is a schematic diagram of the internal explosion of a single-chamber passive airbag according to the present invention;

[0025] Figure 3 A schematic diagram of the initial position of a single-chamber passive airbag according to the present invention;

[0026] Figure 4 It is a schematic diagram of the air chamber volume adjustment in a single-chamber passive airbag according to the present invention;

[0027] Figure 5 A cross-sectional view of a single-chamber passive airbag according to the present invention;

[0028] Figure 6 The figure is a schematic structural diagram of a single-chamber passive airbag according to the present invention.

[0029] Wherein: 1, body; 11, shell; 12, air film; 121, mounting surface; 122, abutment surface; 123, connection surface; 124, chamber; 13, piston; 14, air chamber; 15, sealing ring;

[0030] 2. Carrying platform;

[0031] 3. Adjustment assembly, 31. Driving end; 32. Executing end; 321. Transverse moving part; 322. Lifting part; 323. Slide; 324. Protrusion; 325. Groove; 326. Guide column; 327. Limit block; 328. Sleeve; 33. Control rod; 34. Through hole;

[0032] 4. Sensor. DETAILED DESCRIPTION

[0033] The present invention is further described in detail below in conjunction with specific embodiments:

[0034] like Figure 1-Figure 5 As shown, a single-chamber passive airbag includes a main body 1, a supporting platform 2 and an adjustment component 3, wherein the main body 1 includes a shell 11, an air membrane 12 and a piston 13, the air membrane 12 is located on the top of the shell 11 and is fixedly connected to the supporting platform 2, and the supporting platform 2 is located above the air membrane 12 and has an additional bearing area for supporting a workbench or other equipment, and the piston 13 is arranged in the shell 11 to form an air chamber with the air membrane 12, and a ventilation pipe is connected to the side wall of the shell 11 corresponding to the air chamber, which is connected to an external air pump to ventilate the air chamber, and at the same time, the driving end 31 located outside the shell 11 drives the execution end 32 located in the shell 11 to move, changing the volume of the air chamber, thereby changing the stiffness and natural frequency of the airbag, and the stiffness requirements of the airbag in different working environments are achieved through fine-tuning of the execution end 32, and the airbag has a certain bearing capacity.

[0035] After the air chamber is inflated, the volume of the air chamber is changed by adjusting the component 3 to change the stiffness of the airbag. In order to meet the stiffness requirements of the airbag, the air tightness of the air chamber is very important. If the airbag of the air chamber has poor air tightness, external gas or moisture will penetrate into the air chamber, thereby affecting the stiffness and stability of the airbag. In this embodiment, the air film 12 includes a mounting surface 121, abutting surface 122 and a connecting surface 123. The mounting surface 121 is located between the shell 11 and the supporting platform 2, and is annularly surrounding the top of the air chamber, which helps to enhance the air film 12 and the shell 11 and the supporting platform 2. The annular structure can evenly distribute the pressure to prevent the air film 12 from being offset or deformed when subjected to external force. The abutment surface 122 fits with the bottom end of the carrier platform 2, wherein the air film 12 can provide additional support for the carrier platform 2, which helps to enhance the stability of the carrier platform 2 during the semiconductor manufacturing process and prevent it from being displaced due to vibration or external force. The connecting surface 123 connects the inner contour of the mounting surface 121 with the outer contour of the abutment surface 122 to form a complete structure, which can prevent gas leakage and infiltration.

[0036] Furthermore, the air film 12 and the outer wall surface of the supporting platform 2 form a chamber 124, and the connecting surface 123 extends from the inner contour of the mounting surface 121 to the outer contour of the abutting surface 122 and is inclined. The design of the chamber 124 increases the contact area between the air film 12 and the supporting platform 2, thereby improving the stability of the entire structure and providing an additional buffer space for the air film 12. The connecting surface 123 is inclined, and the shell 11 corresponding to the connection between the mounting surface 121 and the connecting surface 123 is provided with a chamfer to provide guidance for the deformation of the air film 12. After the air chamber is inflated, the connecting surface 123 of the air film 12 is deformed in the direction of the chamber 124. The deformed air film 12 is supported on the outer wall surface of the supporting platform 2 and the inner wall surface of the shell 11, providing support force in the radial direction of the shell 11 to prevent the movement or dislocation of the supporting platform 2, while also reducing the risk of gas leakage to ensure the stability of the air pressure inside the airbag.

[0037] In order to achieve the adjustment of the air chamber volume and the adjustment of the airbag stiffness, in this embodiment, the execution end 32 includes a transverse displacement portion 321 and a pair of lifting portions 322. The transverse displacement portion 321 is rotationally connected to the driving end 31 through a control rod 33. When the driving end 31 drives the control rod 33 to rotate, the transverse displacement portion 321 moves along the axial direction of the control rod 33. The corresponding side wall of the shell 11 is provided with a through hole 34 to provide a moving space for the control rod 33 and the transverse displacement portion 321. The contact surface between the lifting portion 322 and the transverse displacement portion 321 is an inclined surface. When the transverse displacement portion 321 moves along the radial direction of the shell 11, the lifting portion 322 moves axially in the shell 11 through the mutual sliding of the inclined surfaces, so that the piston 13 rises or falls to change the volume of the air chamber. The design of the inclined surface enables the lifting portion 322 to move more easily along the axial direction under the action of the transverse displacement portion 321, thereby reducing friction and resistance, improving movement efficiency, and making the movement of the lifting portion 322 more precise and controllable.

[0038] The natural frequency calculation formula of the air film is as follows:

[0039]

[0040] f: natural frequency;

[0041] k: gas polytropic index, which is 1.4;

[0042] F 0 : Initial load, i.e. the initial stiffness of the airbag;

[0043] A: effective bearing area of ​​air film;

[0044] P a : Gauge pressure;

[0045] D: diameter of the air chamber;

[0046] L0 : initial effective depth of the air chamber;

[0047] L 1 : Adjust the height.

[0048] As can be seen from the above formula, after the single-chamber passive airbag is produced, the effective bearing area of ​​the air film will not change, and the relative diameter and effective depth of the air chamber cannot be changed. The only way to change it is by adjusting L 1 , thereby changing the natural frequency of the single-chamber passive airbag.

[0049] Furthermore, a slide groove 323 is provided on the inclined surface of the transverse moving part 321, and a protrusion 324 matching the slide groove 323 is provided on the inclined surface of the lifting part 322. The matching of the slide groove 323 and the protrusion 324 enables the lifting part 322 to move along a specific path under the drive of the transverse moving part 321, thereby realizing precise control of the volume of the air chamber. When the slide groove 323 and the protrusion 324 match, the lifting part 322 and the transverse moving part 321 fit tightly, which can reduce the shaking of the lifting part 322 and the transverse moving part 321 during the movement, thereby enhancing the stability of the entire airbag structure, and at the same time offset the force perpendicular to the moving direction of the transverse moving part 321, preventing the transverse moving part 321 from shifting during the movement.

[0050] When the volume of the air chamber is adjusted by the relative movement of the transverse moving part 321 and the lifting part 322, sufficient space needs to be provided in the axial direction of the shell 11 for the transverse moving part 321 to move, and the control rod 33 penetrates the transverse moving part 321 and is rotatably connected with the transverse moving part 321. When the control rod 33 rotates, the transverse moving part 321 is controlled to rotate with the control rod 33. At this time, the transverse moving part 321 needs to have a longer moving space, thereby increasing the volume of the single-chamber passive airbag. In order to reduce the space occupancy rate of the single-chamber passive airbag in a confined space, the transverse moving part 321 is provided with a groove 325 along the longitudinal direction of the shell 11, and a guide column 326 is provided in the groove 325. The control rod 33 penetrates the transverse moving part 321. 21 and moves along the cross section of the groove 325 and penetrates the guide column 326, and is rotationally connected to the guide column 326. One end of the control rod 33 connected to the guide column 326 is also provided with a limit block 327 to limit the movement range of the control rod 33 and prevent the control rod 33 from exceeding a predetermined position during the movement. When the transverse displacement portion 321 moves, the groove 325 moves accordingly and keeps the guide column 326 in the groove 325. The setting of the groove 325 not only reduces the weight of the single-chamber passive airbag, making it easier to adjust the volume of the air chamber, but also shortens the movement distance of the transverse displacement portion 321 and reduces the occupied volume of the single-chamber passive airbag by setting one end of the control rod 33 on the guide column 326.

[0051] Furthermore, a sleeve 328 is provided on one side of the piston 13 in contact with the actuator end 32 and on the bottom of the housing 11. The sleeve 328 is sleeved on both ends of the guide column 326. When the lifting part 322 moves, the sleeve 328 slides axially along the guide column 326. The cooperation between the guide column 326 and the sleeve 328 provides a clear path for the movement of the lifting part 322, thereby ensuring the stability and accuracy of the lifting part 322 during the movement.

[0052] Furthermore, a plurality of sealing rings 14 are provided on the outer wall surface of the piston 13, and the sealing rings 14 fit tightly with the inner wall of the air chamber to ensure the sealing between the piston 13 and the air chamber, prevent internal gas leakage, and ensure the pressure in the air chamber is stable to avoid system pressure fluctuations caused by gas leakage.

[0053] In order to more accurately measure the change in the volume of the air chamber, a sensor 4 is provided at the bottom of the housing 11 , and the height of the piston 13 is measured by the sensor 4 , thereby calculating the volume of the air chamber.

[0054] The implementation principle of this embodiment:

[0055] Under the condition of achieving the change of the airbag stiffness and ensuring the bearing capacity, the air chamber is inflated through the ventilation pipe, and then the driving end 31 runs to drive the control rod 33 to rotate. One end of the control rod 33 is connected to the guide column 326. The control rod 33 rotates in the transverse portion 321 and the guide column 326. The guide column 326 is fixed to the bottom of the shell 11. The transverse portion 321 moves along the axial direction of the control rod 33. The lifting plate that slides with the transverse portion 321 makes the lifting portion 322 rise and fall under the action of the inclined surface. Thereby, the volume of the air chamber is changed, so that the stiffness of the airbag changes. During the movement of the transverse displacement part 321, the guide column 326 is located in the groove 325, which reduces the moving distance of the transverse displacement part 321 and reduces the space occupied by the single-chamber passive airbag. After ventilation is introduced into the air chamber, the connecting surface 123 of the air membrane 12 is deformed into the chamber 124 and supported on the outer wall surface of the supporting platform 2 and the inner wall surface of the shell 11, providing radial support force for both, thereby preventing radial displacement or misalignment of the supporting platform 2.

[0056] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the scope of protection of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. A single-chamber passive airbag, characterized in that: include: A body (1), the body (1) comprising a shell (11), an air membrane (12) and a piston (13); an air chamber (14) is formed between the air membrane (12) and the piston (13), and a ventilation pipe is connected to the side wall of the shell (11) corresponding to the air chamber (14); A bearing platform (2) is arranged above the air membrane (12) and is fixedly connected to the air membrane (12), and the upper end of the bearing platform (2) has an additional bearing area; The regulating component (3) comprises a driving end (31) and an executing end (32), wherein the executing end (32) is located in the housing (11) and is connected to the piston (13). The driving end (31) is used to adjust the volume of the air chamber (14) and change the stiffness and natural frequency of the passive airbag.

2. A single-chamber passive airbag according to claim 1, characterized in that: The air membrane (12) comprises a mounting surface (121), an abutting surface (122) and a connecting surface (123); the mounting surface (121) is arranged between the shell (11) and the supporting platform (2), and is annularly arranged around the top of the air chamber (14); the abutting surface (122) is fitted with the bottom end of the supporting platform (2); the outer contour of the abutting surface (122) is connected to the inner contour of the mounting surface (121) through the connection, and forms a chamber (124) with the outer wall surface of the supporting platform (2).

3. A single-chamber passive airbag according to claim 2, characterized in that: The connecting surface (123) extends from the inner contour of the mounting surface (121) to the outer contour of the abutting surface (122) and is arranged in an inclined manner.

4. A single-chamber passive airbag according to claim 1, characterized in that: The execution end (32) comprises a transverse portion (321) and a pair of lifting portions (322), wherein the transverse portion (321) is located between the pair of lifting portions (322), and the transverse portion (321) is rotationally connected to the driving end (31) via a control rod (33). A through hole (34) is provided on the side wall of the shell (11) corresponding to the position of the control rod (33) for controlling the rotation of the control rod (33) and the movement of the transverse portion (321). The contact surface between the transverse portion (321) and the lifting portion (322) is an inclined surface. When the driving end (31) drives the control rod (33) to rotate, the transverse portion (321) moves radially along the shell (11) and slides relative to the two lifting portions (322), so that the lifting portion (322) rises or falls, thereby changing the volume of the air chamber (14).

5. A single-chamber passive airbag according to claim 4, characterized in that: A slide groove (323) is provided on the inclined surface of the transverse moving part (321), and a protrusion (324) matching the slide groove (323) is correspondingly provided on the inclined surface of the lifting part (322). When the slide groove (323) matches the protrusion (324), the lifting part (322) and the transverse moving part (321) are tightly fitted.

6. A single-chamber passive airbag according to claim 4, characterized in that: The transverse displacement portion (321) is provided with a groove (325) along the axial direction of the shell (11), and a guide column (326) is provided in the groove (325). The guide column (326) is arranged along the axial direction of the shell (11). The end of the control rod (33) away from the driving end (31) penetrates the radial direction of the guide column (326) and is rotationally connected to the guide column (326), and a limit block (327) is also provided at the end away from the driving end (31).

7. A single-chamber passive airbag according to claim 6, characterized in that: A sleeve (328) is provided on the side of the piston (13) that contacts the actuating end (32) and the bottom of the housing (11). The sleeve (328) is sleeved on both ends of the guide column (326). When the lifting part (322) moves, the sleeve (328) slides along the axial direction of the guide column (326).

8. The single-chamber passive airbag according to claim 1, characterized in that: A plurality of sealing rings (15) are provided on the outer wall surface of the piston (13), and the sealing rings (15) are tightly fitted with the inner wall of the air chamber (14).

9. The single-chamber passive airbag according to claim 1, characterized in that: A sensor (4) is provided at the bottom of the housing (11) for measuring the height of the piston (13) so as to adjust the volume of the air chamber (14).

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