Display substrate carrying apparatus, display substrate placement and release method, curing apparatus

Abstract

A display substrate bearing device, a display substrate placing and releasing method, and a curing device are used for manufacturing of a display panel. The display substrate bearing device comprises: an air floating platform configured to bear a display substrate in an air floating manner; a lifting rod support arranged in parallel with the air floating platform; and a lifting rod arranged at an edge of the lifting rod support and configured to support an edge of the display substrate and transfer the display substrate, wherein the lifting rod support is configured to move relative to the air floating platform in a direction perpendicular to the air floating platform so that the lifting rod delivers the display substrate to the air floating platform or takes the display substrate out of the air floating platform.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor equipment, and more specifically, to a display substrate carrier, a display substrate placement and release method, and a curing apparatus. Background Technology

[0002] In the fabrication process of semiconductor devices such as OLED display panels, various methods such as inkjet printing and inkjet coating can be used to form pixel light-emitting layers and liquid optical adhesive (Optical Clear Resin) layers on the OLED display substrate. Subsequently, the OLED display substrate needs to be transferred to a curing device for curing to achieve the stability of the OLED display substrate layer structure. Summary of the Invention

[0003] This disclosure provides a display substrate carrier device for manufacturing a display panel, comprising:

[0004] An air-floating platform is configured to support the display substrate using an air-floating method.

[0005] The lifting rod support is arranged parallel to the air flotation platform; and

[0006] A lifting rod, disposed at the edge of the lifting rod bracket, is configured to support the edge of the display substrate and to move the display substrate.

[0007] The lifting rod bracket is configured to move relative to the air-float platform in a direction perpendicular to the air-float platform, such that the lifting rod can transfer the display substrate to the air-float platform or remove the display substrate from the air-float platform.

[0008] In some embodiments, the lifting boom includes:

[0009] A support lifting rod is disposed at the edge of the lifting rod bracket and configured to support the display substrate. The support lifting rod includes:

[0010] The supporting lifting rod body is detachably mounted at the edge of the lifting rod bracket; and

[0011] A support rod, disposed on the main body of the support lifting rod, is perpendicular to the main body of the support lifting rod and is configured to support the edge of the display substrate.

[0012] The air flotation platform has a notch at its edge, configured to allow the free end of the support rod away from the main body of the support lifting rod to pass through.

[0013] In some embodiments, the support rod is generally cylindrical, and the free end of the support rod away from the main body of the support lifting rod is spherical.

[0014] In some embodiments, the number of supporting lifting rods is multiple, and they are evenly distributed along the edge of the lifting rod bracket.

[0015] In some embodiments, the lifting boom includes:

[0016] A limiting lifting rod is disposed at the corner of the lifting rod bracket and configured to limit the position of the display substrate. The limiting lifting rod includes:

[0017] The main body of the limiting lifting rod is detachably installed at the corner of the lifting rod bracket;

[0018] A limiting member is detachably mounted on the main body of the limiting lifting rod and is configured to limit the corner position of the display substrate.

[0019] In some embodiments, the limiting member includes:

[0020] A right-angled bending member has two adjacent right-angled sides, used to define the positions of the adjacent right-angled sides at the corners of the display substrate; and

[0021] A support pad is disposed at the bend of the right-angle bent member and configured to support the corner of the display substrate.

[0022] The air flotation platform has a notch at one corner, configured to allow the support pad to pass through.

[0023] In some embodiments, the number of limiting lifting rods is four, which are respectively disposed at the four corners of the lifting rod bracket.

[0024] In some embodiments, the air flotation platform includes:

[0025] A support platform, wherein multiple jet zones are evenly arranged on the support platform; and

[0026] A gas distribution device is disposed on one side of the support platform and configured to supply gas to the plurality of jet zones so that the jet pressure of the plurality of jet zones is equalized.

[0027] In some embodiments, the display substrate carrier includes:

[0028] A platform, configured to support the air-float platform and the lifting rod support; and

[0029] A support column is disposed between the platform and the air flotation platform, configured to support the air flotation platform.

[0030] The lifting rod bracket is disposed between the platform and the air flotation platform, and the lifting rod bracket has a hollow area through which the support column passes.

[0031] This disclosure provides a method for placing a display substrate using some embodiments of the display substrate carrier described in the foregoing embodiments. The method includes the following steps:

[0032] The robotic arm transports the display substrate to a position above the air-floating platform;

[0033] The lifting rod bracket is positioned close to the air-float platform so that the lifting rod passes through the edge of the air-float platform to support and position the display substrate.

[0034] The display substrate detaches from the robotic arm, and the lifting rod bracket moves away from the air-floating platform, causing the lifting rod to carry the display substrate closer to the air-floating platform until the display substrate detaches from the lifting rod support and is then air-floated by the air-floating platform.

[0035] This disclosure provides a method for releasing a display substrate using some embodiments of the display substrate carrier described in the foregoing embodiments. The method includes the following steps:

[0036] The lifting rod bracket is positioned close to the air-float platform so that the lifting rod passes through the edge of the air-float platform to support the display substrate and carry the display substrate away from the air-float platform;

[0037] The robotic arm moves above the air-floating platform to grab the display substrate and carries it to the next process.

[0038] Moving the lifting rod bracket away from the air-float platform causes the lifting rod to return to its original position.

[0039] This disclosure provides a curing apparatus, including the display substrate carrier device described in the foregoing embodiments.

[0040] The above-described solutions in this disclosure can have the following beneficial effects:

[0041] The lifting rod is positioned at the edge of the lifting rod support, allowing the lifting rod to support the edge of the display substrate and transfer it to the air-floating platform. This avoids the need for through holes in the design of the air-floating platform, thus improving the pin mura defect caused by through holes in related technologies. Attached Figure Description

[0042] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. In the drawings:

[0043] Figure 1This is a schematic diagram of the structure of a display substrate carrier device in related technologies;

[0044] Figure 2 This is a structural schematic diagram of a load-bearing device from another perspective in related technologies;

[0045] Figure 3 This is a schematic diagram of the structure of a display substrate carrier device provided in some embodiments of this disclosure;

[0046] Figure 4 A schematic diagram of the display substrate carrier device provided in some embodiments of this disclosure from another perspective;

[0047] Figure 5 for Figure 3 Enlarged schematic diagram of region M in the middle;

[0048] Figure 6 for Figure 3 Enlarged schematic diagram of the central support lifting rod;

[0049] Figure 7 for Figure 3 Enlarged schematic diagram of the middle limit lifting rod;

[0050] Figure 8 for Figure 3 A schematic diagram of the support platform in the medium-density air flotation platform. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of this disclosure clearer, the disclosure will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0052] The terminology used in the embodiments of this disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of this disclosure. The singular forms “a,” “the,” and “the” as used in the embodiments of this disclosure and the appended claims are also intended to include the plural forms, and “multiple” generally includes at least two unless the context clearly indicates otherwise.

[0053] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0054] It should be understood that although the terms first, second, third, etc. may be used to describe the embodiments in this disclosure, it should not be limited to these terms.

[0055] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising one" does not exclude the presence of other identical elements in the article or device that includes said element.

[0056] In related technologies, Figure 1 This is a schematic diagram of the structure of a display substrate carrier device in related technologies. Figure 1 This is a top-down view. Figure 2 This is a structural schematic diagram of a support device from another perspective in related technologies. Figure 2 This is a view taken from a low angle. For example... Figure 1 and Figure 2 As shown, the display substrate carrier device in the related technology is used as a curing device. In the manufacturing process of a display panel, such as an OLED display panel, after forming a printed coating, such as a pixel light-emitting layer or a liquid optical adhesive (Optical Clear Resin) layer, on the display substrate using processes such as inkjet printing, the display substrate needs to be transferred to a curing device to cure the printed display substrate, so that the properties of the printed coating are stable.

[0057] The inkjet-printed display substrate is transferred to the curing unit by a robotic arm. Specifically, the display substrate with the printed coating is transferred by the robotic arm to the top of the display substrate carrying device 1. The supporting lifting rod 3 rises relative to the air-floating platform 2, passes through the through hole on the air-floating platform 2, and receives the display substrate 4 transferred by the robotic arm. The supporting lifting rods 3 are arranged in an array on the lifting rod bracket 6. When the supporting lifting rods 3 carry the display substrate 4, they use an array of point supports to support the display substrate 4. Subsequently, the supporting lifting rods 3 carrying the display substrate 4 descend, and the display substrate 4 is then supported by the air-floating platform 2. The free end of the supporting lifting rod 3 is below the upper surface of the air-floating platform 2.

[0058] In related technologies, since the supporting lifting rod 3 needs to pass through the through hole on the air flotation platform 2, to avoid the direct contact between the supporting lifting rod 3 and the inner wall of the through hole, which would generate fine particles and affect the process, a gas sleeve 5 is added to the ground of the air flotation platform 2, which is connected to the gas pipeline 7. The supporting lifting rod 3 passes through the gas sleeve 5 and is aligned with the through hole on the air flotation platform 2. The gas pipeline 7 supplies gas into the gas sleeve 5, so that the supporting lifting rod 3 does not make physical contact with the inner wall of the gas sleeve 5 or the inner wall of the through hole on the air flotation platform 2 during movement.

[0059] In the preparation process of an OLED display panel, an inkjet printing device, a curing device and an automatic optical inspection device are usually arranged sequentially on a production line, and an OLED display panel is transferred between process devices including the inkjet printing device, the curing device and the automatic optical inspection device by a mechanical arm. Picking up and placing the OLED display panel by the mechanical arm both requires a long time, and an alignment step is required every time the OLED display panel is transferred to a process device, resulting in low operating efficiency of the OLED display panel preparation process.

[0060] In the related art, the supporting lifting rod 3 is detachably mounted on the lifting rod bracket 6. In order to ensure that the supporting lifting rod 3 is always perpendicular to the lifting rod bracket 6, a gas delivery pipe 8 is provided at the supporting lifting rod 3, which is used for delivering gas to the supporting lifting rod 3 to adjust the supporting lifting rod 3 to be always perpendicular to the lifting rod bracket 6.

[0061] Due to the existence of through holes on the air flotation platform 2, the gas supplied to the gas casing 5 through the gas pipeline 7 is blown to the bottom surface of the display substrate 4 supported by the air flotation platform 2 through the through holes on the air flotation platform 2. Since the entire display substrate 4 is at a relatively high curing temperature in the curing device, the temperature of the gas blown to the bottom surface of the display substrate 4 supported by the air flotation platform 2 through the through holes on the air flotation platform 2 is relatively low, which causes display defects of the display panel during curing, for example, Pin Mura.

[0062] In order to overcome the above problems, the present disclosure provides a display substrate carrying apparatus for use in manufacturing a display panel. The display substrate carrying apparatus comprises: an air flotation platform configured to carry a display substrate in an air flotation manner; a lifting rod bracket arranged parallel to the air flotation platform; and a lifting rod provided at an edge of the lifting rod bracket, configured to support an edge of the display substrate and transfer the display substrate, wherein the lifting rod bracket is configured to move relative to the air flotation platform in a direction perpendicular to the air flotation platform, so that the lifting rod transfers the display substrate to the air flotation platform or takes the display substrate out from the air flotation platform.

[0063] In the present disclosure, the lifting rod is arranged at the edge of the lifting rod bracket, so that the lifting rod supports the edge of the display substrate and transfers the display substrate onto the air flotation platform, which avoids designing through holes allowing the lifting rod to pass through on the air flotation platform, and improves the Pin Mura defect caused by the through holes in the related art. Meanwhile, the design of the gas casing and its matched gas pipeline, as well as the design of the gas transmission pipe matched with the supporting lifting rod are eliminated, which simplifies the product structure and reduces the cost.

[0064] Optional embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0065] Figure 3This is a schematic diagram of the structure of a display substrate carrier device provided in some embodiments of the present disclosure, wherein... Figure 3 This is a top-down view. Figure 4 This is a schematic diagram of the display substrate carrier device provided in some embodiments of this disclosure from another perspective. Figure 4 This is a picture taken from a low angle. Figure 5 for Figure 3 An enlarged schematic diagram of region M in the middle. Figure 6 for Figure 3 Enlarged schematic diagram of the central support lifting rod. Figure 7 for Figure 3 Enlarged schematic diagram of the middle limit lifting rod.

[0066] like Figures 3 to 7 As shown, some embodiments of this disclosure provide a display substrate support device 100 for manufacturing display panels. The display substrate support device 100 includes: an air-floating platform 10, a lifting rod bracket 20, and a lifting rod 30.

[0067] The air-floating platform 10 is configured to support the display substrate DS in an air-floating manner, for example, a porous ceramic air-floating platform. When the display substrate DS is supported on the air-floating platform 10, gas is uniformly sprayed from the upper surface of the air-floating platform 10 to support the display substrate DS in an air-floating manner. The display substrate DS does not contact the upper surface of the air-floating platform 10, and the air-floating interval is less than 0.4 mm.

[0068] The lifting rod support 20 is arranged parallel to the air flotation platform 10, and the distance between the lifting rod support 20 and the air flotation platform 10 is adjustable to realize the movement of the lifting rod 30 relative to the air flotation platform 10.

[0069] A lifting rod 30 is disposed at the edge of the lifting rod bracket 20 and configured to support the edge of the display substrate DS and transfer the display substrate DS. The lifting rod 30 is disposed along the peripheral edge of the lifting rod bracket 20 and can receive the display substrate DS from the robotic arm by means of edge support and transfer the display substrate DS to the air-floating platform 10.

[0070] The lifting rod support 20 is configured to move relative to the air-float platform 10 in a direction perpendicular to the air-float platform 10, such that the lifting rod 30 can transfer the display substrate DS to or remove the display substrate 10 from the air-float platform 10. In some embodiments, the position of the air-float platform 10 is fixed, and the lifting rod support 20, under the action of the driving device, can move closer to or further away from the air-float platform 10 in a direction perpendicular to the air-float platform 10, thereby driving the lifting rod 30 to move in a direction perpendicular to the air-float platform 10 to realize the transfer of the display substrate DS.

[0071] In some embodiments, such as Figures 3 to 7As shown, the lifting rod 30 includes a support lifting rod 31, and the support lifting rod 31 is arranged at the edge of the lifting rod bracket 20, for example, arranged at four edges of the lifting rod bracket 20, and configured to support the display substrate DS. The support lifting rod 31 includes a support lifting rod main body 311 and a support rod 312.

[0072] The support lifting rod main body 311 is detachably arranged at the edge of the lifting rod bracket 20, for example, fastening components such as screws and nuts are used to detachably fasten and install the support lifting rod main body 311 at the edge of the lifting rod bracket 20, ensuring that the support lifting rod main body 311 is perpendicular to the lifting rod bracket 20 and the air flotation platform 10. By adopting this arrangement, there is no need to arrange the gas delivery pipe 8 matched with the lifting rod in the related art, which has simple structure, is not easy to be damaged and has low manufacturing cost.

[0073] The support rod 312 is arranged on the support lifting rod main body 311 and arranged perpendicular to the support lifting rod main body 311, and configured to support the edge of the display substrate DS. The support rod 312 supports the edge of the display substrate DS in a contact support manner. For example, the support rod 312 is made of ESD PEEK material, which prevents fine particles from being generated when the support rod 312 is in contact with the display substrate DS and causing clean contamination. ESD PEEK is a polyether ether ketone material containing carbon fiber reinforced material, and has excellent flame retardancy and antistatic properties.

[0074] A notch 11 is arranged at the edge of the air flotation platform 10, and configured to allow the free end of the support rod 312 away from the support lifting rod main body 311 to pass through. The number of the notches 11 corresponds to the number of the support lifting rods 31, and the position of the notches 11 corresponds to the free end of the support rod 312 of the support lifting rod 31, ensuring that when the support lifting rod 31 moves relative to the air flotation platform 10, the free end of the support rod 312 can pass through the notch 11 without contacting the inner wall of the notch 11.

[0075] In some embodiments, the support rod 312 is in the shape of a cylindrical rod as a whole, and the free end of the support rod 312 away from the support lifting rod main body is spherical. With this arrangement, the support rod 312 supports the edge of the display substrate DS in a point support manner, which minimizes the contact area between the support rod 312 and the display substrate DS. In addition, the support rod 312 has a rotationally symmetric structure as a whole, which increases the robustness when it is installed on the support lifting rod main body 311.

[0076] In some embodiments, the support rod 312 is a thin cylindrical rod, and the contact support between the support rod 312 and the display substrate DS is line contact.

[0077] In some embodiments, the number of supporting lifting rods 31 is multiple, and they are evenly distributed along the edge of the lifting rod bracket 20. Specifically, the supporting lifting rods 31 are evenly distributed on each of the four edges of the lifting rod bracket 20.

[0078] In some embodiments, such as Figures 3 to 4 As shown, the lifting rod 30 includes a limiting lifting rod 32, which is disposed at the corner of the lifting rod bracket 20, for example, at the four corners of the lifting rod bracket 20, and is configured to limit the position of the display substrate DS. The limiting lifting rod 32 includes a limiting lifting rod body 321 and a limiting member 322.

[0079] The limiting lifting rod body 321 is detachably mounted at the corner of the lifting rod bracket 20, for example, by using screws, nuts, or other fasteners to detachably fasten it at the corner of the lifting rod bracket 20, ensuring that the limiting lifting rod body 321 is perpendicular to the lifting rod bracket 20 and the air-floating platform 10. This method results in a simple structure, resistance to damage, and low manufacturing cost.

[0080] The limiting member 322 is detachably mounted on the limiting lifting rod body 321 and is configured to limit the corner position of the display substrate DS. This prevents the display substrate DS from shifting position and failing to align with the air-bearing platform.

[0081] In some embodiments, the limiting lifting rod body 321 can be structurally identical to the supporting lifting rod body 311, which can reduce the number of parts molds and lower manufacturing costs.

[0082] In some embodiments, such as Figures 3 to 7 As shown, the limiting member 322 includes a right-angle bent member 3221 and a support pad 3222.

[0083] The right-angle bending member 3221 has two adjacent right-angled sides, which are used to define the position of the adjacent right-angled sides at the corner of the display substrate DS, so as to prevent the display substrate DS from shifting in the horizontal direction.

[0084] A support pad 3222 is disposed at the bend of the right-angle bend 3221 and configured to support the corner of the display substrate DS. The support pad 3222 is, for example, a flat surface, providing surface contact support to the corner of the display substrate DS. In some embodiments, the support pad 3222 is, for example, a convex arc surface, providing point contact support to the corner of the display substrate DS. The contact area between the support pad 3222 and the display substrate DS is minimized as much as possible. The support pad 3222 is, for example, made of ESD PEEK material to prevent the generation of fine particles when the support rod 312 contacts the display substrate DS, thus avoiding cleanliness contamination.

[0085] A notch 12 is provided at the corner of the air flotation platform 10, and is configured to allow the support pad 3222 to pass through. The position of the notch 12 corresponds to the support pad 3222, ensuring that when the limiting lifting rod 32 moves relative to the air flotation platform 10, the support pad 3222 can pass through the notch 12 without contacting the inner wall of the notch 12.

[0086] In some embodiments, the number of the limiting lifting rods 32 is four, which are respectively arranged at four corners of the lifting rod support 20. Correspondingly, notches 12 are provided at all four corners of the air flotation platform 10.

[0087] In other embodiments, the number of the limiting lifting rods 32 is two, which are respectively arranged at two opposite diagonal corners of the lifting rod support 20, and correspondingly, notches 12 are provided at the corresponding two opposite diagonal corners of the air flotation platform 10.

[0088] In the display substrate carrying apparatus according to the embodiment of the present disclosure, compared with the solution in the related art, the lifting rods are arranged at the edge of the lifting rod support, so that the lifting rods support the edge of the display substrate and transfer it to the air flotation platform, which avoids designing through holes for allowing the lifting rods to pass through on the air flotation platform, and improves the Pin Mura defect caused by the through holes in the related art. At the same time, the design of the gas sleeve and its matching gas pipeline, as well as the gas pipeline design matched with the supporting lifting rod are eliminated, which simplifies the product structure and reduces the cost.

[0089] Figure 8 is Figure 3 a structural schematic diagram of the support platform in the air flotation platform, as shown in Figure 8 , in some embodiments, the air flotation platform 10 includes a support platform 13 and a gas distribution device 14.

[0090] The support platform 13 is generally plate-shaped, and a plurality of air jet regions are uniformly arranged on the support platform 13, as shown in Figure 8 , the top surface of the support platform 13 is divided into a plurality of air jet regions, for example, 15 air jet regions, and the 15 air jet regions adopt a 3×5 layout. Each air jet region is densely provided with a plurality of irregularly distributed micron-sized fine air jet holes, so that for any air jet region, stable and uniform air flow output can be formed thereon.

[0091] The gas distribution device 14 is arranged on one side of the support platform 13 and connected to the support platform 13 through an air pipe. The gas distribution device 14 is configured to provide gas to the plurality of air jet regions so that the jet pressure of the plurality of air jet regions is balanced, thereby enabling the entire support platform to have balanced and stable air flow output. The gas is, for example, an inert gas, such as nitrogen.

[0092] In some embodiments, as shown in Figures 3 to 7As shown, the display substrate support device 100 includes a stage and a support column 40.

[0093] The platform is configured to support the air flotation platform 10 and the lifting rod support 20. In some embodiments, the air flotation platform 10 is fixed relative to the platform, and the lifting rod support 20 can move relative to the platform and the air flotation platform 10 in a direction perpendicular to the air flotation platform 10 under the action of a drive device.

[0094] A support column 40 is disposed between the platform and the air-float platform 10, configured to support the air-float platform 10. A predetermined distance is maintained between the platform and the air-float platform 10, providing space for the lifting rod support 20 to move.

[0095] The lifting rod bracket 20 is disposed between the platform and the air flotation platform 10. The lifting rod bracket 20 has a hollow area, and the support column 40 passes through the hollow area.

[0096] This disclosure provides a method for placing a display substrate using the display substrate carrier 100 described in the foregoing embodiments. The method includes the following steps:

[0097] S110: The robotic arm transfers the display substrate to the air-floating platform.

[0098] Specifically, for example, after the inkjet printing process, a robotic arm can be used to transfer the display substrate to the leveling and curing station for the next process. The robotic arm can pick up the inkjet-printed display substrate and transfer it to the air-floating platform.

[0099] S120: The lifting rod bracket is brought close to the air-float platform so that the lifting rod passes through the edge of the air-float platform to support and position the display substrate.

[0100] Specifically, the driving device drives the lifting rod bracket to move closer to the air-float platform 10 in a direction perpendicular to the air-float platform 10, so that the lifting rod 30 passes through the edge of the air-float platform to support and position the display substrate DS. Specifically, the free end of the support rod 312 supporting the lifting rod 31 passes through the notch 11 provided on the edge of the air-float platform 10 and contacts the display substrate DS. The support pad 3222 of the limiting lifting rod 32 passes through the notch 12 provided at the corner of the air-float platform 10 and contacts the display substrate DS. The right-angle bending member 3221 of the limiting lifting rod 32 limits the position of the adjacent right-angle side at the corner of the display substrate DS, preventing the display substrate DS from shifting in the horizontal direction.

[0101] S130: The display substrate is detached from the robotic arm, and the lifting rod bracket moves away from the air-floating platform, causing the lifting rod to carry the display substrate closer to the air-floating platform until the display substrate is detached from the lifting rod support and is supported by the air-floating platform.

[0102] Specifically, the robotic arm releases the display substrate DS, which is supported by the lifting rod 30. The drive unit drives the lifting rod bracket to move away from the air-bearing platform 10 in a direction perpendicular to the air-bearing platform 10, and the lifting rod 30 carries the display substrate DS down until the display substrate is air-bearing supported by the air-bearing platform 10.

[0103] This disclosure provides a method for releasing a display substrate, and the display substrate carrying device described in the foregoing embodiments includes the following steps:

[0104] S210: The lifting rod bracket is brought close to the air-floating platform so that the lifting rod passes through the edge of the air-floating platform to support the display substrate and carry the display substrate away from the air-floating platform.

[0105] Specifically, the driving device drives the lifting rod bracket 20 to rise, and the lifting rod bracket 20 drives the lifting rod to pass through the edge of the air-floating platform 10. Specifically, the free end of the support rod 312 supporting the lifting rod 31 passes through the notch 11 provided on the edge of the air-floating platform 10 and contacts the supporting display substrate DS. The support pad 3222 of the limiting lifting rod 32 passes through the notch 12 provided at the corner of the air-floating platform 10 and contacts the supporting display substrate DS. Further rising of the lifting rod bracket 20 causes the lifting rod 30 to lift the display substrate DS to a predetermined height and detach it from the air-floating platform 10. During the rising process of the lifting rod bracket 20, the right-angle bending member 3221 of the limiting lifting rod 32 always limits the position of the adjacent right-angle side at the corner of the display substrate DS, preventing the display substrate DS from shifting in the horizontal direction.

[0106] S220: The robotic arm moves above the air-floating platform to grab the display substrate and carries it to the next process.

[0107] Specifically, the robotic arm is positioned above the air-floating platform and, for example, uses vacuum adsorption or contact lifting to grasp the display substrate DS, causing the display substrate DS to detach from the lifting rod 30 and be transferred to the next process.

[0108] S230: The lifting rod support moves away from the air-floating platform, causing the lifting rod to return to its original position.

[0109] Specifically, the drive device drives the lifting rod bracket 20 to descend until the free end of the supporting lifting rod 31 in the lifting rod 30 is lower than the upper surface of the air flotation platform 10, and the lifting rod bracket 20 drives the lifting rod 30 to complete the reset.

[0110] This disclosure provides a curing apparatus in some embodiments. The curing apparatus includes the display substrate carrier 100 described in the foregoing embodiments, and a curing component located above the display substrate carrier 100, such as a UV curing component or a thermal curing component.

[0111] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems or apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and relevant parts can be referred to the method section.

[0112] The above embodiments are only used to illustrate the technical solutions of this disclosure, and are not intended to limit it. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this disclosure.

Claims

1. A display substrate carrier device for the curing process of a display panel, characterized in that, include: An air-floating platform is configured to support the display substrate using an air-floating method. The lifting rod support is arranged parallel to the air flotation platform; as well as A lifting rod, disposed at the edge of the lifting rod bracket, is configured to support the edge of the display substrate and to move the display substrate. The lifting rod support is configured to move relative to the air-float platform in a direction perpendicular to the air-float platform, such that the lifting rod can either transport the display substrate to or remove the display substrate from the air-float platform. The lifting boom includes: A support lifting rod is disposed at the edge of the lifting rod bracket and configured to support the display substrate. The support lifting rod includes: The supporting lifting rod body is detachably mounted at the edge of the lifting rod bracket; and A support rod, disposed on the main body of the support lifting rod, is perpendicular to the main body of the support lifting rod and is configured to support the edge of the display substrate. The air flotation platform has a notch at its edge, configured to allow the free end of the support rod away from the main body of the support lifting rod to pass through.

2. The display substrate carrier device according to claim 1, characterized in that, The support rod is cylindrical in shape, and the free end of the support rod away from the main body of the support lifting rod is spherical.

3. The display substrate carrier device according to claim 1 or 2, characterized in that, The number of supporting lifting rods is multiple, and they are evenly distributed along the edge of the lifting rod bracket.

4. The display substrate carrier device according to claim 1, characterized in that, The lifting boom also includes: A limiting lifting rod is disposed at the corner of the lifting rod bracket and configured to limit the position of the display substrate. The limiting lifting rod includes: The main body of the limiting lifting rod is detachably installed at the corner of the lifting rod bracket; A limiting member is detachably mounted on the main body of the limiting lifting rod and is configured to limit the corner position of the display substrate.

5. The display substrate carrier device according to claim 4, characterized in that, The limiting component includes: A right-angled bending member has two adjacent right-angled sides, used to define the positions of the adjacent right-angled sides at the corners of the display substrate; and A support pad is disposed at the bend of the right-angle bent member and configured to support the corner of the display substrate. The air flotation platform has a notch at one corner, configured to allow the support pad to pass through.

6. The display substrate carrier device according to claim 4 or 5, characterized in that, The number of limiting lifting rods is four, which are respectively set at the four corners of the lifting rod bracket.

7. The display substrate carrier device according to any one of claims 1, 2, 4, and 5, characterized in that, The air flotation platform includes: A support platform, wherein multiple jet zones are evenly arranged on the support platform; and A gas distribution device is disposed on one side of the support platform and configured to supply gas to the plurality of jet zones so that the jet pressure of the plurality of jet zones is equalized.

8. The display substrate carrier device according to any one of claims 1, 2, 4, and 5, characterized in that, The display substrate carrier includes: A platform, configured to support the air-float platform and the lifting rod support; and A support column is disposed between the platform and the air flotation platform, configured to support the air flotation platform. The lifting rod bracket is disposed between the platform and the air flotation platform, and the lifting rod bracket has a hollow area through which the support column passes.

9. A method for placing a display substrate, using the display substrate carrier device according to any one of claims 1 to 8, characterized in that, The method for placing the display substrate includes the following steps: The robotic arm transports the display substrate to a position above the air-floating platform; The lifting rod bracket is positioned close to the air-float platform so that the lifting rod passes through the edge of the air-float platform to support and position the display substrate. The display substrate detaches from the robotic arm, and the lifting rod bracket moves away from the air-floating platform, causing the lifting rod to carry the display substrate closer to the air-floating platform until the display substrate detaches from the lifting rod support and is then air-floated by the air-floating platform.

10. A method for releasing a display substrate, employing the display substrate carrier device according to any one of claims 1 to 8, characterized in that, The display substrate release method includes the following steps: The lifting rod bracket is positioned close to the air-float platform so that the lifting rod passes through the edge of the air-float platform to support the display substrate and carry the display substrate away from the air-float platform; The robotic arm moves above the air-floating platform to grab the display substrate and carries it to the next process. Moving the lifting rod bracket away from the air-float platform causes the lifting rod to return to its original position.

11. A curing apparatus, characterized in that, The display substrate carrier device includes any one of claims 1 to 8.

Images