ALD (Atomic Layer Deposition) equipment source bottle capable of monitoring residual quantity

Abstract

The invention discloses an ALD (atomic layer deposition) equipment source bottle capable of monitoring residual quantity, relates to the technical field of source bottles, and is used for solving the problem that the residual quantity of solid, liquid and gaseous reaction sources in the ALD equipment source bottle cannot be accurately monitored in real time in the prior art. Comprising a source bottle main body, a sensing module and a driving system, the sensing module at least comprises an isolating layer, and a driving piezoelectric ceramic and a sensing piezoelectric ceramic which are arranged below the isolating layer; the isolating layer is used for isolating the piezoelectric ceramic from a reaction source in the source bottle main body; the isolation layer is used for transmitting the pressure of the reaction source to the piezoelectric ceramic; the driving system is used for generating driving signals; the driving signal drives the piezoelectric ceramic to generate vibration, and the sensing piezoelectric ceramic receives the vibration and converts the vibration into an electric signal to be collected by the driving system. According to the technical scheme provided by the invention, accurate and real-time monitoring on the residual amount of the solid-state, liquid-state and gas-state reaction sources in the source bottle of the ALD equipment can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of source bottles, and in particular to an ALD equipment source bottle with monitorable residual quantity. Background Art

[0002] ALD equipment refers to atomic layer deposition (ALD) equipment, which is an advanced chemical vapor deposition technology device used to prepare thin film materials. ALD equipment has important applications in the fields of electronic device nanotechnology, especially in the chemical vapor deposition process, it can prepare thin films of uniform thickness. ALD equipment can be used to produce semiconductor chips, thin film batteries, microelectronic devices, optoelectronic devices, etc., and is widely used in advanced electronics, optoelectronics and nanotechnology fields. The core of ALD equipment is a reaction chamber that can control the composition, thickness and quality of materials. It uses colloidal synthesis, chemical vapor deposition, physical vapor deposition and other methods, and uses solids, gases or liquids in the reaction chamber to alternately perform different monolayer chemical reactions in a circulation system to form a monolayer of molecules on the surface, which is gradually deposited to the required thickness, thus becoming a complete, uniform and dense thin film material. ALD equipment can prepare thin film materials with specific surface characteristics, electrical, optical and mechanical properties, making its application range more extensive.

[0003] The reaction source of the ALD equipment is solid, liquid or gaseous. The reaction source is high-purity and volatile. Most of the source bottles of some reaction sources are metal bottles in the atmospheric environment, and the reaction source in the bottle is invisible. For gaseous reaction sources, a barometer is used to monitor the remainder. For liquid reaction sources, most designs use a built-in liquid level gauge, or a pressure difference method to monitor the remainder. The remainder of the solid reaction source can only be monitored by weighing, which requires the interface above the source bottle to be connected with a hose, but the use of a hose will increase the risk of leakage of the reaction source. In the prior art, it is impossible to accurately and real-time monitor the remaining amount of solid, liquid, and gaseous reaction sources in the source bottle of the ALD equipment.

[0004] Therefore, there is an urgent need to provide an ALD equipment source bottle with monitorable balance. Summary of the invention

[0005] The purpose of the present invention is to provide an ALD equipment source bottle with monitorable residual amount, so as to solve the problem in the prior art that the residual amount of solid, liquid and gaseous reaction sources in the ALD equipment source bottle cannot be accurately and real-time monitored.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] In a first aspect, the present invention provides an ALD equipment source bottle with a monitorable residual quantity, comprising at least:

[0008] Source bottle body, sensor module and drive system;

[0009] The sensing module at least includes an isolation layer and a piezoelectric ceramic disposed below the isolation layer; the piezoelectric ceramic includes a driving piezoelectric ceramic and a sensing piezoelectric ceramic;

[0010] The isolation layer is used to isolate the piezoelectric ceramic from the reaction source in the source bottle body; the isolation layer is used to transfer the pressure of the reaction source to the piezoelectric ceramic;

[0011] The driving system is used to generate a driving signal; the driving signal drives the piezoelectric ceramic to generate vibration, the sensing piezoelectric ceramic receives the vibration, and converts the vibration into an electrical signal to be collected by the driving system.

[0012] Optionally, the source bottle body includes a source outlet, a bottle cavity and a manual valve;

[0013] The source outlet is connected to the source bottle body of the ALD device; and the connectivity between the bottle cavity and the ALD device is controlled by controlling the opening and closing of the manual valve.

[0014] Optionally, the sensor module further includes:

[0015] Transparent alumina ceramic block and high-frequency signal connector;

[0016] A first electrode terminal is arranged on the upper surface of the driving piezoelectric ceramic; a second electrode terminal is arranged between the driving piezoelectric ceramic and the sensing piezoelectric ceramic; a third electrode terminal is arranged on the lower surface of the sensing piezoelectric ceramic; the first electrode terminal, the second electrode terminal and the third electrode terminal are all led out through a high-frequency signal connector;

[0017] A fixed bottom plate is disposed below the transparent alumina ceramic block, and the fixed bottom plate is airtightly connected to the lower end of the bottle cavity.

[0018] Optionally, the drive system at least includes:

[0019] MCU, DDS module, lock-in amplifier, preamplifier and operational amplifier;

[0020] One end of the MCU is connected to the DDS module, and the other end of the MCU is connected to the lock-in amplifier; the DDS module is connected to the lock-in amplifier and the operational amplifier respectively; the lock-in amplifier is connected to the preamplifier;

[0021] The MCU is used to output and collect digital signals and analog signals. The MCU transmits the output signals to the DDS module, so that the DDS module generates a high-frequency signal of a corresponding frequency.

[0022] Optionally, the operational amplifier is connected to the first electrode terminal; the preamplifier is connected to the second electrode terminal; the preamplifier is connected to the third electrode terminal;

[0023] The high-frequency signal is input into the lock-in amplifier as a reference signal, or the high-frequency signal is transmitted to the first electrode terminal as a driving signal through the operational amplifier;

[0024] The signal entering from the third electrode terminal is amplified by the preamplifier, and the amplified signal is input into the phase-locked amplifier, and the phase-locked amplifier obtains the amplitude of the input signal and the phase difference relative to the reference signal through the reference signal and the input signal; the second electrode terminal is grounded.

[0025] Optionally, the isolation layer serves as the bottom of the bottle cavity, and the thickness of the isolation layer is less than the thickness of the tubular cavity wall of the bottle cavity; the bottle cavity is made of stainless steel.

[0026] Optionally, the first electrode terminal, the second electrode terminal and the third electrode terminal are all protected by insulating materials.

[0027] Optionally, the fixed base plate is used to firmly combine the piezoelectric ceramic, the transparent alumina ceramic block and the bottle cavity.

[0028] Optionally, the gas gap in the space between the isolation layer and the fixed base plate is filled with an insulating resin material.

[0029] Optionally, the driving system determines a change in the piezoelectric ceramic load based on the collected electrical signal, and determines a change in the reaction source residue based on the change;

[0030] Based on the first mapping relationship between the reaction source residue of each type and the load applied to the piezoelectric ceramic, a second mapping relationship between the change in amplitude and phase and the reaction source residue is obtained; the MCU processes and presents the collected data according to the second mapping relationship, and monitors the reaction source residue in the source bottle.

[0031] Technical effects:

[0032] Compared with the prior art, the present invention provides a source bottle of an ALD device with a monitorable residual amount. It includes a source bottle body, a sensor module and a drive system; the sensor module includes at least an isolation layer, and a driving piezoelectric ceramic and a sensing piezoelectric ceramic arranged below the isolation layer; the isolation layer is used to isolate the piezoelectric ceramic from the reaction source in the source bottle body; the isolation layer is used to transmit the pressure of the reaction source to the piezoelectric ceramic; the drive system is used to generate a drive signal; the drive signal drives the piezoelectric ceramic to generate vibration, and the sensing piezoelectric ceramic receives the vibration and converts it into an electrical signal to be collected by the drive system. The sensor module used in the technical solution provided by the present invention includes piezoelectric ceramics and an isolation layer, and the piezoelectric effect and the inverse piezoelectric effect can be used to obtain the high-precision residual amount of the source bottle reaction source; the residual amount of solid, liquid and gaseous reaction sources can be measured; the real-time measurement of the residual amount of the reaction source can be achieved without interrupting the experiment; the measurement process has no contact with the reaction source and will not introduce pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0034] Figure 1 A schematic cross-sectional view of a source bottle of an ALD device with monitorable residual quantity provided by the present invention;

[0035] Figure 2 A front schematic diagram of a source bottle of an ALD device with monitorable residual quantity provided by the present invention;

[0036] Figure 3 A schematic side view of a source bottle of an ALD device with monitorable residual quantity provided by the present invention;

[0037] Figure 4 A schematic structural diagram of a drive system provided by the present invention.

[0038] Reference numerals:

[0039] 1-source outlet, 2-manual valve, 3-bottle cavity, 4-isolation layer, 5-driving piezoelectric ceramic, 6-sensing piezoelectric ceramic, 7-transparent alumina ceramic block, 8-fixed base plate, 9-high-frequency signal connector; 10-first electrode end, 11-second electrode end, 12-third electrode end, 13-MCU, 14-DDS module, 15-phase-locked amplifier, 16-preamplifier, 17-operational amplifier. DETAILED DESCRIPTION

[0040] In order to clearly describe the technical solutions of the embodiments of the present invention, in the embodiments of the present invention, words such as "first" and "second" are used to distinguish the same items or similar items with basically the same functions and effects. For example, the first threshold and the second threshold are only used to distinguish different thresholds, and their order is not limited. Those skilled in the art can understand that words such as "first" and "second" do not limit the quantity and execution order, and words such as "first" and "second" do not necessarily limit them to be different.

[0041] It should be noted that, in the present invention, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0042] In the present invention, "at least one" means one or more, and "plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the associated objects before and after are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can mean: a, b, c, the combination of a and b, the combination of a and c, the combination of b and c, or the combination of a, b and c, where a, b, c can be single or multiple.

[0043] First, some of the terms used in the embodiments of this specification are explained:

[0044] Microcontroller Unit (MCU), also known as SingleChip Microcomputer or MCU, appropriately reduces the frequency and specifications of the Central Processing Unit (CPU), and integrates memory, timer, USB, A / D conversion, UART, PLC, DMA and other peripheral interfaces, and even LCD driver circuits on a single chip to form a chip-level computer, which can perform different combination controls for different application scenarios.

[0045] DDS module: Also known as high-frequency signal generation module, the DDS module can generate signals of various frequencies and waveforms in a digital way. It can synthesize output signals of specific frequencies by adjusting the step value of the phase accumulator, making DDS very useful in generating precise frequency modulation, frequency hopping, spectrum scanning and other applications. It can generate a variety of waveforms, such as sine, square or sawtooth waves.

[0046] During the experiment, the source bottle used in the ALD equipment is generally small and usually does not contain a reaction source remainder monitoring device. Before the experiment, the only way to confirm whether the reaction source remainder is sufficient is to disassemble and weigh the source bottle.

[0047] In order to solve the problems in the prior art, the present invention provides an ALD equipment source bottle with monitorable residual amount, so as to realize accurate and real-time monitoring of the residual amount of solid, liquid and gaseous reaction sources in the source bottle of the ALD equipment.

[0048] Next, the solution provided by the embodiments of this specification is described in conjunction with the accompanying drawings:

[0049] like Figure 1 As shown, a source bottle of an ALD device with a balance monitorable may include at least:

[0050] Source bottle body, sensor module and drive system;

[0051] The sensing module at least includes an isolation layer 4 and a piezoelectric ceramic disposed below the isolation layer 4;

[0052] The piezoelectric ceramics may include a driving piezoelectric ceramic 5 and a sensing piezoelectric ceramic 6;

[0053] The isolation layer 4 is used to isolate the piezoelectric ceramic from the reaction source in the source bottle body; the isolation layer 4 is used to transfer the pressure of the reaction source to the piezoelectric ceramic;

[0054] The driving system is used to generate a driving signal; the driving signal drives the piezoelectric ceramic 5 to generate vibration, the sensing piezoelectric ceramic 6 receives the vibration, and converts the vibration into an electrical signal to be collected by the driving system.

[0055] based on Figure 1 The structure in this specification also provides some specific structures of the structure. Figure 1-Figure 3 Provide detailed explanation.

[0056] As an optional implementation, Figure 1 The source bottle body may include:

[0057] An outlet 1, a bottle cavity 3 and a manual valve 2;

[0058] The source outlet 1 is connected to the source bottle body of the ALD device; the connectivity between the bottle cavity 3 and the ALD device is controlled by controlling the opening and closing of the manual valve 2.

[0059] More specifically, the source outlet 1 is connected to the source bottle installation interface of the ALD device, the bottle cavity 3 is filled with a reaction source, and the opening and closing of the manual valve 2 can control whether the bottle cavity 3 is connected to the ALD device.

[0060] Figure 1 The sensing module may also include:

[0061] Transparent alumina ceramic block 7 and high-frequency signal connector 9;

[0062] A first electrode terminal 10 is arranged on the upper surface of the driving piezoelectric ceramic 5; a second electrode terminal 11 is arranged between the driving piezoelectric ceramic 5 and the sensing piezoelectric ceramic 6; a third electrode terminal 12 is arranged on the lower surface of the sensing piezoelectric ceramic 6; the first electrode terminal 10, the second electrode terminal 11 and the third electrode terminal 12 are all led out through a high-frequency signal connector 9.

[0063] In the above structure, the isolation layer 4 is also a part of the bottle cavity 3, and the isolation layer 4 is the bottom of the bottle cavity 3. However, the thickness of the isolation layer 4 is smaller than the thickness of the cylindrical cavity wall of the bottle cavity 3, and the strain is relatively large.

[0064] Below the isolation layer 4 is the piezoelectric ceramic, and the isolation layer 4 mainly functions to transmit pressure to the piezoelectric ceramic below and to isolate the reaction source from the piezoelectric ceramic.

[0065] More specifically, below the isolation layer 4 may be a driving piezoelectric ceramic 5 and a sensing piezoelectric ceramic 6. Electrodes are respectively provided on the upper surface of the driving piezoelectric ceramic 5, between the two piezoelectric ceramics, and on the lower surface of the sensing piezoelectric ceramic 6, and the electrodes are led out through a high-frequency signal connector 9.

[0066] The first electrode terminal 10 may be an input terminal, the second electrode terminal 11 may be a GND terminal, and the third electrode terminal 12 may be an output terminal.

[0067] Furthermore, the first electrode terminal 10 , the second electrode terminal 11 and the third electrode terminal 12 need to be protected by insulating materials. This arrangement can insulate the electrodes from the bottle cavity 3 .

[0068] As an optional implementation, the bottle cavity 3 is made of stainless steel. This configuration can prevent the electrodes on the surface of the piezoelectric ceramic from being connected to the bottle cavity 3 and causing problems such as short circuits.

[0069] In the actual experiment, the transparent alumina ceramic block 7 may be placed under the piezoelectric ceramic. This material is selected because of its high hardness, which can ensure that the deformation of the piezoelectric ceramic is controlled in the thickness direction without causing deformation such as bending and torsion.

[0070] Furthermore, below the transparent alumina ceramic block 7 is a fixed bottom plate 8, and the fixed bottom plate 8 is airtightly connected to the lower end of the bottle cavity 3. In this arrangement, the fixed bottom plate 8 plays a fixed supporting role, ensuring that the piezoelectric ceramics and the transparent alumina ceramic block 7 above it are firmly combined with the bottle cavity 3.

[0071] In addition, the air gap in the space between the isolation layer 4 and the fixed base plate 8 can be filled with an insulating resin material. This arrangement can prevent the air gap from expanding due to temperature changes and causing errors.

[0072] Next, for Figure 1 The drive system in the Figure 4 To explain:

[0073] like Figure 4 As shown, the drive system may include at least:

[0074] MCU 13, DDS module 14, lock-in amplifier 15, preamplifier 16 and operational amplifier 17;

[0075] One end of the MCU 13 is connected to the DDS module 14, and the other end of the MCU 13 is connected to the lock-in amplifier 15; the DDS module 14 is connected to the lock-in amplifier 15 and the operational amplifier 17 respectively; the lock-in amplifier 15 is connected to the preamplifier 16;

[0076] The MCU 13 is used to output and collect digital signals and analog signals. The MCU 13 transmits the output signals to the DDS module 14 , so that the DDS module 14 generates high-frequency signals of corresponding frequencies.

[0077] More specifically, the operational amplifier 17 is connected to the first electrode terminal 10; the preamplifier 16 is connected to the second electrode terminal 11; the preamplifier 16 is connected to the third electrode terminal 12;

[0078] The high frequency signal is input into the lock-in amplifier 15 as a reference signal, or the high frequency signal is transmitted to the first electrode terminal 10 as a driving signal through the operational amplifier 17;

[0079] The signal entering from the third electrode terminal 12 is amplified by the preamplifier 16, and the amplified signal is input into the phase-locked amplifier 15. The phase-locked amplifier 15 obtains the amplitude of the input signal and the phase difference relative to the reference signal through the reference signal and the input signal; the second electrode terminal 11 is grounded.

[0080] against Figure 4 In the driving system structure, in more detail, MCU13 serves as the control core of the system and outputs signals to the DDS module 14, so that the DDS module 14 generates a high-frequency signal of a corresponding frequency. The high-frequency signal can be input as a reference signal into the phase-locked amplifier 15, and can also be transmitted as a driving signal to the input end (the first electrode end 10) through the operational amplifier 17.

[0081] The tiny signal entering from the output end (the third electrode end 12) is amplified by the preamplifier 16, and the amplified signal is input to the phase-locked amplifier 15. The phase-locked amplifier 15 obtains the amplitude of the input signal and the phase difference relative to the reference signal through the reference signal and the input signal, and the amplitude and phase signals are transmitted to the MCU13.

[0082] In order to explain in detail the technical effect of the ALD device source bottle with a monitorable residual amount provided by the present invention, the working principle of the ALD device source bottle with a monitorable residual amount provided by the present invention is explained below:

[0083] First, the driving system can give a driving signal to the input end (first electrode end 10), thereby causing the driving piezoelectric ceramic 5 to vibrate, and the sensing piezoelectric ceramic 6 below will receive the vibration and convert it into an electrical signal to be collected by the driving system.

[0084] The resonant frequency of piezoelectric ceramic materials is different under different loads, so when the driving signal given to the piezoelectric ceramic remains unchanged and the load changes, its amplitude and phase will change. The change in the load can be obtained by the change in amplitude and phase. The mapping relationship between the change in amplitude and phase and the change in load can be obtained through calibration.

[0085] Regardless of whether it is a solid, liquid or gaseous reaction source, the isolation layer 4 is subject to the pressure of the reaction source. For solid and liquid reaction sources, this pressure comes from the saturated vapor pressure in the bottle and the weight of the reaction source itself. For gaseous reaction sources, this pressure comes from the pressure of the compressed reaction source gas in the bottle.

[0086] The isolation layer 4 is relatively thin and has a relatively large strain, and can transmit the pressure generated by the reaction source to the piezoelectric ceramic below.

[0087] According to the above principle, the driving system can obtain the change in amplitude and phase of the piezoelectric ceramic under different loads, thereby obtaining the change in the load of the piezoelectric ceramic, thereby obtaining the change in the reaction source residue. By calculating the mapping relationship between the residue of each type of reaction source and the load applied to the piezoelectric ceramic, the mapping relationship between the change in amplitude and phase and the reaction source residue can be obtained. Using this mapping relationship, MCU13 processes and presents the collected data, and the reaction source residue in the source bottle can be monitored in real time.

[0088] Finally, based on the solutions in the aforementioned embodiments, the present invention provides an ALD equipment source bottle with monitorable remainder, which adopts a piezoelectric ceramic sensor and utilizes the piezoelectric effect and the inverse piezoelectric effect to obtain the high-precision source bottle reaction source remainder; the residual amount of solid, liquid, and gaseous reaction sources can be measured; real-time measurement of the reaction source residual can be achieved without interrupting the experiment; the measurement process has no contact with the reaction source and will not introduce pollution, and can accurately and real-time monitor the residual amount of solid, liquid, and gaseous reaction sources in the source bottle.

[0089] The embodiment of the present invention can divide the functional modules according to the above examples. For example, each functional module can be divided according to each function, or two or more functions can be integrated into one processing module. The above integrated modules can be implemented in the form of hardware or in the form of software functional modules. It should be noted that the division of modules in the embodiment of the present invention is schematic and is only a logical function division. There may be other division methods in actual implementation.

[0090] Although the present invention is described herein in conjunction with various embodiments, in the process of implementing the claimed invention, those skilled in the art may understand and implement other variations of the disclosed embodiments by viewing the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other components or steps, and "one" or "an" does not exclude multiple situations. A single processor or other unit may implement several functions listed in the claims. Certain measures are recorded in different dependent claims, but this does not mean that these measures cannot be combined to produce good results.

[0091] Although the present invention has been described in conjunction with specific features and embodiments thereof, it is apparent that various modifications and combinations may be made thereto without departing from the spirit and scope of the present invention. Accordingly, this specification and the accompanying drawings are merely exemplary illustrations of the present invention as defined by the appended claims and are deemed to cover any and all modifications, variations, combinations or equivalents within the scope of the present invention. Obviously, those skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, the present invention is intended to include such modifications and variations if they fall within the scope of the claims of the present invention and their equivalents.

Claims

1. A source bottle of an ALD device with a monitorable residual quantity, characterized in that: At least: Source bottle body, sensor module and drive system; The sensing module at least includes an isolation layer and a piezoelectric ceramic disposed below the isolation layer; The piezoelectric ceramics include driving piezoelectric ceramics and sensing piezoelectric ceramics; The isolation layer is used to isolate the piezoelectric ceramic from the reaction source in the source bottle body; the isolation layer is used to transfer the pressure of the reaction source to the piezoelectric ceramic; The driving system is used to generate a driving signal; The driving signal drives the piezoelectric ceramic to generate vibration, and the sensing piezoelectric ceramic receives the vibration and converts the vibration into an electrical signal to be collected by the driving system.

2. The ALD source bottle with a monitorable residual quantity according to claim 1, characterized in that: The source bottle body comprises a source outlet, a bottle cavity and a manual valve; The source outlet is connected to the source bottle body of the ALD device; and the connectivity between the bottle cavity and the ALD device is controlled by controlling the opening and closing of the manual valve.

3. The source bottle of an ALD device with a monitorable residual quantity according to claim 2, characterized in that: The sensor module also includes: Transparent alumina ceramic block and high-frequency signal connector; A first electrode terminal is arranged on the upper surface of the driving piezoelectric ceramic; a second electrode terminal is arranged between the driving piezoelectric ceramic and the sensing piezoelectric ceramic; a third electrode terminal is arranged on the lower surface of the sensing piezoelectric ceramic; the first electrode terminal, the second electrode terminal and the third electrode terminal are all led out through a high-frequency signal connector; A fixed bottom plate is disposed below the transparent alumina ceramic block, and the fixed bottom plate is airtightly connected to the lower end of the bottle cavity.

4. The source bottle of an ALD device with a monitorable residual quantity according to claim 3, characterized in that: The drive system at least comprises: MCU, DDS module, lock-in amplifier, preamplifier and operational amplifier; One end of the MCU is connected to the DDS module, and the other end of the MCU is connected to the lock-in amplifier; the DDS module is connected to the lock-in amplifier and the operational amplifier respectively; the lock-in amplifier is connected to the preamplifier; The MCU is used to output and collect digital signals and analog signals. The MCU transmits the output signals to the DDS module, so that the DDS module generates a high-frequency signal of a corresponding frequency.

5. The source bottle of an ALD device with a monitorable residual quantity according to claim 4, characterized in that: The operational amplifier is connected to the first electrode terminal; the preamplifier is connected to the second electrode terminal; the preamplifier is connected to the third electrode terminal; The high-frequency signal is input into the lock-in amplifier as a reference signal, or the high-frequency signal is transmitted to the first electrode terminal as a driving signal through the operational amplifier; The signal entering from the third electrode terminal is amplified by the preamplifier, and the amplified signal is input into the phase-locked amplifier, and the phase-locked amplifier obtains the amplitude of the input signal and the phase difference relative to the reference signal through the reference signal and the input signal; the second electrode terminal is grounded.

6. The source bottle of an ALD device with a monitorable residual quantity according to claim 2, characterized in that: The isolation layer serves as the bottom of the bottle cavity, and the thickness of the isolation layer is less than the thickness of the cylindrical cavity wall of the bottle cavity; the bottle cavity is made of stainless steel.

7. The source bottle of an ALD device with a monitorable residual quantity according to claim 3, characterized in that: The first electrode terminal, the second electrode terminal and the third electrode terminal are all protected by insulating materials.

8. The source bottle of an ALD device with a monitorable residual quantity according to claim 3, characterized in that: The fixed bottom plate is used to firmly combine the piezoelectric ceramic, the transparent alumina ceramic block and the bottle cavity.

9. The source bottle of an ALD device with a monitorable residual quantity according to claim 3, characterized in that: The gas gap in the space between the isolation layer and the fixed base plate is filled with an insulating resin material.

10. The source bottle of an ALD device with a monitorable residual quantity according to claim 4, characterized in that: The driving system determines a change in the piezoelectric ceramic load based on the collected electrical signal, and determines a change in the reaction source residue based on the change; Based on the first mapping relationship between the reaction source residue of each type and the load applied to the piezoelectric ceramic, a second mapping relationship between the change in amplitude and phase and the reaction source residue is obtained; the MCU processes and presents the collected data according to the second mapping relationship, and monitors the reaction source residue in the source bottle.

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