10-micron positioning hole detection device

Abstract

The invention relates to the field of positioning hole detection, and particularly provides a 10-micron positioning hole detection device. The device comprises a machine base, the top of the machine base is provided with a placement rotating disc, vibration signals of key components are tightly monitored through a first monitoring mechanism and a vibration sensor, and once abnormal vibration caused by loosening or abrasion is detected, the signals are transmitted to an external control terminal to give an alarm, and timely maintenance is reminded. Meanwhile, the device is further provided with a flexible and adjustable mounting mechanism, position adjustment and stable fixation of the visual detection device or the photoelectric sensor are achieved through an adjusting frame and a fixing base, part looseness in long-term use is reduced, and therefore the stability and precision of the detection device are remarkably improved; and the influence of tiny looseness, abrasion or deviation of the precision part on the detection quality is effectively solved.

Description

Technical Field

[0001] The invention relates to the field of positioning hole detection, in particular to a 10-micron positioning hole detection device. Background Art

[0002] The 10-micron positioning hole detection device is a device that uses high-precision visual inspection equipment, such as an industrial camera with a high-magnification lens, to accurately detect and measure tiny positioning holes with a diameter of only 10 microns on silicon wafers. This equipment usually uses advanced image processing algorithms to achieve rapid and accurate detection of parameters such as the position, shape, size, and edge roughness of the positioning holes, ensuring the precise positioning and alignment of silicon wafers during the production process. It is crucial for quality control in the fields of semiconductor manufacturing, microelectronics packaging, etc. In addition, this detection device often also has automated detection functions, which can greatly improve production efficiency and reduce human errors. It is one of the indispensable detection tools in modern precision manufacturing.

[0003] The inventor of this application found that there are the following problems in the practical use process:

[0004] At present, during the long-term use of the 10-micron positioning hole detection device, due to mechanical wear, environmental vibration, temperature changes and continuous high-precision operating pressure, its internal precision components such as lenses, sensors or motion mechanisms may become slightly loose, worn or offset. Although these subtle changes may not be easy to detect in the early stage, they will gradually affect the detection accuracy and stability over time, especially when key components such as lens mounts, drive shafts or guide rails become loose or worn.

[0005] Therefore, it is necessary to provide a 10-micron positioning hole detection device to solve the above technical problems. Summary of the invention

[0006] The technical problem to be solved by the present invention is the problem of slight loosening, wear or displacement of internal precision components caused by mechanical wear, environmental vibration, temperature changes and high-precision operating pressure during long-term use, which in turn affects the detection accuracy and stability. In view of the above-mentioned defects of the prior art, a 10-micron positioning hole detection device is provided.

[0007] To achieve the above object, the technical solution of the present invention is: a 10 micron positioning hole detection device, comprising a detection device, the detection device comprising a base, a placing turntable is arranged on the top of the base, a first monitoring mechanism is arranged on one side of the placing turntable, the first monitoring mechanism comprises a second fixing base, a side groove is opened on one side of the second fixing base, and a vibration sensor is plugged into the inside of the side groove;

[0008] A first fixing bolt and a second fixing bolt are screwed on the top of the second fixing base, and the first fixing bolt and the second fixing bolt can fix the vibration sensor to the second fixing base;

[0009] A first wiring port is provided on one side of the vibration sensor, and the first wiring port is connected to an external control terminal through a data line.

[0010] By adopting the above technical solution, it is ensured that the vibration sensor can stably and accurately monitor the tiny vibrations of the turntable and the parts thereon, so as to promptly detect and alarm any possible looseness, wear or deviation, thereby improving the accuracy and reliability of detection.

[0011] Furthermore, the first fixing bolt and the second fixing bolt are arranged in a mirror image along the length center line of the vibration sensor.

[0012] By adopting the above technical solution, this symmetrical layout not only enhances the fixation stability of the vibration sensor, but also reduces the measurement error caused by uneven fixation, further improving the detection accuracy.

[0013] Furthermore, an adjustment frame is provided on the back of the machine base, and two first fixed seats are slidably connected to the adjustment frame, and a fixed plate is slidably connected inside the first fixed seat. Bolts are provided on the back of the fixed plate, and the bolts are used to cause the fixed plate to abut against the adjustment frame. After the fixed plate abuts against the adjustment frame, the installation mechanism can be fixed.

[0014] By adopting the above technical solution, this design allows the detection device to flexibly adjust the position of the installation mechanism according to specific detection requirements, while ensuring stability during long-term use, reducing detection errors caused by loose components.

[0015] Furthermore, a socket groove is provided on the outer surface of the first fixing seat, and a mounting mechanism is inserted into the socket groove.

[0016] By adopting the above technical solution, this plug-in design simplifies the installation and disassembly process, improves work efficiency, and ensures a stable connection between the installation mechanism and the adjustment frame.

[0017] Furthermore, the installation mechanism includes a socket, and the socket is plugged into the socket slot.

[0018] By adopting the above technical solution, this design enables the installation mechanism to easily adapt to different detection requirements, and a variety of detection functions can be achieved by replacing different installation mechanisms, thereby improving the flexibility and versatility of the detection device.

[0019] Furthermore, a mounting ring is provided on the outer surface of one of the sockets, and a light ring is provided on the bottom of the mounting ring.

[0020] By adopting the above technical solutions, the light ring provides additional illumination for the inspection process, especially when inspecting dark or reflective materials, which can significantly improve the clarity and accuracy of inspection.

[0021] Furthermore, a second monitoring mechanism is provided on one side of the mounting ring. The second monitoring mechanism includes a photoelectric sensor. The photoelectric sensor is fixedly connected to the mounting ring.

[0022] By adopting the above technical solution, the addition of photoelectric sensors provides an additional monitoring means for the detection device, which can accurately sense changes in light, thereby capturing more detailed information during the detection process and improving the accuracy and reliability of the detection.

[0023] Furthermore, a second wiring port is provided on the top of the photoelectric sensor, and the second wiring port is connected to an external control terminal through a data line.

[0024] By adopting the above technical solution, this design enables the photoelectric sensor to transmit monitoring data to the external control terminal in real time, making it convenient for operators to obtain detection information in a timely manner and make corresponding processing.

[0025] Furthermore, a scale is provided on the outer surface of the adjustment frame, and a control panel is provided on the outer surface of the base.

[0026] By adopting the above technical solutions, the scale provides the operator with an intuitive adjustment reference, which facilitates the precise adjustment of the position of the installation mechanism; the control panel simplifies the operation process, making the detection device easier to use and maintain.

[0027] Furthermore, a visual inspection device is installed on the outer surface of another of the mounting mechanisms.

[0028] By adopting the above technical solution, the addition of a visual inspection device provides the inspection device with a more comprehensive inspection capability, which can directly observe the surface condition of parts and has significant advantages in detecting defects such as cracks and scratches, further improving the accuracy and reliability of inspection.

[0029] Compared with the related art, the 10-micron positioning hole detection device provided by the present invention has the following beneficial effects:

[0030] The present invention provides a 10-micron positioning hole detection device, which closely monitors the vibration signal of key components through a vibration sensor by setting a first monitoring mechanism. Once abnormal vibration caused by looseness or wear is detected, a signal is transmitted to an external control terminal to alarm and remind timely maintenance. At the same time, the device also has a flexible and adjustable installation mechanism, which uses an adjustment frame and a fixing seat to achieve position adjustment and firm fixation of a visual detection device or a photoelectric sensor, reducing the looseness of components during long-term use, thereby significantly improving the stability and accuracy of the detection device, and effectively solving the impact of slight looseness, wear or offset of precision components on the detection quality.

[0031] The present invention provides a 10-micron positioning hole detection device. By setting a second monitoring mechanism, this component is tightly fixed to the mounting ring and realizes data connection with the external control terminal through the second wiring port. The presence of the photoelectric sensor adds an additional monitoring dimension to the detection device. It can accurately sense and respond to changes in light, so as to capture more detailed information during the detection process. This design not only improves the accuracy of detection, but also enhances the adaptability and reliability of the device. In particular, when detecting 10-micron positioning holes, the photoelectric sensor can assist the visual detection device to jointly ensure the accuracy and stability of the detection results, and effectively avoid detection errors caused by changes in ambient light or slight movements of components. Therefore, the integration of the second monitoring mechanism significantly improves the performance and practicality of the entire 10-micron positioning hole detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0033] Figure 2 It is a side view stereoscopic structural schematic diagram of the present invention;

[0034] Figure 3 For the present invention Figure 1 The enlarged structural diagram at A in the middle;

[0035] Figure 4 For the present invention Figure 2 Schematic diagram of the enlarged structure at point B.

[0036] Numbers in the figure: 1. Detection device; 101. Machine base; 102. Control panel; 103. Place turntable; 104. Adjustment frame; 105. Ruler; 106. First fixed seat; 107. Fixing plate; 108. Socket slot; 2. Mounting mechanism; 201. Socket; 202. Mounting ring; 203. Light ring; 3. First monitoring mechanism; 301. Second fixed seat; 302. Side groove; 303. First fixing bolt; 304. Second fixing bolt; 305. Vibration sensor; 306. First wiring port; 4. Second monitoring mechanism; 401. Photoelectric sensor; 402. Second wiring port; 5. Visual detection device. DETAILED DESCRIPTION

[0037] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the accompanying drawings, in which typical embodiments of the present invention are shown.

[0038] Embodiment 1:

[0039] like Figure 1 As shown, a 10-micron positioning hole detection device of the present invention, a detection device 1, the detection device 1 includes a base 101, a turntable 103 is arranged on the top of the base 101, a first monitoring mechanism 3 is arranged on one side of the turntable 103, the first monitoring mechanism 3 includes a second fixed seat 301, a side groove 302 is opened on one side of the second fixed seat 301, and a vibration sensor 305 is inserted into the inside of the side groove 302; the top of the second fixed seat 301 is screwed with a first fixing bolt 303 and a second fixing bolt 304, the first fixing bolt 303 and the second fixing bolt 304 can fix the vibration sensor 305 to the second fixed seat 301; a first wiring port 306 is arranged on one side of the vibration sensor 305, and the first wiring port 306 is connected to an external control terminal through a data line. This design not only improves the sensitivity of detection, but also can timely detect and alarm any possible looseness, wear or deviation, so as to ensure quality control and safety in the production process. At the same time, the vibration sensor 305 is connected to the external control terminal through the first wiring port 306, thereby achieving real-time transmission and processing of data, which is convenient for operators to respond in time.

[0040] See also Figure 1 , Figure 2 The first fixing bolt 303 and the second fixing bolt 304 are mirror-set along the length center line of the vibration sensor 305. The advantage of this design is that the symmetrical fixation of the double bolts effectively disperses the stress on the vibration sensor 305 during operation, prolongs its service life, and reduces the measurement error caused by improper fixation.

[0041] See also Figure 3 , Figure 4An adjusting frame 104 is provided on the back of the machine base 101, and two first fixing seats 106 are slidably connected to the adjusting frame 104, and a fixing plate 107 is slidably connected inside the first fixing seat 106, and bolts are provided on the back of the fixing plate 107, and the bolts are used to cause the fixing plate 107 to abut against the adjusting frame 104. After the fixing plate 107 abuts against the adjusting frame 104, the mounting mechanism 2 can be fixed. The design advantage of the adjusting frame 104 and the slidable first fixing seat 106 is that it provides a high degree of flexibility and customizability, so that the detection device can quickly adapt to the detection requirements of positioning holes of different sizes and shapes, reducing the cost and time of replacing or adjusting the detection equipment.

[0042] See also Figure 1 , Figure 2 A socket groove 108 is provided on the outer surface of the first fixing seat 106, and the mounting mechanism 2 is inserted into the socket groove 108. The advantage of introducing the socket groove 108 is that it simplifies the replacement process of the mounting mechanism 2, realizes quick plugging and unplugging, improves detection efficiency, and allows equipment upgrades or maintenance without interrupting the production line.

[0043] See also Figure 3 , Figure 4 The mounting mechanism 2 includes a socket 201, which is plugged into the socket slot 108. The use of the socket 201 and the socket slot 108 together enhances the modular design of the detection device, so that each detection component can be independently developed, tested and optimized, thereby improving the scalability and maintainability of the entire system.

[0044] See also Figure 1 , Figure 4 A mounting ring 202 is provided on the outer surface of one of the sockets 201, and a light ring 203 is provided on the bottom of the mounting ring 202. The design advantage of the mounting ring 202 and the light ring 203 is that they provide additional lighting and visual guidance for the detection area, especially in a dark light environment, which can significantly improve the visual recognition ability of the operator and reduce misjudgment and missed detection.

[0045] Embodiment 2:

[0046] See also Figure 1 , Figure 3 , Figure 4 A second monitoring mechanism 4 is provided on one side of the mounting ring 202. The second monitoring mechanism 4 includes a photoelectric sensor 401. The photoelectric sensor 401 is fixedly connected to the mounting ring 202. The photoelectric sensor 401 in the second monitoring mechanism 4 has the advantage of being able to detect the edge or surface features of the positioning hole in a non-contact manner, thereby avoiding damage or contamination that may be caused by physical contact, and at the same time improving the accuracy and speed of detection.

[0047] See also Figure 2 , Figure 3, Figure 4 A second wiring port 402 is provided on the top of the photoelectric sensor 401. The second wiring port 402 is connected to an external control terminal through a data line. The design advantage of the second wiring port 402 is that it is easy to integrate the photoelectric sensor 401 into a more complex automation control system, realize collaborative work with other sensors or actuators, and improve the intelligence level of the entire production line.

[0048] See also Figure 1 , Figure 3 The outer surface of the adjustment frame 104 is provided with a ruler 105, and the outer surface of the base 101 is provided with a control panel 102. The benefit of adding the ruler 105 is that it provides an intuitive adjustment reference for the operator, making the adjustment process more accurate and controllable, reducing the detection error caused by improper adjustment, and improving the consistency and repeatability of the detection.

[0049] See also Figure 3 , Figure 4 A visual inspection device 5 is installed on the outer surface of another mounting mechanism 2. The integration of the visual inspection device 5 has the advantage of being able to realize all-round, high-resolution image acquisition and analysis of the positioning holes, and having extremely high sensitivity for detecting defects such as tiny cracks, scratches or deformations, further improving the accuracy and reliability of the inspection device.

[0050] In implementation, first, the monitoring parameters, including the sensitivity of the vibration sensor, the alarm threshold, etc., are set through the control panel 102 to confirm the working mode of the photoelectric sensor 401 and the visual detection device 5 to ensure that they can capture the required detection information;

[0051] Start the detection device, place the turntable 103 and start rotating, drive the part to be detected into the detection area, the vibration sensor 305 monitors the vibration signal of the key component in real time and transmits the data to the external control terminal, the photoelectric sensor 401 and the visual detection device 5 work simultaneously to capture the light changes and image information on the surface of the part;

[0052] The external control terminal receives and analyzes the data sent back by the vibration sensor, photoelectric sensor and visual detection device. Once it detects abnormal vibration signals, light changes or abnormal features in the image, the external control terminal will trigger the alarm mechanism. Based on the alarm information, the operator will promptly check and confirm whether there are problems such as loose components, wear or offset.

[0053] The advantages of this technical solution in practical applications include but are not limited to the following:

[0054] 1. Use vibration sensors to monitor the status of key components in real time, detect and warn of potential looseness or wear problems in a timely manner, reduce the probability of failure, and improve the operating efficiency of equipment;

[0055] 2. The introduction of photoelectric sensors adds a new dimension to the detection process, which can capture more subtle changes and significantly improve the accuracy and reliability of detection;

[0056] 3. The device is equipped with a flexible and adjustable installation mechanism, which can adjust the position of the visual inspection device or photoelectric sensor according to actual needs to ensure the stability and accuracy of the inspection process;

[0057] 4. The photoelectric sensor's accurate perception of light changes enables the detection device to better adapt to different detection environments and improve the adaptability and practicality of the detection.

[0058] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A 10 micron positioning hole detection device, characterized in that: The detection device (1) comprises a base (101), a placing turntable (103) is arranged on the top of the base (101), a first monitoring mechanism (3) is arranged on one side of the placing turntable (103), the first monitoring mechanism (3) comprises a second fixing base (301), a side groove (302) is opened on one side of the second fixing base (301), and a vibration sensor (305) is inserted into the inside of the side groove (302); A first fixing bolt (303) and a second fixing bolt (304) are screwed onto the top of the second fixing seat (301), and the first fixing bolt (303) and the second fixing bolt (304) can fix the vibration sensor (305) to the second fixing seat (301); A first wiring port (306) is provided on one side of the vibration sensor (305), and the first wiring port (306) is connected to an external control terminal via a data line.

2. The 10-micron positioning hole detection device according to claim 1, characterized in that: The first fixing bolt (303) and the second fixing bolt (304) are arranged in a mirror image along the length center line of the vibration sensor (305).

3. The 10-micron positioning hole detection device according to claim 1, characterized in that: An adjustment frame (104) is arranged at the back of the machine base (101), two first fixing seats (106) are slidably connected to the adjustment frame (104), and a fixing plate (107) is slidably connected inside the first fixing seat (106), bolts are arranged at the back of the fixing plate (107), and the bolts are used to cause the fixing plate (107) to abut against the adjustment frame (104), and after the fixing plate (107) abuts against the adjustment frame (104), the mounting mechanism (2) can be fixed.

4. The 10-micron positioning hole detection device according to claim 3, characterized in that: The outer surface of the first fixing seat (106) is provided with a socket groove (108), and the mounting mechanism (2) is inserted into the socket groove (108).

5. The 10 micron positioning hole detection device according to claim 4, characterized in that: The mounting mechanism (2) comprises a socket (201), and the socket (201) is plugged into a socket slot (108).

6. The 10-micron positioning hole detection device according to claim 5, characterized in that: An outer surface of one of the sockets (201) is provided with a mounting ring (202), and a light ring (203) is provided at the bottom of the mounting ring (202).

7. The 10 micron positioning hole detection device according to claim 6, characterized in that: A second monitoring mechanism (4) is provided on one side of the mounting ring (202), the second monitoring mechanism (4) comprising a photoelectric sensor (401), and the photoelectric sensor (401) is fixedly connected to the mounting ring (202).

8. The 10-micron positioning hole detection device according to claim 7, characterized in that: A second wiring port (402) is provided on the top of the photoelectric sensor (401), and the second wiring port (402) is connected to an external control terminal via a data line.

9. The 10-micron positioning hole detection device according to claim 3, characterized in that: The outer surface of the adjustment frame (104) is provided with a scale (105), and the outer surface of the machine base (101) is provided with a control panel (102).

10. The 10-micron positioning hole detection device according to claim 5, characterized in that: A visual inspection device (5) is installed on the outer surface of the other mounting mechanism (2).

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