Probe station for chip testing

Abstract

A probe station for chip testing disclosed by the present invention comprises supporting legs, and further comprises an air injection assembly, a front-and-back driving assembly, a left-and-right translation assembly and a deformation assembly, the tops of the supporting legs are fixedly connected with a machine body, and the bottom of the back of the machine body is fixedly connected with a driving box. According to the invention, dust and impurities on the surfaces of the fixed transverse plate and the deformed arc plate may be attached to a chip or a probe to cause poor electrical connection or signal interference so as to influence the accuracy of a test result, the purity of a test environment can be ensured by regularly cleaning the surfaces of the fixed transverse plate and the deformed arc plate, and the test efficiency is improved. The influence of external factors on a test result is reduced, meanwhile, dust and tiny particles in impurities may scratch or abrade the surface of a chip or the tip of a probe, the service life of the probe can be shortened due to long-term accumulation, the risk of physical damage can be reduced by cleaning the surfaces of a deformed arc plate and a fixed transverse plate, and the service life of the probe can be prolonged. And the test equipment and the tested chip are protected.

Description

Technical Field

[0001] The invention relates to the technical field of chip testing, in particular to a probe station for chip testing. Background Art

[0002] The chip testing probe station is a key equipment widely used in the field of semiconductor and integrated circuit testing. It is mainly used to test the electrical performance, function and reliability of the chip. The chip testing probe station is a device that provides a platform for electrical parameter testing of semiconductor chips. It allows testers to place electronic probes on the chip and use measuring instruments to detect the chip's voltage, current, resistance and other electrical parameters, as well as perform functional testing and reliability assessments. The probe station can not only help chip manufacturers and designers verify the performance and quality of the chip, but also play an important role in R&D, product development and fault analysis. It can detect design defects and fault points of the chip, and provide data support for the later optimization and improvement of the chip.

[0003] When testing a chip, the chip is placed on a workbench and moved, and then the chip is tested by a probe. Since the workbench is generally located inside the device, the surface of the workbench is difficult to clean, causing dust in the air to adhere to the surface of the workbench. Since the workbench is not easy to clean, dust accumulates, which can easily make the surface of the workbench uneven, and errors are likely to occur in subsequent measurements. Improvements need to be made to this problem. Summary of the invention

[0004] The object of the present invention is to provide a probe station for chip testing to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a probe station for chip testing, comprising supporting feet, and also comprising a jet assembly, a front and rear drive assembly, a left and right translation assembly and a deformation assembly, wherein the top of the supporting feet is fixedly connected to a body, the bottom of the back side of the body is fixedly connected to a drive box, the left and right sides of the top of the body are fixedly connected to a fixing frame, and a probe is arranged on the inside of the fixing frame.

[0006] Wherein, the jetting assembly comprises: The air pump is fixedly connected to the middle part of the back of the machine body, a connecting pipe is fixedly connected to the top of the air pump, a shunt pipe is fixedly connected to the top of the connecting pipe, an injection pipe is fixedly connected to the outside of the shunt pipe, and an injection head is fixedly connected to the inside of the injection pipe.

[0007] According to the above technical solution, the front and rear drive components include a driving motor 1, a pulley 1, a belt, a pulley 2, a rotating rod and an adjusting screw 1. The driving motor 1 is fixedly connected to the bottom of the driving box, the driving motor 1 has an output shaft, the pulley 1 is fixedly connected to the output shaft of the driving motor 1, the belt is transmission connected to the outer side of the pulley 1, the pulley 2 is transmission connected to the end of the belt away from the pulley 1, the rotating rod is fixedly connected to the middle part of the pulley 2, and the adjusting screw 1 is fixedly connected to the front end of the rotating rod.

[0008] According to the above technical solution, the left and right translation assembly includes a ball nut pair, a moving seat, a drive motor, a second adjusting screw, a ball nut pair and a moving seat. The ball nut pair is threadedly connected to the outer side of the adjusting screw, the moving seat is fixedly connected to the top of the ball nut pair, the drive motor is fixedly connected to the top of the moving seat, the drive motor has an output shaft, the adjusting screw is fixedly connected to the output shaft of the drive motor, the ball nut pair is threadedly connected to the outer side of the adjusting screw, and the moving seat is fixedly connected to the top of the ball nut pair.

[0009] According to the above technical scheme, the deformation assembly includes a working cylinder, a fixed transverse plate, a positioning frame, an electric lifting rod, a lifting disk, a lifting frame, an extrusion rod, an adjustment frame and a deformation arc plate. The working cylinder is fixedly connected to the top of the second moving seat, the electric lifting rod is fixedly connected to the bottom of the working cylinder, the electric lifting rod has a telescopic end, the lifting disk is fixedly connected to the telescopic end of the electric lifting rod, the fixed transverse plate is fixedly connected to the top of the working cylinder, the positioning frame is fixedly connected to the outside of the fixed transverse plate, the lifting frame is fixedly connected to the outside of the lifting disk, the extrusion rod is rotatably connected to the middle part of the lifting frame, the adjustment frame is rotatably connected to the side of the extrusion rod away from the lifting frame, and the deformation arc plate is fixedly connected to the top of the adjusting frame.

[0010] According to the above technical solution, the side of the jet head away from the jet pipe penetrates the outer wall of the machine body and extends into the interior of the machine body, and the nozzle of the jet head faces downward.

[0011] According to the above technical solution, the back side of the rotating rod is rotatably connected to the back inner wall of the driving box, the front end of the rotating rod passes through the front side of the driving box and the back inner wall of the machine body and extends into the machine body and is fixedly connected to an adjusting screw, and the front end of the adjusting screw is rotatably connected to the front inner wall of the machine body.

[0012] According to the above technical solution, the number of the belt, the second pulley, the rotating rod, the first adjusting screw, the first ball nut pair and the first moving seat is two, and the two belts, the second pulley, the rotating rod, the first adjusting screw, the first ball nut pair and the first moving seat are symmetrically distributed on the left and right sides of the machine body.

[0013] According to the above technical solution, the deformed arc plate is rotatably connected to the middle of the positioning frame on one side close to the fixed horizontal plate, a lifting slot is provided in the lifting plate, and the lifting plate is slidably connected to the outer wall of the working cylinder through the lifting slot.

[0014] Compared with the prior art, the present invention has the following beneficial effects: the present invention places the chip on the top of the deformed arc plate, and then adjusts the angle of the probe so that the top of the probe contacts the top surface of the chip, so that the probe can test the chip; When it is necessary to control the chip to move forward and backward, the driving motor 1 is controlled to work. When the driving motor 1 is working, the driving motor 1 drives the pulley 2 to rotate through the pulley 1 and the belt, so that the rotating rod in the middle of the pulley 2 drives the adjusting screw 1 to rotate. At this time, the ball nut pair 1 moves forward and backward on the outside of the adjusting screw 1, so that the moving seat 2 on the ball nut pair 1 moves forward and backward synchronously with the forward and backward movement of the ball nut pair 1, so that the working cylinder on the top of the moving seat 2 moves synchronously, and further drives the chip on the fixed horizontal plate and the deformation arc plate on the top of the working cylinder to move forward and backward. When the device is working, the chip can be moved and adjusted forward and backward as needed; When it is necessary to test the left and right translation of the chip, the driving motor 2 on the moving seat 1 is controlled to work, so that the driving motor 2 drives the adjusting screw 2 to rotate when working. When the adjusting screw 2 rotates, the ball nut pair 2 on the adjusting screw 2 can be translated left and right outside the adjusting screw 2, and the moving seat 2 on the top of the ball nut pair 2 is synchronously translated left and right, so that the fixed horizontal plate and the deformation arc plate on the top of the working cylinder are synchronously moved, and the chip on the top of the fixed horizontal plate and the deformation arc plate is further translated left and right, so that the device can move and adjust the left and right position of the chip as needed when working; When it is necessary to remove dust from the fixed horizontal plate and the deformed arc plate, the electric lifting rod is controlled to drive the lifting plate to move downward, so that the lifting frame outside the lifting plate moves downward synchronously. When the lifting frame moves downward, the middle extrusion rod is pulled, so that the other end of the extrusion rod pulls the adjustment frame. At this time, the adjustment frame and the deformed arc plate are subjected to force synchronously, so that the deformed arc plate rotates in the positioning frame, and the deformed arc plate rotates and tilts to the side close to the jet head. Then the air pump is started. When the air pump is working, the air pump compresses the external air and introduces it into the jet pipe through the connecting pipe and the shunt pipe, and finally sends the air out through the jet head on the jet pipe. And blow it to the surface of the deformed arc plate. Since the deformed arc plate is inclined, when the air is flushing the surface of the deformed arc plate, a part of the air moves along the upper side of the deformed arc plate and is blown to the top of the fixed horizontal plate, which can impact the top of the fixed horizontal plate, and then the top surface of the fixed horizontal plate and the probe surface are simultaneously flushed and dusted by air. At the same time, when the surface of the deformed arc plate is flushed by air, a part of the air moves along the lower side of the deformed arc plate, which can clean the dust adhered to the surface of the deformed arc plate, so as to avoid the dust adhered to the surface of the deformed arc plate affecting the subsequent test of the chip; Dust and impurities on the surface of the fixed horizontal plate and the deformed arc plate may adhere to the chip or probe, resulting in poor electrical connection or signal interference, thus affecting the accuracy of the test results. By regularly cleaning the surface of the fixed horizontal plate and the deformed arc plate, the purity of the test environment can be ensured and the impact of external factors on the test results can be reduced. At the same time, tiny particles in dust and impurities may cause scratches or wear on the chip surface or the probe tip. Long-term accumulation will shorten the service life of the probe. By cleaning the surface of the deformed arc plate and the fixed horizontal plate, the risk of such physical damage can be reduced, protecting the test equipment and the chip under test. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings: Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the interior of the body of the present invention; Figure 3 It is a schematic diagram of the air pump of the present invention; Figure 4 It is a schematic diagram of the nozzle of the present invention; Figure 5 It is a schematic diagram of the interior of the drive box of the present invention; Figure 6 It is a schematic diagram of the second part of the mobile seat of the present invention; Figure 7 It is a schematic diagram of the positioning frame of the present invention; Figure 8 It is a schematic diagram of an adjustment frame of the present invention.

[0016] In the figure: 1, support leg; 2, machine body; 3, drive box; 4, fixed frame; 5, probe; 6, jet assembly; 601, air pump; 602, connecting pipe; 603, shunt pipe; 604, jet pipe; 605, jet head; 7, front and rear drive assembly; 701, drive motor 1; 702, pulley 1; 703, belt; 704, pulley 2; 705, rotating rod; 706, adjusting screw 1; 8, left and right translation group Parts; 801, ball nut pair one; 802, moving seat one; 803, driving motor two; 804, adjusting screw two; 805, ball nut pair two; 806, moving seat two; 9, deformation component; 901, working cylinder; 902, fixed horizontal plate; 903, positioning frame; 904, electric lifting rod; 905, lifting plate; 906, lifting frame; 907, extrusion rod; 908, adjustment frame; 909, deformation arc plate. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] See also Figure 1-4 The present invention provides a technical solution: a probe station for chip testing, including a supporting foot 1, and also including an injection assembly 6, a front and rear driving assembly 7, a left and right translation assembly 8 and a deformation assembly 9. The top of the supporting foot 1 is fixedly connected to a body 2, the bottom of the back of the body 2 is fixedly connected to a driving box 3, the left and right sides of the top of the body 2 are fixedly connected to a fixing frame 4, and a probe 5 is arranged inside the fixing frame 4.

[0019] Wherein, the jetting assembly 6 comprises: The air pump 601 is fixedly connected to the middle of the back of the machine body 2, a connecting pipe 602 is fixedly connected to the top of the air pump 601, a shunt pipe 603 is fixedly connected to the top of the connecting pipe 602, an injection pipe 604 is fixedly connected to the outside of the shunt pipe 603, and an injection head 605 is fixedly connected to the inside of the injection pipe 604.

[0020] The side of the air jet head 605 away from the air jet pipe 604 penetrates the outer wall of the body 2 and extends to the inside of the body 2, and the nozzle of the air jet head 605 faces downward.

[0021] See also Figure 1-8 The present invention provides a technical solution: the front and rear drive components 7 include a driving motor 701, a pulley 702, a belt 703, a pulley 704, a rotating rod 705 and an adjusting screw 706. The driving motor 701 is fixedly connected to the bottom of the driving box 3, the driving motor 701 has an output shaft, the pulley 702 is fixedly connected to the output shaft of the driving motor 701, the belt 703 is transmission-connected to the outer side of the pulley 702, the pulley 704 is transmission-connected to the end of the belt 703 away from the pulley 702, the rotating rod 705 is fixedly connected to the middle part of the pulley 704, and the adjusting screw 706 is fixedly connected to the front end of the rotating rod 705.

[0022] The left and right translation assembly 8 includes a ball nut pair 801, a moving seat 802, a drive motor 803, an adjusting screw 804, a ball nut pair 805 and a moving seat 806. The ball nut pair 801 is threadedly connected to the outside of the adjusting screw 706, the moving seat 802 is fixedly connected to the top of the ball nut pair 801, the drive motor 803 is fixedly connected to the top of the moving seat 802, the drive motor 803 has an output shaft, the adjusting screw 804 is fixedly connected to the output shaft of the drive motor 803, the ball nut pair 805 is threadedly connected to the outside of the adjusting screw 804, and the moving seat 806 is fixedly connected to the top of the ball nut pair 805.

[0023] The deformation component 9 includes a working cylinder 901, a fixed horizontal plate 902, a positioning frame 903, an electric lifting rod 904, a lifting plate 905, a lifting frame 906, an extrusion rod 907, an adjusting frame 908 and a deformation arc plate 909. The working cylinder 901 is fixedly connected to the top of the movable seat 806, the electric lifting rod 904 is fixedly connected to the bottom of the working cylinder 901, the electric lifting rod 904 has a telescopic end, the lifting plate 905 is fixedly connected to the telescopic end of the electric lifting rod 904, the fixed horizontal plate 902 is fixedly connected to the top of the working cylinder 901, the positioning frame 903 is fixedly connected to the outer side of the fixed horizontal plate 902, the lifting frame 906 is fixedly connected to the outer side of the lifting plate 905, the extrusion rod 907 is rotatably connected to the middle part of the lifting frame 906, the adjusting frame 908 is rotatably connected to the side of the extrusion rod 907 away from the lifting frame 906, and the deformation arc plate 909 is fixedly connected to the top of the adjusting frame 908.

[0024] The back of the rotating rod 705 is rotatably connected to the back inner wall of the driving box 3. The front end of the rotating rod 705 penetrates the front of the driving box 3 and the back inner wall of the body 2 and extends into the body 2 to be fixedly connected to the adjusting screw 706. The front end of the adjusting screw 706 is rotatably connected to the front inner wall of the body 2.

[0025] There are two belts 703, two pulleys 704, rotating rods 705, adjusting screws 706, ball nut pairs 801 and moving seats 802. The two belts 703, two pulleys 704, rotating rods 705, adjusting screws 706, ball nut pairs 801 and moving seats 802 are symmetrically distributed on the left and right sides of the body 2.

[0026] The deformed arc plate 909 is rotatably connected to the middle of the positioning frame 903 on one side close to the fixed horizontal plate 902 . A lifting slot is provided in the lifting plate 905 , and the lifting plate 905 is slidably connected to the outer wall of the working cylinder 901 through the lifting slot.

[0027] The chip is placed on the top of the deformed arc plate 909, and then the angle of the probe 5 is adjusted so that the top of the probe 5 contacts the top surface of the chip, so that the probe 5 can test the chip.

[0028] When it is necessary to control the chip to move forward and backward, the drive motor 701 is controlled to work. When the drive motor 701 is working, the drive motor 701 drives the pulley 704 to rotate through the pulley 702 and the belt 703, so that the rotating rod 705 in the middle of the pulley 704 drives the adjusting screw 706 to rotate. At this time, the ball nut pair 801 moves forward and backward on the outside of the adjusting screw 706, so that the moving seat 2 806 on the ball nut pair 801 moves forward and backward synchronously with the forward and backward movement of the ball nut pair 801, so that the working cylinder 901 on the top of the moving seat 2 806 moves synchronously, and further drives the chip on the fixed horizontal plate 902 at the top of the working cylinder 901 and the deformation arc plate 909 to move forward and backward. When the device is working, the chip can be moved and adjusted forward and backward as needed.

[0029] When it is necessary to test the left and right translation of the chip, the drive motor 2 803 on the moving seat 1 802 is controlled to work, so that the drive motor 2 803 drives the adjusting screw 2 804 to rotate during operation. When the adjusting screw 2 804 rotates, the ball nut pair 2 805 on the adjusting screw 2 804 can be translated left and right on the outside of the adjusting screw 2 804, and the moving seat 2 806 on the top of the ball nut pair 2 805 can be translated left and right synchronously, so that the fixed cross plate 902 and the deforming arc plate 909 on the top of the working cylinder 901 can be moved synchronously, and the chip on the top of the fixed cross plate 902 and the deforming arc plate 909 can be further translated left and right, so that the device can move and adjust the left and right position of the chip as needed during operation.

[0030] When it is necessary to perform dust removal on the fixed horizontal plate 902 and the deformed arc plate 909, the electric lifting rod 904 is controlled to drive the lifting plate 905 to move downward, so that the lifting frame 906 outside the lifting plate 905 moves downward synchronously, and when the lifting frame 906 moves downward, the middle extrusion rod 907 is pulled, so that the other end of the extrusion rod 907 pulls the adjustment frame 908. At this time, the adjustment frame 908 and the deformed arc plate 909 are subjected to force synchronously, so that the deformed arc plate 909 rotates in the positioning frame 903, and the deformed arc plate 909 rotates and tilts to the side close to the nozzle 605, and then the air pump 601 is started. When the air pump 601 is working, the air pump 601 compresses the external air and introduces it into the nozzle pipe 604 through the connecting pipe 602 and the shunt pipe 603, and finally through the nozzle. The nozzle 605 on the air pipe 604 sends out air and blows it to the surface of the deformed arc plate 909. Since the deformed arc plate 909 is inclined, when the air flushes the surface of the deformed arc plate 909, a part of the air moves along the upper side of the deformed arc plate 909 and is blown to the top of the fixed horizontal plate 902, which can impact the top of the fixed horizontal plate 902, and then the top surface of the fixed horizontal plate 902 and the surface of the probe 5 are simultaneously flushed and dusted by air. At the same time, when the surface of the deformed arc plate 909 is flushed by air, a part of the air moves along the lower side of the deformed arc plate 909, which can clean the dust adhered to the surface of the deformed arc plate 909, so as to avoid the dust adhered to the surface of the deformed arc plate 909 affecting the subsequent testing of the chip.

[0031] Dust and impurities on the surface of the fixed horizontal plate 902 and the deformable arc plate 909 may adhere to the chip or probe 5, resulting in poor electrical connection or signal interference, thereby affecting the accuracy of the test results. By regularly cleaning the surface of the fixed horizontal plate 902 and the deformable arc plate 909, the purity of the test environment can be ensured and the impact of external factors on the test results can be reduced. At the same time, tiny particles in dust and impurities may cause scratches or wear on the chip surface or the tip of the probe 5. Long-term accumulation will shorten the service life of the probe 5. By cleaning the surface of the deformable arc plate 909 and the fixed horizontal plate 902, the risk of such physical damage can be reduced, thereby protecting the test equipment and the chip under test.

[0032] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0033] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A probe station for chip testing, comprising a support foot (1), characterized in that: It also includes an air jet assembly (6), a front and rear drive assembly (7), a left and right translation assembly (8) and a deformation assembly (9), wherein the top of the support foot (1) is fixedly connected to the body (2), the bottom of the back of the body (2) is fixedly connected to a drive box (3), the top of the body (2) is fixedly connected to a fixing frame (4) on both sides, and a probe (5) is arranged inside the fixing frame (4); Wherein, the jetting assembly (6) comprises: An air pump (601) is fixedly connected to the middle of the back side of the machine body (2); a connecting pipe (602) is fixedly connected to the top of the air pump (601); a flow distribution pipe (603) is fixedly connected to the top of the connecting pipe (602); an air injection pipe (604) is fixedly connected to the outside of the flow distribution pipe (603); and an air injection head (605) is fixedly connected to the inside of the air injection pipe (604).

2. A probe station for chip testing according to claim 1, characterized in that: The front and rear drive assembly (7) comprises a driving motor 1 (701), a pulley 1 (702), a belt (703), a pulley 2 (704), a rotating rod (705) and an adjusting screw 1 (706); the driving motor 1 (701) is fixedly connected to the bottom of the driving box (3); the driving motor 1 (701) has an output shaft; the pulley 1 (702) is fixedly connected to the output shaft of the driving motor 1 (701); the belt (703) is transmission-connected to the outer side of the pulley 1 (702); the pulley 2 (704) is transmission-connected to an end of the belt (703) away from the pulley 1 (702); the rotating rod (705) is fixedly connected to the middle part of the pulley 2 (704); and the adjusting screw 1 (706) is fixedly connected to the front end of the rotating rod (705).

3. A probe station for chip testing according to claim 2, characterized in that: The left-right translation assembly (8) comprises a ball nut pair (801), a moving seat (802), a drive motor (803), an adjusting screw (804), a ball nut pair (805) and a moving seat (806), wherein the ball nut pair (801) is threadedly connected to the outside of the adjusting screw (706), the moving seat (802) is fixedly connected to the top of the ball nut pair (801), the drive motor (803) is fixedly connected to the top of the moving seat (802), the drive motor (803) has an output shaft, the adjusting screw (804) is fixedly connected to the output shaft of the drive motor (803), the ball nut pair (805) is threadedly connected to the outside of the adjusting screw (804), and the moving seat (806) is fixedly connected to the top of the ball nut pair (805).

4. A probe station for chip testing according to claim 3, characterized in that: The deformation assembly (9) comprises a working cylinder (901), a fixed horizontal plate (902), a positioning frame (903), an electric lifting rod (904), a lifting plate (905), a lifting frame (906), an extrusion rod (907), an adjustment frame (908) and a deformation arc plate (909), wherein the working cylinder (901) is fixedly connected to the top of the second moving seat (806), the electric lifting rod (904) is fixedly connected to the bottom of the working cylinder (901), the electric lifting rod (904) has a telescopic end, and the lifting plate (905) is fixedly connected to the The electric lifting rod (904) has a telescopic end, the fixed horizontal plate (902) is fixedly connected to the top of the working cylinder (901), the positioning frame (903) is fixedly connected to the outside of the fixed horizontal plate (902), the lifting frame (906) is fixedly connected to the outside of the lifting plate (905), the extrusion rod (907) is rotatably connected to the middle part of the lifting frame (906), the adjustment frame (908) is rotatably connected to the side of the extrusion rod (907) away from the lifting frame (906), and the deformation arc plate (909) is fixedly connected to the top of the adjustment frame (908).

5. A probe station for chip testing according to claim 4, characterized in that: The jet head (605) is located away from the jet pipe (604) and penetrates the outer wall of the machine body (2) and extends into the interior of the machine body (2), and the nozzle of the jet head (605) faces downward.

6. A probe station for chip testing according to claim 5, characterized in that: The back side of the rotating rod (705) is rotatably connected to the back inner wall of the driving box (3); the front end of the rotating rod (705) penetrates the front side of the driving box (3) and the back inner wall of the machine body (2) and extends into the machine body (2) to be fixedly connected to the adjusting screw 1 (706); the front end of the adjusting screw 1 (706) is rotatably connected to the front inner wall of the machine body (2).

7. A probe station for chip testing according to claim 6, characterized in that: The number of the belt (703), the second pulley (704), the rotating rod (705), the first adjusting screw (706), the first ball nut pair (801) and the first moving seat (802) is two, and the two belts (703), the second pulley (704), the rotating rod (705), the first adjusting screw (706), the first ball nut pair (801) and the first moving seat (802) are symmetrically distributed on the left and right sides of the body (2).

8. A probe station for chip testing according to claim 7, characterized in that: The deformable arc plate (909) is rotatably connected to the middle of the positioning frame (903) on one side close to the fixed horizontal plate (902), and a lifting groove is provided in the lifting plate (905). The lifting plate (905) is slidably connected to the outer wall of the working cylinder (901) through the lifting groove.

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