Three-dimensional carrying clamping device

Abstract

The invention discloses a three-dimensional carrying and clamping device which at least comprises a carrying system, a lifting system and a clamping system, the clamping system is arranged below the lifting system, and the lifting system is arranged on the carrying system; wherein the clamping system grabs a loader, the lifting system ascends and descends in the Z-axis direction and drives the clamping system to move in the vertical direction, and the carrying system horizontally drives the lifting system to move in the X-axis direction and the Y-axis direction. Automatic clamping, translation, lifting, cleaning and wafer polishing of the loader are all automatically completed, the problems that the loader is heavy, manual carrying is difficult and the like are solved, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor manufacturing equipment and relates to a three-dimensional transport and clamping device, and specifically relates to a three-dimensional automatic transport and clamping device for a 6-inch carrier. Background Art

[0002] The existing 6-inch carrier is grasped and moved manually, and is mainly used in the field of semiconductor manufacturing equipment. During use, the 6-inch carrier needs to be grasped by humans with both hands, and after the wafer is vacuum adsorbed on the carrier, the carrier with the wafer is manually moved to the polishing station for wafer polishing.

[0003] Since the 6-inch carrier is heavy, weighing about 20 kg, and due to process requirements, the 6-inch carrier needs to be manually grasped and moved every 20 minutes on average, it has the disadvantages of heavy workpiece mass, high grasping and moving frequency, laborious manual work and low efficiency. Summary of the invention

[0004] The present invention aims to provide a three-dimensional handling and clamping device, which solves the problems of heavy load-bearing device and difficult manual handling, and improves the working efficiency through an automatic handling system, an automatic lifting system and a clamping system.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] A three-dimensional handling and clamping device, the three-dimensional handling and clamping device at least comprises a handling system, a lifting system and a clamping system, the clamping system is arranged below the lifting system, and the lifting system is arranged on the handling system;

[0007] The clamping system grabs the carrier, the lifting system lifts and lowers in the Z-axis direction, drives the clamping system to move in the vertical direction, and the handling system drives the lifting system to move horizontally in the X-axis and Y-axis directions.

[0008] In an alternative embodiment, the transport system further includes an X-axis module and a Y-axis module, the X-axis module includes an X-axis module mounting plate, an X-axis module and an X-axis floating guide rail, the X-axis module mounting plate is a hollow square frame, the X-axis module and the X-axis floating guide rail are respectively fixed on both sides of the X-axis module mounting plate; the Y-axis module includes two Y-axis module mounting plates and a Y-axis module respectively fixed on each Y-axis module mounting plate, the other two sides of the X-axis module mounting plate are respectively slidably fixed on the two Y-axis modules, and the X-axis module is located above the Y-axis module.

[0009] In an alternative embodiment, the X-axis module further includes an X-axis driving motor, which is connected to the X-axis module and drives the X-axis module to move horizontally.

[0010] In a replaceable embodiment, the Y-axis module also includes a Y-axis drive system unit, which drives the Y-axis module to move horizontally. The Y-axis drive system unit includes a Y-axis drive motor, a Y-axis reducer, a Y-axis coupling and a Y-axis connecting rod. The Y-axis reducer is arranged above the Y-axis drive motor and is connected to the Y-axis connecting rod through the Y-axis coupling. The Y-axis connecting rod is connected to the Y-axis module.

[0011] In a replaceable embodiment, the lifting system includes a Z-axis mounting plate and a Z-axis system frame, the upper end of the Z-axis mounting plate is open, and has a bottom mounting plate, vertical plates vertically arranged at both ends of the bottom mounting plate, and two horizontal plates extending outward from the upper ends of the vertical plates respectively, the lifting system is slidably fixed on the X-axis floating guide rail and X-axis module of the conveying system through two horizontal plates, the Z-axis system frame is accommodated in the Z-axis mounting plate, the Z-axis system frame includes a plurality of parallelly arranged support columns, and upper mounting plates and lower mounting plates of support columns fixed at the upper and lower ends of the plurality of support columns, and the lower mounting plate of support columns is fixed to the bottom mounting plate of the Z-axis mounting plate.

[0012] In a replaceable embodiment, the lifting system also includes a Z-axis system transmission unit and a Z-axis system drive unit, and the Z-axis system transmission unit includes at least two guide shafts, a ball screw, a screw nut arranged on the ball screw, a screw support unit and a linear bearing installed on the mounting plate under the support column, and a screw fixing unit and a driven gear arranged on the mounting plate on the support column. The guide shaft is connected to the screw nut, and the upper end of the ball screw passes through the mounting plate on the support column to be connected to the screw fixing unit and the driven gear, and the lower end of the guide shaft passes through the linear bearing arranged on the mounting plate under the support column, the mounting plate under the support column and the bottom mounting plate of the Z-axis mounting plate, and is fixedly connected to the clamping system.

[0013] In a replaceable embodiment, the Z-axis system drive unit includes a driving gear, a reducer bracket, a reducer and a servo motor. The reducer is fixed to a mounting plate on a support column through the reducer bracket. The servo motor is arranged below the reducer. The driving gear is connected to the reducer and cooperates with the driven gear to drive the clamping system to move in the Z-axis direction.

[0014] In a replaceable embodiment, the clamping system includes a guide rail base, a clamping system mounting plate fixed on the guide rail base, and at least two clamping fingers. At least two guide rails are provided under the guide rail base, and the clamping fingers are slidably installed on the guide rails. A mounting hole is provided on the clamping system mounting plate, and the lower end of the ball screw is fixedly connected to the clamping system mounting plate through the mounting hole.

[0015] In a replaceable embodiment, the clamping finger includes a clamping jaw mounting seat, a clamping jaw, a shock absorbing block, a limit block and a limit block mounting plate, the clamping jaw mounting seat is fixed to the guide rail via a guide rail slider, the clamping jaw is fixedly connected to the clamping jaw mounting seat, the shock absorbing block is arranged in a groove of the clamping jaw, the limit block and the limit block mounting plate constitute a clamping finger limit unit, and the clamping finger limit unit is arranged on the inner side of the clamping jaw mounting seat.

[0016] In an alternative embodiment, the clamping system also includes at least two drive system units, the drive system unit includes a floating joint and a cylinder, each drive system unit drives the corresponding clamping finger to move, the cylinder is fixed to the bottom of the clamp mounting seat, and the floating joint is connected to the clamp mounting seat.

[0017] Beneficial effects of the present invention:

[0018] Through the mutual coordination of the handling system, lifting system and clamping system, and automatic operation, the problems of large mass of the carrier, especially the 6-inch carrier, high frequency of grabbing and handling, and low work efficiency have been solved, and breakthroughs have been made in key technologies such as "large mass carrier clamping system" and "large mass carrier handling system". BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic structural diagram of the three-dimensional handling and clamping device of the present invention;

[0020] Figure 2 It is a structural schematic diagram of the handling system of the present invention;

[0021] Figure 3 It is a structural schematic diagram of the lifting system of the present invention;

[0022] Figure 4 It is a schematic structural diagram of the clamping system of the present invention.

[0023] Figure numerals: 100-transportation system, 200-lifting system, 300-clamping system, 101-X-direction floating guide rail, 102-X-direction module mounting plate, 103-Y-direction module, 104-Y-direction module mounting plate, 105-X-direction module, 106-Y-direction drive motor, 107-Y-direction reducer, 108-Y-direction coupling, 109-Y-direction connecting rod, 110-X-direction drive motor, 201-Z-direction mounting plate, 202-support column, 203-guide shaft, 204-ball screw, 205-screw nut, 206-support column upper Mounting plate, 207-screw fixing unit, 208-driven gear, 209-driving gear, 210-reducer bracket, 211-reducer, 212-servo motor, 213-screw support unit, 214-linear bearing, 215-support column lower mounting plate, 301-clamping system mounting plate, 302-guide rail base 303-grip mounting seat, 304-grip, 305-guide rail, 306-shock absorber block, 307-limit block, 308-limit block mounting plate, 309-proximity sensor, 310-floating joint, 311-cylinder. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of this application clearer, the technical solution in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0025] Embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The terms "first", "second", "third", etc. (if any) in the specification and claims of the present invention and the accompanying drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the objects described in this way can be interchanged where appropriate. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. The directional terms mentioned in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only reference directions of the accompanying drawings. The embodiments described below by reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention. In addition, the present invention repeats reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but a person of ordinary skill in the art can recognize the application of other processes and / or the use of other materials.

[0026] like Figure 1-Figure 4 As shown, the three-dimensional transport and clamping device of the present invention can be used for transporting and clamping a 6-inch carrier. The three-dimensional transport and clamping device at least includes a transport system 100, a lifting system 200 and a clamping system 300. The clamping system 300 is arranged below the lifting system 200, and the lifting system 200 is arranged on the transport system 100.

[0027] The clamping system 300 grabs the carrier, the lifting system 200 lifts and lowers in the Z-axis direction, drives the clamping system 300 to move in the vertical direction, and the handling system 100 drives the lifting system 200 to move horizontally in the X-axis and Y-axis directions.

[0028] Specifically, the clamping system 300 automatically grabs the carrier, and then automatically lifts the carrier through the lifting system 200 to move it in the Z direction. When the carrier is lifted to a preset position, the wafer can be adsorbed to the bottom surface of the carrier by vacuum adsorption, and then the handling system 100 performs horizontal movement in the X and Y directions to translate the carrier to the top of the polishing area. At this time, the lifting system 200 performs a descending operation to automatically place the carrier with the wafer adsorbed to the predetermined polishing process area. When the carrier reaches the polishing table, the clamping system 300 automatically opens the clamping robot to release the carrier, completing the handling and transfer of the carrier.

[0029] The transport system 100 further includes an X-axis module and a Y-axis module. The X-axis module includes an X-axis module mounting plate 102, an X-axis module 105 and an X-axis floating guide rail 101. The X-axis module mounting plate 102 is a hollow square frame. The X-axis module 105 and the X-axis floating guide rail 101 are respectively fixed on both sides of the X-axis module mounting plate 102.

[0030] Preferably, the X-axis module mounting plate 102 is a hollow rectangle, the X-axis module 105 and the X-axis floating guide rail 101 are respectively fixed on the two long sides of the X-axis module mounting plate 102, and the lifting system 200 moves along the long sides in the hollow area of ​​the X-axis module mounting plate 102.

[0031] The Y-axis module includes two Y-axis module mounting plates 104 and a Y-axis module 103 respectively fixed on each Y-axis module mounting plate 104. The other two sides of the X-axis module mounting plate 102 are respectively slidably fixed on the two Y-axis modules 103. The X-axis module is located above the Y-axis module.

[0032] Preferably, the Y-axis module mounting plate 104 is arranged at a corresponding position of the short side of the X-axis module mounting plate 102 , and the short side of the X-axis module mounting plate 102 is respectively fixed on the slider of the Y-axis module 103 of each Y-axis module mounting plate 104 .

[0033] The X-direction module further includes an X-direction drive motor 110, which is connected to the X-direction module 105 and drives the X-direction module 105 to move horizontally. The movement of the X-direction module 105 can drive the lifting system 200 to move in the X direction.

[0034] The Y-axis module also includes a Y-axis drive system unit. The Y-axis drive system unit enables the Y-axis module 103 to move horizontally. The Y-axis drive system includes a Y-axis drive motor 106, a Y-axis reducer 107, a Y-axis coupling 108 and a Y-axis connecting rod 109. The Y-axis reducer 107 is arranged above the Y-axis drive motor 106 and is connected to the Y-axis connecting rod 109 through the Y-axis coupling 108. The Y-axis connecting rod 109 is connected to the Y-axis module 103.

[0035] Since the X-axis module mounting plate 102 is fixed on the slider of the Y-axis module 103 , the Y-axis driving system unit drives the Y-axis module 103 to move, thereby driving the lifting system 200 to move in the Y direction.

[0036] The lifting system 200 includes a Z-axis mounting plate 201 and a Z-axis system frame. The upper end of the Z-axis mounting plate 1 is open, and has a bottom mounting plate, vertical plates vertically arranged at both ends of the bottom mounting plate, and two horizontal plates extending outward from the upper ends of the vertical plates. The lifting system 200 is slidably fixed on the X-axis floating guide rail 101 and the X-axis module 105 of the conveying system 100 through the two horizontal plates. The Z-axis system frame is accommodated in the Z-axis mounting plate 201. The Z-axis system frame includes a plurality of parallelly arranged support columns 202 and a support column upper mounting plate 206 and a support column lower mounting plate 215 fixed at the upper and lower ends of the plurality of support columns 202. The support column lower mounting plate 215 is fixed on the bottom mounting plate of the Z-axis mounting plate 1.

[0037] Preferably, the Z-direction system frame includes four parallel support columns 202. The Z-direction system frame is accommodated in the Z-direction mounting plate 201, and the upper end of the Z-direction system frame is higher than the Z-direction mounting plate 201.

[0038] Since the lifting system 200 is fixed to the X-axis module 105 and the X-axis floating guide rail 101 respectively through the Z-axis mounting plate 201, when the X-axis drive motor 110 drives the X-axis module 105 to move horizontally, it drives the Z-axis mounting plate 201 and all components arranged in the Z-axis mounting plate 201 to move synchronously.

[0039] The lifting system 200 also includes a Z-axis system transmission unit and a Z-axis system driving unit. The Z-axis system transmission unit includes at least two guide shafts 203, a ball screw 204, a screw nut 205 arranged on the ball screw 204, a screw support unit 213 installed on the mounting plate 215 under the support column, a screw fixing unit 207 and a driven gear 208 arranged on the mounting plate 206 on the support column. The guide shaft 203 is connected to the screw nut 205, and the lower end of the guide shaft 203 passes through the linear bearing 314 and the mounting plate 215 under the support column and the bottom mounting plate of the Z-axis mounting plate 1, and is fixedly connected to the clamping system 300. The upper end of the ball screw 204 passes through the mounting plate 206 on the support column and is connected to the screw fixing unit 207 and the driven gear 208. Preferably, the guide shaft 203 and the ball screw 204 are both arranged in the four support column 202 areas of the Z-axis system frame, and the ball screw 204 is located between the two guide shafts 203.

[0040] The ball screw 204 is fixed to / passes through the driven gear 208, the screw fixing unit 207, the support column upper mounting plate 206, the screw nut 205, and the screw supporting unit 213 in sequence from top to bottom.

[0041] The guide shaft 203 is fixed to the screw nut 205 from top to bottom to guide the load movement, and passes through the linear bearing 314, the lower mounting plate 215 of the support column, and the bottom mounting plate of the Z-direction mounting plate 1 to be fixedly connected to the clamping system 300.

[0042] The Z-axis system driving unit includes a driving gear 209, a reducer bracket 210, a reducer 211 and a servo motor 212. The reducer 211 is fixed to the mounting plate 206 on the support column through the reducer bracket 210. The servo motor 212 is arranged below the reducer 211. The driving gear 209 is connected to the reducer 211 and cooperates with the driven gear 208 to drive the clamping system 300 to move in the Z-axis direction.

[0043] Among them, when the Z-axis system drive unit is working, the servo motor 212 drives the driving gear 209 to rotate through the reducer 211, and the driving gear 209 drives the driven gear 208 to rotate, thereby driving the screw nut 205 to move on the ball screw 204, so that the clamping system 300 can be driven to move in the Z-axis direction through the guide shaft 203.

[0044] The clamping system 300 includes a guide rail base 302, a clamping system mounting plate 301 fixed on the guide rail base 302, and at least two clamping fingers. At least two guide rails 305 are provided below the guide rail base 302, and the clamping fingers are slidably installed on the guide rails 305. The clamping fingers are provided with mounting holes on the clamping system mounting plate 301, and the lower end of the ball screw 204 is fixedly connected to the clamping system mounting plate 301 through the mounting hole.

[0045] Preferably, the clamping system 300 comprises two clamping fingers, and the two clamping fingers move towards each other.

[0046] The clamping finger includes a clamping jaw mounting seat 303, a clamping jaw 304, a shock absorbing block 306, a limit block 307 and a limit block mounting plate 308. The clamping jaw mounting seat 303 is fixed to the guide rail 305 through a guide rail slider. The clamping jaw 304 is fixedly connected to the clamping jaw mounting seat 303. The shock absorbing block 306 is arranged in a groove of the clamping jaw 304. The limit block 307 and the limit block mounting plate 308 constitute a clamping finger limit unit, which is arranged on the inner side of the clamping jaw mounting seat 303.

[0047] The clamping system 300 also includes at least two drive system units, each of which includes a floating joint 310 and a cylinder 311. Each drive system unit drives the corresponding clamping finger to move. The cylinder 311 is fixed at the bottom of the clamp mounting base 303, and the floating joint 310 is connected to the clamp mounting base 303.

[0048] Preferably, the clamping system 300 includes two drive system units, both of which are arranged in the area between the two clamping fingers, and the driving directions of the two drive system units are arranged in opposite directions, so as to control the two clamping fingers to grasp and release the carrier.

[0049] The three-dimensional handling and clamping device of the present invention operates automatically through the mutual cooperation of the handling system, the lifting system and the clamping system, which solves the problems of the large mass of the carrier, especially the 6-inch carrier, the high frequency of grabbing and handling, and the low working efficiency, and breaks through the key technologies such as "large mass carrier clamping system" and "large mass carrier handling system".

[0050] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A three-dimensional handling and clamping device, characterized in that: The three-dimensional handling and clamping device comprises at least a handling system (100), a lifting system (200) and a clamping system (300), wherein the clamping system (300) is arranged below the lifting system (200), and the lifting system (200) is arranged on the handling system (100); The clamping system (300) grabs the carrier, the lifting system (200) lifts and lowers in the Z-axis direction to drive the clamping system (300) to move in the vertical direction, and the transport system (100) drives the lifting system (200) to move horizontally in the X-axis and Y-axis directions.

2. The three-dimensional handling and clamping device according to claim 1, characterized in that: The transport system (100) further comprises an X-axis module and a Y-axis module, wherein the X-axis module comprises an X-axis module mounting plate (102), an X-axis module (105) and an X-axis floating guide rail (101), wherein the X-axis module mounting plate (102) is a hollow square frame, wherein the X-axis module (105) and the X-axis floating guide rail (101) are respectively fixed on two sides of the X-axis module mounting plate (102); wherein the Y-axis module comprises two Y-axis module mounting plates (104) and a Y-axis module (103) respectively fixed on each Y-axis module mounting plate (104), wherein the other two sides of the X-axis module mounting plate (102) are respectively slidably fixed on the two Y-axis modules (103), and the X-axis module is located above the Y-axis module.

3. The three-dimensional handling and clamping device according to claim 2, characterized in that: The X-direction module further comprises an X-direction driving motor (110), wherein the X-direction driving motor (110) is connected to the X-direction module (105) and drives the X-direction module (105) to move horizontally.

4. The three-dimensional handling and clamping device according to claim 2, characterized in that: The Y-axis module also includes a Y-axis driving system unit, which drives the Y-axis module (103) to move horizontally. The Y-axis driving system unit includes a Y-axis driving motor (106), a Y-axis reducer (107), a Y-axis coupling (108) and a Y-axis connecting rod (109). The Y-axis reducer (107) is arranged above the Y-axis driving motor (106) and is connected to the Y-axis connecting rod (109) through the Y-axis coupling (108). The Y-axis connecting rod (109) is connected to the Y-axis module (103).

5. The three-dimensional handling and clamping device according to claim 2, characterized in that: The lifting system (200) comprises a Z-axis mounting plate (201) and a Z-axis system frame. The upper end of the Z-axis mounting plate (1) is open, and comprises a bottom mounting plate, vertical plates vertically arranged at both ends of the bottom mounting plate, and two horizontal plates respectively extending outward from the upper ends of the vertical plates. The lifting system (200) is slidably fixed on the X-axis floating guide rail (101) and the X-axis module (105) of the conveying system (100) through the two horizontal plates. The Z-axis system frame is accommodated in the Z-axis mounting plate (201). The Z-axis system frame comprises a plurality of support columns (202) arranged in parallel, and a support column upper mounting plate (206) and a support column lower mounting plate (215) fixed at the upper and lower ends of the plurality of support columns (202). The support column lower mounting plate (215) is fixed on the bottom mounting plate of the Z-axis mounting plate (1).

6. The three-dimensional handling and clamping device according to claim 1, characterized in that: The lifting system (200) further comprises a Z-axis system transmission unit and a Z-axis system driving unit, wherein the Z-axis system transmission unit comprises at least two guide shafts (203), a ball screw (204), a screw nut (205) arranged on the ball screw (204), a screw support unit (213) and a linear bearing (214) arranged on a mounting plate (215) below the support column, a screw fixing unit (207) and a driven gear (208) arranged on a mounting plate (206) above the support column. 208), the guide shaft (203) is connected to the screw nut (205), the upper end of the ball screw (204) passes through the upper mounting plate (206) of the support column and is connected to the screw fixing unit (207) and the driven gear (208), and the lower end of the guide shaft (203) passes through the linear bearing (214) arranged on the lower mounting plate (215) of the support column, the lower mounting plate (215) of the support column and the bottom mounting plate of the Z-axis mounting plate (1), and is fixedly connected to the clamping system (300).

7. The three-dimensional handling and clamping device according to claim 6, characterized in that: The Z-axis system drive unit comprises a driving gear (209), a reducer bracket (210), a reducer (211) and a servo motor (212); the reducer (211) is fixed to a mounting plate (206) on a support column through the reducer bracket (210); the servo motor (212) is arranged below the reducer (211); the driving gear (209) is connected to the reducer (211) and cooperates with the driven gear (208) to drive the clamping system (300) to move in the Z-axis direction.

8. The three-dimensional handling and clamping device according to claim 1, characterized in that: The clamping system (300) comprises a guide rail base (302), a clamping system mounting plate (301) fixed on the guide rail base (302), and at least two clamping fingers, at least two guide rails (305) are provided below the guide rail base (302), the clamping fingers are slidably mounted on the guide rails (305), a mounting hole is provided on the clamping system mounting plate (301), and the lower end of the ball screw (204) is fixedly connected to the clamping system mounting plate (301) through the mounting hole.

9. The three-dimensional handling and clamping device according to claim 8, characterized in that: The clamping finger comprises a clamping jaw mounting seat (303), a clamping jaw (304), a shock absorbing block (306), a limit block (307) and a limit block mounting plate (308); the clamping jaw mounting seat (303) is fixed to the guide rail (305) via a guide rail slider; the clamping jaw (304) is fixedly connected to the clamping jaw mounting seat (303); the shock absorbing block (306) is arranged in a groove of the clamping jaw (304); the limit block (307) and the limit block mounting plate (308) constitute a clamping finger limit unit; and the clamping finger limit unit is arranged on the inner side of the clamping jaw mounting seat (303).

10. The three-dimensional handling and clamping device according to any one of claims 1 to 9, characterized in that: The clamping system (300) further comprises at least two drive system units, wherein the drive system units comprise a floating joint (310) and a cylinder (311), each drive system unit drives the corresponding clamping finger to move, the cylinder (311) is fixed to the bottom of the clamping jaw mounting seat (303), and the floating joint (310) is connected to the clamping jaw mounting seat (303).

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