A sheet gripper using a flexible hinge

Abstract

The application provides a wafer claw using a flexible hinge and relates to the technical field of a silicon wafer conveying device. The wafer claw comprises a driving assembly and a suction assembly. The driving assembly comprises a base and a driving piece. The driving piece is used for driving the suction assembly to lift and lower. The driving piece comprises a fixed part and a movable part. The fixed part is fixedly connected with the base. The movable part is fixedly connected with the suction assembly. The wafer claw further comprises a plurality of fixing seats. The fixing seats are uniformly arranged around the axis of the movable part. Flexible hinges are connected between each fixing seat and the movable part. The flexible hinge comprises at least one branch. The branch comprises at least one flexible piece. The flexible piece is arranged in the extending direction perpendicular to the lifting direction of the suction assembly. The wafer claw can realize the guiding effect of a linear bearing. No lubricant is used. The wafer claw can avoid the situation that the oil volatilization generates particle pollution to the environment and the silicon wafer in a high vacuum and ultrahigh vacuum environment. The wafer claw also has no gas leakage problem.

Description

Technical Field

[0001] This invention relates to the technical field of silicon wafer transport devices, and more particularly, to a wafer claw using a flexible hinge. Background Technology

[0002] In existing technologies, in the workpiece stage of a lithography machine, the wafer claws reciprocate along the axial direction to transport silicon wafers, and the motion is guided by ball linear bearings or air bearings. However, for the ultra-high vacuum environment of extreme ultraviolet lithography machines, the lubricant of mechanical bearings will evaporate and cause environmental pollution, and air bearings cannot meet the low leakage rate requirements under dynamic seals. Therefore, neither of the above two guiding schemes is suitable, and a wafer claw that can be used in high vacuum and ultra-high vacuum environments is needed. Summary of the Invention

[0003] The purpose of this invention is to provide a claw using a flexible hinge to solve the technical problem that claws in the prior art are not suitable for high vacuum and ultra-high vacuum environments.

[0004] The present invention provides a claw using a flexible hinge, comprising a driving assembly and an adsorption assembly. The driving assembly includes a base and a driving member, which drives the adsorption assembly to move up and down. The driving member includes a fixed part and a movable part, the fixed part being fixedly connected to the base and the movable part being fixedly connected to the adsorption assembly. The claw also includes a plurality of fixed seats, which are evenly arranged around the axis of the movable part, and each fixed seat is connected to the movable part by the flexible hinge. The flexible hinge includes at least one branch, and the branch includes at least one flexible sheet, which extends perpendicular to the lifting direction of the adsorption assembly.

[0005] Furthermore, the flexible hinge includes two branches, namely an upper branch and a lower branch, which are spaced apart along the lifting direction.

[0006] Furthermore, each of the branches includes three flexible sheets connected in series, and the three flexible sheets are arranged in parallel and spaced apart along the lifting direction.

[0007] Furthermore, along the lifting direction, in the upper branch chain, the uppermost flexible piece is fixedly connected to the fixed seat, and the lowermost flexible piece is connected to the movable part; the lower branch chain is symmetrically arranged with the upper branch chain.

[0008] Furthermore, along the lifting direction, a connecting plate is vertically fixed between the lowermost flexible sheet of the upper branch and the uppermost flexible sheet of the lower branch, and the connecting plate is located at the end of the two flexible sheets away from the movable part.

[0009] Further, the flexible sheet is provided with a weight-reducing structure, which includes through holes and / or notches.

[0010] Further, the driving assembly further includes a driving frame, which is fixedly connected with the movable part, and the flexible hinge is fixedly connected with one end of the driving frame away from the fixed seat.

[0011] Further, the driving frame is a hollow structure and has a downward opening, and the driving frame is arranged outside the base.

[0012] Further, the adsorption assembly includes a support arm and an electrostatic chuck, the support arm is fixedly arranged on the driving frame, and the electrostatic chuck is arranged at the top end of the support arm.

[0013] Further, the support arm includes a support horizontal arm and a support vertical arm, the support horizontal arm is fixedly connected with the driving frame and is arranged to extend radially outward, and the support vertical arm is fixedly arranged on one end of the support horizontal arm away from the driving frame and is arranged to extend upward.

[0014] Further, along the lifting direction, the support horizontal arm is arranged to be spaced apart from the branch of the flexible hinge and has a first clearance, and each of the flexible sheets is provided with an avoiding hole, the support vertical arm is inserted into the avoiding hole of the branch above it, and the support vertical arm and the hole wall of the avoiding hole have a second clearance.

[0015] Further, the support horizontal arm and the support vertical arm are both hollow structures, the support horizontal arm has a first channel, the support vertical arm has a second channel, and the second channel communicates with the first channel.

[0016] Further, the base is provided with an upwardly open upper accommodating cavity; the driving member is a voice coil motor, which includes a first coil and a magnetic steel; the first coil is arranged in the upper accommodating cavity to form the fixed part; and the magnetic steel and its mounting frame form the movable part.

[0017] Further, the base is further provided with a lower accommodating cavity, which is located below the upper accommodating cavity along the lifting direction; and the driving assembly further includes a second coil and an electromagnet, which are both arranged in the lower accommodating cavity and cooperate with each other.

[0018] Further, a temperature sensor is attached to the surface of the first coil to monitor the temperature of the first coil.

[0019] Further, the base is provided with a cooling water channel, which is arranged around the first coil to cool the first coil.

[0020] Further, the piece claw is provided with a displacement sensor for detecting the lifting displacement of the movable part.

[0021] Further, the piece claw further comprises a limiting component, the limiting component comprises a baffle and a limiting sensor, the baffle is fixedly arranged on the base, the limiting sensor is mounted on the driving frame, and the limiting sensor cooperates with the baffle for monitoring the position of the movable part.

[0022] The piece claw using flexible hinges provided by the present application can produce the following beneficial effects:

[0023] The piece claw using flexible hinges provided by the present application has the following advantages: the positions of the base and the fixed seat are relatively fixed, for example, both of them can be fixedly arranged on a piece supporting table or the like; the movable part of the driving member drives the adsorption component to lift along the axial direction, at the same time, the flexible piece bends upward or downward, and the flexible hinges are uniformly arranged around the movable part of the driving member, so that the constraint force applied by the flexible hinges in each direction of the movable part is consistent, thereby ensuring the stability and repeatability of the movable part during multiple reciprocating movements along the axial direction, and realizing the guiding effect of the linear bearing. Compared with the linear bearing lubricated by grease or the like, the piece claw provided by the present application can realize the guiding effect of the linear bearing without using lubricant, which can avoid the situation that grease volatilization generates particle pollution to the environment and the silicon wafer in a high vacuum and ultrahigh vacuum environment, and also avoids the problem of gas leakage, and is very suitable for the environment of high vacuum and ultrahigh vacuum.

[0024] In addition, compared with the linear bearing, the flexibility of the flexible hinge is relatively large, so the motion accuracy and resolution are relatively high; and the multiple flexible hinges are connected in parallel in a star shape, so that the overall rigidity is relatively high, thereby the carrying capacity is strong, and the dynamic characteristics are improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the provided drawings.

[0026] Figure 1 is a three-dimensional structure schematic view of the piece claw provided by the present application;

[0027] Figure 2 is a top view structure schematic view of the piece claw provided by the present application;

[0028] Figure 3 is Figure 2 the A-A sectional view in the

[0029] Figure 4 As Figure 3 An enlarged schematic view at A in Fig. 1;

[0030] Figure 5 A schematic view of the three-dimensional structure of the sheet claw provided by the present application;

[0031] Figure 6 A schematic view of the cooling water channel in the base of the sheet claw provided by the present application.

[0032] Explanation of reference numerals:

[0033] 110 - base; 111 - upper accommodating cavity; 113 - cooling water channel; 120 - driving frame; 130 - first coil; 140 - magnetic steel; 150 - second coil; 160 - electromagnet;

[0034] 200 - fixing seat; 210 - supporting lug;

[0035] 310 - upper supporting chain; 311 - flexible sheet; 312 - through hole; 313 - notch; 314 - avoiding hole; 320 - lower supporting chain; 330 - connecting plate;

[0036] 410 - supporting horizontal arm; 411 - first channel; 420 - supporting vertical arm; 421 - second channel; 430 - electrostatic chuck;

[0037] 511 - scale grating; 512 - reading head; 521 - baffle; 522 - limit sensor. DETAILED DESCRIPTION

[0038] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0039] The present embodiment provides a sheet claw using a flexible hinge, as shown in Figure 1 and Figure 2 The sheet claw includes a driving assembly and an adsorption assembly, the driving assembly includes a base 110 and a driving member, the driving member is used to drive the adsorption assembly to lift and lower, the driving member includes a fixed part and a movable part, the fixed part is fixedly connected with the base 110, and the movable part is fixedly connected with the adsorption assembly; the sheet claw further includes a plurality of fixing seats 200, the plurality of fixing seats 200 are uniformly arranged around the axis of the movable part, and each fixing seat 200 is connected with the movable part through a flexible hinge; the flexible hinge includes at least one supporting chain, the supporting chain includes at least one flexible sheet 311, and the flexible sheet 311 is arranged perpendicularly to the lifting direction of the adsorption assembly, i.e. the axial direction of the sheet claw.

[0040] The flexible hinge provided by the embodiment is used in the wafer claw, and positions of the base 110 and the fixing seat 200 are relatively fixed, for example, the base 110 and the fixing seat 200 can be fixedly arranged on a wafer supporting table or the like; the movable part of the driving member drives the adsorption assembly to move up and down along the axial direction, and the flexible sheet 311 bends upward or downward, and the plurality of flexible hinges are uniformly arranged around the movable part of the driving member, so that the constraint force applied by the flexible hinges to the movable part in each direction is consistent, thereby ensuring the stability and repeatability of the movable part during the axial reciprocating motion, and the guiding effect of the linear bearing is achieved. Compared with the linear bearing lubricated by grease or the like, the wafer claw provided by the embodiment can achieve the guiding effect of the linear bearing, and does not use lubricant, can avoid the situation that grease volatilization generates particle pollution and silicon wafer in a high vacuum and ultrahigh vacuum environment, and does not have the problem of gas leakage, and is very suitable for the environment of high vacuum and ultrahigh vacuum.

[0041] In addition, compared with the linear bearing, the flexibility of the flexible hinge is relatively large, so the motion accuracy and resolution are relatively high; and the plurality of flexible hinges are connected in parallel in a star shape, so that the overall rigidity is relatively high, thereby the carrying capacity is strong, and the dynamic characteristics are improved.

[0042] Specifically, as shown in Figure 1 and Figure 2 , the number of the fixing seat 200 is three, and the number of the flexible hinge is also three, and the three flexible hinges are uniformly arranged around the driving assembly in the circumferential direction. Of course, in other embodiments of the present application, the number of the flexible hinge is not limited to three, for example, the number of the flexible hinge can also be four or five, and the like, which can be set according to specific needs.

[0043] Specifically, as shown in Figure 1 and Figure 3 and Figure 5 , each flexible hinge includes two branches, namely an upper branch 310 and a lower branch 320, which are arranged in the lifting direction. In this arrangement, the two branches respectively constrain the upper part and the lower part of the driving assembly in the axial direction, so that the adsorption assembly can move more stably during lifting. Of course, in other embodiments of the present application, the number of branches included in each flexible hinge is not limited to two, for example, each flexible hinge can include only one branch, or each flexible hinge can include three or four branches, and the like.

[0044] Specifically, in the embodiment, each branch includes a plurality of flexible sheets 311 connected in series, and the plurality of flexible sheets 311 are arranged in parallel and spaced apart in the lifting direction. The plurality of flexible sheets 311 are connected in series in the radial direction, so that the flexibility of the branch is increased, and the axial deformation stroke is greatly increased; and the upper and lower layers are arranged in a stacked manner, so that the structure of the branch is compact, thereby occupying a small space.

[0045] More specifically, as shown in Figure 1 and Figure 3 and Figure 5 In the embodiment, each branch chain includes three flexible pieces 311 in series. In this way, the deformation stroke of each branch chain is approximately three times that of a flexible piece 311, and the deformation stroke of the branch chain is appropriate. Of course, in other embodiments of the present application, the number of flexible pieces 311 included in each hinge is not limited to three. For example, each branch chain can also include only one flexible piece 311, or two or four flexible pieces 311, etc., which can be set according to specific needs.

[0046] Specifically, in the embodiment, as shown in Figure 3 in combination with Figure 1 and Figure 5 , in the upward and downward direction, the uppermost flexible piece in the upper branch chain 310 is fixedly connected to the fixed seat 200, and the lowermost flexible piece is connected to the movable part; the lower branch chain 320 is symmetrically arranged with the upper branch chain 310. In this way, the constraint effect of the flexible hinge on the driving assembly when it is bent upward and downward is more similar, so that when the driving assembly drives the adsorption assembly to rise and fall, the movement of the driving assembly and the adsorption assembly will be more stable. Of course, in other embodiments of the present application, the uppermost flexible piece in the upper branch chain 310 can also be connected to the movable part, and correspondingly, the lowermost flexible piece is fixedly connected to the fixed seat 200.

[0047] Specifically, in the embodiment, as shown in Figure 1 and Figure 3 and Figure 5 In the upward and downward direction, the lowermost flexible piece of the upper branch chain 310 and the uppermost flexible piece of the lower branch chain 320 are vertically fixedly connected to the connecting plate 330, and the connecting plate 330 is located at the end of the two flexible pieces away from the movable part of the base 110. The connecting plate 330 is arranged to limit the end of the flexible piece 311 away from the movable part of the base 110 and close to the fixed seat 200, thereby ensuring the deformation trajectory of the flexible hinge and increasing its rigidity in the horizontal direction.

[0048] Specifically, in the embodiment, as shown in Figure 1 The flexible piece 311 is provided with a weight-reducing structure, which includes a through hole 312 and a notch 313. The arrangement of the through hole 312 and the notch 313 and other weight-reducing structures not only reduces the weight of the flexible piece 311, but also improves the flexibility of the flexible piece 311. It should be noted that in other embodiments of the present application, the flexible piece 311 can only be provided with a through hole 312 or only a notch 313.

[0049] More specifically, in the embodiment, the flexible sheet 311 is symmetrically structured, two through holes 312 are symmetrically arranged at the two ends in the length direction, and two notches 313 are symmetrically arranged at the two sides in the width direction. In this way, the flexible sheet 311 is symmetric in both the length direction and the width direction, and is more balanced when deformed, and the external force applied is also more balanced, which is conducive to ensuring the stable lifting of the driving assembly and the like.

[0050] Specifically, in the embodiment, as shown in Figure 3 , and with reference to Figure 1 and Figure 5 , the driving assembly further comprises a driving frame 120, the driving frame 120 is fixedly connected with the movable part, and the end of the flexible hinge away from the fixed base 200 is fixedly connected with the driving frame 120. In this arrangement, the driving frame 120 serves to connect the movable part of the driving member with the adsorption assembly and connect the movable part of the driving member with the flexible hinge.

[0051] More specifically, in the embodiment, as shown in Figure 3 , the driving frame 120 is a hollow structure with a downward opening, and the driving frame 120 is covered outside the base 110. In this way, the driving frame 120 provides a large enough outer wall, making it more convenient to arrange the adsorption assembly and the flexible hinge; moreover, the driving frame 120 also serves to protect the base 110 and the driving member and the like.

[0052] Specifically, in the embodiment, as shown in Figure 1 , the adsorption assembly comprises a support arm and an electrostatic chuck 430, the support arm is fixedly arranged on the driving frame 120, and the electrostatic chuck 430 is arranged at the top end of the support arm. More specifically, the electrostatic chuck 430 can be a micro electrostatic chuck. In a high vacuum and ultra-high vacuum environment, vacuum adsorption cannot achieve the adsorption and fixation of the silicon wafer, but the electrostatic chuck 430 can still adsorb and fix the silicon wafer, thereby meeting the use requirements in a high vacuum and ultra-high vacuum environment.

[0053] Specifically, in the embodiment, a rubber pad can be arranged between the electrostatic chuck 430 and the top end of the support arm. In this way, by using the flexibility of the rubber pad, the adaptability of the electrostatic chuck 430 to the surface of the silicon wafer can be improved, so that the silicon wafer can be better adsorbed and fixed.

[0054] Specifically, in the embodiment, as shown in Figure 1 and Figure 2As shown, the number of adsorption assemblies is three groups, and the three groups of adsorption assemblies are evenly arranged circumferentially. In this way, the number of adsorption assemblies is consistent with the number of flexible hinges, three silicon wafers can be adsorbed at the same time, and the stress of the wafer claws is balanced during the operation. However, in other embodiments of the present application, the number of adsorption assemblies is not limited to this, for example: the number of adsorption assemblies can also be six groups, and the six groups of adsorption assemblies are evenly arranged circumferentially. Of course, the number of adsorption assemblies can also be one group, two groups, or four groups, five groups, etc., which can be set according to specific needs.

[0055] Specifically, in the present embodiment, as shown in Figure 1 , the support arm includes a support horizontal arm 410 and a support vertical arm 420, the support horizontal arm 410 is fixedly connected to the driving frame 120 and is arranged to extend radially outward, and the support vertical arm 420 is fixedly arranged at one end of the support horizontal arm 410 away from the driving frame 120 and is arranged to extend upward.

[0056] Specifically, in the present embodiment, as shown in Figure 1 and Figures 3 to 5 , along the lifting direction, the support horizontal arm 410 is arranged to be spaced apart from the branch of the flexible hinge and has a first avoiding gap; each flexible sheet 311 is provided with an avoiding hole 314, the support vertical arm 420 is inserted into the avoiding hole 314 of the branch above it, and the support vertical arm 420 and the hole wall of the avoiding hole 314 have a second avoiding gap. In this arrangement, the first avoiding gap is used to allow the support horizontal arm 410 and the branch to interfere during lifting, and the second avoiding gap is used to allow the support vertical arm 420 and the flexible sheet 311 to interfere during lifting. In addition, the avoiding hole 314 not only plays a role in avoiding the support vertical arm 420, but also is a weight reduction structure, which plays a role in reducing the weight of the flexible sheet 311 and improving the flexibility of the flexible sheet 311.

[0057] Specifically, in the present embodiment, as shown in Figure 3 , the support horizontal arm 410 and the support vertical arm 420 are both hollow structures, the support horizontal arm 410 has a first channel 411, the support vertical arm 420 has a second channel 421, and the second channel 421 communicates with the first channel 411. In this way, the weight of the support arm is greatly reduced, and the first channel 411 and the second channel 421 can also be used to arrange cables and the like.

[0058] Specifically, in the present embodiment, as shown in Figure 3 , and in combination with Figure 1 and Figure 5 , the fixed seat 200 is also a hollow structure and is open to both sides along the width direction. In this way, the weight of the fixed seat 200 is greatly reduced, while the rigidity of the fixed seat 200 along the axial and width directions is ensured, and the flexible hinge is also facilitated to be arranged.

[0059] Specifically, in the present embodiment, as shown inFigure 1 , Figure 3 and Figure 5 As shown, the fixing base 200 is provided with lugs 210 on both sides along the width direction. The lugs 210 are provided with fixing holes. The fixing member passes through the fixing holes to fix the fixing base 200 to the support plate platform or other places.

[0060] Specifically, in this embodiment, as Figure 3 As shown, the base 110 has an upward-opening upper receiving cavity 111; the driving component is a voice coil motor, which includes a first coil 130 and a magnet 140; the first coil 130 is disposed within the upper receiving cavity 111, forming a fixed part; the magnet 140 and its mounting bracket form a movable part. In this configuration, the base 110 forms the housing of the voice coil motor. By changing the magnitude of the current in the first coil 130, axial thrust and pull can be generated, thereby realizing the lifting and lowering of the magnet 140, its mounting bracket, the driving frame 120, and the adsorption assembly.

[0061] Specifically, in this embodiment, the following continues... Figure 3 As shown, the base 110 also has a lower receiving cavity, which is located below the upper receiving cavity 111 along the lifting direction. The drive assembly also includes a second coil 150 and an electromagnet 160, both of which are disposed in the lower receiving cavity and cooperate with each other. In this configuration, the second coil 150 and the electromagnet 160 can be used to fix the initial position of the magnet 140 and the adsorption assembly. That is, when the claw is in a non-pushing state, the second coil 150 and the electromagnet 160 can replace the voice coil motor, using a small current to generate magnetic attraction, maintaining the position of the magnet 140 without generating a large amount of heat.

[0062] Specifically, in this embodiment, a temperature sensor (not shown in the figure) is attached to the surface of the first coil 130 to monitor the temperature of the first coil 130. More specifically, the temperature sensor can be a surface-mount NTC (Negative Temperature Coefficient) thermistor or a PTC (Positive Temperature Coefficient) thermistor.

[0063] Specifically, in this embodiment, as Figure 3 and Figure 6 As shown, the base 110 is provided with cooling water channels 113, which are arranged around the first coil 130 for cooling the first coil 130. This arrangement allows the first coil 130 to be cooled down in time by the cooling medium, thereby avoiding excessive temperature rise of the first coil 130 due to insufficient heat dissipation, which would affect the control of axial force.

[0064] Specifically, in the embodiment, the bottom of the base 110 is provided with a water inlet interface, a water outlet interface, and an electrical interface, etc., so as to be connected with the corresponding structures on the wafer support table.

[0065] Specifically, in the embodiment, the wafer claw is provided with a displacement sensor for detecting the lifting displacement of the movable part. By monitoring the lifting displacement of the driving frame 120, the real-time lifting speed, acceleration, etc. of the driving frame 120 can be obtained, so as to facilitate more accurate control of the lifting of the adsorption assembly.

[0066] More specifically, in the embodiment, as shown in Figure 3 the displacement sensor is a grating ruler, the scale grating 511 of the grating ruler is attached to the outer side wall of the base 110, and the reading head 512 of the grating ruler is arranged on the inner side wall of the driving frame 120, and the reading head 512 is arranged opposite to the scale grating 511. Of course, in other embodiments of the present application, the displacement sensor is not limited to the grating ruler, but can also be other types of displacement sensors, as long as it can monitor the lifting displacement of the adsorption assembly.

[0067] Specifically, in the embodiment, the wafer claw further comprises a limiting assembly, the limiting assembly comprises a baffle 521 and a limiting sensor 522, the baffle 521 is fixedly arranged on the base 110, and the limiting sensor 522 is installed on the driving frame 120. The limiting sensor 522 cooperates with the baffle 521 to monitor the position of the movable part. In this arrangement, when the driving frame 120 moves to a set position, the limiting sensor 522 can detect its position to stop moving in this direction or stop moving, etc. More specifically, in the embodiment, the limiting sensor 522 can be a photoelectric switch or a Hall sensor, etc. The use of photoelectric switches and Hall sensors in position monitoring is a very mature existing technology, so it will not be described here.

[0068] In summary, the wafer claw using a flexible hinge provided in the embodiment realizes the guiding effect of a linear bearing by using a star-shaped parallel flexible hinge, and there is no friction during movement, no additional heat is generated, the problem of the vacuum guide rail is solved; the use of a micro electrostatic chuck realizes the adsorption of the silicon wafer, which can ensure the firmness of the clamping of the silicon wafer during the wafer loading and unloading process, and the problem of vacuum adsorption is solved; no lubricant is used, which does not affect the surrounding environment, and can meet the use requirements in high vacuum and ultra-high vacuum environments.

[0069] Finally, it should be noted that, in the present document, relational terms such as "first" and "second", and the like can be used solely to distinguish one entity or action from another entity or action, without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0070] The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A pawl using a flexible hinge, characterized in that, The claw includes a driving component and an adsorption component. The driving component includes a base (110) and a driving member. The driving member is used to drive the adsorption component to rise and fall. The driving member includes a fixed part and a movable part. The fixed part is fixedly connected to the base (110), and the movable part is fixedly connected to the adsorption component. The claw also includes a plurality of fixed seats (200), which are evenly arranged around the axis of the movable part, and each fixed seat (200) is connected to the movable part by the flexible hinge; the flexible hinge includes at least one branch, the branch includes at least one flexible sheet (311), and the flexible sheet (311) extends perpendicular to the lifting direction of the adsorption assembly. The drive assembly also includes a drive frame (120), which is fixedly connected to the movable part; The adsorption assembly includes a support arm and an electrostatic chuck (430), and the support arm is fixedly mounted on the drive frame (120). The support arm includes a support cross arm (410) and a support vertical arm (420). The support cross arm (410) is fixedly connected to the drive frame (120) and extends outward in a radial direction. The support vertical arm (420) is fixedly disposed at the end of the support cross arm (410) away from the drive frame (120) and extends upward. In use, the base (110) and the fixed seat (200) are in a fixed relative position.

2. The claw according to claim 1, characterized in that, The flexible hinge includes two branches, namely an upper branch (310) and a lower branch (320), which are spaced apart along the lifting direction.

3. The claw according to claim 2, characterized in that, Each of the branches includes three flexible sheets (311) connected in series, and the three flexible sheets (311) are arranged in parallel and spaced apart along the lifting direction.

4. The claw according to claim 3, characterized in that, Along the lifting direction, in the upper branch (310), the uppermost flexible piece is fixedly connected to the fixed seat (200), and the lowermost flexible piece is connected to the movable part; the lower branch (320) is symmetrically arranged with the upper branch (310).

5. The claw according to claim 4, characterized in that, Along the lifting direction, a connecting plate (330) is vertically fixed between the lowermost flexible sheet of the upper branch (310) and the uppermost flexible sheet of the lower branch (320), and the connecting plate (330) is located at the end of the two flexible sheets away from the movable part.

6. The claw according to claim 1, characterized in that, The flexible sheets (311) are all provided with weight reduction structures, which include through holes (312) and / or notches (313).

7. The claw according to any one of claims 1-6, characterized in that, The end of the flexible hinge away from the fixed base (200) is fixedly connected to the drive frame (120).

8. The blade claw according to claim 7, characterized in that, The drive frame (120) is a hollow structure with a downward opening, and the drive frame (120) is covered outside the base (110).

9. The claw according to claim 7, characterized in that, The electrostatic chuck (430) is located at the top of the support arm.

10. The claw according to claim 1, characterized in that, Along the lifting direction, the supporting cross arm (410) and the branch of the flexible hinge are spaced apart and have a first clearance gap; each of the flexible sheets (311) is provided with a clearance hole (314), the supporting upright arm (420) is inserted into the clearance hole (314) of the branch located above it, and there is a second clearance gap between the supporting upright arm (420) and the hole wall of the clearance hole (314).

11. The claw according to claim 1, characterized in that, Both the supporting horizontal arm (410) and the supporting vertical arm (420) are hollow structures. The supporting horizontal arm (410) has a first channel (411), and the supporting vertical arm (420) has a second channel (421), and the second channel (421) is connected to the first channel (411).

12. The claw according to any one of claims 1-6, characterized in that, The base (110) is provided with an upper receiving cavity (111) that opens upwards; the driving component is a voice coil motor, which includes a first coil (130) and a magnet (140); the first coil (130) is disposed in the upper receiving cavity (111) to form the fixed part; the magnet (140) and its mounting bracket form the movable part.

13. The claw according to claim 12, characterized in that, The base (110) is also provided with a lower receiving cavity, which is located below the upper receiving cavity (111) along the lifting direction; the driving assembly also includes a second coil (150) and an electromagnet (160), both of which are disposed in the lower receiving cavity and cooperate with each other.

14. The blade claw according to claim 12, characterized in that, A temperature sensor is attached to the surface of the first coil (130) to monitor the temperature of the first coil (130).

15. The claw according to claim 14, characterized in that, The base (110) is provided with a cooling water channel (113), which is arranged around the first coil (130) for cooling the first coil (130).

16. The claw according to claim 7, characterized in that, The claw is equipped with a displacement sensor for detecting the vertical displacement of the movable part.

17. The claw according to claim 7, characterized in that, The claw also includes a limiting component, which includes a baffle (521) and a limiting sensor (522). The baffle (521) is fixedly disposed on the base (110), and the limiting sensor (522) is installed on the drive frame (120). The limiting sensor (522) cooperates with the baffle (521) to monitor the position of the movable part.

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