Calibration method of piezoelectric sound pressure sensor
Through systematic calibration methods and temperature compensation technology, the problem that traditional sound pressure sensor calibration methods are difficult to achieve accurate measurement in multi-band and different temperature environments is solved, and the stable and reliable measurement of sound pressure sensors in multi-band and different temperatures is achieved.
Patent Information
- Application Number
- CN202411836628.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-03-14
AI Technical Summary
Traditional sound pressure sensor calibration methods are difficult to achieve accurate measurement in multiple frequency bands and different temperature environments, and cannot effectively consider temperature factors, resulting in large errors in the measurement results.
Using a systematic calibration method, from the construction of the equivalent circuit model to the calculation of the frequency response function, and then to the application of the compensation function, the temperature sensor is combined with the temperature sensor to monitor the ambient temperature and record it, and the electrical parameter changes of the sound pressure sensor at different temperatures are determined through experimental measurements, a mathematical model between the temperature and the sound pressure sensor parameters are established, and the parameters of the equivalent circuit model are adjusted to achieve temperature compensation.
It effectively reduces measurement errors caused by temperature changes, makes the equivalent circuit model better reflect the state of the sound pressure sensor in the actual working environment, enhances the stability and reliability of the sound pressure sensor, and achieves the accuracy and consistency of the measurement results under multi-band acoustic signals.
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Figure CN119618366A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of sound pressure sensor calibration, and in particular to a calibration method for a piezoelectric sound pressure sensor. Background Art
[0002] In the field of acoustic measurement, sound pressure sensor is a key device used to convert sound pressure signals into electrical signals for subsequent analysis and processing. With the increasing requirements for acoustic measurement accuracy, especially in multi-band acoustic measurement scenarios, the accurate calibration of sound pressure sensors has become an important research topic.
[0003] Traditional sound pressure sensor calibration methods often have limitations. On the one hand, when measuring in multiple frequency bands, it is difficult to accurately describe the performance of the sound pressure sensor using a single model or method because the electrical and acoustic characteristics of the sound pressure sensor itself vary at different frequencies, which leads to large errors in the measurement results. For example, in the low frequency band, factors such as the vibration characteristics of the diaphragm of the sound pressure sensor and the acoustic resonance of the cavity have a greater impact on the measurement results; in the high frequency band, factors such as the parasitic parameters of the internal circuit of the sound pressure sensor and the acoustic attenuation of the diaphragm will cause measurement deviations.
[0004] On the other hand, temperature also has a significant impact on the performance of sound pressure sensors. Under different temperature environments, the parameters of the electrical components of the sound pressure sensor (such as capacitors, resistors, etc.) will change, thereby affecting the frequency response characteristics of the sound pressure sensor. Traditional calibration methods often do not fully consider temperature factors, or only use simple fixed compensation coefficients, which cannot meet the precise measurement requirements under different temperature conditions.
[0005] In practical acoustic measurement applications, such as environmental noise monitoring, acoustic performance testing in audio equipment manufacturing, experimental measurements in acoustic research, etc., the sound pressure sensor needs to be able to accurately measure the sound pressure signal in multiple frequency bands and maintain the consistency and accuracy of the measurement results in different temperature environments. Therefore, it is of great significance to develop a calibration method for piezoelectric sound pressure sensors that can comprehensively consider the equivalent circuit model, sound pressure sensor frequency response function, temperature compensation, and can adaptively adjust the compensation function. Summary of the invention
[0006] In view of the problems existing in the above-mentioned technology, the present invention proposes a calibration method for a piezoelectric sound pressure sensor.
[0007] The technical solution adopted by the present invention to solve its technical problem is:
[0008] In a first aspect, the present invention provides a method for calibrating a piezoelectric sound pressure sensor, the method comprising the following steps:
[0009] Step 1: Measure the parameters of the sound pressure sensor to be calibrated to obtain the electrical parameters of the sound pressure sensor equivalent circuit;
[0010] Step 2: Based on the equivalent circuit, obtain the frequency response function and amplitude-frequency curve of the microphone to be calibrated;
[0011] Step 3: Calculate the frequency response function and amplitude-frequency curve of the standard sound pressure sensor;
[0012] Step 4: Design a sampling circuit to obtain the current frequency value of the sound pressure;
[0013] Step 5: Compare the frequency response curve of the sound pressure sensor to be calibrated at the current frequency point with the frequency response curve of the standard sound pressure sensor to obtain a compensation function of the sound pressure sensor to be calibrated at the current frequency point;
[0014] Step 6: Correct the voltage value measured by the sound pressure sensor to be calibrated according to the compensation function.
[0015] In a second aspect, the present invention provides a calibration device for a piezoelectric sound pressure sensor, comprising a memory and one or more processors, wherein the memory stores executable code, and when the one or more processors execute the executable code, they are used to implement the calibration method for the piezoelectric sound pressure sensor.
[0016] In a third aspect, the present invention provides a computer-readable storage medium having a program stored thereon, which, when executed by a processor, implements the calibration method of a piezoelectric sound pressure sensor.
[0017] Compared with the prior art, the present invention has four advantages:
[0018] 1. The present invention provides a systematic calibration method, from the construction of the equivalent circuit model to the calculation of the frequency response function, and then to the application of the compensation function. The entire calibration process has clear steps and is easy to implement and promote.
[0019] 2. Because the present invention takes into account the influence of temperature, an important environmental factor, on the electrical parameters of the sound pressure sensor, the ambient temperature is monitored and recorded by using a temperature sensor, and the change law of the electrical parameters of the sound pressure sensor at different temperatures is determined through experimental measurement. The experimental data is fitted to establish a mathematical model between temperature and the sound pressure sensor parameters, and the parameters of the equivalent circuit model are adjusted according to the established temperature-parameter relationship model, thereby effectively reducing the measurement error caused by temperature changes, making the equivalent circuit model more able to reflect the state of the sound pressure sensor in the actual working environment, and enhancing the stability and reliability of the sound pressure sensor.
[0020] 3. The present invention comprehensively covers the working frequency band of the sound pressure sensor to be calibrated by selecting appropriate measurement frequency ranges and points, ensuring that accurate calibration results can be obtained at each frequency point. The working frequency points are measured through independent circuits to avoid the problem of inaccurate frequency measurement caused by software processing. At the same time, through the spectrum analysis of multi-band sound signals and the calculation of compensation functions, the present invention can correct the response characteristics of the sound pressure sensor at different frequencies, making its measurement results under multi-band sound signals more accurate.
[0021] 4. The present invention can achieve accurate compensation for performance differences. By calculating the compensation function F(jw) at the current sound pressure frequency point, the performance difference of the sound pressure sensor can be accurately compensated, and the accuracy and reliability of the measurement results can be improved. Moreover, the present invention can achieve consistency under multi-band sound signals, and use the compensation function to correct the voltage value measured by the current sound pressure sensor to be calibrated, so that its response under multi-band sound signals is consistent with that of the standard sound pressure sensor, further improving the accuracy of the measurement results. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the specific implementation of the present invention or the technical solution in the prior art, the following will briefly introduce the drawings required for the specific implementation or the prior art description. Some specific embodiments of the present invention will be described in detail in an exemplary but not restrictive manner with reference to the drawings. The same reference numerals in the drawings indicate the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:
[0023] Figure 1 Overall flow chart of the calibration method of piezoelectric sound pressure sensor;
[0024] Figure 2 Schematic diagram of the equivalent circuit model of the piezoelectric sound pressure sensor;
[0025] Figure 3 Conceptual block diagram of the calibration method for piezoelectric sound pressure sensors. DETAILED DESCRIPTION
[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.
[0027] The present invention provides a method for calibrating a piezoelectric sound pressure sensor, comprising the following steps:
[0028] Step 1: Use an impedance analyzer to measure the parameters of the sound pressure sensor to be calibrated, so as to obtain the electrical parameters of the equivalent circuit model of the sound pressure sensor, including static capacitance C0, dynamic capacitance C1, dynamic inductance L, and dynamic resistance R; specifically:
[0029] Select appropriate measurement frequency range and points to cover the operating frequency band of the sound pressure sensor to be calibrated;
[0030] Adjust the impedance analyzer to the corresponding frequency, and measure the impedance characteristics of the sound pressure sensor to be calibrated at each frequency point in turn;
[0031] According to the measurement results, an equivalent circuit model of the sound pressure sensor to be calibrated is constructed.
[0032] Furthermore, temperature compensation is included to adjust the parameters of the equivalent circuit model;
[0033] The temperature compensation specifically includes:
[0034] Use a temperature sensor to monitor and record the working temperature of the sound pressure sensor.
[0035] The impedance analyzer is used to measure and determine the variation patterns of the electrical parameters (such as static capacitance C0, dynamic capacitance C1, dynamic inductance L, and dynamic resistance R) of the sound pressure sensor to be calibrated at different temperatures.
[0036] The experimental data are fitted and a mathematical model between temperature and electrical parameters of the sound pressure sensor is established.
[0037] According to the established temperature-parameter relationship model, the parameters C0, C1, L, and R of the equivalent circuit model are adjusted through the temperature values collected in real time.
[0038] Step 2: Based on the equivalent circuit model, the frequency response function and amplitude-frequency curve of the sound pressure sensor to be calibrated can be obtained; specifically:
[0039] For the analysis of the equivalent circuit, the circuit analysis method is used to solve and obtain the input-output relationship expression of the sound pressure sensor to be calibrated;
[0040] According to the acoustic-electrical conversion principle, the acoustic input (sound pressure) of the sound pressure sensor to be calibrated is converted into an equivalent electrical input, substituted into the input-output relationship expression, and calculated with frequency as the variable to obtain the frequency response function H(jw) of the sound pressure sensor to be calibrated. The expression is as follows:
[0041]
[0042] Where V out (jw) is the complex frequency domain representation of the output voltage, which is the response of the sound pressure sensor to be calibrated to the input sound pressure; Vin (jw) is the complex frequency domain representation of the input sound pressure.
[0043] The amplitude of the frequency response function is calculated, and the amplitude at different frequencies is calculated using appropriate mathematical tools (such as numerical calculation software), so as to draw an amplitude-frequency curve.
[0044] Step 3: Similarly, calculate the frequency response function and amplitude-frequency curve of the standard sound pressure sensor;
[0045] Repeat steps 1-2 to calculate and plot the frequency response function H of the standard sound pressure sensor. * (jw) and amplitude-frequency curve.
[0046] Step 4: Design a sampling circuit to obtain the current frequency value of the sound pressure; specifically:
[0047] Choose the right AD converter: Select an AD converter that can meet the required sampling frequency and quantization accuracy.
[0048] Since the sound pressure signal is usually weak, it needs to be amplified by an amplifier circuit. The amplification factor of the amplifier circuit is reasonably set according to the strength of the sensor output signal and the requirements of the subsequent frequency measurement equipment to ensure that the signal strength input to the frequency counter or spectrum analyzer is within an appropriate range.
[0049] In order to improve signal quality and reduce noise interference, the signal can be filtered before entering the AD converter. The filtering parameters in the signal processing circuit are set according to the characteristics of the multi-band acoustic signal to remove unnecessary frequency components.
[0050] The sampled data is spectrally analyzed using techniques such as Fast Fourier Transform (FFT) to extract the frequency components of the sound pressure signal.
[0051] Step 5: Compare the frequency response curve of the sound pressure sensor to be calibrated at the current frequency point with the frequency response curve of the standard sound pressure sensor to obtain a compensation function of the sound pressure sensor to be calibrated at the current frequency point.
[0052] The frequency response curves of the sound pressure sensor to be calibrated and the standard sound pressure sensor at the same frequency are compared, and the compensation function F(jw) at the current sound pressure frequency is calculated and obtained to compensate for the performance difference of the sound pressure sensor to be calibrated.
[0053] The compensation function F(jw) is expressed as follows:
[0054]
[0055] Step 6: Correct the voltage value measured by the sound pressure sensor to be calibrated according to the compensation function.
[0056] Apply the compensation function to the voltage value V measured by the sound pressure sensor to be calibrated out Correction is made so that its response under multi-band sound signals is consistent with that of the standard sound pressure sensor. The corrected voltage value V out * , the expression is as follows:
[0057] V out * =V out ×F(jw)
[0058] The embodiments of the present invention are further described in detail below with reference to the accompanying drawings.
[0059] like Figure 1 As shown, this embodiment provides a systematic calibration method, from the construction of the equivalent circuit model to the calculation of the frequency response function, and then to the application of the compensation function. The entire calibration process has clear steps; it mainly includes three links: 1) model establishment, 2) frequency response function, and 3) compensation function. In the model establishment link, the electrical parameters of the sound pressure sensor are measured, and then their specific values are calculated to establish the model. In the frequency response function calculation process, it is required to compare the response curves of the sound pressure sensor to be calibrated and the standard sound pressure sensor. Finally, the compensation function is applied to complete the calibration.
[0060] Further, step 1: model building
[0061] like Figure 2 As shown, the impedance analyzer is used to measure the parameters of the sound pressure sensor to be calibrated, thereby obtaining the electrical parameters C0, C1, L, and R of the equivalent circuit model. This step is the basis of the entire calibration process. By measuring the impedance characteristics of the sound pressure sensor at different frequencies, the equivalent circuit model of the sound pressure sensor can be constructed. This model will be used for subsequent frequency response function calculations and temperature compensation to ensure the accuracy and reliability of the calibration results. Specifically:
[0062] First, select an appropriate measurement frequency range and point to cover the operating frequency band of the sound pressure sensor to be calibrated. Then, adjust the impedance analyzer to the corresponding frequency and measure the impedance characteristics of the sound pressure sensor to be calibrated at each frequency point in turn. These impedance characteristics include the parameters of resistance, inductance and capacitance, which are the key to building an equivalent circuit model. During the measurement process, the data needs to be temperature compensated to eliminate the impact of ambient temperature changes on the performance of the sound pressure sensor. The specific operations of temperature compensation include using a temperature sensor to monitor and record the ambient temperature, determining the change law of the electrical parameters of the sound pressure sensor at different temperatures through experimental measurements, fitting the experimental data, establishing a mathematical model between temperature and sound pressure sensor parameters, and adjusting the parameters of the equivalent circuit model according to the established temperature-parameter relationship model.
[0063] Further, step 2: frequency response function
[0064] Based on the equivalent circuit model, the frequency response function and amplitude-frequency curve of the sound pressure sensor to be calibrated can be obtained, such as Figure 3 The frequency response function curve is shown in the figure; the frequency response function is an important parameter that describes the response characteristics of the sound pressure sensor to sound pressure signals of different frequencies. By calculating the frequency response function and the amplitude-frequency curve, we can intuitively understand the performance of the sound pressure sensor at different frequencies, providing a scientific basis for subsequent calibration and compensation. Specifically:
[0065] First, the circuit analysis method is used to solve the equivalent circuit to obtain the input-output relationship expression of the sound pressure sensor. This expression describes the voltage response of the sound pressure sensor at different frequencies. Then, according to the acoustic-electrical conversion principle, the acoustic input (sound pressure) of the sound pressure sensor is converted into an equivalent electrical input, substituted into the input-output relationship expression, and calculated with frequency as a variable to obtain the frequency response function H(jw) of the sound pressure sensor, which is expressed as follows:
[0066]
[0067] Where V out (jw) is the complex frequency domain representation of the output voltage, which is the response of the sound pressure sensor to the input sound pressure; V in (jw) is the complex frequency domain representation of the input sound pressure.
[0068] Next, the amplitude of the frequency response function is calculated, and the amplitude at different frequencies is calculated using appropriate mathematical tools to draw an amplitude-frequency curve. This curve can intuitively show the response amplitude of the sound pressure sensor at different frequencies. The amplitude calculation can be performed using the following formula:
[0069]
[0070] Similarly, the frequency response function and amplitude-frequency curve of the standard sound pressure sensor are calculated; the frequency response function and amplitude-frequency curve of the standard sound pressure sensor provide a reference for the calibration process. By comparing the performance of the sound pressure sensor to be calibrated with the standard sound pressure sensor, the performance difference of the sound pressure sensor to be calibrated can be accurately evaluated and corresponding compensation can be made.
[0071] Repeat steps 1 and 2 to calculate and plot the frequency response function H of the standard sound pressure sensor. * (jw) and amplitude-frequency curves. These data will be used for subsequent compensation function calculation and performance evaluation. The selection of a standard sound pressure sensor is critical and should have known and stable performance characteristics to ensure the accuracy of the calibration process.
[0072] Furthermore, a sampling circuit is designed to obtain the current frequency value of the actual sound pressure signal, which is the basis for frequency response curve comparison and compensation. Select an AD converter that can meet the required sampling frequency and quantization accuracy. Since the sound pressure signal is usually weak, the signal needs to be amplified by an amplifier circuit. The amplification factor of the amplifier circuit is reasonably set according to the strength of the sensor output signal and the requirements of the subsequent frequency measurement equipment to ensure that the signal strength input to the frequency counter or spectrum analyzer is within an appropriate range. In order to improve signal quality and reduce noise interference, the signal can be filtered before entering the AD converter. The filtering parameters are set according to the characteristics of the multi-band sound signal to remove unnecessary frequency components. Use techniques such as fast Fourier transform (FFT) to perform spectral analysis on the sampled data to extract the frequency components of the sound pressure signal. The mathematical expression of FFT is as follows:
[0073]
[0074] Where X(k) is the amplitude of the kth frequency component, x(n) is the original signal, and N is the number of samples of the signal.
[0075] Further, step 3: compensation function
[0076] The frequency response curve of the sound pressure sensor to be calibrated at the current frequency point is compared with the frequency response curve of the standard sound pressure sensor to obtain the compensation function of the sound pressure sensor at the current sound pressure frequency. By comparing the frequency response curves of the sound pressure sensor to be calibrated and the standard sound pressure sensor at the same frequency, the compensation function is calculated to compensate for the performance difference of the sound pressure sensor. The calculation of the compensation function is a key step in the calibration process, which directly affects the accuracy and reliability of the calibration results.
[0077] Compare the frequency response curves of the sound pressure sensor to be calibrated and the standard sound pressure sensor at the same frequency, calculate and obtain the compensation function F(jw) at the current sound pressure frequency to compensate for the performance difference of the sound pressure sensor. The expression of the compensation function F(jw) is as follows:
[0078]
[0079] This compensation function describes the performance difference between the sound pressure sensor to be calibrated and the standard sound pressure sensor at different frequencies. By applying this compensation function, the response of the sound pressure sensor to be calibrated can be adjusted to make it close to the performance of the standard sound pressure sensor. The calculation of the compensation function can be further refined to take into account nonlinearity and dynamic range limitations in practical applications.
[0080] Correct the voltage value measured by the sound pressure sensor to be calibrated according to the compensation function. Apply the compensation function to correct the voltage value measured by the sound pressure sensor to be calibrated so that its response under multi-band sound signals is consistent with that of the standard sound pressure sensor, thereby improving the accuracy of the measurement results. This is the last step in the calibration process and a key step in optimizing the performance of the sound pressure sensor.
[0081] Apply the compensation function to the voltage value V measured by the sound pressure sensor to be calibrated out Correction is performed, and the corrected voltage value V out * , the expression is as follows:
[0082] V out * =V out ×F(jw)
[0083] This corrected voltage value V out * It reflects the real response of the sound pressure sensor to the sound pressure signal after considering the performance differences and environmental factors. In this way, it can be ensured that the sound pressure sensor can provide accurate measurement results in different frequency and temperature environments. In addition, the compensation effect can be verified experimentally. By comparing the measurement data before and after calibration, the effectiveness of the compensation function can be evaluated, and the compensation strategy can be adjusted as needed.
[0084] In another embodiment, a calibration device for a piezoelectric sound pressure sensor includes a memory and one or more processors, wherein the memory stores executable code, and when the one or more processors execute the executable code, they are used to implement a calibration method for the piezoelectric sound pressure sensor.
[0085] In another embodiment, a computer-readable storage medium stores a program, which, when executed by a processor, implements a calibration method for a piezoelectric sound pressure sensor.
[0086] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.
[0087] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.
Claims
1. A calibration method for a piezoelectric sound pressure sensor, characterized in that The method comprises the following steps: Step 1: Measure the parameters of the sound pressure sensor to be calibrated to obtain the electrical parameters of the sound pressure sensor equivalent circuit; Step 2: Based on the equivalent circuit, obtain the frequency response function and amplitude-frequency curve of the microphone to be calibrated; Step 3: Calculate the frequency response function and amplitude-frequency curve of the standard sound pressure sensor; Step 4: Design a sampling circuit to obtain the current frequency value of the sound pressure; Step 5: Compare the frequency response curve of the sound pressure sensor to be calibrated at the current frequency point with the frequency response curve of the standard sound pressure sensor to obtain a compensation function of the sound pressure sensor to be calibrated at the current frequency point; Step 6: Correct the voltage value measured by the sound pressure sensor to be calibrated according to the compensation function.
2. The calibration method of a piezoelectric sound pressure sensor according to claim 1, characterized in that: Step 1 specifically is: Select the frequency measurement range and frequency measurement points to cover the operating frequency band of the sound pressure sensor to be calibrated; Adjust the impedance analyzer to the corresponding frequency, and measure the impedance characteristics of the sound pressure sensor to be calibrated at each frequency measurement point in turn; According to the measurement results, an equivalent circuit model of the sound pressure sensor to be calibrated is constructed; The parameters including resistance, inductance and capacitance are obtained according to the equivalent circuit model.
3. The calibration method of a piezoelectric sound pressure sensor according to claim 2, characterized in that: It also includes temperature compensation, which is used to adjust the parameters of the equivalent circuit model; The temperature compensation specifically includes: Use a temperature sensor to monitor and record the working temperature of the sound pressure sensor to be calibrated; The impedance analyzer is used to measure and determine the variation of the electrical parameters of the sound pressure sensor to be calibrated at different temperatures; Fit the experimental data and establish a mathematical model between temperature and the electrical parameters of the microphone to be calibrated; According to the mathematical model, the parameters of the equivalent circuit model are adjusted by the temperature value collected in real time.
4. The calibration method of a piezoelectric sound pressure sensor according to claim 1, characterized in that: Step 2 is specifically: The circuit analysis method is used to solve and obtain the input-output relationship expression of the sound pressure sensor to be calibrated; The acoustic input of the sound pressure sensor to be calibrated is converted into an equivalent electrical input, substituted into the input-output relationship expression, and calculated with frequency as a variable to obtain the frequency response function of the sound pressure sensor to be calibrated; The amplitude of the frequency response function is calculated to obtain the amplitude at different frequencies, thereby obtaining an amplitude-frequency curve.
5. The calibration method of a piezoelectric sound pressure sensor according to claim 1, characterized in that: The sampling circuit in step 4 includes an AD converter, and the signal is filtered before entering the AD converter. The filtering parameters are set according to the characteristics of the multi-band sound signal to remove unnecessary frequency components.
6. A piezoelectric sound pressure sensor calibration method according to claim 5, characterized in that: It also includes spectral analysis of the sampled data using fast Fourier transform to extract the frequency components of the sound pressure signal.
7. The calibration method of a piezoelectric sound pressure sensor according to claim 1, characterized in that: The compensation function is the ratio of the frequency response function of the standard sound pressure sensor to the frequency response function of the sound pressure sensor to be calibrated.
8. A method for calibrating a piezoelectric sound pressure sensor according to claim 1 or 7, characterized in that: The corrected voltage value in step 6 is the product of the voltage value measured by the current sound pressure sensor to be calibrated and the compensation function.
9. A calibration device for a piezoelectric sound pressure sensor, characterized in that: It comprises a memory and one or more processors, wherein the memory stores executable codes, and when the one or more processors execute the executable codes, they are used to implement a calibration method for a piezoelectric sound pressure sensor according to any one of claims 1 to 8.
10. A computer-readable storage medium, characterized in that: A program is stored thereon, and when the program is executed by a processor, a calibration method for a piezoelectric sound pressure sensor according to any one of claims 1 to 8 is implemented.
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