A die bonding device for electronic component production

Abstract

A die bonding device for electronic component production disclosed by the present invention belongs to the technical field of electronic component production, and includes a bottom plate. A clamping and fixing assembly and a driving assembly are installed on the bottom plate. One end of the driving assembly is arranged at the lower end of the clamping and fixing assembly and is movably connected to the bottom wall of the clamping and fixing assembly. A regulation assembly is installed on the driving assembly, and the regulation assembly is connected to the clamping and fixing assembly in a penetrating manner; the inclined surfaces of the first plug and the second plug are gradually inserted into the slot holes between the partition plates in turn, which can push the partition plate to rotate clockwise to realize the adjustment of the wafer position; when the clamping plate on the first clamping member receives a thrust, it can drive the gear to rotate through the gear condition, and then drive the movement of another set of gear conditions, which is convenient for fixing the wafer placed on the adjustment disk; gas enters the upper fixing bladder and the lower fixing bladder, and both the upper fixing bladder and the lower fixing bladder bulge to fix the gear, thereby realizing the fixing of the wafer.

Description

Technical Field

[0001] The present invention belongs to the technical field of electronic component production, and particularly relates to a die bonding device for electronic component production. Background Art

[0002] Die bonding means bonding a wafer to a designated area of a bracket through a colloid (generally a conductive adhesive or an insulating adhesive for LEDs), forming a thermal path or an electrical path, and providing conditions for subsequent wire bonding. A die bonder, also known as a wafer loader, a wafer bonding machine, or a chip bonder, is a mechanical device specifically used in the semiconductor packaging process to fix a chip on an appropriate carrier for subsequent packaging processes such as packaging, testing, and assembly.

[0003] During the operation of the die bonder, the wafer is usually supported by a wafer supply platform, and then the die bonding nozzle sucks the chip on the wafer, and firmly connects the solder joint between the chip and the packaging substrate to achieve die bonding. During the process of the die bonding nozzle sucking the chip, a wafer driving device is usually required to drive the wafer supply platform to rotate to cooperate with the die bonding nozzle to make the sucking of the chip more convenient. During the chip transfer process, it is necessary to ensure the fixation of the wafer tray to facilitate adsorption and prevent the position from shifting. However, most of the existing wafer driving devices have poor motion stability during use, seriously affecting the crystal sucking accuracy and efficiency. Moreover, the existing clamping devices for fixing the wafer tray usually clamp the wafer tray on both sides, but there are still the following defects: pressing and clamping the side wall of the wafer tray has a poor clamping effect and is prone to causing the wafer tray to deflect. Summary of the Invention

[0004] In view of the above situation, to overcome the defects of the prior art, the present invention provides a die bonding device for electronic component production, which at least partially solves the above technical problems.

[0005] The technical solution adopted by the present invention is as follows: A die bonding device for electronic component production includes a bottom plate for support and fixation. A clamping and fixation assembly and a driving assembly are installed on the bottom plate. One end of the driving assembly is arranged at the lower end of the clamping and fixation assembly and is movably connected to the bottom wall of the clamping and fixation assembly. A regulation assembly is installed on the driving assembly, and the regulation assembly is connected to the clamping and fixation assembly in a penetrating manner.

[0006] The driving assembly includes a limiting member, which is provided on the upper wall of the bottom plate. One end of the limiting member is provided at the lower end of the clamping and fixing assembly. A limiting groove is provided in the limiting member, and a slider is movably clamped in the limiting groove. The regulating assembly is provided on the slider. The driving assembly further includes a support seat, which is provided on the upper wall of the bottom plate and is connected to the end of the limiting member away from the clamping and fixing assembly. A baffle is installed on the side of the slider close to the support seat, and a spring is installed between the baffle and the support seat. On the upper wall of the side of the slider away from the support seat, a plug-in one and a plug-in two are installed. The plug-in one is placed close to the support seat, and the plug-in two is placed away from the support seat. The plug-in one and the plug-in two are placed in a staggered manner. One end of the plug-in one close to the plug-in two is inclined, and one end of the plug-in two close to the plug-in one is inclined. A placement groove is provided between the plug-in one and the plug-in two, and balls are provided on the inclined surfaces of the plug-in one and the plug-in two.

[0007] Among them, an air vent cavity one is provided in the plug-in one, an air vent hole one is provided on the side wall of the plug-in one, a fixed bladder is installed outside the plug-in one, the air vent hole one is provided in the fixed bladder, and the air vent cavity one is connected to the air vent hole one in a through manner. The gas in the air vent cavity one enters the fixed bladder through the air vent hole one.

[0008] Preferably, the clamping and fixing assembly includes a clamping member one, an adjustment disk, and a clamping member two. The adjustment disk is movably provided on the bottom plate, and the bottom plate supports and fixes the adjustment disk. Both the clamping member one and the clamping member two are movably clamped in the adjustment disk and are placed in central symmetry.

[0009] Among them, a mounting seat is provided at the center of the bottom wall of the adjustment disk, and the mounting seat is movably installed on the upper wall of the bottom plate. A cavity is provided in the adjustment disk, and both ends of the cavity penetrate through the side wall of the adjustment disk. Both the clamping member one and the clamping member two are movably clamped in the cavity. A gear is movably installed in the middle of the cavity, and the gear is provided directly above the mounting seat. An annular upper fixed bladder is provided on the upper wall of the gear, and an annular lower fixed bladder is provided on the bottom wall of the gear. An air vent cavity two is provided in the gear, and multiple groups of air vent holes two for gas circulation are provided on both the upper wall and the bottom wall of the air vent cavity two. The air vent holes two on the upper wall of the air vent cavity two are connected to the upper fixed bladder in a through manner, and the air vent holes two on the bottom wall of the air vent cavity two are connected to the lower fixed bladder in a through manner. A ventilation pipe three for gas circulation is provided at the center of the mounting seat, and the upper end of the ventilation pipe three penetrates through the center of the gear and is connected to the air vent cavity two in a through manner.

[0010] Among them, multiple groups of partitions for dividing the space are evenly installed at equal intervals in the circumferential direction on the bottom wall of the adjustment disk. A slot hole is provided between two adjacent groups of partitions. The plug-in one is provided outside the partition, and the plug-in two is provided inside the partition. The spacing width between the placement grooves is greater than the width of the partition.

[0011] Further, the first clamping member and the second clamping member have the same structure. Only one group of them will be introduced here. The first clamping member includes a clamping plate and a tooth condition member. One end of the tooth condition member is movably clamped in the cavity, and the other end of the tooth condition member extends out of the cavity. The tooth condition members on the first clamping member and the second clamping member are both meshed with the gear, and the tooth condition members on the first clamping member and the second clamping member are placed centrosymmetrically. The clamping plate is connected to one end of the tooth condition member extending out of the cavity.

[0012] Among them, the regulation assembly includes a connecting plate and a sliding plate. The connecting plate is arranged on the upper wall of the slider, and the slider supports and fixes the connecting plate. The sliding plate is movably clamped on the upper wall of the slider. An elastic bladder is installed between the connecting plate and the sliding plate, and the connecting plate, the sliding plate and the elastic bladder are hermetically connected. A first magnetic member is arranged on the side wall of the sliding plate.

[0013] As a preference of the present invention, a first ventilation pipe is installed on the side wall of the connecting plate. The first ventilation pipe is connected to the elastic bladder and the first ventilation cavity. A control valve is arranged in the first ventilation pipe to facilitate the control of gas flow. A second ventilation pipe is arranged in the bottom plate, and a connecting pipe is installed on the bottom plate. One end of the connecting pipe penetrates through the connecting plate and is connected to the elastic bladder in a through manner, and the other end of the connecting pipe is connected to the second ventilation pipe in a through manner. The connecting pipe is made of a foldable material. The second ventilation pipe is connected to the third ventilation pipe in a through manner. A control valve is arranged in the connecting pipe to facilitate the control of gas flow.

[0014] Further, a hydraulic rod is installed on the support seat. A first pushing plate and a second pushing plate are installed at the movable end of the hydraulic rod. The second pushing plate is arranged at the end of the hydraulic rod and is close to the first clamping member. The first pushing plate is arranged between the baffle and the sliding plate. A second magnetic member is arranged on one side wall of the first pushing plate. The first magnetic member and the second magnetic member have different magnetic polarities.

[0015] Further, a third ventilation hole is installed on the side wall of the sliding plate, and a control valve is installed in the third ventilation hole to facilitate the control of the gas flow in the elastic bladder.

[0016] After adopting the above structure, the beneficial effects of the present invention are as follows:

[0017] (1) The inclined surfaces of the first plug and the second plug gradually insert into the slot holes between the partition plates in turn. As the plug continues to move, the inclined surface pushes the partition plate to rotate clockwise, and the partition plate drives the adjustment disk to rotate clockwise to realize the adjustment of the wafer position.

[0018] (2) The sliding plate moves along the slider to squeeze the elastic bladder. The gas in the elastic bladder enters the fixed bladder through the first ventilation pipe, the first ventilation cavity and the first ventilation hole. The fixed bladder bulges and fits against the side wall of the partition plate to facilitate the fixation of the first plug, thereby realizing the fixation of the adjustment disk.

[0019] When the clamping plate on the first clamping member is subjected to a thrust force, it drives the tooth condition to move towards the adjusting disc. The tooth condition on the first clamping member drives the gear to rotate, and the gear drives the movement of another set of tooth conditions, and then drives the clamping plate on the second clamping member to move towards the adjusting disc, facilitating the fixation of the wafer placed on the adjusting disc.

[0020] (4)The gas in the elastic bladder enters into the second ventilation pipe and enters into the second ventilation cavity through the third ventilation pipe. The gas in the second ventilation cavity enters into the upper fixing bladder and the lower fixing bladder through the second ventilation holes. Both the upper fixing bladder and the lower fixing bladder bulge and are respectively arranged in contact with the upper wall and the bottom wall of the cavity, realizing the fixation of the gear, thereby realizing the fixation of the clamping plate, and further realizing the fixation of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0022] Figure 1 A schematic structural diagram of a die bonding device for electronic component production proposed by the present invention;

[0023] Figure 2 A schematic structural diagram of the regulation component proposed by the present invention;

[0024] Figure 3 A main perspective view of a die bonding device for electronic component production proposed by the present invention;

[0025] Figure 4 For Figure 3 A partial enlarged view of part A;

[0026] Figure 5 For Figure 3 A partial enlarged view of part B;

[0027] Figure 6 A cross-section of a die bonding device for electronic component production proposed by the present invention Figure 1 ;

[0028] Figure 7 For Figure 6 A partial enlarged view of part C;

[0029] Figure 8 For Figure 6 A partial enlarged view of part D;

[0030] Figure 9 A cross-section of a die bonding device for electronic component production proposed by the present invention Figure 2 ;

[0031] Figure 10Cross-section of a die bonding device for electronic component production proposed by the present invention Figure 3 。

[0032] In the attached drawings: 1, bottom plate; 2, clamping and fixing assembly; 3, driving assembly; 4, regulating assembly; 5, limiting member; 6, slider; 7, support seat; 8, baffle; 9, spring; 10, plug-in one; 11, plug-in two; 12, placement groove; 13, air vent cavity one; 14, fixing capsule; 15, air vent hole one; 16, clamping member one; 17, adjustment plate; 18, clamping member two; 19, mounting seat; 20, cavity; 21, gear; 22, upper fixing capsule; 23, lower fixing capsule; 24, air vent cavity two; 25, air vent hole two; 26, air vent pipe three; 27, partition board; 28, slot hole; 29, clamping plate; 30, tooth condition; 31, connecting plate; 32, sliding plate; 33, elastic capsule; 34, air vent pipe one; 35, air vent pipe two; 36, connecting pipe; 37, hydraulic rod; 38, pushing plate one; 39, pushing plate two; 40, air vent hole three. Detailed implementation manners

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0034] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0035] As Figures 1 - 10 shown, a die bonding device for electronic component production includes a bottom plate 1 for support and fixation. A clamping and fixing assembly 2 and a driving assembly 3 are installed on the bottom plate 1. One end of the driving assembly 3 is arranged at the lower end of the clamping and fixing assembly 2 and is movably connected to the bottom wall of the clamping and fixing assembly 2. A regulating assembly 4 is installed on the driving assembly 3, and the regulating assembly 4 is connected to the clamping and fixing assembly 2 in a through manner;

[0036] The driving component 3 includes a limiting member 5, the limiting member 5 is arranged on the upper wall of the bottom plate 1, one end of the limiting member 5 is arranged at the lower end of the clamping and fixing component 2, a limiting groove is arranged in the limiting member 5, a slider 6 is movably clamped in the limiting groove, the adjusting component 4 is arranged on the slider 6, the driving component 3 further includes a support seat 7, the support seat 7 is arranged on the upper wall of the bottom plate 1, and the support seat 7 is connected to the end of the limiting member 5 away from the clamping and fixing component 2. A baffle 8 is installed on the side of the slider 6 close to the support seat 7, and a spring 9 is installed between the baffle 8 and the support seat 7. A plug-in part one 10 and a plug-in part two 11 are installed on the upper wall of the side of the slider 6 away from the support seat 7. The plug-in part one 10 is placed close to the support seat 7, and the plug-in part two 11 is placed away from the support seat 7. The plug-in part one 10 and the plug-in part two 11 are placed in a staggered manner. One end of the plug-in part one 10 close to the plug-in part two 11 is inclined, and one end of the plug-in part two 11 close to the plug-in part one 10 is inclined. A placement groove 12 is arranged between the plug-in part one 10 and the plug-in part two 11, and balls are arranged on the inclined surfaces of the plug-in part one 10 and the plug-in part two 11.

[0037] An air vent cavity one 13 is arranged in the plug-in part one 10, an air vent hole one 15 is arranged on the side wall of the plug-in part one 10, a fixing bladder 14 is installed on the outside of the plug-in part one 10, the air vent hole one 15 is arranged in the fixing bladder 14, the air vent cavity one 13 is connected to the air vent hole one 15 in a through manner, and the gas in the air vent cavity one 13 enters the fixing bladder 14 through the air vent hole one 15.

[0038] The clamping and fixing component 2 includes a clamping part one 16, an adjusting disc 17 and a clamping part two 18. The adjusting disc 17 is movably arranged on the bottom plate 1, and the bottom plate 1 supports and fixes the adjusting disc 17. The clamping part one 16 and the clamping part two 18 are both movably clamped in the adjusting disc 17, and the clamping part one 16 and the clamping part two 18 are placed in central symmetry.

[0039] A mounting seat 19 is provided at the center of the bottom wall of the adjustment disc 17. The mounting seat 19 is movably mounted on the upper wall of the bottom plate 1. A cavity 20 is provided inside the adjustment disc 17. Both ends of the cavity 20 penetrate through the side wall of the adjustment disc 17. The first clamping member 16 and the second clamping member 18 are both movably clamped inside the cavity 20. A gear 21 is movably mounted in the middle of the cavity 20. The gear 21 is located directly above the mounting seat 19. An annular upper fixing bladder 22 is provided on the upper wall of the gear 21, and an annular lower fixing bladder 23 is provided on the bottom wall of the gear 21. An air vent cavity two 24 is provided inside the gear 21. Multiple groups of air vent holes two 25 for gas flow are provided on the upper wall and the bottom wall of the air vent cavity two 24. The air vent holes two 25 on the upper wall of the air vent cavity two 24 are connected to the upper fixing bladder 22 in a penetrating manner, and the air vent holes two 25 on the bottom wall of the air vent cavity two 24 are connected to the lower fixing bladder 23 in a penetrating manner. A gas pipe three 26 for gas flow is provided at the center of the mounting seat 19. The upper end of the gas pipe three 26 penetrates through the center of the gear 21 and is connected to the air vent cavity two 24 in a penetrating manner;

[0040] It should be noted that the gas in the gas pipe three 26 enters the air vent cavity two 24. The gas in the air vent cavity two 24 enters the upper fixing bladder 22 and the lower fixing bladder 23 through the air vent holes two 25. Both the upper fixing bladder 22 and the lower fixing bladder 23 bulge and are respectively arranged in contact with the upper wall and the bottom wall of the cavity 20, which is convenient for fixing the gear 21.

[0041] Multiple groups of partitions 27 for dividing the space are evenly installed at equal intervals in the circumferential direction on the bottom wall of the adjustment disc 17. A slot hole 28 is provided between two adjacent groups of partitions 27. The first plug-in member 10 is arranged outside the partition 27, and the second plug-in member 11 is arranged inside the partition 27. The distance width between the placement slots 12 is greater than the width of the partition 27.

[0042] In this embodiment, assume that multiple sets of partition plates 27 are partition plate one, partition plate two... partition plate N respectively. Initially, partition plate one is disposed in the placement groove 12 between plug-in one 10 and plug-in two 11. At this time, the spring 9 is in a compressed state. When the slider 6 moves in the direction close to the support base 7, the baffle 8 further squeezes the spring 9. At the same time, the slider 6 drives plug-in one 10 and plug-in two 11 to move in the direction close to the support base 7. The inclined surface of plug-in two 11 gradually inserts into the slot hole 28 between partition plate one and partition plate two. The inclined surface of plug-in two 11 is arranged to fit one end of partition plate one. As plug-in two 11 continues to move, the inclined surface pushes partition plate one to rotate clockwise. Partition plate one drives the adjustment disk 17 to rotate clockwise. After plug-in two 11 is disposed in the slot hole 28, the slider 6 moves in the direction away from the support base 7. The slider 6 drives plug-in one 10 and plug-in two 11 to move in the direction away from the support base 7. The inclined surface of plug-in one 10 gradually inserts into the slot hole 28 between partition plate two and partition plate three. The inclined surface is arranged to fit one end of partition plate two. As plug-in one 10 continues to move, the inclined surface pushes partition plate two to rotate clockwise. Partition plate two drives the adjustment disk 17 to rotate clockwise. After plug-in one 10 is disposed in the slot hole 28, the adjustment disk 17 stops rotating. At this time, the spring 9 is in a natural state. The gas in the first ventilation cavity 13 enters the fixed bladder 14 through the first ventilation hole 15. The fixed bladder 14 bulges and is arranged to fit the side wall of the partition plate 27, facilitating the fixation of plug-in one 10, thereby realizing the fixation of the adjustment disk 17.

[0043] The first clamping member 16 and the second clamping member 18 have the same structure. Only one set of them will be introduced here. The first clamping member 16 includes a clamping plate 29 and a toothed condition member 30. One end of the toothed condition member 30 is movably clamped and disposed in the cavity 20, and the other end of the toothed condition member 30 extends out of the cavity 20. The toothed condition member 30 on the first clamping member 16 and the toothed condition member 30 on the second clamping member 18 are both meshed and connected with the gear 21, and the toothed condition member 30 on the first clamping member 16 and the toothed condition member 30 on the second clamping member 18 are placed in central symmetry. The clamping plate 29 is connected to one end of the toothed condition member 30 extending out of the cavity 20.

[0044] It should be noted that initially, the upper fixed bladder 22 and the lower fixed bladder 23 are both arranged to fit the upper wall and the lower wall of the gear 21. When the clamping plate 29 on the first clamping member 16 receives a thrust, it drives the toothed condition member 30 to move in the direction close to the adjustment disk 17. The toothed condition member 30 on the first clamping member 16 drives the gear 21 to rotate. The gear 21 drives the other toothed condition member 30 to move. This toothed condition member 30 drives the clamping plate 29 on the second clamping member 18 to move in the direction close to the adjustment disk 17. The clamping plate 29 fixes the wafer placed on the adjustment disk 17.

[0045] The control component 4 includes a connecting plate 31 and a sliding plate 32. The connecting plate 31 is arranged on the upper wall of the slider 6, and the slider 6 supports and fixes the connecting plate 31. The sliding plate 32 is movably clamped on the upper wall of the slider 6. An elastic bladder 33 is installed between the connecting plate 31 and the sliding plate 32, and the connecting plate 31, the sliding plate 32 and the elastic bladder 33 are hermetically connected.

[0046] A first ventilation pipe 34 is installed on the side wall of the connecting plate 31. The first ventilation pipe 34 connects the elastic bladder 33 and the first ventilation cavity 13. A control valve is provided in the first ventilation pipe 34 to facilitate the control of gas flow. A second ventilation pipe 35 is provided in the bottom plate 1. A connecting pipe 36 is installed on the bottom plate 1. One end of the connecting pipe 36 penetrates through the connecting plate 31 and is connected to the elastic bladder 33 in a through manner. The other end of the connecting pipe 36 is connected to the second ventilation pipe 35 in a through manner. The connecting pipe 36 is made of a foldable material. The second ventilation pipe 35 is connected to the third ventilation pipe 26 in a through manner. A control valve is provided in the connecting pipe 36 to facilitate the control of gas flow;

[0047] It should be noted that when the sliding plate 32 moves along the slider 6 to squeeze the elastic bladder 33, the ventilation hole three 40 on the side wall of the sliding plate 32 and the control valve in the connecting pipe 36 are both closed, and the control valve in the first ventilation pipe 34 is opened. The gas in the elastic bladder 33 enters the first ventilation cavity 13 through the first ventilation pipe 34, and the fixing bladder 14 bulges to facilitate the fixation of the adjustment disk 17. The control valve in the first ventilation pipe 34 is closed. As the sliding plate 32 continues to move, the elastic bladder 33 is squeezed and bulges. Then the control valve in the connecting pipe 36 is opened, and the gas in the connecting pipe 36 enters the second ventilation pipe 35, and then enters the third ventilation pipe 26, and enters the second ventilation cavity 24 through the third ventilation pipe 26 to inflate the upper fixing bladder 22 and the lower fixing bladder 23, so as to fix the gear 21, and thus realize the fixation of the clamping plate 29.

[0048] A hydraulic rod 37 is installed on the support seat 7. A first pushing plate 38 and a second pushing plate 39 are installed at the movable end of the hydraulic rod 37. The second pushing plate 39 is arranged at the end of the hydraulic rod 37 and is close to the first clamping member 16. The first pushing plate 38 is arranged between the baffle 8 and the sliding plate 32. A second magnetic member is provided on the side wall of the first pushing plate 38, and the first magnetic member and the second magnetic member have different magnetic polarities;

[0049] It should be noted that initially, the first partition plate is arranged in the placement groove 12 between the first plug-in member 10 and the second plug-in member 11. At this time, the spring 9 is in a compressed state, and the baffle 8 is arranged in contact with the first push plate 38. The first push plate 38 restricts the movement of the baffle 8. When the hydraulic rod 37 drives the first push plate 38 and the second push plate 39 to move towards the support seat 7, the first push plate 38 squeezes the baffle 8, and the baffle 8 drives the slider 6 to move towards the support seat 7, and the spring 9 is further compressed. When the hydraulic rod 37 drives the first push plate 38 and the second push plate 39 to move away from the support seat 7, under the action of the spring 9, the baffle 8 pushes the slider 6 to move away from the support seat 7.

[0050] A third vent hole 40 is installed on the side wall of the sliding plate 32, and a control valve is installed in the third vent hole 40 to facilitate controlling the flow of gas in the elastic bladder 33.

[0051] The specific use is as follows:

[0052] Initially, the upper fixed bladder 22 and the lower fixed bladder 23 are both arranged in contact with the upper wall and the lower wall of the gear 21. Let multiple partition plates 27 be the first partition plate, the second partition plate... the Nth partition plate respectively. Initially, the first partition plate is arranged in the placement groove 12 between the first plug-in member 10 and the second plug-in member 11. At this time, the spring 9 is in a compressed state, and the baffle 8 is arranged in contact with the first push plate 38. The first push plate 38 restricts the movement of the baffle 8. Place the wafer to be fixed on the upper wall of the adjustment disk 17. When the hydraulic rod 37 drives the first push plate 38 and the second push plate 39 to move towards the support seat 7, the first push plate 38 squeezes the baffle 8, and the baffle 8 drives the slider 6 to move towards the support seat 7. At the same time, the baffle 8 further squeezes the spring 9. At this time, the slider 6 drives the first plug-in member 10 and the second plug-in member 11 to move towards the support seat 7. The inclined surface of the second plug-in member 11 gradually inserts into the slot hole 28 between the first partition plate and the second partition plate. The inclined surface of the second plug-in member 11 is arranged in contact with one end of the first partition plate. As the second plug-in member 11 continues to move, the inclined surface pushes the first partition plate to rotate clockwise, and the first partition plate drives the adjustment disk 17 to rotate clockwise;

[0053] After the second plug 11 is placed in the slot 28, the hydraulic rod 37 drives the first push plate 38 and the second push plate 39 to move away from the support seat 7. Under the action of the spring 9, the baffle 8 pushes the slider 6 to move away from the support seat 7. The slider 6 drives the first plug 10 and the second plug 11 to move away from the support seat 7. The inclined surface of the first plug 10 gradually inserts into the slot 28 between the second partition plate and the third partition plate, and is arranged at one end where the inclined surface fits the second partition plate. As the first plug 10 continues to move, the inclined surface pushes the second partition plate to rotate clockwise. The second partition plate drives the adjustment disk 17 to rotate clockwise. At the same time, the slider 6 drives the connecting plate 31 and the sliding plate 32 to move. After the first plug 10 is placed in the slot 28, the adjustment disk 17 stops rotating. At this time, the spring 9 is in a natural state. The connecting plate 31 moves to the lower end of the adjustment disk 17, and the second push plate 39 is arranged at the side wall position of the clamping plate 29 on the first clamping member 16.

[0054] As the hydraulic rod 37 continues to move, the first push plate 38 and the second push plate 39 continue to move away from the support seat 7. The first push plate 38 squeezes the sliding plate 32, and at the same time, the second push plate 39 drives the clamping plate 29 on the first clamping member 16.

[0055] The sliding plate 32 moves along the slider 6 to squeeze the elastic bladder 33. The air vent three 40 on the side wall of the sliding plate 32 and the control valve in the connecting pipe 36 are both closed, and the control valve in the first air pipe 34 is opened. The gas in the elastic bladder 33 enters the first air chamber 13 through the first air pipe 34. The gas in the first air chamber 13 enters the fixed bladder 14 through the air vent one 15. The fixed bladder 14 bulges and fits the side wall of the partition plate 27, which is convenient for fixing the first plug 10, thereby realizing the fixation of the adjustment disk 17. Then the control valve in the first air pipe 34 is closed. As the sliding plate 32 continues to move, the elastic bladder 33 is squeezed and bulges. At this time, the clamping plate 29 on the first clamping member 16 receives a thrust, driving the toothed condition 30 to move towards the adjustment disk 17. The toothed condition 30 on the first clamping member 16 drives the gear 21 to rotate. The gear 21 drives another set of toothed conditions 30 to move. This toothed condition 30 drives the clamping plate 29 on the second clamping member 18 to move towards the adjustment disk 17. The clamping plate 29 fixes the wafer placed on the adjustment disk 17. Then the control valve in the connecting pipe 36 is opened. The gas in the elastic bladder 33 enters the second air pipe 35 and enters the third air pipe 26. The gas in the third air pipe 26 enters the second air chamber 24. The gas in the second air chamber 24 enters the upper fixed bladder 22 and the lower fixed bladder 23 through the air vent two 25. The upper fixed bladder 22 and the lower fixed bladder 23 both bulge and are respectively arranged to fit the upper wall and the bottom wall of the cavity 20, realizing the fixation of the gear 21, thereby realizing the fixation of the clamping plate 29, and further realizing the fixation of the wafer. The control valve in the connecting pipe 36 is closed.

[0056] When the position of the wafer needs to be adjusted, the control valves in the vent hole three 40 and the vent pipe one 34 are opened. The hydraulic rod 37 drives the first push plate 38 and the second push plate 39 to move towards the support seat 7. The first push plate 38 and the sliding plate 32 are adsorbed and connected through the first magnetic part and the second magnetic part. The first push plate 38 drives the sliding plate 32 to move, and the elastic bladder 33 unfolds. The gas in the fixed bladder 14 in the first plug 10 enters the elastic bladder 33, and the external gas enters the elastic bladder 33 through the vent hole three 40. When the first push plate 38 moves to the position of the baffle 8, with the continuous movement of the hydraulic rod 37, the first push plate 38 drives the baffle 8 to move towards the support seat 7. The baffle 8 drives the slider 6 to move, and the slider 6 drives the first plug 10 and the second plug 11 to move. The partition plate 27 is arranged in the first plug 10 and the second plug 11, and then the adjustment disk 17 is driven to rotate clockwise according to the above steps for angle adjustment.

[0057] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Generally speaking, if those of ordinary skill in the art are inspired by it and, without departing from the gist of the present invention, design similar structural modes and embodiments without creative efforts, they shall fall within the protection scope of the present invention.

Claims

1. A die bonding device for electronic component production, comprising a base plate for supporting and fixing, characterized in that: The bottom plate is provided with a clamping and fixing component and a driving component, one end of the driving component is arranged at the lower end of the clamping and fixing component and is movably connected to the bottom wall of the clamping and fixing component, and the driving component is provided with a regulating component, and the regulating component is connected through the clamping and fixing component; The cam is secured to the bottom of the base and is adapted to engage the cams of the linkage set to enable the linkage set to engage with the support member and to engage with the cam in a manner that allows the linkage set to engage with the cam.

2. The die bonding device for electronic component production according to claim 1, characterized in that: A ventilation cavity is provided in the plug-in, a ventilation hole is provided on one side wall of the plug-in, a fixing bag is installed on the outer side of the plug-in, the ventilation hole is provided in the fixing bag, and the ventilation cavity is connected with the ventilation hole.

3. The die bonding device for electronic component production according to claim 2, characterized in that: The clamping and fixing assembly includes a clamping member 1, an adjustment disk and a clamping member 2. The adjustment disk is movably arranged on the bottom plate. The clamping member 1 and the clamping member 2 are both movably clamped in the adjustment disk, and the clamping member 1 and the clamping member 2 are placed in a centrally symmetrical manner.

4. The die bonding device for electronic component production according to claim 3, characterized in that: A mounting seat is provided at the center of the bottom wall of the adjustment disk, and the mounting seat is movably mounted on the upper wall of the bottom plate, a cavity is provided in the adjustment disk, both ends of the cavity pass through the side walls of the adjustment disk, the clamping piece 1 and the clamping piece 2 are movably clamped and arranged in the cavity, a gear is movably installed in the middle of the cavity, the gear is arranged at the upper end of the mounting seat, the upper wall of the gear is provided with an annular upper fixed bag, and the bottom wall of the gear is provided with an annular lower fixed bag, and a ventilation cavity 2 is provided in the gear, and the upper wall and bottom wall of the ventilation cavity 2 are both provided with multiple groups of ventilation holes 2 for gas circulation, the ventilation holes 2 on the upper wall of the ventilation cavity 2 are through-connected with the upper fixed bag, and the ventilation holes 2 on the bottom wall of the ventilation cavity 2 are through-connected with the lower fixed bag, and a ventilation pipe 3 for gas circulation is provided in the center of the mounting seat, and the upper end of the ventilation pipe 3 passes through the center of the gear and is through-connected with the ventilation cavity 2.

5. The die bonding device for electronic component production according to claim 4, characterized in that: The bottom wall of the adjustment plate is evenly and evenly installed with multiple groups of partitions for dividing the space in the circumferential direction, and slots are arranged between two adjacent groups of partitions. The first plug-in is arranged on the outer side of the partition, and the second plug-in is arranged on the inner side of the partition. The spacing width between the slots is greater than the width of the partition.

6. The die bonding device for electronic component production according to claim 5, characterized in that: The clamping member 1 and the clamping member 2 have the same structure. The clamping member 1 includes a clamping plate and a gear condition. One end of the gear condition is movably clamped in the cavity, and the other end of the gear condition extends out of the cavity. The gear condition on the clamping member 1 and the gear condition on the clamping member 2 are both meshed with the gear, and the gear condition on the clamping member 1 and the gear condition on the clamping member 2 are placed in a centrally symmetrical manner. The clamping plate is connected to one end of the gear condition extending out of the cavity.

7. The die bonding device for electronic component production according to claim 6, characterized in that: The regulating component includes a connecting plate and a sliding plate, wherein the connecting plate is arranged on the upper wall of the slider, the sliding plate is movably connected to the upper wall of the slider, an elastic bag is installed between the connecting plate and the sliding plate, and a magnetic part 1 is arranged on the side wall of the sliding plate.

8. The die bonding device for electronic component production according to claim 7, characterized in that: A ventilation pipe 1 is installed on the side wall of the connecting plate, and the ventilation pipe 1 connects the elastic bag and the ventilation cavity 1. A ventilation pipe 2 is arranged in the bottom plate, and a connecting pipe is installed on the bottom plate. One end of the connecting pipe passes through the connecting plate and is connected with the elastic bag, and the other end of the connecting pipe is connected with the ventilation pipe 2, and the ventilation pipe 2 is connected with the ventilation pipe 3. Control valves are arranged in the connecting pipe and the ventilation pipe 1.

9. The die bonding device for electronic component production according to claim 8, characterized in that: A hydraulic rod is installed on the support seat, and a push plate 1 and a push plate 2 are installed on the movable end of the hydraulic rod. The push plate 2 is arranged at the end of the hydraulic rod and is arranged close to the clamping member 1. The push plate 1 is arranged between the baffle plate and the sliding plate. A magnetic member 2 is provided on one side wall of the push plate, and the magnetic properties of the magnetic member 1 and the magnetic member 2 are different.

10. The die bonding device for electronic component production according to claim 9, characterized in that: The side wall of the sliding plate is provided with a vent hole three, and a control valve is installed in the vent hole three.

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