Clamping device for cleaning quartz part in epitaxial furnace and using method of clamping device

Abstract

The invention relates to a clamping device for cleaning a quartz component in an epitaxial furnace and a using method of the clamping device. The clamping device comprises three storage partition plates sequentially arranged from top to bottom in the horizontal direction, two vertical supporting plates located on the two sides of the storage partition plates correspondingly, and a fixing plate located behind the storage partition plates and the vertical supporting plates. The two sides of each storage partition plate and the corresponding vertical supporting plate are integrally formed, the rear end of each storage partition plate and the rear end of the corresponding vertical supporting plate are integrally formed with the corresponding fixing plate, and the storage partition plates, the vertical supporting plates and the fixing plates are each provided with a plurality of evenly-distributed holes. Positioning assemblies for fixing a lifting shaft to be cleaned, a lower dome and an upper dome quartz part in the horizontal direction are arranged in the holes in the three storage partition plates, and a plurality of evenly-distributed holes are formed in the storage partition plates, the vertical supporting plate and the fixing plate, so that the weight of the device is reduced; in addition, circulation of chemical cleaning liquid in the cleaning tank is greatly promoted in the wet cleaning process, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to a clamping device for cleaning quartz parts in an epitaxial furnace and a use method thereof. Background Art

[0002] In the semiconductor manufacturing process, the epitaxial furnace is a key equipment used to grow high-quality crystal layers on silicon wafers or other substrates. The quartz components inside the epitaxial furnace (such as the lifting shaft, lower dome and upper dome) will accumulate impurities and residues after repeated use, affecting the quality and efficiency of subsequent processes. Therefore, regular cleaning of these quartz components is an important part of ensuring the normal operation of the epitaxial furnace.

[0003] At present, commonly used cleaning methods include wet cleaning and dry cleaning. Dry cleaning is performed in situ by plasma or other gas treatment methods. Wet cleaning requires taking the quartz component out of the epitaxial furnace and placing it in a special cleaning tank for chemical cleaning. The pollutants on the surface of the quartz component are removed by chemical solution to ensure its cleanliness. The existing wet cleaning methods are mainly divided into two types. One is to directly place the quartz component in the cleaning tank. This method can better clean the quartz component and remove the cleaning liquid, but it is easy to cause the quartz component to bump during the cleaning process, increasing the risk of damage. The other is to use a clamping device to fix a variety of quartz components. However, the existing clamping device has the following problems: the structural design of the existing clamping device is not conducive to the circulation and discharge of the chemical cleaning liquid during the wet cleaning process, resulting in incomplete cleaning, and the chemical liquid is not easy to separate after cleaning, which increases the time and difficulty of subsequent processing; the design of the clamping device is relatively complex, the installation and disassembly process is cumbersome, which increases the operation time and labor, and it is often only suitable for quartz components of specific sizes, and lacks universality for epitaxial furnaces of different models or quartz components of different specifications. Summary of the invention

[0004] The present invention aims to solve the problems existing in the above-mentioned prior art and provides a clamping device for cleaning quartz parts in an epitaxial furnace and a method for using the same. The device has a simple structure, is easy to operate, and is firmly fixed, and can significantly improve the stability and cleaning effect during the cleaning process.

[0005] The present invention solves its technical problem by adopting a technical solution: This clamping device for cleaning quartz parts in an epitaxial furnace comprises: three storage partitions arranged in sequence from top to bottom along the horizontal direction, two vertical support plates respectively located on both sides of the storage partitions, and a fixed plate located behind the storage partitions and the vertical support plates, the two sides of each of the storage partitions are integrally formed with the vertical support plates, the rear end of each of the storage partitions and the rear end of the vertical support plates are integrally formed with the fixed plate, the storage partitions, the vertical support plates and the fixed plates are all provided with a plurality of evenly distributed holes, and a horizontally arranged cleaning plate is provided through the holes on the three storage partitions. A positioning assembly for fixing the lifting shaft, lower dome and upper dome quartz parts to be cleaned in the direction thereof, the positioning assembly comprising: a positioning hole and a first positioning member arranged on the upper storage partition, a second positioning member installed on the middle storage partition, and a third positioning member located below the second positioning member and arranged on the bottom storage partition; the first positioning member abuts against the left and right ends of the lifting shaft, and an inclined supporting foot of the lifting shaft extends into the positioning hole, the tube portion of the lower dome extends into the upper storage partition, and the disc-shaped portion of the lower dome is located in and abuts against the second positioning member, the upper dome is placed on the bottom storage partition, and its outer wall abuts against the third positioning member.

[0006] Preferably, the upper storage partition and the adjacent middle storage partition cooperate with the vertical support plates on both sides and the fixed plate at the rear to form a first storage layer open on one side, and the middle storage partition and the lower storage partition cooperate with the vertical support plates on both sides and the fixed plate at the rear to form a second storage layer open on one side, the height of the first storage layer is higher than the height of the disk-shaped portion of the lower dome, ensuring that the disk-shaped portion can move to above the second positioning member and extend into the second positioning member, and the height of the second storage layer is higher than the height of the upper dome, ensuring that the upper dome can move to the third positioning member and make its outer wall abut against the third positioning member.

[0007] Preferably, the positioning device further comprises a limit assembly detachably connected to the hole, which is used to fix the lifting shaft, the lower dome and the upper dome on the corresponding storage partition in the vertical direction, and the limit assembly comprises: A first stopper is used to clamp the lifting shaft to the upper storage partition. The middle part of the first stopper is provided with an arc portion matching the shaft portion of the lifting shaft. Both ends of the first stopper have first connecting portions, and the first connecting portions at both ends extend into the holes at the front and rear sides of the shaft portion of the lifting shaft and are connected; A second stopper is used to clamp the lower dome on the middle storage partition. The second stopper has a second abutting top and a second connecting portion, which are connected to form a "7" shape structure. The second connecting portion extends into the hole on the middle storage partition around the lower dome disc-shaped portion, and the second abutting top abuts against the peripheral edge of the lower dome disc-shaped portion. The third limiting member is used to clamp the upper dome onto the lower storage partition. The third limiting member has a third abutting top and a third connecting portion, which are connected to form a "7" shape structure. The third connecting portion extends into the hole on the lower storage partition around the upper dome, and the third abutting top abuts against the peripheral edge of the upper dome.

[0008] Preferably, the first connection part, the second connection part and the third connection part are provided with external threads, which are passed through holes and then connected by nuts, so that the first connection part is connected to the upper storage partition, the second connection part is connected to the middle storage partition, and the third connection part is connected to the lower storage partition; or the first connection part, the second connection part and the third connection part are each provided with at least one pair of elastic snap parts, and when the snap parts pass through the holes, the snap parts will automatically pop out and be fastened to the circumference of the connection part, and form a snap connection with the corresponding storage partition.

[0009] Preferably, each of the vertical support plates is provided with at least one handle, the handle is located at the top of the vertical support plate, the height of the vertical support plate is greater than the height of the storage layer, and the horizontal height of the handle is higher than the upper end of the fixed plate.

[0010] Preferably, a guide groove is provided on the upper storage partition, and the guide groove is used to guide the tube portion of the lower dome to extend into the upper storage partition, and the guide groove is arranged along the width direction of the storage partition.

[0011] Preferably, the first positioning member includes at least two first positioning blocks, the inner end of each first positioning block has a positioning surface matching the two sides of the lifting shaft, the outer end of the first positioning block is provided with a guide hole along the length direction of the upper storage partition, a first screw portion is inserted into the guide hole, the first screw portion passes through the hole on the upper storage partition and fixes the first positioning block to the upper storage partition through a nut.

[0012] Preferably, the second positioning member includes at least three second positioning blocks, the inner end of each second positioning block has a first arcuate surface matching the outer wall of the lower dome, the first arcuate surface fits with the disc-shaped portion of the lower dome, and the outer end of the second positioning block is provided with a second screw portion, the second screw portion passes through the holes on the middle storage partition and fixes the second positioning block to the middle storage partition through a nut.

[0013] Preferably, the third positioning member includes at least three third positioning blocks, the inner end of each third positioning block has a second curved surface matching the outer wall of the upper dome, the second curved surface fits with the upper dome, and the outer end of the third positioning block is provided with a third screw portion, the third screw portion passes through the holes on the bottom storage partition and fixes the third positioning block to the bottom storage partition through a nut.

[0014] A method for using a clamping device for cleaning a quartz component in an epitaxial furnace comprises the following steps: 1) Preparation stage: Place the clamping device on the horizontal end surface to ensure that the device is placed stably, and then check and ensure that multiple evenly distributed holes on each storage partition, vertical support plate and fixing plate are aligned; 2) Install the lifting shaft: insert the inclined support foot of the lifting shaft into the positioning hole through the positioning hole on the upper storage partition, and make the left and right ends of the lifting shaft abut against the first positioning member to ensure the initial positioning of the lifting shaft. Use the first limiter to firmly clamp the lifting shaft on the upper storage partition through the hole on the upper storage partition to ensure that the lifting shaft is firmly fixed; 3) Install the lower dome: guide the tube of the lower dome through the guide groove so that it extends into the upper storage partition, and ensure that the disc-shaped portion of the lower dome is located in the second positioning member on the middle storage partition and abuts against it, completing the initial positioning of the lower dome, and using the second limiting member to firmly clamp the lower dome on the middle storage partition through the hole on the middle storage partition to ensure that the lower dome is firmly fixed; 4) Installing the upper dome: placing the upper dome on the bottom storage partition so that its outer wall abuts against the third positioning member to complete the initial positioning of the upper dome, and using the third limiting member to firmly clamp the upper dome on the bottom storage partition through the hole on the bottom storage partition to ensure that the upper dome is firmly fixed; 5) Start cleaning: Start the cleaning equipment and start the cleaning process of the quartz parts. During this period, the clamping device remains stable to ensure the cleaning effect; 6) Disassembly and maintenance: After cleaning, the limiter and quartz parts can be easily disassembled through the detachable design, which is convenient for subsequent inspection and maintenance.

[0015] The present invention has the following beneficial effects: 1. The present invention can ensure that the lifting shaft, the lower dome and the upper dome remain stable during the cleaning process through positioning components and limiters, avoiding the common component displacement in the prior art, which not only improves the cleaning effect but also reduces the risk of component damage caused by displacement.

[0016] 2. The multiple evenly distributed holes set on the storage partitions, vertical support plates and fixed plates not only reduce the weight of the device, but also greatly promote the circulation of chemical cleaning liquid in the cleaning tank during wet cleaning, thereby improving the cleaning efficiency. In addition, the positioning components (first positioning member, second positioning member and third positioning member) can be adjusted by selecting different hole positions to adapt to lifting shafts, lower dome and upper dome quartz parts of different sizes. This design improves the versatility and flexibility of the clamping device and is suitable for various models of epitaxial furnaces and quartz parts of different specifications.

[0017] 3. The present invention adopts a detachable design and simplified installation steps, so that the clamping device is easy to install and disassemble, and can be quickly installed and disassembled through nut connection or elastic snap-on part, which greatly reduces the operation time and labor intensity. It is especially important for chemical operation scenarios and significantly improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of a clamping device for cleaning quartz parts in an epitaxial furnace according to the present invention; Figure 2 It is a schematic diagram of the overall structure after the clamping device of the present invention and the quartz component are assembled; Figure 3 This is a schematic diagram of the structure after the first positioning member positions the lifting shaft; Figure 4 This is a schematic diagram of the structure after the second positioning member positions the lower dome; Figure 5 It is a structural cross-sectional view of a state where the second positioning member is positioning the lower dome; Figure 6 This is a schematic diagram of the structure after the third positioning member positions the upper dome; Figure 7 It is a schematic diagram of the structure when the first connecting part, the second connecting part and the third connecting part are configured as external threads; Figure 8 is a schematic diagram of the structure when the first connecting portion, the second connecting portion and the third connecting portion are configured as buckle portions; Fig. 9 It is a schematic diagram of the lifting shaft structure; Fig.10 This is a schematic diagram of the lower dome structure; Fig.11 This is a schematic diagram of the upper dome structure.

[0019] Description of reference numerals: 10. Storage partition; 11. Vertical support plate; 12. Fixed plate; 13. Holes; 100. First storage layer; 101. Second storage layer; 102. Handle; 103. Guide groove; 104. Positioning hole; 20, first positioning member; 21, second positioning member; 22, third positioning member; 200, first positioning block; 201, positioning surface; 202, first screw portion; 203, second positioning block; 204, first arcuate surface; 205, second screw portion; 206, third positioning block; 207, second arcuate surface; 208, third screw portion; 209, guide hole; 30, first stopper; 31, second stopper; 32, third stopper; 300, arc portion; 301, first connection portion; 302, second abutment top portion; 303, second connection portion; 304, third abutment top portion; 305, third connection portion; 306, external thread; 307, buckle portion; 4. lifting shaft; 40. supporting foot; 41. shaft; 5. lower dome; 50. tube; 51. disc-shaped portion; 6. Go up to the dome. DETAILED DESCRIPTION

[0020] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0021] like Figures 1 to 11 As shown, a clamping device for cleaning quartz parts in an epitaxial furnace comprises: three storage partitions 10 arranged in sequence from top to bottom in the horizontal direction, two vertical support plates 11 respectively located on both sides of the storage partition 10, and a fixed plate 12 located behind the storage partition 10 and the vertical support plate 11, the two sides of each storage partition 10 are integrally formed with the vertical support plate 11, the rear end of each storage partition 10 and the rear end of the vertical support plate 11 are integrally formed with the fixed plate 12, a plurality of evenly distributed holes 13 are arranged on the storage partition 10, the vertical support plate 11 and the fixed plate 12, a lifting shaft 4 to be cleaned is fixed in the horizontal direction through the holes 13 on the three storage partitions 10, and a lower circular shaft 4 is arranged to be fixed in the horizontal direction. The positioning assembly of the top 5 and the upper dome 6 quartz parts includes: a positioning hole 104 and a first positioning member 20 arranged on the upper storage partition 10, a second positioning member 21 installed on the middle storage partition 10, and a third positioning member 22 located below the second positioning member 21 and arranged on the bottom storage partition 10; the first positioning member 20 abuts against the left and right ends of the lifting shaft 4, and an inclined supporting foot 40 of the lifting shaft 4 extends into the positioning hole 104, the tube portion 50 of the lower dome 5 extends into the upper storage partition 10, and the disc-shaped portion 51 of the lower dome 5 is located in the second positioning member 21 and abuts against it, and the upper dome 6 is placed on the bottom storage partition 10, and its outer wall abuts against the third positioning member 22.

[0022] The clamping device includes three storage partitions 10 arranged in sequence from top to bottom in the horizontal direction, two vertical support plates 11 respectively located on both sides of the storage partition 10, and a fixed plate 12 located behind the storage partition 10 and the vertical support plate 11. The two sides of each storage partition 10 are integrally formed with the vertical support plate 11, and the rear end of each storage partition 10 and the rear end of the vertical support plate 11 are also integrally formed with the fixed plate 12. The storage partition 10, the vertical support plate 11 and the fixed plate 12 are all made of Teflon material. In this embodiment, a plurality of evenly distributed holes 13 are provided on the storage partition 10, the vertical support plate 11 and the fixed plate 12. These holes 13 not only reduce the weight of the device, but also facilitate the circulation of the chemical cleaning liquid in the cleaning tank during the wet cleaning process, thereby improving the cleaning efficiency and facilitating the removal of the chemical liquid after cleaning. Through these holes 13, a positioning assembly for fixing the lifting shaft 4, the lower dome 5 and the upper dome 6 quartz parts to be cleaned in the horizontal direction is provided on the three storage partitions 10, and the positioning assembly specifically includes: a positioning hole 104 and a first positioning member 20 arranged on the upper storage partition 10, a second positioning member 21 installed on the middle storage partition 10, and a third positioning member 22 located below the second positioning member 21 and arranged on the bottom storage partition 10, the first positioning member 20 abuts against the left and right ends of the lifting shaft 4, and an inclined supporting foot 40 of the lifting shaft 4 extends into the positioning hole 104; the tube portion 50 of the lower dome 5 extends into the upper storage partition 10, and the disc-shaped portion 51 of the lower dome 5 is located in the second positioning member 21 and abuts against it; the upper dome 6 is placed on the bottom storage partition 10, and its outer wall abuts against the third positioning member 22.

[0023] In addition, it should be noted that in addition to adapting to the quartz components of the epitaxial furnace used for the above-mentioned 12-inch epitaxial wafers, the clamping device can also adapt to different sizes such as 8 inches. The first positioning member 20, the second positioning member 21 and the third positioning member 22 can all be adjusted by selecting different hole positions. This design enables the clamping device to be widely applicable to epitaxial furnaces of different models and quartz components of different specifications, thereby improving its versatility and flexibility.

[0024] Specifically, Figure 1 and Figure 2As shown, the upper storage partition 10 and the adjacent middle storage partition 10 cooperate with the vertical support plates 11 on both sides and the fixed plate 12 at the rear to form a first storage layer 100 open on one side, and the middle storage partition 10 and the lower storage partition 10 cooperate with the vertical support plates 11 on both sides and the fixed plate 12 at the rear to form a second storage layer 101 open on one side. The height of the first storage layer 100 is higher than the height of the disc-shaped portion 51 of the lower dome 5, ensuring that the disc-shaped portion 51 can move to above the second positioning member 21 and extend into the second positioning member 21. The height of the second storage layer 101 is higher than the height of the upper dome 6, ensuring that the upper dome 6 can move to the third positioning member 22 and make its outer wall abut against the third positioning member 22.

[0025] The upper storage partition 10 and the adjacent middle storage partition 10 cooperate with the vertical support plates 11 on both sides and the fixed plate 12 at the rear to form a first storage layer 100 open on one side. The height of the first storage layer 100 is designed to be higher than the height of the disc-shaped portion 51 of the lower dome 5, ensuring that the disc-shaped portion 51 of the lower dome 5 can be smoothly moved to the top of the second positioning member 21 and accurately extended into the second positioning member 21 for fixation. At the same time, the middle storage partition 10 and the lower storage partition 10 cooperate with the vertical support plates 11 on both sides and the fixed plate 12 at the rear to form a second storage layer 101 open on one side. The height of the second storage layer 101 is designed to be higher than the height of the upper dome 6, ensuring that the upper dome 6 can be smoothly moved into the third positioning member 22 and make its outer wall tightly abut against the third positioning member 22, which not only optimizes space utilization, but also facilitates operators to install and disassemble quartz components, while ensuring the stability and accuracy of each component during the cleaning process.

[0026] Specifically, Figures 1 to 8As shown, the positioning device also includes a limiting component detachably connected to the hole 13, which is respectively used to fix the lifting shaft 4, the lower dome 5 and the upper dome 6 on the corresponding storage partition 10 in the vertical direction, and the limiting component includes: a first limiting member 30, which is used to clamp the lifting shaft 4 on the upper storage partition 10, and the middle part of the first limiting member 30 is provided with an arc portion 300 matching the shaft portion 41 of the lifting shaft 4, and the two ends of the first limiting member 30 have a first connecting portion 301, and the first connecting portions 301 at the two ends are respectively extended into the holes 13 on the front and rear sides of the shaft portion 41 of the lifting shaft 4 and connected; a second limiting member 31 is used to clamp the lower dome 5 on the middle storage partition 10, and the second limiting member 31 It has a second abutment top portion 302 and a second connecting portion 303, which are connected to form a "7" shape structure. The second connecting portion 303 extends into the hole 13 on the middle storage partition 10 around the disc-shaped portion 51 of the lower dome 5, and the second abutment top portion 302 abuts against the peripheral edge of the disc-shaped portion 51 of the lower dome 5; the third limiting member 32 is used to clamp the upper dome 6 on the lower storage partition 10. The third limiting member 32 has a third abutment top portion 304 and a third connecting portion 305, which are connected to form a "7" shape structure. The third connecting portion 305 extends into the hole 13 on the lower storage partition 10 around the upper dome 6, and the third abutment top portion 304 abuts against the peripheral edge of the upper dome 6.

[0027] The positioning device also includes a limiting component detachably connected to the hole 13, which is respectively used to fix the lifting shaft 4, the lower dome 5 and the upper dome 6 on the corresponding storage partition 10 in the vertical direction. The limiting component includes: a first limiting member 30, which is used to clamp the lifting shaft 4 on the upper storage partition 10. The middle part of the first limiting member 30 is provided with an arc portion 300 matching the shaft portion 41 of the lifting shaft 4. The first connecting portions 301 at both ends extend into the holes 13 on the front and rear sides of the shaft portion 41 of the lifting shaft 4 and are connected; a second limiting member 31 is used to clamp the lower dome 5 on the middle storage partition 10. The second limiting member 31 has a second abutting top portion 302 and a second connecting portion 303, which are connected to form a "7" shape structure. The second connecting portion 303 extends into the middle The second abutment portion 302 abuts against the peripheral edge of the disk-shaped portion 51 of the lower dome 5 in the hole 13 around the disk-shaped portion 51 of the interlayer storage partition 10; the third limiting member 32 is used to clamp the upper dome 6 on the lower storage partition 10, and the third limiting member 32 has a third abutment portion 304 and a third connecting portion 305, which are connected to form a "7" shape structure. The third connecting portion 305 extends into the hole 13 around the upper dome 6 on the lower storage partition 10, and the third abutment portion 304 abuts against the peripheral edge of the upper dome 6. This design ensures the stability of each quartz component during the cleaning process, simplifies the installation and disassembly process, reduces the operation time and labor intensity, improves work efficiency, and improves the versatility and flexibility of the clamping device.

[0028] It is mentioned that, Figure 1 and Figure 2 The first limit member 30 is not limited to one, and can be increased according to the size of the shaft portion 41 of the lifting shaft 4, and the second limit member 31 and the third limit member 32 are set to at least two, two on both sides, which can better realize the vertical restriction of the lower dome 5 and the upper dome 6.

[0029] Furthermore, if Figure 3 , Figure 5 , Figure 6 , Figure 7 and Figure 8 As shown, the first connection part 301, the second connection part 303 and the third connection part 305 are provided with external threads 306, and the external threads 306 pass through the holes 13 and are connected by nuts, so that the first connection part 301 is connected to the upper storage partition 10, the second connection part 303 is connected to the middle storage partition 10, and the third connection part 305 is connected to the lower storage partition 10; or the first connection part 301, the second connection part 303 and the third connection part 305 are all provided with at least one pair of elastic snap parts 307, and when the snap parts 307 pass through the holes 13, the snap parts 307 will automatically pop out and be fastened to the circumference of the connection part, and form a snap connection with the corresponding storage partition 10.

[0030] The first connecting part 301, the second connecting part 303 and the third connecting part 305 are provided with external threads 306 or at least one pair of elastic buckle parts 307, which are used to firmly fix the limit assembly on the corresponding storage partition 10. Specifically, the external thread 306 connection method: the first connecting part 301, the second connecting part 303 and the third connecting part 305 are respectively provided with external threads 306, and these external threads 306 are fastened and connected by nuts after passing through the holes 13. The first connecting part 301 is connected to the upper storage partition 10 by a nut to ensure the stability of the lifting shaft 4; the second connecting part 303 is connected to the middle layer by a nut On the storage partition 10, ensure the stable fixation of the lower dome 5; the third connecting part 305 is connected to the lower storage partition 10 through a nut to ensure the stability of the upper dome 6. The other is the elastic snap-on part 307 connection method: as another connection method, the first connecting part 301, the second connecting part 303 and the third connecting part 305 are each provided with at least one pair of elastic snap-on parts 307. When these snap-on parts 307 pass through the hole 13, they will automatically pop out and be fastened to the circumference of the connecting part through the spring elasticity, and form a snap connection with the corresponding storage partition 10, which not only simplifies the installation and disassembly process, but also ensures the stability of the limit assembly.

[0031] It is mentioned that, Figure 2As shown, corner columns are provided at the four lower corners of the bottom storage partition 10 , one function is to ensure the stability of the clamping device, and the other is to facilitate the disassembly and installation of the third limiting member 32 .

[0032] Furthermore, if Figure 1 and Figure 2 As shown, each vertical support plate 11 is provided with at least one handle 102, and the handle 102 is located at the top of the vertical support plate 11. The height of the vertical support plate 11 is greater than the height of the storage layer, and the horizontal height of the handle 102 is higher than the upper end of the fixed plate 12.

[0033] Each vertical support plate 11 is provided with at least one handle 102, which is located at the top of the vertical support plate 11. The height of the vertical support plate 11 is designed to be greater than the height of the storage layer, ensuring the stability of the structure and the convenience of operation. In addition, the horizontal height of the handle 102 is higher than the upper end of the fixed plate 12, so that the operator can easily grasp the handle 102, which facilitates the overall transportation and position adjustment of the clamping device and reduces the risks caused by transportation or position adjustment.

[0034] Specifically, Figure 1 , Figure 2 , Figure 3 and Figure 5 As shown, a guide groove 103 is provided on the upper storage partition 10 , and the guide groove 103 is used to guide the tube portion 50 of the lower dome 5 to extend into the upper storage partition 10 , and the guide groove 103 is arranged along the width direction of the storage partition 10 .

[0035] A guide groove 103 is provided on the upper storage partition 10, and the guide groove 103 is used to guide the tube portion 50 of the lower dome 5 to accurately extend into the upper storage partition 10. The guide groove 103 is arranged along the width direction of the storage partition 10, ensuring that the tube portion 50 of the lower dome 5 can be smoothly and accurately aligned and inserted into the predetermined position, which not only improves the accuracy and convenience of installation, but also ensures the stability and accuracy of the lower dome 5 during the cleaning process, and reduces the risk of incomplete cleaning or component damage due to position deviation.

[0036] Specifically, Figure 2 , Figure 3 and Figure 4 As shown, the first positioning member 20 includes at least two first positioning blocks 200, the inner end of each first positioning block 200 has a positioning surface 201 matching the two sides of the lifting shaft 4, and the outer end of the first positioning block 200 is provided with a guide hole 209 along the length direction of the upper storage partition 10, and a first screw portion 202 is inserted into the guide hole 209. The first screw portion 202 passes through the hole 13 on the upper storage partition 10 and fixes the first positioning block 200 on the upper storage partition 10 through a nut.

[0037] The first positioning member 20 includes at least two first positioning blocks 200. The inner end of each first positioning block 200 has a positioning surface 201 matching the two sides of the lifting shaft 4 to ensure that it can fit tightly against the lifting shaft 4 and provide stable support. The outer end of the first positioning block 200 is provided with a guide hole 209 along the length direction of the upper storage partition 10. A first screw portion 202 is inserted into the guide hole 209. The first screw portion 202 passes through the hole 13 on the upper storage partition 10, and the first positioning block 200 is firmly fixed to the upper storage partition 10 by a nut, ensuring the accurate installation and stable fixation of the first positioning block 200, and facilitating the adjustment of the position to adapt to lifting shafts 4 of different sizes, thereby improving the versatility and flexibility of the clamping device.

[0038] Furthermore, if Figure 2 and Figure 5 As shown, the second positioning member 21 includes at least three second positioning blocks 203, the inner end of each second positioning block 203 has a first arc surface 204 matching the outer wall of the lower dome 5, the first arc surface 204 is in contact with the disc-shaped portion 51 of the lower dome 5, and the outer end of the second positioning block 203 is provided with a second screw portion 205, the second screw portion 205 passes through the hole 13 on the middle layer storage partition 10 and fixes the second positioning block 203 on the middle layer storage partition 10 through a nut.

[0039] The second positioning member 21 includes at least three second positioning blocks 203, and the inner end of each second positioning block 203 has a first arcuate surface 204 matching the outer wall of the lower dome 5. The first arcuate surface 204 fits tightly with the disc-shaped portion 51 of the lower dome 5 to ensure that the lower dome 5 remains stable during the cleaning process. The outer end of the second positioning block 203 is provided with a second screw portion 205, and the second screw portion 205 passes through the hole 13 on the middle layer storage partition 10, and the second positioning block 203 is firmly fixed to the middle layer storage partition 10 through a nut, which not only ensures the accurate installation and firm fixation of the second positioning block 203, but also can adapt to lower domes 5 of different sizes, thereby improving the versatility and flexibility of the clamping device.

[0040] Furthermore, if Figure 2 and Figure 6 As shown, the third positioning member 22 includes at least three third positioning blocks 206, the inner end of each third positioning block 206 has a second arc surface 207 matching the outer wall of the upper dome 6, the second arc surface 207 is in contact with the upper dome 6, and the outer end of the third positioning block 206 is provided with a third screw portion 208, the third screw portion 208 passes through the hole 13 on the bottom storage partition 10 and fixes the third positioning block 206 on the bottom storage partition 10 through a nut.

[0041] The third positioning member 22 includes at least three third positioning blocks 206, and the inner end of each third positioning block 206 has a second arc surface 207 that matches the outer wall of the upper dome 6. The second arc surface 207 fits tightly with the upper dome 6 to ensure that it remains stable during the cleaning process. The outer end of the third positioning block 206 is provided with a third screw portion 208, and the third screw portion 208 passes through the hole 13 on the bottom storage partition 10, and the third positioning block 206 is firmly fixed to the bottom storage partition 10 through a nut, ensuring the accurate installation and firm fixation of the third positioning block 206, and can also adapt to upper domes 6 of different sizes, thereby improving the versatility and flexibility of the clamping device.

[0042] It should be noted that at least three second positioning blocks 203 and at least three third positioning blocks 206 can be used for horizontal positioning, while the present embodiment uses four second positioning blocks 203 and four third positioning blocks 206, which can better adapt to these subtle differences and ensure that the best positioning effect can be achieved each time it is installed.

[0043] A method for using a clamping device for cleaning a quartz component in an epitaxial furnace comprises the following steps: 1) Preparation stage: Place the clamping device on the horizontal end surface to ensure that the device is placed stably. Check and confirm that the multiple evenly distributed holes 13 on each storage partition 10, vertical support plate 11 and fixing plate 12 are aligned. This step is crucial to ensure stability during subsequent installation and cleaning, and to allow the chemical cleaning liquid to flow and discharge smoothly; 2) Install the lifting shaft 4: Through the positioning hole 104 on the upper storage partition 10, make the inclined support foot 40 of the lifting shaft 4 accurately extend into the positioning hole 104. Make sure that the left and right ends of the lifting shaft 4 are against the first positioning member 20 to complete the preliminary positioning. Next, use the first limiting member 30 to respectively pass the first connecting parts 301 at both ends through the holes 13 on the upper storage partition 10, and use nuts or other fasteners to firmly clamp the first limiting member 30 on the upper storage partition 10 to ensure that the lifting shaft 4 is firmly fixed. This design not only improves the stability of the lifting shaft 4, but also facilitates the adjustment of the position to accommodate lifting shafts 4 of different sizes; 3) Install the lower dome 5: guide the tube portion 50 of the lower dome 5 through the guide groove 103 so that it can smoothly extend into the upper storage partition 10. At the same time, ensure that the disc-shaped portion 51 of the lower dome 5 is located in the second positioning member 21 on the middle storage partition 10 and abuts against it, completing the preliminary positioning of the lower dome 5. Subsequently, use the second limiting member 31 to extend its second connection portion 303 into the hole 13 on the middle storage partition 10, and firmly clamp the second limiting member 31 on the middle storage partition 10 through a nut to ensure that the lower dome 5 is firmly fixed. The design of the guide groove 103 improves the installation accuracy and ensures that the lower dome 5 will not shift or be damaged during the cleaning process; 4) Install the upper dome 6: Place the upper dome 6 on the bottom storage partition 10 so that its outer wall is tightly against the third positioning member 22 to complete the initial positioning of the upper dome 6. Then, use the third stopper 32 to extend its third connection portion 305 into the hole 13 on the bottom storage partition 10, and firmly clamp the third stopper 32 on the bottom storage partition 10 through a nut to ensure that the upper dome 6 is firmly fixed. This design not only ensures the stability of the upper dome 6 during the cleaning process, but also simplifies the installation and disassembly process, reducing the operation time and labor intensity; 5) Start cleaning: Start the cleaning equipment and start the cleaning process of the quartz parts. During this period, the clamping device remains stable to ensure the cleaning effect. Through the carefully designed positioning components and limiters, the clamping device can maintain the stability and accuracy of the quartz parts throughout the cleaning process, improving the cleaning efficiency and quality; 6) Disassembly and maintenance: After cleaning, the limiter and quartz parts can be easily disassembled through the detachable design, which is convenient for subsequent inspection and maintenance. This design not only simplifies the disassembly process, but also improves work efficiency, reduces the risk of damage caused by improper disassembly, and ensures the long-term stable use of the clamping device.

[0044] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A clamping device for cleaning quartz parts in an epitaxial furnace, comprising: Three storage partitions (10) are arranged in sequence from top to bottom in the horizontal direction, two vertical support plates (11) are respectively located on both sides of the storage partition (10), and a fixed plate (12) is located behind the storage partition (10) and the vertical support plate (11), the two sides of each storage partition (10) are integrally formed with the vertical support plate (11), and the rear end of each storage partition (10) and the rear end of the vertical support plate (11) are integrally formed with the fixed plate (12), wherein: The storage partitions (10), the vertical support plates (11) and the fixed plates (12) are all provided with a plurality of evenly distributed holes (13), and a positioning assembly for fixing the lifting shaft (4), the lower dome (5) and the upper dome (6) quartz components to be cleaned in a horizontal direction is provided through the holes (13) on the three storage partitions (10), the positioning assembly comprising: a positioning hole (104) and a first positioning member (20) provided on the upper storage partition (10), a second positioning member (21) installed on the middle storage partition (10), and a positioning member (21) located on the second positioning member ( The first positioning member (20) is in contact with the left and right ends of the lifting shaft (4), and an inclined support leg (40) of the lifting shaft (4) extends into the positioning hole (104); the tube portion (50) of the lower dome (5) extends into and into the upper storage partition (10), and the disc-shaped portion (51) of the lower dome (5) is located in the second positioning member (21) and in contact with it; the upper dome (6) is placed on the bottom storage partition (10), and its outer wall is in contact with the third positioning member (22).

2. The clamping device for cleaning quartz parts in an epitaxial furnace according to claim 1, characterized in that: The upper storage partition (10) and the adjacent middle storage partition (10) cooperate with the vertical support plates (11) on both sides and the fixed plate (12) at the rear to form a first storage layer (100) with a single side open, and the middle storage partition (10) and the lower storage partition (10) cooperate with the vertical support plates (11) on both sides and the fixed plate (12) at the rear to form a second storage layer (101) with a single side open. The height of the first storage layer (100) is higher than the height of the disc-shaped portion (51) of the lower dome (5), ensuring that the disc-shaped portion (51) can move to the top of the second positioning member (21) and extend into the second positioning member (21). The height of the second storage layer (101) is higher than the height of the upper dome (6), ensuring that the upper dome (6) can move to the third positioning member (22) and have its outer wall abut against the third positioning member (22).

3. The clamping device for cleaning quartz parts in an epitaxial furnace according to claim 1, characterized in that: The positioning device further comprises a limit assembly detachably connected to the hole (13), and used to respectively fix the lifting shaft (4), the lower dome (5) and the upper dome (6) on the corresponding storage partition (10) in the vertical direction, wherein the limit assembly comprises: A first stopper (30) is used to clamp the lifting shaft (4) onto the upper storage partition (10); a middle portion of the first stopper (30) is provided with an arc portion (300) matching the shaft portion (41) of the lifting shaft (4); both ends of the first stopper (30) have first connecting portions (301), and the first connecting portions (301) at both ends extend into the holes (13) at the front and rear sides of the shaft portion (41) of the lifting shaft (4) and are connected; A second stopper (31) is used to clamp the lower dome (5) onto the middle storage partition (10). The second stopper (31) comprises a second abutting top portion (302) and a second connecting portion (303), which are connected to form a "7"-shaped structure. The second connecting portion (303) extends into a hole (13) located around the disc-shaped portion (51) of the lower dome (5) on the middle storage partition (10). The second abutting top portion (302) abuts against the peripheral edge of the disc-shaped portion (51) of the lower dome (5); The third stopper (32) is used to clamp the upper dome (6) onto the lower storage partition (10). The third stopper (32) comprises a third abutting top portion (304) and a third connecting portion (305), which are connected to form a "7"-shaped structure. The third connecting portion (305) extends into a hole (13) located around the upper dome (6) on the lower storage partition (10), and the third abutting top portion (304) abuts against the peripheral edge of the upper dome (6).

4. The clamping device for cleaning quartz components in an epitaxial furnace according to claim 3, characterized in that: The first connecting portion (301), the second connecting portion (303) and the third connecting portion (305) are provided with external threads (306), and the external threads (306) are connected by nuts after passing through the holes (13), so that the first connecting portion (301) is connected to the upper storage partition (10), the second connecting portion (303) is connected to the middle storage partition (10), and the third connecting portion (305) is connected to the lower storage partition (10); or the first connecting portion (301), the second connecting portion (303) and the third connecting portion (305) are all provided with at least one pair of elastic buckle portions (307), and when the buckle portions (307) pass through the holes (13), the buckle portions (307) automatically pop out and are fastened to the circumference of the connecting portion, and form a buckle connection with the corresponding storage partition (10).

5. The clamping device for cleaning quartz parts in an epitaxial furnace according to claim 2, characterized in that: Each of the vertical support plates (11) is provided with at least one handle (102), the handle (102) being located at the top of the vertical support plate (11), the height of the vertical support plate (11) being greater than the height of the storage layer, and the horizontal height of the handle (102) being higher than the upper end of the fixed plate (12).

6. The clamping device for cleaning quartz parts in an epitaxial furnace according to claim 1, characterized in that: The upper storage partition (10) is provided with a guide groove (103), which is used to guide the tube portion (50) of the lower dome (5) to extend into the upper storage partition (10), and the guide groove (103) is arranged along the width direction of the storage partition (10).

7. The clamping device for cleaning quartz parts in an epitaxial furnace according to claim 1, characterized in that: The first positioning member (20) comprises two first positioning blocks (200), the inner end of each first positioning block (200) having a positioning surface (201) matching with two sides of the lifting shaft (4), the outer end of the first positioning block (200) having a guide hole (209) along the length direction of the upper storage partition (10), the guide hole (209) having a first screw portion (202) inserted therein, the first screw portion (202) passing through the hole (13) on the upper storage partition (10) and fixing the first positioning block (200) on the upper storage partition (10) via a nut.

8. The clamping device for cleaning quartz components in an epitaxial furnace according to claim 7, characterized in that: The second positioning member (21) comprises at least three second positioning blocks (203), the inner end of each second positioning block (203) having a first arcuate surface (204) matching the outer wall of the lower dome (5), the first arcuate surface (204) being in contact with the disc-shaped portion (51) of the lower dome (5), and the outer end of the second positioning block (203) being provided with a second screw portion (205), the second screw portion (205) penetrating through the hole (13) on the middle storage partition (10) and fixing the second positioning block (203) on the middle storage partition (10) via a nut.

9. The clamping device for cleaning quartz parts in an epitaxial furnace according to claim 8, characterized in that: The third positioning member (22) comprises at least three third positioning blocks (206), the inner end of each third positioning block (206) having a second arc surface (207) matching the outer wall of the upper dome (6), the second arc surface (207) being in contact with the upper dome (6), and the outer end of the third positioning block (206) being provided with a third screw portion (208), the third screw portion (208) penetrating through the hole (13) on the bottom storage partition (10) and fixing the third positioning block (206) on the bottom storage partition (10) via a nut.

10. A method for using a clamping device for cleaning a quartz component in an epitaxial furnace, comprising the following steps: 1) Preparation stage: placing the clamping device on a horizontal end surface to ensure that the device is placed stably, and then checking and ensuring that a plurality of evenly distributed holes (13) on each storage partition (10), vertical support plate (11) and fixing plate (12) are aligned; 2) Installing the lifting shaft (4): inserting the inclined support foot (40) of the lifting shaft (4) into the positioning hole (104) through the positioning hole (104) on the upper storage partition (10), and making the left and right ends of the lifting shaft (4) abut against the first positioning member (20) to ensure that the lifting shaft (4) is initially positioned, and using the first limiting member (30) to firmly clamp the lifting shaft (4) on the upper storage partition (10) through the hole (13) on the upper storage partition (10) to ensure that the lifting shaft (4) is firmly fixed; 3) Installing the lower dome (5): guiding the tube portion (50) of the lower dome (5) through the guide groove (103) so that it extends into the upper storage partition (10), while ensuring that the disc-shaped portion (51) of the lower dome (5) is located in and abuts against the second positioning member (21) on the middle storage partition (10), completing the preliminary positioning of the lower dome (5), and using the second limiting member (31) to firmly clamp the lower dome (5) on the middle storage partition (10) through the hole (13) on the middle storage partition (10), ensuring that the lower dome (5) is firmly fixed; 4) Installing the upper dome (6): placing the upper dome (6) on the bottom storage partition (10) so that its outer wall abuts against the third positioning member (22) to complete the preliminary positioning of the upper dome (6), and using the third limiting member (32) to firmly clamp the upper dome (6) on the bottom storage partition (10) through the hole (13) on the bottom storage partition (10) to ensure that the upper dome (6) is firmly fixed; 5) Start cleaning: Start the cleaning equipment and start the cleaning process of the quartz parts. During this period, the clamping device remains stable to ensure the cleaning effect; 6) Disassembly and maintenance: After cleaning, the limiter and quartz parts can be easily disassembled through the detachable design, which is convenient for subsequent inspection and maintenance.

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