Microscopic measuring instrument and adsorption positioning device thereof

Abstract

The invention relates to the technical field of microscopes, in particular to a microscopic measuring instrument and an adsorption positioning device thereof, the adsorption positioning device comprises a supporting assembly and a plurality of positioning pieces, the supporting assembly is used for placing a sample; the supporting assembly is arranged on a moving platform, the supporting assembly can move along with the moving platform in the first direction and / or the second direction, and the multiple positioning pieces are arranged on the supporting assembly and used for fixing the sample; the at least three positioning pieces are arranged in a non-collinear manner, so that the at least two positioning pieces are arranged at intervals in the first direction and used for limiting the position of the sample in the second direction, and the at least one positioning piece is used for limiting the position of the sample in the first direction and used for limiting the position of the sample in the second direction; at least one positioning piece can rotate relative to the supporting assembly. The sample is limited and fixed in all directions through the plurality of positioning pieces, so that the sample can be prevented from shifting during detection, and the accuracy of a detection result is improved.

Description

Technical Field

[0001] The present application relates to the technical field of microscopic measuring instruments, and in particular to a microscopic measuring instrument and an adsorption positioning device thereof. Background Art

[0002] When using a microscope to measure samples, an adsorption platform is used to fix the position of the sample (such as a sheet sample). Generally, the adsorption platform is installed on a motion platform and can move horizontally under the control of the motion platform. Before measurement, the sample needs to be positioned to achieve alignment. For example, for a rectangular sample, alignment can mean that the two adjacent edges of the rectangular sample are parallel to the X-axis and Y-axis of the motion platform, respectively, which is beneficial for us to move the sample in a specific direction during measurement. However, most of the current adsorption platforms only have adsorption functions and cannot limit the position and posture of the sample. The sample may be unevenly placed or shifted during the test, thereby affecting the accuracy of the test results. Especially for high-precision measuring equipment such as microscopic measuring instruments, it is even more necessary to reduce the impact of this part. Summary of the invention

[0003] The present application provides a microscopic measuring instrument and an adsorption positioning device thereof, which are convenient for defining and fixing the position of a sample and help ensure the accuracy of the detection results.

[0004] According to one aspect of the present application, an embodiment provides an adsorption positioning device for a microscopic measuring instrument, comprising:

[0005] A support assembly, the support assembly is used to place a sample; the support assembly is disposed on a motion platform, and the support assembly can follow the motion platform to move along a first direction and / or a second direction; and

[0006] A plurality of positioning members, wherein the plurality of positioning members are arranged on the support assembly and are used to fix the sample; at least three of the positioning members are arranged non-collinearly, so that at least two of the positioning members are arranged at intervals along the first direction and are used to define the position of the sample in the second direction, and at least one of the positioning members is used to define the position of the sample in the first direction;

[0007] Wherein, at least one of the positioning members can rotate relative to the supporting assembly.

[0008] In an optional embodiment, the microscopic measuring instrument also includes an adjustment component, which is arranged on the support component, and the adjustment component is used to adjust the position of the positioning member; the adjustment component includes a rotating shaft and a movable member, the rotating shaft is arranged on the support component and extends along a third direction, and the third direction is perpendicular to both the first direction and the second direction; the positioning member is fixedly arranged at one end of the movable member, and the movable member can rotate around the rotating shaft relative to the support component to synchronously drive the positioning member to rotate around the rotating shaft relative to the support component.

[0009] In an optional embodiment, the adjustment assembly further includes a limit member and an elastic member, the movable member is provided with a through groove, the limit member passes through the through groove and is connected to the support assembly, and the movable member can move relative to the limit member, and the elastic member is arranged between the movable member and the support assembly.

[0010] In an optional embodiment, a movable groove is provided on the support assembly, and the movable groove includes a first groove and a second groove which are interconnected, the first groove extends along the first direction or the second direction, the second groove extends along the third direction, the rotating shaft is arranged in the first groove, the movable part has a connecting part and a fixed part, the fixed part is movably arranged in the second groove, the positioning part is arranged at one end of the fixed part, one end of the connecting part is movably connected to the rotating shaft, and the other end extends from the first groove to the second groove and is connected to the fixed part.

[0011] In an optional embodiment, the adjustment assembly also includes a friction plate, a first fixing member and a second fixing member, the friction plate is arranged on the movable member, and is arranged on two end faces opposite to the movable member with the positioning member, the first fixing member is used to fix the friction plate to the support assembly, and the second fixing member is used to fix the friction plate to the movable member; a movable groove is provided on the friction plate, the movable groove has an opening, and the second fixing member is movably inserted into the movable groove.

[0012] In an optional embodiment, an adsorption channel is provided in the support component, and an adsorption structure is provided on the support component. The adsorption structure is used to adsorb and fix the sample, and the adsorption structure is connected to the vacuum adsorption device through the adsorption channel.

[0013] In an optional embodiment, at least one of the adsorption structure and the adsorption channel is provided, and the adsorption structure and the adsorption channel are connected one-to-one; a switching button is also provided on the support assembly, and the switching button is used to control the on and off of the adsorption channel.

[0014] In an optional embodiment, the adsorption structure includes at least one adsorption hole and at least one adsorption groove, and the adsorption groove is arranged around the adsorption hole and is connected to the adsorption hole.

[0015] In an optional embodiment, the support assembly includes a bearing platform and a support seat, the support seat is arranged on the moving platform, the bearing platform is arranged on the support seat, and the positioning member is arranged on the bearing platform; the support seat includes a first side panel, a second side panel, a third side panel, a fourth side panel, a third fixing member and a fourth fixing member, the first side panel and the third side panel are arranged opposite to each other and both extend along the first direction, the second side panel and the fourth side panel are arranged opposite to each other and both extend along the second direction, both ends of the first side panel and the third side panel are recessed along the third direction to form a first assembly surface, the third direction and the first direction and the second direction are perpendicular to each other, both ends of the second side panel and the fourth side panel are protruded along the second direction to form a second assembly surface, the first assembly surface and the second assembly surface abut each other, the third fixing member extends along the first direction, and the fourth fixing member extends along the third direction for fixing the first side panel, the second side panel, the third side panel and the fourth side panel.

[0016] According to one aspect of the present application, a microscopic measuring instrument is provided in one embodiment, comprising a moving platform and the adsorption positioning device as described above, wherein the adsorption positioning device is arranged on the moving platform and can follow the moving platform to move in a first direction and / or a second direction.

[0017] According to the adsorption positioning device of the microscopic measuring instrument of the above embodiment, the adsorption positioning device includes a support assembly and a plurality of positioning members, the support assembly can follow the movement of the motion platform, at least three positioning members are arranged non-collinearly, so that at least two positioning members are arranged at intervals along the first direction, and are used to limit the position of the sample in the second direction, and at least one positioning member is used to limit the position of the sample in the first direction. The sample is limited and fixed in all directions by a plurality of positioning members, so that the sample can be installed accurately, and the displacement of the sample during the detection process can be avoided, thereby improving the accuracy of the detection result. Since at least one positioning member can rotate relative to the support assembly, the influence of the above-mentioned processing error or assembly error on the movement trajectory of the sample can be avoided, so that the sample can be accurately moved into place to improve the accuracy of the detection result. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of a microscopic measuring instrument in one embodiment;

[0019] Figure 2 A schematic diagram of the structure of an adsorption positioning device in an embodiment;

[0020] Figure 3 A schematic diagram of the structure of the cooperation between the movable part and the rotating shaft in the adjustment assembly in one embodiment;

[0021] Figure 4 A schematic diagram of the structure of an adjustment component in an embodiment;

[0022] Figure 5 A schematic diagram of the structure of another angle of the adjustment component in one embodiment;

[0023] Figure 6 A schematic diagram of the structure of the movable groove on the support assembly in one embodiment;

[0024] Figure 7 A schematic diagram of the structure of a movable part in an embodiment;

[0025] Figure 8 A schematic diagram of the structure of a friction plate in an embodiment;

[0026] Fig. 9 A schematic diagram of the structure of an adsorption structure in an embodiment;

[0027] Fig.10 A schematic diagram of the structure of a support assembly in an embodiment;

[0028] Fig.11 is a schematic structural diagram of a first side panel and a third side panel in an embodiment;

[0029] Fig.12 Schematic diagram of the structure of the second side plate and the fourth side plate in an embodiment.

[0030] Among them: 100, motion platform; 200, adsorption positioning device; 210, support assembly; 211, movable groove; 2111, first groove; 2112, second groove; 2113, first mounting hole; 212, bearing platform; 213, support seat; 2131, first side plate; 2132, second side plate; 2133, third side plate; 2134, fourth side plate; 2135, third fixing member; 2136, fourth fixing member; 220, positioning member; 221, first positioning member; 222, second positioning member; 223, third positioning member; 224, Fourth positioning member; 230, adjustment component; 231, rotating shaft; 232, movable member; 2321, connecting part; 2322, fixing part; 2323, through groove; 2324, step surface; 2325, rotating shaft hole; 2326, fixing hole; 233, limiting member; 234, elastic member; 235, friction plate; 2351, movable groove; 236, first fixing member; 237, second fixing member; 240, adsorption structure; 241, adsorption hole; 242, adsorption groove; 250, switching button; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0031] The present application is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0032] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations, and the operation steps involved in each embodiment can also be replaced or adjusted in a sequence in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a certain embodiment and do not mean that the composition and / or sequence are necessary.

[0033] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0034] The present application provides a microscopic measuring instrument for observing and measuring the size, shape, position and angle of tiny objects. Generally, during measurement, the tiny objects can be placed on a glass slide to prepare samples that are easy to take.

[0035] See also Figure 1 The microscopic measuring instrument includes a motion platform 100, a driving mechanism (not shown in the figure) and an adsorption positioning device 200. The adsorption positioning device 200 is arranged on the motion platform 100 and is used to adsorb and fix the sample. The driving mechanism is used to drive the motion platform 100 to move along a first direction X and / or a second direction Y. The first direction X and the second direction Y are perpendicular to each other on a horizontal plane, so that the position movement of the motion platform 100 on the horizontal plane can be adjusted.

[0036] The microscopic measuring instrument may be provided with two driving mechanisms, and the two driving mechanisms may respectively drive the motion platform to move along the first direction X or the second direction Y. The driving mechanism may also be provided with one driving mechanism, which drives the motion platform to move along the position tilted between the first direction X and the second direction Y, so that the motion platform moves in both the first direction X and the second direction Y.

[0037] When using the microscopic measuring instrument, since the adsorption positioning device 200 is set on the motion platform 100, the adsorption positioning device 200 can move synchronously with the motion platform 100, so that the position of the sample on the horizontal plane can be adjusted to facilitate observation of the morphology of different positions of the sample. By setting the adsorption positioning device 200, the position of the sample is fixed. On the one hand, the position of the sample can be guaranteed to be consistent each time during multiple measurements. On the other hand, the position of the sample can be fixed during the observation process to prevent the movement of the sample from affecting the accuracy of the test results.

[0038] In some embodiments, the driving mechanism may be a driving motor or a piston cylinder. In order to reduce the influence of vibration during the movement of the driving mechanism on the detection result, the driving mechanism may be a servo motor.

[0039] See also Figure 2 The adsorption positioning device 200 includes a support component 210 and a plurality of (which can be understood to include three or more) positioning members 220. The support component 210 is arranged on the motion platform 100. The support component 210 can follow the motion platform 100 to move along the first direction X and / or the second direction Y. The support component 210 is used to place the sample, so that the sample can move along with the movement of the support component 210. The positioning member 220 is arranged on the support component 210 to fix the sample. The plurality of positioning members 220 can be arranged along the same straight line, or arranged non-collinearly to achieve all-round fixation of different positions of the sample. The arrangement positions of the plurality of positioning members 220 can be adjusted according to the shape of the sample.

[0040] In order to improve the stability of sample fixation, at least three positioning members 220 are not arranged in a colinear manner, so that at least two positioning members 220 are arranged at intervals along the first direction X to limit the position of the sample in the second direction Y. At least one positioning member 220 is used to limit the position of the sample in the first direction X, thereby achieving all-round fixation of the sample, which can not only achieve the positioning of the fixed sample, but also avoid the displacement of the sample during the detection process. For example, when the sample is rectangular, the positioning member 220 can be arranged along two adjacent sides of the rectangle. Of course, in actual applications, the shape of the sample is not limited to a rectangle, but can also include a circle, a triangle, a trapezoid or other special-shaped structures. Regardless of the shape of the sample, the positioning member 220 is arranged in the first direction X and the second direction Y to achieve the limited fixation of the sample.

[0041] Please continue reading Figure 2The positioning member 220 includes a first positioning member 221, a second positioning member 222 and a third positioning member 223. The first positioning member 221 and the second positioning member 222 are arranged at intervals along the first direction X, and the third positioning member 223 is arranged on one side of the line connecting the midpoints of the first positioning member 221 and the second positioning member 222. When assembling the sample, firstly, one edge of the sample is fixed by the first positioning member 221 and the second positioning member 222, so that the sample can be fixed in the second direction Y. Then, the sample is pushed along the first direction X so that the other edge thereof abuts against the third positioning member 223, so that the sample can be fixed in the first direction X. Thus, the overall posture and position of the sample can be fixed in the limited position.

[0042] When the shape of the sample or the pattern inside is directional, for example, the sample is a rectangle, hexagon, octagon, etc., in the measurement process, in order to facilitate measurement or observation, it is necessary to ensure that the movement direction of the sample matches the direction of the sample. Taking the sample as a rectangle as an example, the support component 210 and the motion platform 100 may have processing errors and assembly errors during the production and assembly process, so that although the rectangular sample is adjusted in place according to the movement direction of the motion platform 100, the side of the rectangular sample cannot be parallel to the movement direction of the motion platform 100, and there is a deviation. For example, the preset adjustment trajectory of the rectangular sample should be to move a preset distance along the first direction X. In an ideal state, the support component 210 can be directly driven by the motion platform 100 to move the preset distance along the first direction X, and the side of the sample is always parallel to the movement direction during the movement. However, based on the existence of processing errors or assembly errors, when the support component 210 is driven by the motion platform 100 to move along the first direction X, the sample actually moves obliquely, so that the side of the sample is inclined relative to the movement direction, thereby affecting the accuracy of the detection result.

[0043] In some embodiments, the present application creatively improves the positioning member 220 so that at least one positioning member 220 can rotate relative to the support assembly 210. When in use, the adsorption positioning device 200 is first installed on the motion platform 100, and then the position of the positioning member 220 is adjusted, and then the sample is assembled, so as to avoid the influence of the above-mentioned processing error or assembly error on the movement trajectory of the sample, so that the sample can be accurately moved into place to improve the accuracy of the detection result. In this embodiment, the number of positioning members 220 that can rotate relative to the support assembly 210 can be one, two, or three or more. In fact, at least one positioning member 220 that can rotate relative to the support assembly 210 can be provided in the first direction X and / or the second direction Y according to needs for limiting fixation and adjustment, and no excessive restrictions or elaborations are made here.

[0044] See also Figure 2 and Figure 3In some embodiments, the microscopic measuring instrument further includes an adjustment component 230, which is disposed on the support component 210. The adjustment component 230 is used to adjust the position of the positioning member 220. The adjustment component 230 includes a rotating shaft 231 and a movable member 232. The rotating shaft 231 is disposed on the support component 210 and extends along a third direction Z (which can be understood as a vertical direction according to usage habits). The third direction Z is perpendicular to both the first direction X and the second direction Y. The positioning member 220 is fixedly disposed at one end of the movable member 232. The movable member 232 can rotate relative to the support component 210 around the rotating shaft 231 to synchronously drive the positioning member 220 to rotate relative to the support component 210 around the rotating shaft 231. By disposing the adjustment component 230, the position of the positioning member 220 can be adjusted from the first direction X and the second direction Y to compensate for the above-mentioned processing error or assembly error.

[0045] In other embodiments, the movable member 232 may also be fixedly connected to the rotating shaft 231, and the rotating shaft 231 may be movably connected to the supporting assembly 210. The rotation of the rotating shaft 231 may also drive the movable member 232 to rotate around the axis of the rotating shaft 231, thereby adjusting the position of the positioning member 220.

[0046] Please continue reading Figures 3 to 5 The adjustment assembly 230 further includes a stopper 233 and an elastic member 234. The movable member 232 is provided with a through slot 2323. The stopper 233 passes through the through slot 2323 and is connected to the support assembly 210. The movable member 232 can move relative to the stopper 233. The elastic member 234 is arranged between the movable member 232 and the support assembly 210. The setting of the stopper 233 and the elastic member 234 can both exert a certain force on the movable member 232. The stopper 233 can exert a force close to the support assembly 210 on the movable member 232. The elastic member 234 provides an elastic force substantially opposite to the force of the stopper 233 to the movable member 232, thereby fixing the movable member 232 and preventing the movable member 232 from slipping and causing the function failure of the adjustment assembly 230. In some specific embodiments, the elastic member 234 can be a spring or an elastic sheet, and the stopper 233 can be a screw, a screw rod or a pin that is easy to process and assemble.

[0047] Since the position of the adjustment component 230 can be connected to the positioning member 220 in any direction as required, in order to adapt to its movement path, when the positioning member 220 is fixed at the upper limit in the first direction X, the through groove 2323 penetrates the movable member 232 along the first direction X, and has an extension length extending along the second direction Y and an extension width perpendicular to the second direction Y (the third direction Z in this embodiment) on a cross section perpendicular to the through direction. When the positioning member 220 is fixed at the upper limit in the second direction Y, the through groove 2323 penetrates the movable member 232 along the second direction Y, and has an extension length extending along the first direction X and an extension width perpendicular to the first direction X (the third direction Z in this embodiment) on a cross section perpendicular to the through direction. The extension length of the through groove 2323 in the first direction X or the second direction Y can be greater than the dimension of the limiting member 233 in the same direction (extension length direction), thereby providing a movable space for the limiting member 233 and avoiding interference of the limiting member 233 with the movable member 232 during its movement. Furthermore, the extension width of the through groove 2323 is less than or equal to the dimension of the limiting member 232 in the same direction (extended width direction), so that the end of the wall of the through groove 2323 in the extended width direction abuts against the limiting member 233, preventing the movable member 232 from slipping off the limiting member 233, thereby helping to ensure the realization of the fixing function of the limiting member 233.

[0048] Please continue reading Figure 3 The movable part 232 has a connecting part 2321 and a fixing part 2322. One end of the connecting part 2321 is movably connected to the rotating shaft 231, and the other end is connected to the fixing part 2322. The positioning part 220 is arranged on the fixing part 2322. In order to enable the sample to be arranged close to the surface of the supporting component 210, the adjusting component 230 can be arranged on the side of the supporting component 210, the connecting part 2321 is arranged parallel to the side of the supporting component 210, and the fixing part 2322 should extend along the third direction Z. The fixing in the third direction Z is realized by the surface of the supporting component 210 and the positioning part 220, and the fixing in various directions on the plane of the supporting component 210 is realized by the arrangement of multiple positioning parts 220.

[0049] In order to make the structure of the adsorption positioning device 200 compact, please refer to Figure 8 A movable groove 211 is provided on the support component 210, and the movable groove 211 includes a first groove 2111 and a second groove 2112 which are connected to each other. The first groove 2111 is arranged on the side of the support component 210 and extends along the first direction X or the second direction Y, that is, the first groove 2111 extends along the extension direction of the side of the support component 210, and the second groove 2112 extends along the third direction Z. The rotating shaft 231 is arranged in the first groove 2111, and the fixing part 2322 is movably arranged in the second groove 2112. The connecting part 2321 extends from the first groove 2111 to the second groove 2112 and is connected to the fixing part 2322.

[0050] Please continue reading Figure 6 In some embodiments, a first mounting hole 2113 is provided in the first groove 2111, and the stopper 233 is sequentially arranged through the through groove 2323 and the first mounting hole 2113. The through groove 2323 includes two groove bodies with different diameters, and a step surface 2324 is formed between the two groove bodies, so that at least part of the stopper 233 is abutted against the step surface 2324, so that the stopper 233 is sunken in the through groove 2323, thereby improving the aesthetics of the adsorption and positioning device 200, and also avoiding accidents such as scratches due to its protruding setting.

[0051] See also Figure 7 In some embodiments, the connecting portion 2321 is provided with a shaft hole 2325, and the shaft 231 is disposed through the shaft hole 2325 to achieve the connection between the connecting portion 2321 and the shaft 231. The fixing portion 2322 is provided with a fixing hole 2326, and the positioning member 220 is fixed to the fixing portion 2322 through the fixing hole 2326.

[0052] See also Figure 8 The adjustment assembly 230 further includes a friction plate 235, which is disposed on the movable member 232 and is disposed on two end surfaces opposite to the positioning member 220 of the movable member 232. The friction plate 235 can increase friction, thereby improving the stability of the movable member 232.

[0053] Please continue reading Figure 8 In some embodiments, the second groove 2112 is arranged along the third direction Z through the support component 210. In order to fix the friction plate 235, the adjustment component 230 also includes a first fixing member 236 and a second fixing member 237. The first fixing member 236 is used to fix the friction plate 235 to the support component 210, and the second fixing member 237 is used to fix the friction plate 235 to the movable member 232. A movable groove 2351 is provided on the friction plate 235, and the movable groove 2351 has an opening. The second fixing member 237 is movably inserted into the movable groove 2351. The opening of the movable groove 2351 is arranged to avoid the second fixing member 237 interfering with the movement of the movable member 232 during the adjustment of the movable member 232.

[0054] In order to increase the application range of the adsorption positioning device 200, please continue to refer to Figure 2The positioning member 220 also includes a fourth positioning member 224. The fourth positioning member 224 and the third positioning member 223 are arranged at intervals along the second direction Y. Through the arrangement of the fourth positioning member 224, it can adapt to rectangular samples of different shapes. For example, when the side length of the rectangular sample is longer in the first direction X, the first positioning member 221, the second positioning member 222 and the third positioning member 223 can be selected for fixation. If the side length of the rectangular sample is longer in the second direction Y, the first positioning member 221, the third positioning member 223 and the fourth positioning member 224 can be selected for fixation.

[0055] In some embodiments, the fourth positioning member 224 can also be movably disposed on the supporting assembly 210 through the aforementioned adjusting assembly 230 .

[0056] In order to further evenly fix the sample, the microscopic measuring instrument also includes a vacuum adsorption device (not shown in the figure), an adsorption channel (not shown in the figure) is provided in the support component 210, and an adsorption structure 240 is provided on the support component 210. The adsorption structure 240 is used to adsorb and fix the sample, and the adsorption structure 240 is connected to the vacuum adsorption device through the adsorption channel.

[0057] In some embodiments, the adsorption structure 240 and the adsorption channel are each provided with at least one, and the adsorption structure 240 and the adsorption channel are connected one-to-one; the support assembly 210 is also provided with a switch button 250, and the switch button 250 is used to control the on and off of the adsorption channel. The switch button 250 has at least one working position, and the working position can be set one-to-one with the adsorption channel. By switching it to different working positions, the on and off of different adsorption channels can be controlled, thereby realizing the activation of different adsorption holes 241 to adsorb and fix the sample accordingly. For example, the switch button 250 has a first working position and a second working position, and the adsorption channel has a first adsorption channel and a second adsorption channel. When switching to the first working position, the first adsorption channel is turned on, and when switching to the second working position, the second adsorption channel is turned on.

[0058] Of course, in other embodiments, one working station can also control the on and off of multiple adsorption channels at the same time.

[0059] See also Fig. 9 In some embodiments, the adsorption structure 240 includes an adsorption hole 241, which is connected to the adsorption channel, and the adsorption hole 241 can be adsorbed and fixed to the sample surface. In this embodiment, a plurality of adsorption holes 241 can be provided, and each adsorption channel can be provided with an adsorption hole 241, so that the adsorption and fixation of samples of different shapes and sizes can be satisfied by the provision of multiple adsorption holes 241. Of course, each adsorption channel can also be provided with at least two adsorption holes 241, and the adsorption area can be increased by increasing the number of adsorption holes 241, so that it is suitable for the adsorption and fixation of large-area samples. Based on this flexible design, the scope of application of the present application can be improved.

[0060] Please continue reading Fig. 9 The adsorption structure 240 may further include an adsorption groove 242, which is connected to the adsorption hole 241. By providing the adsorption groove 242, the adsorption area can be increased, and the sample can be adsorbed more stably. The adsorption groove 242 may be arranged around the adsorption hole 241, for example, to form a circular groove, a rectangular groove or a grid structure arranged around the adsorption hole 241. The number of the adsorption groove 242 may also be at least one, and the adsorption groove 242 and the adsorption hole 241 may be connected one by one, and each adsorption groove 242 may also be connected to at least one adsorption hole 241.

[0061] The support assembly 210 includes a bearing platform 212 and a support seat 213, the support seat 213 is arranged on the motion platform 100, the bearing platform 212 is arranged on the support seat 213, the positioning member 220 is arranged on the bearing platform 212, the above-mentioned adsorption channel is arranged inside the support seat 213, the adsorption hole 241 and the adsorption groove 242 are arranged on the bearing platform 212, and the adjustment assembly 230 and the movable groove 211 are also arranged on the bearing platform 212. The bearing platform 212 and the support seat 213 are detachably connected, which facilitates the disassembly and installation of the support assembly 210.

[0062] In order to facilitate the assembly of the support assembly 210, the problem of the prior art that the installation steps are cumbersome and the operation is inconvenient from the back side (the plane of the support assembly 210 where the positioning member 220 is arranged is the front side, and the opposite side is the back side) is solved. Figures 10 to 12 The support seat 213 includes a first side plate 2131, a second side plate 2132, a third side plate 2133, a fourth side plate 2134, a third fixing member and a fourth fixing member. The first side plate 2131 and the third side plate 2133 are arranged opposite to each other and both extend along the first direction X. The second side plate 2132 and the fourth side plate 2134 are arranged opposite to each other and both extend along the second direction Y. The first side plate 2131, the second side plate 2132, the third side plate 2133 and the fourth side plate 2134 are detachably connected through the third fixing member 2135 and the fourth fixing member 2136, thereby facilitating the sequential assembly of the first side plate 2131, the second side plate 2132, the third side plate 2133 and the fourth side plate 2134, and avoiding the operation of dismantling part of the structure of the motion platform 100 when assembling the adsorption positioning device 200 and installing screws on the back of the support assembly 210.

[0063] In some embodiments, both ends of the first side plate 2131 and the third side plate 2133 are recessed along the third direction Z to form a first assembly surface, the third direction Z and the first direction X and the second direction Y are perpendicular to each other, both ends of the second side plate 2132 and the fourth side plate 2134 are protruded along the second direction Y to form a second assembly surface, and the first assembly surface and the second assembly surface are abutted, the third fixing member 2135 extends along the first direction X, and the fourth fixing member 2136 extends along the third direction Z, and is used to fix the first side plate 2131, the second side plate 2132, the third side plate 2133 and the fourth side plate 2134. During assembly, the first side plate 2131 and the third side plate 2133 are assembled first, and fixed to the motion platform 100 by the third fixing member 2135, and then the second side plate 2132 and the third side plate 2133 are assembled and fixed by the fourth fixing member 2136. Specifically, the first side panel 2131, the second side panel 2132, the third side panel 2133 and the fourth side panel 2134 all form a "convex" shaped structure, but their directions are different. For ease of understanding, the first side panel 2131 and the second side panel 2132 are both defined as positive convex shapes, and the third side panel 2133 and the fourth side panel 2134 are both negative convex shapes, so that the third fixing member 2135 can be installed from the front, avoiding the disassembly of part of the structure of the motion platform 100.

[0064] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. An adsorption positioning device for a microscopic measuring instrument, characterized in that: include: A support assembly, wherein the support assembly is used to place a sample; The support assembly is disposed on the motion platform, and the support assembly can follow the motion platform to move along the first direction and / or the second direction; as well as A plurality of positioning members, wherein the plurality of positioning members are arranged on the support assembly and are used to fix the sample; at least three of the positioning members are arranged non-collinearly, so that at least two of the positioning members are arranged at intervals along the first direction and are used to define the position of the sample in the second direction, and at least one of the positioning members is used to define the position of the sample in the first direction; Wherein, at least one of the positioning members can rotate relative to the supporting assembly.

2. The adsorption positioning device of the microscopic measuring instrument according to claim 1, characterized in that: The microscopic measuring instrument also includes an adjustment component, which is arranged on the supporting component and is used to adjust the position of the positioning member; the adjustment component includes a rotating shaft and a movable member, the rotating shaft is arranged on the supporting component and extends along a third direction, and the third direction is perpendicular to both the first direction and the second direction; the positioning member is fixedly arranged at one end of the movable member, and the movable member can rotate around the rotating shaft relative to the supporting component to synchronously drive the positioning member to rotate around the rotating shaft relative to the supporting component.

3. The adsorption positioning device of the microscopic measuring instrument according to claim 2, characterized in that: The adjustment component also includes a limiter and an elastic component. The movable component is provided with a through slot. The limiter passes through the through slot and is connected to the support component. The movable component can move relative to the limiter. The elastic component is arranged between the movable component and the support component.

4. The adsorption positioning device of the microscopic measuring instrument according to claim 2, characterized in that: The support assembly is provided with a movable groove, and the movable groove includes a first groove and a second groove that are interconnected, the first groove extends along the first direction or the second direction, and the second groove extends along the third direction, the rotating shaft is arranged in the first groove, the movable part has a connecting part and a fixing part, the fixing part is movably arranged in the second groove, the positioning part is arranged at one end of the fixing part, one end of the connecting part is movably connected to the rotating shaft, and the other end extends from the first groove to the second groove and is connected to the fixing part.

5. The adsorption positioning device of the microscopic measuring instrument according to claim 2, characterized in that: The adjustment assembly also includes a friction plate, a first fixing member and a second fixing member. The friction plate is arranged on the movable member and is arranged on two end faces opposite to the movable member with the positioning member. The first fixing member is used to fix the friction plate to the supporting assembly, and the second fixing member is used to fix the friction plate to the movable member. A movable groove is provided on the friction plate, and the movable groove has an opening. The second fixing member is movably inserted into the movable groove.

6. The adsorption positioning device of a microscopic measuring instrument according to any one of claims 1 to 5, characterized in that: An adsorption channel is arranged in the support component, and an adsorption structure is arranged on the support component. The adsorption structure is used to adsorb and fix the sample, and the adsorption structure is connected with the vacuum adsorption device through the adsorption channel.

7. The adsorption positioning device of the microscopic measuring instrument according to claim 6, characterized in that: The adsorption structure and the adsorption channel are each provided with at least one, and the adsorption structure and the adsorption channel are connected one-to-one; a switching button is also provided on the support component, and the switching button is used to control the on and off of the adsorption channel.

8. The adsorption positioning device of the microscopic measuring instrument according to claim 7, characterized in that: The adsorption structure includes at least one adsorption hole and at least one adsorption groove, and the adsorption groove is arranged around the adsorption hole and communicated with the adsorption hole.

9. The adsorption positioning device of the microscopic measuring instrument according to claim 1, characterized in that: The support assembly includes a bearing platform and a support seat, the support seat is arranged on the moving platform, the bearing platform is arranged on the support seat, and the positioning member is arranged on the bearing platform; the support seat includes a first side plate, a second side plate, a third side plate, a fourth side plate, a third fixing member and a fourth fixing member, the first side plate and the third side plate are arranged opposite to each other and both extend along the first direction, the second side plate and the fourth side plate are arranged opposite to each other and both extend along the second direction, both ends of the first side plate and the third side plate are recessed along the third direction to form a first assembly surface, the third direction and the first direction and the second direction are perpendicular to each other, both ends of the second side plate and the fourth side plate are protruded along the second direction to form a second assembly surface, the first assembly surface and the second assembly surface abut, the third fixing member extends along the first direction, and the fourth fixing member extends along the third direction for fixing the first side plate, the second side plate, the third side plate and the fourth side plate.

10. A microscopic measuring instrument, characterized in that: include: Sports platform; as well as The adsorption and positioning device as described in any one of claims 1 to 9, wherein the adsorption and positioning device is arranged on the moving platform and can follow the moving platform to move in the first direction and / or the second direction.

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