Fast assembly mechanism for excimer gas circulation device

Abstract

The invention discloses a quick mounting mechanism for an excimer gas circulating device, and relates to the technical field of excimer gas circulating devices, the quick mounting mechanism comprises two groups of auxiliary plates which can be respectively mounted at two open ends of a barrel, each auxiliary plate is provided with a limiting hole and an operation window, the limiting holes are used for inserting a rotor, and the operation windows are used for operating the rotor. When the two sets of auxiliary plates are installed at the two open ends of the barrel correspondingly, the fan can be limited to the designated position in the barrel, and then the fan is fixed through the operation window. The two sets of auxiliary plates are installed at the two open ends of the barrel correspondingly, the position of the draught fan is limited through the limiting holes, so that the whole device is rapid, easy and convenient to install and detach, the working efficiency is improved, and meanwhile the stability of the draught fan in the barrel is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of excimer gas circulation devices, and in particular to a quick-installation mechanism for excimer gas circulation devices. Background Art

[0002] In the 1990s, with the introduction of excimer lasers into the field of semiconductor lithography production, a large number of excimer lasers entered industrial production lines, greatly promoting the development of high repetition rate, narrow line width, long life, and high stability excimer laser technology. At the same time, other industrial applications such as microstructure processing and material processing, such as liquid crystal panel annealing, microstructure processing and surface treatment, have also promoted the vigorous development of high-power excimer laser technology. Excimer gas, as an indispensable part of excimer lasers, plays a very important role in it.

[0003] like Figure 1 As shown, the excimer gas circulation device in the prior art generally includes a cylinder 101 with openings at both ends. A fan 102 and a series of auxiliary components can be installed inside the cylinder 101 by relying on the two open ends of the cylinder 101. The end of the fan 102 has a rotor 103. After the installation is completed, end covers are set at the two open ends of the cylinder 101 for sealing. Subsequently, the cylinder 101 is filled with excimer gas for use.

[0004] Since the cylinder in the excimer gas circulation device is slender, that is, its length is designed to be long, and the size of the fan adapted to it is also slender, therefore, when technicians assemble the fan at the specified position inside the cylinder, due to the limitation of its shape, the operation will be restricted. It is necessary to repeatedly adjust the position of the fan many times before it can be accurately installed at the specified position inside the cylinder, which makes the operation more cumbersome.

[0005] Based on this, we propose a quick-installation mechanism for an excimer gas circulation device to solve the above problems. Summary of the invention

[0006] The purpose of the present invention is to solve the problems in the prior art and to propose a quick-installation mechanism for a quasi-molecular gas circulation device. The mechanism can adjust the fan to be installed as the position of the two sets of auxiliary plates moves, and when the two sets of auxiliary plates are assembled on the cylinder, the fan will also be at the designated position to be installed.

[0007] To solve the above problems, the present invention provides the following technical solutions:

[0008] A quick-install mechanism for a quasi-molecular gas circulation device comprises two sets of auxiliary plates which can be respectively installed at the two open ends of a cylinder, wherein the auxiliary plates are provided with limit holes and operation windows, and the limit holes are used for inserting a rotor, so that when the two sets of auxiliary plates are respectively installed at the two open ends of the cylinder, a fan will be restricted at a specified position inside the cylinder, and then the fan can be fixed through the operation window.

[0009] As a further solution of the present invention: a fastener for locking the rotor is provided at the limiting hole.

[0010] As a further solution of the present invention: the fastener includes a plurality of adjusting screws which are all threadedly mounted on the auxiliary plate, and one end of each adjusting screw can extend into the limiting hole.

[0011] As a further solution of the present invention: the plurality of adjusting screws are arranged along the radial direction of the limiting hole, and the plurality of adjusting screws are located at one end of the limiting hole to jointly form a clamping area with adjustable size.

[0012] As a further solution of the present invention: the fastener includes a fixed seat arranged on the auxiliary plate, and two relatively arranged clamping blocks are movably arranged on the fixed seat, and the two clamping blocks are distributed on both sides of the limiting hole. A bidirectional threaded rod is movably arranged on the fixed seat, and the bidirectional threaded rod has two threaded sections with opposite threads, and the two clamping blocks are respectively threadedly sleeved on the two threaded sections.

[0013] As a further solution of the present invention: the fixing seat is arranged on a side of the auxiliary plate facing the cylinder.

[0014] As a further solution of the present invention: a plurality of assembly holes are evenly formed on the auxiliary plate, and each assembly hole is provided with a pin shaft and can be locked on the cylinder.

[0015] As a further solution of the present invention: the operation window is configured to be rectangular and is located above the limiting hole.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The quick-install mechanism is cleverly designed. It is installed at the two open ends of the cylinder through two sets of auxiliary plates, and the position of the fan is limited by the limit holes, making the installation and disassembly process of the entire device fast and simple, improving work efficiency, and ensuring the stability of the fan in the cylinder.

[0018] 2. The fasteners set at the limit holes can not only firmly lock the rotor, but also position and adjust it to prevent it from loosening or displacement during operation, thereby ensuring the stability and reliability of the entire quick-install mechanism.

[0019] 3. The fastener adopts a design of multiple adjustment screws, making the locking process more flexible and controllable. Each adjustment screw can be adjusted independently to ensure that the rotor is evenly and firmly clamped in the limit hole, improving the locking effect.

[0020] 4. The adjusting screw is arranged along the radial direction of the limiting hole, and a clamping area is formed at one end of the limiting hole. This design can clamp the rotor more effectively to prevent it from moving in any direction, further enhancing the stability and safety of the quick-install mechanism.

[0021] 5. The fastener adopts a combination design of a fixed seat, a clamping block and a bidirectional threaded rod, making the locking process simpler and more efficient. By rotating the bidirectional threaded rod, the two clamping blocks can be driven to move in opposite directions at the same time to achieve rapid clamping and locking of the rotor.

[0022] 6. The fixing seat is arranged on the side of the auxiliary plate facing the cylinder. This design makes the fastener more concealed and will not interfere with other parts of the quick-install mechanism. It is also convenient for maintenance and replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of an excimer gas circulation device in the prior art;

[0025] Figure 2 It is a schematic diagram of the working state structure of the present invention;

[0026] Figure 3 It is a schematic diagram of the three-dimensional structure of the first fastener provided in the present invention;

[0027] Figure 4 It is a front view structural schematic diagram of the second fastener provided in the present invention.

[0028] In the figure: 101, cylinder; 102, fan; 103, rotor;

[0029] 1. Auxiliary plate; 2. Limiting hole; 3. Operation window; 4. Adjusting screw; 5. Fixed seat; 6. Clamping block; 7. Bidirectional threaded rod; 8. Assembly hole. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] like Figure 2-Figure 4 As shown, a quick-installation mechanism for an excimer gas circulation device includes two sets of auxiliary plates, and a limiting hole 2 and an operation window 3 are provided on the auxiliary plate 1. The operation window 3 is set in a rectangular shape and is located above the limiting hole 2. Among them, the limiting hole 2 is used for inserting the rotor 103, and the operation window 3 is used for technicians to insert and operate.

[0032] When using the quick-install mechanism of the present application to install the fan 102, the specific installation process is as follows: after the fan 102 to be installed is placed inside the cylinder 101, the two groups of auxiliary plates 1 can be placed at the two open ends of the cylinder 101 respectively, and at the same time, the limiting holes 2 on the auxiliary plates 1 are adapted to be fitted on the rotor 103 of the fan 102. In this state, the fan 102 as a whole will be connected by the two groups of auxiliary plates 1, that is, the fan 102 and the two groups of auxiliary plates 1 can form a movable whole, and then adjust the position of the auxiliary plate 1 at the open end of the cylinder 101 until the assembly hole 8 on the auxiliary plate 1 is opposite to the assembly hole position at the open end of the cylinder 101, that is, the position of the auxiliary plate 1 is adjusted to the accurate installation position, at this time, a pin shaft or the like can be inserted into the assembly hole to complete the locking of the auxiliary plate 1 on the cylinder 101. During the adjustment of the two sets of auxiliary plates 1, the position of the fan 102 will be driven inside the cylinder 101. When the positions of the two auxiliary plates 1 are adjusted and locked, the position of the fan 102 will be driven to the specified position inside the cylinder 101. This specified position is the position where the fan 102 is to be installed. The subsequent technicians can install the fan 102 by passing their hands through the operation window 3. During this installation process, since the two sets of auxiliary plates 1 have already lifted the position of the fan 102, there is no need for manual lifting, which is easy to use.

[0033] Since different types of fans 102 have rotors 103 of different diameters, in order to adapt to the installation of different types of fans 102, the present application provides a fastener for locking the rotor 103 at the limiting hole 2, and the fastener has the following two designs:

[0034] (1) Figure 3 As shown, the first type of fastener includes a plurality of adjusting screws 4 that are all threadedly mounted on the auxiliary plate 1, and one end of each adjusting screw 4 can extend into the limiting hole 2, and the plurality of adjusting screws 4 are arranged along the radial direction of the limiting hole 2, and the plurality of adjusting screws 4 are located at one end of the limiting hole 2 to form a clamping area. When the diameter of the rotor 103 is smaller than the limiting hole 2 and is inserted into the limiting hole 2, the corresponding adjusting screw 4 can be driven to rotate until the clamping area is adjusted to be smaller and the rotor 103 is clamped and fixed. It should be noted that in order to ensure the coaxiality between the limiting hole 2 and the rotor 103, the number of turns of the adjusting screw 4 can be kept consistent each time, that is, the circular clamping area formed is kept coaxial with the limiting hole 2.

[0035] (2) Figure 4 As shown, the second type of fastener includes a fixing seat 5 arranged on the auxiliary plate 1, and two clamping blocks 6 arranged opposite to each other are movably arranged on the fixing seat 5, and the two clamping blocks 6 are distributed on both sides of the limiting hole 2. A bidirectional threaded rod 7 is movably arranged on the fixing seat 5, and the bidirectional threaded rod 7 has two threaded sections with opposite threads, and the two clamping blocks 6 are respectively threadedly sleeved on the two threaded sections, and the fixing seat 5 is arranged on the side of the auxiliary plate 1 facing the cylinder 101. When the diameter of the rotor 103 is smaller than the limiting hole 2 and is inserted into the limiting hole 2, the bidirectional threaded rod 7 can be driven to rotate, so that the two clamping blocks 6 move closer to each other, and the two clamping blocks 6 move closer synchronously with the same movement trend, so that while the two clamping blocks 6 clamp and fix the rotor 103, the coaxial relationship between the rotor 103 and the limiting hole 2 can also be ensured.

[0036] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A quick-install mechanism for an excimer gas circulation device, characterized in that: The invention comprises two sets of auxiliary plates (1) which can be respectively installed at the two open ends of a cylinder (101), wherein the auxiliary plates (1) are provided with a limiting hole (2) and an operation window (3), wherein the limiting hole (2) is used for inserting a rotor (103), so that when the two sets of auxiliary plates (1) are respectively installed at the two open ends of the cylinder (101), the fan (102) will be limited to a specified position inside the cylinder (101), and then the fan (102) can be fixed through the operation window (3).

2. A quick-installation mechanism for an excimer gas circulation device according to claim 1, characterized in that: A fastener for locking the rotor (103) is provided at the limiting hole (2).

3. The quick-install mechanism for an excimer gas circulation device according to claim 2, characterized in that: The fastener comprises a plurality of adjusting screws (4) which are all threadedly mounted on the auxiliary plate (1), and one end of each adjusting screw (4) can extend into the limiting hole (2).

4. The quick-install mechanism for an excimer gas circulation device according to claim 3, characterized in that: The plurality of adjusting screws (4) are arranged along the radial direction of the limiting hole (2), and the plurality of adjusting screws (4) are located at one end of the limiting hole (2) to jointly form a clamping area of ​​adjustable size.

5. The quick-install mechanism for an excimer gas circulation device according to claim 2, characterized in that: The fastener comprises a fixing seat (5) arranged on the auxiliary plate (1), and two clamping blocks (6) arranged opposite to each other are movably arranged on the fixing seat (5), and the two clamping blocks (6) are distributed on both sides of the limiting hole (2). A bidirectional threaded rod (7) is movably arranged on the fixing seat (5), and the bidirectional threaded rod (7) has two threaded sections with opposite threads, and the two clamping blocks (6) are respectively threadedly sleeved on the two threaded sections.

6. The quick-install mechanism for an excimer gas circulation device according to claim 5, characterized in that: The fixing seat (5) is arranged on a side of the auxiliary plate (1) facing the cylinder (101).

7. A quick-installation mechanism for an excimer gas circulation device according to any one of claims 1 to 6, characterized in that: The auxiliary plate (1) is evenly provided with a plurality of assembly holes (8), and each assembly hole (8) is provided with a pin shaft and can be locked on the cylinder (101).

8. A quick-installation mechanism for an excimer gas circulation device according to any one of claims 1 to 6, characterized in that: The operation window (3) is configured in a rectangular shape and is located above the limiting hole (2).

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