Gas control panel device of CVD (Chemical Vapor Deposition) furnace

Abstract

The invention relates to the technical field of semiconductor equipment. A gas control panel device of a CVD (chemical vapor deposition) furnace comprises a cabinet body, the system further comprises a nitrogen conveying pipeline, a hydrogen conveying pipeline and a hydrogen chloride gas conveying pipeline; each of the hydrogen conveying pipeline, the nitrogen conveying pipeline and the hydrogen chloride gas conveying pipeline comprises a gas inlet port, a main pipeline, a branch and a gas outlet port which are connected in sequence; each branch is sequentially provided with a manual valve, a mass flow controller, a pneumatic valve and a check valve along the flow guide direction; all the air inlet ports are located outside the cabinet body and provided with manual valves. Gas outlet ports of the nitrogen conveying pipelines are all located outside the cabinet body and comprise a first nitrogen outlet, a second nitrogen outlet, a third nitrogen outlet, a fourth nitrogen outlet and a fifth nitrogen outlet which are used for leading out nitrogen; the first mixed gas outlet and the second mixed gas outlet are used for leading out mixed gas of the three components.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a gas control disk device. Background Art

[0002] During the coating process of the CVD furnace, multiple gases such as N2, H2, and HCL are required. According to the process requirements, the N2, H2, and HCL gases used in the coating process have certain pressure and flow requirements.

[0003] Currently, there is an urgent need for a gas control panel device that can divert and integrate N2, H2, and HCL gases to deliver the required gases to the CVD furnace for coating work. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a gas control disk device for a CVD furnace, which solves at least one of the above technical problems.

[0005] The technical solution of the present invention is: a gas control panel device for a CVD furnace, characterized in that it comprises a cabinet;

[0006] It also includes a nitrogen gas delivery pipeline, a hydrogen gas delivery pipeline, and a hydrogen chloride gas delivery pipeline;

[0007] The hydrogen gas delivery pipeline, the nitrogen gas delivery pipeline and the hydrogen chloride gas delivery pipeline each include an inlet port, a main pipeline, a branch pipeline and an outlet port connected in sequence, and each branch pipeline is sequentially installed with a manual valve, a mass flow controller, a pneumatic valve and a check valve along the flow direction;

[0008] All air inlet ports are located outside the cabinet and are equipped with manual valves;

[0009] The gas outlet ports of the nitrogen delivery pipeline are all located outside the cabinet, and the gas outlet ports of the nitrogen delivery pipeline include a first nitrogen outlet, a second nitrogen outlet, a third nitrogen outlet, a fourth nitrogen outlet, and a fifth nitrogen outlet for exporting nitrogen; the gas outlet ports of the nitrogen delivery pipeline also include a first mixed gas outlet and a second mixed gas outlet for exporting a mixed gas of nitrogen, hydrogen, and hydrogen chloride gas;

[0010] The outlet port of the hydrogen delivery pipeline includes a first hydrogen outlet, a second hydrogen outlet, a third hydrogen outlet, a fourth hydrogen outlet and a fifth hydrogen outlet for exporting hydrogen, the first hydrogen outlet and the second hydrogen outlet are located outside the cabinet, the third hydrogen outlet, the fourth hydrogen outlet and the fifth hydrogen outlet are all located inside the cabinet, the third hydrogen outlet and the fourth hydrogen outlet are connected to the first mixed gas outlet, and the fifth hydrogen outlet is connected to the second mixed gas outlet;

[0011] The gas outlet ports of the hydrogen chloride gas delivery pipeline are all located in the cabinet, and the gas outlet ports of the hydrogen chloride gas delivery pipeline include a first hydrogen chloride gas outlet and a second hydrogen chloride gas outlet for exporting hydrogen chloride gas, and the first hydrogen chloride gas outlet and the second hydrogen chloride gas outlet are respectively connected to the first mixed gas outlet and the second mixed gas outlet.

[0012] Further preferably, the gas inlet ports of the hydrogen gas delivery pipeline, the nitrogen gas delivery pipeline and the hydrogen chloride gas delivery pipeline are all located outside the cabinet.

[0013] Further preferably, the hydrogen delivery pipeline comprises a hydrogen inlet port, a hydrogen main line, a hydrogen branch line and a hydrogen outlet port connected in sequence, and each hydrogen branch line is sequentially installed with a hydrogen manual valve, a hydrogen mass flow controller, a hydrogen pneumatic valve and a hydrogen check valve along the flow direction;

[0014] There are five hydrogen branches, namely a first hydrogen branch, a second hydrogen branch, a third hydrogen branch, a fourth hydrogen branch and a fifth hydrogen branch;

[0015] The first hydrogen branch and the second hydrogen branch are connected to the first hydrogen outlet and the second hydrogen outlet respectively through vertically arranged pipelines;

[0016] The main hydrogen line is located adjacent to the third hydrogen branch line.

[0017] Further preferably, the outlet directions of the third hydrogen outlet and the fourth hydrogen outlet are skewed and perpendicular, and are both perpendicular to the outlet direction of the second mixed gas outlet, and the third hydrogen outlet and the fourth hydrogen outlet have different heights.

[0018] Further preferably, the nitrogen delivery pipeline comprises a nitrogen inlet port, a nitrogen main line, a nitrogen branch line and a nitrogen outlet port connected in sequence;

[0019] The nitrogen branch includes a first nitrogen branch, a second nitrogen branch, a third nitrogen branch, a fourth nitrogen branch and a fifth nitrogen branch;

[0020] The first nitrogen branch includes a first main branch and two first branches that are connected and connected, and the two first branches are a first upper branch and a first lower branch that are arranged up and down; the first upper branch is connected to the first nitrogen outlet, and the first lower branch is connected to the second nitrogen outlet;

[0021] The second nitrogen branch includes a second main branch and two second branches that are connected and connected, and the two second branches are a second upper branch and a second lower branch that are arranged up and down; the second upper branch is connected to the third nitrogen outlet, and the second lower branch is connected to the fourth nitrogen outlet;

[0022] A nitrogen manual valve and a nitrogen mass flow controller are installed on the first main branch and the second main branch;

[0023] The first upper branch, the first lower branch, the second upper branch and the second lower branch are all equipped with a nitrogen pneumatic valve and a nitrogen check valve;

[0024] The third nitrogen branch, the fourth nitrogen branch and the fifth nitrogen branch are connected to the fifth nitrogen outlet, the first mixed gas outlet and the second mixed gas outlet respectively; the third nitrogen branch, the fourth nitrogen branch and the fifth nitrogen branch are sequentially installed with a nitrogen manual valve, a nitrogen mass flow controller, a nitrogen pneumatic valve and a nitrogen check valve along the flow direction.

[0025] Further preferably, the hydrogen chloride gas delivery pipeline comprises a hydrogen chloride inlet port, a hydrogen chloride main line, a hydrogen chloride branch line and a hydrogen chloride outlet port connected in sequence, and each hydrogen chloride branch line is sequentially installed with a hydrogen chloride manual valve, a hydrogen chloride mass flow controller, a hydrogen chloride pneumatic valve and a hydrogen chloride check valve along the flow direction.

[0026] A pressure reducing valve is installed on the hydrogen chloride main line.

[0027] Further preferably, the hydrogen chloride branch includes a first hydrogen chloride branch, a second hydrogen chloride branch and a third hydrogen chloride branch;

[0028] The first hydrogen chloride branch line is connected to the hydrogen chloride main line;

[0029] The second hydrogen chloride branch and the third hydrogen chloride branch are connected to the hydrogen chloride main line through the same butt joint pipe;

[0030] The gas outlet end of the first hydrogen chloride branch and the gas outlet end of the second hydrogen chloride branch are connected and connected, and the gas outlet end of the second hydrogen chloride branch serves as the first hydrogen chloride gas outlet;

[0031] The gas outlet end of the third hydrogen chloride branch is the second hydrogen chloride gas outlet.

[0032] Further preferably, a first nitrogen connector and a second nitrogen connector are installed on the top of the cabinet;

[0033] The first nitrogen connector is used to fill nitrogen into the cabinet cavity;

[0034] The second nitrogen connector is used for connecting the air inlet pipelines of the pneumatic valve and the solenoid valve.

[0035] Further preferably, the first nitrogen outlet and the first mixed gas outlet are joined outside the cabinet through a pipeline and then introduced into the CVD furnace to be used as the A-path coating mixed gas;

[0036] The third nitrogen outlet and the second mixed gas outlet are combined through a pipeline outside the cabinet and then introduced into the CVD furnace to be used as mixed gas for B-path coating;

[0037] After the second nitrogen outlet and the second hydrogen outlet are merged through a pipeline outside the cabinet, they are introduced into the CVD furnace. By controlling the gas-controlled valve of the second nitrogen outlet to be closed and the gas-controlled valve of the second hydrogen outlet to be opened, hydrogen is introduced into the CVD furnace through a pipeline for heating and temperature raising. By controlling the gas-controlled valve of the second nitrogen outlet to be opened and the gas-controlled valve of the second hydrogen outlet to be closed, nitrogen is introduced into the CVD furnace through a pipeline for cooling and cleaning.

[0038] The fourth nitrogen outlet leads into the CVD furnace for forced cooling;

[0039] The fifth nitrogen outlet is used for pipeline cleaning;

[0040] The second hydrogen outlet is used as auxiliary hydrogen for the CVD furnace.

[0041] Further preferably, the nitrogen delivery pipeline, the hydrogen delivery pipeline and the hydrogen chloride gas delivery pipeline are respectively installed on different support plate brackets, and the support plate brackets are detachably installed in the cabinet;

[0042] The nitrogen branch of the nitrogen delivery pipeline is lower than the hydrogen branch of the hydrogen delivery pipeline, and the hydrogen branch of the hydrogen delivery pipeline is lower than the hydrogen chloride branch of the hydrogen chloride gas delivery pipeline.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] The device is mainly composed of a gas control panel box, a frame, left and right doors, a solenoid valve box, an electric control box, N2, H2, HCL pipelines, etc. Each pipeline is equipped with a manual valve, a mass flow controller, a pneumatic valve, a check valve, etc. to facilitate the control of the pressure and flow of the gas in each pipeline.

[0045] This device mainly divides and integrates N2, H2, and HCL according to the production process requirements, and then transports the required process gases to the CVD furnace for coating. Depending on the process requirements, the pressure and flow of the corresponding branches will be appropriately adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 A structural schematic diagram of a specific embodiment 1 of the present invention;

[0047] Figure 2This is a schematic diagram of the structure of a nitrogen delivery pipeline according to a specific embodiment 1 of the present invention;

[0048] Figure 3 This is a schematic structural diagram of a hydrogen delivery pipeline according to a specific embodiment 1 of the present invention;

[0049] Figure 4 This is a schematic diagram of the structure of the hydrogen chloride gas delivery pipeline of the specific embodiment 1 of the present invention.

[0050] 1 is a nitrogen inlet port, 2 is a hydrogen inlet port, 3 is a hydrogen chloride inlet port, 4 is a first nitrogen connector, 5 is a second nitrogen connector, 6 is a first hydrogen outlet, 7 is a second hydrogen outlet, 8 is a first nitrogen outlet, 9 is a second nitrogen outlet, 10 is a third nitrogen outlet, 11 is a fourth nitrogen outlet, 12 is a fifth nitrogen outlet, 13 is a first mixed gas outlet, 14 is a second mixed gas outlet, 15 is a right door, 16 is a frame seat, 17 is a solenoid valve box, 18 is an electric control box, 19 is a left door, and 20 is a cabinet;

[0051] 1-1 is the first nitrogen branch, 1-2 is the second nitrogen branch, 1-3 is the third nitrogen branch, 1-4 is the fourth nitrogen branch, 1-5 is the fifth nitrogen branch, 1-1-1 is the first lower branch, 1-1-2 is the first upper branch, 1-2-1 is the second lower branch, and 1-2-2 is the second upper branch;

[0052] 2-1 is the first hydrogen branch, 2-2 is the second hydrogen branch, 2-3 is the third hydrogen branch, and 2-4 is the fourth hydrogen branch;

[0053] 3-1 is the first hydrogen chloride branch, 3-2 is the second hydrogen chloride branch, and 3-3 is the third hydrogen chloride branch;

[0054] 21 is a nitrogen main manual valve, 22 is a nitrogen manual valve, 23 is a nitrogen mass flow controller, 24 is a nitrogen pneumatic valve, 25 is a nitrogen check valve, 26 is a hydrogen main manual valve, 27 is a hydrogen manual valve, 28 is a hydrogen mass flow controller, 29 is a hydrogen pneumatic valve, 30 is a hydrogen check valve, 31 is a hydrogen chloride main manual valve, and 32 is a pressure reducing valve. DETAILED DESCRIPTION

[0055] See also Figures 1 to 4 Specific embodiment 1, a gas control panel device for a CVD furnace includes a cabinet 20. The front end of the cabinet is open, and the left door 19 and the right door 15 are installed on the open end of the cabinet. The cabinet is installed with a frame seat 16, a solenoid valve box 17 and an electric control box 18.

[0056] The top of the cabinet is equipped with a first nitrogen connector 4 and a second nitrogen connector 5; the first nitrogen connector is used to fill nitrogen into the cabinet cavity; the second nitrogen connector is used to connect the air inlet pipelines of the pneumatic valve and the solenoid valve. Because there is hydrogen in the pipeline, for safety reasons, nitrogen is introduced into the cabinet 20 to prevent explosion, that is, nitrogen is introduced into the first nitrogen connector 4. At the same time, for safety reasons, the gas introduced into the pneumatic valve and the solenoid valve is also nitrogen, which is introduced from the second nitrogen connector 5.

[0057] It also includes nitrogen delivery pipelines, hydrogen delivery pipelines and hydrogen chloride gas delivery pipelines; the hydrogen delivery pipelines, nitrogen delivery pipelines and hydrogen chloride gas delivery pipelines all include sequentially connected inlet ports, main pipelines, branches and outlet ports, and each branch is sequentially installed with manual valves, mass flow controllers, pneumatic valves and check valves along the flow direction; all inlet ports are located outside the cabinet and are equipped with manual valves. Specifically, the inlet port of the nitrogen delivery pipeline is installed with a nitrogen main manual valve 21; the inlet port of the hydrogen delivery pipeline is installed with a hydrogen main manual valve 27; the inlet port of the hydrogen chloride delivery pipeline is installed with a hydrogen chloride main manual valve 31;

[0058] The outlet ports of the nitrogen delivery pipeline are all located outside the cabinet, and the outlet ports of the nitrogen delivery pipeline include a first nitrogen outlet 8, a second nitrogen outlet 9, a third nitrogen outlet 10, a fourth nitrogen outlet 11 and a fifth nitrogen outlet 12 for exporting nitrogen; the outlet ports of the nitrogen delivery pipeline also include a first mixed gas outlet 13 and a second mixed gas outlet 14 for exporting a mixed gas of nitrogen, hydrogen and hydrogen chloride gas.

[0059] The outlet ports of the hydrogen delivery pipeline include a first hydrogen outlet 6, a second hydrogen outlet 7, a third hydrogen outlet, a fourth hydrogen outlet and a fifth hydrogen outlet for exporting hydrogen. The first hydrogen outlet 6 and the second hydrogen outlet 7 are located outside the cabinet, and the third hydrogen outlet, the fourth hydrogen outlet and the fifth hydrogen outlet are all located inside the cabinet. The third hydrogen outlet and the fourth hydrogen outlet are connected to the first mixed gas outlet 13, and the fifth hydrogen outlet is connected to the second mixed gas outlet 14.

[0060] The gas outlet ports of the hydrogen chloride gas delivery pipeline are all located in the cabinet. The gas outlet ports of the hydrogen chloride gas delivery pipeline include a first hydrogen chloride gas outlet and a second hydrogen chloride gas outlet for exporting hydrogen chloride gas. The first hydrogen chloride gas outlet and the second hydrogen chloride gas outlet are connected to the first mixed gas outlet 13 and the second mixed gas outlet 14 respectively.

[0061] The gas inlet ports of the hydrogen gas delivery pipeline, the nitrogen gas delivery pipeline and the hydrogen chloride gas delivery pipeline are all located outside the cabinet.

[0062] Specifically, the hydrogen delivery pipeline includes a hydrogen inlet port 2, a hydrogen main line, a hydrogen branch and a hydrogen outlet port connected in sequence, and each hydrogen branch is sequentially installed with a hydrogen manual valve 27, a hydrogen mass flow controller 28, a hydrogen pneumatic valve 29 and a hydrogen check valve 30 along the flow direction; there are five hydrogen branches, namely the first hydrogen branch 2-1, the second hydrogen branch 2-2, the third hydrogen branch 2-3, the fourth hydrogen branch 2-4 and the fifth hydrogen branch 2-5; the first hydrogen branch 2-1 and the second hydrogen branch 2-2 are respectively connected to the first hydrogen outlet 6 and the second hydrogen outlet 7 through vertically arranged pipelines; the hydrogen main line is located on the side adjacent to the third hydrogen branch 2-3. The export directions of the third hydrogen outlet and the fourth hydrogen outlet are skewed and perpendicular, and are both perpendicular to the export direction of the second mixed gas outlet 14, and the heights of the third hydrogen outlet and the fourth hydrogen outlet are different.

[0063] The nitrogen delivery pipeline includes a nitrogen inlet port 1, a nitrogen main pipeline, a nitrogen branch and a nitrogen outlet port connected in sequence; the nitrogen branch includes a first nitrogen branch 1-1, a second nitrogen branch 1-2, a third nitrogen branch 1-3, a fourth nitrogen branch 1-4 and a fifth nitrogen branch 1-5; the first nitrogen branch 1-1 includes a first main branch connected to each other and two first branches, the two first branches are a first upper branch 1-1-2 and a first lower branch 1-1-1 arranged up and down; the first upper branch 1-1-2 is connected to the first nitrogen outlet 8, and the first lower branch 1-1-1 is connected to the second nitrogen outlet 9; the second nitrogen branch 1-2 includes a second main branch connected to each other and two second branches, the two second branches are a second upper branch 1-2-2 and a second lower branch 1-2-1 arranged up and down; the second upper branch 1-2-2 is connected to the second main branch 1-2-2 and the second lower branch 1-2-1 arranged up and down; the second upper branch 1-2-2 is connected to the second main branch 1-2-2 and the second lower branch 1-2-1 arranged up and down; the second upper branch 1-2-2 is connected to the second main branch 1-2-2 and the second lower branch 1-2-2 are ... are connected to the second upper branch 1-2-2 and the second lower branch 1-2-2 are connected to the second upper branch 1-2-2 and the second lower branch 1-2-2 are connected to the second upper branch 1-2-2 and the second lower branch 1-2-1 are connected to the second upper branch 1-2-2 and The third nitrogen outlet 10, the second lower branch 1-2-1 is connected to the fourth nitrogen outlet 11; the first main branch and the second main branch are both equipped with a nitrogen manual valve 22 and a nitrogen mass flow controller 23; the first upper branch 1-1-2, the first lower branch 1-1-1, the second upper branch 1-2-2 and the second lower branch 1-2-1 are all equipped with a nitrogen pneumatic valve 24 and a nitrogen check valve 25; the third nitrogen branch 1-3, the fourth nitrogen branch 1-4 and the fifth nitrogen branch 1-5 are respectively connected to the fifth nitrogen outlet 12, the first mixed gas outlet 13 and the second mixed gas outlet 14; the third nitrogen branch 1-3, the fourth nitrogen branch 1-4 and the fifth nitrogen branch 1-5 are all equipped with a nitrogen manual valve 22, a nitrogen mass flow controller 23, a nitrogen pneumatic valve 24 and a nitrogen check valve 25 in sequence along the flow direction.

[0064] The hydrogen chloride gas delivery pipeline includes a hydrogen chloride inlet port 3, a hydrogen chloride main line, a hydrogen chloride branch line and a hydrogen chloride outlet port connected in sequence, and a hydrogen chloride manual valve, a hydrogen chloride mass flow controller, a hydrogen chloride pneumatic valve and a hydrogen chloride check valve are installed in sequence along the flow direction on each hydrogen chloride branch line. A pressure reducing valve 32 is installed on the hydrogen chloride main line. The hydrogen chloride branch line includes a first hydrogen chloride branch line 3-1, a second hydrogen chloride branch line 3-2 and a third hydrogen chloride branch line 3-3; the first hydrogen chloride branch line 3-1 is connected to the hydrogen chloride main line; the second hydrogen chloride branch line 3-2 and the third hydrogen chloride branch line 3-3 are connected to the hydrogen chloride main line through the same docking pipe; the outlet end of the first hydrogen chloride branch line 3-1 and the outlet end of the second hydrogen chloride branch line 3-2 are connected, and the outlet end of the second hydrogen chloride branch line 3-2 is the first hydrogen chloride gas outlet; the outlet end of the third hydrogen chloride branch line 3-3 is the second hydrogen chloride gas outlet.

[0065] The first nitrogen outlet 8 and the first mixed gas outlet 13 are merged outside the cabinet through a pipeline and then introduced into the CVD furnace as the A-path coating mixed gas; the third nitrogen outlet 10 and the second mixed gas outlet 14 are merged outside the cabinet through a pipeline and then introduced into the CVD furnace as the B-path coating mixed gas; the second nitrogen outlet 9 and the second hydrogen outlet 7 are merged outside the cabinet through a pipeline and then introduced into the CVD furnace, and the gas-controlled valve of the second nitrogen outlet is controlled to be closed and the gas-controlled valve of the second hydrogen outlet is opened, and hydrogen is introduced into the CVD furnace through a pipeline as heating hydrogen; the gas-controlled valve of the second nitrogen outlet is controlled to be opened and the gas-controlled valve of the second hydrogen outlet is closed, and nitrogen is introduced into the CVD furnace through a pipeline for cooling and cleaning; the fourth nitrogen outlet 11 is introduced into the CVD furnace for forced cooling; the fifth nitrogen outlet 12 is used for pipeline cleaning; the second hydrogen outlet 7 is used as auxiliary hydrogen for the CVD furnace.

[0066] The nitrogen delivery pipeline, the hydrogen delivery pipeline and the hydrogen chloride gas delivery pipeline are respectively installed on different support brackets, and the support brackets are detachably installed in the cabinet; the nitrogen branch of the nitrogen delivery pipeline is lower than the hydrogen branch of the hydrogen delivery pipeline, and the hydrogen branch of the hydrogen delivery pipeline is lower than the hydrogen chloride branch of the hydrogen chloride gas delivery pipeline.

[0067] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A gas control panel device for a CVD furnace, characterized in that: The invention comprises a cabinet; It also includes a nitrogen gas delivery pipeline, a hydrogen gas delivery pipeline, and a hydrogen chloride gas delivery pipeline; The hydrogen gas delivery pipeline, the nitrogen gas delivery pipeline and the hydrogen chloride gas delivery pipeline each include an inlet port, a main pipeline, a branch pipeline and an outlet port connected in sequence, and each branch pipeline is sequentially installed with a manual valve, a mass flow controller, a pneumatic valve and a check valve along the flow direction; All air inlet ports are located outside the cabinet and are equipped with manual valves; The gas outlet ports of the nitrogen delivery pipeline are all located outside the cabinet, and the gas outlet ports of the nitrogen delivery pipeline include a first nitrogen outlet, a second nitrogen outlet, a third nitrogen outlet, a fourth nitrogen outlet, and a fifth nitrogen outlet for exporting nitrogen; the gas outlet ports of the nitrogen delivery pipeline also include a first mixed gas outlet and a second mixed gas outlet for exporting a mixed gas of nitrogen, hydrogen, and hydrogen chloride gas; The outlet port of the hydrogen delivery pipeline includes a first hydrogen outlet, a second hydrogen outlet, a third hydrogen outlet, a fourth hydrogen outlet and a fifth hydrogen outlet for exporting hydrogen, the first hydrogen outlet and the second hydrogen outlet are located outside the cabinet, the third hydrogen outlet, the fourth hydrogen outlet and the fifth hydrogen outlet are all located inside the cabinet, the third hydrogen outlet and the fourth hydrogen outlet are connected to the first mixed gas outlet, and the fifth hydrogen outlet is connected to the second mixed gas outlet; The gas outlet ports of the hydrogen chloride gas delivery pipeline are all located in the cabinet, and the gas outlet ports of the hydrogen chloride gas delivery pipeline include a first hydrogen chloride gas outlet and a second hydrogen chloride gas outlet for exporting hydrogen chloride gas, and the first hydrogen chloride gas outlet and the second hydrogen chloride gas outlet are respectively connected to the first mixed gas outlet and the second mixed gas outlet.

2. The gas control panel device of a CVD furnace according to claim 1, characterized in that: The gas inlet ports of the hydrogen gas delivery pipeline, the nitrogen gas delivery pipeline and the hydrogen chloride gas delivery pipeline are all located outside the cabinet.

3. The gas control panel device of a CVD furnace according to claim 1, characterized in that: The hydrogen delivery pipeline comprises a hydrogen inlet port, a hydrogen main pipeline, a hydrogen branch and a hydrogen outlet port connected in sequence, and each hydrogen branch is sequentially installed with a hydrogen manual valve, a hydrogen mass flow controller, a hydrogen pneumatic valve and a hydrogen check valve along the flow direction; There are five hydrogen branches, namely a first hydrogen branch, a second hydrogen branch, a third hydrogen branch, a fourth hydrogen branch and a fifth hydrogen branch; The first hydrogen branch and the second hydrogen branch are connected to the first hydrogen outlet and the second hydrogen outlet respectively through vertically arranged pipelines; The main hydrogen line is located adjacent to the third hydrogen branch line.

4. The gas control panel device of a CVD furnace according to claim 3, characterized in that: The outlet directions of the third hydrogen outlet and the fourth hydrogen outlet are skewed and perpendicular, and are both perpendicular to the outlet direction of the second mixed gas outlet. The third hydrogen outlet and the fourth hydrogen outlet have different heights.

5. The gas control panel device of a CVD furnace according to claim 1, characterized in that: The nitrogen delivery pipeline comprises a nitrogen inlet port, a nitrogen main line, a nitrogen branch line and a nitrogen outlet port connected in sequence; The nitrogen branch includes a first nitrogen branch, a second nitrogen branch, a third nitrogen branch, a fourth nitrogen branch and a fifth nitrogen branch; The first nitrogen branch includes a first main branch and two first branches that are connected and connected, and the two first branches are a first upper branch and a first lower branch that are arranged up and down; the first upper branch is connected to the first nitrogen outlet, and the first lower branch is connected to the second nitrogen outlet; The second nitrogen branch includes a second main branch and two second branches that are connected and connected, and the two second branches are a second upper branch and a second lower branch that are arranged up and down; the second upper branch is connected to the third nitrogen outlet, and the second lower branch is connected to the fourth nitrogen outlet; A nitrogen manual valve and a nitrogen mass flow controller are installed on the first main branch and the second main branch; The first upper branch, the first lower branch, the second upper branch and the second lower branch are all equipped with a nitrogen pneumatic valve and a nitrogen check valve; The third nitrogen branch, the fourth nitrogen branch and the fifth nitrogen branch are connected to the fifth nitrogen outlet, the first mixed gas outlet and the second mixed gas outlet respectively; the third nitrogen branch, the fourth nitrogen branch and the fifth nitrogen branch are sequentially installed with a nitrogen manual valve, a nitrogen mass flow controller, a nitrogen pneumatic valve and a nitrogen check valve along the flow direction.

6. The gas control panel device of a CVD furnace according to claim 1, characterized in that: The hydrogen chloride gas delivery pipeline comprises a hydrogen chloride inlet port, a hydrogen chloride main line, a hydrogen chloride branch line and a hydrogen chloride outlet port connected in sequence, and a hydrogen chloride manual valve, a hydrogen chloride mass flow controller, a hydrogen chloride pneumatic valve and a hydrogen chloride check valve are sequentially installed on each hydrogen chloride branch line along the flow direction. A pressure reducing valve is installed on the hydrogen chloride main line.

7. The gas control panel device of a CVD furnace according to claim 6, characterized in that: The hydrogen chloride branch includes a first hydrogen chloride branch, a second hydrogen chloride branch and a third hydrogen chloride branch; The first hydrogen chloride branch line is connected to the hydrogen chloride main line; The second hydrogen chloride branch and the third hydrogen chloride branch are connected to the hydrogen chloride main line through the same butt joint pipe; The gas outlet end of the first hydrogen chloride branch and the gas outlet end of the second hydrogen chloride branch are connected and connected, and the gas outlet end of the second hydrogen chloride branch serves as the first hydrogen chloride gas outlet; The gas outlet end of the third hydrogen chloride branch is the second hydrogen chloride gas outlet.

8. The gas control panel device of a CVD furnace according to claim 1, characterized in that: A first nitrogen connector and a second nitrogen connector are installed on the top of the cabinet; The first nitrogen connector is used to fill nitrogen into the cabinet cavity; The second nitrogen connector is used for connecting the air inlet pipelines of the pneumatic valve and the solenoid valve.

9. The gas control panel device of a CVD furnace according to claim 1, characterized in that: The first nitrogen outlet and the first mixed gas outlet are combined through a pipeline outside the cabinet and then introduced into the CVD furnace to be used as the A-path coating mixed gas; The third nitrogen outlet and the second mixed gas outlet are combined through a pipeline outside the cabinet and then introduced into the CVD furnace to be used as mixed gas for B-path coating; After the second nitrogen outlet and the second hydrogen outlet are merged through a pipeline outside the cabinet, they are introduced into the CVD furnace. By controlling the gas-controlled valve of the second nitrogen outlet to be closed and the gas-controlled valve of the second hydrogen outlet to be opened, hydrogen is introduced into the CVD furnace through a pipeline for heating and temperature raising. By controlling the gas-controlled valve of the second nitrogen outlet to be opened and the gas-controlled valve of the second hydrogen outlet to be closed, nitrogen is introduced into the CVD furnace through a pipeline for cooling and cleaning. The fourth nitrogen outlet leads into the CVD furnace for forced cooling; The fifth nitrogen outlet is used for pipeline cleaning; The second hydrogen outlet is used as auxiliary hydrogen for the CVD furnace.

10. The gas control panel device of a CVD furnace according to claim 1, characterized in that: The nitrogen delivery pipeline, hydrogen delivery pipeline and hydrogen chloride gas delivery pipeline are respectively installed on different support plate brackets, and the support plate brackets are detachably installed in the cabinet; The nitrogen branch of the nitrogen delivery pipeline is lower than the hydrogen branch of the hydrogen delivery pipeline, and the hydrogen branch of the hydrogen delivery pipeline is lower than the hydrogen chloride branch of the hydrogen chloride gas delivery pipeline.

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