Helium recovery, purification and gas mixing system of battery leak detection equipment

Abstract

The invention belongs to the technical field of helium detection, and particularly relates to a helium recycling, purifying and gas mixing system for battery leakage detection equipment, which comprises a helium recycling, purifying and gas mixing system, the helium recovery system comprises a battery leak detection helium recovery port, a helium recovery valve, a recovery pump, a recovery low-pressure tank, a first inlet and outlet valve, a recovery compressor, a second inlet and outlet valve, a recovery high-pressure tank, a first exhaust valve, an inflation valve, a battery leak detection helium inflation port, a first concentration detection valve, a first concentration meter and a second concentration detection valve. According to the helium recycling, purifying and mixing system for the battery leak detection equipment, helium is recycled into a recycling low-pressure tank through a recycling pump, after the pressure in the recycling low-pressure tank rises to a set value, a recycling compressor and a first inlet and outlet valve and a second inlet and outlet valve of the recycling compressor are opened, and the helium in the recycling low-pressure tank is pressurized into a recycling high-pressure tank; and the helium is charged into a battery leak detection helium charging port through a No.1 helium charging valve, so that the recycling function of the helium is realized.

Description

Technical Field

[0001] The invention relates to the technical field of helium detection, and in particular to a helium recovery, purification and gas mixing system for battery leak detection equipment. Background Art

[0002] Helium is a colorless and odorless inert gas that is widely used in many industrial fields such as optical fiber production, semiconductor production, metal manufacturing, welding and leak detection. Although helium has a wide range of uses and is used in large quantities, its sources are limited and it is a scarce strategic resource. The helium content in the air is about 5PPM, which is basically not worth extracting. It is currently mainly derived from the recovery of associated gas in natural gas mining. At the same time, since helium is a global strategic resource, its reserves are limited and the export control of major producing countries is becoming increasingly tightened. Therefore, it is very meaningful to recycle and reuse helium, a scarce resource that is not easy to obtain.

[0003] When the battery is produced, it needs to be tested for air tightness. The commonly used testing method is helium testing. In actual operation, there will be the following problems:

[0004] 1. After the product is evacuated, it is filled with helium of a certain pressure. There is a vacuum space with the required degree of mobile vacuum outside the product being inspected, and the vacuum space is connected to the helium detector. If the inspected workpiece has a leak, the helium leaking into the vacuum space can be measured by the helium detector; to ensure the accuracy of the data, it is usually required that the concentration of helium filled into the battery remain consistent. At this time, if the helium in the inspected battery is discharged into the air, a large amount of helium will be wasted, and after the inspection is completed, the helium will be contaminated and the helium concentration will also decrease;

[0005] 2. After the helium test is completed, the helium is usually discharged directly. When it is re-absorbed, the helium concentration does not meet the standard and cannot meet the helium test phase concentration standard. Summary of the invention

[0006] In order to overcome the above-mentioned defects of the prior art, the inventors conducted in-depth research and completed the present invention after paying a lot of creative work.

[0007] Specifically, the technical problem to be solved by the present invention is to provide a helium recovery, purification and mixing system for battery leak detection equipment to solve the current technical problem that helium is directly discharged into the air after detection and cannot be reused.

[0008] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0009] A helium recovery, purification and gas mixing system for battery leak detection equipment, comprising a helium recovery, purification and gas mixing system, wherein the helium recovery, purification and gas mixing system comprises a helium recovery system, a helium gas mixing system and a helium purification system;

[0010] The helium recovery system comprises a battery leak detection helium recovery port, a helium recovery valve, a recovery pump, a recovery low-pressure tank, a No. 1 inlet and outlet valve, a recovery compressor, a No. 2 inlet and outlet valve, a recovery high-pressure tank, a No. 1 exhaust valve, a charging valve, a battery leak detection helium charging port, a No. 1 concentration detection valve, a No. 1 concentration meter and a No. 2 concentration detection valve.

[0011] As an improved technical solution, the output end of the battery leak detection helium recovery port is connected to the input end of the helium recovery valve through a pipeline, the output end of the helium recovery valve is connected to the input end of the recovery pump through a pipeline, and the output end of the recovery pump is connected to the input end of the recovery low-pressure tank through a pipeline.

[0012] As an improved technical solution, the output end of the recovery low-pressure tank is connected to the input end of the No. 1 inlet and outlet valve and the No. 1 concentration detection valve through a pipeline, the output end of the No. 1 inlet and outlet valve is connected to the inlet and outlet of the recovery compressor through a pipeline, the output end of the recovery compressor is connected to the input end of the No. 2 inlet and outlet valve through a pipeline, the output end of the No. 2 inlet and outlet valve is connected to the input end of the recovery high-pressure tank through a pipeline, the output end of the recovery high-pressure pipe is connected to the input end of the inflation valve and the No. 1 exhaust valve through a pipeline, the output end of the inflation valve is connected to the input end of the battery leak detection helium inflation port through a pipeline, the output end of the No. 1 concentration detection valve is connected to the input end of the No. 1 concentration meter through a pipeline, the output end of the No. 1 concentration meter is connected to the input end of the No. 2 concentration detection valve through a pipeline, and the output end of the No. 2 concentration detection valve is connected to the input end of the recovery high-pressure tank through a pipeline.

[0013] As an improved technical solution, the helium mixing system includes a No. 1 high-purity helium replenishing valve, a No. 2 high-purity helium replenishing valve, a No. 1 gas mass flow controller, a No. 2 gas mass flow controller, a No. 1 high-purity helium tank, a No. 2 high-purity helium tank, a No. 3 high-purity helium replenishing valve, a No. 3 gas mass flow controller and a pure gas tank.

[0014] As an improved technical solution, the output end of the No. 1 high-purity helium tank is connected to the input end of the No. 1 gas mass flow controller through a pipeline, the output end of the No. 1 gas mass flow controller is connected to the input end of the No. 1 high-purity helium replenishing valve through a pipeline, the output end of the No. 2 high-purity helium tank is connected to the input end of the No. 2 gas mass flow controller through a pipeline, and the output end of the No. 2 gas mass flow controller is connected to the input end of the No. 2 high-purity helium replenishing valve through a pipeline.

[0015] As an improved technical solution, the output end of the pure gas tank is connected to the input end of the No. 3 gas mass flow controller through a pipeline, the output end of the No. 3 gas mass flow controller is connected to the input end of the No. 3 high-purity helium replenishing valve through a pipeline, and the output ends of the No. 1 high-purity helium replenishing valve, the No. 2 high-purity helium replenishing valve and the No. 3 high-purity gas replenishing valve are all connected to the input end of the recovery low-pressure tank through a pipeline.

[0016] As an improved technical solution, the helium purification system includes a No. 1 purification air intake valve, a dirty air tank, a No. 2 purification air intake valve, a purification compressor, a purification buffer tank, a No. 2 purification air intake valve, a filter, a No. 1 check valve, an impure gas valve, a No. 2 concentration meter, a primary membrane separator, a secondary membrane separator, a needle valve, a flow meter, a No. 2 exhaust valve, a No. 1 pure gas valve, a No. 2 pure gas valve and a No. 2 check valve.

[0017] As an improved technical solution, the output end of the No. 1 purification intake valve is connected to the input end of the dirty gas tank through a pipeline, the output end of the dirty gas tank is connected to the input end of the No. 2 purification intake valve through a pipeline, the output end of the No. 2 purification intake valve is connected to the input end of the purification compressor through a pipeline, the output end of the purification compressor is connected to the input end of the purification storage tank through a pipeline, the output end of the purification storage tank is connected to the input end of the No. 2 purification intake valve through a pipeline, the output end of the No. 2 purification intake valve is connected to the input end of the filter through a pipeline, the output end of the filter is connected to the input end of the first-level membrane separator through a pipeline, the output end of the first-level membrane separator is connected to the input end of the second membrane separator and the No. 2 concentration meter through a pipeline, the output end of the No. 2 concentration meter is connected to the input end of the impure gas valve and the No. 1 pure gas valve through a pipeline, the output end of the impure gas valve is connected to the input end of the No. 1 check valve through a pipeline, and the output end of the No. 1 check valve is connected to the input end of the dirty gas tank through a pipeline.

[0018] As an improved technical solution, the output end of the secondary membrane separator is connected to the input end of the needle valve and the No. 2 pure gas valve through a pipeline, the output end of the needle valve is connected to the input end of the flow meter through a pipeline, and the output end of the flow meter is connected to the input end of the No. 2 exhaust valve through a pipeline.

[0019] As an improved technical solution, the output end of the No. 1 pure air valve is connected to the input end of the exhaust tank through a pipeline, the output end of the No. 2 pure air valve is connected to the input end of the No. 2 one-way valve through a pipeline, the output end of the No. 2 one-way valve is connected to the input end of the dirty gas tank through a pipeline, and the input of the No. 1 purified air intake valve is connected to the output end of the recovery high-pressure tank through a pipeline.

[0020] After adopting the above technical solution, the beneficial effects of the present invention are:

[0021] 1. The present invention realizes the recycling function of helium by adding a design for recycling helium, through the coordinated use of a helium recovery valve and a recovery pump with a recovery low-pressure tank and a No. 1 inlet and outlet valve, through the coordinated use of a recovery compressor and a No. 2 inlet and outlet valve with a recovery high-pressure tank and a No. 1 exhaust valve, and through the coordinated use of an inflation valve and a No. 1 concentration detection valve with a No. 1 concentration meter and a No. 2 concentration detection valve, and at the same time, the concentration of the helium in the recovery high-pressure tank is detected in real time.

[0022] 2. The present invention is designed to charge low-concentration helium with helium, and through the coordinated use of a No. 1 high-purity helium replenishing valve and a No. 2 high-purity helium replenishing valve with a No. 1 gas mass flow controller and a No. 2 gas mass flow controller, through the coordinated use of a No. 1 high-purity helium tank and a No. 2 high-purity helium tank with a No. 3 high-purity helium replenishing valve and a No. 3 gas mass flow controller, and then through the coordinated use of a pure gas tank, a quantitative helium is charged into the recovery system, and an effect of dynamic adjustment is achieved.

[0023] 3. The present invention adds a design for recycling and purifying waste helium for secondary utilization, through the coordinated use of the No. 1 purification intake valve and the dirty gas tank with the No. 2 purification intake valve and the purification compressor, through the coordinated use of the purification buffer tank and the No. 2 purification intake valve with the filter and the No. 1 check valve, through the coordinated use of the impure gas valve and the No. 2 concentration meter with the primary membrane separator and the secondary membrane separator, through the coordinated use of the needle valve and the flow meter with the No. 2 exhaust valve and the No. 1 pure gas valve, through the coordinated use of the No. 2 pure gas valve and the No. 2 check valve, and then through the coordinated use of the pure gas tank and the No. 3 gas mass flow controller with the No. 3 high-purity helium replenishing valve, so as to achieve the dirty gas through two purification steps, purify the helium in the dirty gas, store it, and use it with the high-purity helium of the gas mixing system, so as to realize the reuse of waste gas and improve the recovery rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0025] Figure 1 It is a structural schematic diagram of the helium recovery, purification and gas mixing system of the battery leak detection equipment of the present invention.

[0026] Figure 2 This is a structural schematic diagram of the helium recovery system of the battery leak detection equipment of the present invention.

[0027] Figure 3This is a structural schematic diagram of the helium mixing system of the helium recovery, purification and mixing system of the battery leak detection equipment of the present invention.

[0028] Figure 4 This is a structural schematic diagram of the helium purification system of the helium recovery, purification and mixing system of the battery leak detection equipment of the present invention. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0031] At the same time, the meaning of "and / or" or "and / or" appearing in the full text includes three options. Taking "A and / or B" as an example, it includes option A, or option B, or a option in which both A and B are satisfied.

[0032] In addition, in the present invention, descriptions such as "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0033] Example 1

[0034] like Figure 1 and Figure 4 As shown together, this embodiment provides a helium recovery, purification and gas mixing system for battery leak detection equipment, and the helium recovery, purification and gas mixing system for battery leak detection equipment includes a helium recovery system, a helium mixing system and a helium purification system;

[0035] The helium recovery system includes a battery leak detection helium recovery port, a helium recovery valve, a recovery pump, a recovery low-pressure tank, a No. 1 inlet and outlet valve, a recovery compressor, a No. 2 inlet and outlet valve, a recovery high-pressure tank, a No. 1 exhaust valve, a charging valve, a battery leak detection helium charging port, a No. 1 concentration detection valve, a No. 1 concentration meter and a No. 2 concentration detection valve.

[0036] The output end of the battery leak detection helium recovery port is connected to the input end of the helium recovery valve through a pipeline, the output end of the helium recovery valve is connected to the input end of the recovery pump through a pipeline, and the output end of the recovery pump is connected to the input end of the recovery low-pressure tank through a pipeline.

[0037] The output end of the recovery low-pressure tank is connected to the input end of the No. 1 inlet and outlet valve and the No. 1 concentration detection valve through a pipeline, the output end of the No. 1 inlet and outlet valve is connected to the inlet and outlet of the recovery compressor through a pipeline, the output end of the recovery compressor is connected to the input end of the No. 2 inlet and outlet valve through a pipeline, the output end of the No. 2 inlet and outlet valve is connected to the input end of the recovery high-pressure tank through a pipeline, the output end of the recovery high-pressure pipe is connected to the input end of the inflation valve and the No. 1 exhaust valve through a pipeline, the output end of the inflation valve is connected to the input end of the battery leak detection helium inflation port through a pipeline, the output end of the No. 1 concentration detection valve is connected to the input end of the No. 1 concentration meter through a pipeline, the output end of the No. 1 concentration meter is connected to the input end of the No. 2 concentration detection valve through a pipeline, and the output end of the No. 2 concentration detection valve is connected to the input end of the recovery high-pressure tank through a pipeline.

[0038] In this embodiment, when the battery detection has no concentration requirements, the recovery system can be operated independently; when the battery detection is completed, the helium recovery valve is opened, and the helium in the battery is recovered to the recovery low-pressure tank through the recovery pump. After the pressure in the recovery low-pressure tank rises to the set value, the recovery compressor and its No. 1 inlet and outlet valve and No. 2 inlet and outlet valve are opened, and the helium in the recovery low-pressure tank is pressurized into the recovery high-pressure tank, and then filled into the battery leak detection helium filling port through the No. 1 helium filling valve, thereby realizing the recycling function of helium; and the helium in the recovery high-pressure tank is detected in real time by the No. 1 concentration meter.

[0039] Example 2

[0040] The helium mixing system includes a No. 1 high-purity helium replenishing valve, a No. 2 high-purity helium replenishing valve, a No. 1 gas mass flow controller, a No. 2 gas mass flow controller, a No. 1 high-purity helium tank, a No. 2 high-purity helium tank, a No. 3 high-purity helium replenishing valve, a No. 3 gas mass flow controller and a pure gas tank.

[0041] The output end of the No. 1 high-purity helium tank is connected to the input end of the No. 1 gas mass flow controller through a pipeline, the output end of the No. 1 gas mass flow controller is connected to the input end of the No. 1 high-purity helium replenishing valve through a pipeline, the output end of the No. 2 high-purity helium tank is connected to the input end of the No. 2 gas mass flow controller through a pipeline, and the output end of the No. 2 gas mass flow controller is connected to the input end of the No. 2 high-purity helium replenishing valve through a pipeline.

[0042] The output end of the pure gas tank is connected to the input end of the No. 3 gas mass flow controller through a pipeline, the output end of the No. 3 gas mass flow controller is connected to the input end of the No. 3 high-purity helium replenishing valve through a pipeline, and the output ends of the No. 1 high-purity helium replenishing valve, the No. 2 high-purity helium replenishing valve and the No. 3 high-purity gas replenishing valve are all connected to the input end of the recovery low-pressure tank through a pipeline.

[0043] In this embodiment, when the battery detection has requirements for concentration, the recovery system operates as described above, and the gas mixing system needs to be turned on. When the helium concentration in the recovered high-pressure tank decreases, the No. 1 exhaust valve slowly discharges the helium, and the helium in the No. 1 high-purity helium pipe is filled into the recovery system with a certain amount of helium through the No. 1 high-purity helium replenishing valve and the No. 1 gas mass flow controller, or the helium in the No. 2 high-purity helium pipe is filled into the recovery system with a certain amount of helium through the No. 2 high-purity helium replenishing valve and the No. 2 gas mass flow controller, so as to realize dynamic adjustment, and complete the concentration stabilization through real-time detection of the No. 1 concentration meter.

[0044] Example 3

[0045] The helium purification system includes No. 1 purification intake valve, dirty gas tank, No. 2 purification intake valve, purification compressor, purification buffer tank, No. 2 purification intake valve, filter, No. 1 check valve, impure gas valve, No. 2 concentration meter, primary membrane separator, secondary membrane separator, needle valve, flow meter, No. 2 exhaust valve, No. 1 pure gas valve, No. 2 pure gas valve and No. 2 check valve.

[0046] The output end of the No. 1 purification intake valve is connected to the input end of the dirty gas tank through a pipeline, the output end of the dirty gas tank is connected to the input end of the No. 2 purification intake valve through a pipeline, the output end of the No. 2 purification intake valve is connected to the input end of the purification compressor through a pipeline, the output end of the purification compressor is connected to the input end of the purification storage tank through a pipeline, the output end of the purification storage tank is connected to the input end of the No. 2 purification intake valve through a pipeline, the output end of the No. 2 purification intake valve is connected to the input end of the filter through a pipeline, the output end of the filter is connected to the input end of the first-level membrane separator through a pipeline, the output end of the first-level membrane separator is connected to the input end of the second-level membrane separator and the No. 2 concentration meter through pipelines, the output end of the No. 2 concentration meter is connected to the input ends of the impure gas valve and the No. 1 pure gas valve through pipelines, the output end of the impure gas valve is connected to the input end of the No. 1 check valve through a pipeline, and the output end of the No. 1 check valve is connected to the input end of the dirty gas tank through a pipeline.

[0047] The output end of the secondary membrane separator is connected to the input end of the needle valve and the No. 2 pure gas valve through a pipeline, the output end of the needle valve is connected to the input end of the flow meter through a pipeline, and the output end of the flow meter is connected to the input end of the No. 2 exhaust valve through a pipeline.

[0048] The output end of the No. 1 pure gas valve is connected to the input end of the exhaust tank through a pipeline, the output end of the No. 2 pure gas valve is connected to the input end of the No. 2 check valve through a pipeline, the output end of the No. 2 check valve is connected to the input end of the dirty gas tank through a pipeline, and the input of the No. 1 purified air intake valve is connected to the output end of the recovery high-pressure tank through a pipeline.

[0049] In this embodiment, when it is necessary to recycle the helium discharged from the high-pressure tank for reuse, the purification system needs to be turned on; the waste gas is accumulated in the dirty gas tank, and when the internal pressure reaches the set value, the No. 2 purification intake valve and the purification compressor are turned on, and the dirty gas is pressurized to the purification buffer tank for secondary accumulation. When the internal pressure increases to a sufficient pressure, it is released, and the No. 2 purification intake valve and the filter are used for pre-treatment of water and oil removal, and then enter the primary membrane separator. The high-purity gas is detected by the No. 2 concentration meter. When its concentration reaches the requirement, it enters the pure gas tank through the No. 1 pure gas valve; when its concentration does not reach the requirement, it enters the dirty gas tank through the impure gas valve for circulation and purification. To prevent In order to prevent the dirty gas in the dirty gas tank from returning to the first-level membrane separator, a No. 1 one-way valve is specially set; the dirty gas from the first-level membrane separator enters the second-level membrane separator through the bottom for secondary purification, and the gas with increased concentration enters the dirty gas tank through the No. 2 purification valve for circulation purification to increase the recovery rate. In order to prevent the dirty gas in the dirty gas tank from returning to the No. 2 membrane separator, a No. 2 one-way valve is specially set; the dirty gas with lower concentration is finally discharged into the atmosphere through the No. 2 exhaust valve at the bottom of the second-level membrane separator, and the dirty gas discharge amount is controlled by the needle valve and flow meter to adjust the concentration of purified helium; when the pure gas in the pure gas tank accumulates to a certain pressure, it is used instead of the high-purity helium of the mixing system to achieve waste gas reuse and improve the recovery rate.

[0050] It should be understood that the purpose of these embodiments is only to illustrate the present invention and is not intended to limit the protection scope of the present invention. In addition, it should also be understood that after reading the technical content of the present invention, those skilled in the art can make various changes, modifications and / or variations to the present invention, and all of these equivalent forms also fall within the protection scope defined by the appended claims of this application.

Claims

1. A helium recovery, purification and gas mixing system for battery leak detection equipment, comprising a helium recovery, purification and gas mixing system, characterized in that: The helium recovery, purification and gas mixing system comprises a helium recovery system, a helium mixing system and a helium purification system; The helium recovery system comprises a battery leak detection helium recovery port, a helium recovery valve, a recovery pump, a recovery low-pressure tank, a No. 1 inlet and outlet valve, a recovery compressor, a No. 2 inlet and outlet valve, a recovery high-pressure tank, a No. 1 exhaust valve, a charging valve, a battery leak detection helium charging port, a No. 1 concentration detection valve, a No. 1 concentration meter and a No. 2 concentration detection valve.

2. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 1 is characterized in that: The output end of the battery leak detection helium recovery port is connected to the input end of the helium recovery valve through a pipeline, the output end of the helium recovery valve is connected to the input end of the recovery pump through a pipeline, and the output end of the recovery pump is connected to the input end of the recovery low-pressure tank through a pipeline.

3. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 1 is characterized in that: The output end of the recovery low-pressure tank is connected to the input end of the No. 1 inlet and outlet valve and the No. 1 concentration detection valve through a pipeline, the output end of the No. 1 inlet and outlet valve is connected to the inlet and outlet of the recovery compressor through a pipeline, the output end of the recovery compressor is connected to the input end of the No. 2 inlet and outlet valve through a pipeline, the output end of the No. 2 inlet and outlet valve is connected to the input end of the recovery high-pressure tank through a pipeline, the output end of the recovery high-pressure pipe is connected to the input end of the inflation valve and the No. 1 exhaust valve through a pipeline, the output end of the inflation valve is connected to the input end of the battery leak detection helium inflation port through a pipeline, the output end of the No. 1 concentration detection valve is connected to the input end of the No. 1 concentration meter through a pipeline, the output end of the No. 1 concentration meter is connected to the input end of the No. 2 concentration detection valve through a pipeline, and the output end of the No. 2 concentration detection valve is connected to the input end of the recovery high-pressure tank through a pipeline.

4. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 1 is characterized in that: The helium mixing system comprises a No. 1 high-purity helium replenishing valve, a No. 2 high-purity helium replenishing valve, a No. 1 gas mass flow controller, a No. 2 gas mass flow controller, a No. 1 high-purity helium tank, a No. 2 high-purity helium tank, a No. 3 high-purity helium replenishing valve, a No. 3 gas mass flow controller and a pure gas tank.

5. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 4 is characterized in that: The output end of the No. 1 high-purity helium tank is connected to the input end of the No. 1 gas mass flow controller through a pipeline, the output end of the No. 1 gas mass flow controller is connected to the input end of the No. 1 high-purity helium replenishing valve through a pipeline, the output end of the No. 2 high-purity helium tank is connected to the input end of the No. 2 gas mass flow controller through a pipeline, and the output end of the No. 2 gas mass flow controller is connected to the input end of the No. 2 high-purity helium replenishing valve through a pipeline.

6. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 4 is characterized in that: The output end of the pure gas tank is connected to the input end of the No. 3 gas mass flow controller through a pipeline, the output end of the No. 3 gas mass flow controller is connected to the input end of the No. 3 high-purity helium replenishing valve through a pipeline, and the output ends of the No. 1 high-purity helium replenishing valve, the No. 2 high-purity helium replenishing valve and the No. 3 high-purity gas replenishing valve are all connected to the input end of the recovery low-pressure tank through a pipeline.

7. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 1 is characterized in that: The helium purification system comprises a No. 1 purification air inlet valve, a dirty air tank, a No. 2 purification air inlet valve, a purification compressor, a purification buffer tank, a No. 2 purification air inlet valve, a filter, a No. 1 check valve, an impure air valve, a No. 2 concentration meter, a primary membrane separator, a secondary membrane separator, a needle valve, a flow meter, a No. 2 exhaust valve, a No. 1 pure air valve, a No. 2 pure air valve and a No. 2 check valve.

8. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 7, characterized in that: The output end of the No. 1 purification intake valve is connected to the input end of the dirty gas tank through a pipeline, the output end of the dirty gas tank is connected to the input end of the No. 2 purification intake valve through a pipeline, the output end of the No. 2 purification intake valve is connected to the input end of the purification compressor through a pipeline, the output end of the purification compressor is connected to the input end of the purification storage tank through a pipeline, the output end of the purification storage tank is connected to the input end of the No. 2 purification intake valve through a pipeline, the output end of the No. 2 purification intake valve is connected to the input end of the filter through a pipeline, the output end of the filter is connected to the input end of the first-level membrane separator through a pipeline, the output end of the first-level membrane separator is connected to the input end of the second membrane separator and the No. 2 concentration meter through pipelines, the output end of the No. 2 concentration meter is connected to the input ends of the impure gas valve and the No. 1 pure gas valve through pipelines, the output end of the impure gas valve is connected to the input end of the No. 1 check valve through a pipeline, and the output end of the No. 1 check valve is connected to the input end of the dirty gas tank through a pipeline.

9. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 7, characterized in that: The output end of the secondary membrane separator is connected to the input end of the needle valve and the second pure gas valve through a pipeline, the output end of the needle valve is connected to the input end of the flow meter through a pipeline, and the output end of the flow meter is connected to the input end of the second exhaust valve through a pipeline.

10. The helium recovery, purification and gas mixing system for battery leak detection equipment according to claim 7, characterized in that: The output end of the No. 1 pure gas valve is connected to the input end of the exhaust tank through a pipeline, the output end of the No. 2 pure gas valve is connected to the input end of the No. 2 one-way valve through a pipeline, the output end of the No. 2 one-way valve is connected to the input end of the dirty gas tank through a pipeline, and the input of the No. 1 purified air intake valve is connected to the output end of the recovery high-pressure tank through a pipeline.

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