An aberration compensation device for an optical system

Abstract

The application relates to the technical field of aberration compensation, and discloses an aberration compensation device for an optical system, which has a first direction, a second direction and a third direction that are perpendicular to each other in pairs, comprises two optical devices, the two optical devices are oppositely arranged along the third direction, and the curved surface type of the two optical devices is T(x, y); in the intersection plane of the first direction and the second direction, the relative displacement distance of the two optical devices is Delta l, the included angle between the relative displacement direction of the two optical devices and the first direction is alpha, the included angle between the relative position direction of the two optical devices and the second direction is beta, and cos 2 alpha + cos 2 beta = 1; and the equivalent surface type of the two optical devices is T(x, y) + Delta l*sin(alpha)*x + Delta l*sin(beta)*y, which can compensate for different types and different amplitudes of aberration and is compatible with existing optical systems.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of aberration compensation, in particular to an aberration compensation device for an optical system. BACKGROUND

[0002] At present, optical systems have a wide range of needs for aberration compensation, which refers to reducing or eliminating deviations caused by light passing through optical elements during the imaging process to improve the clarity and accuracy of images.

[0003] There are mainly two methods for aberration compensation in the prior art. Method one: a static optical element with a specific surface is designed according to the aberration parameters in the optical system, and the static optical element is placed in the optical system to compensate for the original optical path. However, the surface shape of the aberration compensation will change with the change of the optical system, and different curved optical devices are needed for compensation. Method two: a dynamic phase device is used for aberration compensation, but the phase continuity and efficiency of the optical device are low, and the ability of aberration compensation is limited.

[0004] Therefore, whether it is a static optical device or a dynamic phase device, it is difficult to compensate for different types and different amplitudes of aberration and achieve good aberration compensation effect, and there is a compatibility problem with existing optical systems. SUMMARY

[0005] The technical problem to be solved by the present application is that whether it is a static optical device or a dynamic phase device, it is difficult to compensate for different types and different amplitudes of aberration and achieve good aberration compensation effect, and there is a compatibility problem with existing optical systems.

[0006] To solve the above technical problems, the present application provides a technical scheme of an aberration compensation device for an optical system:

[0007] The aberration compensation device for the optical system has a first direction, a second direction and a third direction that are perpendicular to each other, and includes two optical devices, the two optical devices are arranged opposite to each other along the third direction, and the surface type of the two optical devices is T(x, y).

[0008] In the intersection plane of the first direction and the second direction, the relative displacement distance of the two optical devices is Δl, the angle between the relative displacement direction of the two optical devices and the first direction is α, the angle between the relative position direction of the two optical devices and the second direction is β, and cos 2 α+cos 2 β=1.

[0009] The equivalent surface type of the two optical devices is W(x, y).

[0010] T(x+Δx,y+Δy)-T(x,y)=dT=W(x,y)

[0011] Substitute (Δx,Δy)=(Δl·cosα,Δl·cosβ), to obtain

[0012]

[0013] Further, when the astigmatism and defocus of the optical system are compensated, the curved surface shape of the two optical devices is T(x,y)=A(x 3 ,y 3 );

[0014] The equivalent surface shape of the two optical devices is: W(x,y)=(cosα·x 2 +cosβ·y 2 )·Δl.

[0015] Further, when the line coma of the optical system is compensated, the curved surface shape of the two optical devices is T(x,y)=x 4 +y 4 ;

[0016] The equivalent surface shape of the two optical devices is: W(x,y)=(cosα·x 3 +cosβ·y 3 )·Δl.

[0017] Further, the two optical devices are optical lenses respectively.

[0018] Further, the two optical devices are optical diffractive optical elements respectively.

[0019] Further, the two optical devices are optical super-structured optical elements respectively.

[0020] Further, the two optical devices are optical holographic optical elements respectively.

[0021] Further, the two optical devices are optical free-form mirrors respectively.

[0022] The aberration compensation device for the optical system has the beneficial effects compared with the prior art, which are that the relative displacement vector of the two optical devices wherein the relative displacement vector The relative displacement distance Δl and the relative displacement direction (cosα, cosβ) of the two optical devices are combined. Based on the magnitude and type of the aberration and based on the relative sliding of the two optical devices, the equivalent surface W(x, y) of the two optical devices is determined by the curved surface T(x, y), the relative displacement direction (cosα, cosβ), and the relative displacement distance Δl, combined with the formula

[0023] It can be obtained that the relative displacement distance Δl determines the magnitude of the equivalent curved surface W(x, y), and the relative displacement direction (cosα, cosβ) also affects the surface type of the equivalent curved surface W(x, y). Let W(x, y) be the expression of the system aberration to be corrected, and then the surface T(x, y) of the optical device can be obtained.

[0024] When the two optical devices are relatively slid, the equivalent surface W(x, y) of the two optical devices is the directional derivative of the curved surface T(x, y) along the relative displacement direction (cosα, cosβ), and the size is proportional to the relative displacement distance Δl of the two optical devices. By designing the surface of the optical device, the equivalent surface when the two optical devices are relatively slid is consistent with the expression of the aberration to be compensated, and then the corresponding aberration of the optical system can be compensated.

[0025] When the type of the aberration of the optical system is unchanged, and the magnitude of the aberration changes, the relative displacement distance Δl can be changed to adapt; and the relative displacement direction (cosα, cosβ) can be changed to adapt to different types of aberration. Therefore, the aberration compensation device for the optical system can effectively compensate different types and different magnitudes of aberration, and at the same time, good compatibility with the existing optical system is formed. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a plan view of the two optical devices of the aberration compensation device for the optical system in the embodiment of the present application;

[0027] Figure 2 is a side view of the two optical devices of the aberration compensation device for the optical system in other embodiment one of the present application;

[0028] Figure 3 is a side view of the two optical devices of the aberration compensation device for the optical system in other embodiment two of the present application;

[0029] In the figure: 1-optical device, 10-curved surface, X-first direction, Y-second direction, Z-third direction. DETAILED DESCRIPTION

[0030] The specific embodiments of the present application will be further described in conjunction with the drawings and examples. The following examples are used to illustrate the present application, but not to limit the scope of the present application.

[0031] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like in the present application are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0032] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0033] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be directly connected, or indirectly connected through intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] As Figure 1 shown, an aberration compensation device for optical system of an embodiment of the present application has a first direction X, a second direction Y and a third direction Z which are perpendicular to each other, and includes two optical devices 1, the two optical devices 1 are arranged oppositely along the third direction Z, and the curved surface shape of the two optical devices 1 is T(x, y); specifically, the curved surface shape refers to the surface shape of the curved surface 10 of the optical device 1.

[0035] In the intersection plane of the first direction X and the second direction Y, the relative displacement distance of the two optical devices 1 is Δl, the angle between the relative displacement direction of the two optical devices 1 and the first direction X is α, the angle between the relative position direction of the two optical devices 1 and the second direction Y is β, and 2 2

[0036] cosα+cosβ=1.

[0037] The equivalent surface shape of the two optical devices 1 is W(x, y);

[0038] T(x+Δx, y+Δy)-T(x, y)=dT=W(x, y)

[0039] Substituting (Δx, Δy)=(Δl*cosα, Δl*cosβ), we get

[0040]

[0041] The aberration compensation device for the optical system selects the relative displacement vector of the two optical devices 1 Wherein, the relative displacement vector Combining the relative displacement distance Δl and the relative displacement direction (cosα, cosβ) of the two optical devices 1. It is based on the amplitude and type of aberration and based on the relative sliding of the two optical devices 1 that the equivalent surface shape W(x, y) of the two optical devices 1 is determined by the surface shape T(x, y) and the relative displacement direction (cosα, cosβ) and the relative displacement distance Δl, combined with the formula

[0042] It can be obtained that the relative displacement distance Δl determines the amplitude of the equivalent surface W(x, y), and the relative displacement direction (cosα, cosβ) also affects the surface shape of the equivalent surface W(x, y). Let W(x, y) be the expression of the system aberration to be corrected, then the surface shape T(x, y) of the optical device 1 can be obtained.

[0043] When the two optical devices 1 are relatively slid, the equivalent surface shape W(x, y) of the two optical devices 1 is the directional derivative of the curved surface shape T(x, y) along the relative displacement direction (cosα, cosβ), and the size is proportional to the relative displacement distance Δl of the two optical devices 1. By designing the surface shape of the optical device 1, the equivalent surface shape when the two optical devices 1 are relatively slid is consistent with the expression of the aberration to be compensated, so the corresponding aberration of the optical system can be compensated.

[0044] When the type of aberration of the optical system is unchanged, and the amplitude of the aberration changes, the relative displacement distance Δl can be changed to adapt; and different types of aberration can be adapted by changing the relative displacement direction (cosα, cosβ). Therefore, the aberration compensation device for the optical system can effectively compensate different types and different amplitudes of aberration, and at the same time, it is compatible with the existing optical system.

[0045] Other embodiments of the aberration compensation device for the optical system of the present application are as follows: Figure 2As shown, the aberration compensation device for an optical system has a first direction X, a second direction Y, and a third direction Z that intersect each other perpendicularly, and includes two optical devices 1. The two optical devices 1 are arranged relative to each other along the third direction Z, and the curved surface profiles of the two optical devices 1 are: T(x, y); specifically, the curved surface profile refers to the surface profile of the curved surface 10 of the optical device 1.

[0046] In the intersection plane of the first direction X and the second direction Y, the relative displacement distance of the two optical devices 1 is Δl, the angle between the relative displacement direction of the two optical devices 1 and the first direction X is α, the angle between the relative position direction of the two optical devices 1 and the second direction Y is β, and cos 2 α+cos 2 β=1. When compensating for astigmatism and defocus of the optical system, based on the above specific embodiment, the curved surface of the two optical devices 1 is T(x, y)=A(x 3 +y 3 ); The equivalent surface shape of the two optical devices 1 is: W(x,y)=(cosα·x 2 +cosβ·y 2 )·Δl.

[0047] At this time, the aberration compensation device for the optical system can compensate for the astigmatism in the first direction X and the second direction Y by changing the relative displacement direction (cosα, cosβ), and can also compensate for the defocus aberration, and can compensate for astigmatism and defocus of any magnitude by changing the relative displacement distance Δl.

[0048] Another embodiment of the aberration compensation device for an optical system of the present invention is as follows: Figure 3 As shown, the aberration compensation device for an optical system has a first direction X, a second direction Y, and a third direction Z that intersect each other perpendicularly, and includes two optical devices 1. The two optical devices 1 are arranged relative to each other along the third direction Z, and the curved surface profiles of the two optical devices 1 are: T(x, y); specifically, the curved surface profile refers to the surface profile of the curved surface 10 of the optical device 1.

[0049] In the intersection plane of the first direction X and the second direction Y, the relative displacement distance of the two optical devices 1 is Δl, the angle between the relative displacement direction of the two optical devices 1 and the first direction X is α, the angle between the relative position direction of the two optical devices 1 and the second direction Y is β, and cos 2 α+cos 2 β=1. When compensating the linear coma of the optical system, based on the above specific embodiment, the curved surface of the two optical devices 1 is: T(x,y)=x 4 +y 4 The equivalent surface shape of the two optical devices 1 is: W(x,y)=(cosα·x3 + cos β · y 3 ) · Δl.

[0050] At this time, the aberration compensation device for optical system can compensate linear coma and other third-order aberrations of the first direction X and the second direction Y by changing the relative displacement direction (cos α, cos β), and can compensate linear coma and other third-order aberrations of any amplitude by changing the relative displacement distance Δl.

[0051] As a further preferred scheme, the two optical devices 1 are optical lenses respectively; or, the two optical devices 1 are optical diffractive optical elements respectively; or, the two optical devices 1 are optical super-structured optical elements respectively; or, the two optical devices 1 are optical holographic optical elements respectively; or, the two optical devices 1 are optical free-form mirrors respectively.

[0052] The above description is only preferred embodiments of the present application, and it should be pointed out that for ordinary skilled in the art, without departing from the technical principles of the present application, a number of improvements and replacements can be made, and these improvements and replacements should be considered as the protection scope of the present application.

Claims

1. An aberration compensating device for an optical system having a first direction, a second direction and a third direction which perpendicularly intersect two by two, characterized by, The two optical devices are arranged oppositely along the third direction, and the curved surface types of the two optical devices are: ; In an intersection plane of the first direction and the second direction, a relative displacement distance of the two optical devices is , an angle between a relative displacement direction of the two optical devices and the first direction is , an angle between the relative displacement direction of the two optical devices and the second direction is , and ; The equivalent face types of the two optical devices are: ; Substituting , we obtain ； In compensation for astigmatism and defocus of the optical system, the curved surface shape of the two optical devices is ; The equivalent face type of both said optical devices is: ; When compensating for the linear coma of an optical system, the curved surface shape of the two optical devices is: ; The equivalent face types of the two optical devices are: .

2. The apparatus for compensating for aberrations of an optical system according to claim 1, wherein Two of the optical devices are optical lenses.

3. The apparatus for compensating for aberrations of an optical system according to claim 1, wherein Two of the optical devices are optical diffractive optical elements.

4. The apparatus for compensating for aberrations of an optical system according to claim 1, wherein Two of the optical devices are optical metasurface optical elements.

5. The apparatus for compensating for aberrations of an optical system according to claim 1, wherein Two of the optical devices are optical holographic optical elements.

6. The apparatus for compensating for aberrations of an optical system according to claim 1, wherein Two of the optical devices are optical freeform mirrors.

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