FTIR (Fourier transform infrared spectroscopy) instrument matching device for precursor material spectral analysis

Abstract

The invention relates to the technical field of semiconductor preparation thin film material technology, and discloses a precursor material spectral analysis FTIR instrument matching device, which comprises a box body, a sample tank is fixedly connected in the box body, the sample tank is filled with a precursor material, a cold trap unit is arranged in the box body, and the cold trap unit is connected with a cold trap. A pressure feeding unit is arranged between the sample tank and the cold trap unit, the pressure feeding unit is used for conveying a precursor material in the sample tank into the cold trap unit, unnecessary moisture and other gases in the precursor material can be collected through the cold trap unit, and the precursor material after impurity separation is conveyed into an FTIR detection device for detection. The quality, stability and consistency of the precursor material can be detected, impurities in the pipeline can be purged through the purging unit, the material which is left in the pipeline and detected last time is reduced, and the problem that the precursor material is polluted by moisture and the material which is left in the pipeline and detected last time is solved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor thin film material preparation process, and more specifically, to a precursor material spectrum analysis FTIR instrument matching device. Background Art

[0002] The preparation of semiconductor thin film materials is one of the key steps in the manufacture of semiconductor devices, and precursor materials play an important role in the semiconductor thin film material preparation process CVD / ALD. Precursor materials usually refer to the raw materials or chemicals used in the synthesis of certain chemicals, materials or compounds. The precursor material itself may not have the desired functionality, but is converted into the desired final product through certain chemical reactions, physical processes or heat treatments. The quality / stability / consistency of the precursor material raw materials is crucial for subsequent process use. Manufacturers will conduct relevant tests on product quality through Fourier transform infrared spectrometers (FTIR) to analyze whether the chemical composition of the sample meets the standards.

[0003] When using Fourier transform infrared spectrometer (FTIR) to detect precursor materials, if the precursor materials are affected by moisture or other contaminants in the air (such as the last tested material remaining in the equipment), it may interfere with the FTIR spectrum, especially in the strong absorption area of ​​organic matter and water (such as 3200-3600 cm⁻¹), abnormal peaks may appear, resulting in deviations in the test results.

[0004] To this end, the present invention provides a precursor material spectrum analysis FTIR instrument supporting device. Summary of the invention

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] The invention provides a precursor material spectral analysis FTIR instrument supporting device, comprising a box body, a sample tank is fixedly connected in the box body, the sample tank is filled with precursor materials, a cold trap unit is also arranged in the box body, a pressure-feeding unit is arranged between the sample tank and the cold trap unit, the pressure-feeding unit is used to transport the precursor material in the sample tank to the cold trap unit, the cold trap unit is used to separate impurities in the precursor material, the cold trap unit comprises a cold trap device fixedly connected to the inner wall of the box body, a refrigeration component is arranged in the cold trap device, a special-shaped tube is placed in the cold trap device, one end of the special-shaped tube is connected to the pressure-feeding unit, and the other end is fixedly connected with a connecting pipe, an FTIR detection device is fixedly connected to the inner bottom surface of the box body, the connecting pipe is fixedly connected with the FTIR detection device, a purge unit is arranged in the sample tank, the purge unit is used to remove impurities in a pipeline of the pressure-feeding unit and the connecting pipe, and the sample tank is also provided with an exhaust unit, the exhaust unit is used to perform vacuum treatment on the pipelines and the connecting pipes of the pressure-feeding unit and the purge unit.

[0007] The cold trap unit in the above scheme is used to separate unnecessary moisture and other gases in the precursor material, and the precursor material after impurities are separated is sent to the FTIR detection device for detection, so as to detect the quality, stability and consistency of the precursor material. The impurities in the pipeline can be purged by the purge unit to reduce the materials remaining in the pipeline from the last detection, and the gas in the pipeline can be discharged by the exhaust unit, thus solving the problem of the precursor material being contaminated by moisture and the materials remaining in the pipeline from the last detection.

[0008] Preferably, the pressure delivery unit includes an air delivery pipe fixedly connected to the sample tank, an air pump and a one-way valve are installed on the air delivery pipe, and the air delivery pipe is fixedly connected to the special-shaped pipe.

[0009] The above scheme can be used to transport the precursor material so that it can be transported unidirectionally to the special-shaped tube in the cold trap unit.

[0010] Preferably, the purge unit includes a gas storage tank fixedly connected to the inner wall of the box body, the gas storage tank is filled with inert gas, the gas storage tank is fixedly connected to a blowing pipe, an air pump 2 and a one-way valve 3 are installed on the blowing pipe, and the blowing pipe is fixedly connected to the gas supply pipe.

[0011] Through the air pump 2 in the above scheme, the inert gas in the gas tank is transported to the air blowing pipe and then to the gas pipeline. The inert gas can blow away the impurities in the gas pipeline, solving the problem of residual detection materials and impurities in the gas pipeline.

[0012] Preferably, the special-shaped pipe is a multi-U-shaped pipe, and the bottom of the special-shaped pipe is fixedly connected to a drain pipe, a second one-way valve is installed on the drain pipe, and the drain pipe is fixedly connected to a waste liquid tank.

[0013] By using the special-shaped tube and the refrigeration component in the above scheme in combination, the refrigeration component cools the cold trap device, and by cooling, the impurities in the precursor material are condensed into liquid or solid. These liquids or solids fall to the bottom of the special-shaped tube and fall into the drain pipe and the waste liquid tank, thereby solving the problem of deviation in the detection results caused by the presence of impurities in the precursor material.

[0014] Preferably, the exhaust unit includes an exhaust box fixedly connected to the bottom surface of the box body, the exhaust box is fixedly connected to an exhaust pipe, a vacuum pump is installed on the exhaust pipe, the vacuum pump is fixedly connected to a connecting pipe, a solenoid valve 1 is installed on the exhaust pipe, a solenoid valve 2 is installed on the connecting pipe, an exhaust port is opened on the side of the exhaust box, and a control valve is installed on the exhaust port.

[0015] The vacuum pump in the above scheme can extract gas, and extract gas from the gas pipe, the air blowing pipe and the connecting pipe to keep the gas pipe and the connecting pipe in a vacuum.

[0016] Preferably, a crushing mechanism is provided on the exhaust pipe, and the crushing mechanism includes a crushing box arranged on the exhaust pipe, the exhaust pipe passes through the crushing box and is fixedly connected thereto, a motor is installed on the top surface of the crushing box, a rotating shaft is fixedly connected to the output end of the motor, the rotating shaft passes through the top surface of the crushing box and is rotatably connected to the top surface and the inner bottom surface, the rotating shaft is fixedly connected to bevel gear 1, the inner wall of the crushing box is rotatably connected to a rotating rod, and the rotating rod is fixedly connected to bevel gear 2, the bevel gear 2 and bevel gear 1 are meshingly connected, a number of blades are fixedly connected to the rotating rod, and a vibration mechanism is provided on the side wall of the connecting pipe, and the vibration mechanism is used to vibrate impurities on the inner wall of the connecting pipe.

[0017] The blade in the above solution can cut and crush the impurities in the gas, thus solving the problem that the vacuum pump is easily blocked and damaged due to the large impurities.

[0018] Preferably, the vibration mechanism includes a driving wheel fixedly connected to a rotating shaft, a support plate fixedly connected to the side wall of the crushing box, and a driven shaft rotatably arranged on the support plate, a driven wheel fixedly connected to the driven shaft, and a belt is arranged between the driving wheel and the driven wheel, the driving wheel and the driven wheel are connected by a belt transmission, a striking block is fixedly connected to the top end of the driven shaft, a rubber ring is fixedly connected to the outer wall of the connecting tube, the rubber ring and the striking block are at the same height, and a plurality of limit assemblies are arranged on the outer wall of the connecting tube.

[0019] The striking block in the above scheme rotates to strike the rubber ring and vibrate the connecting pipe, thereby solving the problem that impurities in the connecting pipe adhere and are not easy to fall off.

[0020] Preferably, two groups of the limiting components are provided and are distributed at the upper and lower ends of the rubber ring, and the opposite surfaces of the two limiting components are integrally formed with a bell-mouth structure.

[0021] The bell mouth structure in the above solution can limit the connection pipe.

[0022] Preferably, a gas analyzer is installed in the exhaust box, and the gas analyzer is fixedly connected to the exhaust pipe for detecting the purging effect.

[0023] The gas analyzer in the above scheme can analyze the gas in the pipeline and detect the effect of purging. When the detection result is within a suitable range, the purging can be stopped.

[0024] Preferably, a pressure regulator is installed in the sample tank, and a flow regulating valve is installed on the gas pipe.

[0025] The pressure in the sample tank can be adjusted by the pressure regulator in the above scheme, and the flow in the gas pipeline can be monitored and controlled by the flow regulating valve to avoid excessive flow.

[0026] The beneficial effects of the present invention are as follows: the precursor material spectral analysis FTIR instrument supporting device described in the present invention sends the precursor material in the sample tank to the cold trap unit through the pressure delivery unit to separate impurities. The cold trap unit can collect unnecessary moisture and other gases in the precursor material. The precursor material after the impurities are separated is sent to the FTIR detection device for detection, and the quality, stability and consistency of the precursor material can be detected. The impurities in the pipeline can be purged by the purge unit to reduce the materials detected last time in the pipeline. The gas in the pipeline can be discharged by the exhaust unit, which solves the problem of the precursor material being contaminated by moisture and the materials detected last time remaining in the pipeline, so that the precursor material remains pure, which is beneficial to the accuracy of the precursor material detection.

[0027] The precursor material spectral analysis FTIR instrument supporting device described in the present invention transports the inert gas in the gas storage tank to the air blowing pipe and then to the gas transmission pipe through the air pump 2 in the purge unit. The inert gas can blow out the impurities in the gas transmission pipe, thus solving the problem of residual detection materials and impurities in the gas transmission pipe.

[0028] The precursor material spectral analysis FTIR instrument supporting device described in the present invention cooperates with the special-shaped tube and the refrigeration component in the cold trap unit. The refrigeration component refrigerates the cold trap device. By cooling, the impurities in the precursor material are condensed into liquid or solid. The gas is transported to the connecting pipe. These liquids or solids fall to the bottom of the special-shaped tube and fall into the drain pipe and the waste liquid tank, thereby separating the impurities and solving the problem of deviation in the detection result caused by the presence of impurities in the precursor material.

[0029] The precursor material spectral analysis FTIR instrument supporting device described in the present invention can cut and crush impurities in the gas through a crushing mechanism, thereby solving the problem that impurities that are too large easily cause vacuum pump blockage and damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a stereogram of an embodiment of the present invention; Figure 2 is a partial cross-sectional view of the present invention; Figure 3 is a cross-sectional view of the pulverizing mechanism of the present invention; Figure 4 It is a schematic diagram of the striking block structure of the present invention; Figure 5 It is a structural schematic diagram of the special-shaped tube of the present invention; Figure 6 It is a structural schematic diagram of the limiting component of the present invention.

[0031] In the figure: 1, box; 2, sample tank; 3, pressure unit; 31, gas pipe; 32, air pump 1; 33, one-way valve 1; 4, cold trap unit; 41, cold trap device; 42, special-shaped pipe; 43, connecting pipe; 44, drain pipe; 45, one-way valve 2; 5, FTIR detection device; 6, purge unit; 61, gas storage tank; 62, purge pipe; 63, air pump 2; 64, one-way valve 3; 7, exhaust unit; 71, exhaust box; 72, exhaust pipe ;73. Vacuum pump;74. Solenoid valve 1;75. Solenoid valve 2;8. Crushing mechanism;81. Crushing box;82. Motor;83. Rotating shaft;84. Bevel gear 1;85. Bevel gear 2;86. Rotating rod;87. Blade;9. Vibrating mechanism;91. Driving wheel;92. Driven wheel;93. Driven shaft;94. Beating block;95. Rubber ring;900. Limiting assembly;10. Flow regulating valve;11. Pressure regulator;12. Waste liquid tank. DETAILED DESCRIPTION

[0032] The subject matter described herein will now be discussed with reference to example embodiments. It should be understood that the discussion of these embodiments is only to enable those skilled in the art to better understand and implement the subject matter described herein, and the functions and arrangements of the elements discussed may be changed without departing from the scope of protection of the contents of this specification. Each example may omit, replace or add various processes or components as needed. In addition, the features described relative to some examples may also be combined in other examples. Example

[0033] like Figures 1 to 6 As shown, a precursor material spectrum analysis FTIR instrument supporting device of the embodiment of the present invention, please refer to Figure 1 , Figure 2 , Figure 5 , including a box body 1, a sample tank 2 is fixedly connected to the box body 1, the sample tank 2 is filled with precursor materials, a cold trap unit 4 is also arranged in the box body 1, a pressure delivery unit 3 is arranged between the sample tank 2 and the cold trap unit 4, the pressure delivery unit 3 is used to transport the precursor material in the sample tank 2 to the cold trap unit 4, the cold trap unit 4 is used to separate impurities in the precursor material, the cold trap unit 4 includes a cold trap device 41 fixedly connected to the inner wall of the box body 1, a refrigeration component is arranged in the cold trap device 41, a special-shaped pipe 42 is placed in the cold trap device 41, the special-shaped pipe 42 is a multi-U-shaped pipe, and the bottom of the special-shaped pipe 42 is fixedly connected to a drain pipe 44, a one-way valve 45 is installed on the discharge pipe 44, and the discharge pipe 44 is fixedly connected to the waste liquid tank 12, one end of the special-shaped pipe 42 is connected to the pressure unit 3, and the other end is fixedly connected to the connecting pipe 43, an FTIR detection device 5 is fixedly connected to the inner bottom surface of the box body 1, and the connecting pipe 43 is fixedly connected to the FTIR detection device 5, a purge unit 6 is arranged in the sample tank 2, and the purge unit 6 is used to clear the impurities in the pipeline of the pressure unit 3 and the connecting pipe 43, and the sample tank 2 is also provided with an exhaust unit 7, and the exhaust unit 7 is used to vacuum the pipelines of the pressure unit 3 and the purge unit 6 and the connecting pipe 43.

[0034] Specifically, the precursor material in the sample tank 2 is sent to the cold trap unit 4 through the pressure delivery unit 3 to separate impurities. The special-shaped tube 42 in the cold trap unit 4 is used in conjunction with the refrigeration component. The refrigeration component refrigerates the cold trap device 41. By cooling, the impurities in the precursor material are condensed into liquid or solid, and the gas is transported to the connecting tube 43. These liquids or solids fall to the bottom of the special-shaped tube 42 and fall into the drain pipe 44 and the waste liquid tank 12, thereby separating the impurities. The precursor material after the impurities are separated is sent to the FTIR detection device 5 for detection, which can detect the quality, stability and consistency of the precursor material. The impurities in the pipeline can be purged by the purge unit 6 to reduce the materials detected last time in the pipeline. The gas in the pipeline can be discharged by the exhaust unit 7, which solves the problem that the precursor material is contaminated by moisture and the materials detected last time in the pipeline, so that the precursor material remains pure, which is beneficial to the accuracy of the precursor material detection.

[0035] Please refer to Figure 2 The pressure delivery unit 3 includes an air pipe 31 fixedly connected to the sample tank 2, an air pump 32 and a one-way valve 33 are installed on the air pipe 31, the air pipe 31 is fixedly connected to the special-shaped pipe 42, a pressure regulator 11 is installed in the sample tank 2, and a flow regulating valve 10 is installed on the air pipe 31.

[0036] Specifically, the precursor material in the sample tank 2 can be transported by the air pump 32, transported to the gas pipe 31, and then transported to the special-shaped tube 42. The direction of the one-way valve 33 is from the inside of the sample tank 2 to the outside of the sample tank 2. The transportation direction of the precursor material can be specified by the one-way valve 33. The pressure regulator 11 can adjust the pressure in the sample tank 2. The flow in the gas pipe 31 can be monitored and controlled by the flow regulating valve 10 to avoid excessive flow.

[0037] Please refer to Figure 2 The purge unit 6 includes a gas storage tank 61 fixedly connected to the inner wall of the box body 1. The gas storage tank 61 is filled with inert gas. The gas storage tank 61 is fixedly connected to a blow pipe 62. An air pump 2 63 and a one-way valve 3 64 are installed on the blow pipe 62. The blow pipe 62 is fixedly connected to the gas delivery pipe 31. Specifically, the inert gas in the gas tank 61 can be transported to the air blowing pipe 62 and then to the gas supply pipe 31 through the air pump 2 63. The direction of the one-way valve 3 64 is from the gas tank 61 to the outside of the gas tank 61, thereby preventing the precursor material from entering the air blowing pipe 62. The circulation of the inert gas can blow out the impurities in the gas supply pipe 31, the connecting pipe 43 and the exhaust pipe 72, thereby solving the problem of residual detection materials and impurities in the gas supply pipe 31 and the connecting pipe 43.

[0038] Please refer to Figure 2The exhaust unit 7 includes an exhaust box 71 fixedly connected to the bottom surface of the box body 1, the exhaust box 71 is fixedly connected to an exhaust pipe 72, a vacuum pump 73 is installed on the exhaust pipe 72, the vacuum pump 73 is fixedly connected to the connecting pipe 43, a solenoid valve 1 74 is installed on the exhaust pipe 72, a solenoid valve 2 75 is installed on the connecting pipe 43, an exhaust port is opened on the side of the exhaust box 71, and a control valve is installed on the exhaust port, a gas analyzer is installed in the exhaust box 71, and the gas analyzer is fixedly connected to the exhaust pipe 72 for detecting the purging effect.

[0039] Specifically, when the purge unit 6 is working, the control valve on the exhaust port is opened, and the inert gas is discharged with the impurities in the pipeline. After the purge unit 6 continues to work for a period of time, it stops working, the control valve on the exhaust port is closed, and the vacuum pump 73 is started to extract the gas in the gas pipe 31 and the connecting pipe 43 and transport it to the gas analyzer for detection. The proportion of inert gas in the gas can be detected, thereby judging the effect of pipeline purging.

[0040] Please refer to Figure 3 A crushing mechanism 8 is provided on the exhaust pipe 72, and the crushing mechanism 8 includes a crushing box 81 provided on the exhaust pipe 72. The exhaust pipe 72 passes through the crushing box 81 and is fixedly connected thereto. A motor 82 is installed on the top surface of the crushing box 81, and a rotating shaft 83 is fixedly connected to the output end of the motor 82. The rotating shaft 83 passes through the top surface of the crushing box 81 and is rotatably connected to the top surface and the inner bottom surface. The rotating shaft 83 is fixedly connected to a bevel gear 1 84. A rotating rod 86 is rotatably connected to the inner wall of the crushing box 81, and the rotating rod 86 is fixedly connected to a bevel gear 2 85. The bevel gear 2 85 is meshed with the bevel gear 1 84. A plurality of blades 87 are fixedly connected to the rotating rod 86. A vibration mechanism 9 is provided on the side wall of the connecting pipe 43. The vibration mechanism 9 is used to vibrate the impurities on the inner wall of the connecting pipe 43.

[0041] The driving motor 82 drives the rotating shaft 83 to rotate, which in turn drives the bevel gear 1 84 and the bevel gear 2 85 to rotate, and then drives the rotating rod 86 and the blade 87 to rotate. The blade 87 can cut and crush impurities in the gas, solving the problem that the vacuum pump 73 is easily blocked and damaged due to excessive impurities.

[0042] Please refer to Figure 2 , Figure 3 , Figure 4 , Figure 6The vibration mechanism 9 includes a driving wheel 91 fixedly connected to the rotating shaft 83, a support plate fixedly connected to the side wall of the crushing box 81, and a driven shaft 93 is rotatably arranged on the support plate, a driven wheel 92 is fixedly connected to the driven shaft 93, and a belt is arranged between the driving wheel 91 and the driven wheel 92, and the driving wheel 91 and the driven wheel 92 are connected by belt transmission, a striking block 94 is fixedly connected to the top of the driven shaft 93, a rubber ring 95 is fixedly connected to the outer wall of the connecting tube 43, and the rubber ring 95 and the striking block 94 are at the same height, and a plurality of limiting components 900 are arranged on the outer wall of the connecting tube 43, and two groups of limiting components 900 are arranged, and are distributed at the upper and lower ends of the rubber ring 95, and the opposite surfaces of the two limiting components 900 are integrally formed with a bell-mouth structure.

[0043] The connecting pipe 43 is a hose structure. The rotation of the rotating shaft 83 can rotate the driving wheel 91, which in turn drives the driven wheel 92 to rotate, and then the driven shaft 93 and the striking block 94 can rotate. The rotation of the striking block 94 can hit the rubber ring 95 and make the connecting pipe 43 vibrate, thereby solving the problem that impurities in the connecting pipe 43 adhere to each other and are not easy to fall off. The bell-mouth structure can limit the connecting pipe 43 and prevent the connecting pipe 43 from shaking too much.

[0044] How it works In the initial state, purge is performed first to ensure that the pipeline is clean. At this time, the control valve of the exhaust port on the side of the exhaust box 71 is opened, the solenoid valve 2 75 is closed, and the solenoid valve 1 74 is opened to drive the air pump 2 63. The air pump 2 63 can transport the inert gas in the gas storage tank 61 to the blowing pipe 62, and then transport it to the gas pipe 31, the connecting pipe 43 and the exhaust pipe 72. The circulation of the inert gas can blow out the impurities in the gas pipe 31, the connecting pipe 43 and the exhaust pipe 72, solving the problem of residual detection materials and impurities in the gas pipe 31 and the connecting pipe 43. Then the motor 82 is driven to drive the rotating shaft 83 to rotate, and then the bevel gear 1 84 and the bevel gear 2 85 are driven to rotate, and then the rotating rod 86 and the blade 87 are driven to rotate. The blade 87 can cut and crush the impurities in the gas, solving the problem that the vacuum pump 73 is easily blocked and damaged due to excessive impurities; The rotation of the rotating shaft 83 can also rotate the driving wheel 91, thereby driving the driven wheel 92 to rotate, thereby rotating the driven shaft 93 and the striking block 94. The striking block 94 can hit the rubber ring 95 when rotating, and make the connecting pipe 43 vibrate, thereby solving the problem that impurities in the connecting pipe 43 are not easy to fall off. The bell mouth structure can limit the connecting pipe 43, thereby preventing the connecting pipe 43 from shaking too much and causing damage to the connecting pipe 43. After the purge unit 6 continues for a period of time, it stops working, the control valve on the exhaust port is closed, and the vacuum pump 73 is started to extract the gas in the gas pipe 31 and the connecting pipe 43 and transport it to the gas analyzer for detection. The proportion of inert gas in the gas can be detected to obtain the effect of pipeline purge. After the proportion of inert gas reaches the ideal threshold, the precursor material can be transported; The sample tank 2 is filled with the precursor material, and the precursor material is gas. The air pump 32 is driven to transport the precursor material in the sample tank 2 to the gas pipe 31 and to the special-shaped tube 42. The direction of the one-way valve 33 is from the inside of the sample tank 2 to the outside of the sample tank 2. The transportation direction of the precursor material can be specified by the one-way valve 33. The pressure regulator 11 in the sample tank 2 can adjust the pressure in the sample tank 2. The flow regulating valve 10 in the gas pipe 31 can detect and control the flow in the gas pipe 31 to avoid excessive flow. After the precursor material is transported to the special-shaped tube 42 in the cold trap unit 4, the cold trap device 41 is driven, and the refrigeration component refrigerates the cold trap device 41. By cooling, the impurities in the precursor material are condensed into liquid or solid. The precursor material is transported to the connecting tube 43. These liquids or solids fall to the bottom of the special-shaped tube 42 and fall into the drain pipe 44 and the waste liquid tank 12, thereby separating the impurities. The precursor material is transported to the FTIR detection device 5 for detection, which can detect the quality, stability and consistency of the precursor material.

[0045] An example of the present specific implementation mode is described above, but the present embodiment is not limited to the above-mentioned specific implementation mode, which is merely illustrative and not restrictive. A person skilled in the art may make many forms inspired by the present embodiment, all of which are protected by the present embodiment.

Claims

1. A precursor material spectral analysis FTIR instrument supporting device, characterized in that: The invention comprises a box body (1), wherein a sample tank (2) is fixedly connected to the box body (1), wherein the sample tank (2) is filled with a precursor material, wherein a cold trap unit (4) is also arranged in the box body (1), wherein a pressure-feeding unit (3) is arranged between the sample tank (2) and the cold trap unit (4), wherein the pressure-feeding unit (3) is used to transport the precursor material in the sample tank (2) to the cold trap unit (4), and wherein the cold trap unit (4) is used to separate impurities in the precursor material; The cold trap unit (4) comprises a cold trap device (41) fixedly connected to the inner wall of the box body (1), a refrigeration component is arranged in the cold trap device (41), a special-shaped tube (42) is placed in the cold trap device (41), one end of the special-shaped tube (42) is connected to the pressure delivery unit (3), and the other end is fixedly connected to a connecting tube (43), the inner bottom surface of the box body (1) is fixedly connected to the FTIR detection device (5), and the connecting tube (43) is fixedly connected to the FTIR detection device (5); The sample tank (2) is provided with a purge unit (6), and the purge unit (6) is used to remove impurities in the pipeline of the pressure-feeding unit (3) and the connecting pipe (43); The sample tank (2) is further provided with an exhaust unit (7), and the exhaust unit (7) is used to perform vacuum processing on the pipelines of the pressure delivery unit (3) and the purge unit (6) and the connecting pipe (43).

2. The precursor material spectral analysis FTIR instrument supporting device according to claim 1, characterized in that: The pressure delivery unit (3) comprises an air delivery pipe (31) fixedly connected to the sample tank (2), an air pump (32) and a one-way valve (33) being installed on the air delivery pipe (31), and the air delivery pipe (31) is fixedly connected to the special-shaped pipe (42).

3. The precursor material spectral analysis FTIR instrument supporting device according to claim 2, characterized in that: The purge unit (6) comprises a gas storage tank (61) fixedly connected to the inner wall of the box body (1); the gas storage tank (61) is filled with inert gas; the gas storage tank (61) is fixedly connected to a gas blowing pipe (62); a second air pump (63) and a third one-way valve (64) are installed on the gas blowing pipe (62); the gas blowing pipe (62) is fixedly connected to the gas supply pipe (31).

4. The precursor material spectral analysis FTIR instrument supporting device according to claim 1, characterized in that: The special-shaped pipe (42) is a multi-U-shaped pipe, and the bottom of the special-shaped pipe (42) is fixedly connected to a liquid discharge pipe (44), a second one-way valve (45) is installed on the liquid discharge pipe (44), and the liquid discharge pipe (44) is fixedly connected to a waste liquid tank (12).

5. The precursor material spectral analysis FTIR instrument supporting device according to claim 1, characterized in that: The exhaust unit (7) comprises an exhaust box (71) fixedly connected to the inner bottom surface of the box body (1); the exhaust box (71) is fixedly connected to an exhaust pipe (72); a vacuum pump (73) is installed on the exhaust pipe (72); the vacuum pump (73) is fixedly connected to a connecting pipe (43); a solenoid valve 1 (74) is installed on the exhaust pipe (72); a solenoid valve 2 (75) is installed on the connecting pipe (43); an exhaust port is opened on the side of the exhaust box (71), and a control valve is installed on the exhaust port.

6. The precursor material spectral analysis FTIR instrument supporting device according to claim 5, characterized in that: The exhaust pipe (72) is provided with a pulverizing mechanism (8), the pulverizing mechanism (8) comprising a pulverizing box (81) provided on the exhaust pipe (72), the exhaust pipe (72) passing through the pulverizing box (81) and being fixedly connected thereto, a motor (82) being mounted on the top surface of the pulverizing box (81), an output end of the motor (82) being fixedly connected to a rotating shaft (83), the rotating shaft (83) passing through the top surface of the pulverizing box (81) and being rotatably connected to both the top surface and the inner bottom surface thereof, the rotating shaft (83) being fixedly connected to a bevel gear 1 (84), a rotating rod (86) being rotatably connected to the inner wall of the pulverizing box (81), the rotating rod (86) being fixedly connected to a bevel gear 2 (85), the bevel gear 2 (85) being meshingly connected to the bevel gear 1 (84), a plurality of blades (87) being fixedly connected to the rotating rod (86), and a vibration mechanism (9) being provided on the side wall of the connecting pipe (43), the vibration mechanism (9) being used to vibrate impurities on the inner wall of the connecting pipe (43).

7. The precursor material spectral analysis FTIR instrument supporting device according to claim 6, characterized in that: The vibration mechanism (9) comprises a driving wheel (91) fixedly connected to a rotating shaft (83); a support plate is fixedly connected to a side wall of the crushing box (81); a driven shaft (93) is rotatably arranged on the support plate; a driven wheel (92) is fixedly connected to the driven shaft (93); a belt is arranged between the driving wheel (91) and the driven wheel (92); the driving wheel (91) and the driven wheel (92) are connected via a belt transmission; a striking block (94) is fixedly connected to the top end of the driven shaft (93); a rubber ring (95) is fixedly connected to the outer wall of the connecting tube (43); the rubber ring (95) and the striking block (94) are of the same height; and a plurality of limiter assemblies (900) are arranged on the outer wall of the connecting tube (43).

8. The precursor material spectral analysis FTIR instrument supporting device according to claim 7, characterized in that: Two groups of the limiting components (900) are provided and are distributed at the upper and lower ends of the rubber ring (95); the opposing surfaces of the two limiting components (900) are integrally formed with a bell-mouth structure.

9. The precursor material spectral analysis FTIR instrument supporting device according to claim 5, characterized in that: A gas analyzer is installed in the exhaust box (71), and the gas analyzer is fixedly connected to the exhaust pipe (72) for detecting the purging effect.

10. The precursor material spectrum analysis FTIR instrument supporting device according to claim 2, characterized in that: A pressure regulator (11) is installed in the sample tank (2), and a flow regulating valve (10) is installed on the gas transmission pipe (31).

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