Pressure sensor, measuring range adjusting method and electronic equipment

Abstract

The invention relates to the technical field of pressure sensing, and further relates to a pressure sensor, a measuring range adjusting method and electronic equipment. The pressure sensor includes a Wheatstone bridge configured to convert an external pressure signal into an output voltage signal; the measuring range compensation circuit is connected with the Wheatstone bridge and is configured to adjust the measuring range of the pressure sensor based on the user demand and the output voltage signal; and the temperature compensation circuit is connected with the Wheatstone bridge and is configured to eliminate the temperature drift of the output voltage signal. According to the pressure sensor, the measuring range compensation circuit and the temperature compensation circuit are arranged in the pressure sensor, and a user can adjust the measuring range of the pressure sensor according to requirements through the measuring range compensation circuit. And the output voltage signal is finely adjusted through the temperature compensation circuit, so that the temperature drift of the output voltage signal can be eliminated, and the accuracy of a measurement result is improved.

Description

Technical Field

[0001] The present application relates to the field of pressure sensing technology, and further to a pressure sensor, a range adjustment method and an electronic device. Background Art

[0002] With the advancement of semiconductor manufacturing technology and precision processing technology, fluid pressure sensors have been widely used in the medical field. For example, fluid pressure sensors are often used to monitor and respond to subtle changes in pressure in the user's body. However, the range of existing fluid pressure sensors is fixed at the factory, which limits their flexibility in meeting different user needs. Users cannot adjust the sensor's range in real time according to specific application scenarios or user conditions, which leads to inaccurate or inapplicable measurement results. Summary of the invention

[0003] In order to solve the above technical problems, the present application provides a pressure sensor, a range adjustment method and an electronic device, which improve the accuracy of the measurement results.

[0004] In a first aspect, the present application provides a pressure sensor, comprising: a Wheatstone bridge, configured to convert an external pressure signal into an output voltage signal; a range compensation circuit, the range compensation circuit being connected to the Wheatstone bridge and configured to adjust the range of the pressure sensor based on user requirements and the output voltage signal; and a temperature compensation circuit, the temperature compensation circuit being connected to the Wheatstone bridge and configured to eliminate temperature drift of the output voltage signal.

[0005] The above pressure sensors have built-in range compensation circuit and temperature compensation circuit. Through the range compensation circuit, users can adjust the range of the pressure sensor according to their needs. And through the temperature compensation circuit, the output voltage signal can be fine-tuned to eliminate the temperature drift of the output voltage signal, thereby improving the accuracy of the measurement results.

[0006] In one implementation, the range compensation circuit includes a plurality of variable resistors or a plurality of potentiometers, and the temperature compensation circuit includes a plurality of temperature-sensitive resistors.

[0007] In one implementation, the range compensation circuit includes a plurality of first thin film resistors; the plurality of first thin film resistors are connected in parallel with the Wheatstone bridge and are configured to adjust the range of the pressure sensor based on laser cutting technology.

[0008] For the above pressure sensor, when the value of the external voltage signal exceeds the measuring range of the pressure sensor, the resistance values ​​of multiple first thin film resistors can be adjusted by laser cutting technology, by adjusting multiple variable resistors, and by adjusting the resistance values ​​of multiple potentiometers. This not only allows the user to adjust the measuring range of the pressure sensor as needed, but also improves the compatibility of the present solution.

[0009] In one implementation, the temperature compensation circuit includes a plurality of second thin film resistors and a plurality of third thin film resistors; the plurality of second thin film resistors are connected in series with the Wheatstone bridge, and the plurality of third thin film resistors are connected in parallel with the Wheatstone bridge.

[0010] In the above pressure sensor, after the Wheatstone bridge generates an output voltage signal, multiple second thin film resistors and multiple third thin film resistors jointly fine-tune the output voltage signal, which can eliminate the temperature drift of the output voltage signal and improve the accuracy of the measurement result. Furthermore, the temperature compensation circuit can also include multiple temperature-sensitive resistors, and the output voltage signal can be fine-tuned by multiple temperature-sensitive resistors to eliminate the temperature drift of the output voltage signal, thereby improving the flexibility of the solution and user experience.

[0011] In one implementation, it also includes: a ceramic plate, configured to generate a fourth thin film resistor based on plasma and ion beam sputtering coating technology; the fourth thin film resistor is configured to generate a plurality of the first thin film resistors based on a heat treatment process and the laser cutting technology, or is configured to generate a plurality of the second thin film resistors and a plurality of the third thin film resistors based on a heat treatment process and the laser cutting technology.

[0012] The above pressure sensors use plasma and ion beam sputtering coating technology to achieve high-efficiency and high-precision generation of the fourth thin film resistor on the ceramic plate, ensuring the consistency and reliability of the thin film resistor. In addition, after the slow heating and cooling heat treatment process, the performance stability of the thin film resistor is further improved, and the impact of temperature changes on the resistor performance is reduced. Finally, the fourth thin film resistor is finely adjusted through laser cutting technology to manufacture the first, second and third thin film resistors that meet different needs. Not only is the production efficiency and quality of thin film resistors improved, but also the precise control of resistance values ​​is achieved through laser resistance adjustment.

[0013] In one implementation, the pressure sensor is a fluid pressure sensor.

[0014] In a second aspect, the present application also provides a range adjustment method for use in any of the above-described pressure sensors, comprising: converting the external pressure signal into an output voltage signal through the Wheatstone bridge; when the output voltage signal exceeds the range, adjusting the range according to the user's needs and the range compensation circuit; and eliminating the temperature drift of the output voltage signal through the temperature compensation circuit.

[0015] In one implementation, converting the external pressure signal into an output voltage signal through the Wheatstone bridge specifically includes: determining the bridge supply voltage of the Wheatstone bridge based on the resistance of the range compensation circuit, the reference resistance of the Wheatstone bridge and the external power supply voltage; determining the output voltage signal based on the bridge supply voltage and the resistance value inside the Wheatstone bridge.

[0016] In one implementation, eliminating the temperature drift of the output voltage signal by the temperature compensation circuit specifically includes: eliminating the temperature drift of the output voltage signal according to the resistance value inside the Wheatstone bridge, the resistance value in the temperature compensation circuit and the bridge supply voltage.

[0017] In a third aspect, the present application also provides an electronic device, comprising the pressure sensor described in any of the above implementations.

[0018] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0019] 1. By building a range compensation circuit and a temperature compensation circuit into the pressure sensor, the user can adjust the range of the pressure sensor according to the needs through the range compensation circuit. And by fine-tuning the output voltage signal through the temperature compensation circuit, the temperature drift of the output voltage signal can be eliminated, thereby improving the accuracy of the measurement results.

[0020] 2. When the value of the external voltage signal exceeds the measuring range of the pressure sensor, the resistance values ​​of multiple first thin film resistors can be adjusted by laser cutting technology, by adjusting multiple variable resistors, and by adjusting the resistance values ​​of multiple potentiometers. This not only allows users to adjust the measuring range of the pressure sensor as needed, but also improves the compatibility of this solution.

[0021] 3. After the Wheatstone bridge generates an output voltage signal, multiple second thin film resistors and multiple third thin film resistors jointly fine-tune the output voltage signal, which can eliminate the temperature drift of the output voltage signal and improve the accuracy of the measurement result. Furthermore, the temperature compensation circuit can also include multiple temperature-sensitive resistors, and the output voltage signal can be fine-tuned by multiple temperature-sensitive resistors to eliminate the temperature drift of the output voltage signal, thereby improving the flexibility of the solution and user experience.

[0022] 4. Plasma and ion beam sputtering coating technology is used to achieve high-efficiency and high-precision generation of the fourth thin film resistor on the ceramic plate, ensuring the consistency and reliability of the thin film resistor. In addition, after the slow heating and cooling heat treatment process, the performance stability of the thin film resistor is further improved, and the impact of temperature changes on the resistor performance is reduced. Finally, the fourth thin film resistor is finely adjusted through laser cutting technology to manufacture the first, second and third thin film resistors that meet different needs. Not only is the production efficiency and quality of thin film resistors improved, but also the precise control of resistance value is achieved through laser resistance adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The preferred implementation modes will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present invention.

[0024] Figure 1 A structural block diagram of a pressure sensor provided in an embodiment of the present application is shown;

[0025] Figure 2 A circuit diagram of a pressure sensor provided in an embodiment of the present application is shown;

[0026] Figure 3 A circuit diagram for adjusting a measuring range provided in an embodiment of the present application is shown;

[0027] Figure 4 A circuit diagram for eliminating temperature drift provided by an embodiment of the present application is shown;

[0028] Figure 5 A transmission route diagram of an output voltage signal provided by an embodiment of the present application is shown;

[0029] Figure 6 A flow chart of a range adjustment method provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

[0031] In order to simplify the drawings, only the parts related to the invention are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".

[0032] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0033] In this document, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0035] It should be noted that the above embodiments can be freely combined as needed. The above are only preferred embodiments of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

[0036] A pressure sensor is a device that detects and responds to pressure changes and is widely used in many fields such as industry, medicine, automobiles, aviation, and environmental monitoring. For example, in the industrial field, pressure sensors may include strain gauge pressure sensors and piezoelectric pressure sensors. Strain gauge pressure sensors can detect material deformation through strain gauges, and piezoelectric pressure sensors can detect pressure through charge changes generated by piezoelectric materials; for another example, in the automotive field, pressure sensors may include piezoelectric pressure sensors and piezoresistive pressure sensors. Piezoelectric pressure sensors can be used to monitor tire pressure; piezoresistive pressure sensors can be used to monitor engine oil pressure. For another example, in the medical field, pressure sensors may include fluid pressure sensors. Fluid pressure sensors are used to detect users' blood pressure, intracranial pressure, etc. The embodiment of the present application can achieve at least one of the following beneficial effects by having a range compensation circuit and a temperature compensation circuit built into the pressure sensor: through the range compensation circuit, the user can adjust the range of the pressure sensor according to needs; or through the temperature compensation circuit, the temperature drift of the output voltage signal is eliminated to improve the accuracy of the measurement result.

[0037] The following is explained with reference to the accompanying drawings:

[0038] Reference Figure 1 , which shows a structural block diagram of a pressure sensor provided by an embodiment of the present application. Figure 1 As shown, it includes: a pressure sensor 100, a Wheatstone bridge 110, a range compensation circuit 120 and a temperature compensation circuit 130. Among them, the Wheatstone bridge 110 is configured to convert an external pressure signal into an output voltage signal; the range compensation circuit 120 is connected to the Wheatstone bridge 110 and is configured to adjust the range of the pressure sensor 100 based on user requirements and the output voltage signal; the temperature compensation circuit 130 is connected to the Wheatstone bridge 110 and is configured to eliminate the temperature drift of the output voltage signal.

[0039] Taking the pressure sensor 100 as a fluid pressure sensor as an example, when there is no external pressure signal, the Wheatstone bridge 110 is in a balanced state. At this time, the output voltage signal of the Wheatstone bridge 110 is 0. When there is an external pressure signal, the strain gauge or pressure sensitive element in the Wheatstone bridge 110 is deformed, which causes the resistance value inside the Wheatstone bridge 110 to change, causing the Wheatstone bridge 110 to be unbalanced and generate an output voltage signal. When the value of the output voltage signal exceeds the range of the current pressure sensor 100, the user can adjust the resistance value of the range compensation circuit 120, thereby changing the sensitivity of the bridge and the range of the pressure sensor to ensure that the output voltage signal matches the user's actual measurement needs. Furthermore, the output voltage signal can be fine-tuned by the temperature compensation circuit 130 to eliminate the temperature drift of the output voltage signal.

[0040] The embodiment of the present application has a built-in range compensation circuit and a temperature compensation circuit in the pressure sensor, and the range compensation circuit allows the user to adjust the range of the pressure sensor according to the needs. And the temperature compensation circuit can be used to fine-tune the output voltage signal to eliminate the temperature drift of the output voltage signal, thereby improving the accuracy of the measurement result.

[0041] Reference Figure 2 , which shows a circuit diagram of a pressure sensor provided by an embodiment of the present application. Figure 2 As shown, it includes: a positive power supply port 1, a negative power supply port 6, a negative output port 3, a positive output port 5 and a plurality of first thin film resistors 2, wherein the plurality of first thin film resistors 2 are respectively connected in parallel with the Wheatstone bridge 110 and are configured to adjust the range of the output voltage signal based on laser cutting technology.

[0042] The external power supply supplies power to the pressure sensor through the positive power supply port 1 and the negative power supply port 6, and the output voltage signal is used to be output through the positive output port 5 and the negative output port 3. When there is an external voltage signal, the Wheatstone bridge 110 generates an output voltage signal. If the value of the output voltage signal exceeds the range of the current pressure sensor 100, the user can laser trim the multiple first thin film resistors 2 through laser cutting technology to change the resistance values ​​of the multiple first thin film resistors 2, thereby changing the sensitivity of the bridge and the range of the output voltage signal. The range compensation circuit 120 may also include multiple variable resistors or multiple potentiometers, and the sensitivity of the bridge and the range of the output voltage signal are changed by adjusting the resistance values ​​of the multiple variable resistors or the resistance values ​​of the multiple potentiometers.

[0043] In the embodiment of the present application, when the value of the external voltage signal exceeds the measuring range of the pressure sensor, the resistance values ​​of multiple first thin film resistors can be adjusted by laser cutting technology, by adjusting multiple variable resistors, and by adjusting the resistance values ​​of multiple potentiometers. This not only allows the user to adjust the measuring range of the pressure sensor as needed, but also improves the compatibility of the present solution.

[0044] In one embodiment of the present application, refer to the attached Figure 2The temperature compensation circuit includes a plurality of second thin film resistors 4 and a plurality of third thin film resistors 7. Among them, the plurality of second thin film resistors 4 are connected in series with the Wheatstone bridge 110, and the plurality of third thin film resistors 7 are connected in parallel with the Wheatstone bridge 110. After the Wheatstone bridge 110 generates an output voltage signal, the plurality of second thin film resistors 4 and the plurality of third thin film resistors 7 jointly fine-tune the output voltage signal, which can eliminate the temperature drift of the output voltage signal and improve the accuracy of the measurement result. Furthermore, the temperature compensation circuit can also include a plurality of thermistors, and the output voltage signal can be fine-tuned by a plurality of thermistors, which can also eliminate the temperature drift of the output voltage signal, thereby improving the flexibility of the solution and the user experience.

[0045] Reference Figure 3 , which shows a circuit diagram for adjusting the range provided by an embodiment of the present application. Figure 3 As shown, it includes: a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4 and a fifth resistor Rs. The first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4 are connected to each other to form a Wheatstone bridge. The fifth resistor RS is the equivalent resistance of the plurality of first thin film resistors 2.

[0046] The Wheatstone bridge generates an output voltage signal V out When the fifth resistor RS and the reference resistor R of the Wheatstone bridge are B and the external power supply voltage V S Substitute into the formula Get the bridge voltage V of the Wheatstone bridge SB At the same time, the first resistor R1 and the third resistor R3 will also change under the action of the external pressure signal. The specific formula is R1 = R B ·(1-S·P)+Δ, R3=R B ·(1-S·P). Where S is the pressure sensitivity, P is the external pressure signal, Offset is the offset of the output voltage signal, and Δ is the offset of the first resistor R1 caused by temperature change. Further, the values ​​of the first resistor R1, the second resistor R2, the third resistor R3, the fourth resistor R4 and the bridge voltage V SB Substitute the value of into the formula Then we can get the output voltage signal V out The current flows from the fifth resistor Rs to the Wheatstone bridge to ground. SB With the fifth resistor R S The pressure sensor can be adjusted by adjusting the fifth resistor R S The resistance value can be adjusted accordingly to adjust the corresponding measuring range.

[0047] Reference Figure 4, which shows a circuit diagram for eliminating temperature drift provided by an embodiment of the present application. Figure 4 As shown, it includes a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a sixth resistor R T1 and the seventh resistor R T2 Among them, the sixth resistor R T1 is the equivalent resistance of the plurality of second thin film resistors 4, the seventh resistor R T2 is the equivalent resistance of the plurality of third thin film resistors 7. out When fine-tuning, the values ​​of the first resistor R1, the second resistor R2, the third resistor R3, the fourth resistor R4, and the sixth resistor R T1 The value of the seventh resistor R T2 Substitute the value of V into the formula out = Thus eliminating the output voltage signal V out Wherein, “ / / ” indicates parallel connection. When the temperature rises, the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4 increase, and the sixth resistor R T1 and the seventh resistor R T2 The voltage division ratio of the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4 increases, and the output voltage signal V out The value of becomes larger, compensating for the sensitivity of the Wheatstone bridge changing with temperature, resulting in the output voltage signal V out The value of the part is reduced, thereby ensuring that the output voltage signal V out The value does not change with temperature, which improves the accuracy of the measurement results.

[0048] The first thin film resistor, the second thin film resistor and the third thin film resistor are all generated by a ceramic plate in the pressure sensor. For example, in one embodiment of the present application, it also includes: a ceramic plate configured to generate a fourth thin film resistor based on plasma and ion beam sputtering coating technology; the fourth thin film resistor is configured to generate multiple first thin film resistors based on heat treatment process and laser cutting technology, or is configured to generate multiple second thin film resistors and multiple third thin film resistors based on heat treatment process and laser cutting technology.

[0049] First, the ceramic plate is ground and polished so that the surface roughness of the ceramic plate meets the user's requirements. The surface of the ground and polished ceramic plate is pre-treated by plasma to obtain a cleaned ceramic plate. The cleaned ceramic plate is then treated by ion beam sputtering coating technology to obtain a fourth thin film resistor (the thickness of the fourth thin film resistor can be set according to user requirements). A slow heating and cooling heat treatment process is used on the fourth thin film resistor to obtain a fourth thin film resistor with stable performance. Furthermore, the laser cutting technology is used to perform laser resistance trimming on the fourth thin film resistor with stable performance to obtain a first thin film resistor, a second thin film resistor, and a third thin film resistor.

[0050] Plasma and ion beam sputtering coating technology is used to achieve high-efficiency and high-precision generation of the fourth thin film resistor on the ceramic plate, ensuring the consistency and reliability of the thin film resistor. In addition, after the slow heating and cooling heat treatment process, the performance stability of the thin film resistor is further improved, and the impact of temperature changes on the resistor performance is reduced. Finally, the fourth thin film resistor is finely adjusted through laser cutting technology to manufacture the first, second and third thin film resistors that meet different needs. Not only is the production efficiency and quality of thin film resistors improved, but also the precise control of resistance value is achieved through laser resistance adjustment.

[0051] Reference Figure 5 , which shows a transmission route diagram of an output voltage signal provided by an embodiment of the present application. Figure 5 As shown, the pressure sensor (see Appendix Figure 5 The sensor in the pressure sensor sends the output voltage signal to the programmable gain amplifier to amplify the sensor signal. The amplified signal is then converted into a digital signal through an analog-to-digital converter and sent to a digital signal processor for digital compensation. The compensated digital signal is sent to a digital-to-analog converter and converted into an analog voltage signal for output. After the output voltage signal is fine-tuned by the temperature compensation circuit inside the pressure sensor, the temperature drift of the output voltage signal is eliminated, so that the analog voltage signal output from the digital-to-analog converter is more accurate and more in line with the user's measurement needs.

[0052] The embodiments of the present application can also directly output analog signals. For example, when a Wheatstone bridge receives an external pressure signal, the resistance value inside the Wheatstone bridge changes with the change of the external pressure. In other words, the output voltage signal (i.e., the analog signal) generated by the Wheatstone bridge is substantially proportional to the change of the external pressure.

[0053] Reference Figure 6 , which shows a flow chart of a range adjustment method provided in an embodiment of the present application. The method is used for a pressure sensor in any of the above embodiments, such as Figure 6 As shown, including:

[0054] S600 converts the external pressure signal into an output voltage signal through a Wheatstone bridge.

[0055] S610, when the output voltage signal exceeds the range, adjust the range according to user requirements and the range compensation circuit.

[0056] S620, eliminating the temperature drift of the output voltage signal through a temperature compensation circuit.

[0057] When there is no external pressure signal, the Wheatstone bridge is in a balanced state. At this time, the output voltage signal of the Wheatstone bridge is 0. When there is an external pressure signal, the strain gauge or pressure sensitive element in the Wheatstone bridge is deformed, which causes the resistance value inside the Wheatstone bridge to change, making the Wheatstone bridge unbalanced and generating an output voltage signal. When the value of the output voltage signal exceeds the range of the current pressure sensor, the user can adjust the resistance value of the range compensation circuit to change the sensitivity of the bridge and the range of the pressure sensor to ensure that the output voltage signal matches the user's actual measurement needs. Furthermore, the output voltage signal can be fine-tuned through the temperature compensation circuit to eliminate the temperature drift of the output voltage signal.

[0058] In one embodiment of the present application, an external pressure signal is converted into an output voltage signal through a Wheatstone bridge, specifically including: determining the bridge supply voltage of the Wheatstone bridge according to the resistance value of the range compensation circuit, the reference resistance value of the Wheatstone bridge and the external power supply voltage; determining the output voltage signal according to the bridge supply voltage and the resistance value inside the Wheatstone bridge.

[0059] The resistance value of the range compensation circuit is the resistance value of the fifth resistor RS, and the resistance values ​​inside the Wheatstone bridge are the values ​​of the first resistor R1, the second resistor R2, the third resistor R3, and the fourth resistor R4. B and the external power supply voltage V S Substitute into the formula Get the bridge voltage V of the Wheatstone bridge SB At the same time, the first resistor R1 and the third resistor R3 will also change under the influence of the external pressure signal. The specific formula is R1 =

[0060] R B ·(1-S·P)+Δ, R3=R B ·(1-S·P). Where S is the pressure sensitivity, P is the external pressure signal, Offset is the offset of the output voltage signal, and Δ is the offset of the first resistor R1 caused by temperature change. Further, the values ​​of the first resistor R1, the second resistor R2, the third resistor R3, the fourth resistor R4 and the bridge voltage V SB Substitute the value of into the formula Then we can get the output voltage signal V out The current flows from the fifth resistor Rs to the Wheatstone bridge to ground. SB With the fifth resistor R S The pressure sensor can be adjusted by adjusting the fifth resistor R S The resistance value can be adjusted accordingly to adjust the corresponding measuring range.

[0061] In one embodiment of the present application, the temperature drift of the output voltage signal is eliminated through a temperature compensation circuit, specifically including: eliminating the temperature drift of the output voltage signal based on the resistance value inside the Wheatstone bridge, the resistance value in the temperature compensation circuit and the bridge supply voltage.

[0062] The resistance values ​​in the temperature compensation circuit are respectively the sixth resistor R T1 The value of the seventh resistor R T2 The value of the output voltage signal V out When fine-tuning, the values ​​of the first resistor R1, the second resistor R2, the third resistor R3, the fourth resistor R4, and the sixth resistor R T1 The value of the seventh resistor R T2 Substitute the value of into the formula Thus eliminating the output voltage signal V out Wherein, “ / / ” indicates parallel connection. When the temperature rises, the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4 increase, and the sixth resistor R T1 and the seventh resistor R T2 The voltage division ratio of the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4 increases, and the output voltage signal V out The value of becomes larger, compensating for the sensitivity of the Wheatstone bridge changing with temperature, resulting in the output voltage signal V out The value of the part is reduced, thereby ensuring that the output voltage signal V out The value does not change with temperature, which improves the accuracy of the measurement results.

[0063] An embodiment of the present application also provides an electronic device, comprising the pressure sensor described in any of the above embodiments.

[0064] It should be noted that the above embodiments can be freely combined as needed. The above are only preferred embodiments of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A pressure sensor, characterized in that: include: a Wheatstone bridge configured to convert an external pressure signal into an output voltage signal; a range compensation circuit, the range compensation circuit being connected to the Wheatstone bridge and configured to adjust the range of the pressure sensor based on user requirements and the output voltage signal; A temperature compensation circuit is connected to the Wheatstone bridge and is configured to eliminate temperature drift of the output voltage signal.

2. The pressure sensor according to claim 1, characterized in that: The range compensation circuit includes a plurality of variable resistors or a plurality of potentiometers, and the temperature compensation circuit includes a plurality of temperature-sensitive resistors.

3. The pressure sensor according to claim 1, characterized in that: The range compensation circuit includes a plurality of first thin film resistors; A plurality of the first thin-film resistors are connected in parallel to the Wheatstone bridge and are configured to adjust the measuring range of the pressure sensor based on a laser cutting technology.

4. The pressure sensor according to claim 3, characterized in that: The temperature compensation circuit includes a plurality of second thin film resistors and a plurality of third thin film resistors; A plurality of the second thin-film resistors are connected in series with the Wheatstone bridge, and a plurality of the third thin-film resistors are connected in parallel with the Wheatstone bridge.

5. The pressure sensor according to claim 4, characterized in that: Also includes: a ceramic plate configured to generate a fourth thin film resistor based on plasma and ion beam sputtering coating technology; The fourth thin film resistor is configured to generate a plurality of the first thin film resistors based on a heat treatment process and the laser cutting technology, or is configured to generate a plurality of the second thin film resistors and a plurality of the third thin film resistors based on a heat treatment process and the laser cutting technology.

6. The pressure sensor according to any one of claims 1 to 4, characterized in that: The pressure sensor is a fluid pressure sensor.

7. A range adjustment method, characterized in that: The pressure sensor according to any one of claims 1 to 6 comprises: Converting the external pressure signal into an output voltage signal through the Wheatstone bridge; When the output voltage signal exceeds the measuring range, adjusting the measuring range according to the user demand and the measuring range compensation circuit; The temperature drift of the output voltage signal is eliminated by the temperature compensation circuit.

8. The range adjustment method according to claim 7, characterized in that: The converting the external pressure signal into an output voltage signal by the Wheatstone bridge specifically includes: Determining a bridge supply voltage of the Wheatstone bridge according to the resistance value of the range compensation circuit, the reference resistance value of the Wheatstone bridge and the external power supply voltage; The output voltage signal is determined according to the bridge supply voltage and the resistance value inside the Wheatstone bridge.

9. The range adjustment method according to claim 8, characterized in that: Eliminating the temperature drift of the output voltage signal by the temperature compensation circuit specifically includes: The temperature drift of the output voltage signal is eliminated according to the resistance value inside the Wheatstone bridge, the resistance value in the temperature compensation circuit and the bridge supply voltage.

10. An electronic device, characterized in that: A pressure sensor comprising any one of claims 1 to 6.

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