A multi-arc ion plating arc starting device

Abstract

The present invention relates to the technical field of vacuum coating, and specifically relates to a multi-arc ion plating arc ignition device, which includes an arc ignition mother rod. At the front end of the arc ignition mother rod, a number of arc ignition sub-rods are fixedly arranged in sequence along the axial direction of the arc ignition mother rod. Along the direction perpendicular to the axial direction of the arc ignition mother rod, an arc ignition needle is fixedly arranged on the arc ignition sub-rod. A number of arc ignition needles rotate clockwise or counterclockwise with the axis of the arc ignition sub-rod as the center. The arc ignition sub-rod includes a long rod portion and a short rod portion fixedly arranged at the front end of the long rod portion. The long rod portion of the arc ignition sub-rod located at the rearmost side is fixedly connected to the front end of the arc ignition mother rod, and the short rod portion of the arc ignition sub-rod located at the front side is fixedly connected to the long rod portion of the arc ignition sub-rod located at the rear side. The present invention is applicable to coating the inner wall of a pipe fitting. By designing the arc ignition sub-rods to rotate and progress at intervals along the axial direction of the arc ignition mother rod, sufficient spacing is provided between the arc ignition sub-rods, avoiding mutual interference or overheating between the arc ignition sub-rods and ensuring the coating quality.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and specifically to a multi-arc ion plating arc ignition device. Background Art

[0002] The working area of multi-arc ion plating mainly consists of a cathode target, an arc ignition device, etc. Chinese invention CN112746249B discloses a multi-arc ion plating arc ignition device, which mainly consists of a driving component, an arc ignition needle, a cathode target, and a target power supply. In this invention, the arc ignition needles are distributed radially, and there are the following defects: 1. Adjacent arc ignition needles may cause mutual interference, resulting in unstable or out-of-control arcs, affecting the coating quality; 2. The proximity of adjacent arc ignition needles may cause the arc ignition needles to overheat, which will not only affect the coating deposition process and then affect the performance of the coating, but also cause material fatigue of the arc ignition needles. Summary of the Invention

[0003] The purpose of the present invention is to provide a multi-arc ion plating arc ignition device to solve the problems raised in the above background art.

[0004] To achieve the above purpose, the present invention provides the following technical solution: A multi-arc ion plating arc ignition device includes an arc ignition mother rod, and a plurality of arc ignition sub-rods are fixedly arranged at the front end of the arc ignition mother rod in sequence along the axial direction of the arc ignition mother rod. The arc ignition sub-rods are fixedly provided with arc ignition needles along the direction perpendicular to the axial direction of the arc ignition mother rod. A plurality of the arc ignition needles rotate clockwise or counterclockwise around the axis of the arc ignition sub-rod. The arc ignition sub-rod includes a long rod portion and a short rod portion fixedly provided at the front end of the long rod portion; the long rod portion of the arc ignition sub-rod located at the rearmost side is fixedly connected to the front end of the arc ignition mother rod, and the short rod portion of the arc ignition sub-rod located at the front side is fixedly connected to the long rod portion of the arc ignition sub-rod located at the rear side.

[0005] Optionally, a semi-cylindrical groove is opened on the side wall of the long rod portion, and the front end of the semi-cylindrical groove extends to the rear end of the short rod portion. The arc ignition needle is of a cylindrical structure, and a transfer block is integrally formed at the bottom of the arc ignition needle and located in the semi-cylindrical groove. The transfer block is of a semi-cylindrical structure.

[0006] Optionally, an insulating heat dissipation block is fixedly arranged in the semi-cylindrical groove on the arc ignition sub-rod. The arc ignition needle, the transfer block, and the insulating heat dissipation block jointly fill the semi-cylindrical groove. The insulating heat dissipation block includes a rectangular surface connected to the long rod portion, a semi-circular surface connected to the short rod portion, a semi-cylindrical surface connecting the upper and lower ends of the rectangular surface and the semi-circular surface, and a concave surface connecting the rectangular surface and the semi-cylindrical surface and conforming to the outer wall of the arc ignition needle.

[0007] Optionally, a radiation heat dissipation coating is coated on the surface of the semi-cylindrical surface, and the radiation heat dissipation coating is a high-temperature resistant graphene radiation heat dissipation coating.

[0008] Optionally, it includes a bracket and a sliding sleeve. The outer wall of the sliding sleeve is fixedly connected to the bracket, the inner wall of the sliding sleeve is slidably sleeved on the outer wall of the main arc-igniting rod, and a cylinder for driving the main arc-igniting rod to move back and forth is fixedly arranged on the bracket.

[0009] Compared with the prior art, the present invention has the following beneficial effects:

[0010] 1. The present invention is applicable to coating the inner wall of pipe fittings. By designing the arc-igniting sub-rods to rotate and progress at intervals along the axial direction of the main arc-igniting rod, sufficient spacing is provided between the arc-igniting sub-rods, avoiding mutual interference or overheating between the arc-igniting sub-rods and ensuring the coating quality.

[0011] 2. In the present invention, the connecting part between the arc-igniting needle and the arc-igniting sub-rod is made flat and smooth through the adapter block and the insulating heat dissipation block, and the heat conduction and dissipation ability of the arc-igniting needle is enhanced through the insulating heat dissipation block. The insulating heat dissipation block can accelerate the heat radiation and dissipation ability through the radiation heat dissipation coating on its surface. The arc-igniting needle has strong heat dissipation ability, effectively improving the service life of the arc-igniting needle. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic structural diagram of the present invention;

[0013] Figure 2 It is a schematic structural diagram of the arc-igniting sub-rod and the arc-igniting needle in the present invention;

[0014] Figure 3 It is a schematic structural diagram of the arc-igniting sub-rod, the arc-igniting needle, the insulating heat dissipation block and the adapter block in the present invention;

[0015] Figure 4 It is a schematic structural diagram of the arc-igniting sub-rod in the present invention;

[0016] Figure 5 It is a schematic structural diagram of the arc-igniting needle and the adapter block from the first perspective in the present invention;

[0017] Figure 6 It is a schematic structural diagram of the arc-igniting needle and the adapter block from the second perspective in the present invention;

[0018] Figure 7 It is a schematic structural diagram of the insulating heat dissipation block from the first perspective in the present invention;

[0019] Figure 8 It is a schematic structural diagram of the insulating heat dissipation block from the second perspective in the present invention.

[0020] In the figure: 1. Arc-igniting mother rod; 2. Arc-igniting son rod; 201. Long rod part; 202. Short rod part; 203. Semi-cylindrical groove; 3. Arc-igniting needle; 4. Insulating heat dissipation block; 401. Rectangular surface; 402. Semi-circular surface; 403. Semi-cylindrical surface; 404. Concave surface; 5. Adapter block; 6. Bracket; 7. Sliding sleeve; 8. Cylinder. Specific embodiments

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0022] Embodiment: Please refer to Figure 1 and Figure 2 , the present invention provides a multi-arc ion plating arc-igniting device, including an arc-igniting mother rod 1. A plurality of arc-igniting son rods 2 are fixedly arranged at the front end of the arc-igniting mother rod 1 in sequence along the axial direction of the arc-igniting mother rod 1. An arc-igniting needle 3 is fixedly arranged on the arc-igniting son rod 2 along the direction perpendicular to the axial direction of the arc-igniting mother rod 1. The plurality of arc-igniting needles 3 rotate clockwise or counterclockwise around the axis of the arc-igniting son rod 2.

[0023] This embodiment is applicable to coating the inner wall of a pipe fitting. By designing that the arc-igniting son rods 2 rotate and progress at intervals along the axial direction of the arc-igniting mother rod 1, sufficient spacing is provided between the arc-igniting son rods 2 to avoid mutual interference or overheating between the arc-igniting son rods 2 and ensure the coating quality.

[0024] Please refer to Figures 3 to 4 , on the basis of the above embodiment, in this embodiment, the arc-igniting son rod 2 includes a long rod part 201 and a short rod part 202 fixedly arranged at the front end of the long rod part 201. The long rod part 201 of the arc-igniting son rod 2 located at the rearmost side is fixedly connected to the front end of the arc-igniting mother rod 1, and the short rod part 202 of the arc-igniting son rod 2 located at the front side is fixedly connected to the long rod part 201 of the arc-igniting son rod 2 located at the rear side.

[0025] Please refer to Figures 3 to 8 , on the basis of the above embodiment, in this embodiment, a semi-cylindrical groove 203 is opened on the side wall of the long rod part 201. The front end of the semi-cylindrical groove 203 extends to the rear end of the short rod part 202. The arc-igniting needle 3 is of a cylindrical structure. An adapter block 5 is integrally formed at the bottom of the arc-igniting needle 3 and located in the semi-cylindrical groove 203. The adapter block 5 is of a semi-cylindrical structure. An insulating heat dissipation block 4 is fixedly arranged on the arc-igniting son rod 2 and located in the semi-cylindrical groove 203. The arc-igniting needle 3, the adapter block 5 and the insulating heat dissipation block 4 jointly fill the semi-cylindrical groove 203.

[0026] The insulating heat dissipation block 4 includes a rectangular surface 401 connected to the long rod portion 201, a semi-circular surface 402 connected to the short rod portion 202, a semi-cylindrical surface 403 connecting the upper and lower ends of the rectangular surface 401 and the semi-circular surface 402, and a concave surface 404 connecting the rectangular surface 401 and the semi-cylindrical surface 403 and conforming to the outer wall of the arc ignition pin 3. The surface of the semi-cylindrical surface 403 is coated with a radiation heat dissipation coating, and the radiation heat dissipation coating is a high-temperature resistant graphene radiation heat dissipation coating.

[0027] In the present invention, the adapter block 5 and the insulating heat dissipation block 4 make the connection part between the arc ignition pin 3 and the arc ignition sub-rod 2 flat and smooth, and the insulating heat dissipation block 4 speeds up the heat conduction and dissipation ability of the arc ignition pin 3. The insulating heat dissipation block 4 can accelerate the heat radiation and dissipation ability through the radiation heat dissipation coating on its surface. The arc ignition pin 3 has a strong heat dissipation ability, effectively improving the service life of the arc ignition pin 3.

[0028] Please refer to Figure 1 , on the basis of the above embodiments, this embodiment is applicable to coating the inner wall of a pipe fitting. In this embodiment, the multi-arc ion plating arc ignition device includes a bracket 6 and a sliding sleeve 7. The outer wall of the sliding sleeve 7 is fixedly connected to the bracket 6, and the inner wall of the sliding sleeve 7 is slidably sleeved on the outer wall of the arc ignition mother rod 1. A cylinder 8 for driving the arc ignition mother rod 1 to move back and forth is fixedly provided on the bracket 6. The piston rod of the cylinder 7 is fixedly connected with an insulating push plate, and the insulating push plate is fixedly connected to the side wall of the arc ignition mother rod 1. The arc ignition mother rod 1 can be driven to move back and forth by the cylinder 7, so that the arc ignition pin 3 can move along the length direction of the pipe fitting, increasing the working area of the arc ignition pin 3.

[0029] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-arc ion plating arc starting device, characterized in that: The invention comprises an arc-striking mother rod (1), a front end of which is fixedly provided with a plurality of arc-striking sub-rods (2) arranged in sequence along the axial direction of the arc-striking mother rod (1), an arc-striking sub-rod (2) being fixedly provided with an arc-striking needle (3) along a direction perpendicular to the axial direction of the arc-striking mother rod (1), and a plurality of arc-striking needles (3) rotating clockwise or counterclockwise around the axial center of the arc-striking sub-rod (2), the arc-striking sub-rod (2) comprising a long rod portion (201) and a short rod portion (202) fixedly provided at the front end of the long rod portion (201); the long rod portion (201) of the arc-striking sub-rod (2) located at the rear is fixedly connected to the front end of the arc-striking mother rod (1), and the short rod portion (202) of the arc-striking sub-rod (2) located at the front is fixedly connected to the long rod portion (201) of the arc-striking sub-rod (2) located at the rear.

2. The multi-arc ion plating arc starting device according to claim 1, characterized in that: A semi-cylindrical groove (203) is formed on the side wall of the long rod portion (201), the front end of the semi-cylindrical groove (203) extends to the rear end of the short rod portion (202), the arc-starting needle (3) is a cylindrical structure, and a switching block (5) is integrally formed at the bottom of the arc-starting needle (3) and located in the semi-cylindrical groove (203), and the switching block (5) is a semi-cylindrical structure.

3. A multi-arc ion plating arc starting device according to claim 2, characterized in that: An insulating heat dissipation block (4) is fixedly provided on the arc-striking sub-rod (2) and located in the semi-cylindrical groove (203); the arc-striking needle (3), the adapter block (5) and the insulating heat dissipation block (4) together fill the semi-cylindrical groove (203); the insulating heat dissipation block (4) comprises a rectangular surface (401) connected to the long rod portion (201), a semi-circular surface (402) connected to the short rod portion (202), a semi-cylindrical surface (403) connecting the upper and lower ends of the rectangular surface (401) and the semi-circular surface (402), and a concave surface (404) connecting the rectangular surface (401) and the semi-cylindrical surface (403) and matching the outer wall of the arc-striking needle (3).

4. A multi-arc ion plating arc starting device according to claim 3, characterized in that: The surface of the semi-cylindrical surface (403) is coated with a radiation heat dissipation coating, and the radiation heat dissipation coating is a high-temperature resistant graphene radiation heat dissipation coating.

5. The multi-arc ion plating arc starting device according to claim 1, characterized in that: The invention comprises a bracket (6) and a sliding sleeve (7), wherein the outer wall of the sliding sleeve (7) is fixedly connected to the bracket (6), the inner wall of the sliding sleeve (7) is slidably sleeved with the outer wall of the arc-striking mother rod (1), and a cylinder (8) for driving the arc-striking mother rod (1) to move forward and backward is fixedly provided on the bracket (6).

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