Pinhole array centering adjustment structure and adjustment method for multichannel soft x-ray energy spectrum measurement

Abstract

The application discloses a pinhole array centering adjustment structure and method for multichannel soft X-ray energy spectrum measurement, solves the problems of limited adjustment range and low adjustment accuracy of the traditional pinhole array fixing method, and comprises a coarse adjustment platform, a rotary table and a pipeline support, wherein the position of a pinhole pipeline is adjusted through the coarse adjustment platform, the rotary table and the pipeline support, the up-down, front-back, left-right movement and horizontal rotation of the pinhole pipeline can be realized, the coarse positioning of the pinhole array is realized, and the adjustment range of the pinhole array is determined; then, the accurate adjustment of the pinhole array is realized through a pinhole adjustment structure, a plurality of arc grooves are formed on a pinhole fixing support, the rotation of the pinhole fixing support relative to an ear plate in the pinhole pipeline can be realized through fastening screws passing through the arc grooves, the fine adjustment of the rotation of the pinhole array can be realized, the adjustment range is limited through limiting bolts, the accurate adjustment of the pinhole array is realized through adjusting bolts, and the accurate centering of the pinhole array is realized.

Description

Technical Field

[0001] This invention relates to a multi-stage centering adjustment device, specifically to a pinhole array centering adjustment structure and adjustment method for multi-channel soft X-ray energy spectroscopy measurement. Background Technology

[0002] Multichannel time-resolved soft X-ray energy spectroscopy based on flat crystal diffraction has the characteristics of high energy spectral resolution and large linear dynamic range. It can achieve energy resolution at the eV level by using diffraction crystals, and by further converting and modulating the output diffraction signals of each channel and mixing measurements with multiple detectors, the dynamic range of the system is improved by orders of magnitude compared with a single detector.

[0003] In the measurement process of the multi-channel soft X-ray energy spectroscopy system, the measurement system consists of a source, a first-stage pinhole array, a second-stage pinhole array (blocking aperture), a third-stage pinhole array (beam-limiting aperture), a diffraction crystal, a radiation-to-visible light conversion system, a detector, etc. (see [reference]). Figure 1 To achieve multi-channel X-ray energy spectroscopy measurements, the source, front pinhole, middle pinhole, and rear pinhole of each test channel must be collinear (see [reference]). Figure 2 This ensures the consistency of the optical path in each test channel.

[0004] Currently, the common method is to directly fix the multi-stage pinhole array structure to the pinhole channel using screws, and then adjust the position of the pinhole channel to position the pinhole array during alignment. This method is simple in structure and easy to operate, but it has several problems: adjusting the position of the pinhole array through the pinhole channel cannot achieve precise positioning, and the pinhole size in each stage of the X-ray pinhole array is very small. When the installation position of any stage of the pinhole array deviates, it can easily cause the downstream detection system to fail to receive the required diffraction signal, directly affecting the accuracy of soft X-ray energy dispersive spectroscopy measurements. Summary of the Invention

[0005] The purpose of this invention is to solve the problems of limited adjustment range and low adjustment accuracy of traditional pinhole array fixing methods, and to provide a pinhole array centering adjustment structure and adjustment method for multi-channel soft X-ray energy spectroscopy measurement.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurements, including a coarse adjustment platform; its special feature is:

[0008] The coarse adjustment platform is equipped with a turntable, on which four opposing arc-shaped slots are opened around the circumference. The coarse adjustment platform and the turntable are connected by bolts passing through the arc-shaped slots.

[0009] The turntable is equipped with a pipe support with a rectangular cross-section. A top block adjustment structure is connected to the middle of the two short sides and the middle of the two long sides of the rectangular cross-section of the pipe support on the turntable, respectively, for adjusting and fixing the position of the pipe support.

[0010] The pipe support has an upward-opening semi-circular groove, and a downward-opening semi-circular fixing structure is connected to both ends near the semi-circular groove. A pinhole pipe is connected between the semi-circular groove of the pipe support and the semi-circular fixing structure. The semi-circular fixing structure and the semi-circular groove of the pipe support form a clamping structure for clamping the pinhole pipe.

[0011] The pinhole tube is connected to two reticle plates at both ends, and the reticle plates are provided with scale lines. A pinhole adjustment structure is connected to the inner wall between the two ends of the pinhole tube. The pinhole adjustment structure is used to connect and adjust the pinhole array plate with pinhole array to achieve precise centering of the pinhole array. One side of the pinhole adjustment structure is connected to the pinhole reticle plate, and the pinhole reticle plate is provided with microholes with a diameter of 1 mm. The pinhole reticle plate is used for fine centering adjustment.

[0012] Furthermore, each of the aforementioned top block adjustment structures includes a top block, a fastening bolt, and a fastening nut;

[0013] Of the four top blocks arranged in pairs, one pair of top blocks is fixedly connected to the middle of the two short sides of the rectangular cross-section near the pipe support on the turntable, and the other pair of top blocks is fixedly connected to the turntable and corresponds to the middle of the two long sides of the pipe support. Each top block is connected to a fastening bolt, which passes through the top block and is close to the outer surface of the pipe support. The fastening bolt is used to adjust and fix the position of the pipe support. The fastening nut is connected to the end of the fastening bolt away from the pipe support and is used to lock the position of the fastening bolt.

[0014] Furthermore, the semicircular fixing structure includes 2n fixing bolts, 2n nuts, and a semicircular pipe cover with an opening facing downwards. The semicircular pipe cover is arranged opposite to the semicircular groove of the pipe support, and both ends are connected to the pipe support by n fixing bolts and nuts respectively. By removing the fixing bolts, the pinhole pipe is clamped between the semicircular pipe cover and the semicircular groove of the pipe support, and then the semicircular pipe cover and the pipe support are fixedly connected by fixing bolts, where n≥1.

[0015] Furthermore, the pinhole adjustment structure includes a frame-shaped pinhole fixing bracket, with multiple adjusting bolts extending from the outside to the inside evenly connected to the four sides of the pinhole fixing bracket. One end of the adjusting bolt located inside the pinhole fixing bracket is connected to the pinhole array plate, and the adjusting bolt located outside the pinhole fixing bracket is connected to the locking nut. The pinhole fixing bracket is connected to the inner wall of the pinhole pipe, and a pinhole reticle is provided on the front side of the pinhole array plate.

[0016] Furthermore, a limiting bolt is connected to the side wall of the pinhole fixing bracket near each adjusting bolt, thereby limiting the adjustment range of the pinhole fixing bracket; the limiting bolt passes through the side wall of the pinhole fixing bracket, and its inner end abuts against the pinhole array plate; a small nut is also sleeved on the limiting bolt at the external position of the frame structure for tightening the limiting bolt.

[0017] Furthermore, multiple ear plates are provided in the middle of the inner wall of the pinhole pipe, and multiple arc-shaped grooves are opened on the edge of the pinhole fixing bracket. The ear plates and the pinhole fixing bracket are connected by fastening screws passing through the arc-shaped grooves.

[0018] Furthermore, the coarse adjustment platform includes a lower support and an upper support with a cuboid structure, which are connected by bolts;

[0019] The upper end of the upper bracket is connected to four screws, each screw having a support nut attached to it. A platform is connected to each of the four screws, fitting against the top of each support nut. A locking nut is connected to each platform on each screw. The platform is bolted to a turntable. The height of the platform can be adjusted by rotating and adjusting the height of the four screws. The support nuts support the platform, and the locking nuts fix the position of the platform.

[0020] A method for centering a pinhole array for multi-channel soft X-ray energy spectroscopy measurements, using a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurements; its distinctive feature is that it includes the following steps:

[0021] S1. According to the test requirements, aim at the source area and set up a coarse adjustment laser theodolite located on the central measurement channel. Turn on the coarse adjustment laser theodolite to emit a laser beam for coarse adjustment. At the same time, install a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement at the preset test position, with the pinhole array serving as the first-stage pinhole array.

[0022] S2. Adjust the coarse adjustment platform, turntable and pipe support according to the relative position of one of the laser beams in S1 and the center of the pipe reticle, so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipe reticle.

[0023] S3. Remove the pipe reticle plates at both ends, aim at the source area according to the test requirements, and set up another fine-tuning laser theodolite on another measurement channel. Turn on the fine-tuning laser theodolite to emit another laser beam for fine-tuning.

[0024] S4. Adjust the pinhole adjustment structure according to the position of one laser beam in S1 and the other laser beam in S3 hitting the pinhole reticle, so that both laser beams can enter the pinhole array on the pinhole array plate through the micro-holes in the pinhole reticle, and complete the first-stage pinhole array centering adjustment.

[0025] S5. Install the next pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement at the preset test position, where the pinhole array serves as the next-level pinhole array.

[0026] S6. Adjust the coarse adjustment platform, turntable and pipe support according to the relative position of one of the laser beams in S1 and the center of the pipe reticle, so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipe reticle.

[0027] S7. Remove the pipe reticles at both ends. Adjust the pinhole adjustment structure according to the position of one laser beam in S1 and the other laser beam in S3 hitting the pinhole reticle. Adjust it so that both laser beams can enter the pinhole array on the pinhole array plate through the microholes on the pinhole reticle to complete the next level of pinhole array alignment adjustment.

[0028] S8. Determine whether the number of pinhole array alignment adjustment structures installed for multi-channel soft X-ray energy spectroscopy measurement meets the preset requirements; if yes, complete the alignment adjustment of the pinhole array for multi-channel soft X-ray energy spectroscopy measurement; if no, return to S5 until the alignment adjustment of all levels of pinhole arrays is completed.

[0029] Furthermore, the vertical adjustment range of the coarse adjustment platform in S2 and S6 is -60mm to 60mm, the horizontal rotation range of the turntable is -6.5° to 6.5°, the forward and backward movement range of the pipe support is -15mm to +15mm, and the left and right movement range of the pipe support is -15mm to +15mm.

[0030] Furthermore, the specific steps for adjusting the pinhole adjustment structure described in S4 and S7 are as follows: rotating, moving vertically and horizontally along the central axis of the pinhole adjustment structure, with a rotation range of -2° to +2° and a vertical and horizontal movement range of -5mm to +5mm.

[0031] The beneficial effects of the technical solution of this invention are:

[0032] (1) In the pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement of the present invention, the position of the pinhole pipe is adjusted by the coarse adjustment platform, the turntable and the pipe support, which can realize the up and down, front and back, left and right movement and horizontal rotation of the pinhole pipe, thereby realizing the coarse positioning of the pinhole array and roughly determining the adjustment range of the pinhole array.

[0033] (2) In the pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement of the present invention, the pinhole array is precisely adjusted by the pinhole adjustment structure. The pinhole fixing plate is provided with a slot to realize the rotation of the pinhole array. The adjustment range is limited by the limit bolt, and then the pinhole array is precisely adjusted by the adjustment bolt, thereby realizing the precise centering of the pinhole array.

[0034] (3) The present invention provides a pinhole array alignment adjustment method for multi-channel soft X-ray energy spectrum measurement. Through the combination of coarse adjustment and fine adjustment, the pinhole arrays at each level are accurately aligned, ensuring that the front pinhole, middle pinhole, and rear pinhole of each test channel are collinear with the source, thus ensuring the accuracy of the multi-channel soft X-ray energy spectrum measurement results. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the multi-channel energy spectrum measurement optical path in an embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of the alignment of multiple test channels in an embodiment of the present invention;

[0037] Figure 3 This is an external view of an embodiment of a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to the present invention;

[0038] Figure 4 This is a schematic diagram of the structure of the pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to an embodiment of the present invention, without showing the pipe reticles at both ends;

[0039] Figure 5 This is a diagram showing the relationship between the pinhole adjustment structure and other components in an embodiment of the pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to the present invention.

[0040] Figure 6 This is a diagram showing the connection relationship between the pipe support, the pinhole pipe, and its internal components in an embodiment of the pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to the present invention.

[0041] In the diagram, 1. Coarse adjustment platform, 1-1. Lower support, 1-2. Upper support, 1-3. Screw, 1-4. Support nut, 1-5. Platform, 1-6. Locking nut; 2. Turntable; 3. Top block adjustment structure, 3-1. Top block, 3-2. Fastening bolt, 3-3. Fastening nut; 4. Pipe support; 5. Semicircular fixing structure, 5-1. Fixing bolt, 5-2. Nut, 5-3. Semicircular pipe cover; 6. Pinhole pipe; 7. Pinhole adjustment structure, 7-1. Pinhole fixing bracket, 7-2. Limit bolt, 7-3. Adjusting bolt, 7-4. Locking nut, 7-5. Fastening screw, 7-6. Small nut; 8. Pipe reticle; 9. Pinhole array plate; 10. Pinhole reticle. Detailed Implementation

[0042] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings and embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] A pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurements, such as Figure 3 and Figure 4 As shown, it includes a coarse adjustment platform 1; a turntable 2 is provided on the coarse adjustment platform 1, and four opposing arc-shaped slots are opened around the circumference of the turntable 2. The coarse adjustment platform 1 and the turntable 2 are connected by bolts passing through the arc-shaped slots. The turntable 2 rotates relative to the coarse adjustment platform 1 through the arc-shaped slots. The central angle of the arc-shaped slot is 13°, with the middle being 0°. The horizontal rotation range of the turntable 2 is -6.5° to 6.5°.

[0044] The adjustment platform 1 includes a lower support 1-1 and an upper support 1-2, both rectangular in shape. The lower support 1-1 and upper support 1-2 are connected by bolts. Four screws 1-3 are connected to the upper end of the upper support 1-2. A support nut 1-4 is connected to each screw 1-3, and a platform 1-5 is connected to the top of each screw 1-3 and support nut 1-4. A turntable 2 is bolted to the platform 1-5. A locking nut 1-6 is connected to the top of each screw 1-3 and platform 1-5. The height of the platform 1-5 can be adjusted by rotating and adjusting the height of the four screws 1-3. The support nuts 1-4 support the platform 1-5, and the locking nuts 1-6 fix the position of the platform 1-5. The vertical adjustment range of the coarse adjustment platform 1 is -60mm to 60mm.

[0045] A pipe support 4 with a rectangular cross-section is provided on the turntable 2. A top block adjustment structure 3 is connected to the middle of the two short sides and the middle of the two long sides of the outer side of the rectangular cross-section of the pipe support 4 on the turntable 2. This structure is used to adjust and fix the position of the pipe support 4. The pipe support 4 can be adjusted in front and back and left and right by the top block adjustment structure 3. The front and back movement range is -15mm to +15mm, and the left and right movement range is -15mm to +15mm. The top block adjustment structure 3 includes a top block 3-1, a fastening bolt 3-2, and a fastening nut 3-3. The fastening bolt 3-2 passes through the top block 3-1 and is close to the surface of the pipe support 4. In order to facilitate the fixing of the pipe support 4, a groove can be opened on the pipe support 4. The fastening bolt 3-2 extends into the groove to fix the pipe support 4. The fastening nut 3-3 is connected to the fastening bolt 3-2 and is used to lock the position of the fastening bolt 3-2.

[0046] A semi-circular groove with an upward opening is formed on the pipe support 4, and a semi-circular fixing structure 5 with a downward opening is connected to both ends near the semi-circular groove. A pinhole pipe 6 is connected between the semi-circular groove of the pipe support 4 and the semi-circular fixing structure. A pinhole adjustment structure 7 is connected to the middle of the pinhole pipe 6. The pinhole adjustment structure 7 is used to connect and adjust the pinhole array plate 9 with the pinhole array to achieve precise centering of the pinhole array. The semi-circular fixing structure 5 includes 4 fixing bolts 5-1, 2 nuts 5-2 and a semi-circular pipe cover 5-3 with a downward opening. The semi-circular pipe cover 5-3 is opposite to the semi-circular groove of the pipe support 4, and its two ends are connected to the pipe support 4 by 2 fixing bolts 5-1 and nuts 5-2 respectively.

[0047] During coarse alignment, pipe reticles 8 are installed at both ends of the pinhole pipe 6. The pipe reticles 8 are provided with scale lines. Based on the position of the laser on the scale lines, the positions of the coarse adjustment platform 1, the turntable 2 and the pipe support 4 are adjusted until the center of the reticle is aimed.

[0048] like Figure 5As shown, the pinhole adjustment structure 7 includes a frame-shaped pinhole fixing bracket 7-1. Multiple adjusting bolts 7-3 extending from the outside to the inside are evenly connected to the four sides of the pinhole fixing bracket 7-1. One end of the adjusting bolt 7-3 located inside the pinhole fixing bracket 7-1 is connected to the pinhole array plate 9. The position of the pinhole array plate 9 can be adjusted horizontally and vertically through the adjusting bolts 7-3 on the four sides. The range of vertical and horizontal adjustment is -5mm to +5mm. The adjusting bolt 7-3 is located outside the pinhole adjustment structure 7 and is connected to the locking nut 7-4. The pinhole fixing bracket 7-1 is connected to the middle of the inner wall of the pinhole pipe 6. A limiting bolt 7-2 is connected to the side wall of the pinhole fixing bracket 7-1 near each adjusting bolt 7-3. The limiting bolt 7-2 passes through the side wall of the pinhole fixing bracket 7-1 and is close to the side wall of the pinhole fixing bracket 7-1. The adjustment range of the pinhole fixing bracket 7-1 is limited by the limiting bolt 7-2. The limiting bolt 7-2 is also fitted with a small nut 7-6 on the outside of the frame structure for tightening the limiting bolt 7-2.

[0049] like Figure 6 As shown, multiple ear plates are provided inside the pinhole pipe 6, and multiple arc-shaped grooves are opened on the edge of the pinhole fixing bracket 7-1. Fastening screws 7-5 are connected to the ear plates and the arc-shaped grooves of the pinhole fixing bracket 7-1. The pinhole fixing bracket 7-1 can rotate relative to the pinhole pipe 6, and the rotation range is -2° to +2°.

[0050] During precise alignment, a pinhole reticle 10 is set on the front side of the pinhole array plate 9. The pinhole reticle 10 has micro-holes with a diameter of 1 mm. During alignment, aim the laser at the position of the 1 mm micro-hole on the pinhole reticle 10, and adjust the adjusting bolts 7-3 around the pinhole fixing bracket 7-1 to change the position of the pinhole array until each laser beam can pass through the small pinhole array on the pinhole array plate 9.

[0051] In the measurement process of a multi-channel soft X-ray energy dispersive spectroscopy system, the measurement system consists of a source, a first-stage pinhole array, a second-stage pinhole array (blocking aperture), a third-stage pinhole array (beam-limiting aperture), a diffraction crystal, a radiation-to-visible light conversion system, and a detector, etc. Figure 1 As shown. To achieve multi-channel X-ray energy spectrum measurement, the source, front pinhole, middle pinhole, and rear pinhole of each test channel need to be collinear, such as... Figure 2 As shown, ensure the consistency of the optical path in each test channel.

[0052] The present invention also provides a method for centering a pinhole array for multi-channel soft X-ray energy spectroscopy measurement, characterized by comprising the following steps:

[0053] S1. According to the test requirements, aim at the source area and set up a coarse adjustment laser theodolite located on the central measurement channel. Turn on the coarse adjustment laser theodolite to emit a laser beam for coarse adjustment. At the same time, install a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement at the test position, with the pinhole array serving as the first-stage pinhole array.

[0054] S2, such as Figure 3 As shown, perform coarse alignment adjustment. Install pipe reticle plates 8 at both ends of the pinhole pipe 6. Adjust the coarse adjustment platform 1, turntable 2, and pipe support 4 according to the position of the laser on the front and rear pipe reticle plates. The vertical adjustment range of the coarse adjustment platform 1 is -60mm to 60mm, the horizontal rotation range of the turntable 2 is -6.5° to 6.5°, the front and back movement range of the pipe support 4 is -15mm to +15mm, and the left and right movement range of the pipe support 4 is -15mm to +15mm. Adjust until the laser is aimed at the center of the scale line.

[0055] S3, such as Figure 4 As shown, to perform fine alignment, remove the pipe reticle 8 installed at the front and back, set up the pinhole reticle 10 on the front side of the pinhole array plate 9, aim at the source area according to the test requirements, and set up another fine-tuning laser theodolite on another measurement channel. Turn on the fine-tuning laser theodolite to emit a laser beam for fine-tuning.

[0056] S4. Adjust the pinhole adjustment structure 7 according to the position of one laser beam in S1 and one laser beam in S3 hitting the pinhole reticle 10. The adjustment range of the pinhole fixing bracket 7-1 is -2° to +2°. The left-right adjustment range and the up-down adjustment range of the pinhole reticle 9 are both -5mm to +5mm. Adjust until both laser beams can pass through the microholes on the pinhole reticle 10 and then through the pinhole array on the pinhole array plate 9.

[0057] S5. Install the next pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement at the preset test position, where the pinhole array serves as the next-level pinhole array.

[0058] S6. Adjust the coarse adjustment platform 1, turntable 2 and pipe support 4 according to the relative position of the laser beam in S1 and the center of the pipe reticle 8, so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipe reticle 8.

[0059] S7. Remove the pipe reticle 8 at both ends. Adjust the pinhole adjustment structure 7 according to the position of one laser beam in S1 and the other laser beam in S3 hitting the pinhole reticle 10. Adjust it so that both laser beams can pass through the microholes on the pinhole reticle 10 and then through the pinhole array on the pinhole array plate 9. This completes the next stage of pinhole array alignment adjustment.

[0060] S8. Determine whether the number of pinhole array alignment adjustment structures used for multi-channel soft X-ray energy spectroscopy measurement has reached three; if yes, complete the pinhole array alignment adjustment for multi-channel soft X-ray energy spectroscopy measurement; if no, return to S5 until the alignment adjustment of all levels of pinhole arrays is completed.

[0061] After completing the three-stage alignment, a light source is placed at the source, and the integrity of the light output from the outer side of each pinhole array under darkroom conditions is observed to verify the alignment of the pinhole array. If the light output is uniform and without gaps, it indicates that the front, middle, and rear pinholes on the test channel are collinear with the source. The three pinhole array alignment adjustment structures, which are used for multi-channel soft X-ray energy spectroscopy measurements, are then placed in a multi-channel soft X-ray energy spectroscopy system for X-ray energy spectroscopy measurements.

[0062] This invention discloses a pinhole array alignment adjustment method for multi-channel soft X-ray energy spectroscopy measurement. The method involves coarsely adjusting the position of the pinhole channel 6 using a coarse adjustment platform 1, a turntable 2, and a channel support 4. This allows for vertical, horizontal, and lateral movement and rotation of the pinhole channel 6, achieving coarse positioning of the pinhole array and roughly determining its adjustment range. Subsequently, a pinhole adjustment structure 7 is used for precise adjustment of the pinhole array. Multiple arc-shaped grooves are formed on the pinhole fixing bracket 7-1, and fastening screws 7-5 passing through these grooves allow the pinhole fixing bracket 7-1 to rotate relative to the ear plate inside the pinhole channel 6, enabling fine adjustment of the pinhole array's rotation. A limiting bolt 7-2 restricts the adjustment range, and then an adjusting bolt 7-3 achieves precise adjustment of the pinhole array, thus achieving precise alignment of the pinhole array.

[0063] The above description is merely a specific embodiment of the present invention and a comparison of the effects of the specific embodiments with relevant comparative examples. However, the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement, comprising a coarse adjustment platform (1) with adjustable vertical height; characterized in that: The coarse adjustment platform (1) is provided with a turntable (2), and four arc-shaped slots are opened around the circumference of the turntable (2). The coarse adjustment platform (1) and the turntable (2) are connected by bolts passing through the arc-shaped slots. The turntable (2) is provided with a pipe support (4) with a rectangular cross section. A top block adjustment structure (3) is connected to the middle of the two short sides and the middle of the two long sides of the rectangular cross section of the pipe support (4) on the turntable (2) respectively, which is used to adjust and fix the position of the pipe support (4). The pipe support (4) has an upward-facing semi-circular groove, and a downward-facing semi-circular fixing structure (5) is connected to both ends near the semi-circular groove. A pinhole pipe (6) is connected between the semi-circular groove of the pipe support (4) and the semi-circular fixing structure (5). The two ends of the pinhole pipe (6) are respectively connected to the pipe reticle (8), and the pipe reticle (8) is provided with scale lines; a pinhole adjustment structure (7) is connected to the inner wall between the two ends of the pinhole pipe (6); the pinhole adjustment structure (7) is used to connect and adjust the pinhole array plate (9) with the pinhole array to achieve precise alignment of the pinhole array; one side of the pinhole adjustment structure (7) is connected to the pinhole reticle (10), and the pinhole reticle (10) has microholes with a diameter of 1 mm.

2. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to claim 1, characterized in that: Each of the top block adjustment structures (3) includes a top block (3-1), a fastening bolt (3-2), and a fastening nut (3-3); Of the four top blocks (3-1) arranged in pairs, one pair of top blocks (3-1) are fixedly connected to the middle of the two short sides of the rectangular cross section of the turntable (2) near the pipe support (4), and the other pair of top blocks (3-1) are fixedly connected to the turntable (2) and correspond to the middle of the two long sides of the pipe support (4). Each top block (3-1) is connected to a fastening bolt (3-2). Each fastening bolt (3-2) passes through the top block (3-1) and is close to the outer surface of the pipe support (4) for adjusting and fixing the position of the pipe support (4). A fastening nut (3-3) is connected to the end of the fastening bolt (3-2) away from the pipe support (4) for locking the position of the fastening bolt (3-2).

3. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to claim 1, characterized in that: The semicircular fixing structure (5) includes 2n fixing bolts (5-1), 2n nuts (5-2), and a semicircular pipe cover (5-3) with an opening facing downward. The semicircular pipe cover (5-3) is arranged opposite to the semicircular groove of the pipe support (4), and both ends are connected to the pipe support (4) by n fixing bolts (5-1) and nuts (5-2) respectively, where n≥1.

4. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to claim 1, characterized in that: The pinhole adjustment structure (7) includes a frame-shaped pinhole fixing bracket (7-1). Multiple adjusting bolts (7-3) extending from the outside to the inside are evenly connected to the four sides of the pinhole fixing bracket (7-1). One end of the adjusting bolt (7-3) inside the pinhole fixing bracket (7-1) is connected to the pinhole array plate (9). The adjusting bolt (7-3) outside the pinhole fixing bracket (7-1) is connected to the locking nut (7-4). The pinhole fixing bracket (7-1) is connected to the inner wall of the pinhole pipe (6). A pinhole reticle (10) is provided on the front side of the pinhole array plate (9).

5. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to claim 4, characterized in that: The pinhole fixing bracket (7-1) has a limiting bolt (7-2) connected to its side wall near each adjusting bolt (7-3). The limiting bolt (7-2) passes through the side wall of the pinhole fixing bracket (7-1) and its inner end abuts against the pinhole array plate (9). The limiting bolt (7-2) is also fitted with a small nut (7-6) at the outer position of the pinhole fixing bracket (7-1) for tightening the limiting bolt (7-2).

6. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to claim 4, characterized in that: The inner wall of the pinhole pipe (6) is provided with multiple ear plates, and the edge of the pinhole fixing bracket (7-1) is provided with multiple arc-shaped grooves. The ear plates and the pinhole fixing bracket (7-1) are connected by fastening screws (7-5) passing through the arc-shaped grooves.

7. The pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement according to claim 1, characterized in that: The coarse adjustment platform (1) includes a lower support (1-1) and an upper support (1-2) with a cuboid structure. The lower support (1-1) and the upper support (1-2) are connected by bolts. The upper end of the upper support (1-2) is connected to four screws (1-3). Each screw (1-3) is connected to a support nut (1-4). A platform (1-5) is connected to the upper part of the four screws (1-3) and attached to the upper part of the platform (1-4). A locking nut (1-6) is connected to the upper part of the platform (1-5) and attached to the upper part of the platform (1-5). The platform (1-5) and the turntable (2) are connected by bolts passing through the arc-shaped slot.

8. A method for centering a pinhole array for multi-channel soft X-ray energy spectroscopy measurement, using a pinhole array centering structure for multi-channel soft X-ray energy spectroscopy measurement as described in any one of claims 1-7; characterized in that, Includes the following steps: S1. According to the test requirements, aim at the source area and set up a coarse adjustment laser theodolite located on the central measurement channel. Turn on the coarse adjustment laser theodolite to emit a laser beam for coarse adjustment. At the same time, install a pinhole array centering adjustment structure for multi-channel soft X-ray energy spectrum measurement at the preset test position, with the pinhole array serving as the first-stage pinhole array. S2. Adjust the coarse adjustment platform (1), turntable (2) and pipe support (4) according to the relative position of the laser beam in S1 and the center of the pipe reticle (8) so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipe reticle (8). S3. Remove the pipe reticles (8) at both ends, aim at the source area according to the test requirements, and set up another fine-tuning laser theodolite on another measurement channel. Turn on the fine-tuning laser theodolite to emit another laser beam for fine-tuning. S4. Adjust the pinhole adjustment structure (7) according to the position of one laser beam in S1 and another laser beam in S3 hitting the pinhole reticle (10), and adjust it so that both laser beams can pass through the microholes on the pinhole reticle (10) and enter the pinhole array on the pinhole array plate (9) to complete the first-level pinhole array centering adjustment. S5. Install the next pinhole array centering adjustment structure for multi-channel soft X-ray energy spectroscopy measurement at the preset test position, where the pinhole array serves as the next-level pinhole array. S6. Adjust the coarse adjustment platform (1), turntable (2) and pipe support (4) according to the relative position of the laser beam in S1 and the center of the pipe reticle (8) so that the laser beam used for coarse adjustment is aimed at the center of the scale line of the pipe reticle (8). S7. Remove the pipe reticles (8) at both ends. Adjust the pinhole adjustment structure (7) according to the position of one laser beam in S1 and the other laser beam in S3 hitting the pinhole reticle (10). Adjust until both laser beams can pass through the microholes on the pinhole reticle (10) and enter the pinhole array on the pinhole array plate (9) to complete the next level of pinhole array alignment adjustment. S8. Determine whether the number of pinhole array alignment adjustment structures installed for multi-channel soft X-ray energy spectroscopy measurement meets the preset requirements; if yes, complete the alignment adjustment of the pinhole array for multi-channel soft X-ray energy spectroscopy measurement; if no, return to S5 until the alignment adjustment of all levels of pinhole arrays is completed.

9. A method for centering a pinhole array for multi-channel soft X-ray energy spectroscopy measurement according to claim 8, characterized in that: The vertical adjustment range of the coarse adjustment platform (1) in S2 and S6 is -60mm to 60mm, the horizontal rotation range of the turntable (2) is -6.5° to 6.5°, the front-to-back movement range of the pipe support (4) is -15mm to +15mm, and the left-to-right movement range of the pipe support (4) is -15mm to +15mm.

10. A method for centering a pinhole array for multi-channel soft X-ray energy spectroscopy measurement according to claim 8, characterized in that, The specific steps of adjusting the pinhole adjustment structure (7) described in S4 and S7 are as follows: The pinhole adjustment structure (7) can rotate, move vertically and horizontally, with a rotation range of -2° to +2°. The range of vertical and horizontal movement is -5mm to +5mm.

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