Multi-arc ion plating arc striking device

Abstract

The invention relates to the technical field of vacuum coating, in particular to a multi-arc ion plating arc striking device which comprises an arc striking mother rod, a plurality of arc striking son rods sequentially arranged in the axis direction of the arc striking mother rod are fixedly arranged at the front end of the arc striking mother rod, and arc striking needles are fixedly arranged on the arc striking son rods in the direction perpendicular to the axis of the arc striking mother rod. And the plurality of arc striking needles rotate clockwise or anticlockwise by taking the axis of the arc striking sub-rod as the center. The device is suitable for coating the inner wall of the pipe fitting, and the arc striking sub-rods are designed to rotate and progressively move at intervals in the axis direction of the arc striking main rod, so that sufficient spacing is formed between the arc striking sub-rods, mutual interference or overheating between the arc striking sub-rods is avoided, and the coating quality is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, in particular to an arc starting device for multi-arc ion plating. Background Art

[0002] The working area of ​​multi-arc ion plating is mainly composed of cathode target material, arc starting device, etc. Chinese invention CN112746249B discloses a multi-arc ion plating arc starting device, which is mainly composed of a driving assembly, an arc starting needle, a cathode target material and a target material power supply. In this invention, the arc starting needles are radially distributed, which has the following defects: 1. Adjacent arc starting needles may cause mutual interference, resulting in arc instability or loss of control, affecting the coating quality; 2. The proximity of adjacent arc starting needles may cause the arc starting needles to overheat, which will not only affect the deposition process of the coating, and then affect the performance of the coating, but also cause arc starting needle material fatigue. Summary of the invention

[0003] The object of the present invention is to provide a multi-arc ion plating arc starting device to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a multi-arc ion plating arc-starting device, comprising an arc-starting mother rod, a front end of which is fixedly provided with a plurality of arc-starting sub-rods arranged in sequence along the axial direction of the arc-starting mother rod, the arc-starting sub-rods are fixedly provided with arc-starting needles along the axial direction perpendicular to the arc-starting mother rod, and the plurality of arc-starting needles rotate clockwise or counterclockwise around the axial center of the arc-starting sub-rods.

[0005] Optionally, the arc-striking sub-rod includes a long rod portion and a short rod portion fixedly arranged at the front end of the long rod portion; the long rod portion of the arc-striking sub-rod located at the rearmost side is fixedly connected to the front end of the arc-striking mother rod, and the short rod portion of the arc-striking sub-rod located at the front side is fixedly connected to the long rod portion of the arc-striking sub-rod located at the rear side.

[0006] Optionally, a semi-cylindrical groove is formed on the side wall of the long rod portion, the front end of the semi-cylindrical groove extends to the rear end of the short rod portion, the arc-starting needle is a cylindrical structure, and a switching block is integrally formed at the bottom of the arc-starting needle and located in the semi-cylindrical groove, and the switching block is a semi-cylindrical structure.

[0007] Optionally, an insulating heat sink block is fixedly provided on the arc-striking sub-rod and located in the semi-cylindrical groove, and the arc-striking needle, the adapter block and the insulating heat sink together fill the semi-cylindrical groove, and the insulating heat sink includes a rectangular surface connected to the long rod portion, a semicircular surface connected to the short rod portion, a semi-cylindrical surface connecting the upper and lower ends of the rectangular surface and the semi-circular surface, and a recessed surface connecting the rectangular surface and the semi-cylindrical surface and matching the outer wall of the arc-striking needle.

[0008] Optionally, the surface of the semi-cylindrical surface is coated with a radiation heat dissipation coating, and the radiation heat dissipation coating is a high temperature resistant graphene radiation heat dissipation coating.

[0009] Optionally, it includes a bracket and a sliding sleeve, the outer wall of the sliding sleeve is fixedly connected to the bracket, the inner wall of the sliding sleeve is slidably sleeved with the outer wall of the arc-striking mother rod, and a cylinder for driving the arc-striking mother rod to move forward and backward is fixed on the bracket.

[0010] Compared with the prior art, the present invention has the following beneficial effects:

[0011] 1. The present invention is suitable for coating the inner wall of a pipe fitting. By designing the arc-starting sub-rods to rotate and progress along the axial direction of the arc-starting mother rod, there is sufficient spacing between the arc-starting sub-rods to avoid mutual interference or overheating between the arc-starting sub-rods, thereby ensuring the quality of the coating;

[0012] 2. The present invention makes the connection between the arc-starting needle and the arc-starting sub-rod smooth and flat through the adapter block and the insulating heat dissipation block, and accelerates the heat conduction and heat dissipation capacity of the arc-starting needle through the insulating heat dissipation block. The insulating heat dissipation block can accelerate the heat radiation and heat dissipation capacity through the radiation heat dissipation coating on its surface. The arc-starting needle has a strong heat dissipation capacity and effectively improves the service life of the arc-starting needle. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the present invention;

[0014] Figure 2 It is a schematic structural diagram of the arc-starting sub-rod and the arc-starting needle in the present invention;

[0015] Figure 3 It is a schematic diagram of the structure of the arc-starting rod, arc-starting needle, insulating heat sink block and adapter block in the present invention;

[0016] Figure 4 It is a structural schematic diagram of the arc-starting sub-rod in the present invention;

[0017] Figure 5 It is a structural schematic diagram of the arc-starting needle and the adapter block in the present invention from a first perspective;

[0018] Figure 6 It is a structural schematic diagram of the arc-starting needle and the adapter block in the present invention from a second viewing angle;

[0019] Figure 7 It is a structural schematic diagram of the insulating heat dissipation block in the present invention from a first viewing angle;

[0020] Figure 8 It is a structural schematic diagram of the insulating heat dissipation block in the present invention from a second viewing angle.

[0021] In the figure: 1. arc-striking mother rod; 2. arc-striking sub-rod; 201. long rod portion; 202. short rod portion; 203. semi-cylindrical groove; 3. arc-striking needle; 4. insulating heat sink; 401. rectangular surface; 402. semi-circular surface; 403. semi-cylindrical surface; 404. concave surface; 5. adapter block; 6. bracket; 7. sleeve; 8. cylinder. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] Example: See Figure 1 and Figure 2 The present invention provides a multi-arc ion plating arc-starting device, comprising an arc-starting mother rod 1, a plurality of arc-starting sub-rods 2 arranged in sequence along the axial direction of the arc-starting mother rod 1 are fixedly provided at the front end of the arc-starting mother rod 1, an arc-starting sub-rod 2 is fixedly provided with an arc-starting needle 3 along the axial direction perpendicular to the arc-starting mother rod 1, and the plurality of arc-starting needles 3 rotate clockwise or counterclockwise around the axial center of the arc-starting sub-rod 2.

[0024] The present embodiment is suitable for coating the inner wall of a pipe fitting. The arc-striking sub-rods 2 are designed to rotate and advance in intervals along the axial direction of the arc-striking mother rod 1, so that there are sufficient spacings between the arc-striking sub-rods 2 to avoid mutual interference or overheating between the arc-striking sub-rods 2 and ensure the quality of the coating.

[0025] See also Figure 3 to Figure 4 In addition to the above embodiment, the arc-striking sub-rod 2 in this embodiment includes a long rod portion 201 and a short rod portion 202 fixedly arranged at the front end of the long rod portion 201. The long rod portion 201 of the arc-striking sub-rod 2 located at the rear side is fixedly connected to the front end of the arc-striking mother rod 1, and the short rod portion 202 of the arc-striking sub-rod 2 located at the front side is fixedly connected to the long rod portion 201 of the arc-striking sub-rod 2 located at the rear side.

[0026] See also Figures 3 to 8 In addition to the above embodiment, in this embodiment, a semi-cylindrical groove 203 is provided on the side wall of the long rod 201, and the front end of the semi-cylindrical groove 203 extends to the rear end of the short rod 202. The arc-starting needle 3 is a cylindrical structure, and a transfer block 5 is integrally formed at the bottom of the arc-starting needle 3 and located in the semi-cylindrical groove 203. The transfer block 5 is a semi-cylindrical structure. An insulating heat sink block 4 is fixed on the arc-starting sub-rod 2 and located in the semi-cylindrical groove 203. The arc-starting needle 3, the transfer block 5 and the insulating heat sink block 4 fill the semi-cylindrical groove 203 together.

[0027] The insulating heat dissipation block 4 includes a rectangular surface 401 connected to the long rod portion 201, a semicircular surface 402 connected to the short rod portion 202, a semi-cylindrical surface 403 connecting the upper and lower ends of the rectangular surface 401 and the semi-circular surface 402, and a concave surface 404 connecting the rectangular surface 401 and the semi-cylindrical surface 403 and matching the outer wall of the arc-starting needle 3. The surface of the semi-cylindrical surface 403 is coated with a radiation heat dissipation coating, which is a high-temperature resistant graphene radiation heat dissipation coating.

[0028] The present invention makes the connection portion between the arc-striking needle 3 and the arc-striking sub-rod 2 smooth and flat through the adapter block 5 and the insulating heat dissipation block 4, and accelerates the heat conduction and heat dissipation capacity of the arc-striking needle 3. The insulating heat dissipation block 4 can accelerate the heat radiation and heat dissipation capacity through the radiation heat dissipation coating on its surface. The arc-striking needle 3 has a strong heat dissipation capacity, and the service life of the arc-striking needle 3 is effectively improved.

[0029] See also Figure 1 In addition to the above embodiments, this embodiment is suitable for coating the inner wall of a pipe. In this embodiment, the arc-starting device for multi-arc ion plating includes a bracket 6 and a sleeve 7. The outer wall of the sleeve 7 is fixedly connected to the bracket 6. The inner wall of the sleeve 7 is slidably sleeved with the outer wall of the arc-starting mother rod 1. A cylinder 8 for driving the arc-starting mother rod 1 to move forward and backward is fixedly provided on the bracket 6. The piston rod of the cylinder 7 is fixedly connected to an insulating push plate, which is fixedly connected to the side wall of the arc-starting mother rod 1. The cylinder 7 can drive the arc-starting mother rod 1 to move forward and backward, so that the arc-starting needle 3 can move along the length direction of the pipe, thereby increasing the working area of ​​the arc-starting needle 3.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-arc ion plating arc starting device, characterized in that: The invention comprises an arc-striking mother rod (1), a front end of which is fixedly provided with a plurality of arc-striking sub-rods (2) arranged in sequence along the axial direction of the arc-striking mother rod (1), the arc-striking sub-rods (2) being fixedly provided with arc-striking needles (3) along a direction perpendicular to the axial direction of the arc-striking mother rod (1), and the plurality of arc-striking needles (3) rotating clockwise or counterclockwise around the axial center of the arc-striking sub-rods (2).

2. The multi-arc ion plating arc starting device according to claim 1, characterized in that: The arc-striking sub-rod (2) comprises a long rod portion (201) and a short rod portion (202) fixedly arranged at the front end of the long rod portion (201); the long rod portion (201) of the arc-striking sub-rod (2) located at the rear is fixedly connected to the front end of the arc-striking mother rod (1), and the short rod portion (202) of the arc-striking sub-rod (2) located at the front is fixedly connected to the long rod portion (201) of the arc-striking sub-rod (2) located at the rear.

3. A multi-arc ion plating arc starting device according to claim 2, characterized in that: A semi-cylindrical groove (203) is formed on the side wall of the long rod portion (201), the front end of the semi-cylindrical groove (203) extends to the rear end of the short rod portion (202), the arc-starting needle (3) is a cylindrical structure, and a switching block (5) is integrally formed at the bottom of the arc-starting needle (3) and located in the semi-cylindrical groove (203), and the switching block (301) is a semi-cylindrical structure.

4. A multi-arc ion plating arc starting device according to claim 3, characterized in that: An insulating heat dissipation block (4) is fixedly provided on the arc-striking sub-rod (2) and located in the semi-cylindrical groove (203); the arc-striking needle (3), the adapter block (301) and the insulating heat dissipation block (4) together fill the semi-cylindrical groove (203); the insulating heat dissipation block (4) comprises a rectangular surface (401) connected to the long rod portion (201), a semi-circular surface (402) connected to the short rod portion (202), a semi-cylindrical surface (403) connecting the upper and lower ends of the rectangular surface (401) and the semi-circular surface (402), and a concave surface (404) connecting the rectangular surface (401) and the semi-cylindrical surface (403) and matching the outer wall of the arc-striking needle (3).

5. The multi-arc ion plating arc starting device according to claim 4, characterized in that: The surface of the semi-cylindrical surface (403) is coated with a radiation heat dissipation coating, and the radiation heat dissipation coating is a high-temperature resistant graphene radiation heat dissipation coating.

6. The multi-arc ion plating arc starting device according to claim 1, characterized in that: The invention comprises a bracket (6) and a sliding sleeve (7), wherein the outer wall of the sliding sleeve (7) is fixedly connected to the bracket (6), the inner wall of the sliding sleeve (7) is slidably sleeved with the outer wall of the arc-striking mother rod (1), and a cylinder (8) for driving the arc-striking mother rod (1) to move forward and backward is fixedly provided on the bracket (6).

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