Hexagonal lattice shadow effect particle collision point trajectory determination method, device, medium and product

Abstract

The invention discloses a method and equipment for determining a collision point track of shadow effect particles under a hexagonal lattice, a medium and a product, and relates to the field of theoretical simulation of dry etching and thin film deposition surface microtopography. The method comprises the following steps of: splitting a hexagonal lattice model into odd-number-layer lattice units and even-number-layer lattice units on the basis of the height of the number of layers of three-dimensional lattice stacking; the problem of spatial position dislocation between adjacent odd-even layers is solved by separately calculating the odd-even layers and then combining and comparing the odd-even layers, and the numerical processing difficulty is reduced; by determining the vertical distance between a vertical line and a particle flight path line, collision-free lattice units under the contour surface of the hexagonal lattice model are eliminated in real time, and the calculation amount is saved; by determining the projection component, the collision point of the particle and the surface three-dimensional shape in the flying process is obtained, efficient positioning of the collision point is achieved, and the efficiency of determining the collision point trajectory of the shadow effect particle under the hexagonal lattice is improved.

Description

Technical Field

[0001] The present application relates to the field of theoretical simulation of dry etching and thin film deposition surface micro-morphology, and in particular to a method, device, medium and product for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice. Background Art

[0002] Shadow effect is an important microscopic mechanism in the process of dry etching and thin film deposition, which will cause the etched surface to roughen, and the surface random structure at the nanometer or even micrometer scale will appear at the microscopic level. Traditionally, this roughening effect will affect the performance of components, and thus has become a problem that has plagued etching and deposition technology for many years. In recent years, this effect has been actively applied to the field of surface microtexture, and has gradually shown broad application prospects in many fields such as optics, environment, and biology. In order to achieve the regulation of surface micromorphology in different application scenarios, it is necessary to establish a theoretical simulation method for the evolution of surface micromorphology of dry etching and thin film growth under the action of shadow effect. At present, the relevant simulations mostly use the Monte Carlo method, which represents the etching substrate as a hexagonal or cubic lattice network, and uses the Monte Carlo method to generate random etching or deposition particles, that is, randomly select the initial position and movement direction of the particles, and then calculate the collision point trajectory of the etching / deposition surface; and remove (etch) or add (deposit) materials at the collision point, and finally obtain the evolution process of the etching profile. Among them, the collision point trajectory calculation is the core content of the entire simulation, and the efficiency of its algorithm directly determines the efficiency of the simulation process.

[0003] The collision point trajectory calculation method is directly related to the lattice network model used; currently, common models include cubic lattice model and hexagonal lattice model. Among them, the algorithm of the cubic lattice model is relatively simple, but it is only applicable to substrates with exact cubic lattice orientations. For non-cubic lattice materials or amorphous materials, it cannot provide sufficient symmetry and anisotropy. The hexagonal lattice model avoids the shortcomings of the cubic lattice and has higher applicability; however, due to the misalignment between rows and layers of the hexagonal lattice, the difficulty of numerical processing of lattice coordinates and trajectory calculation is significantly increased. Based on this, there is currently no report on the calculation method of shadow particle collision point trajectories under the hexagonal lattice model. Summary of the invention

[0004] The purpose of the present application is to provide a method, device, medium and product for determining the trajectory of collision points of particles with shadow effects under a hexagonal lattice, which can improve the efficiency of determining the trajectory of collision points of particles with shadow effects under a hexagonal lattice.

[0005] To achieve the above objectives, this application provides the following solutions:

[0006] In a first aspect, the present application provides a method for determining collision point trajectories of shadow effect particles under a hexagonal lattice, comprising:

[0007] Determine the layer height of the three-dimensional lattice stacking based on the three-dimensional surface morphology of the hexagonal lattice model;

[0008] Based on the layer height of the three-dimensional lattice stacking, the hexagonal lattice model is split into lattice units; the lattice units include: odd-numbered layer lattice units and even-numbered layer lattice units;

[0009] The length extension direction of the hexagonal lattice model is the positive direction of the X axis, the width extension direction of the hexagonal lattice model is the positive direction of the Y axis, and the height extension direction of the hexagonal lattice model is the positive direction of the Z axis to construct an actual space coordinate system;

[0010] Determine the XY plane of the lattice unit based on the real space coordinate system;

[0011] Taking a straight line passing through the center point of the lattice unit and perpendicular to the XY plane of the lattice unit as a vertical line, to obtain a first vertical line set;

[0012] Obtain particle flight trajectory lines in the hexagonal lattice model;

[0013] In the actual space coordinate system, determining the vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line as the first vertical distance;

[0014] Screening out vertical lines and lattice units whose first vertical distance is less than a set value from the first vertical line set to generate a second vertical line set and a first lattice set;

[0015] In the actual space coordinate system, determining the vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line as the second vertical distance;

[0016] Screening out the vertical line corresponding to a lattice whose second vertical distance is less than one and the lattice unit corresponding to the vertical line to form a third vertical line set and a second lattice set;

[0017] Obtaining the initial position of the deposited particles;

[0018] In the actual space coordinate system, determining the projection component of the distance from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set in the particle flight direction, and taking the lattice unit corresponding to the minimum projection component as the collision point between the particle and the three-dimensional surface topography during flight;

[0019] Based on the obtained collision points, the collision point trajectory of the particles with shadow effect under the hexagonal lattice is generated.

[0020] Optionally, the process of determining the center point of the lattice unit includes:

[0021] Obtaining the coordinates of the center point of the lattice unit in the lattice space coordinate system;

[0022] The coordinates of the center point of the lattice unit are converted into coordinates in the actual space coordinate system to obtain the center point of the lattice unit.

[0023] Optionally, the coordinates of the center points of the lattice units are processed in batches by writing a function formula.

[0024] Optionally, a straight line which is a center point of the lattice unit and perpendicular to an XY plane of the lattice unit is determined by writing a function formula to generate the first perpendicular line set.

[0025] Optionally, the vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line is determined by writing a function formula.

[0026] Optionally, the vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line is determined by writing a function formula.

[0027] Optionally, determining, in the actual space coordinate system, a projection component of a distance from an initial position of the deposited particle to a center point of a lattice unit in a second lattice set in a particle flight direction comprises:

[0028] In the real space coordinate system, determining a vector from an initial position of the deposited particle to a center point of a lattice unit in a second lattice set;

[0029] A particle flight trajectory vector is determined, and the projection component is determined based on the vector and the particle flight trajectory vector.

[0030] In a second aspect, the present application provides a computer device comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of the method for determining collision point trajectories of particles due to shadow effects under a hexagonal lattice as described in any one of the above.

[0031] In a third aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method for determining collision point trajectories of shadow effect particles under a hexagonal lattice as described in any one of the above.

[0032] In a fourth aspect, the present application provides a computer program product, comprising a computer program, which, when executed by a processor, implements the steps of the method for determining collision point trajectories of shadow effect particles under a hexagonal lattice as described in any one of the above.

[0033] According to the specific embodiments provided in this application, this application has the following technical effects:

[0034] The present application provides a method, device, medium and product for determining the trajectory of collision points of particles under the shadow effect in a hexagonal lattice. Based on the layer height of the three-dimensional lattice stack, the hexagonal lattice model is split into odd-numbered lattice units and even-numbered lattice units; by first separately calculating the odd and even layers and then merging and comparing them, the problem of spatial position misalignment between adjacent odd and even layers is solved, and the difficulty of numerical processing is reduced; by determining the vertical distance between the vertical line and the particle flight trajectory line, the lattice units without collision under the contour surface of the hexagonal lattice model are eliminated in real time, saving the amount of calculation; by determining the projection component, the collision point of the particle with the three-dimensional surface morphology during flight is obtained, and the efficient positioning of the collision point is achieved, thereby improving the efficiency of determining the trajectory of the collision point of the particle under the shadow effect in the hexagonal lattice. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 A schematic flow chart of a method for determining collision point trajectories of particles with shadow effects under a hexagonal lattice provided in one embodiment of the present application;

[0037] Figure 2 A schematic diagram of an implementation flow of a method for determining collision point trajectories of shadow effect particles under a hexagonal lattice provided in one embodiment of the present application;

[0038] Figure 3 A schematic diagram of an actual space coordinate system provided by another embodiment of the present application;

[0039] Figure 4 A schematic diagram of lattice position misalignment caused when the number of lattice layers (Z) is an even number of layers provided in another embodiment of the present application;

[0040] Figure 5 A schematic diagram of lattice position misalignment caused when the number of lattice layers (Z) is an odd number of layers provided in another embodiment of the present application;

[0041] Figure 6 A schematic diagram of theoretical simulation results of the morphology of the shadow effect under the hexagonal lattice at different levels using the method for determining the trajectory of the particle collision point of the shadow effect under the hexagonal lattice provided by the present application is provided as another embodiment of the present application;

[0042] Figure 7A schematic diagram of the structure of a computer device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0044] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0045] In an exemplary embodiment, Figure 1 and Figure 2 As shown, a method for determining the trajectory of a particle collision point under a shadow effect in a hexagonal lattice is provided. The method is executed by a computer device, and can be executed by a computer device such as a terminal or a server alone, or by a terminal and a server together. In the embodiment of the present application, the method is applied to a server as an example for explanation, and includes:

[0046] S1: Determine the layer height of the three-dimensional lattice stacking based on the surface three-dimensional morphology of the hexagonal lattice model.

[0047] S2: Based on the layer height of the three-dimensional lattice stacking, the hexagonal lattice model is split into lattice units. The lattice units include: odd-numbered lattice units and even-numbered lattice units. The odd-numbered lattice units form the lattice unit set Cells_odd_1, and the even-numbered lattice units form the lattice unit set Cells_even_1. Among them, the three-dimensional morphology of the surface is represented by lattice space coordinates. The lattice unit set Cells_odd_1 and the lattice unit set Cells_even_1 are represented by (X, Y, Z) coordinates, X = (x1, x2, x3…xi…xn), Y = (y1, y2, y3…yi…yn), Z = (z1, z2, z3…zi…zn). (xi, yi, zi) is the three-dimensional coordinate of a lattice, and its physical meaning is the point at the highest position zi of the lattice in the xith row and the yith column in the three-dimensional morphology of the surface.

[0048] S3: The length extension direction of the hexagonal lattice model is the positive direction of the X axis, the width extension direction of the hexagonal lattice model is the positive direction of the Y axis, and the height extension direction of the hexagonal lattice model is the positive direction of the Z axis to construct a real space coordinate system. The constructed real space coordinate system is as follows: Figure 3 shown.

[0049] S4: Determine the XY plane of the lattice unit based on the real space coordinate system.

[0050] S5: Taking a straight line passing through the center point of the lattice unit and perpendicular to the XY plane of the lattice unit as a perpendicular line, a first perpendicular line set is obtained.

[0051] In this step, the X and Y coordinates of the center points of the odd-numbered lattice units and the even-numbered lattice units are determined in the actual space coordinate system. Because the odd-numbered lattice units and the even-numbered lattice units are calculated separately, the first perpendicular line sets formed respectively include the odd-numbered perpendicular line set Lines_odd_1 and the even-numbered perpendicular line set Lines_even_1.

[0052] S6: Obtain the particle flight trajectory line in the hexagonal lattice model.

[0053] S7: In the actual space coordinate system, determine the vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line as the first vertical distance.

[0054] S8: Filter the vertical lines and lattice cells whose first vertical distance is less than a set value (e.g., 1 lattice) from the first vertical line set to generate the second vertical line set and the first lattice set. Similarly, the second vertical line set includes the vertical line set Lines_odd_2 and the vertical line set Lines_even_2. The first lattice set includes the lattice set Cells_odd_2 and the lattice set Cells_even_2.

[0055] S9: In the actual space coordinate system, determine the vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line as the second vertical distance. In this calculation process, the lattice below the ground surface can be eliminated, that is, the lattice whose height is lower than the lowest point of the hexagonal lattice model contour surface. Such lattices are below the ground surface and will not collide with the flying particles.

[0056] S10: Filter out the vertical line corresponding to the second vertical distance less than one lattice and the lattice unit corresponding to the vertical line to form a third vertical line set and a second lattice set. The third vertical line set includes the vertical line set Lines_odd_3 and the vertical line set Lines_even_3. The second lattice set includes the lattice set Cells_odd_3 and the lattice set Cells_even_3.

[0057] S11: Obtaining the initial position of the deposited particles.

[0058] S12: In the actual space coordinate system, determine the projection component of the distance from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set in the particle flight direction, and use the lattice unit corresponding to the minimum projection component as the collision point between the particle and the three-dimensional surface morphology during flight.

[0059] In actual application, the projection component of the distance from the initial position of the deposited particle to the center of each lattice unit in the lattice set Cells_odd_3 and the lattice set Cells_even_3 in the particle flight direction is determined. The lattice unit with the smallest projection component is the collision point between the particle and the three-dimensional surface morphology (i.e., the contour surface of the hexagonal lattice model) during flight.

[0060] S13: Generate collision point trajectories of shadow effect particles under the hexagonal lattice based on the obtained collision points.

[0061] In another exemplary embodiment of the present application, in step 5, the process of determining the center point of the lattice unit includes:

[0062] (1) Obtain the coordinates of the center point of the lattice unit in the lattice space coordinate system.

[0063] (2) The coordinates of the center point of the lattice unit are converted into coordinates in the actual space coordinate system to obtain the center point of the lattice unit.

[0064] In another exemplary embodiment of the present application, when calculating the X and Y coordinates of the center points of the odd-numbered layer lattice units and the odd-numbered layer lattice units in the actual space coordinates, since the conversion formula between the lattice space coordinates and the actual space coordinates is fixed, in order to improve the calculation efficiency, batch processing can be performed by writing a function formula.

[0065] Furthermore, in batch processing, the X, Y coordinates can be vectorized to improve computational efficiency through matrix operations.

[0066] In another exemplary embodiment of the present application, when calculating the vertical distance between each perpendicular line in the perpendicular line set Lines_odd_1 and the perpendicular line set Lines_even_1 and the particle flight trajectory line in the actual space coordinate, since the vertical distance calculation formula is fixed, in order to improve the calculation efficiency, batch processing can also be performed by writing a function formula.

[0067] In another exemplary embodiment of the present application, when calculating the distance between the center of each lattice strung by each perpendicular line in the perpendicular line set Lines_odd_2 and the perpendicular line set Lines_even_2 in the actual space coordinate and the particle flight trajectory line, since the calculation formula is fixed, in order to improve the calculation efficiency, batch processing can also be performed by writing a function formula.

[0068] In another exemplary embodiment of the present application, in the actual space coordinate system, determining the projection component of the distance from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set in the particle flight direction includes:

[0069] (1) In the real space coordinate system, determine the vector from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set.

[0070] (2) Determine the particle flight trajectory vector, and determine the projection component based on the vector and the particle flight trajectory vector. The projection component is expressed as:

[0071]

[0072] Among them, d represents the projection component, represents the vector from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set, Represents the particle flight trajectory vector.

[0073] In another exemplary embodiment of the present application, the advantages and implementation process of the method provided by the present application are described by taking the determination of the collision trajectory of thin film deposition particles under the shadow effect of the hexagonal lattice network as an example. In this embodiment, a computer is used as a calculation tool. Based on this, the implementation process of this embodiment includes:

[0074] Step 1: Import the three-dimensional morphology Surf lattice network of the hexagonal lattice model with a resolution of L×N. The data format of the Surf lattice network is a two-dimensional matrix with a size of (L,N). The value of each matrix element represents the height of the position in the lattice coordinates.

[0075] S2: Split the Surf lattice network into an odd-numbered lattice network and an even-numbered lattice network, forming a lattice unit set Surf_odd and a lattice unit set Surf_even respectively. The splitting method is to perform an odd-even judgment on the Surf lattice network. Surf_odd and the lattice unit set Surf_even are expressed as:

[0076] Surf_odd=Surf-mod(Surf,2).

[0077] Surf_even=Surf-mod(Surf+1,2).

[0078] Among them, the mod(a, b) function means returning the remainder when a is divided by b, which is used here to determine whether a is an even or odd number.

[0079] Then, the lattice cell sets Surf_odd and Surf_even are vectorized and converted into lattice cell sets Cells_odd_1 and Cells_even_1 in the data format of [X, Y, Z]. X, Y, Z represent the x, y, z coordinates of all lattice cells in the lattice coordinate system, the size of X, Y, Z is (L×N, 1, 0), and the size of lattice cell sets Cells_odd_1 and Cells_even_1 is (L×N, 3, 0).

[0080] S3: Calculate the coordinates (X_real, Y_real, Z_real) of the centers of the odd-numbered lattice cells and the even-numbered lattice cells in real space coordinates. Specifically, batch calculations of X, Y, and Z in the lattice cell set Cells_odd_1 and the lattice cell set Cells_even_1 are performed by writing a coordinate conversion function. The calculation formula of the function is as follows:

[0081] Z_real=(Z-0.5)*Z*size_lattice_z.

[0082] Y_real=(Y-0.5)*Y*size_lattice_y+mod(X,2)*offset_yx.

[0083] X_real=(X-0.5)*X*size_lattice_x+mod(Z+1,2)*offset_xz.

[0084] in, size_lattice_y=1, Respectively represent the size of the lattice unit in the x, y, and z directions. offset_yx=0.5, The odd and even numbers of the lattice layers (Z) and columns (X) respectively cause the lattice units to be misaligned in the y and x directions. Figure 4 and Figure 5 shown.

[0085] Then, according to the calculated X_real (including X_real_odd and X_real_even) and Y_real (including Y_real_odd and Y_real_even), the odd-layer vertical line set Lines_odd_1 and the even-layer vertical line set Lines_even_1 are established. The data format of the vertical line set is [X_real, Y_real, Vector], where X_real and Y_real are the x and y coordinates of the passing point respectively, and Vector is the vector representing the direction of the vertical line, which is (0,0,1).

[0086] S4: Calculate the vertical distance between each vertical line in the odd-numbered vertical line set Lines_odd_1 and the even-numbered vertical line set Lines_even_1 and the particle flight trajectory line in the actual space coordinates. Specifically, write the line-to-line distance calculation function Distances_lines2line to directly perform batch calculation processing on the X and Y vectors. The input parameters of this function are (X_real, Y_real). The output parameter is the Distances_1 vector. The size of the Distances_1 vector is (L×N, 1). The distance value calculated in the Distances_1 vector corresponds one-to-one to the row coordinates of (X_real, Y_real) to facilitate vectorized batch processing.

[0087] S5: Filter out the vertical lines and their corresponding lattice cells in the Distances_1 vector that are less than one lattice, forming a vertical line set Lines_odd_2 and a vertical line set Lines_even_2, as well as a lattice set Cells_odd_2 and a lattice set Cells_even_2.

[0088] S6: Calculate the vertical distance between the center of the lattice strung by each vertical line in the vertical line set Lines_odd_2 and the vertical line set Lines_even_2 and the particle flight trajectory line in the real space coordinates. Specifically, batch calculation processing is performed by writing a point-line distance calculation function Distances_points2line. The output parameter of this function is the Distances_2 vector. The size of the Distances_2 vector is (L×N, 1). The Distances_2 vector corresponds to the row coordinates of [X_real, Y_real] one by one.

[0089] S7: Filter out the lattice units whose distance from the lattice center to the particle flight trajectory is less than one lattice size, and the particles will collide at the above lattice units during the flight process. Filter out the vertical line and the corresponding lattice unit to form the vertical line set Lines_odd_3 and the vertical line set Lines_even_3, as well as the lattice set Cells_odd_3 and the lattice set Cells_even_3.

[0090] S8: Calculate the projection component of the distance from the initial position of the deposited particle to the center of each lattice unit in the lattice set Cells_odd_3 and the lattice set Cells_even_3 in the particle flight direction in the actual space coordinate.

[0091] The calculation method of the projection component is:

[0092] First, calculate the vector from the initial position of the deposited particle to the center of the lattice unit Then determine the projection component (ie, projection distance) d.

[0093] The lattice unit with the smallest projection component is the first collision point between the particle and the three-dimensional surface contour during flight, that is, the desired collision point.

[0094] Corresponding to different simulation times, the three-dimensional morphology profile evolution results under the simulated shadow effect calculated by the method provided by this application are as follows: Figure 6 As shown. Among them, Figure 6 Part (a) is a schematic diagram of the three-dimensional morphology evolution of the five-layer lattice unit under the shadow effect calculated and simulated. Figure 6 Part (b) is a schematic diagram of the three-dimensional morphology evolution of the 10-layer lattice unit under the shadow effect calculated and simulated. Figure 6 Part (c) is a schematic diagram of the three-dimensional morphology evolution of the 15-layer lattice unit under the shadow effect calculated and simulated. Figure 6 Part (d) is a schematic diagram of the three-dimensional morphology contour evolution results of the 20-layer lattice unit under the shadow effect simulated by calculation.

[0095] Based on the above description, compared with the known technology, the present application also has the following advantages:

[0096] 1. This application can realize the simulation of shadow effect under the hexagonal lattice.

[0097] 2. The calculation process of this application adopts a process-based and vectorized processing approach, and can perform batch matrix operations by writing function formulas to improve calculation efficiency.

[0098] In an exemplary embodiment, a computer device is provided. The computer device may be a server or a terminal. The internal structure diagram thereof may be as follows: Figure 7As shown. The computer device includes a processor, a memory, an input / output interface (Input / Output, referred to as I / O) and a communication interface. Among them, the processor, the memory and the input / output interface are connected through a system bus, and the communication interface is connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used to store data for determining the trajectory of the collision point of the shadow effect particle under the hexagonal lattice. The input / output interface of the computer device is used to exchange information between the processor and an external device. The communication interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a method for determining the trajectory of the collision point of the shadow effect particle under the hexagonal lattice is implemented.

[0099] Those skilled in the art will understand that Figure 7 The structure shown in the figure is only a block diagram of a part of the structure related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components. In an exemplary embodiment, a computer device is provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above-mentioned method embodiments when executing the computer program.

[0100] In an exemplary embodiment, a computer-readable storage medium is provided, storing a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0101] In an exemplary embodiment, a computer program product is provided, including a computer program, and when the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0102] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of relevant data must comply with relevant regulations.

[0103] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM may be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0104] The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. The non-relational database may include a distributed database based on blockchain, etc., but is not limited thereto. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, etc., but is not limited thereto.

[0105] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0106] This article uses specific examples to illustrate the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and core ideas of this application. At the same time, for those skilled in the art, according to the ideas of this application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this application.

Claims

1. A method for determining the trajectory of particle collision points under the shadow effect of a hexagonal lattice, characterized in that: The method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice comprises: Determine the layer height of the three-dimensional lattice stacking based on the three-dimensional surface morphology of the hexagonal lattice model; Based on the layer height of the three-dimensional lattice stacking, the hexagonal lattice model is split into lattice units; the lattice units include: odd-numbered layer lattice units and even-numbered layer lattice units; The length extension direction of the hexagonal lattice model is the positive direction of the X axis, the width extension direction of the hexagonal lattice model is the positive direction of the Y axis, and the height extension direction of the hexagonal lattice model is the positive direction of the Z axis to construct an actual space coordinate system; Determine the XY plane of the lattice unit based on the real space coordinate system; Taking a straight line passing through the center point of the lattice unit and perpendicular to the XY plane of the lattice unit as a vertical line, to obtain a first vertical line set; Obtain particle flight trajectory lines in the hexagonal lattice model; In the actual space coordinate system, determining the vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line as the first vertical distance; Screening out vertical lines and lattice units whose first vertical distance is less than a set value from the first vertical line set to generate a second vertical line set and a first lattice set; In the actual space coordinate system, determining the vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line as the second vertical distance; Screening out the vertical line corresponding to a lattice whose second vertical distance is less than one and the lattice unit corresponding to the vertical line to form a third vertical line set and a second lattice set; Obtaining the initial position of the deposited particles; In the actual space coordinate system, determining the projection component of the distance from the initial position of the deposited particle to the center point of the lattice unit in the second lattice set in the particle flight direction, and taking the lattice unit corresponding to the minimum projection component as the collision point between the particle and the three-dimensional surface topography during flight; Based on the obtained collision points, the collision point trajectory of the particles with shadow effect under the hexagonal lattice is generated.

2. The method for determining the collision point trajectory of shadow effect particles under the hexagonal lattice according to claim 1, characterized in that: The process of determining the center point of the lattice unit includes: Obtaining the coordinates of the center point of the lattice unit in the lattice space coordinate system; The coordinates of the center point of the lattice unit are converted into coordinates in the actual space coordinate system to obtain the center point of the lattice unit.

3. The method for determining the collision point trajectory of particles with shadow effect under hexagonal lattice according to claim 2, characterized in that: The coordinates of the center points of the lattice units are processed in batches by writing a function formula.

4. The method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice according to claim 1, characterized in that: The center point of the lattice unit and a straight line perpendicular to the XY plane of the lattice unit are determined by writing a function formula to generate the first perpendicular line set.

5. The method for determining collision point trajectory of shadow effect particles under hexagonal lattice according to claim 1, characterized in that: The vertical distance between each vertical line in the first vertical line set and the particle flight trajectory line is determined by writing a function formula.

6. The method for determining the trajectory of the shadow effect particle collision point under the hexagonal lattice according to claim 1, characterized in that: The vertical distance between the center point of the lattice unit strung by each vertical line in the second vertical line set and the particle flight trajectory line is determined by writing a function formula.

7. The method for determining collision point trajectory of shadow effect particles under hexagonal lattice according to claim 1, characterized in that: Determining, in the actual space coordinate system, a projection component of a distance from an initial position of the deposited particle to a center point of a lattice unit in a second lattice set in a particle flight direction comprises: In the real space coordinate system, determining a vector from an initial position of the deposited particle to a center point of a lattice unit in a second lattice set; A particle flight trajectory vector is determined, and the projection component is determined based on the vector and the particle flight trajectory vector.

8. A computer device comprising: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the method for determining the collision point trajectory of particles with shadow effects under a hexagonal lattice according to any one of claims 1 to 7.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method for determining the collision point trajectory of shadow effect particles under a hexagonal lattice according to any one of claims 1 to 7 is implemented.

10. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the method for determining the collision point trajectory of shadow effect particles under a hexagonal lattice according to any one of claims 1 to 7 is implemented.

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