Molecular pump test system and test method

Abstract

The invention relates to the technical field of molecular pump testing, in particular to a molecular pump testing system and method. A molecular pump test system comprises: a molecular pump assembly, the molecular pump assembly comprising a to-be-tested molecular pump, the to-be-tested molecular pump having an accommodating cavity; a delivery line; the to-be-tested molecular pump is communicated with the dust generation assembly through a conveying pipeline, and dust generated by the dust generation assembly is conveyed into the containing cavity of the to-be-tested molecular pump through the conveying pipeline. The invention provides a molecular pump test system and a test method, and aims to solve the problems of long experimental period and difficulty in quantitative analysis of results due to the fact that an existing molecular pump often passes verification of actual semiconductor equipment in a dust resistance test process.

Description

Technical Field

[0001] The present invention relates to the technical field of molecular pump testing, and in particular to a molecular pump testing system and a testing method. Background Art

[0002] As a vacuum obtaining device, the molecular pump uses the collision or carrying effect of the high-speed rotating solid surface to transfer energy to the gas molecules, forming a flow in a certain direction on a macro scale to achieve the pumping effect, thereby obtaining a clean ultra-high vacuum and providing the necessary, real-time controllable vacuum environment for the key semiconductor process. In the application of semiconductor etching equipment, it is found that a large amount of dust will be generated in the etching process environment. The dust is usually a sticky compound. The dust settles in large quantities on the turbine blades for a long time, which can easily cause the rotor to become unstable and affect the stable operation of the molecular pump. In the process of removing particles from the molecular pump, the high-speed rotating rotor collides with the particles, causing the particles to flow back into the cavity. The refluxed particles will affect the cleanliness of the cavity, thereby affecting the product yield.

[0003] Existing molecular pump dust resistance testing systems are often verified through actual semiconductor etching equipment, which has disadvantages such as long experimental cycle and difficult quantitative analysis of results. Summary of the invention

[0004] In view of this, the present invention provides a molecular pump testing system and testing method to solve the problem that the existing molecular pump dust resistance testing system is often verified by actual semiconductor etching equipment, has a long experimental cycle and is difficult to quantitatively analyze the results.

[0005] In a first aspect, the present invention provides a molecular pump testing system, comprising:

[0006] A molecular pump assembly, wherein the molecular pump assembly comprises a molecular pump to be tested, and the molecular pump to be tested has a containing cavity;

[0007] Delivery pipeline;

[0008] The dust generating component is connected with the dust generating component through a conveying pipeline, and the dust generated by the dust generating component is conveyed to the containing cavity of the molecular pump to be measured through the conveying pipeline.

[0009] When the molecular pump is in a vacuum state, the pressure in the dust assembly is greater than the pressure in the molecular pump. The dust continuously generated by the dust generating assembly is transported to the containing chamber of the molecular pump to be tested through the conveying pipeline until the molecular pump to be tested is in an unstable state. During the whole process, the experimental cycle only needs to start from the molecular pump until it is in an unstable state. The experimental cycle is short, and quantitative analysis is performed by weighing the dust in the molecular pump to be tested, thereby achieving quantitative analysis of the test results.

[0010] In an optional embodiment, the dust generating component includes a sealed shell and a blower, the inner wall of the sealed shell is provided with a blower, the conveying pipeline is provided on the side of the sealed shell, and the conveying pipeline and the blower are respectively provided on the corresponding two sides of the sealed shell.

[0011] In an optional embodiment, the dust generating assembly further includes a carrying platform, the sealed shell is provided with a carrying platform, and the carrying platform is suitable for placing dust.

[0012] In an optional embodiment, the dust generating assembly further includes an atomizing element and a flow meter, wherein the flow meter passes through the top of the sealed shell and extends into the sealed shell, and the atomizing element is arranged on the side wall of the sealed shell.

[0013] In an optional embodiment, a test cover assembly is further included, wherein the test cover assembly is arranged between the molecular pump to be tested and the dust generating assembly.

[0014] In an optional embodiment, the molecular pump assembly includes a connecting frame, the connecting frame is provided with a top plate, the test cover assembly includes a cover body, the cover body is provided above the top plate, the molecular pump to be tested is provided below the top plate, and the connecting port of the cover body is connected to the molecular pump to be tested.

[0015] In an optional embodiment, the test cover assembly includes a first bearing seat, a rotating shaft and a second bearing seat, the first bearing seat and the second bearing seat are respectively provided on the corresponding side walls of the cover body, the first bearing seat is fixed on the side wall of the cover body, the side wall of the cover body is connected to the second bearing seat, and the rotating shaft is respectively connected to the first bearing seat and the second bearing seat.

[0016] In an optional embodiment, the test cover assembly also includes a connecting plate, a power piece and a particle collector, the particle collector is sleeved on the outer circumferential surface of the rotating shaft, the cover body is fixedly connected to the connecting plate, the second bearing seat is fixedly provided on the connecting plate, a power piece is provided between the second bearing seat and the cover body, the power piece is provided above the connecting plate, and the power piece is fixedly connected to the rotating shaft.

[0017] In an optional embodiment, the molecular pump assembly further includes a mechanical pump, and the molecular pump to be tested is connected to the mechanical pump via a vacuum pipeline.

[0018] In the second aspect, the present invention also provides a testing method for a molecular pump testing system. When the molecular pump is in a vacuum state, the pressure inside the dust generating component is greater than the pressure inside the molecular pump. The dust continuously generated by the dust generating component is transported to the containing chamber of the molecular pump to be tested through a conveying pipeline until the molecular pump to be tested is in an unstable state. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of a molecular pump testing system according to an embodiment of the present invention;

[0021] Figure 2 is a schematic diagram of a molecular pump to be tested according to an embodiment of the present invention;

[0022] Figure 3 is a schematic diagram of a test cover assembly according to an embodiment of the present invention;

[0023] Figure 4 A bottom view of a test cover assembly according to an embodiment of the present invention.

[0024] Explanation of the reference numerals in the accompanying drawings: 1. Dust generating component; 101. Sealed shell; 102. Carrying platform; 103. Atomizer; 104. Air generator; 105. Flow meter; 106. Sealed door; 2. Molecular pump component; 201. Molecular pump to be tested; 2011. Cooling shell; 2012. Cooling pipe; 2013. Cooling connector; 202. Connecting frame; 2021. Top plate; 203. Mechanical pump; 3. Delivery pipeline; 4. Vacuum pipeline; 5. Test cover assembly; 501. Cover body; 5011. Connecting port; 502. First bearing seat; 503. Second bearing seat; 504. Power component; 505. Connecting plate; 506. Rotating shaft; 507. Screw nut; 508. Particle collector. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0026] Combine the following Figures 1 to 4 , describing an embodiment of the present invention.

[0027] According to an embodiment of the present invention, on the one hand, a molecular pump testing system is provided, comprising: a molecular pump assembly 2, comprising a molecular pump 201 to be tested, the molecular pump 201 to be tested having a containing cavity; a conveying pipeline 3; a dust generating assembly 1, the molecular pump 201 to be tested is connected to the dust generating assembly 1 through the conveying pipeline 3, and the dust generated by the dust generating assembly 1 is conveyed to the containing cavity of the molecular pump 201 to be tested through the conveying pipeline 3.

[0028] In the test state, the dust continuously generated by the dust generating assembly 1 is transported to the containing chamber of the molecular pump 201 to be tested through the transport pipeline 3 until the molecular pump 201 to be tested is in an unstable state.

[0029] In one embodiment, Figure 1 As shown, the dust generating assembly 1 includes a sealed housing 101 and a blower 104. The blower 104 is provided on the inner side wall of the sealed housing 101. The conveying pipeline 3 is provided on the side of the sealed housing 101. The conveying pipeline 3 and the blower 104 are provided on the corresponding sides of the sealed housing 101. Specifically, the blower 104 is a fan. Through the corresponding arrangement on the side wall, the wind generated by the blower 104 is blown to the conveying pipeline 3, ensuring that the dust flows into the conveying pipeline 3 with the gas in a directional manner, so that the dust in the sealed housing 101 enters the conveying pipeline 3.

[0030] When the molecular pump is in a vacuum state, the pressure in the dust assembly is greater than the pressure in the molecular pump, and the dust continuously generated by the dust generating assembly 1 is transported to the accommodating chamber of the molecular pump 201 to be tested through the transport pipeline 3 until the molecular pump 201 to be tested is in an unstable state.

[0031] When the molecular pump is in a vacuum state, the pressure in the dust generating assembly is greater than the pressure in the molecular pump, and the dust continuously generated by the dust generating assembly 1 is transported to the containing chamber of the molecular pump 201 to be tested through the transport pipeline 3 until the molecular pump 201 to be tested is in an unstable state. In the whole process, the experimental cycle only needs to start from the molecular pump until it is in an unstable state, and the experimental cycle is short. The dust weight in the molecular pump 201 to be tested is weighed for quantitative analysis, thereby achieving quantitative analysis of the test results.

[0032] In one embodiment, Figure 1 As shown, the dust generating assembly 1 further includes a carrying platform 102, and the carrying platform 102 is provided in the sealed housing 101, and the carrying platform 102 is suitable for placing dust. It should be noted that the height of the carrying platform 102 is slightly lower than the height of the wind generator 104, so that the wind generated by the wind generator 104 blows toward the dust on the carrying platform 102, thereby generating wind with dust in the sealed housing 101.

[0033] In one embodiment, Figure 1As shown, the dust generating assembly 1 also includes an atomizing element 103 and a flow meter 105. The flow meter 105 passes through the top of the sealed housing 101 and then extends into the sealed housing 101. The atomizing element 103 is arranged on the side wall of the sealed housing 101. The atomizing element 103 will excite the dust into an atomized state. The dust in the atomized state will increase the viscosity of the dust so that it can better adhere to the vacuum pump. The flow meter 105 measures the atmospheric pressure of the gas in the sealed housing 101. The flow meter 105 can also pass gas into the sealed housing 101.

[0034] In this embodiment, if Figure 1 As shown, a sealing door 106 is provided on the side of the sealed shell 101, and the four sides of the sealed shell 101 are respectively provided with a delivery pipeline 3, an atomizer 103, a blower 104, and a sealing door 106, wherein the sealing door 106 and the atomizer 103 are correspondingly arranged, and the blower 104 and the delivery pipeline 3 are correspondingly arranged.

[0035] In one embodiment, Figure 1 , Figure 3 and Figure 4 As shown, a test cover assembly 5 is also included. The test cover assembly 5 is arranged between the molecular pump 201 to be tested and the dust generating assembly 1, so that the dust in the conveying pipeline 3 first passes through the test cover assembly 5 and then reaches the molecular pump 201 to be tested.

[0036] In one embodiment, Figure 1 , Figure 3 and Figure 4 As shown, the molecular pump assembly 2 includes a connecting frame 202, the connecting frame 202 is provided with a top plate 2021, the test cover 501 assembly includes a cover 501, the cover 501 is arranged above the top plate 2021, the molecular pump 201 to be tested is arranged below the top plate 2021, and the connecting port 5011 of the cover 501 is connected with the molecular pump 201 to be tested. The fixed connection between the molecular pump 201 to be tested and the cover 501 is realized by the connecting frame 202, so that dust enters the molecular pump 201 to be tested through the cover 501.

[0037] In one embodiment, Figure 3 and Figure 4 As shown, the test cover assembly 5 includes a first bearing seat 502 and a second bearing seat 503. The first bearing seat 502, a rotating shaft 506 and a second bearing seat 503 are respectively arranged on the side walls corresponding to the cover body 501. The first bearing seat 502 is fixedly arranged on the side wall of the cover body 501. The side wall of the cover body 501 is connected to the second bearing seat 503. The rotating shaft 506 is respectively connected to the first bearing seat 502 and the second bearing seat 503. Specifically, the rotating shaft 506 is a ball screw. The first bearing seat 502 and the second bearing seat 503 support both ends of the rotating shaft 506, and the rotating shaft 506 is respectively rotatably connected to the first bearing seat 502 and the second bearing seat 503.

[0038] In one embodiment, Figure 3 and Figure 4 As shown, the test cover assembly 5 also includes a connecting plate 505, a power piece 504 and a particle collector 508, the particle collector 508 is sleeved on the outer peripheral surface of the rotating shaft 506, the cover body 501 is fixedly connected to the connecting plate 505, the second bearing seat 503 is fixedly arranged on the connecting plate 505, a power piece 504 is arranged between the second bearing seat 503 and the cover body 501, the power piece 504 is arranged above the connecting plate 505, and the power piece 504 is fixedly connected to the rotating shaft 506. The second bearing seat 503 and the power piece 504 are supported by the connecting plate 505, the rotating shaft 506 is driven by the power piece 504 to rotate, and then the rotating shaft 506 drives the particle collector 508 to move along the length direction of the rotating shaft 506. When the rotating shaft 506 rotates, it drives the particle collector 508 to move along the central axis direction of the rotating shaft 506, so as to test the particle reflux of the molecular pump 201 to be tested at different positions. It should be noted that a lead screw nut 507 is provided between the rotating shaft 506 and the particle collector 508 , the lead screw nut 507 and the particle collector 508 are detachably connected, and the collecting surface of the particle collector 508 is arranged toward the molecular pump.

[0039] In one embodiment, Figure 1 , Figure 3 and Figure 4 As shown, the molecular pump assembly 2 further includes a mechanical pump 203. The molecular pump 201 to be tested is connected to the mechanical pump 203 via a vacuum line 4. The mechanical pump 203 provides power to drive the molecular pump to achieve a vacuum environment.

[0040] In this embodiment, if Figure 2 As shown, the molecular pump assembly 2 also includes a cooling shell 2011, a cooling pipe 2012 and a cooling connector 2013, wherein the cooling shell 2011 is sleeved on the outer peripheral surface of the shell of the molecular pump 201 to be tested, and the cooling connector 2013 is respectively connected to the cooling shell 2011 and the cooling pipe 2012, and the cooling pipe 2012 is connected to the chiller. It should be noted that an opening and closing member is provided on the delivery pipeline 3, and the opening and closing of the delivery pipeline 3 is controlled by the opening and closing member. Specifically, the opening and closing member is a solenoid valve.

[0041] In this embodiment, in order to monitor the state of the molecular pump, a vibration sensor is provided on the stator of the molecular pump, and the vibration sensor is used to sense the amplitude and other values ​​of the rotor of the molecular pump.

[0042] In this embodiment, a controller is also included, which is respectively connected to the molecular pump 201 to be tested, the mechanical pump 203, the particle collector 508, the power part 504, the atomizing part 103, the wind generator 104, the flow meter 105, the vibration sensor, etc. for communication.

[0043] A method for testing the particle backflow prevention of a molecular pump, comprising the following steps:

[0044] 1) The mechanical pump 203 and the molecular pump 201 to be tested are in a power-off state, the opening and closing member closes the delivery pipeline 3, the sealing door 106 is opened, the dust of a preset weight is placed on the carrying platform 102, and the sealing door 106 is closed;

[0045] 2) Start the air generator 104 to blow the dust into the sealed housing 101. After the air generator 104 is started for a period of time, start the atomizer to increase the humidity in the sealed housing 101 and increase the viscosity of the dust;

[0046] 3) Start the mechanical pump 203 and the molecular pump 201 to be tested, and reduce the pressure in the housing 501 to negative pressure until the molecular pump 201 to be tested reaches the rated speed (the molecular pump is in a vacuum state);

[0047] 4) Starting the power member 504 to drive the rotating shaft 506 to rotate, so that the particle collector 508 reaches the first preset position;

[0048] 5) Open the opening and closing member, start the flow meter 105 to let in external gas, so that the pressure in the sealed housing 101 is greater than the pressure in the cover body 501, so as to promote the dust to flow into the cover body 501 in a directional manner;

[0049] 6) Start the water chiller to introduce cooling water into the water chiller housing to reduce the temperature at the inlet of the molecular pump 201 to be tested and accelerate the accumulation of dust particles;

[0050] 7) Continuously observe and record the operating status of the molecular pump 201 to be tested. If the molecular pump 201 to be tested is running stably, the external gas continuously enters the sealed housing 101 through the flow meter 105, and the dust in the sealed housing 101 enters the molecular pump 201 to be tested through the cover 501 due to the pressure difference;

[0051] 8) When the molecular pump 201 to be tested reaches an unstable operation state, determining quantitative data of the dust resistance capability of the molecular pump 201 to be tested;

[0052] 9) Remove the particle collector 508, weigh the collected dust, and obtain the weight of the backflow particles collected at the first preset position under the rotor of the molecular pump 201 to be tested;

[0053] 10) Repeat steps 1)-3) to start the power member 504 to drive the particle collector 508 to a second preset position;

[0054] 11) Repeat steps 5)-9) to obtain the weight of the backflow particles collected at the second preset position under the rotor of the current molecular pump 201 to be tested, and finally obtain the weight of the backflow particles at different preset positions to obtain the particle backflow prevention capability of the molecular pump 201 to be tested.

[0055] A method for testing the dust resistance of a molecular pump comprises the following steps:

[0056] 1) The mechanical pump 203 and the molecular pump 201 to be tested are in a power-off state, the opening and closing member closes the delivery pipeline 3, the sealing door 106 is opened, and dust of different weights is weighed and placed on the carrying platform 102, and the sealing door 106 is closed;

[0057] 2) Start the air generator and atomizer to stimulate the dust and increase the dust viscosity, start the molecular pump to reduce the pressure inside the cover, open the conveying pipeline, and allow the dust to enter the molecular pump through the conveying pipeline and the cover;

[0058] 3) The cooling machine is connected through the cooling connector, and the coolant generated by the cooling machine enters the cooling pipe through the cooling connector, and then flows from the cooling pipe to the cooling shell, thereby reducing the temperature of the molecular pump and accelerating the deposition of dust, until the controller senses that the molecular pump rotor is in a critical state of instability according to the data of the vibration sensor;

[0059] 4) Turn off the molecular pump and measure the weight of the dust in the molecular pump to quantitatively evaluate the dust resistance of the molecular pump.

[0060] The molecular pump testing system provided in the present application has the following advantages: (1) the testing efficiency of the entire device is high, the risk is low, and the testing cost is low; (2) the dust resistance and particle backflow resistance of the molecular pump can be quantitatively evaluated, effectively improving the development efficiency of the dust resistance structure of the molecular pump; (3) during the entire testing process, the testing equipment and the molecular pump will not be damaged.

[0061] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A molecular pump testing system, characterized in that: include: A molecular pump assembly (2), the molecular pump assembly (2) comprising a molecular pump to be tested (201), the molecular pump to be tested (201) having a containing cavity; Delivery pipeline (3); A dust generating component (1), wherein the molecular pump (201) to be tested is connected to the dust generating component (1) via a delivery pipeline (3), and the dust generated by the dust generating component (1) is delivered to the containing chamber of the molecular pump (201) to be tested via the delivery pipeline (3).

2. The molecular pump testing system according to claim 1, characterized in that: The dust generating assembly (1) comprises a sealed shell (101) and a blower (104); the blower (104) is provided on the inner wall of the sealed shell (101); the conveying pipeline (3) is provided on the side of the sealed shell (101); and the conveying pipeline (3) and the blower (104) are respectively provided on the corresponding two sides of the sealed shell (101).

3. The molecular pump testing system according to claim 2, characterized in that: The dust generating assembly (1) further comprises a carrying platform (102). The carrying platform (102) is arranged inside the sealed housing (101), and the carrying platform (102) is suitable for placing dust.

4. The molecular pump testing system according to claim 3, characterized in that: The dust generating assembly (1) further comprises an atomizing element (103) and a flow meter (105); the flow meter (105) passes through the top of the sealed housing (101) and extends into the sealed housing (101); the atomizing element (103) is arranged on the side wall of the sealed housing (101).

5. The molecular pump testing system according to any one of claims 1 to 4, characterized in that: It also comprises a test cover assembly (5), wherein the test cover assembly (5) is arranged between the molecular pump to be tested (201) and the dust generating assembly (1).

6. The molecular pump testing system according to claim 5, characterized in that: The molecular pump assembly (2) comprises a connecting frame (202), the connecting frame (202) is provided with a top plate (2021), the test cover assembly (5) comprises a cover body (501), the cover body (501) is arranged above the top plate (2021), the molecular pump (201) to be tested is arranged below the top plate (2021), and the communication port (5011) of the cover body (501) is connected to the molecular pump (201) to be tested.

7. The molecular pump testing system according to claim 6, characterized in that: The test cover assembly (5) comprises a first bearing seat (502), a rotating shaft (506) and a second bearing seat (503); the first bearing seat (502) and the second bearing seat (503) are respectively arranged on the side walls corresponding to the cover body (501); the first bearing seat (502) is fixedly arranged on the side wall of the cover body (501); the side wall of the cover body (501) is connected to the second bearing seat (503); the rotating shaft (506) is respectively connected to the first bearing seat (502) and the second bearing seat (503).

8. The molecular pump testing system according to claim 7, characterized in that: The test cover assembly (5) also includes a connecting plate (505), a power piece (504) and a particle collector (508), wherein the particle collector (508) is sleeved on the outer peripheral surface of the rotating shaft (506), the cover body (501) is fixedly connected to the connecting plate (505), the second bearing seat (503) is fixedly arranged on the connecting plate (505), a power piece (504) is arranged between the second bearing seat (503) and the cover body (501), the power piece (504) is arranged above the connecting plate (505), and the power piece (504) is fixedly connected to the rotating shaft (506).

9. The molecular pump testing system according to claim 8, characterized in that: The molecular pump assembly (2) further comprises a mechanical pump (203), and the molecular pump (201) to be tested is connected to the mechanical pump (203) via a vacuum pipeline (4).

10. A method for testing a molecular pump testing system, used for using the molecular pump testing system according to claim 1, characterized in that: When the molecular pump is in a vacuum state, the pressure in the dust generating component (1) is greater than the pressure in the molecular pump, and the dust continuously generated by the dust generating component (1) is transported to the containing chamber of the molecular pump (201) to be tested through the transport pipeline (3) until the molecular pump (201) to be tested is in an unstable state.

Images