Laser processing device and control method thereof

Abstract

The invention relates to a laser processing apparatus and a control method thereof. The laser processing device comprises a laser light source used for emitting laser; the focusing field lens is used for focusing the laser to the surface of the target material; the first deflecting mirror is arranged adjacent to the laser light source and is used for switching the laser between a first light path and a second light path; the double-sided scanning mirror is arranged between the first deflecting mirror and the field lens, a first reflecting surface in the double-sided scanning mirror is located in the first light path, and a second reflecting surface in the double-sided scanning mirror is located in the second light path; the rotating motor is connected with the double-sided scanning mirror and is used for driving the double-sided scanning mirror to rotate unidirectionally, so that the laser can scan the surface of the target material; and in one rotation period of the double-sided scanning mirror, the laser can be emitted towards the focusing field lens from the first light path and the second light path alternately. In this way, the laser processing device can improve the cleaning efficiency in the laser cleaning process.

Description

Technical Field

[0001] The present application relates to the field of laser processing technology, and in particular to a laser processing device and a control method thereof. Background Art

[0002] Generally, laser cleaning technology is based on the scanning galvanometer driving the laser beam to act back and forth on the target surface, thereby achieving the effect of processing the target surface. When the laser power condition is sufficient, the laser cleaning efficiency is directly related to the galvanometer scanning speed. The faster the galvanometer scanning speed, the higher the cleaning efficiency.

[0003] However, the conventional driving mode of the scanning galvanometer is a reciprocating drive mode. At the beginning and end of the laser trajectory, the driving motor that drives the scanning galvanometer back and forth is usually required to accelerate and decelerate, making the laser spot uneven at the beginning and end.

[0004] Moreover, for high-power lasers, which have the characteristics of strong light spot and high power, the mirror size of the scanning galvanometer needs to be large and the volume needs to be thickened, otherwise it cannot withstand the impact of the high-power laser spot. Therefore, the drive motor needs to overcome the greater inertial force of the scanning galvanometer to drive it back and forth, which makes the cleaning efficiency of high-power laser cleaning low. Summary of the invention

[0005] In view of the deficiencies existing in the above-mentioned technologies, the present application provides a laser processing device and a control method thereof, which can improve the cleaning efficiency during the laser cleaning process.

[0006] In order to solve the above technical problems, the technical solution adopted in this application is:

[0007] A laser processing device, characterized in that it includes: a laser light source for emitting laser; a focusing field lens for focusing the laser onto the surface of a target material; a first deflection mirror arranged adjacent to the laser light source, for switching the laser between a first optical path and a second optical path; a double-sided scanning mirror arranged between the first deflection mirror and the field lens, the first reflecting surface in the double-sided scanning mirror being located in the first optical path, and the second reflecting surface in the double-sided scanning mirror being located in the second optical path; and a rotating motor connected to the double-sided scanning mirror, for driving the double-sided scanning mirror to rotate unidirectionally so that the laser can perform a scanning action on the surface of the target material; wherein, in one rotation cycle of the double-sided scanning mirror, the laser can alternately emit light from the first optical path and the second optical path toward the focusing field lens.

[0008] In one embodiment of the present application, a second deflection mirror is further included. The second deflection mirror is arranged between the first deflection mirror and the double-sided scanning mirror and is located in the second optical path, and is used to reflect the laser reflected from the first deflection mirror toward the second reflection surface of the double-sided scanning mirror.

[0009] In one embodiment of the present application, a third deflection mirror is further included. The third deflection mirror is arranged between the second deflection mirror and the double-sided scanning mirror and is located in the second optical path, and is used to reflect the laser reflected from the second deflection mirror toward the second reflection surface of the double-sided scanning mirror.

[0010] In one embodiment of the present application, the third deflection mirror is connected to the rotary motor and rotates synchronously with the double-sided scanning mirror.

[0011] In one embodiment of the present application, a deflection motor is further included, which is connected to the first deflection mirror and is used to control the reflection angle of the first deflection mirror so that the laser can switch between the first optical path and the second optical path.

[0012] In one embodiment of the present application, a controller is also included, and the controller is electrically connected to the laser light source, the deflection motor and the rotating motor; wherein, one rotation cycle of the double-sided scanning mirror includes: a first light emitting period D1, in which the reflection angle of the first deflection mirror is located in the first light path, and the controller is used to control the laser light source to emit light during the first light emitting period D1, and control the rotating motor to rotate the first reflection surface of the double-sided reflection mirror to a first preset angle α; a first interval period D2, in which the controller is used to control the laser light source to stop emitting light during the first interval period D2, and control the deflection motor to switch the reflection angle of the first deflection mirror from the first light path to the second light path , controlling the rotating motor to rotate the first reflecting surface of the double-sided reflecting mirror to a second preset angle; in the second light emitting period D3, the reflecting angle of the first deflecting mirror is located in the second light path, the controller is used to control the laser light source to emit light in the second light emitting period D3, and control the rotating motor to rotate the second reflecting surface of the double-sided reflecting mirror to rotate the first preset angle α; and in the second interval period D4, the controller is used to control the laser light source to stop emitting light in the second interval period D4, control the deflecting motor to switch the reflecting angle of the first reflecting mirror from the second light path to the first light path, and control the rotating motor to rotate the second reflecting surface of the double-sided reflecting mirror to a second preset angle.

[0013] In one embodiment of the present application, the sum of the first preset angle α and the second preset angle is 180°; wherein the ratio of the first preset angle α to the second preset angle is 2:1 to 4:1.

[0014] In one embodiment of the present application, the rotating motor is a dual-axis motor, one end of the motor shaft of the rotating motor is connected to the double-sided scanning mirror, and the other end is provided with an angle sensor; wherein the angle sensor is electrically connected to the controller for receiving the rotation angle of the double-sided scanning mirror detected by the angle sensor.

[0015] To solve the above technical problems, another solution proposed in this application is:

[0016] A control method for a laser processing device, characterized in that the laser processing device includes a laser light source for emitting laser light, a focusing field mirror for converging laser light, a first deflection mirror for switching the laser light between a first optical path and a second optical path, a double-sided scanning mirror, and a rotating motor connected to the double-sided scanning mirror and used to drive the double-sided scanning mirror to rotate unidirectionally; wherein the method includes: the laser light source emits light in the first optical path, and the rotating motor rotates the first reflecting surface of the double-sided reflecting mirror by a first preset angle α; the laser light source stops emitting light, the deflection motor switches the reflection angle of the first deflection mirror from the first optical path to the second optical path, and the rotating motor rotates the first reflecting surface of the double-sided reflecting mirror by a second preset angle; the laser light source emits light in the second optical path, and the rotating motor rotates the second reflecting surface of the double-sided reflecting mirror by the first preset angle α; and the laser light source stops emitting light, the deflection motor switches the reflection angle of the first reflecting mirror from the second optical path to the first optical path, and the rotating motor rotates the second reflecting surface of the double-sided reflecting mirror by a second preset angle.

[0017] In one embodiment of the present application, the sum of the first preset angle α and the second preset angle is 180°; wherein the ratio of the first preset angle α to the second preset angle is 2:1 to 4:1.

[0018] Compared with the prior art, the present application has the following beneficial effects:

[0019] The present application proposes a laser processing device and a control method thereof. By using a unidirectional driving double-sided scanning mirror in the driving motor of the laser processing device, and using the double-sided scanning mirror to emit light on both reflective surfaces in one rotation cycle, compared with the reciprocating laser cleaning method, on the one hand, the scanning speed of the laser processing can be increased by increasing the rotation speed of the driving motor, without considering how to overcome the inertia force of the double-sided scanning mirror during high-speed rotation; on the other hand, the laser is switched between the first optical path and the second optical path in combination with the first deflection mirror, thereby achieving the effect of double-sided light emission in one rotation cycle, further improving the utilization rate of the laser. Therefore, the laser processing device of the present application can improve the efficiency of laser cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0021] Figure 1 is a schematic structural diagram of a laser processing device proposed in the present application in a first optical path;

[0022] Figure 2is a schematic structural diagram of a laser processing device proposed in the present application in the second optical path;

[0023] Figure 3 It is a schematic diagram of light emission from a double-sided scanning mirror in the present application during one rotation cycle;

[0024] Figure 4 is a result schematic diagram of another embodiment of a laser processing device proposed in the present application;

[0025] Figure 5 The present invention is a flowchart of a control method for a laser processing device proposed in the present invention. DETAILED DESCRIPTION

[0026] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. It is to be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some structures related to the present application are shown in the accompanying drawings, rather than all structures. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0027] The terms "including" and "having" and any variations thereof in this application are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products or devices.

[0028] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0029] See also Figure 1 and Figure 2 , Figure 1 and Figure 2 1 is a schematic diagram of the structure of a laser processing device 100 proposed in this application. Figure 1 shows a schematic diagram of laser light passing through the first optical path 20, Figure 2 A schematic diagram showing laser light passing through the second optical path 30 is shown.

[0030] In one embodiment of the present application, the laser processing device 100 may include a laser light source 110, a focusing field lens 140, a first deflecting mirror 120, a double-sided scanning mirror 130 and a rotating motor (not shown). The laser light source 110 is used to emit laser light, the focusing field lens 140 is used to converge the laser light to the surface of the target material 10, the first deflecting mirror 120 is arranged downstream of the laser light source 110, and is arranged adjacent to the laser light source 110, and is used to receive laser light from the laser light source 110 and reflect the laser light to the first optical path 20 or the second optical path 30, so that the laser light can be switched between the first optical path 20 and the second optical path 30. The double-sided scanning mirror 130 is arranged between the first deflecting mirror 120 and the focusing field lens 140, the first reflection surface 131 of the double-sided scanning mirror 130 is located in the first optical path 20, and the second reflection surface 132 of the double-sided scanning mirror 130 is located in the second optical path 30. The rotary motor is connected to the double-sided scanning mirror 130, and is used to drive the double-sided scanning mirror 130 to rotate unidirectionally, so that the laser passes through the surface of the target material 10 for scanning. In one rotation cycle of the double-sided scanning mirror 130, the laser can alternately emit light from the first optical path 20 and the second optical path 30 toward the focusing field lens 140.

[0031] Since the driving motor in the present application uses a unidirectionally driven double-sided scanning mirror 130, and the double-sided scanning mirror 130 emits light on both reflective surfaces in one rotation cycle, compared with the reciprocating laser cleaning method, on the one hand, the laser scanning speed can be increased by increasing the rotation speed of the driving motor, without considering how to overcome the inertia force of the double-sided scanning mirror 130 during high-speed rotation; on the other hand, the laser is switched between the first optical path 20 and the second optical path 30 in combination with the first deflection mirror 120, thereby achieving the effect of double-sided light emission in one rotation cycle, further improving the utilization rate of the laser. Therefore, the laser processing device 100 of the present application can improve the efficiency of laser cleaning.

[0032] Combination Figure 2 In one embodiment of the present application, the laser processing device 100 may include a second deflecting mirror 150, which is disposed between the first deflecting mirror 120 and the double-sided scanning mirror 130 and is located in the second optical path 30. The second deflecting mirror 150 is used to reflect the laser received from the first deflecting mirror 120 toward the second reflection surface 132 of the double-sided scanning mirror 130.

[0033] A third deflection mirror 160 may be provided between the second deflection mirror 150 and the double-sided scanning mirror 130. The third deflection mirror 160 is located in the second optical path 30 and is used to reflect the laser light received from the second deflection mirror 150 toward the second reflection surface 132 of the double-sided scanning mirror 130. Figure 1The direction of the first light path 20 toward the first reflective surface 131 of the double-sided scanning mirror 130 is completely opposite to the direction of the second light path 30 toward the second reflective surface 132 of the double-sided scanning mirror 130 .

[0034] Of course, the arrangement of the second optical path 30 shown in the present application can be adjusted by technicians in this field according to actual conditions, as long as the double-sided scanning mirror 130 can emit light from the first reflection surface 131 and the second reflection surface 132 toward the focusing field lens 140 respectively in one rotation cycle.

[0035] In order to enable the laser to switch between the first optical path 20 and the second optical path 30, the first deflection mirror 120 may be connected via a deflection motor (not shown), and the deflection motor drives the first deflection mirror 120 to move in the first position ( Figure 1 shown position) and a second position ( Figure 2 During the switching of the optical path, the laser light source 110 should stop emitting light to prevent laser spillover and damage to other components.

[0036] In order to achieve the effect that the double-sided scanning mirror 130 emits light twice in one rotation cycle, in one embodiment of the present application, the laser processing device 100 may include a controller (not shown), which is electrically connected to the laser light source 110, the deflection motor, and the rotation motor. Figure 3 , Figure 3 Schematic diagram of light emission of the double-sided scanning mirror 130 in one rotation cycle in the present application, wherein one rotation cycle may include a first light emission period D1, a first interval period D2, a second light emission period D3 and a second interval period D4.

[0037] Specifically, when the double-sided scanning mirror 130 is in the starting stage of the first light emitting period D1, the first deflection mirror 120 is located at the first position, the controller controls the laser light source 110 to emit light, the laser passes through the first optical path 20, and is irradiated to the maximum light emitting edge of the focusing field lens 140 via the first reflecting surface 131 of the double-sided scanning mirror 130, and finally converges to the surface of the target material 10, and the controller controls the rotating motor to drive the double-sided scanning mirror 130 to rotate the first preset angle α, and finally reaches the end stage of the first light emitting period D1.

[0038] When the double-sided scanning mirror 130 is in the initial stage of the first interval D2, the first light emitting period D1 ends, and the controller controls the laser light source 110 to stop emitting light. The controller controls the first deflection mirror 120 to switch from the first position to the second position during the first interval D2, so that the reflection angle of the first deflection mirror 120 switches from the first optical path 20 to the second optical path 30. The controller controls the rotary motor to drive the double-sided scanning mirror 130 to rotate by a second preset angle, and finally reaches the initial stage of the second light emitting period D3.

[0039] When the double-sided scanning mirror 130 is in the starting stage of the second light emitting period D3, the first interval D2 ends, and the controller controls the laser light source 110 to start emitting light. The laser passes through the second optical path 30, and is irradiated to the maximum light emitting edge of the focusing field lens 140 via the second reflecting surface 132 of the double-sided scanning mirror 130, and finally converges to the surface of the target material 10. The controller controls the rotating motor to drive the double-sided scanning mirror 130 to rotate the first preset angle α, and finally reaches the end stage of the second light emitting period D3.

[0040] When the double-sided scanning mirror 130 is in the starting stage of the second interval D4, the second light emitting period D3 ends, and the controller controls the laser light source 110 to stop emitting light. The controller controls the first deflection mirror 120 to switch from the second position to the first position in the second interval D4, so that the reflection angle of the first deflection mirror 120 switches from the second optical path 30 to the first optical path 20. The controller controls the rotary motor to drive the double-sided scanning mirror 130 to rotate by a second preset angle, and finally reaches the starting stage of the first light emitting period D1.

[0041] In one embodiment of the present application, considering the symmetry of the light emission period, the sum of the first preset angle α and the second preset angle (not shown) is half a rotation period, that is, 180°. The ratio of the first preset angle α to the second preset angle determines the duty cycle of the laser light source 110 in one rotation period of the double-sided scanning mirror 130. Therefore, the first preset angle α corresponding to the maximum light emission edge of the double-sided scanning mirror 130 irradiated to the focusing field lens 140 can be adjusted by adjusting the distance between the double-sided scanning mirror 130 and the focusing field lens 140. Of course, in other embodiments, the duty cycle of the laser light source 110 can also be increased by increasing the diameter of the focusing field lens 140.

[0042] In order to increase the duty cycle of the laser light source 110 as much as possible, the ratio of the first preset angle α to the second preset angle is between 2:1 and 5:1. For example, in one embodiment, the first preset angle α is 120° and the second preset angle is 60°; in another embodiment, the first preset angle α is 150° and the second preset angle is 30°; in another embodiment, the first preset angle α is 135° and the second preset angle is 45°. Those skilled in the art can make adjustments within this range according to actual conditions, which will not be described in detail here.

[0043] It can be seen that in the present application, the controller realizes secondary light emission of the double-sided scanning mirror 130 in one rotation cycle by controlling the laser light source 110, the deflection motor, and the rotation motor, thereby reducing the shutdown time of the laser light source 110 during the rotation of the double-sided scanning mirror 130, increasing the duty cycle of the laser light source 110, and improving the cleaning efficiency of the laser processing device 100.

[0044] For further information, see Figure 3 , Figure 3 It is another structural schematic diagram of a laser processing device 200 proposed in the present application. In this embodiment, the laser processing device 200 may include a laser light source (not shown), a focusing field lens (not shown), a first deflection mirror 220, a double-sided scanning mirror 230, a rotating motor 231, a second deflection mirror 250, a third deflection mirror 260, a first deflection motor 221 and a controller (not shown). For specific structural features, please refer to the description in the previous embodiment. It can be understood that the laser processing device 200 in this embodiment may also include other optical elements, such as beam expanders, collimators, optical attenuators, polarizers and other optical devices; the laser light source may also be adjusted, such as ultraviolet laser source, infrared laser light source, pulsed laser light source, continuous laser light source, helium-neon laser light source, carbon dioxide laser light source, etc., and technicians in this field can make adaptive adjustments on this basis, but they should all be within the scope of protection of this application.

[0045] Different from the above embodiment, in this embodiment, the first deflection motor 221 is electrically connected to the controller, and the first deflection mirror 220 is driven by the first deflection motor 221, so that it can be switched from the first position to the second position under the control of the controller. It can be understood that those skilled in the art can appropriately adjust the position of the second deflection mirror 250 relative to the first deflection mirror 220, thereby shortening the response time of the first deflection motor 221 driving the first deflection mirror 220 to switch from the first position to the second position.

[0046] Furthermore, considering that it is difficult for the rotary motor 231 to maintain a constant speed during unidirectional rotation, jitter or speed deviation will inevitably occur. Therefore, the second deflection mirror 250 can be driven by a second deflection motor (not shown), and the controller is electrically connected to the second deflection motor to fine-tune the position of the laser in the second optical path irradiated on the second emitting surface of the double-sided scanning mirror 230, so that the scanning trajectory of the laser coincides with the scanning trajectory of the laser reflected on the first reflecting surface of the double-sided scanning mirror 230.

[0047] Furthermore, the third deflection mirror 260 in this embodiment can be arranged at the driving end of the rotating motor 231 together with the double-sided scanning mirror 230, and can rotate along with the double-sided scanning mirror 230. Specifically, the driving end of the rotating motor 231 is provided with a support frame 232, and the support frame 232 is connected to the output shaft 233 of the rotating motor 231. The third deflection mirror 260 and the double-sided scanning mirror 230 are arranged on the support frame 232 in sequence. Figure 2 and attached Figure 4The third deflection mirror 260 and the double-sided scanning mirror 230 have the same inclination angle, so that the reflection direction of the third deflection mirror 260 always remains toward the second reflection surface of the double-sided scanning mirror 230. Therefore, only when the third deflection mirror 260 rotates to the second light emitting period D3 following the double-sided scanning mirror 230, can the laser received from the second deflection mirror 250 be reflected to the second reflection surface of the double-sided scanning mirror 230. In this way, it can be avoided Figure 1 In the embodiment shown, when the first deflecting mirror 120 switches to the second light path in advance during operation, the second reflective surface 132 of the double-sided scanning mirror 130 emits light unexpectedly.

[0048] In one embodiment of the present application, the rotating motor 232 is a dual-axis motor, in which a support frame 232 is provided on one output shaft, and an angle sensor (not shown) is provided on the other output shaft. The angle sensor is electrically connected to the controller and is used to obtain the rotation angle of the rotating motor 231 at all times. Among them, the angle sensor can be a photoelectric sensor, which has multiple distributions and is symmetrically distributed around the motor shaft at a first preset angle α and a second preset angle. The photoelectric sensor rotates with the rotating motor 231, and when it rotates to the corresponding angle, it triggers the controller to perform a corresponding action. In addition, in other embodiments, the angle sensor can be a Hall sensor. It can be understood that technicians in this field can select a suitable angle sensor according to actual conditions, which will not be described one by one here.

[0049] See also Figure 5 , Figure 5 1 is a schematic flow chart of a control method for a laser processing device proposed in this application. The laser processing device may be the laser processing device described above, which will not be described in detail here. Figure 1-4 In this embodiment, the method includes:

[0050] S110: The laser light source emits light in the first optical path, and the rotating motor rotates the first reflecting surface of the double-sided reflecting mirror by a first preset angle α.

[0051] Specifically, this step is in the first light-emitting period D1 in the rotation cycle of the double-sided scanning mirror. When the double-sided scanning mirror is in the starting stage of the first light-emitting period D1, the angle sensor starts counting, the first reflector is located at the first position, the controller controls the laser light source to emit light, the laser passes through the first optical path, and irradiates the maximum light-emitting edge of the focusing field mirror through the first reflective surface of the double-sided scanning mirror, and finally converges to the surface of the target material. When the controller controls the rotating motor to drive the double-sided scanning mirror to rotate, when the angle sensor count reaches the first preset angle α value, it finally reaches the end stage of the first light-emitting period D1.

[0052] In the first light emitting period D1, the reflection surface of the third deflecting mirror is away from the reflection surface of the second deflecting mirror to prevent the laser light in the second light path from being reflected into the second reflection surface of the double-sided scanning mirror.

[0053] S120: The laser light source stops emitting light, the deflection motor switches the reflection angle of the first deflection mirror from the first light path to the second light path, and the rotation motor rotates the first reflection surface of the double-sided reflection mirror to a second preset angle.

[0054] Specifically, this step is in the first interval D2 of the double-sided scanning mirror rotation cycle. When the double-sided scanning mirror is in the starting stage of the first interval D2, the first light emitting period D1 ends, the angle sensor starts counting, and the controller controls the laser light source to stop emitting light. The controller controls the first deflection mirror to switch from the first position to the second position in the first interval D2, so that the reflection angle of the first deflection mirror switches from the first light path to the second light path. The controller controls the rotating motor to drive the double-sided scanning mirror to rotate, and when the angle sensor count reaches the second preset angle value, it finally reaches the starting stage of the second light emitting period D3.

[0055] S130: The laser light source emits light in the second optical path, and the rotating motor rotates the second reflecting surface of the double-sided reflecting mirror to rotate the first preset angle α.

[0056] Specifically, this step is in the second light emitting period D3 in the rotation cycle of the double-sided scanning mirror. When the double-sided scanning mirror is in the starting stage of the second light emitting period D3, the first interval period D2 ends, the angle sensor starts counting, the controller controls the laser light source to start emitting light, the laser passes through the second optical path, and irradiates the maximum light emitting edge of the focusing field mirror through the second reflection surface of the double-sided scanning mirror, and finally converges to the surface of the target material, the controller controls the rotating motor to drive the double-sided scanning mirror to rotate, and when the angle sensor count reaches the first preset angle α value, it finally reaches the end stage of the second light emitting period D3.

[0057] In the second light emitting period D3, the reflection surface of the third deflecting mirror faces the reflection surface of the second deflecting mirror, so that the laser can be normally transmitted from the second optical path to the second reflection surface of the double-sided scanning mirror.

[0058] The controller further controls the second deflection motor to rotate slightly to adjust the position of the laser on the second reflection surface of the double-sided scanning mirror, so that the scanning trajectory of the laser coincides with the scanning trajectory of the laser reflected on the first reflection surface of the double-sided scanning mirror.

[0059] S140: The laser light source stops emitting light, the deflection motor switches the reflection angle of the first reflector from the second light path to the first light path, and the rotation motor rotates the second reflection surface of the double-sided reflector to the second preset angle.

[0060] Specifically, this step is in the second interval D4 in the rotation cycle of the double-sided scanning mirror. When the double-sided scanning mirror is in the starting stage of the second interval D4, the second light emitting period D3 ends, the angle sensor starts counting, and the controller controls the laser light source to stop emitting light. The controller controls the first deflection mirror to switch from the second position to the first position in the second interval D4, so that the reflection angle of the first deflection mirror switches from the second light path to the first light path. The controller controls the rotating motor to drive the double-sided scanning mirror to rotate, and when the angle sensor count reaches the second preset angle, it finally reaches the starting stage of the first light emitting period D1.

[0061] In this embodiment, the ratio of the first preset angle α to the second preset angle is between 2:1 and 5:1. Please refer to the above embodiments for details, which will not be described in detail here.

[0062] In summary, the present application proposes a laser processing device and a control method thereof. The driving motor in the laser processing device adopts a unidirectional driving double-sided scanning mirror, and the double-sided scanning mirror is used to emit light on both reflective surfaces in one rotation cycle. Compared with the reciprocating laser cleaning method, on the one hand, the scanning speed of the laser can be increased by increasing the rotation speed of the driving motor, without considering how to overcome the inertia force of the double-sided scanning mirror during high-speed rotation; on the other hand, the laser is switched between the first optical path and the second optical path in combination with the first deflection mirror, thereby achieving the effect of double-sided light emission in one rotation cycle, further improving the utilization rate of the laser. Therefore, the laser processing device of the present application can improve the efficiency of laser cleaning.

[0063] The above description is only an implementation method of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A laser processing device, characterized in that: include: A laser light source, used for emitting laser light; A focusing field lens, used to focus the laser onto the target surface; A first deflection mirror, disposed adjacent to the laser light source, and used for switching the laser between the first optical path and the second optical path; A double-sided scanning mirror, disposed between the first deflection mirror and the focusing field mirror, wherein a first reflection surface of the double-sided scanning mirror is located in the first optical path, and a second reflection surface of the double-sided scanning mirror is located in the second optical path; as well as A rotary motor connected to the double-sided scanning mirror, used to drive the double-sided scanning mirror to rotate unidirectionally, so that the laser can perform a scanning action on the surface of the target material; Wherein, in one rotation cycle of the double-sided scanning mirror, the laser can alternately emit light from the first optical path and the second optical path toward the focusing field mirror.

2. The device according to claim 1, characterized in that It also includes a second deflecting mirror, which is arranged between the first deflecting mirror and the double-sided scanning mirror and is located in the second optical path, and is used for reflecting the laser reflected from the first deflecting mirror toward the second reflecting surface of the double-sided scanning mirror.

3. The device according to claim 2, characterized in that It also includes a third deflecting mirror, which is arranged between the second deflecting mirror and the double-sided scanning mirror and located in the second optical path, and is used for reflecting the laser reflected from the second deflecting mirror toward the second reflecting surface of the double-sided scanning mirror.

4. The device according to claim 3, characterized in that The third deflecting mirror is connected to the rotating motor and rotates synchronously with the double-sided scanning mirror.

5. The device according to claim 1, characterized in that It also includes a deflection motor, which is connected to the first deflection mirror and is used to control the reflection angle of the first deflection mirror so that the laser can be switched between the first optical path and the second optical path.

6. The device according to claim 5, characterized in that It also includes a controller, which is electrically connected to the laser light source, the deflection motor and the rotation motor; wherein one rotation cycle of the double-sided scanning mirror includes: In a first light emitting period, the reflection angle of the first deflection mirror is located in the first light path, and the controller is used to control the laser light source to emit light in the first light emitting period, and control the rotating motor to rotate the first reflection surface of the double-sided reflector to a first preset angle; During a first interval, the controller is used to control the laser light source to stop emitting light during the first interval, control the deflection motor to switch the reflection angle of the first deflection mirror from the first light path to the second light path, and control the rotation motor to rotate the first reflection surface of the double-sided reflection mirror to a second preset angle; In the second light emitting period, the reflection angle of the first deflection mirror is located in the second light path, and the controller is used to control the laser light source to emit light in the second light emitting period, and control the rotary motor to rotate the second reflection surface of the double-sided reflector to rotate the first preset angle; and During the second interval, the controller is used to control the laser light source to stop emitting light, control the deflection motor to switch the reflection angle of the first reflector from the second light path to the first light path, and control the rotation motor to rotate the second reflection surface of the double-sided reflector to a second preset angle.

7. The device according to claim 6, characterized in that The sum of the first preset angle and the second preset angle is 180°; wherein the ratio of the first preset angle to the second preset angle is 2:1 to 4:

1.

8. The device according to claim 6, characterized in that The rotating motor is a dual-axis motor, one end of the motor shaft of the rotating motor is connected to the double-sided scanning mirror, and the other end is provided with an angle sensor; wherein the angle sensor is electrically connected to the controller for receiving the rotation angle of the double-sided scanning mirror detected by the angle sensor.

9. A control method for a laser processing device, characterized in that: The laser processing device comprises a laser light source for emitting laser light, a focusing field lens for converging the laser light, a first deflection mirror for switching the laser light between a first optical path and a second optical path, a double-sided scanning mirror, and a rotating motor connected to the double-sided scanning mirror and used to drive the double-sided scanning mirror to rotate unidirectionally; wherein the method comprises: The laser light source emits light in the first optical path, and the rotary motor rotates the first reflective surface of the double-sided reflector by a first preset angle; The laser light source stops emitting light, the deflection motor switches the reflection angle of the first deflection mirror from the first light path to the second light path, and the rotation motor rotates the first reflection surface of the double-sided reflection mirror to a second preset angle; The laser light source emits light in the second optical path, and the rotary motor rotates the second reflective surface of the double-sided reflector to rotate the first preset angle; and The laser light source stops emitting light, the deflection motor switches the reflection angle of the first reflector from the second light path to the first light path, and the rotation motor rotates the second reflection surface of the double-sided reflector by the second preset angle.

10. The method according to claim 9, characterized in that The sum of the first preset angle and the second preset angle is 180°; wherein the ratio of the first preset angle to the second preset angle is 2:1 to 4:1.

Images