Adjusting device, adjusting method, detecting system and machining system

Abstract

The invention discloses an adjusting device. The device comprises a base, a Z-direction adjusting unit, an X-direction adjusting unit, a Y-direction adjusting unit and a multi-dimensional adjusting unit which are sequentially arranged in a stacked mode from bottom to top. The emergent end of the lens cone assembly extends to the outside of the base, and the incident end of the lens cone assembly is rotatably connected with the multi-dimensional adjusting unit; the X-direction adjusting unit is movably connected with the Z-direction adjusting unit, and the X-direction adjusting unit is configured to adjust the position of the lens cone assembly in the X-axis direction; the Y-direction adjusting unit is movably connected with the X-direction adjusting unit, and the Y-direction adjusting unit is configured to adjust the position of the lens cone assembly in the Y-axis direction; the Z-direction adjusting unit is movably connected with the base, and the Z-direction adjusting unit is configured to adjust the position of the lens cone assembly in the Z-axis direction; the multi-dimensional adjusting unit is movably connected with the Y-direction adjusting unit, and the multi-dimensional adjusting unit is configured to enable the lens cone assembly to rotate around the X axis and / or the Y axis, and / or adjust the position of the lens cone assembly in the Z-axis direction.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing and detection technology, and in particular to an adjustment device, an adjustment method, a detection system and a processing system. Background Art

[0002] Semiconductor processing or testing equipment needs to be carried out in a dust-free environment, such as a vacuum chamber environment, a Class 100 clean environment, or even a Class 1000 clean environment. During semiconductor processing or testing, the lens barrel of the lithography lens, the testing lens, etc. needs to be aligned with the optical path of the entire system. During the alignment process, the lens barrel needs to be translated in three directions: X-axis, Y-axis, and Z-axis, and rotated around the X-axis, Y-axis, and Z-axis, etc., and adjusted in six degrees of freedom.

[0003] However, the existing adjustment device can only adjust three degrees of freedom at most. To achieve six degrees of freedom, multiple adjustment devices need to be assembled, which not only makes the adjustment steps cumbersome, but also makes the structure of the entire adjustment device not compact enough. In addition, the existing adjustment device uses grease to lubricate the components in the adjustment device, which not only pollutes the clean environment of semiconductor processing or testing, but also may damage the optical device. Summary of the invention

[0004] In order to solve the above problems, an object of the present invention is to provide an adjustment device, an adjustment method, a detection system and a processing system.

[0005] In a first aspect, the present invention provides an adjustment device for aligning a lens barrel assembly with an optical path in a detection system or a processing system, the adjustment device comprising:

[0006] A base, a Z-direction adjustment unit, an X-direction adjustment unit, a Y-direction adjustment unit and a multi-dimensional adjustment unit are stacked in sequence from bottom to top along the Z-axis direction;

[0007] The lens barrel assembly passes through the multi-dimensional adjustment unit, the Y-axis adjustment unit, the X-axis adjustment unit, the Z-axis adjustment unit and the base in sequence, the emission end of the lens barrel assembly extends to the outside of the base, and the incident end of the lens barrel assembly is rotatably connected to the multi-dimensional adjustment unit;

[0008] The X-direction adjustment unit is movably connected to the Z-direction adjustment unit, and the X-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the X-axis direction;

[0009] The Y-direction adjustment unit is movably connected to the X-direction adjustment unit, and the Y-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the Y-axis direction;

[0010] The Z-direction adjustment unit is movably connected to the base, and the Z-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the Z-axis direction;

[0011] The multi-dimensional adjustment unit is movably connected to the Y-axis adjustment unit, and the multi-dimensional adjustment unit is configured to rotate the lens barrel assembly around the X-axis and / or around the Y-axis, and / or adjust the position of the lens barrel assembly in the Z-axis direction.

[0012] As a further improvement of the present invention, a slide groove is provided on the side of the base facing the Z-direction adjustment unit.

[0013] The Z-direction adjustment unit is embedded in the slide slot and can move along the slide slot.

[0014] As a further improvement of the present invention, a plurality of first protrusions are provided on both side edges of the base parallel to the slide slot to limit and lock the Z-direction adjustment unit.

[0015] As a further improvement of the present invention, the Z-direction adjustment unit includes a first differential screw, a pushing structure and a moving structure.

[0016] The pushing structure is located between the base and the moving structure, the pushing structure is slidably connected to the slide groove, and the moving structure is movably connected to the base;

[0017] The first differential screw is connected to the pushing structure, and the pushing structure is driven to move along the slide groove by rotating the first differential screw;

[0018] The moving structure moves along the Z-axis direction under the action of the pushing structure.

[0019] As a further improvement of the present invention, the pushing structure includes a first part and a second part, the second part is located on both sides of the first part parallel to the slide groove, and the second part is configured in a wedge shape;

[0020] A wedge-shaped protrusion matching the second part is provided on the surface of the moving structure facing the pushing structure;

[0021] The second portion abuts against the wedge-shaped protrusion, and the second portion and the wedge-shaped protrusion have the same inclination angle and opposite inclination directions.

[0022] As a further improvement of the present invention, the wedge-shaped protrusion is clamped between the first part and the slide groove to limit the movable structure;

[0023] The movable structure is provided with a plurality of second protrusions on two sides parallel to the sliding slot to limit and lock the X-direction adjustment unit.

[0024] As a further improvement of the present invention, the adjustment accuracy of the Z-direction adjustment unit is:

[0025] a=b×tan2θ

[0026] Wherein, a is the adjustment accuracy of the Z-axis adjustment unit, b is the moving distance of the pushing structure when the first differential screw rotates one circle, and θ is the inclination angle of the wedge-shaped protrusion.

[0027] As a further improvement of the present invention, the X-direction adjustment unit includes a second differential screw, and the second differential screw is connected to the X-direction adjustment unit.

[0028] The X-direction adjustment unit is driven to move along the X-axis direction by rotating the second differential screw.

[0029] As a further improvement of the present invention, a plurality of third protrusions are provided on two side edges of the X-direction adjustment unit that are perpendicular to the X-axis direction, so as to limit and lock the Y-direction adjustment unit.

[0030] As a further improvement of the present invention, the adjustment accuracy of the X-direction adjustment unit is:

[0031] c=d×α / 360

[0032] Wherein, c is the adjustment accuracy of the X-axis adjustment unit, d is the movement distance of the X-axis adjustment unit along the X-axis direction when the second differential screw rotates one circle, and α is the angle of the second differential screw when it rotates once.

[0033] As a further improvement of the present invention, the Y-direction adjustment unit includes a third differential screw, and the third differential screw is connected to the Y-direction adjustment unit.

[0034] The Y-direction adjustment unit is driven to move along the Y-axis direction by rotating the third differential screw.

[0035] As a further improvement of the present invention, at least three spherical recesses are provided on the surface of the Y-axis adjustment unit close to the multi-dimensional adjustment unit, and a threaded hole is provided at the center of the spherical recess.

[0036] As a further improvement of the present invention, the adjustment accuracy of the Y-direction adjustment unit is:

[0037] l=k×β / 360

[0038] Wherein, l is the adjustment accuracy of the Y-axis adjustment unit, k is the moving distance of the Y-axis adjustment unit along the Y-axis direction when the third differential screw rotates one circle, and β is the angle of the third differential screw when it rotates once.

[0039] As a further improvement of the present invention, the multi-dimensional adjustment unit comprises a base and a knob assembly matched with the spherical recess;

[0040] The knob assembly passes through the base and is connected to the corresponding spherical recess;

[0041] There is a gap between the base and the Y-axis adjustment unit.

[0042] As a further improvement of the present invention, the knob assembly includes an adjusting knob and a locking bolt, and the adjusting knob is sleeved on the outer side of the locking bolt;

[0043] The end portion of the adjusting knob connected to the spherical recess is configured to be a spherical shape adapted to the spherical recess;

[0044] The locking bolt is connected to the threaded hole to lock the adjusting knob.

[0045] As a further improvement of the present invention, when there are three knob assemblies, the adjustment accuracy of the multi-dimensional adjustment unit is:

[0046] h=i×δ / 360

[0047]

[0048] Among them, h is the adjustment accuracy of the multi-dimensional adjustment unit in the Z-axis direction, i is the moving distance of the base along the Z-axis direction when the adjustment knob rotates one circle, δ is the angle of the adjustment knob when it rotates once, Φ is the adjustment accuracy of the multi-dimensional adjustment unit around the X-axis or around the Y-axis, and R is the radius of the circle formed by the uniform distribution of the three knob components.

[0049] As a further improvement of the present invention, the lens barrel assembly includes a lens barrel, an adjustment structure and a pre-tightening structure.

[0050] The incident end of the lens barrel is provided with a flange, and the lens barrel is rotatably connected to the multi-dimensional adjustment unit via the flange;

[0051] A toggle structure is provided on the outer circumferential surface of the flange, and the adjustment structure passes through the toggle structure and is connected to the pre-tightening structure so that the lens barrel assembly rotates around the Z axis.

[0052] As a further improvement of the present invention, the adjustment structure includes a fourth differential screw, and the pre-tightening structure includes a fixed stopper and an elastic member;

[0053] The fourth differential screw passes through the toggle structure and is connected to the elastic member and the fixed stopper;

[0054] The elastic member is located between the fixed stopper and the toggle structure.

[0055] As a further improvement of the present invention, the adjustment accuracy of the adjustment structure is:

[0056]

[0057] in, is the adjustment accuracy of the structure rotating around the Z axis, u is the distance the fourth differential screw moves relative to the toggle structure when it rotates one circle, and s is the distance between the central axis of the lens barrel and the center of the toggle structure.

[0058] As a further improvement of the present invention, the base, the Z-direction adjustment unit, the X-direction adjustment unit, the Y-direction adjustment unit and the multi-dimensional adjustment unit are all provided with through holes for the lens barrel to pass through at their center positions.

[0059] The through hole is provided with a raised edge on one side facing the incident end of the lens barrel, and the through holes arranged in the Z-direction adjustment unit, the X-direction adjustment unit, the Y-direction adjustment unit and the multi-dimensional adjustment unit are provided with an annular groove on one side facing the exit end of the lens barrel to form an avoidance space for the edge.

[0060] As a further improvement of the present invention, a groove matching the edge is provided on a side of the flange close to the multi-dimensional adjustment unit.

[0061] In a second aspect, the present invention provides a method for adjusting based on the above-mentioned mediation, the method comprising:

[0062] Assemble the lens barrel assembly and the adjusting device, and make the X-direction adjusting unit, the Y-direction adjusting unit, the Z-direction adjusting unit, the multi-dimensional adjusting unit and the lens barrel assembly all in a pre-tightened state;

[0063] The multi-dimensional adjustment unit controls the lens assembly to rotate around the X-axis and the Y-axis until the rotation angle reaches a preset value, and at the same time, the multi-dimensional adjustment unit performs an initial adjustment on the position of the lens barrel assembly in the Z-axis direction;

[0064] The position of the lens barrel assembly in the X-axis and Y-axis directions is adjusted respectively by the X-axis adjustment unit and the Y-axis adjustment unit, and when the lens barrel assembly reaches a preset position, the X-axis adjustment unit and the Y-axis adjustment unit are locked;

[0065] The lens barrel assembly is rotated around the Z axis by means of an adjustment structure and a pre-tightening structure, and when the imaging effect in the lens barrel is optimal, the lens barrel assembly is locked;

[0066] The position of the lens barrel assembly in the Z-axis direction is secondarily adjusted by the Z-direction adjustment unit until the lens barrel assembly reaches a preset position in the Z-axis direction, and the Z-direction adjustment unit is locked.

[0067] In a third aspect, the present invention provides a detection system, which includes a detection objective lens and an adjustment device as described above, and the detection objective lens is adjusted by the adjustment device to align the detection objective lens with an optical path in the detection system.

[0068] In a fourth aspect, the present invention provides a processing system, comprising a photolithography objective lens and an adjustment device as described above, wherein the adjustment device adjusts the photolithography objective lens to align the photolithography objective lens with an optical path in the processing system.

[0069] The beneficial effects of the present invention are as follows: by stacking and nesting the six-dimensional adjustment structures into an adjustment device, not only can the six-dimensional adjustment be achieved by only one adjustment device, simplifying the adjustment steps; at the same time, the structure of the entire adjustment device is compact, effectively saving structural space. BRIEF DESCRIPTION OF THE DRAWINGS

[0070] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor.

[0071] Figure 1 It is a structural schematic diagram of an adjusting device according to an exemplary embodiment of the present invention;

[0072] Figure 2 It is a structural schematic diagram of a base according to an exemplary embodiment of the present invention;

[0073] Figure 3 It is a schematic diagram of assembling a Z-direction adjustment unit according to an exemplary embodiment of the present invention;

[0074] Figure 4 An exploded view of a Z-direction adjustment unit according to an exemplary embodiment of the present invention;

[0075] Figure 5 A top view of a Z-direction adjustment unit according to an exemplary embodiment of the present invention;

[0076] Figure 6 for Figure 5 Sectional view along AA direction;

[0077] Figure 7 for Figure 5 Cross-sectional view along the BB direction;

[0078] Figure 8 for Figure 5 Sectional view along CC direction;

[0079] Fig. 9 for Figure 8 Enlarged view of point E in the middle;

[0080] Fig.10 A schematic diagram of a driving structure in a Z-direction adjustment unit according to an exemplary embodiment of the present invention;

[0081] Fig.11 A bottom view of a pushing structure in a Z-direction adjustment unit according to an exemplary embodiment of the present invention;

[0082] Fig.12 A schematic diagram of a moving structure in a Z-axis adjustment unit according to an exemplary embodiment of the present invention;

[0083] Fig.13 A bottom view of a moving structure in a Z-axis adjustment unit according to an exemplary embodiment of the present invention;

[0084] Fig.14 It is a schematic diagram of assembling an X-direction adjustment unit according to an exemplary embodiment of the present invention;

[0085] Fig.15 An exploded view of an X-direction adjustment unit according to an exemplary embodiment of the present invention;

[0086] Fig.16 A schematic diagram of a moving structure in an X-axis adjustment unit according to an exemplary embodiment of the present invention;

[0087] Fig.17 A bottom view of a moving structure in an X-axis adjustment unit according to an exemplary embodiment of the present invention;

[0088] Fig.18 It is a schematic diagram of assembling a Y-axis adjustment unit according to an exemplary embodiment of the present invention;

[0089] Fig.19 An exploded view of a Y-direction adjustment unit according to an exemplary embodiment of the present invention;

[0090] Fig. 20 A schematic diagram of a moving structure in a Y-axis adjustment unit according to an exemplary embodiment of the present invention;

[0091] Fig.21 A bottom view of a moving structure in a Y-axis adjustment unit according to an exemplary embodiment of the present invention;

[0092] Fig. 22It is a schematic diagram of assembling a multi-dimensional regulating unit according to an exemplary embodiment of the present invention;

[0093] Fig.23 An exploded diagram of a multi-dimensional adjustment unit according to an exemplary embodiment of the present invention;

[0094] Fig.24 It is a structural schematic diagram of a multi-dimensional adjustment unit according to an exemplary embodiment of the present invention;

[0095] Fig.25 A bottom view of a multi-dimensional adjustment unit according to an exemplary embodiment of the present invention;

[0096] Fig.26 is a schematic diagram of the structure of the adjustment knob in the multi-dimensional adjustment unit;

[0097] Fig. 27 for Fig.26 Sectional view along AA direction;

[0098] Fig.28 It is a schematic diagram of the assembly of an adjusting device according to an exemplary embodiment of the present invention;

[0099] Fig.29 It is a structural schematic diagram of a lens barrel according to an exemplary embodiment of the present invention;

[0100] Fig.30 A top view of an adjusting device according to an exemplary embodiment of the present invention;

[0101] Fig.31 for Fig.30 Sectional view along AA direction;

[0102] Fig.32 for Fig.30 Cross-sectional view along the BB direction;

[0103] Fig.33 for Fig.32 The enlarged view of point I in the middle;

[0104] Fig.34 The present invention is a flowchart of an adjustment method according to an exemplary embodiment of the present invention. DETAILED DESCRIPTION

[0105] In the related art, the commonly used adjustment frames in optical systems mostly need to use grease to lubricate the guide structure during the dimension adjustment or guiding process. In a dust-free ultraviolet environment, grease will pollute the entire optical system and even damage the optical device. At the same time, the commonly used and more mature barrel adjustment frames can only be adjusted in one or two to three dimensions, and one adjustment frame cannot achieve six-dimensional adjustment. If six-dimensional adjustment is to be achieved, multiple single-dimensional or two to three adjustment dimensions are generally assembled. This type of general adjustment frame also does not have a special dustproof structure design, and the adjustment frame will produce tiny particles during the adjustment process. In a dust-free environment, these tiny particles have a great safety hazard; especially when these smiling particles fall on the surface of optical devices, they will directly damage the optical devices under the irradiation of ultraviolet or extreme ultraviolet light.

[0106] In addition, the traditional adjustment frame has limited room for expansion in visualization and digital adjustment. It is impossible to install a large-diameter lens barrel or carry a heavy load while ensuring a compact structure. The locking and fixing structure of the adjustment frame is also relatively simple, and it is impossible to ensure the stability of the lens barrel at the level of hundreds of nanometers after it is fixed. In terms of adjustment accuracy, most of them can only achieve an adjustment accuracy of ten microns, and cannot achieve an adjustment accuracy of ten nanometers.

[0107] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0108] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0109] In addition, in the description of the present invention, the terms used are only for illustrative purposes and are not intended to limit the scope of the present invention. The terms "include" and / or "comprise" are used to specify the existence of the elements, steps, operations and / or components, but do not exclude the existence or addition of one or more other elements, steps, operations and / or components. The terms "first", "second" and the like may be used to describe various elements, do not represent the order, and do not limit these elements. In addition, in the description of the present invention, unless otherwise specified, the meaning of "multiple" is two and more than two. These terms are only used to distinguish one element from another element. In conjunction with the following drawings, these and / or other aspects become apparent, and it is easier for a person of ordinary skill in the art to understand the description of the embodiments of the present invention. The accompanying drawings are used to describe the embodiments of the present invention for illustrative purposes only. Those skilled in the art will easily recognize from the following description that, without departing from the principles of the present invention, alternative embodiments of the structures and methods shown in the present invention can be adopted.

[0110] An adjustment device according to an embodiment of the present invention is used to align a lens barrel assembly with an optical path in a detection system or a processing system, and the adjustment device includes:

[0111] A base 1, a Z-direction adjustment unit 2, an X-direction adjustment unit 3, a Y-direction adjustment unit 4, and a multi-dimensional adjustment unit 5 are stacked in sequence from bottom to top along the Z-axis direction; a barrel assembly 6 passes through the multi-dimensional adjustment unit 5, the Y-direction adjustment unit 4, the X-direction adjustment unit 3, the Z-direction adjustment unit 2, and the base 1 in sequence, an exit end of the barrel assembly 6 extends to the outside of the base 1, and an incident end of the barrel assembly 6 is rotatably connected to the multi-dimensional adjustment unit 5; the X-direction adjustment unit 3 is movably connected to the Z-direction adjustment unit 2, and the X-direction adjustment unit 3 is configured to adjust the barrel assembly The Y-axis adjustment unit 4 is movably connected to the X-axis adjustment unit 3, and the Y-axis adjustment unit 4 is configured to adjust the position of the lens barrel assembly 6 in the Y-axis direction; the Z-axis adjustment unit 2 is movably connected to the base 1, and the Z-axis adjustment unit 2 is configured to adjust the position of the lens barrel assembly 6 in the Z-axis direction; the multidimensional adjustment unit 5 is movably connected to the Y-axis adjustment unit 4, and the multidimensional adjustment unit 5 is configured to rotate the lens barrel assembly 6 around the X-axis and / or around the Y-axis, and / or adjust the position of the lens barrel assembly in the Z-axis direction.

[0112] Specifically, Figure 1 Take an example to illustrate: the base 1, the Z-adjustment unit 2, the X-adjustment unit 3, the Y-adjustment unit 4 and the multi-dimensional adjustment unit 5 are all plate-shaped with a through hole in the center, and are assembled in a stacked manner. The lens barrel assembly 6 passes through each through hole in turn, so that its emission end is located at the lower part of the base 1, and the incident end is located on the upper surface of the multi-dimensional adjustment unit 5 and is fixedly mounted on the multi-dimensional adjustment unit 5.

[0113] The Z-adjusting unit 2 can realize the movement of the lens barrel assembly 6 in the Z-axis direction; the X-adjusting unit 3 can realize the movement of the lens barrel assembly 6 in the X-axis direction; the Y-adjusting unit 4 can realize the movement of the lens barrel assembly 6 in the Y-axis direction; the multi-dimensional adjusting unit 5 can not only realize the movement of the lens barrel assembly 6 in the X-axis direction, but also enable the lens barrel assembly 6 to rotate around the X-axis and Y-axis; at the same time, the adjusting structure in the lens barrel assembly 6 can also enable the lens barrel assembly 6 to rotate around the Z-axis.

[0114] Thus, the lens barrel assembly 6 can be adjusted in six dimensions by one adjustment device, and each dimension can be adjusted independently without affecting each other, which can maximize the adjustment efficiency of the lens barrel assembly 6 in the entire optical system. In addition, the stacked arrangement of the base 1, the Z-direction adjustment unit 2, the X-direction adjustment unit 3, the Y-direction adjustment unit 4 and the multi-dimensional adjustment unit 5 makes the structure of the adjustment device compact, greatly saves the structural space, and can achieve the adjustment of large-aperture objective lenses.

[0115] In an optional embodiment, a slide groove 113 is provided on one side of the base 1 facing the Z-direction adjustment unit 2 , and the Z-direction adjustment unit 2 is embedded in the slide groove 113 and can move along the slide groove.

[0116] See also Figure 2 The base 1 includes a fixed plate 11, which is, for example, a rectangular plate. A slide groove 113 is provided on the surface of the fixed plate 11 facing the Z-direction adjustment unit 2, for example, on the upper surface of the fixed plate 11. The slide groove 113 is arranged parallel to the X-axis direction, and the Z-direction adjustment unit 2 is embedded in the slide groove 113, that is, the Z-direction adjustment unit 2 is clamped between two inner side surfaces 1131 of the slide groove 113. Thus, the push structure in the Z-direction adjustment unit 2 is limited by the slide groove 113, so that the push structure in the Z-direction adjustment unit 2 can only move along the slide groove 113 during the adjustment process, and no changes in other positions will occur to affect the adjustment accuracy.

[0117] Preferably, four fixing holes 111 are evenly arranged near the four corners of the slide slot 113, and the base 1 is fixed in the optical path system through the four fixing holes 111. Two positioning pin holes 112 are provided at the diagonal positions of the fixing plate 11 to position the base 1 for easy installation of the base 1.

[0118] In an optional implementation, a plurality of first protrusions are provided on two side edges 1132 of the base 1 parallel to the slide groove 113 to limit and lock the Z-direction adjustment unit 2 .

[0119] Continue to see Figure 2, the two side edges 1132 of the slide groove 113 are the protruding parts on the left and right sides of the slide groove 113. The first protrusions are set, for example, as 2, 3, 4, 5 or 6. This embodiment is described by taking the setting of 4 first protrusions as an example: two first protrusions 116 are set on the side edge 1132 on the left, and the other two first protrusions 115 are set on the side edge 1132 on the right. Preferably, a pre-tightening structure is provided on the first protrusion on at least one side to pre-tighten or lock the Z-axis adjustment unit 2. The pre-tightening structure is, for example, a ball screw or a spring plunger, etc., which is not specifically limited in this application.

[0120] For example, a pre-tightening structure 1151 is provided on the first protrusion 115 on the right side, and the Z-axis adjustment unit 2 is limited between the first protrusion 116 on the left side and the first protrusion 115 on the right side. When the position of the lens barrel assembly 6 in the Z-axis direction is adjusted by the Z-axis adjustment unit 2, the Z-axis adjustment unit 2 can be pre-tightened and installed by the pre-tightening structure 1151 first to avoid excessive displacement of the Z-axis adjustment unit 2 during the adjustment process; after the adjustment of the Z-axis adjustment unit 2 is completed, the Z-axis adjustment unit 2 can be locked by the early warning structure 1151 to avoid unexpected changes in the position of the lens barrel assembly in the Z-axis direction.

[0121] Preferably, at least two positioning pins 117 are provided on the two side edges 1132 of the slide slot 113, and the positioning pins 117 are inserted into the Z-direction adjustment unit 2 along the Z-axis direction to limit the Z-direction adjustment unit 2, so that the mobile unit in the Z-direction adjustment unit 2 can only move up and down along the positioning pins 117, and will not be displaced in other directions. More preferably, a concave structure 118 is provided on the outer side of the four side edges of the base 1 to form an avoidance space for the Z-direction adjustment unit 2, which not only facilitates the installation of the Z-direction adjustment unit 2, but also improves the compactness of the overall structure of the adjustment device.

[0122] In an optional embodiment, the Z-axis adjustment unit 2 includes a first differential screw 211, a pushing structure 22 and a moving structure 23, the pushing structure 22 is located between the base 1 and the moving structure 23, the pushing structure 22 is slidably connected to the slide groove 113, and the moving structure 23 is movably connected to the base 1; the first differential screw 211 is connected to the pushing structure 22, and the pushing structure 22 is driven to move along the slide groove 113 by rotating the first differential screw 211; the moving structure 23 moves along the Z-axis direction under the action of the pushing structure 22.

[0123] Specifically, Figure 3-4As shown: one end of the first differential screw 211 passes through the first threaded seat 21 and is connected to the pushing structure 22, and the other end of the first differential screw 211 is located on the side of the first threaded seat 21 away from the pushing structure 22. The connection between one end of the first threaded rod 211 and the pushing structure 22 can ensure that when the first threaded rod 211 rotates, the pushing structure 22 does not rotate with it and can move along the slide groove 113 under the action of the first threaded rod 22. For example, an annular groove is provided at one end of the first threaded rod 211, and an annular protrusion adapted to the annular groove is provided at the corresponding position of the pushing structure 22, so that the pushing structure 22 does not rotate with the first threaded rod 211, but moves along the slide groove 113 under the action of the first threaded rod 211. The first threaded seat 21 is fixed on the base 1, for example, the first threaded seat 21 can be set at the center position of one end of the slide groove 113, so that the first differential screw 211 can more effectively drive the pushing structure 22 to move. The two side edges 221 of the pushing structure 22 abut against the two inner side surfaces 1131 of the slide groove 113, so that the pushing structure 22 is embedded in the slide groove 113, so that the pushing structure 22 can slide along the slide groove 113. The moving structure 23 is located above the pushing structure 22, and a positioning pin hole 238 is provided on the moving structure 23 at a position corresponding to the positioning pin 117. The positioning pin 117 is inserted into the positioning pin hole 238, so that the moving structure 23 can move up and down along the positioning pin 117, thereby changing the position of the lens barrel assembly 6 in the Z-axis direction.

[0124] It can be understood that by rotating the first differential screw 211, the pushing structure 22 is driven to move forward or backward along the slide groove 113, thereby changing the relative position between the pushing structure 22 and the moving structure 23. Since the contact surface between the pushing structure 22 and the moving structure 23 is an inclined surface, when the relative position between the two changes, the position of the moving structure 23 in the Z-axis direction will also change accordingly, thereby realizing the position adjustment of the lens barrel assembly 6 in the Z-axis direction.

[0125] In an optional embodiment, the pushing structure includes a first part and a second part, the second part is located on both sides of the first part parallel to the slide groove, and the second part is configured to be wedge-shaped; a wedge-shaped protrusion adapted to the second part is provided on the surface of the moving structure facing the pushing structure; the second part abuts against the wedge-shaped protrusion, and the inclination angles of the second part and the wedge-shaped protrusion are equal and the inclination directions are opposite.

[0126] See also Figure 5-13The pushing structure 22 includes a first part 224 and a second part 223, wherein the second part 223 is located on the left and right sides of the first part 224. The first part 224 is a plate-like shape that is approximately rectangular, and the second part 223 is a slope structure that is approximately wedge-shaped, and is located on the two long sides of the first part 224. The left and right sides of the lower surface of the moving structure 23 are provided with wedge-shaped protrusions 234 corresponding to the second part 223, and the lower surface 2341 of the wedge-shaped protrusion 234 is in contact with the upper surface 2231 of the second part 223. The inclination angles of the second part 223 and the wedge-shaped protrusion 234 are equal and the inclination directions are opposite. Optionally, the inclination angles of the second part 223 and the wedge-shaped protrusion 234 can be 1-45 degrees. For example, the thickness of the second part 223 increases from left to right, and the thickness of the wedge-shaped protrusion 234 decreases from left to right. When the pushing structure 22 moves relative to the moving structure 23, the contact area between the lower surface 2341 of the wedge-shaped protrusion 234 and the upper surface 2231 of the second part 223 is different, so that the position of the moving structure 23 on the Z axis changes. For example, when the lower surface 2341 of the wedge-shaped protrusion 234 completely overlaps with the upper surface 2231 of the second part 223, the moving structure 23 is in the highest position, and as the overlap area between the lower surface 2341 of the wedge-shaped protrusion 234 and the upper surface 2231 of the second part 223 gradually decreases, the position of the moving structure 23 also moves downward. It is not difficult to understand that there is a gap between the upper surface 2241 of the first part 224 and the moving structure 23, so that during the movement of the pushing structure 22, the first part 224 and the moving structure 23 will not affect each other.

[0127] In an optional embodiment, the wedge-shaped protrusion is clamped between the first part and the slide slot to limit the movable structure; the movable structure is provided with a plurality of second protrusions on two sides parallel to the slide slot to limit and lock the X-axis adjustment unit.

[0128] like Figure 5 and Figure 8-9As shown, the pushing structure 22 abuts against the two inner side surfaces 1131 corresponding to the slide groove 113 through its two side edges 221 to achieve a sliding connection between the pushing structure 22 and the slide groove 113. The first part 224 of the pushing structure 22 is a plate with uniform thickness. Preferably, the thickness of the first part 224 is equal to the thickness at the thickest position of the second part 223, so that the first part 224 is protruded relative to the thinner position of the second part 223, and the protruded part has two side surfaces 2242. At the same time, the wedge-shaped protrusion 234 has two inner side surfaces 2342 and two outer side surfaces, wherein the two inner side surfaces 2342 abut against the two side surfaces 2242 of the second part, and the two outer side surfaces abut against the two inner side surfaces 1131 of the slide groove 113, so that the wedge-shaped protrusion 234 is clamped between the first part 223 and the slide groove 113 to limit the moving structure 23.

[0129] like Fig.12 As shown, two second protrusions are respectively provided on the left and right sides of the upper surface of the moving structure 23, wherein two second protrusions 237 are provided on the left side, and two second protrusions 236 are provided on the right side. The X-axis adjustment unit 3 is located between the second protrusion 237 and the second protrusion 236. Preferably, a pre-tightening structure is provided on the second protrusion on at least one side to pre-tighten or lock the X-axis adjustment unit 3, and the pre-tightening structure is, for example, a ball screw or a spring plunger, etc., which is not specifically limited in the present application. For example, a pre-tightening structure 2361 is provided on the second protrusion 236 on the right side, and when the position of the lens barrel assembly 6 in the X-axis direction is adjusted by the X-axis adjustment unit 3, the X-axis adjustment unit 3 can be pre-tightened and installed by the pre-tightening structure 2361 first, so as to avoid excessive displacement during the adjustment process of the X-axis adjustment unit 3; after the adjustment of the X-axis adjustment unit 3 is completed, the X-axis adjustment unit 3 can be locked by the early warning structure 2361 to avoid undesirable changes in the position of the lens barrel assembly in the X-axis direction. During use, other numbers of second protrusions may be provided as required, and this application does not make any specific limitation thereto.

[0130] Preferably, a plurality of fixing screws 226 are provided on the first portion 224 of the pushing structure 22. When the Z-axis adjusting unit 2 is adjusted, the pushing structure 22 and the base 1 are fixed by the plurality of fixing screws 226 and the screw holes 119 provided at the corresponding positions of the base 1. A plurality of fixing screws 239 are provided on the peripheral side of the moving structure 23. When the Z-axis adjusting unit 2 is adjusted, the moving structure 23 and the base 1 are fixed by the plurality of fixing screws 239 and the screw holes 1110 provided at the corresponding positions of the base 1.

[0131] In an optional implementation, the adjustment accuracy of the Z-direction adjustment unit is:

[0132] a=b×tan2θ

[0133] Wherein, a is the adjustment accuracy of the Z-axis adjustment unit, b is the moving distance of the pushing structure when the first differential screw rotates one circle, and θ is the inclination angle of the wedge-shaped protrusion.

[0134] For example, when the first differential screw 211 rotates one circle, the pushing structure 22 moves 0.05 mm under the action of the first differential screw 211. The rotation angle of the first differential screw 211 when it is manually rotated once is 5°. For the convenience of control, a mark can be set on the first differential screw 211. Therefore, when the first differential screw 211 is manually rotated once, the displacement of the pushing structure 22 is 0.05×5 / 360≈0.69×10 -3 mm, that is, the displacement of the pushing structure 22 is about 0.69 μm. When the inclination angle of the second portion 223 and the wedge-shaped protrusion 234 is 1.5°, the adjustment accuracy of the Z-direction adjustment unit 2 is 0.69×10 -3 ×tan3°≈0.036×10 -3 mm, that is, when the first differential screw 211 is manually rotated once, the displacement of the moving structure 23 is about 36 nm.

[0135] Alternatively, the first differential screw 211 can be driven by a motor, piezoelectric or other driving structure that can achieve automatic control. At the same time, a corresponding display device can be provided to display the adjustment progress of the first differential screw 211 in real time to achieve automatic, intelligent, high-precision and visual adjustment.

[0136] In an optional implementation, the X-direction adjustment unit includes a second differential screw, which is connected to the X-direction adjustment unit, and the X-direction adjustment unit is driven to move along the X-axis direction by rotating the second differential screw.

[0137] See also Figure 14-17, the X-axis adjustment unit 3 is a plate-like structure 32 with uniform thickness, which is located above the Z-axis adjustment unit 2. The X-axis adjustment unit 3 includes a second differential screw 311, one end of the second differential threaded rod 311 passes through the second threaded seat 31 and is connected to a side of the plate-like structure 32, and the other end of the second differential threaded rod 311 is exposed outside the second threaded seat 31. Among them, the connection method between one end of the second differential threaded rod 311 and the plate-like structure 32 can refer to the connection method between the first differential screw 211 and the pushing structure 22 mentioned above, which will not be repeated here. The second threaded seat 31 is fixedly mounted on the upper surface of the moving structure 23 in the Z-axis adjustment unit 2 in a detachable manner. Preferably, the second threaded seat 31 is not arranged on the same side as the first threaded seat 21, for example, the first threaded seat 21 and the second threaded seat 31 are both arranged along the X-axis direction, the first threaded seat 21 is located on the side of the X-axis adjustment unit 3 away from the positive direction of the X-axis, and the second threaded seat 31 is located on the side of the X-axis adjustment unit 3 close to the positive direction of the X-axis. Such arrangement can, on the one hand, avoid mutual influence between the first threaded seat 21 and the second threaded seat 31 during the adjustment process, and on the other hand, can make the structure of the adjustment device as compact as possible to save installation space.

[0138] It is not difficult to understand that by rotating the second differential screw 311, the X-axis adjustment unit 3 will translate along the direction of the X-axis under the limiting action of the second protrusion 236 and the second protrusion 237, thereby adjusting the position of the lens barrel assembly 6 in the X-axis direction until it is adjusted to the desired position, and the X-axis adjustment unit 3 is locked by the pre-tightening structure 2361 so that the X-axis adjustment unit 3 no longer moves.

[0139] Preferably, Figure 16-17 As shown, the side surfaces corresponding to the plate-like structure 32 and the pre-tightening structure 2361 in the X-axis adjustment unit 3 are arranged as inclined surfaces which are smaller at the top and larger at the bottom. When the pre-tightening structure 2361 acts on the inclined surface to lock the X-axis adjustment unit 3, a downward component force is applied to the plate-like structure 32, i.e., a component force toward the X-axis adjustment unit 2, thereby preventing the plate-like structure 32 from falling out upward due to the action of the pre-tightening structure 2361.

[0140] Preferably, see Figure 15-16 A plurality of fixing bolts 326 are evenly arranged at positions near the circumference of the plate-like structure 32 in the X-axis adjustment unit 3. The number of the fixing bolts is, for example, 4, 5, 6, 7 or 8. After the X-axis adjustment unit 3 is adjusted, the X-axis adjustment unit 3 can be fixed by the plurality of fixing bolts 326 and the screw holes 2310 arranged on the moving structure 23, so that the X-axis adjustment unit 3 no longer moves relative to the Z-axis adjustment unit 2.

[0141] In an optional implementation, a plurality of third protrusions are provided on two side edges of the X-direction adjustment unit that are perpendicular to the X-axis direction, so as to limit and lock the Y-direction adjustment unit.

[0142] Continue to see Figure 15-16 , a plurality of third protrusions are provided on opposite sides of the upper surface of the plate-like structure 32, and the plurality of third protrusions are arranged along the Y-axis direction. Four third protrusions are used as an example for explanation: two third protrusions 325 are provided on the side of the plate-like structure 32 close to the second differential threaded rod 311, and two third protrusions 324 are provided on the side of the plate-like structure 32 away from the second differential threaded rod 311. The Y-axis adjustment unit 4 is clamped between the third protrusion 324 and the third protrusion 325, and the Y-axis adjustment unit 4 can only move along the Y-axis direction through the limiting effect of the third protrusion 324 and the third protrusion 325. Preferably, a pre-tightening structure is provided on the third protrusion on at least one side to fix the Y-axis adjustment unit 4, for example, a pre-tightening structure 3241 is provided on the two third protrusions 324, and when the Y-axis adjustment unit 4 completes the adjustment, the Y-axis adjustment unit 4 is locked through the pre-tightening structure 3241.

[0143] In an optional implementation, the adjustment accuracy of the X-direction adjustment unit is:

[0144] c=d×α / 360

[0145] Wherein, c is the adjustment accuracy of the X-axis adjustment unit, d is the movement distance of the X-axis adjustment unit along the X-axis direction when the second differential screw rotates one circle, and α is the angle of the second differential screw when it rotates once.

[0146] For example, when the second differential screw 311 rotates one circle, the plate-like structure 32 moves 0.05 mm under the action of the second differential screw 311. The rotation angle of the second differential screw 311 when it is manually rotated once is 5°. For the convenience of control, a mark can be set on the second differential screw 311. Therefore, when the second differential screw 311 is manually rotated once, the distance moved by the plate-like structure 32 is 0.05×5 / 360≈0.69×10 -3 mm, that is, the position adjustment accuracy of the lens barrel assembly 6 in the X-axis direction by the X-direction adjustment unit 3 is 0.69 μm. Similarly, referring to the first differential screw 211, the second differential screw 311 can also be driven by a motor, piezoelectric or other driving structure that can realize automatic control, which will not be repeated here.

[0147] In an optional embodiment, the Y-axis adjustment unit includes a third differential screw, which is connected to the Y-axis adjustment unit, and the Y-axis adjustment unit is driven to move along the Y-axis direction by rotating the third differential screw.

[0148] See also Figure 18-21, the Y-axis adjustment unit 4 includes a moving structure 42 and a third differential screw 411. The moving structure 42 is a plate with uniform thickness and is located above the X-axis adjustment unit 3. One end of the third differential screw 411 passes through the third threaded seat 41 and is connected to the moving structure 42, and the other end of the third differential screw 411 is located outside the third threaded seat 41. Among them, the third threaded seat 41 is fixedly mounted on the X-axis adjustment unit 3 in a detachable manner. Preferably, the third threaded seat 41 and the first threaded seat 21 and the second threaded seat 31 are not arranged on the same side. For example, the first threaded seat 21 and the second threaded seat 31 are respectively arranged on both sides of the X-axis adjustment unit 3 along the X-axis direction, and the third threaded seat 41 is arranged on any one of the other two sides of the X-axis adjustment unit 3. Not only can the first threaded seat 21, the second threaded seat 31 and the third threaded seat 41 be prevented from influencing each other during the adjustment process, but also the structure of the adjustment device can be made as compact as possible to save installation space.

[0149] It is easy to understand that the moving structure 42 is clamped between the third protrusion 324 and the third protrusion 325. Under the limiting effect of the third protrusion 324 and the third protrusion 325, the third screw rod 411 is rotated, and the moving structure 42 can only move along the Y-axis direction and cannot be displaced in other directions. Then, the position of the lens barrel assembly 6 in the Y-axis direction is adjusted by the Y-direction adjustment unit 4.

[0150] In an optional embodiment, at least three spherical recesses are provided on the surface of the Y-axis adjustment unit close to the multi-dimensional adjustment unit, and a threaded hole is provided at the center of each spherical recess.

[0151] Continue to see Figure 18-20 , three spherical depressions are provided for illustration: three spherical depressions 424 are evenly provided on the upper surface of the moving structure 42, and a threaded hole 425 is provided at the center of the spherical depression 424. The spherical depression 424 is used to cooperate with the multi-dimensional adjustment unit 5 to adjust the multiple degrees of freedom of the lens barrel assembly 6; after the multi-dimensional adjustment unit 5 completes the adjustment, the threaded hole 425 is used to lock the multi-dimensional adjustment unit 5.

[0152] In an optional implementation, the adjustment accuracy of the Y-axis adjustment unit is:

[0153] l=k×β / 360

[0154] Wherein, l is the adjustment accuracy of the Y-axis adjustment unit, k is the moving distance of the Y-axis adjustment unit along the Y-axis direction when the third differential screw rotates one circle, and β is the angle of the third differential screw when it rotates once.

[0155] For example, when the third differential screw 411 rotates one circle, the moving structure 42 moves 0.05 mm under the action of the third differential screw 411. The rotation angle of the third differential screw 411 when it is manually rotated once is 5°. For the convenience of control, a mark can be set on the third differential screw 411. Therefore, when the third differential screw 411 is manually rotated once, the moving structure 42 moves a distance of 0.05×5 / 360≈0.69×10 -3 mm, that is, the position adjustment accuracy of the lens barrel assembly 6 in the Y-axis direction by the Y-direction adjustment unit 4 is 0.69 μm. Similarly, referring to the first differential screw 211, the third differential screw 411 can also be driven by a motor, piezoelectric or other driving structure that can realize automatic control, which will not be repeated here.

[0156] In an optional embodiment, the multi-dimensional adjustment unit includes a base and a knob assembly matched with the spherical recess; the knob assembly passes through the base and is connected to the corresponding spherical recess; and there is a gap between the base and the Y-axis adjustment unit.

[0157] See also Figure 22-25 The multi-dimensional adjustment unit 5 includes a base 51 and a plurality of knob assemblies 52, and the plurality of knob assemblies 52 are evenly distributed along the circumference of the base 51. The base 51 is a plate-like structure with uniform thickness and is located above the Y-adjustment unit 4. The number of knob assemblies 52 is, for example, 3, 4, 5, 6, 7 or 8. One end of the knob assembly 52 passes through the base 51 along the Z-axis direction and abuts against the corresponding spherical recess 424, and the other end of the knob assembly 52 is located above the base 51.

[0158] It can be understood that by rotating the knob assembly 52, the length of one end of the knob assembly 52 extending from the base 51 can be changed, thereby changing the height of the base 51 relative to the Y-axis adjustment unit 4. When one or two knob assemblies 52 are rotated, or three knob assemblies 52 are rotated and the displacements of the three knob assemblies 52 are different, the base 51 can be rotated around the X-axis or the Y-axis by a certain angle, thereby driving the lens barrel assembly 6 to rotate around the X-axis or the Y-axis by a corresponding angle to change the angle between the lens barrel assembly 6 and the XOY plane; when the three knob assemblies 52 are rotated at the same time and the displacements adjusted by the three knob assemblies 52 are kept the same, the distance of the base 51 relative to the Y-axis adjustment unit 4 can be changed, thereby driving the position of the lens barrel assembly 6 in the Z-axis direction to change. Finally, the multi-dimensional adjustment unit 5 can adjust multiple degrees of freedom of the lens barrel assembly 6.

[0159] Preferably, the knob assembly includes an adjusting knob and a locking bolt, the adjusting knob is sleeved on the outside of the locking bolt; the end of the adjusting knob connected to the spherical recess is set to a spherical shape that matches the spherical recess; the locking bolt is connected to the threaded hole to lock the adjusting knob.

[0160] like Figure 26-27 As shown, the knob assembly 52 includes an adjusting knob 521 and a locking bolt 522. The adjusting knob 521 is provided with a through hole along the central axis direction thereof. The locking bolt 522 passes through the through hole and the end portion is exposed at the lower end of the adjusting knob 521. The lower end of the adjusting knob 521 is set to be a sphere that matches the spherical recess 424, so that when the lower end of the adjusting knob 521 abuts against the spherical recess 424, that is, the contact surface between the lower end of the adjusting knob 521 and the spherical recess 424 is an arc surface, so that the lens barrel assembly 6 can be adjusted at any angle through the multi-dimensional adjustment unit 5 without being restricted by the contact surface between the lower end of the adjusting knob 521 and the spherical recess 424. After the adjusting knob 521 is adjusted, the adjusting knob 521 can be locked through the locking bolt 522 and the corresponding threaded hole 425.

[0161] Preferably, the adjusting knob 521 includes an upper threaded portion 5214 and a lower threaded portion 5212, and an elastic structure 5213 is provided at the interval between the upper threaded portion 5214 and the lower threaded portion 5212. The upper threaded portion 5214 and the lower threaded portion 5212 are both provided with continuous threads, and when the multi-dimensional adjusting unit 5 is adjusted, the upper threaded portion 5214 and the lower threaded portion 5212 can be screwed into the screw hole 514 in the thickness direction of the base 51 together. When the adjusting knob 521 is locked by the locking bolt 522, the elastic structure 5231 is compressed, so that the upper threaded portion 5214 and the lower threaded portion 5212 are respectively fixed to each other with the threads in the screw hole 514 at their corresponding positions, thereby keeping the position of the adjusting knob 521 unchanged, thereby locking the multi-dimensional adjusting unit 5.

[0162] More preferably, a screwing hole 5216 and a screwing notch 5217 are provided at the end of the adjusting knob 521 exposed from the base 51. When the adjusting knob 521 needs to be rotated, a tool can be passed through the screwing hole 5216 or inserted into the screwing notch 5217 to rotate the adjusting knob 521.

[0163] See also Fig.24 , a mounting structure of the lens barrel assembly 6 is provided on the upper surface of the base 51, and the mounting structure includes a plurality of arc segments 515, and the plurality of arc segments 515 form a quasi-circular shape adapted to the lens barrel assembly 6. The arc segments 515 are provided with a plurality of screw holes 5151 and a plurality of positioning pins 5152. The lens barrel assembly 6 is connected to the multidimensional adjustment unit 5 through the plurality of screw holes 5151, and the lens barrel assembly 6 is guided by the plurality of positioning pins 5152 to prevent the lens barrel assembly 6 from rotating too much during the rotation process around the Z axis. An interval 5153 is provided between adjacent arc segments 515, which can improve the flatness of the plane formed by the plurality of arc segments 515 together on the one hand, and can also be used as a tilting position when the lens barrel assembly 6 is disassembled, so as to facilitate the disassembly of the lens barrel assembly 6.

[0164] In an optional implementation, when there are three knob components, the adjustment accuracy of the multi-dimensional adjustment unit is:

[0165] h=i×δ / 360

[0166]

[0167] Among them, h is the adjustment accuracy of the multi-dimensional adjustment unit in the Z-axis direction, i is the moving distance of the base along the Z-axis direction when the adjustment knob rotates one circle, δ is the angle of the adjustment knob when it rotates once, Φ is the adjustment accuracy of the multi-dimensional adjustment unit around the X-axis or around the Y-axis, and R is the radius of the circle formed by the uniform distribution of the three knob components.

[0168] Taking the arrangement of three knob assemblies 52 as an example, when the position of the lens barrel assembly 6 in the Z-axis direction is adjusted by the multi-dimensional adjustment unit 5, the three adjustment knobs 521 are manually rotated one circle, and the height of the base 51 relative to the Y-axis adjustment unit 4 is 1 mm. The angle of rotation of the adjustment knob 521 is 5° when the adjustment knob 521 is manually rotated once. For the convenience of control, a mark can be set on the adjustment knob 521. Therefore, the height of the base 51 rising or falling is 1×5 / 360≈0.0139 mm when the adjustment knob 521 is manually rotated once, that is, the adjustment accuracy of adjusting the position of the lens barrel assembly 6 in the z-axis direction by the multi-dimensional adjustment unit 5 is 13.9 μm.

[0169] Still taking the setting of three knob assemblies 52 as an example, when the angle between the lens barrel assembly 6 and the XOY plane is adjusted by the multi-dimensional adjustment unit 5, the radius of the circle formed by the three adjustment knobs 521 evenly distributed is 110 mm, and when one or two knobs 521 are manually rotated once, the height of the base 51 rising or falling is 1×5 / 360≈0.0139 mm, and the angle of rotation of the lens barrel assembly 6 relative to the XOY plane is That is, the adjustment accuracy of the angle between the lens barrel assembly 6 and the XOY plane adjusted by the multi-dimensional adjustment unit 5 is 0.426′.

[0170] In an optional embodiment, the lens barrel assembly includes a lens barrel, an adjustment structure and a pre-tightening structure. A flange is provided at the incident end of the lens barrel, and the lens barrel is rotatably connected to the multi-dimensional adjustment unit through the flange; a toggle structure is provided on the outer peripheral surface of the flange, and the adjustment structure is connected to the pre-tightening structure through the toggle structure to enable the lens barrel assembly to rotate around the Z axis.

[0171] See also Figure 28-33The lens barrel assembly 6 includes a lens barrel 61, an adjustment structure 62 and a pre-tightening structure 63. The lens barrel 61 includes a lens barrel body 611 and a mounting flange 612 arranged at the upper end of the lens barrel 61. The shape of the mounting flange 612 is adapted to the shape formed by the plurality of arc segments 515. A plurality of positioning grooves 615 are evenly arranged along the circumference of the mounting flange 612. The positioning pins 5152 are inserted into the corresponding positioning grooves 615, and play a guiding role for the lens barrel 61 when the lens barrel 61 rotates around the Z axis. A toggle structure 613 is protrudingly arranged on the outer circumferential surface of the mounting flange 612. One end of the adjustment structure 62 passes through the toggle structure 613, and the other end of the adjustment structure is located at the other side of the toggle structure 613; at the same time, the pre-tightening structure 63 is connected to one end of the adjustment structure 62. Through the squeezing effect of the adjustment structure 62 and the pre-tightening structure 63 on the toggle structure 613, the lens barrel 61 is driven to rotate within the range of the positioning groove 615, so as to adjust the rotation angle of the lens barrel assembly 6 around the Z axis.

[0172] Furthermore, the adjustment structure includes a fourth differential screw, and the pre-tightening structure includes a fixed stopper and an elastic member; the fourth differential screw passes through the toggle structure and is connected to the elastic member and the fixed stopper; the elastic member is located between the fixed stopper and the toggle structure.

[0173] like Fig.29 As shown, the adjustment structure 62 includes a fourth differential screw 622, and an adjustment base 621 is provided between the fourth differential screw 622 and the toggle structure 613. The preload structure includes a fixed stopper 631 and an elastic member 632, and the elastic member 632 is located between the fixed stopper 631 and the toggle structure 613. One end of the fourth differential screw 622 passes through the adjustment base 621, the toggle structure 613, the elastic member 632 and the fixed stopper 631 in sequence.

[0174] It is easy to understand that by rotating the fourth differential screw 622, the elastic member 632 applies a certain pre-tightening force to the toggle structure 613, and then the fourth differential screw 622 is further rotated, and the toggle structure 613 drives the lens barrel 61 to rotate around the Z axis under the elastic force of the elastic member 632, thereby adjusting the rotation angle of the lens barrel assembly 6 around the Z axis. When the rotation angle reaches the required angle, the lens barrel assembly 6 can be fixed by screws and the screw holes 614 on the mounting flange 612 and the screw holes 5151 on the arc segment 515, so that it no longer moves.

[0175] In an optional implementation, the adjustment accuracy of the adjustment structure is:

[0176] φ=arcsin(u / s)

[0177] Wherein, φ is the adjustment accuracy of the adjustment structure rotating around the Z axis, u is the distance the fourth differential screw moves relative to the toggle structure when it rotates one circle, and s is the distance between the central axis of the lens barrel and the center of the toggle structure.

[0178] For example, when the fourth differential screw 622 is manually rotated once, the displacement of the phase adjustment base 621 forward or backward is 0.25mm, and the angle of manual rotation of the fourth differential screw 622 is 5°. The distance between the central axis of the lens barrel 61 and the center of the toggle structure 613 is 100mm, so when the fourth differential screw 622 is manually rotated once, the rotation angle of the lens barrel 61 around the Z axis is arcsin (0.25×5 / 360 / 100)≈0.001989°≈0.12′. That is, the adjustment accuracy of the rotation angle of the lens barrel assembly 6 around the Z axis by the fourth differential screw 622 is 0.12′.

[0179] In an optional embodiment, the base, the Z-axis adjustment unit, the X-axis adjustment unit, the Y-axis adjustment unit and the multi-dimensional adjustment unit are all provided with a through hole for the lens barrel to pass through at the center position, and a raised edge is provided on the side of the through hole facing the incident end of the lens barrel, and an annular groove is provided on the side of the through hole of the Z-axis adjustment unit, the X-axis adjustment unit, the Y-axis adjustment unit and the multi-dimensional adjustment unit facing the exit end of the lens barrel to form an avoidance space for the edge.

[0180] Specifically, Figure 2 As shown, a through hole 114 is provided at the center of the base 1 to facilitate the passage of the lens barrel 61 or the passage of light. An upwardly extending edge 1141 is provided on one side of the through hole 114 close to the upper surface of the base 1, and the upper surface of the edge 1141 is higher than the upper surface of the slide groove 113, thereby preventing particles from entering the through hole 114 and causing damage to the components in the lens barrel assembly 6.

[0181] like Figure 10-11 As shown, a through hole 225 is provided at the center of the pushing structure 22 to facilitate the passage of the lens barrel 61 or the passage of light. An upwardly extending edge 2251 is provided on one side of the through hole 225 close to the upper surface of the pushing structure 22, and the upper surface of the edge 2251 is higher than the upper surface of the first portion 224 of the pushing structure, thereby preventing particles from entering the through hole 225 and causing damage to the components in the lens barrel assembly 6. An annular groove 2252 adapted to the edge 1141 is provided on one side of the through hole 225 close to the lower surface of the pushing structure 22, so as to form an avoidance space for the edge 1141 to avoid mutual influence during the adjustment process.

[0182] like Figure 12-13As shown, a through hole 235 is provided at the center of the mobile structure 23 to facilitate the passage of the lens barrel 61 or the passage of light. An edge 2351 extending upward is provided on one side of the through hole 235 close to the upper surface of the mobile structure 23, and the upper surface of the edge 2351 is higher than the upper surface of the mobile structure 23, thereby preventing particles from entering the through hole 235 and causing damage to the components in the lens barrel assembly 6. An annular groove 2352 adapted to the edge 2251 is provided on one side of the through hole 235 close to the lower surface of the mobile structure 23, so as to form an avoidance space for the edge 2251 to avoid mutual influence during the adjustment process.

[0183] Similarly, see Figure 16-17 , Figure 20-21 , Figure 24-25 The X-direction adjustment unit 3 is provided with a through hole 323, an edge 3231 and an annular groove 3232 at the center; the Y-direction adjustment unit 4 is provided with a through hole 423, an edge 4231 and an annular groove 4232 at the center; the multi-dimensional adjustment unit 5 is provided with a through hole 513, an edge 5131 and an annular groove 5132 at the center. The working principles of each through hole, edge and annular groove are the same and will not be repeated here.

[0184] In an optional embodiment, a groove matching the edge is provided on a side of the flange close to the multi-dimensional adjustment unit.

[0185] See also Fig.29 The lower surface of the mounting flange 612 is provided with a groove 616, and the edge 5131 provided on the multi-dimensional adjustment unit 5 is embedded in the groove 616. On the one hand, the assembly between the lens barrel 61 and the multi-dimensional adjustment unit 5 can be realized, and on the other hand, the sealing effect between the lens barrel 61 and the multi-dimensional adjustment unit 5 can be improved to prevent particles from entering the through hole 513 and causing damage to the components in the lens barrel assembly 6.

[0186] An adjustment method according to an embodiment of the present invention comprises:

[0187] Assemble the lens barrel assembly and the adjustment device, and make the X-direction adjustment unit, the Y-direction adjustment unit, the Z-direction adjustment unit, the multi-dimensional adjustment unit and the lens barrel assembly all in a pre-tightened state;

[0188] The multi-dimensional adjustment unit controls the lens assembly to rotate around the X-axis and Y-axis until the rotation angle reaches a preset value. At the same time, the multi-dimensional adjustment unit performs an initial adjustment on the position of the lens barrel assembly in the Z-axis direction.

[0189] The position of the lens barrel assembly in the X-axis and Y-axis directions is adjusted respectively by the X-axis adjustment unit and the Y-axis adjustment unit. When the lens barrel assembly reaches a preset position, the X-axis adjustment unit and the Y-axis adjustment unit are locked;

[0190] The lens barrel assembly is rotated around the Z axis by adjusting the structure and the pre-tightening structure, and the lens barrel assembly is locked when the imaging effect in the lens barrel is optimal;

[0191] The position of the lens barrel assembly in the Z-axis direction is adjusted for a second time through the Z-axis adjustment unit until the lens barrel assembly reaches a preset position in the Z-axis direction, and the Z-axis adjustment unit is locked.

[0192] Specifically, all bolts used for fixing or locking in the adjusting device are first adjusted to a pre-tightened state, so that the various components of the adjusting device are in a connected state, and at the same time, the adjustment of the lens barrel assembly by each adjusting unit is not affected. The first differential screw 211, the second differential screw 311, and the third differential screw 411 are all adjusted to the middle position of the total stroke, and the adjusting knob 521 is adjusted to the designed theoretical height. Then, the lens barrel 61 is passed through each through hole and installed on the adjusting device, and the lens barrel 61 is kept in a pre-tightened state.

[0193] The specific adjustment process of the lens barrel assembly 6 by the multi-dimensional adjustment unit 5 includes: the structure of the lens barrel 61 itself and the design size of the corresponding part structure on the adjustment device can be used as a reference for adjustment. For example, the specific size of the mounting flange 612 of the lens barrel 61 and the Y-axis adjustment unit 4, or the specific size of the mounting flange 612 and other structural members in the entire adjustment device are used as a reference for adjustment. The size of the emission end of the lens barrel 61 from the base 1 can also be used as a reference size for adjustment. During the adjustment process, measurements can be performed synchronously. For example, when adjusting the angle between the lens barrel assembly 6 and the XOY plane, the angle or spacing between the mounting flange 612 and the Y-axis adjustment unit 4 can be used as a reference for adjustment; when adjusting the position of the lens barrel assembly 6 in the Z-axis direction, the distance between the emission end of the lens barrel 61 and the base 1 can be used as a reference for adjustment. During the measurement process, for example, a micrometer can be used for measurement, and its measurement accuracy is 1 μm. Based on the diameter of the lens barrel 61 being 200 mm, the adjustment accuracy of the angle between the lens barrel assembly 6 and the XOY plane by the multi-dimensional adjustment unit 5 is 0.034', which can achieve the accuracy of the optical system angle adjustment. However, when the position of the lens barrel assembly 6 in the Z-axis direction is adjusted by the multi-dimensional adjustment unit 5, its adjustment accuracy is 1 μm, which cannot meet the accuracy requirements. Therefore, the multi-dimensional adjustment unit 5 is only a coarse adjustment process of the lens barrel assembly 6 in the Z-axis direction.

[0194] The specific adjustment process of the X-axis adjustment unit 3 includes: the position of the lens barrel assembly 6 in the X-axis direction can be adjusted by means of an internal focusing autocollimator or other optical axis alignment optical adjustment tools. The X-axis adjustment unit 3 is driven to move by rotating the second differential screw 311, and the optical axis and the optical adjustment tool can be aligned as an adjustment basis during the adjustment process. Before the adjustment, an optical adjustment tool that meets the adjustment accuracy requirements can be selected, and the accurate adjustment of the position of the lens barrel assembly 6 in the X-axis direction can be achieved at one time.

[0195] The specific adjustment process of the Y-direction adjustment unit 4 includes: after completing the position adjustment in the X-axis direction, the position of the lens barrel assembly 6 in the Y-axis direction can be adjusted by means of an internal focusing autocollimator or other optical axis alignment optical adjustment tools. The movement of the Y-direction adjustment unit 4 is driven by rotating the third differential screw 411. In this adjustment process, the alignment of the optical axis with the optical adjustment tool is still used as the adjustment basis. Similarly, when performing the Y-axis direction position adjustment, an optical adjustment tool that meets the adjustment accuracy requirements is selected, so that the accurate adjustment of the position of the lens barrel assembly 6 in the Y-axis direction can be achieved at one time.

[0196] The specific adjustment process of the lens barrel assembly 6 rotating around the Z axis includes: the adjustment can be performed by using the imaging of the lens barrel assembly 6 in the entire optical system, and the angle between the lens barrel assembly 6 and the XOY plane is adjusted according to the result of the final optical system light measurement, for example, the imaging effect of the detection objective lens or the photolithography objective lens. The lens barrel 61 is rotated around the Z axis by rotating the fourth differential screw 622. When the imaging effect such as the clarity, size, position or resolution of the imaging in the lens barrel 61 is detected by the optical detection tool to meet the requirements, the adjustment process of the lens barrel assembly 6 rotating around the Z axis is completed.

[0197] The specific adjustment process of the Z-direction adjustment unit 2 includes: in this process, the focusing effect of the imaging in the lens barrel 61 is used as the adjustment basis. The pushing structure 21 is driven to move by rotating the first differential screw 211, so that the position of the moving structure 23 in the Z-axis direction changes. When the focusing effect of the imaging in the lens barrel 61 reaches the optimum, the position adjustment of the lens barrel assembly 6 in the Z-axis direction is completed. In this adjustment process, due to the high focusing accuracy requirement, the accuracy requirement is often less than 1μm, but the total stroke of the Z-direction adjustment unit 2 is designed to be on the order of several microns in order to achieve the adjustment accuracy below the nanometer level. Therefore, if the above-mentioned multiple adjustment steps cause the position of the lens barrel assembly 6 in the Z-axis direction to exceed the total stroke of the adjustable range of the Z-direction adjustment unit 2, it is necessary to return to the adjustment step of the multidimensional adjustment unit 5 to repeat the above-mentioned various adjustment steps to the lens barrel assembly 6, and finally align the lens barrel assembly 6 with the optical path in the entire optical system.

[0198] A detection system according to an embodiment of the present invention comprises a detection objective lens and the adjustment device as described above, wherein the adjustment device adjusts the detection objective lens so as to align the detection objective lens with an optical path in the detection system.

[0199] A processing system described in an embodiment of the present invention includes a photolithography objective lens and the adjustment device described above, wherein the adjustment device adjusts the photolithography objective lens to align the photolithography objective lens with an optical path in the processing system.

[0200] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0201] Furthermore, persons of ordinary skill in the art will appreciate that although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features from different embodiments is meant to be within the scope of the present invention and to form different embodiments.

[0202] It will be appreciated by those skilled in the art that, although the present invention has been described with reference to exemplary embodiments, various changes may be made and its elements may be replaced with equivalents without departing from the scope of the present invention. In addition, many modifications may be made to adapt specific situations or materials to the teachings of the present invention without departing from the essential scope of the present invention.

Claims

1. An adjustment device for aligning a lens barrel assembly with an optical path in a detection system or a processing system, characterized in that: include: A base, a Z-direction adjustment unit, an X-direction adjustment unit, a Y-direction adjustment unit and a multi-dimensional adjustment unit are stacked in sequence from bottom to top along the Z-axis direction; The lens barrel assembly passes through the multi-dimensional adjustment unit, the Y-axis adjustment unit, the X-axis adjustment unit, the Z-axis adjustment unit and the base in sequence, the emission end of the lens barrel assembly extends to the outside of the base, and the incident end of the lens barrel assembly is rotatably connected to the multi-dimensional adjustment unit; The X-direction adjustment unit is movably connected to the Z-direction adjustment unit, and the X-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the X-axis direction; The Y-direction adjustment unit is movably connected to the X-direction adjustment unit, and the Y-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the Y-axis direction; The Z-direction adjustment unit is movably connected to the base, and the Z-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the Z-axis direction; The multi-dimensional adjustment unit is movably connected to the Y-axis adjustment unit, and the multi-dimensional adjustment unit is configured to rotate the lens barrel assembly around the X-axis and / or around the Y-axis, and / or adjust the position of the lens barrel assembly in the Z-axis direction.

2. The adjusting device according to claim 1, characterized in that A sliding groove is provided on the side of the base facing the Z-direction adjustment unit. The Z-direction adjustment unit is embedded in the slide slot and can move along the slide slot.

3. The adjusting device according to claim 2, characterized in that: The base is provided with a plurality of first protrusions on both side edges parallel to the slide slot to limit and lock the Z-direction adjustment unit.

4. The adjusting device according to claim 2, characterized in that: The Z-direction adjustment unit includes a first differential screw, a pushing structure and a moving structure. The pushing structure is located between the base and the moving structure, the pushing structure is slidably connected to the slide groove, and the moving structure is movably connected to the base; The first differential screw is connected to the pushing structure, and the pushing structure is driven to move along the slide groove by rotating the first differential screw; The moving structure moves along the Z-axis direction under the action of the pushing structure.

5. The adjusting device according to claim 4, characterized in that The pushing structure comprises a first part and a second part, wherein the second part is located on two sides of the first part parallel to the slide groove, and the second part is configured in a wedge shape; A wedge-shaped protrusion matching the second part is provided on the surface of the moving structure facing the pushing structure; The second portion abuts against the wedge-shaped protrusion, and the second portion and the wedge-shaped protrusion have the same inclination angle and opposite inclination directions.

6. The adjusting device according to claim 5, characterized in that The wedge-shaped protrusion is clamped between the first part and the slide groove to limit the moving structure; The movable structure is provided with a plurality of second protrusions on two sides parallel to the sliding slot to limit and lock the X-direction adjustment unit.

7. The adjusting device according to claim 5, characterized in that The adjustment accuracy of the Z-direction adjustment unit is: a=b×tan2θ Wherein, a is the adjustment accuracy of the Z-axis adjustment unit, b is the moving distance of the pushing structure when the first differential screw rotates one circle, and θ is the inclination angle of the wedge-shaped protrusion.

8. The adjusting device according to claim 1, characterized in that: The X-direction adjustment unit includes a second differential screw, and the second differential screw is connected to the X-direction adjustment unit. The X-direction adjustment unit is driven to move along the X-axis direction by rotating the second differential screw.

9. The adjusting device according to claim 1, characterized in that: A plurality of third protrusions are provided on two side edges of the X-direction adjustment unit that are perpendicular to the X-axis direction, so as to limit and lock the Y-direction adjustment unit.

10. The adjustment device according to claim 8, characterized in that The adjustment accuracy of the X-direction adjustment unit is: c=d×α / 360 Wherein, c is the adjustment accuracy of the X-axis adjustment unit, d is the movement distance of the X-axis adjustment unit along the X-axis direction when the second differential screw rotates one circle, and α is the angle of the second differential screw when it rotates once.

11. The adjustment device according to claim 1, characterized in that The Y-direction adjustment unit includes a third differential screw, and the third differential screw is connected to the Y-direction adjustment unit. The Y-direction adjustment unit is driven to move along the Y-axis direction by rotating the third differential screw.

12. The adjustment device according to claim 11, characterized in that At least three spherical recesses are arranged on the surface of the Y-axis adjustment unit close to the multi-dimensional adjustment unit, and a threaded hole is arranged at the center of each spherical recess.

13. The adjustment device according to claim 11, characterized in that The adjustment accuracy of the Y-direction adjustment unit is: l＝k×β / 360 Wherein, l is the adjustment accuracy of the Y-axis adjustment unit, k is the moving distance of the Y-axis adjustment unit along the Y-axis direction when the third differential screw rotates one circle, and β is the angle of the third differential screw when it rotates once.

14. The adjustment device according to claim 12, characterized in that The multi-dimensional adjustment unit comprises a base and a knob assembly matched with the spherical recess; The knob assembly passes through the base and is connected to the corresponding spherical recess; There is a gap between the base and the Y-axis adjustment unit.

15. The adjustment device according to claim 14, characterized in that The knob assembly comprises an adjusting knob and a locking bolt, wherein the adjusting knob is sleeved on the outer side of the locking bolt; The end portion of the adjusting knob connected to the spherical recess is configured to be a spherical shape adapted to the spherical recess; The locking bolt is connected to the threaded hole to lock the adjusting knob.

16. The adjustment device according to claim 14, characterized in that When there are three knob components, the adjustment accuracy of the multi-dimensional adjustment unit is: h=i×δ / 360 Among them, h is the adjustment accuracy of the multi-dimensional adjustment unit in the Z-axis direction, i is the moving distance of the base along the Z-axis direction when the adjustment knob rotates one circle, δ is the angle of the adjustment knob when it rotates once, Φ is the adjustment accuracy of the multi-dimensional adjustment unit around the X-axis or around the Y-axis, and R is the radius of the circle formed by the uniform distribution of the three knob components.

17. The adjustment device according to claim 1, characterized in that The lens barrel assembly comprises a lens barrel, an adjustment structure and a pre-tightening structure. The incident end of the lens barrel is provided with a flange, and the lens barrel is rotatably connected to the multi-dimensional adjustment unit via the flange; A toggle structure is provided on the outer circumferential surface of the flange, and the adjustment structure passes through the toggle structure and is connected to the pre-tightening structure so that the lens barrel assembly rotates around the Z axis.

18. The adjustment device according to claim 17, characterized in that The adjustment structure includes a fourth differential screw, and the pre-tightening structure includes a fixed stopper and an elastic member; The fourth differential screw passes through the toggle structure and is connected to the elastic member and the fixed stopper; The elastic member is located between the fixed stopper and the toggle structure.

19. The adjustment device according to claim 17, characterized in that The adjustment accuracy of the adjustment structure is: in, is the adjustment accuracy of the structure rotating around the Z axis, u is the distance the fourth differential screw moves relative to the toggle structure when it rotates one circle, and s is the distance between the central axis of the lens barrel and the center of the toggle structure.

20. The adjustment device according to claim 17, characterized in that The center position of the base is provided with a through hole for the lens barrel to pass through. The through hole is provided with a raised edge on one side facing the incident end of the lens barrel, and the through holes arranged in the Z-direction adjustment unit, the X-direction adjustment unit, the Y-direction adjustment unit and the multi-dimensional adjustment unit are provided with an annular groove on one side facing the exit end of the lens barrel to form an avoidance space for the edge.

21. The adjustment device according to claim 20, characterized in that A groove matched with the edge is provided on a side of the flange close to the multi-dimensional adjustment unit.

22. An adjustment method based on the adjustment device according to any one of claims 1 to 21, characterized in that: The method comprises: Assemble the lens barrel assembly and the adjusting device, and make the X-direction adjusting unit, the Y-direction adjusting unit, the Z-direction adjusting unit, the multi-dimensional adjusting unit and the lens barrel assembly all in a pre-tightened state; The multi-dimensional adjustment unit controls the lens assembly to rotate around the X-axis and the Y-axis until the rotation angle reaches a preset value, and at the same time, the multi-dimensional adjustment unit performs an initial adjustment on the position of the lens barrel assembly in the Z-axis direction; The position of the lens barrel assembly in the X-axis and Y-axis directions is adjusted respectively by the X-axis adjustment unit and the Y-axis adjustment unit, and when the lens barrel assembly reaches a preset position, the X-axis adjustment unit and the Y-axis adjustment unit are locked; The lens barrel assembly is rotated around the Z axis by means of an adjustment structure and a pre-tightening structure, and when the imaging effect in the lens barrel is optimal, the lens barrel assembly is locked; The position of the lens barrel assembly in the Z-axis direction is secondarily adjusted by the Z-direction adjustment unit until the lens barrel assembly reaches a preset position in the Z-axis direction, and the Z-direction adjustment unit is locked.

23. A detection system, characterized in that: include: Detection objective lens; The adjustment device according to any one of claims 1 to 21, wherein the adjustment device adjusts the detection objective lens so as to align the detection objective lens with the optical path in the detection system.

24. A processing system, characterized in that: include: Lithography objective lens; The adjustment device according to any one of claims 1 to 21, wherein the adjustment device adjusts the photolithography objective lens so as to align the photolithography objective lens with the optical path in the processing system.

Images