Defect detection method for molecular pump impeller

Abstract

The invention discloses a defect detection method for a molecular pump impeller, which comprises the following steps: a detection step, detecting form and location tolerances of a circle where the outer diameter of the blade part is located, a circle where the inner diameter of the blade group is located, an outer circle of the traction part, an end face and a first end face of the blade part and / or a second end face of the traction part when the molecular pump impeller is at different rotating angles through a distance measuring assembly; and determining whether appearance and position defects exist in a circle where the outer diameter of a blade part of the molecular pump impeller is located, a circle where the inner diameter of a blade group is located, an outer circle of a traction part, an end face of the blade part, a first end face and / or a second end face of the traction part or not based on the form and location tolerance. According to the defect detection method for the molecular pump impeller, the specific area where the defects occur on the molecular pump impeller and the types of the defects can be directly and accurately positioned, and follow-up problem tracing and analysis work are greatly facilitated.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of molecular pumps. More specifically, the present invention relates to a defect detection method for a molecular pump impeller. Background Art

[0002] The machining accuracy of the molecular pump impeller is crucial to the performance of the molecular pump. It determines the pneumatic efficiency and stability of the molecular pump, directly affects the pumping speed and compression ratio of the molecular pump, and further affects the stability and service life of the entire molecular pump.

[0003] The existing molecular pump impeller is mainly made by milling and finishing processes of a five-axis machining center, and includes a first end face, a second end face opposite to the first end face, a blade portion having at least one layer of blade portions and processed with the first end face, and a traction portion coaxially connected to the blade portion and processed with the second end face. Since the blades on the blade portion of the existing molecular pump impeller are densely distributed, it is difficult to measure the shape and position tolerances of the molecular pump impeller after milling and finishing. Therefore, in order to ensure that the molecular pump can operate stably and reliably after the impeller is installed on the molecular pump, it is also necessary to perform a dynamic balance test on the molecular pump impeller before installing it on the molecular pump, so as to ensure that the impeller installed on the molecular pump meets the design expectations and meets the requirements for stable and reliable operation of the molecular pump.

[0004] The above-mentioned detection method for the molecular pump impeller has exposed many problems in practical application. Specifically, the above-mentioned detection method can only determine whether the molecular pump impeller product is qualified or not. When the molecular pump impeller is unqualified, it is impossible to directly determine the area causing the defect on the molecular pump impeller and the type of defect, which is not conducive to the development of problem tracing work. Summary of the invention

[0005] In order to solve one or more of the technical problems mentioned above, the present invention provides a defect detection method for a molecular pump impeller, which can directly and accurately locate the specific area where the defects on the molecular pump impeller occur and the type of defects, which is conducive to tracing the causes of the defects.

[0006] According to the present invention, a defect detection method for a molecular pump impeller is provided, wherein the molecular pump impeller comprises a first end face, a second end face opposite to the first end face, a blade portion having at least one layer of blade portions and processed with the first end face, and a traction portion coaxially connected to the blade portion and processed with the second end face, and the detection method comprises the following steps: a preparation step, loading the molecular pump impeller into a tooling device and rotating the molecular pump impeller; a detection step, detecting the form and position tolerances of a circle where the outer diameter of the blade portion is located, the first end face of the blade portion and / or the second end face of the traction portion on the molecular pump impeller at different rotation angles through a distance measuring component, and determining whether the circle where the outer diameter of the blade portion of the molecular pump impeller is located, the outer circle of the traction portion, the first end face of the blade portion and / or the second end face of the traction portion have defects in appearance and position based on the form and position tolerances.

[0007] Further, the detection step includes: detecting the radial tolerance of the circle where the outer diameter of the blade portion of the molecular pump impeller is located when the molecular pump impeller is at different rotation angles by a distance measuring component, determining the actual radial runout of the circle where the outer diameter of the blade portion is located based on the radial tolerance of the circle where the outer diameter of the blade portion is located when the molecular pump impeller is at different rotation angles, and then judging whether the actual radial runout of the circle where the outer diameter of the blade portion is located exceeds the standard radial runout allowed by the circle where the outer diameter of the blade portion is located, and when the judgment result is yes, determining that the circle where the outer diameter of the blade portion is located has a defect in the shape, and when the judgment result is no, determining Determine that there is no defect in the outer shape of the circle where the outer diameter of the blade portion is located; detect the radial tolerance of the circle where the inner diameter of the blade group of the molecular pump impeller is located when the molecular pump impeller is at different rotation angles through the distance measuring component, and determine the actual radial run-out of the circle where the inner diameter of the blade group is located based on the radial tolerance of the circle where the inner diameter of the blade group is located when the molecular pump impeller is at different rotation angles, and then determine whether the actual radial run-out of the circle where the inner diameter of the blade group is located exceeds the standard radial run-out allowed by the circle where the inner diameter of the blade group is located, and when the judgment result is yes, determine that there is a defect in the outer shape of the circle where the inner diameter of the blade group is located, and in the judgment result, When the judgment result is no, it is determined that there is no defect in the outer shape of the circle where the inner diameter of the blade group is located; the radial tolerance of the traction part of the molecular pump impeller when the molecular pump impeller is at different rotation angles is detected by the distance measuring component, and based on the radial tolerance of the outer circle of the traction part when the molecular pump impeller is at different rotation angles, the actual radial runout of the outer circle of the traction part is determined, and then it is determined whether the actual radial runout of the outer circle of the traction part exceeds the standard radial runout allowed by the outer circle of the traction part, and when the judgment result is yes, it is determined that there is a defect in the outer circle of the traction part, and when the judgment result is no, it is determined that the traction part has a defect in the outer shape. The outer circle of the blade portion has no defects in appearance; the shape and position tolerances of the end face of the blade portion of the molecular pump impeller when the molecular pump impeller is at different rotation angles are detected by a distance measuring component, and based on the axial tolerances of the end face of the blade portion when the molecular pump impeller is at different rotation angles, the actual axial runout of the end face of the blade portion is determined, and then it is determined whether the actual axial runout of the end face of the blade portion exceeds the standard axial runout allowed by the end face of the blade portion, and if the judgment result is yes, it is determined that the end face of the blade portion has defects in appearance, and if the judgment result is no, it is determined that the end face of the blade portion has no defects in appearance;The first end face of the molecular pump impeller is detected by the distance measuring component when the molecular pump impeller is at different rotation angles, and the actual axial runout of the first end face is determined based on the axial tolerance of the first end face when the molecular pump impeller is at different rotation angles, and then the actual axial runout of the first end face is determined to be beyond the standard axial runout allowed by the first end face, and if the judgment result is yes, it is determined that the first end face has a defect in shape, and if the judgment result is no, it is determined that the first end face does not have a defect in shape; and / or the second end face of the molecular pump impeller is detected by the distance measuring component when the molecular pump impeller is at different rotation angles, and the actual axial runout of the second end face is determined based on the axial tolerance of the second end face when the molecular pump impeller is at different rotation angles, and then the actual axial runout of the second end face is determined to be beyond the standard axial runout allowed by the second end face, and if the judgment result is yes, it is determined that the second end face has a defect in shape, and if the judgment result is no, it is determined that the second end face does not have a defect in shape. ;

[0008] Further, the detection step includes: determining the actual concentricity of the circle where the outer diameter of the blade portion is located based on the radial tolerance of the blade portion when the molecular pump impeller is at different rotation angles, and then judging whether the actual concentricity of the circle where the outer diameter of the blade portion is located exceeds the standard concentricity allowed by the circle where the outer diameter of the blade portion is located, and when the judgment result is yes, determining that the circle where the outer diameter of the blade portion is located has a defect in position, and when the judgment result is no, determining that the circle where the outer diameter of the blade portion is located has no defect in position; determining the actual concentricity of the circle where the inner diameter of the blade group is located based on the radial tolerance of the blade portion when the molecular pump impeller is at different rotation angles, and then judging whether the inner diameter of the blade group is Whether the actual concentricity of the circle where the inner diameter of the blade group is located exceeds the standard concentricity allowed by the circle where the inner diameter of the blade group is located, and when the judgment result is yes, it is determined that the circle where the inner diameter of the blade group is located has a defect in position, and when the judgment result is no, it is determined that the circle where the inner diameter of the blade group is located does not have a defect in position; based on the radial tolerance of the traction part when the molecular pump impeller is at different rotation angles, the actual concentricity of the outer circle of the traction part is determined, and then it is determined whether the actual concentricity of the outer circle of the traction part exceeds the standard concentricity allowed by the outer circle of the traction part, and when the judgment result is yes, it is determined that the outer circle of the traction part has a defect in position, and when the judgment result is no, it is determined that the outer circle of the traction part There is no defect in the position; based on the axial tolerance of the end face of the blade portion when the molecular pump impeller is at different rotation angles, determine the verticality of the end face of the blade portion relative to the central axis of the molecular pump impeller, and then judge whether the actual verticality of the end face of the blade portion exceeds the standard verticality allowed by the end face of the blade portion, and if the judgment result is yes, determine that there is a defect in the position of the end face of the blade portion, and if the judgment result is no, determine that there is a defect in the position of the end face of the blade portion; based on the axial tolerance of the first end face when the molecular pump impeller is at different rotation angles, determine the verticality of the first end face relative to the central axis of the molecular pump impeller, and then judge the first Whether the actual verticality of the end face exceeds the standard verticality allowed by the first end face, and if the judgment result is yes, it is determined that there is a defect in the position of the first end face, and if the judgment result is no, it is determined that there is a defect in the position of the first end face; and / or based on the axial tolerance of the second end face when the molecular pump impeller is at different rotation angles, the verticality of the second end face relative to the central axis of the molecular pump impeller is determined, and then it is determined whether the actual verticality of the second end face exceeds the standard verticality allowed by the second end face, and if the judgment result is yes, it is determined that there is a defect in the position of the second end face, and if the judgment result is no, it is determined that there is a defect in the position of the second end face.

[0009] Further, the step of determining the actual radial runout of the circle where the outer diameter of the blade portion is located includes: selecting the maximum selected value with the largest absolute value and no abnormality from the radial tolerance of the circle where the outer diameter of the blade portion is located when the molecular pump impeller is at different rotation angles, and using it as the actual radial runout of the circle where the outer diameter of the blade portion is located; the step of determining the actual radial runout of the circle where the inner diameter of the blade group is located includes: selecting the maximum selected value with the largest absolute value and no abnormality from the radial tolerance of the circle where the inner diameter of the blade group is located when the molecular pump impeller is at different rotation angles, and using it as the actual radial runout of the circle where the inner diameter of the blade group is located; the step of determining the actual radial runout of the outer circle of the traction portion includes: selecting the maximum selected value with the largest absolute value and no abnormality from the radial tolerance of the outer circle of the traction portion when the molecular pump impeller is at different rotation angles, and using it as the actual radial runout of the circle where the inner diameter of the blade group is located. The actual radial run-out of the outer circle of the traction portion; the step of determining the actual axial run-out of the end face of the blade portion includes: selecting the maximum selected value with the largest absolute value and no abnormality from the axial tolerance of the end face of the blade portion when the molecular pump impeller is at different rotation angles, and using it as the actual axial run-out of the end face of the blade portion; the step of determining the actual axial run-out of the first end face includes: selecting the maximum selected value with the largest absolute value and no abnormality from the axial tolerance of the first end face when the molecular pump impeller is at different rotation angles, and using it as the actual axial run-out of the first end face; and / or the step of determining the actual axial run-out of the second end face includes: selecting the maximum selected value with the largest absolute value and no abnormality from the axial tolerance of the outer circle of the second end face when the molecular pump impeller is at different rotation angles, and using it as the actual axial run-out of the second end face.

[0010] Further, the step of determining the actual concentricity of the circle where the outer diameter of the blade portion is located includes: selecting the maximum selected value with the largest value and the minimum selected value with the smallest value from the radial tolerance of the circle where the outer diameter of the blade portion is located when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the actual concentricity of the circle where the outer diameter of the blade portion is located; the step of determining the actual concentricity of the circle where the inner diameter of the blade group is located includes: selecting the maximum selected value with the largest value and the minimum selected value with the smallest value from the radial tolerance of the circle where the inner diameter of the blade group is located when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the actual concentricity of the circle where the inner diameter of the blade group is located; the step of determining the actual concentricity of the outer circle of the traction portion includes: selecting the maximum selected value with the largest value and the minimum selected value with the smallest value from the radial tolerance of the outer circle of the traction portion when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the actual concentricity of the outer circle of the traction portion ; The step of determining the verticality of the end face of the blade portion relative to the central axis of the molecular pump impeller includes: selecting the maximum selected value with the largest value and the minimum selected value with the smallest value from the axial tolerance of the end face of the blade portion when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the verticality of the end face of the blade portion; The step of determining the verticality of the first end face relative to the central axis of the molecular pump impeller includes: selecting the maximum selected value with the largest value and the minimum selected value from the axial tolerance of the first end face when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the verticality of the first end face; and / or the step of determining the verticality of the second end face relative to the central axis of the molecular pump impeller includes: selecting the maximum selected value with the largest value and the minimum selected value from the axial tolerance of the second end face when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the verticality of the second end face.

[0011] Furthermore, the distance measuring assembly includes a first magnetic base that can be adsorbed on the yaw meter, a first adjustable bracket arranged on the first magnetic base, and a first error table arranged on the end of the first adjustable bracket away from the first magnetic base, and the first error table includes a lever dial indicator or a lever micrometer.

[0012] Furthermore, the distance measuring assembly also includes a second magnetic base capable of being adsorbed on the yaw meter, a second adjustable bracket arranged on the second magnetic base, and a second error table arranged on the end of the second adjustable bracket away from the second magnetic base, and the second error table includes a standard dial indicator or a standard micrometer.

[0013] Furthermore, the different rotation angles at which the molecular pump impeller is located include more than eight selected rotation angles, the number of different rotation angles is more than six, and the more than eight selected rotation angles are evenly distributed within the circumferential angle of one rotation of the molecular pump impeller.

[0014] Furthermore, the tooling equipment includes a yaw meter and an adapter shaft, and the preparation step includes fixedly installing the molecular pump impeller outside the adapter shaft, then installing and clamping the adapter shaft with the molecular pump impeller on the yaw meter, and driving the molecular pump impeller to rotate on the yaw meter.

[0015] Furthermore, the adapter shaft is a tensioning shaft used to assemble the molecular pump impeller and is tightened by pneumatic or hydraulic means.

[0016] The defect detection method for a molecular pump impeller of the present invention has the advantages of: by detecting the shape and position tolerances of the circle where the outer diameter of the blade portion is located, the circle where the inner diameter of the blade group is located, the end face of the blade portion, the first end face and / or the second end face of the traction portion when the molecular pump impeller is at different rotation angles, and by comparing the detection results with the set standard tolerances (such as standard radial runout, standard axial runout, standard concentricity and standard verticality), it is determined whether there are defects in the outer circle of the traction portion of the molecular pump impeller, the first end face of the blade portion and / or the second end face of the traction portion. In other words, the defect detection method can not only replace or assist the dynamic balancing test to determine whether the molecular pump impeller is qualified, but also directly and accurately locate the specific area and type of defects on the molecular pump impeller, which is conducive to tracing the cause of the defects. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By reading the following detailed description with reference to the accompanying drawings, the above and other objects, features and advantages of the exemplary embodiments of the present invention will become readily understood. In the accompanying drawings, several embodiments of the present invention are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0018] Figure 1 A flow chart showing a defect detection method for a molecular pump impeller of the present invention is shown;

[0019] Figure 2 Shows the implementation Figure 1 The tooling equipment and molecular pump impeller required for the defect detection method shown;

[0020] Figure 3 Shows Figure 2 The front view of the molecular pump impeller and the tooling equipment in the assembled state is shown;

[0021] Figure 4 Shows Figure 2 The shown figure is a partial cross-sectional view of the molecular pump impeller and tooling equipment in the assembled state.

[0022] Explanation of the reference numerals: 100, molecular pump impeller; 101, first end face; 102, second end face; 103, blade portion; 1031, blade group; 104, traction portion; 105, circle where the outer diameter is located; 106, circle where the inner diameter is located; 107, outer circle of the traction portion; 108, end face of the blade portion; 200, tooling equipment; 201, deflection meter; 202, adapter shaft. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0024] The embodiment of the present invention provides a defect detection method for a molecular pump impeller. Figure 1 and Figure 2 As shown, the method comprises the following steps:

[0025] Step S1 is a preparation step, in which the molecular pump impeller 100 is installed on the tooling equipment 200 and the molecular pump impeller 100 is rotated.

[0026] In the above steps, if Figure 3 and Figure 4 As shown, as an example, the tooling equipment 200 includes a deflection meter 201 and an adapter shaft 202. Preferably, the adapter shaft 202 can be a tensioning shaft that is tightened by pneumatic or hydraulic pressure, specifically a gas expansion shaft or a hydraulic expansion shaft. When in use, first pass the gas expansion shaft or the hydraulic expansion shaft through the molecular pump impeller 100 and fix it, then install the gas expansion shaft or the hydraulic expansion shaft into and clamp it on the deflection meter 201, thereby ensuring that the molecular pump impeller 100 can be accurately installed on the deflection meter, so that the molecular pump impeller 100 and the adapter shaft 202 can be rotated in the deflection meter 201. The tooling equipment 200 can also be replaced by other equipment, specifically, it can realize the clamping of the molecular pump impeller 100 while ensuring that the molecular pump impeller 100 can rotate around its own central axis.

[0027] Step S2, a detection step, detecting the shape and position tolerances A of the outer diameter circle 105, the inner diameter circle 106, the outer circle 107 of the traction portion, the end face 108 of the blade group, the first end face 101 and / or the second end face 102 of the molecular pump impeller 100 at different rotation angles by using a distance measuring component. n , and based on the geometric tolerance A nDetermine whether the outer diameter circle 105, the inner diameter circle 106, the outer circle 107 of the traction portion, the end face 108 of the blade group 1031 of the molecular pump impeller 100 have defects in shape and position.

[0028] Specifically, when detecting the form and position tolerance, the distance measuring component first contacts the surface of the molecular pump impeller 100, and then the molecular pump impeller 100 is passively rotated in the yaw meter 201, and the selected position of the molecular pump impeller 100 (such as the outer diameter of the blade portion 103) is measured at a rotation angle of 0° until the rotation angle reaches 360°, and the form and position tolerance of the selected position of the molecular pump impeller 100 at six rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) is obtained. Then, the aforementioned process can be repeated to verify the accuracy of each form and position tolerance.

[0029] By testing the shape and position tolerances of the above six parts, it can be determined whether the traction part 104 and the blade part 103 of the molecular pump impeller 100 have defects, and the location where the defects occur can be directly located.

[0030] As an example, the distance measuring component includes a first magnetic base that can be adsorbed on the yaw meter, a first adjustable bracket arranged on the first magnetic base, and a first error table arranged on the end of the first adjustable bracket away from the first magnetic base. The distance measuring component also includes a second magnetic base that can be adsorbed on the yaw meter, a second adjustable bracket arranged on the second magnetic base, and a second error table arranged on the end of the second adjustable bracket away from the second magnetic base. Among them, the first adjustable bracket and the second adjustable bracket can fix the first error table and the second error table at any position in space. As an example, the first adjustable bracket and the second adjustable bracket both include adjustable joints or sliders that can achieve fine adjustment in the horizontal and vertical directions, thereby meeting the precise adjustment of the position of the first error table installed on the first adjustable bracket and the second error table on the second adjustable bracket. The first adjustable bracket and the second adjustable bracket may also have a certain telescopic structure, thereby changing the effective length of the first adjustable bracket and the second adjustable bracket. The specific setting form is not limited here.

[0031] The first error table is suitable for measuring the narrow area between the blades 103 which is difficult to measure by the second error table. Specifically, the first error table includes a lever dial indicator or a lever micrometer, and the second error table includes a standard dial indicator or a standard micrometer. Due to their special lever mechanism, the lever dial indicator and the lever micrometer have a more flexible structure and are suitable for occasions in narrower areas, such as the measurement of the form and position tolerances of the narrow area between the blades 103 of the molecular pump impeller 100 (for example, the circle 106 where the inner diameter of the blade 103 is located and the end face 108 of the blade group). The standard dial indicator and the standard micrometer can be applied to the measurement of the form and position tolerances of the circle 105 where the outer diameter of the blade group 1031 is located, the outer circle 107 of the traction part, the first end face 101 and / or the second end face 102 because of their simple structure and more convenient use.

[0032] In the above step S2, the detection step S2 further includes:

[0033] S201, detecting the radial tolerance A1 of the circle 105 where the outer diameter of the blade group 1031 of the molecular pump impeller 100 is located when the molecular pump impeller 100 is at different rotation angles n , determine the actual radial runout R1 of the circle 105 where the outer diameter of the blade group 1031 is located, and then determine whether the actual radial runout R1 of the circle 105 where the outer diameter of the blade group 1031 is located exceeds the standard radial runout R1 allowed by the circle 105 where the outer diameter of the blade group 1031 is located s , and when the judgment result is yes, it is determined that the circle 105 where the outer diameter of the blade group 1031 is located has defects in the appearance, and when the judgment result is no, it is determined that the circle 105 where the outer diameter of the blade group 1031 is located has no defects in the appearance.

[0034] In step S201, the measuring head of the standard dial gauge or the standard micrometer of the first error meter in the distance measuring assembly is placed against the top surface of any blade of the blade group 1031 of the blade portion 103 of the molecular pump impeller 100, and the molecular pump impeller 100 is rotated to obtain the radial tolerance A1 of the circle 105 where the outer diameter of the blade group 1031 is located when the molecular pump blade is at multiple rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) through the standard dial gauge or the standard micrometer. n , for example A1 n =[A10,A1 60 , A1 120 , A1 180 , A1 240 , A1 300 , A1 360 ].

[0035] In step S201, the step of determining the actual radial runout of the circle 105 where the outer diameter of the blade set 1031 is located includes: determining the radial tolerance A1 of the circle 105 where the outer diameter of the blade set 1031 is located when the molecular pump impeller 100 is at different rotation angles. n Select the maximum selected value A1 with the largest absolute value and no abnormality (for example, removing abnormal values ​​based on the Laida criterion). max , and use it as the actual radial runout R1 of the circle 105 where the outer diameter of the blade group 1031 is located.

[0036] S202, detecting the radial tolerance A2 of the circle 106 where the inner diameter of the blade portion 103 of the molecular pump impeller 100 is located when the molecular pump impeller 100 is at different rotation angles n , determine the actual radial runout R2 of the circle 106 where the inner diameter of the blade portion 103 is located, and then determine whether the actual radial runout R2 of the circle 106 where the inner diameter of the blade portion 103 is located exceeds the standard radial runout R2 allowed by the circle 106 where the inner diameter of the blade portion 103 is located s , and when the judgment result is yes, it is determined that the circle 106 where the inner diameter of the blade portion 103 is located has defects in the shape, and when the judgment result is no, it is determined that the circle 106 where the inner diameter of the blade portion 103 is located has no defects in the shape.

[0037] In step S202, the measuring head of the lever dial indicator or the lever micrometer in the second error table in the distance measuring assembly is placed against the bottom surface between any two blade groups 1031 of the blade portion 103 of the molecular pump impeller 100, and the molecular pump impeller 100 is rotated. The radial tolerance A2 of the circle 106 where the inner diameter of the blade group 1031 is located when the molecular pump impeller 100 is at multiple rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) is obtained by the lever dial indicator or the lever micrometer. n , A2 n =[A20,A2 60 , A2 120 , A2 180 , A2 240 , A2 300 , A2 360 ].

[0038] In step S202, the step of determining the actual radial runout R2 of the circle 106 where the inner diameter of the blade portion 103 is located includes: determining the radial tolerance A2 of the circle 106 where the inner diameter of the blade portion 103 is located at different rotation angles of the molecular pump impeller 100 from the radial tolerance A2 of the circle 106 where the inner diameter of the blade portion 103 is located at different rotation angles. n Select the maximum selected value A2 with the largest absolute value and no abnormality (for example, removing abnormal values ​​based on the Laida criterion). max , and it is taken as the actual radial runout R2 of the circle 106 where the inner diameter of the blade portion 103 is located.

[0039] S203, detecting the radial tolerance A3 of the outer circle 107 of the traction portion when the molecular pump impeller 100 is at different rotation angles n , determine the actual radial runout R3 of the outer circle 107 of the traction part, and then judge whether the actual radial runout R3 of the outer circle 107 of the traction part exceeds the standard radial runout R3 allowed by the outer circle 107 of the traction part s , and when the judgment result is yes, it is determined that the outer circle 107 of the traction portion has defects in appearance, and when the judgment result is no, it is determined that the outer circle 107 of the traction portion does not have defects in appearance.

[0040] In step S203, the measuring head of the standard dial gauge or the standard micrometer of the first error gauge in the distance measuring assembly is placed against the outer circle 107 of the traction portion of the molecular pump impeller 100, and the molecular pump impeller 100 is rotated. The radial tolerance A3 of the outer circle 107 of the traction portion when the molecular pump impeller 100 is at multiple rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) is obtained by the standard dial gauge or the standard micrometer. n , for example A3 n =[A30, A3 60 , A3 120 , A3 180 , A3 240 , A3 300 , A3 360 ].

[0041] In step S203, the step of determining the actual radial runout R3 of the outer circle 107 of the traction portion includes: determining the radial tolerance A3 of the outer circle 107 of the traction portion when the molecular pump impeller 100 is at different rotation angles from the radial tolerance A3 of the outer circle 107 of the traction portion n Select the maximum selected value A3 with the largest absolute value and no abnormality (for example, outliers are removed based on the Laida criterion). max , and use it as the actual radial runout R3 of the outer circle 107 of the traction portion.

[0042] S204, detecting the axial tolerance A4 of the end surface 108 of the blade group of the molecular pump impeller 100 when the molecular pump impeller 100 is at different rotation angles n , determine the actual axial runout L1 of the end face 108 of the blade group, and then determine whether the actual axial runout L1 of the end face 108 of the blade group exceeds the standard axial runout L1 allowed by the end face 108 of the blade group s , and when the judgment result is yes, it is determined that the end surface 108 of the blade group has defects in appearance, and when the judgment result is no, it is determined that the end surface 108 of the blade group does not have defects in appearance.

[0043] In step S204, the measuring head of the lever dial indicator or the lever micrometer in the second error table in the distance measuring assembly is placed against the end face 108 of the blade group, and the molecular pump impeller 100 is rotated. The axial tolerance A4 of the end face 108 of the blade group when the molecular pump impeller 100 is at multiple rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) is obtained by the lever dial indicator or the lever micrometer. n , such as A4 n =[A40,A4 60 , A4 120 , A4 180 , A4 240 , A4 300 , A4 360 ].

[0044] In step S204, the step of determining the actual axial runout L4 of the end face 108 of the blade assembly includes: determining the axial tolerance A4 of the end face 108 of the blade assembly at different rotation angles of the molecular pump impeller 100 n Select the maximum selected value A4 with the largest absolute value and no abnormality (for example, removing abnormal values ​​based on the Laida criterion). max , and use it as the actual axial runout L1 of the end face 108 of the blade group.

[0045] S205, detecting the axial tolerance A5 of the first end surface 101 of the molecular pump impeller 100 when the molecular pump impeller 100 is at different rotation angles n , determine the actual axial runout L2 of the first end face 101, and then determine whether the actual axial runout L2 of the first end face 101 exceeds the standard axial runout L2 allowed by the first end face 101 s , and when the judgment result is yes, it is determined that the first end surface 101 has defects in appearance, and when the judgment result is no, it is determined that the first end surface 101 does not have defects in appearance.

[0046] In step S205, the measuring head of the standard dial gauge or the standard micrometer of the first error gauge in the distance measuring assembly is placed against the first end face 101, and the molecular pump impeller 100 is rotated to obtain the axial tolerance A5 of the first end face 101 when the molecular pump impeller 100 is at multiple rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) by the standard dial gauge or the standard micrometer. n , such as A5 n =[A50,A5 60 , A5 120 , A5 180 , A5 240 , A5 300 , A5 360 ].

[0047] In step S205, the step of determining the actual axial runout L2 of the first end surface 101 includes: determining the axial tolerance A5 of the first end surface 101 at different rotation angles of the molecular pump impeller 100 from the axial tolerance A5 of the first end surface 101 at different rotation angles. n Select the maximum selected value A5 with the largest absolute value and no abnormality (for example, removing abnormal values ​​based on the Laida criterion). max , and take it as the actual axial runout L2 of the first end face 101.

[0048] S206, detecting the axial tolerance A6 of the second end surface 102 of the molecular pump impeller 100 when the molecular pump impeller 100 is at different rotation angles n , determine the actual axial runout L3 of the second end face 102, and then determine whether the actual axial runout L3 of the second end face 102 exceeds the standard axial runout L3 allowed by the second end face 102 s , and when the judgment result is yes, it is determined that the second end surface 102 has defects in appearance, and when the judgment result is no, it is determined that the second end surface 102 has no defects in appearance.

[0049] In step S206, the measuring head of the standard dial gauge or the standard micrometer of the first error gauge in the distance measuring assembly is placed against the second end face 102, and the molecular pump impeller 100 is rotated to obtain the axial tolerance A6 of the second end face 102 when the molecular pump impeller 100 is at multiple rotation angles (0°, 60°, 120°, 180°, 240°, 300°, 360°) by the standard dial gauge or the standard micrometer. n , such as A6 n =[A60,A6 60 , A6 120 , A6 180 , A6 240 , A6 300 , A6 360 ].

[0050] In step S206, the step of determining the actual axial runout L3 of the second end surface 102 includes: calculating the axial tolerance A6 of the outer circle of the second end surface 102 at different rotation angles of the molecular pump impeller 100 n Select the maximum selected value A6 with the largest absolute value and no abnormality (for example, removing abnormal values ​​based on the Laida criterion). max , and use it as the actual axial runout L3 of the second end face 102.

[0051] In the above steps S201 to S206, the actual concentricity of the outer diameter circle 105 of the blade group 1031, the inner diameter circle 106 of the blade part 103 and the outer circle 107 of the traction part can also be determined based on the radial tolerance obtained by detecting the outer diameter circle 105 of the blade group 1031, the inner diameter circle 106 of the blade part 103 and the outer circle 107 of the traction part. And the actual verticality of the end face 108, the first end face 101 and the second end face 102 of the blade group can be determined by the axial tolerance obtained by detecting the end face 108, the first end face 101 and the second end face 102 of the blade group. Specifically:

[0052] S2011, based on the radial tolerance A1 of the blade portion 103 when the molecular pump impeller 100 is at different rotation angles n , determine the actual concentricity C1 of the circle 105 where the outer diameter of the blade group 1031 is located, and then determine whether the actual concentricity C1 of the circle 105 where the outer diameter of the blade group 1031 is located exceeds the standard concentricity C1 allowed by the circle 105 where the outer diameter of the blade group 1031 is located s , and when the judgment result is yes, it is determined that the circle 105 where the outer diameter of the blade group 1031 is located has a defect in the position, and when the judgment result is no, it is determined that the circle 105 where the outer diameter of the blade group 1031 is located has no defect in the position;

[0053] The radial tolerance A1 of the blade portion 103 when the molecular pump impeller 100 is at different rotation angles is n The step of determining the actual concentricity C1 of the circle 105 where the outer diameter of the blade group 1031 is located includes: determining the radial tolerance A1 of the circle 105 where the outer diameter of the blade group 1031 is located when the molecular pump impeller 100 is at different rotation angles. n The maximum selected value A1 with the largest value among the non-abnormal values ​​(for example, removing abnormal values ​​based on the Laida criterion) max The minimum value A1 with the smallest sum min , and set the maximum selected value A1 max Subtract the minimum selected value A1 min The difference is taken as the actual concentricity C1 of the circle 105 where the outer diameter of the blade assembly 1031 is located;

[0054] S2021, based on the radial tolerance A2 of the blade portion 103 when the molecular pump impeller 100 is at different rotation angles n , determine the actual concentricity C2 of the circle 106 where the inner diameter of the blade portion 103 is located, and then determine whether the actual concentricity C2 of the circle 106 where the inner diameter of the blade portion 103 is located exceeds the standard concentricity C2 allowed by the circle 106 where the inner diameter of the blade portion 103 is located s, and when the judgment result is yes, it is determined that the circle 106 where the inner diameter of the blade portion 103 is located has a defect in the position, and when the judgment result is no, it is determined that the circle 106 where the inner diameter of the blade portion 103 is located has no defect in the position;

[0055] Wherein, based on the radial tolerance A2 of the blade portion 103 when the molecular pump impeller 100 is at different rotation angles n The step of determining the actual concentricity C2 of the circle 106 where the inner diameter of the blade portion 103 is located includes: determining the radial tolerance A2 of the circle 106 where the inner diameter of the blade portion 103 is located when the molecular pump impeller 100 is at different rotation angles. n Select the maximum value A2 with the largest value among the non-abnormal values ​​(for example, remove the abnormal values ​​based on the Laida criterion) max The minimum value A2 with the smallest sum min , and set the maximum selected value A2 max Subtract the minimum selected value A2 min The difference is taken as the actual concentricity C2 of the circle 106 where the inner diameter of the blade portion 103 is located;

[0056] S2031, based on the radial tolerance A3 of the traction portion 104 when the molecular pump impeller 100 is at different rotation angles n , determine the actual concentricity C3 of the outer circle 107 of the traction part, and then determine whether the actual concentricity C3 of the outer circle 107 of the traction part exceeds the standard concentricity C3 allowed by the outer circle 107 of the traction part s , and when the judgment result is yes, it is determined that the outer circle 107 of the traction portion has a defect in position, and when the judgment result is no, it is determined that the outer circle 107 of the traction portion does not have a defect in position;

[0057] Wherein, based on the radial tolerance A3 of the traction portion 104 when the molecular pump impeller 100 is at different rotation angles n The step of determining the actual concentricity C3 of the outer circle 107 of the traction portion includes: determining the radial tolerance A3 of the outer circle 107 of the traction portion when the molecular pump impeller 100 is at different rotation angles. n The maximum selected value A3 with the largest value among the non-abnormal values ​​(for example, removing abnormal values ​​based on the Laida criterion) max The minimum value with the smallest sum value is A3 min , and set the maximum selected value A3 max Subtract the minimum selected value A3 min The difference is taken as the actual concentricity C3 of the outer circle 107 of the traction portion;

[0058] S2041, based on the axial tolerance A4 of the end surface 108 of the blade assembly when the molecular pump impeller 100 is at different rotation angles n, determine the verticality P1 of the end face 108 of the blade group relative to the central axis of the molecular pump impeller 100, and then determine whether the actual verticality P1 of the end face 108 of the blade group exceeds the standard verticality P1 allowed by the end face 108 of the blade group s , and when the judgment result is yes, it is determined that there is a defect at the position of the end surface 108 of the blade group, and when the judgment result is no, it is determined that there is no defect at the position of the end surface 108 of the blade group;

[0059] The axial tolerance A4 of the end face 108 of the blade assembly at different rotation angles of the molecular pump impeller 100 is n The step of determining the verticality P1 of the end face 108 of the blade set relative to the central axis of the molecular pump impeller 100 includes: determining the axial tolerance A4 of the end face 108 of the blade set at different rotation angles of the molecular pump impeller 100; n Select the maximum value A4 with the largest value among the non-abnormal values ​​(for example, remove the abnormal values ​​based on the Laida criterion) max The minimum value with the smallest sum value is A4 min , and set the maximum selected value A4 max Subtract the minimum selected value A4 min The difference is taken as the verticality P1 of the end surface 108 of the blade assembly;

[0060] S2051, based on the axial tolerance A5 of the first end surface 101 when the molecular pump impeller 100 is at different rotation angles n , determine the verticality P2 of the first end face 101 relative to the central axis of the molecular pump impeller 100, and then determine whether the actual verticality P2 of the first end face 101 exceeds the standard verticality P2 allowed by the first end face 101 s , and when the judgment result is yes, it is determined that there is a defect at the position of the first end surface 101, and when the judgment result is no, it is determined that there is no defect at the position of the first end surface 101;

[0061] Wherein, based on the axial tolerance A5 of the first end surface 101 when the molecular pump impeller 100 is at different rotation angles n The step of determining the verticality P2 of the first end face 101 relative to the central axis of the molecular pump impeller 100 includes: determining the axial tolerance A5 of the first end face 101 at different rotation angles of the molecular pump impeller 100; n Select the maximum value A5 with the largest value among the non-abnormal values ​​(for example, removing abnormal values ​​based on the Laida criterion) max The minimum value with the smallest sum value is A5 min , and set the maximum value A5 max Subtract the minimum selected value A5 min The difference between the values ​​of and is taken as the verticality P2 of the first end surface 101;

[0062] S2061, based on the axial tolerance A6 of the second end surface 102 when the molecular pump impeller 100 is at different rotation angles n , determine the verticality P3 of the second end face 102 relative to the central axis of the molecular pump impeller 100, and then determine whether the actual verticality P3 of the second end face 102 exceeds the standard verticality P3 allowed by the second end face 102 s , and when the judgment result is yes, it is determined that there is a defect at the position of the second end surface 102, and when the judgment result is no, it is determined that there is no defect at the position of the second end surface 102.

[0063] The axial tolerance A6 of the second end surface 102 at different rotation angles of the molecular pump impeller 100 is n The step of determining the verticality P3 of the second end surface 102 relative to the central axis of the molecular pump impeller 100 includes: determining the axial tolerance A6 of the second end surface 102 at different rotation angles of the molecular pump impeller 100 from the axial tolerance A6 of the second end surface 102 at different rotation angles of the molecular pump impeller 100 n Select the maximum value A6 with the largest value among the non-abnormal values ​​(for example, remove the abnormal values ​​based on the Laida criterion) max The minimum value with the smallest sum value is A6 min , and set the maximum selected value A6 max Subtract the minimum selected value A6 min The difference between and is taken as the verticality P3 of the second end face 102.

[0064] Table 1: The radial runout and axial runout threshold values ​​of the molecular pump impeller

[0065]

[0066] In the table above:

[0067] R1 s The standard radial runout allowed by the circle 105 where the outer diameter of the blade assembly 1031 is located;

[0068] R2 s The standard radial runout allowed by the circle 106 where the inner diameter of the blade portion 103 is located;

[0069] R3 s The standard radial runout allowed by the outer circle 107 of the traction part;

[0070] L1 s The standard axial runout allowed by the end face 108 of the blade assembly;

[0071] L2 s is the standard axial runout allowed by the first end face 101;

[0072] L3 s It is the standard axial runout allowed by the second end surface 102.

[0073] Table 2: Concentricity and verticality threshold values ​​of molecular pump impellers

[0074]

[0075] In the table above:

[0076] C1 s The standard concentricity allowed by the circle 105 where the outer diameter of the blade assembly 1031 lies;

[0077] C2 s The standard concentricity allowed by the circle 106 where the inner diameter of the blade portion 103 lies;

[0078] C3 s The standard concentricity allowed by the outer circle 107 of the traction part;

[0079] P1 s The standard verticality allowed for the end face 108 of the blade assembly;

[0080] P2 s The standard verticality allowed by the first end surface 101;

[0081] P3 s It is the standard verticality allowed by the second end surface 102.

[0082] Through a large number of experimental verifications, when the defect detection method selects the corresponding standard threshold value according to Table 1 and Table 2 above, the defect detection method can not only detect defects in the processing of the molecular pump impeller 100, but also determine whether the impeller processing quality meets the initial imbalance requirement of the impeller dynamic balance, that is, when all the above conditions are met, the dynamic balance accuracy of the molecular pump impeller 100 after adjustment can reach G1 level (G1 level refers to the highest level in dynamic balance accuracy, which is suitable for high-precision equipment that is very sensitive to vibration).

[0083] In summary, the present application provides a defect detection method for a molecular pump impeller 100, which detects the shape and position tolerances of the outer diameter circle 105, the inner diameter circle 106, the outer circle 107 of the traction part, the end face 108 of the blade group 1031, the first end face 101 and / or the second end face 102 when the molecular pump impeller 100 is at different rotation angles, and then compares the detection results with the set standard tolerances, so as to determine whether there are defects in the shape and position of the outer diameter circle 105, the inner diameter circle 106, the outer circle 107 of the traction part, the end face 108 of the blade group 1031 of the molecular pump impeller 100, and further accurately locate the specific area where the defects on the molecular pump impeller 100 occur and the type of the defects.

[0084] In the above description of the present application, unless otherwise clearly specified and limited, the terms "fixed", "installed", "connected" or "connected" and the like should be understood in a broad sense. For example, with regard to the term "connection", it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise clearly defined in the present application, those skilled in the art can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0085] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "inner", "outer", "axial", "radial", "circumferential" and the like, which indicate orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings of the present application, and are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the devices or elements involved must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0086] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinals are only used for descriptive purposes and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0087] Although multiple embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may conceive of many changes, modifications, and alternatives without departing from the thought and spirit of the present invention. It should be understood that in the process of practicing the present invention, various alternatives to the embodiments of the present invention described herein may be adopted. The appended claims are intended to define the scope of protection of the present invention, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A defect detection method for a molecular pump impeller, characterized in that: The molecular pump impeller comprises a first end face, a second end face opposite to the first end face, a blade portion having at least one layer of blade groups and processed with the first end face, and a traction portion coaxially connected to the blade portion and processed with the second end face, and the detection method comprises the following steps: A preparation step, installing the molecular pump impeller on a tooling device and rotating the molecular pump impeller; The detection step is to detect the shape and position tolerances of the circle where the outer diameter of the blade part is located, the circle where the inner diameter of the blade group is located, the outer circle of the traction part, the end face of the blade part, the first end face and / or the second end face of the traction part when the molecular pump impeller is at different rotation angles through a distance measuring component, and determine whether there are defects in the shape and position of the circle where the outer diameter of the blade part of the molecular pump impeller is located, the circle where the inner diameter of the blade group is located, the outer circle of the traction part, the end face of the blade part, the first end face and / or the second end face of the traction part based on the shape and position tolerances.

2. The defect detection method according to claim 1, characterized in that: The detection step comprises: Detecting the radial tolerance of the circle where the outer diameter of the blade portion of the molecular pump impeller is located when the molecular pump impeller is at different rotation angles by a distance measuring component, determining the actual radial runout of the circle where the outer diameter of the blade portion is located based on the radial tolerance of the circle where the outer diameter of the blade portion is located when the molecular pump impeller is at different rotation angles, and then judging whether the actual radial runout of the circle where the outer diameter of the blade portion is located exceeds the standard radial runout allowed by the circle where the outer diameter of the blade portion is located, and if the judgment result is yes, determining that the circle where the outer diameter of the blade portion is located has a defect in the shape, and if the judgment result is no, determining that the circle where the outer diameter of the blade portion is located has no defect in the shape; Detecting the radial tolerance of the inner diameter circle of the blade group of the molecular pump impeller when the molecular pump impeller is at different rotation angles by a distance measuring component, determining the actual radial runout of the inner diameter circle of the blade group based on the radial tolerance of the inner diameter circle of the blade group when the molecular pump impeller is at different rotation angles, and then judging whether the actual radial runout of the inner diameter circle of the blade group exceeds the standard radial runout allowed by the inner diameter circle of the blade group, and if the judgment result is yes, determining that the inner diameter circle of the blade group has defects in appearance, and if the judgment result is no, determining that the inner diameter circle of the blade group has no defects in appearance; Detecting the radial tolerance of the outer circle of the traction part when the molecular pump impeller is at different rotation angles by a distance measuring component, determining the actual radial runout of the outer circle of the traction part based on the radial tolerance of the outer circle of the traction part when the molecular pump impeller is at different rotation angles, and then judging whether the actual radial runout of the outer circle of the traction part exceeds the standard radial runout allowed by the outer circle of the traction part, and if the judgment result is yes, determining that the outer circle of the traction part has a defect in appearance, and if the judgment result is no, determining that the outer circle of the traction part has no defect in appearance; Detecting the shape and position tolerance of the end face of the blade portion of the molecular pump impeller when the molecular pump impeller is at different rotation angles by means of a distance measuring component, determining the actual axial runout of the end face of the blade portion based on the axial tolerance of the end face of the molecular pump impeller when the molecular pump impeller is at different rotation angles, and then judging whether the actual axial runout of the end face of the blade portion exceeds the standard axial runout allowed by the end face of the blade portion, and if the judgment result is yes, determining that the end face of the blade portion has a defect in appearance, and if the judgment result is no, determining that the end face of the blade portion does not have a defect in appearance; Detecting the shape and position tolerances of the first end face of the molecular pump impeller when the molecular pump impeller is at different rotation angles by means of a distance measuring component, determining the actual axial runout of the first end face based on the axial tolerances of the first end face when the molecular pump impeller is at different rotation angles, and then determining whether the actual axial runout of the first end face exceeds the standard axial runout allowed by the first end face, and if the judgment result is yes, determining that the first end face has a defect in appearance, and if the judgment result is no, determining that the first end face has no defect in appearance; and / or The shape and position tolerances of the second end face of the molecular pump impeller when the molecular pump impeller is at different rotation angles are detected by a distance measuring component, and the actual axial runout of the second end face is determined based on the axial tolerances of the second end face when the molecular pump impeller is at different rotation angles. Then, it is determined whether the actual axial runout of the second end face exceeds the standard axial runout allowed by the second end face, and when the judgment result is yes, it is determined that the second end face has defects in appearance, and when the judgment result is no, it is determined that the second end face does not have defects in appearance.

3. The defect detection method according to claim 2, characterized in that: The detection step comprises: Based on the radial tolerance of the blade portion when the molecular pump impeller is at different rotation angles, determine the actual concentricity of the circle where the outer diameter of the blade portion is located, and then judge whether the actual concentricity of the circle where the outer diameter of the blade portion is located exceeds the standard concentricity allowed by the circle where the outer diameter of the blade portion is located, and if the judgment result is yes, determine that the circle where the outer diameter of the blade portion is located has a defect in position, and if the judgment result is no, determine that the circle where the outer diameter of the blade portion is located does not have a defect in position; Based on the radial tolerance of the blade portion when the molecular pump impeller is at different rotation angles, determine the actual concentricity of the circle where the inner diameter of the blade group is located, and then judge whether the actual concentricity of the circle where the inner diameter of the blade group is located exceeds the standard concentricity allowed by the circle where the inner diameter of the blade group is located, and if the judgment result is yes, determine that the circle where the inner diameter of the blade group is located has a defect in position, and if the judgment result is no, determine that the circle where the inner diameter of the blade group is located has no defect in position; Based on the radial tolerance of the traction part when the molecular pump impeller is at different rotation angles, determine the actual concentricity of the outer circle of the traction part, then judge whether the actual concentricity of the outer circle of the traction part exceeds the standard concentricity allowed by the outer circle of the traction part, and if the judgment result is yes, determine that the outer circle of the traction part has a defect in position, and if the judgment result is no, determine that the outer circle of the traction part does not have a defect in position; Based on the axial tolerance of the end face of the blade portion when the molecular pump impeller is at different rotation angles, determine the verticality of the end face of the blade portion relative to the central axis of the molecular pump impeller, and then judge whether the actual verticality of the end face of the blade portion exceeds the standard verticality allowed by the end face of the blade portion, and if the judgment result is yes, determine that there is a defect in the position of the end face of the blade portion, and if the judgment result is no, determine that there is a defect in the position of the end face of the blade portion; Based on the axial tolerance of the first end face when the molecular pump impeller is at different rotation angles, determine the verticality of the first end face relative to the central axis of the molecular pump impeller, then determine whether the actual verticality of the first end face exceeds the standard verticality allowed by the first end face, and if the judgment result is yes, determine that there is a defect in the position of the first end face, and if the judgment result is no, determine that there is a defect in the position of the first end face; and / or Based on the axial tolerance of the second end face when the molecular pump impeller is at different rotation angles, the verticality of the second end face relative to the central axis of the molecular pump impeller is determined, and then it is determined whether the actual verticality of the second end face exceeds the standard verticality allowed by the second end face, and when the judgment result is yes, it is determined that there is a defect in the position of the second end face, and when the judgment result is no, it is determined that there is a defect in the position of the second end face.

4. The defect detection method according to claim 2, characterized in that: The step of determining the actual radial runout of the circle where the outer diameter of the blade portion is located comprises: selecting a maximum selected value with the largest absolute value and no abnormality from the radial tolerance of the circle where the outer diameter of the blade portion is located when the molecular pump impeller is at different rotation angles, and using it as the actual radial runout of the circle where the outer diameter of the blade portion is located; The step of determining the actual radial runout of the circle where the inner diameter of the blade group is located comprises: selecting a maximum selected value with the largest absolute value and no abnormality from the radial tolerance of the circle where the inner diameter of the blade group is located when the molecular pump impeller is at different rotation angles, and using it as the actual radial runout of the circle where the inner diameter of the blade group is located; The step of determining the actual radial runout of the outer circle of the traction portion comprises: selecting a maximum selected value with the largest absolute value and no abnormality from the radial tolerance of the outer circle of the traction portion when the molecular pump impeller is at different rotation angles, and using it as the actual radial runout of the outer circle of the traction portion; The step of determining the actual axial runout of the end surface of the blade portion comprises: selecting a maximum selected value with the largest absolute value and no abnormality from the axial tolerances of the end surface of the blade portion and the molecular pump impeller at different rotation angles, and using it as the actual axial runout of the end surface of the blade portion; The step of determining the actual axial runout of the first end face comprises: selecting a maximum selected value with the largest absolute value and no abnormality from the axial tolerances of the first end face when the molecular pump impeller is at different rotation angles, and using it as the actual axial runout of the first end face; and / or The step of determining the actual axial runout of the second end face includes: selecting a maximum selected value with the largest absolute value and no abnormality from the axial tolerance of the outer circle of the second end face when the molecular pump impeller is at different rotation angles, and using it as the actual axial runout of the second end face.

5. The defect detection method according to claim 3, characterized in that: The step of determining the actual concentricity of the circle where the outer diameter of the blade portion is located comprises: selecting a maximum selected value with the largest value and a minimum selected value with the smallest value from the radial tolerance of the circle where the outer diameter of the blade portion is located when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the actual concentricity of the circle where the outer diameter of the blade portion is located; The step of determining the actual concentricity of the circle where the inner diameter of the blade group is located comprises: selecting a maximum selected value with the largest value and a minimum selected value with the smallest value from the radial tolerances of the circle where the inner diameter of the blade group is located when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the actual concentricity of the circle where the inner diameter of the blade group is located; The step of determining the actual concentricity of the outer circle of the traction portion comprises: selecting a maximum selected value with the largest value and a minimum selected value with the smallest value from the radial tolerances of the outer circle of the traction portion when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the actual concentricity of the outer circle of the traction portion; The step of determining the verticality of the end face of the blade portion relative to the central axis of the molecular pump impeller comprises: selecting a maximum selected value with the largest value and a minimum selected value with the smallest value from the axial tolerances of the end face of the blade portion when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the verticality of the end face of the blade portion; The step of determining the verticality of the first end face relative to the central axis of the molecular pump impeller comprises: selecting a maximum selected value with the largest value and a minimum selected value with the smallest value from the axial tolerance of the first end face when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the verticality of the first end face; and / or The step of determining the verticality of the second end face relative to the central axis of the molecular pump impeller includes: selecting a maximum selected value with the largest value and a minimum selected value with the smallest value from the axial tolerance of the second end face when the molecular pump impeller is at different rotation angles, and taking the difference between the maximum selected value and the minimum selected value as the verticality of the second end face.

6. The defect detection method according to claim 1, characterized in that: The distance measuring component includes a first magnetic base that can be adsorbed on the yaw meter, a first adjustable bracket arranged on the first magnetic base, and a first error meter arranged on the end of the first adjustable bracket away from the first magnetic base, and the first error meter includes a lever dial indicator or a lever micrometer.

7. The defect detection method according to claim 6, characterized in that: The distance measuring assembly also includes a second magnetic base capable of being adsorbed on the yaw meter, a second adjustable bracket arranged on the second magnetic base, and a second error table arranged on the end of the second adjustable bracket away from the second magnetic base, and the second error table includes a standard dial indicator or a standard micrometer.

8. The defect detection method according to claim 1, characterized in that: The different rotation angles at which the molecular pump impeller is located include more than eight selected rotation angles, the number of different rotation angles is more than six, and the more than eight selected rotation angles are evenly distributed within the circumferential angle of one rotation of the molecular pump impeller.

9. The defect detection method according to claim 1, characterized in that: The tooling equipment includes a deflection meter and an adapter shaft, and the preparation step includes fixing the molecular pump impeller outside the adapter shaft, then installing and clamping the adapter shaft with the molecular pump impeller on the deflection meter, and driving the molecular pump impeller to rotate on the deflection meter.

10. The defect detection method according to claim 9, characterized in that: The adapter shaft is a tensioning shaft used for assembling the molecular pump impeller and is tightened by pneumatic or hydraulic means.

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