Thin film sheet separation device

Abstract

The present invention relates to a thin film sheet separation device. The thin film sheet separation device described in the present invention includes: a shell component is provided with a guide hole along the lifting direction; there are at least two top blocks that are slidably sleeved on each other, the top block includes a lifting part and a sliding part, the lifting part is slidably arranged in the guide hole, the sliding part is provided with a slide groove, the slide groove is penetrated by the same roller, the roller is arranged on the sliding seat, the slide groove is respectively provided with non-overlapping inclined sections, when the roller moves in the inclined section, it drives the corresponding top block to move along the lifting direction; the driving component drives the sliding seat to slide through the push rod, and then drives the roller to slide along the slide groove. The thin film sheet separation device described in the present invention has the advantages of simple and compact structure, high flexibility, and not easy to get stuck.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal solidification, in particular to a thin film and sheet separation device. Background Art

[0002] During the chip picking process, since the chip is usually attached to a film, a lifting device is required to lift the film upwards so that the chip corresponding to the area is initially separated from the film before the chip can be completely separated from the film by a pickup device such as a suction nozzle. However, the chip is usually thin and brittle. During the lifting process, the outer edge of the chip is prone to breakage when it is separated from the film, resulting in material waste. The lifting devices currently used in the industry mostly adopt a multi-stage structure, which includes an internal shell, and a plurality of lifting assemblies located in the shell that are mutually nested and can move relative to each other in the axial direction, a spring abutting between two adjacent layers of lifting assemblies, and a drive assembly that drives the innermost layer of lifting assembly to lift. When in use, the drive assembly moves, driving the lifting assembly to lift as a whole. When the outer layer of the lifting assembly abuts against the limit part, it stops moving. At this time, the spring is compressed, so that the inner layer of the lifting assembly can continue to lift upward with the drive assembly. At this time, the abutment area between the lifting end of the lifting assembly and the film is reduced, thereby expanding the area where the edge of the chip is separated from the film. By analogy, the lifting end of the lifting assembly eventually forms a "triangle" structure with an upward bulge in the middle, completing the initial separation of the wafer and film. However, in actual use, this lifting device is prone to jamming or even freezing of the lifting assembly, affecting production efficiency. Summary of the Invention

[0003] Based on this, the object of the present invention is to provide a thin film sheet separation device, which has the advantages of simple and compact structure, high flexibility and not prone to jamming.

[0004] A thin film sheet separation device, comprising:

[0005] A shell assembly, wherein the shell assembly is provided with a guide hole along the jacking direction;

[0006] A top block, wherein the top blocks are at least two and are slidably sleeved with each other, the top block includes a lifting portion and a sliding portion, the lifting portion is slidably arranged in the guide hole, the sliding portion is provided with a slide groove, the slide groove is penetrated by a same roller, the roller is arranged on the sliding seat, the slide grooves are respectively provided with inclined sections that do not overlap with each other, and when the roller moves on the inclined section, the corresponding top block is driven to move along the lifting direction;

[0007] A driving assembly drives the sliding seat to slide through a push rod, thereby driving the roller to slide along the sliding groove.

[0008] The thin film and sheet separation device described in this invention controls the lifting of the top block through the coordination of rollers and inclined chutes. Compared to traditional structures, it is less prone to jamming and does not require springs, limiters, or other structures to control the lifting process, making the overall structure simpler and more compact. Furthermore, the movement of the top block in this solution is achieved through the design of the inclined section, simplifying the design process and making the top block more flexible.

[0009] Furthermore, in the initial state, the roller is located at the initial section of the chute, and the travel height of the inclined section along the lifting direction increases successively from the externally mounted top block to the internally mounted top block. The inclination angles of the inclined sections are equal or increase successively from the externally mounted top block to the internally mounted top block. This structure can realize the lifting method of the traditional top block while accelerating the lifting speed and improving the lifting efficiency.

[0010] Furthermore, in its initial state, the roller is located in the initial section of the chute. The chute is provided with lifting sections at both ends, each connected to the inclined section and the initial section. The tilt direction of the lifting sections is opposite to that of the inclined sections, and the lifting sections overlap. The distance between the inclined section and the initial section increases from the externally mounted top block to the internally mounted top block, or the tilt angle of the inclined section decreases from the externally mounted top block to the internally mounted top block. This structure changes the traditional lifting method and reduces the risk of wafer breakage.

[0011] Furthermore, a mounting seat is provided inside the housing assembly, the sliding seat is slidably provided on the mounting seat, an inclined slot is provided on the sliding seat, the push rod is inserted into the mounting seat, and a slide rod is provided on the push rod, the slide rod slides through the inclined slot, thereby converting the axial movement of the push rod into the lateral movement of the mounting seat. This structure makes it less likely for the top block to get stuck during the sliding process and improves the smoothness of the top block's sliding.

[0012] Furthermore, the mounting seat is provided with a baffle for limiting the sliding stroke of the sliding seat, and both sides of the sliding seat are provided with guide bosses that slide in contact with the side surfaces of the mounting seat. This structure limits the sliding direction and stroke length of the sliding seat.

[0013] Furthermore, a stopper is provided in the mounting seat, the stopper having a sliding hole, the push rod slidingly passing through the sliding hole, the push rod having an abutment head for abutting the drive assembly, and a return spring compressed between the abutment head and the stopper. This structure enables the device to achieve automatic reset.

[0014] Furthermore, the housing assembly includes an outer shell, a cover plate, and an upper connector. The outer shell is provided with a chamber for accommodating the mounting seat. The cover plate is detachably connected to the outer shell via the upper connector. The cover plate is provided at one end of the outer shell and covers the chamber. The guide hole is provided in the middle of the cover plate. The housing assembly is easy to disassemble and maintain.

[0015] Furthermore, the upper connecting member is provided with a first abutting flange, the cover plate is provided with a positioning groove corresponding to the first abutting flange, and the first abutting flange extends toward the positioning groove and abuts against the cover plate. This structure can achieve the fixation of the cover plate.

[0016] Furthermore, the housing assembly further includes a lower connecting piece with a threaded inner wall, the bottom of the housing is provided with an outwardly protruding positioning boss, the lower connecting piece is sleeved on the bottom of the housing and provided with a second abutting flange that abuts against the top surface of the positioning boss. This structure facilitates assembly and disassembly of the device.

[0017] Furthermore, the housing chamber is provided with an integrally formed mounting boss, the mounting seat being mounted on the mounting boss and axially dividing the chamber into a negative pressure chamber and a receiving chamber. The cover plate is also provided with a plurality of adsorption holes communicating with the negative pressure chamber. This structure ensures a tight fit between the film and the cover plate during operation, facilitating separation of the film from the wafer.

[0018] For better understanding and implementation, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is the overall structural diagram of the jacking device;

[0020] Figure 2 is a cross-sectional view of the jacking device;

[0021] Figure 3 An exploded view of the assembly of the housing and the cover;

[0022] Figure 4 This is a structural diagram of the jacking assembly;

[0023] Figure 5 This is the assembly exploded view of the top block;

[0024] Figure 6 A partial diagram of the chute in one embodiment;

[0025] Figure 7 A structural diagram of the top block in another embodiment;

[0026] Figures 8-13 is the operation flow chart, where Figure 8 is the initial state, Figure 9 To lift all the top blocks at the same time, Figure 10 For the first top block to descend, Figure 11 As the second top block descends, Figure 12 As the third top block descends, Figure 13 The final state of the top block.

[0027] Description of reference numerals:

[0028] 11. Housing; 111. Limiting boss; 112. Positioning boss; 113. Mounting boss; 114. Negative pressure chamber; 115. Accommodating chamber; 12. Cover plate; 121. Adsorption hole; 122. Positioning groove; 123. Plane; 124. Guide hole; 13. Upper connecting member; 131. First abutting flange; 14. Lower connecting member; 141. Second abutting flange; 21. Mounting seat; 211. Baffle; 22. Push rod; 221. Abutting head; 222. Sliding rod; 23. Sliding seat; 231. Guide boss; 232. Inclined groove; 233. Roller; 234. Bearing; 24. Stopper; 2 5. Return spring; 3. First top block; 31. First lifting part; 32. First sliding part; 33. First lifting cavity; 34. First slide; 4. Second top block; 41. Second lifting part; 42. Second sliding part; 43. Second lifting cavity; 44. Second slide; 5. Third top block; 51. Third lifting part; 52. Third sliding part; 53. Third lifting cavity; 54. Third slide; 6. Fourth top block; 61. Fourth lifting part; 62. Fourth sliding part; 63. Fourth slide; 71. Inclined section; 72. Initial section; 73. Lifting section; 74. Holding section; 75. Final section. DETAILED DESCRIPTION

[0029] See also Figure 1-5 , Figure 1 is the overall structural diagram of the jacking device; Figure 2 is a cross-sectional view of the jacking device; Figure 3 An exploded view of the assembly of the housing and the cover; Figure 4 This is a structural diagram of the jacking assembly; Figure 5 This is an exploded view of the lift block assembly. The present invention discloses a film-sheet separation device for initially separating a film from a sheet adhered to its surface, facilitating subsequent retrieval of the sheet. The film can be a semiconductor sheet such as a wafer. The separation device includes a housing assembly, a lifting assembly disposed within the housing assembly, and a drive assembly (not shown) that causes the lifting assembly to lift the wafer.

[0030] The housing assembly includes an outer shell 11, a cover plate 12, an upper connector 13, and a lower connector 14. The outer shell 11 defines an axially extending chamber. The cover plate 12 is positioned on top of the outer shell 11 and covers the chamber. Several suction holes 121 are defined in the cover plate 12. During use, a vacuum device can be connected externally to create a negative pressure within the chamber. During the lifting process, the film adheres tightly to the cover plate 12 through the suction holes 121, allowing the film to be peeled off the wafer.

[0031] The cover plate 12 and the housing 11 can be integrally formed, or connected by gluing, threading, snapping, or interlocking. In this embodiment, the bottom of the cover plate 12 abuts against the top of the housing 11, and the upper connector 13 is sleeved onto the exterior of the cover plate 12 and threadedly connected to the housing 11. The upper connector 13 is provided with a first abutting flange 131, which extends toward the center of the through hole and abuts against the top of the cover plate 12, thereby sandwiching the cover plate 12 between the housing 11 and the first abutting flange 131, achieving detachable fixation of the cover plate 12 and the housing 11.

[0032] Preferably, a positioning groove 122 corresponding to the first abutting flange 131 is provided on the cover plate 12, and the first abutting flange 131 extends into the positioning groove 122, so that the top surface of the upper connecting member 13 is not higher than the top surface of the cover plate 12, thereby preventing damage to other chips on the film.

[0033] To prevent the cover 12 from rotating relative to the housing 11, a flat surface 123 is provided on the outer wall of the cover 12, and the housing 11 is provided with a stop boss 111 that abuts against the flat surface 123. The flat surface 123 and the stop boss 111 can be provided at two locations, symmetrically arranged along a diameter as the axis of symmetry.

[0034] The bottom of the housing 11 is provided with an outwardly protruding positioning boss 112. The lower connector 14 is sleeved onto the bottom of the housing 11 and is provided with a second abutment flange 141 extending toward the center and abutting against the top surface of the positioning boss 112. When the lower connector 14 is threadedly connected to an external device via the threads provided on the inner wall, the second abutment flange 141 simultaneously compresses and secures the housing 11 during the process of rotating the lower connector 14 to tighten it.

[0035] An integrally formed mounting boss 113 is provided within the housing 11. The lifting assembly is mounted on the mounting boss 113 and axially divides the housing 11 into a negative pressure chamber 114 and a receiving chamber 115. The negative pressure chamber 114 communicates with the adsorption holes 121. The receiving chamber 115 extends toward the bottom of the housing 11 and communicates with the exterior.

[0036] The jacking assembly includes a mounting seat 21, a push rod 22, a sliding seat 23 and a plurality of jacking blocks. The push rod 22 drives the jacking blocks to move up and down through the sliding seat 23.

[0037] The mounting seat 21 is fastened to the positioning boss 112 by screws. A sliding cavity is provided inside the mounting seat 21, and the sliding cavity is communicated with the accommodating cavity 115. A stopper 24 is provided in the sliding cavity to abut against the driving component, and the stopper 24 is provided with a sliding hole, and the push rod 22 is slidably passed through the sliding hole. Preferably, the push rod 22 is provided with an abutment joint 221, and a return spring 25 is compressed and provided between the abutment joint 221 and the stopper 24. When the push rod 22 is pushed upward by the thrust, the return spring 25 is compressed. When the thrust is withdrawn, the return spring 25 is released, thereby pushing the push rod 22 to move downward to achieve reset.

[0038] The sliding seat 23 is slidably mounted on top of the mounting seat 21. Baffles 211 are provided on either side of the top of the mounting seat 21 to limit the sliding travel of the sliding seat 23. Guide bosses 231 are also provided on either side of the sliding seat 23, which slide in contact with the sides of the mounting seat 21 to guide and limit the sliding direction of the sliding seat 23. An inclined slot 232 is defined in the sliding seat 23, and a sliding rod 222 is provided on the push rod 22. The sliding rod 222 extends through the inclined slot 232 and slides along the slot, thereby converting axial movement of the push rod 22 into lateral movement of the mounting seat 21.

[0039] The cover plate 12 is provided with a guide hole 124, through which the top block slides. There are at least two top blocks, and the number can be selected based on actual conditions, for example, two, three, or more. In this embodiment, four top blocks are used as an example. The four top blocks are a first top block 3, a second top block 4, a third top block 5, and a fourth top block 6.

[0040] The first top block 3 includes a first lifting portion 31 and a first sliding portion 32. The first lifting portion 31 and the first sliding portion 32 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The first lifting portion 31 is inserted into the guide hole 124, and its outer shape is adapted to the shape of the guide hole 124. A first lifting cavity 33 is provided inside the first lifting portion 31. The top surface of the first lifting portion 31 is used to abut against the film, and its bottom end is connected to the first sliding portion 32. The first sliding portion 32 is provided with a first slide groove 34, and a roller 233 is inserted into the first slide groove 34. The roller 233 is rotatably connected to the sliding seat 23 through a bearing 234. A groove recessed along the lifting direction is also provided in the first sliding portion 32.

[0041] The second top block 4 includes a second lifting portion 41 and a second sliding portion 42. The second lifting portion 41 and the second sliding portion 42 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The second lifting portion 41 is inserted into the first lifting cavity 33, and its outer shape is adapted to the shape of the first lifting cavity 33. A second lifting cavity 43 is provided inside the second lifting portion 41. The top surface of the second lifting portion 41 is used to abut against the film, and its bottom end is connected to the second sliding portion 42. The second sliding portion 42 is provided with a second slide groove 44, and the roller 233 is inserted into the second slide groove 44. The second sliding portion 42 is arranged in the groove of the first sliding portion 32, and a groove recessed along the lifting direction is also provided in the second sliding portion 42.

[0042] The third top block 5 includes a third lifting part 51 and a third sliding part 52. The third lifting part 51 and the third sliding part 52 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The third lifting part 51 is arranged in the second lifting cavity 43, and its outer shape is adapted to the shape of the second lifting cavity 43. A third lifting cavity 53 is provided inside the third lifting part 51. The top surface of the third lifting part 51 is used to abut against the film, and its bottom end is connected to the third sliding part 52. The third sliding part 52 is provided with a third slide groove 54, and the roller 233 is passed through the third slide groove 54. The third sliding part 52 is arranged in the groove of the second sliding part 42, and a groove concave along the lifting direction is also provided in the third sliding part 52.

[0043] The fourth top block 6 includes a fourth lifting portion 61 and a fourth sliding portion 62. The fourth lifting portion 61 and the fourth sliding portion 62 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The fourth lifting portion 61 is inserted into the third lifting cavity 53, and its outer shape is adapted to the shape of the third lifting cavity 53. It can have a hole inside, or it can be a solid structure. The top surface of the fourth lifting portion 61 is used to abut against the film, and its bottom end is connected to the fourth sliding portion 62. The fourth sliding portion 62 is provided with a fourth slide groove 63, and the roller 233 is inserted into the fourth slide groove 63. The fourth sliding portion 62 is arranged in the groove of the third sliding portion 52.

[0044] The first, second, third, and fourth chutes 34, 44, 54, and 63 are each provided with an inclined section 71 and are supported by the same roller 233. When the roller 233 moves upward along the inclined section 71, the corresponding push block descends; when the roller 233 moves in the opposite direction, the corresponding push block ascends, thereby lifting the film.

[0045] The structure of the chute can be designed according to the path, speed and sequence of the lifting of the top block.

[0046] In one embodiment, the starting points of the inclined sections 71 are all located on the same straight line, which is parallel to the axial direction of the roller 233. The travel height of the inclined section 71 along the lifting direction increases successively from the first top block 3 to the fourth top block 6, and the inclination angle of the inclined section 71 is equal or increases successively from the first top block 3 to the fourth top block 6. When the roller 233 abuts the initial points of the first chute 34, the second chute 44, the third chute 54 and the fourth chute 63, the top ends of the first lifting part 31, the second lifting part 41, the third lifting part 51 and the fourth lifting part 61 are located on the same plane 123 and are flush with the cover plate 12. After the roller 233 passes through the inclined section 71, the top ends of the first lifting part 31, the second lifting part 41, the third lifting part 51 and the fourth lifting part 61 all protrude from the cover plate 12 and form a "triangle" structure. At this time, the lifting parts complete the preliminary separation of the film and the wafer.

[0047] When the roller 233 rolls to the inclined section 71, the first top block 3, the second top block 4, the third top block 5 and the fourth top block 6 are lifted simultaneously. Figure 6 , Figure 6 This is a partial view of the chute in one embodiment. Specifically, the first top block 3 is first lifted into place, followed by the second top block 4, the third top block 5 and the fourth top block 6, thereby finally forming a "triangle" structure.

[0048] When the inclination angles are different, the inclination angle of the inclined section 71 of the first top block 3 is the smallest, so its lifting speed is the slowest, the lifting speed of the second top block 4 is faster than that of the first top block 3, and the lifting speed of the third top block 5 is slower than that of the fourth top block 6. The inclination angle of the inclined section 71 of the fourth top block 6 is the largest, and its lifting speed is the fastest, thus forming a "triangle" structure during the lifting process.

[0049] The two ends of the slide groove are also provided with an initial section and an end section, so as to set a margin for the moving stroke of the roller 233 and prevent the top block of the roller 233 from colliding or getting stuck.

[0050] See also Figure 7-13 , Figure 7 A structural diagram of the top block in another embodiment; Figures 8-13 is the operation flow chart, where Figure 8 is the initial state, Figure 9 To lift all the top blocks at the same time, Figure 10 For the first top block to descend, Figure 11 As the second top block descends, Figure 12 As the third top block descends, Figure 13 The final state of the top block.

[0051] In another embodiment, the first chute 34, the second chute 44, the third chute 54, and the fourth chute 63 are further provided with lifting sections 73 that are connected to and overlap the inclined section 71, and the inclined direction of the lifting sections 73 is opposite to that of the inclined section 71. When the roller 233 abuts the lifting sections 73, the first top block 3, the second top block 4, the third top block 5, and the fourth top block 6 are lifted simultaneously at the same speed, with their top ends in the same plane 123, thereby lifting the film and wafer.

[0052] The inclined sections 71 of the first, second, third, and fourth chutes 34, 44, 54, and 63 have the same inclination angle and travel length. In the initial state, the roller 233 is located at one end of the chute, and the distance between the inclined section 71 and this end increases sequentially from the first top block 3 mounted on the outside to the fourth top block 6 mounted on the inside. Specifically, a retaining section 74 is provided between the inclined section 71 and the lifting section 73. The travel lengths of the retaining sections 74 of the first, second, third, and fourth top blocks 3, 4, 5, and 6 increase sequentially, so that the roller 233 arrives at the inclined sections 71 of each chute in a sequential order. When the roller 233 moves from the retaining section 74 to the inclined section 71, it first reaches the inclined section 71 of the first top block 3. The first top block 3 descends, causing the film at the edge of the wafer to begin to separate from the wafer. As the first top block 3 descends, the roller 233 sequentially reaches the inclined section 71 of the second top block 4 and the inclined section 71 of the third top block 5, causing the second and third top blocks 4 and 5 to descend in sequence. Since the fourth top block 6 is still in the lifting state, it lifts the wafer. Therefore, when the second and third top blocks 4 and 5 descend in sequence, the film returns to its original position, further separating the wafer edge from the film, achieving preliminary separation of the wafer and film. Finally, the roller 233 reaches the inclined section 71 of the fourth top block 6, returning it to its original position, thereby facilitating the pickup device to absorb the wafer.

[0053] Of course, the holding section 74 can also be omitted, so that the inclined section 71 is directly connected to the lifting section 73. At this time, the inclined sections 71 of the first slide 34, the second slide 44, the third slide 54 and the fourth slide 63 have different inclination angles, so that the descending speeds of the first top block 3, the second top block 4, the third top block 5 and the fourth top block 6 are different, that is, the inclination angle of the inclined section 71 decreases successively from the first top block 3 arranged on the outside to the fourth top block 6 arranged on the inside, thereby realizing the sequential descent from the first top block 3 to the fourth top block 6, and achieving the effect of preliminary separation of the chip and the film.

[0054] Preferably, the holding section 74 extends horizontally. When the roller 233 abuts against the holding section 74, the top blocks are kept at the highest position, thus achieving the transition between rising and falling of the top blocks.

[0055] An initial section 72 and an end section 75 are further provided at both ends of the slide groove. The initial section 72 is connected to the lifting section 73, and the end section 75 is connected to the inclined section 71, thereby setting a margin for the moving stroke of the roller 233 to avoid collision or jamming of the top block of the roller 233.

[0056] The drive assembly penetrates the accommodating cavity 115 and connects to the push rod 22, thereby driving the push rod 22 to reciprocate axially. The drive assembly can be an axially telescopic motor whose output shaft is connected to the push rod 22; or a structure in which a rotary motor drives a camshaft, whose cam abuts the push rod 22.

[0057] During use, the film is placed on the cover plate 12 and adheres to it through the suction holes 121. The drive assembly then activates, driving the push rod 22 upward. This push rod 22 pushes the slide bar 222, which slides along the chute 232, driving the slide seat 23 laterally. This causes the roller 233 to slide along the chute, which in turn drives the lift block upward. This lift lifts the wafer, separating it from the film. The drive assembly then resets, and the return spring 25 pushes the push rod 22 downward, completing the reset of the entire assembly.

[0058] The thin film and sheet separation device described in this invention controls the lifting of the top block through the coordination of rollers and inclined chutes. Compared to traditional structures, it is less prone to jamming and does not require springs, limiters, or other structures to control the lifting process, making the overall structure simpler and more compact. Furthermore, the movement of the top block in this solution is achieved through the design of the inclined section, simplifying the design process and making the top block more flexible.

[0059] It should be understood that in the description of this application, the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. The terms "first", "second", "third" and "fourth" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features, that is, the features defined as "first", "second", "third" and "fourth" may explicitly or implicitly include one or more of the features. In addition, unless otherwise specified, "multiple" means two or more.

[0060] It should be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "connected," "connected," and "hollow" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0061] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous modifications and improvements without departing from the spirit of the present invention, and the present invention is intended to encompass such modifications and variations.

Claims

1. A thin film sheet separation device, characterized in that: include: A housing assembly, wherein the housing assembly is provided with a guide hole along the lifting direction and a sliding seat is provided in the housing assembly; A top block, wherein the top blocks are at least two and are slidably sleeved with each other, the top block includes a lifting portion and a sliding portion, the lifting portion is slidably arranged in the guide hole, the sliding portion is provided with a slide groove, the slide groove is penetrated by a same roller, the roller is arranged on the sliding seat, the slide grooves of the at least two top blocks are respectively provided with inclined sections that do not overlap with each other, and when the roller moves on the inclined section, the corresponding top block is driven to move along the lifting direction; A driving assembly, wherein the driving assembly drives the sliding seat to slide via a push rod, thereby driving the roller to slide along the sliding groove; The chutes of the at least two top blocks are respectively provided with inclined sections that do not overlap with each other, specifically: The roller is located at the initial section of the chute in an initial state, and the travel height of the inclined section along the lifting direction increases successively from the top block sleeved on the outside to the top block sleeved on the inside, and the inclination angles of the inclined sections are equal or increase successively from the top block sleeved on the outside to the top block sleeved on the inside; Alternatively, the roller is located in the initial section of the slide in the initial state, and the slide is provided with a lifting section whose two ends are respectively connected to the inclined section and the initial section, the inclination direction of the lifting section is opposite to the inclination direction of the inclined section, and the lifting sections overlap with each other. At this time, the inclined section, or the distance from the initial section increases successively from the top block arranged on the outside to the top block arranged on the inside, or its inclination angle decreases successively from the top block arranged on the outside to the top block arranged on the inside.

2. The thin film sheet separation device according to claim 1, characterized in that: A mounting seat is provided inside the shell assembly, the sliding seat is slidably provided on the mounting seat, an inclined groove is provided on the sliding seat, the push rod is passed through the mounting seat, a sliding rod is provided on the push rod, and the sliding rod is slidably provided in the inclined groove, thereby converting the axial movement of the push rod into the lateral movement of the mounting seat.

3. The thin film sheet separation device according to claim 2, characterized in that: The mounting seat is provided with a baffle for limiting the sliding stroke of the sliding seat, and both sides of the sliding seat are further provided with guide bosses that are slidably fitted with the side surfaces of the mounting seat.

4. The thin film sheet separation device according to claim 2, characterized in that: A stopper is provided in the mounting seat, and a sliding hole is opened in the stopper. The push rod slides through the sliding hole. The push rod is provided with an abutment head abutting against the driving component, and a return spring is compressed between the abutment head and the stopper.

5. The thin film sheet separation device according to claim 4, characterized in that: The shell assembly includes an outer shell, a cover plate and an upper connecting piece. A chamber for accommodating the mounting seat is provided inside the outer shell. The cover plate is detachably connected to the outer shell through the upper connecting piece. The cover plate is provided at one end of the outer shell and covers the chamber. The guide hole is provided in the middle of the cover plate.

6. The thin film sheet separation device according to claim 5, characterized in that: The upper connecting member is provided with a first abutting flange, and the cover plate is provided with a positioning groove corresponding to the first abutting flange. The first abutting flange extends toward the positioning groove and abuts against the cover plate.

7. The thin film sheet separation device according to claim 6, characterized in that: The shell assembly also includes a lower connecting piece with a threaded inner wall, and the bottom of the shell is provided with a positioning boss protruding outward. The lower connecting piece is sleeved on the bottom of the shell and is provided with a second abutting flange that abuts against the top surface of the positioning boss.

8. The thin film sheet separation device according to claim 5, characterized in that: An integrally formed mounting boss is provided in the chamber of the shell, the mounting seat is provided on the mounting boss, and the chamber is axially divided into a negative pressure chamber and a receiving chamber, and a plurality of adsorption holes connected to the negative pressure chamber are also provided on the cover plate.

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