Bonding device and bonding method

Abstract

The present invention provides a technique for suppressing positional displacement between a first laminated film and a first substrate in a conveyance direction of the first laminated film. The bonding apparatus includes a first bonding unit that bonds a first substrate and a first laminated film at a first merging point where a conveyance path of the first substrate and a conveyance path of the first laminated film merge. The first laminated film and a first carrier film that holds a plurality of the first laminated films at intervals in the conveyance direction thereof constitute a first laminated film. The first laminated film has, for each of the first laminated films, a first alignment mark indicating a position of the first laminated film. The bonding device detects the first alignment mark in front of the first merging point in the conveyance path of the first laminated film, and controls the conveyance of the first laminated film on the basis of the detection result.

Description

Technical Field

[0001] The present disclosure relates to a laminating device and a laminating method. Background Art

[0002] The laminating device described in Patent Document 1 laminates a substrate and a film. The film includes a polarizer and an adhesive layer. The film is bonded to one side of a release film and is bonded to the substrate after being peeled off from the release film. A plurality of film sheets are provided at intervals in the length direction of the release film. Ladder-shaped ear pieces are provided in a manner to surround the plurality of film sheets. The ear piece is bonded to one side of the release film. The ear piece and the film sheet are cut in advance. In addition, the release film is not cut. After being peeled off from the release film, the ear piece is not bonded to the substrate but is wound up on a winding roller.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2005-43384

[0004] When the first laminate film and the first substrate are bonded together, positional deviation may occur between the first laminate film and the first substrate in the conveyance direction of the first laminate film. Summary of the invention

[0005] One embodiment of the present disclosure provides a technology for suppressing positional deviation between a first laminate film and a first substrate in a conveyance direction of the first laminate film.

[0006] The laminating device involved in one embodiment of the present disclosure includes a first substrate conveying unit, a first film conveying unit and a first laminating unit. The first substrate conveying unit forms a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface. The first film conveying unit forms a conveying path for a first laminate film bonded to the first main surface of the first substrate, and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in the conveying direction thereof. The first laminating unit laminates the first substrate and the first laminate film at a first confluence point where the conveying path of the first substrate and the conveying path of the first laminate film merge to produce a second substrate. The first laminate film and the first carrier film constitute a first laminate film. The first laminate film has a first alignment mark indicating the position of the first laminate film for each of the first laminate films. The laminating device includes a first mark detection unit and a control unit. The first mark detection unit detects the first alignment mark in the conveying path of the first laminate film before the first confluence point. The control unit controls the conveyance of the first laminate film based on the detection result of the first mark detection unit.

[0007] According to one aspect of the present disclosure, it is possible to suppress positional deviation between the first laminate film and the first substrate in the conveyance direction of the first laminate film. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a side view which shows the upstream area of ​​the laminating apparatus which concerns on one Embodiment.

[0009] Figure 2 This is a side view showing an example of a junction point where the conveyance path of the first substrate and the conveyance path of the first laminate film merge.

[0010] Figure 3 It is a top view showing an example of the first substrate transport unit.

[0011] Figure 4 It is a top view showing an example of the first substrate.

[0012] Figure 5 It is a top view showing an example of the first laminated film.

[0013] Figure 6 It is a cross-sectional view showing an example of the first laminated film.

[0014] Figure 7 It is a top view showing an example of the second laminated film.

[0015] Figure 8 It is a cross-sectional view showing an example of the second laminated film.

[0016] Fig. 9 is a cross-sectional view showing an example of the second substrate.

[0017] Fig.10 It is a top view showing an example of the second substrate.

[0018] Fig.11 It is a cross-sectional view showing an example of the first bonding portion.

[0019] Fig.12 It is a cross-sectional view showing a modified example of the second substrate.

[0020] Fig.13 It is a cross-sectional view showing a modified example of the first bonding section.

[0021] Fig.14 It is a side view which shows an example of the conveyance speed of a 1st bonding part and the conveyance speed of a 2nd board|substrate conveyance part.

[0022] Fig.15 This is a side view showing an example of the operation of the first bonding unit.

[0023] Fig.16 Then Fig.15 The following is a side view showing an example of the operation of the first bonding unit.

[0024] Fig.17It is a side view showing a midstream area of ​​a bonding device according to one embodiment.

[0025] Fig.18 It is a top view showing an example of the third stacked film.

[0026] Fig.19 It is a cross-sectional view showing an example of the third laminated film.

[0027] Fig. 20 It is a cross-sectional view showing an example of the third substrate.

[0028] Fig.21 It is a top view showing an example of the third substrate.

[0029] Fig. 22 It is a cross-sectional view showing an example of the second bonding portion.

[0030] Fig.23 It is a side view which shows an example of the operation|movement of a 2nd bonding part.

[0031] Fig.24 It is a side view which shows the downstream area of ​​the laminating apparatus which concerns on one Embodiment.

[0032] Fig.25 is a cross-sectional view showing an example of the fourth stacked film.

[0033] Fig.26 is a cross-sectional view showing an example of the fifth stacked film.

[0034] Fig. 27 is a cross-sectional view showing an example of the fourth substrate.

[0035] Fig.28 It is a top view showing an example of the fourth substrate.

[0036] Fig.29 It is a cross-sectional view showing an example of the third bonding portion.

[0037] Description of Reference Numerals

[0038] 10...first substrate; 10A...second substrate; 10B...third substrate; 10C...fourth substrate; 11...first main surface; 12...second main surface; 20...first laminated film; 21...first laminating film; 21a...base film; 21b...adhesive layer; 22...first carrier film; 23...first alignment mark; 24...first outer film; 24a...base film; 24b...adhesive layer; 27...gap; 30...second laminated film; 31...second laminating film; 31a...base film; 31b...adhesive layer; 32...second carrier film; 33...second alignment mark; 34...second outer film; 34a...base film material film; 34b...adhesive layer; 37...gap; 40...third laminate film; 41...third laminating film; 41a...substrate film; 41b...adhesive layer; 42...third carrier film; 43...third alignment mark; 44...third outer film; 44a...substrate film; 44b...adhesive layer; 47...gap; 50...fourth laminate film; 51...fourth laminating film; 51a...substrate film; 51b...adhesive layer; 52...fourth carrier film; 60...fifth laminate film; 61...fifth laminating film; 61a...substrate film; 61b...adhesive layer; 62...fifth carrier film; 100...bonding device; 101...first Mark detection unit; 102... first drive unit; 103... first edge detection unit; 104... second mark detection unit; 105... second drive unit; 106... second edge detection unit; 107... third mark detection unit; 108... third drive unit; 109... third edge detection unit; 110... first substrate conveying unit; 111... first conveying roller; 120... second substrate conveying unit; 121... second conveying roller; 130... third substrate conveying unit; 131... third conveying roller; 190... control unit; 210... first film conveying unit; 211... first unwinding shaft; 212... first peeling body; 213... first winding shaft; 2 14...1st relay roller; 215...1st relay roller; 216...1st recovery section; 217...1st individual adjustment section; 220...2nd film conveying section; 221...2nd unwinding shaft; 222...2nd peeling body; 223...2nd take-up shaft; 224...2nd relay roller; 225...2nd relay roller; 226...2nd recovery section; 227...2nd individual adjustment section; 230...3rd film conveying section; 231...3rd unwinding shaft; 232...3rd peeling body; 233...3rd take-up shaft; 234...3rd relay roller; 235...3rd relay roller; 240...4th film conveying section; 241...4th unwinding shaft; 242....4th peeling body; 243...4th winding shaft; 244...4th relay roller; 245...4th relay roller; 246...4th relay roller; 250...5th film conveying section; 251...5th unwinding shaft; 252...5th peeling body; 253...5th winding shaft; 254...5th relay roller; 255...5th relay roller; 256...5th relay roller; 310...1st laminating section; 311...1st laminating roller; 312...1st laminating roller; 313...1st rotary motor; 314...1st rotary motor; 315...1st adsorption plate; 316... First position adjustment unit; 317...first position detection unit; 318...cleaning roller; 320...second laminating unit; 322...second laminating roller; 324...second rotating motor; 325...second adsorption plate; 326...second position adjustment unit; 327...second position detection unit; 330...third laminating unit; 331...third laminating roller; 332...third laminating roller; 333...third rotating motor; 334...third rotating motor; 339...cutting machine; A1...transmitting area; A2...light shielding area; VL...transmission speed; VS...transmission speed. . DETAILED DESCRIPTION

[0039] Hereinafter, the method for implementing the present disclosure will be described with reference to the accompanying drawings. In each of the accompanying drawings, the same or corresponding structures are marked with the same reference numerals, and the description is omitted. In the specification, "to" indicating a numerical range means that the numerical values ​​recorded before and after "to" are included as the lower limit and the upper limit.

[0040] In this specification, the first direction is the conveying direction of the first substrate. In the following embodiments, the positive direction of the X-axis is an example of the first direction. The second direction is the opposite direction of the first direction. The negative direction of the X-axis is an example of the second direction. Sometimes the positive direction of the X-axis and the negative direction of the X-axis are collectively referred to as the X-axis direction.

[0041] The third direction is a direction parallel to the first main surface of the first substrate and perpendicular to the first direction. The positive direction of the Y axis is an example of the third direction. The fourth direction is the opposite direction of the third direction. The negative direction of the Y axis is an example of the fourth direction. Sometimes the positive direction of the Y axis and the negative direction of the Y axis are collectively referred to as the Y axis direction.

[0042] The fifth direction is a direction perpendicular to the first main surface of the first substrate. The positive direction of the Z axis is an example of the fifth direction. The sixth direction is the opposite direction of the fifth direction. The negative direction of the Z axis is an example of the sixth direction. Sometimes the positive direction of the Z axis and the negative direction of the Z axis are collectively referred to as the Z axis direction.

[0043] The X-axis direction, the Y-axis direction, and the Z-axis direction are mutually perpendicular directions. In the following embodiments, the X-axis direction and the Y-axis direction are horizontal directions, and the Z-axis direction is a vertical direction (up and down direction). Sometimes the rotation observed from the Z-axis direction, that is, the rotation around the Z-axis is recorded as θ Z The direction of rotation. Z The rotation in the direction of the Y axis can be clockwise or counterclockwise when viewed from the positive Z axis to the negative Z axis. Y The direction of rotation. Y The rotation in the direction may be clockwise or counterclockwise when the negative Y-axis side is viewed from the positive Y-axis side.

[0044] First, the main reference Figure 1-2 , an overview of the upstream region of the laminating device 100 according to one embodiment is described. In addition, in this embodiment, the laminating device 100 includes a second laminating unit 320 (see Fig.17 ) and the third bonding portion 330 (refer to Fig.24 ), but it is sufficient to have at least one of the first laminating unit 310, the second laminating unit 320, and the third laminating unit 330. The conveying path of the substrate, the conveying path of the film, etc. can also be appropriately changed.

[0045] The laminating device 100 includes, for example, a first substrate conveying unit 110, a first film conveying unit 210, a second film conveying unit 220, and a first laminating unit 310. The first substrate conveying unit 110 forms a conveying path for the first substrate 10. The first film conveying unit 210 forms at least a conveying path for the first laminating film 21. The first laminating film 21 is laminated to the first main surface 11 (see Fig. 9 The second film conveying unit 220 is arranged on the opposite side of the first film conveying unit 210 with respect to the first substrate conveying unit 110, and has a structure that turns the first film conveying unit 210 upside down. The second film conveying unit 220 at least forms a conveying path for the second laminate film 31. The second laminate film 31 is attached to the second main surface 12 of the first substrate 10 (refer to Fig. 9 ). Sometimes, the place where the conveying path of the first substrate 10, the conveying path of the first laminate film 21, and the conveying path of the second laminate film 31 merge is recorded as the first confluence point. The first laminating unit 310 produces the second substrate 10A by laminating the first laminate film 21 and the second laminate film 31 to the first substrate 10 at the first confluence point.

[0046] In addition, the bonding device 100 may not include the second film conveying unit 220. In this case, the place where the conveying path of the first substrate 10 and the conveying path of the first laminate film 21 merge is called the first confluence point. The first bonding unit 310 produces the second substrate 10A by bonding the first substrate 10 and the first laminate film 21 at the first confluence point. In this case, the second laminate film 31 is not bonded to the second principal surface 12 of the first substrate 10. In addition, in the present embodiment, the first principal surface 11 of the first substrate 10 is the upper surface, and the second principal surface 12 of the first substrate 10 is the lower surface, but the configuration may be reversed. That is, the first principal surface 11 may be the lower surface, and the second principal surface 12 may be the upper surface. In this case, the bonding device 100 only needs to have a structure that is flipped upside down.

[0047] On the other hand, the laminating device 100 is provided with a second film conveying unit 220, which can simultaneously laminate the laminated film on both the first main surface 11 and the second main surface 12. Compared with laminating the laminated film on each single side, the total length of the laminating device 100 can be shortened, and the time required for laminating the laminated film on both sides can be reduced to about half. In addition, by laminating the laminated film on both sides at the same time, the first substrate 10 can be prevented from contacting the laminating roller, and the adhesion of dirt or damage can be suppressed.

[0048] Next, the main reference Figures 4 to 10 , the first substrate 10, the first stacked film 20, and the second stacked film 30 are described.

[0049] In this embodiment, the first substrate 10 is a glass substrate, but may also be a ceramic substrate, a resin substrate, or a metal substrate. Figure 4 As shown, the first main surface 11 of the first substrate 10 is a polygon. The polygon is not a rectangle, but it can also be a rectangle. Sometimes polygons other than rectangles are recorded as irregular shapes. In addition, the corners of the polygon can also be chamfered. In addition, the sides constituting the polygon are straight line shapes, but it can also be a shape in which the straight line is corrected to a free curve.

[0050] When observed from a direction perpendicular to the first main surface 11, the first substrate 10 may have a transmission area A1 for visible light to pass through and a light-shielding area A2 for shielding visible light. The transmission area A1, for example, transmits an image of a display. The light-shielding area A2 is formed to surround the transmission area A1. The light-shielding area A2 is, for example, composed of a printed layer formed on the second main surface 12. The printed layer is, for example, composed of a black material, which may be an inorganic material or an organic material. The first substrate 10 may also have a through hole not shown in the figure.

[0051] like Figure 5 As shown, the first laminate film 20 includes a first laminate film 21 and a first carrier film 22 (see Figure 6 ) On one surface of the first carrier film 22 , a plurality of first laminate films 21 are provided at intervals in the longitudinal direction of the first carrier film 22 .

[0052] The first laminate film 20 has a first alignment mark 23 indicating the position of the first laminate film 21 for each first laminate film 21. The first alignment mark 23 indicates the position of the first laminate film 21 in the longitudinal direction of the first carrier film 22. One or more first alignment marks 23 are provided for each first laminate film 21. The first alignment marks 23 may be provided on both sides of the first laminate film 21, that is, the positive direction side of the Y axis and the negative direction side of the Y axis.

[0053] like Figure 6 As shown, the first laminate film 21 includes a base film 21a and an adhesive layer 21b, and the adhesive layer 21b is bonded to one side of the first carrier film 22 with the first carrier film 22 facing the first laminate film 21. After the first laminate film 21 is peeled off from one side of the first carrier film 22, as shown in FIG. Fig. 9 As shown, the adhesive layer 21 b is attached to the first main surface 11 of the first substrate 10 with the adhesive layer 21 b facing the first substrate 10 .

[0054] like Fig.10 As shown, the first laminate film 21 has a shape similar to that of the first substrate 10 when viewed from a direction perpendicular to the first main surface 11 of the first substrate 10. In the present embodiment, the first laminate film 21 is smaller than the first substrate 10, but may be larger than the first substrate 10. In addition, the first laminate film 21 may also have the same size as the first substrate 10.

[0055] Sometimes the first laminate film 21 is smaller than the first substrate 10, and the entire first laminate film 21 is attached to the first main surface 11 of the first substrate 10. In this case, since the first laminate film 21 is fixed without protruding from the outer periphery of the first substrate 10, it is difficult to peel the first laminate film 21 and the first substrate 10.

[0056] Therefore, the first laminate film 21 may also have a first pull-tab which is not shown. The first pull-tab protrudes outward from a portion of the periphery of the first main surface 11 of the first substrate 10 to the outside of the first main surface 11. The operator or the operating robot can peel off the first laminate film 21 and the first substrate 10 while grasping the first pull-tab. The corners of the first pull-tab are preferably chamfered.

[0057] like Figure 5 , Figure 6 As shown, the first laminate film 20 may include a first laminate film 21 and a first outer film 24 disposed outside the first laminate film 21 on one side of the first carrier film 22. In addition, the first alignment mark 23 is provided on the first outer film 24.

[0058] like Figure 6As shown, the first laminate film 20 is half-cut in advance, and has a slit 27 that separates the first laminate film 21 and the first outer film 24. The slit 27 may reach one side of the first carrier film 22, but not the opposite side of the first carrier film 22. The slit 27 only needs to not penetrate the first carrier film 22. The slit 27 is formed over the entire periphery of the first laminate film 21.

[0059] like Fig. 9 As shown in FIG. 1 , after the first laminate film 21 and the first substrate 10 are bonded together, a portion of the first main surface 11 of the first substrate 10 is exposed from the first laminate film 21. In this case, Fig.11 As shown, the first outer film 24 preferably contacts the first substrate 10 and the first laminating roller 311 while passing through a pair of first laminating rollers 311 and 312. Thus, the contact between the first substrate 10 and the first laminating roller 311 can be suppressed, and friction and transfer of dirt can be suppressed. In the method of the present technology in which lamination is repeated multiple times, when it is desired to suppress the transfer of dirt, the lamination action is stopped each time for cleaning, which results in a large beat loss, so a mechanism to prevent such surface friction and transfer of dirt is important.

[0060] like Figure 6 As shown, the first outer film 24 has a base film 24a and an adhesive layer 24b, and the adhesive layer 24b is bonded to a single surface of the first carrier film 22 with the first outer film 24a facing the first carrier film 22. After the first outer film 24 is peeled off from a single surface of the first carrier film 22, as shown in FIG. Fig.11 As shown, the first outer film 24 passes through a pair of first laminating rollers 311 and 312. Then, the first outer film 24 is recovered to the first recovery unit 216 (see Figure 1 The first collecting unit 216 may include a first collecting shaft for winding up the first outer film 24 .

[0061] like Figure 7 As shown, the second laminate film 30 includes a second laminate film 31 and a second carrier film 32 that holds a plurality of second laminate films 31 at intervals in the conveying direction. On one surface of the second carrier film 32, a plurality of second laminate films 31 are provided at intervals in the longitudinal direction of the second carrier film 32.

[0062] The second laminate film 30 has a second alignment mark 33 indicating the position of the second laminate film 31 for each second laminate film 31. The second alignment mark 33 indicates the position of the second laminate film 31 in the longitudinal direction of the second carrier film 32. One or more second alignment marks 33 are provided for each second laminate film 31. The second alignment marks 33 may be provided on both sides of the second laminate film 31, that is, the positive direction side of the Y axis and the negative direction side of the Y axis.

[0063] like Figure 8As shown, the second laminate film 31 includes a base film 31a and an adhesive layer 31b, and the adhesive layer 31b is bonded to a single surface of the second carrier film 32 with the second laminate film 31 facing the second carrier film 32. After the second laminate film 31 is peeled off from a single surface of the second carrier film 32, as shown in FIG. Fig. 9 As shown, the adhesive layer 31 b is attached to the second main surface 12 of the first substrate 10 with the adhesive layer 31 b facing the first substrate 10 .

[0064] Although not shown, the second laminate film 31 has a shape similar to the first substrate 10, similar to the first laminate film 21. In the present embodiment, the second laminate film 31 is smaller than the first substrate 10, but may be larger than the first substrate 10. Alternatively, the second laminate film 31 may have the same size as the first substrate 10.

[0065] Sometimes the second laminate film 31 is smaller than the first substrate 10, and the entire second laminate film 31 is attached to the second main surface 12 of the first substrate 10. In this case, since the second laminate film 31 is fixed without protruding from the periphery of the first substrate 10, it is difficult to peel the second laminate film 31 and the first substrate 10.

[0066] Therefore, the second laminate film 31 may also have a second pull-tab (not shown). The second pull-tab protrudes outward from a portion of the periphery of the second main surface 12 of the first substrate 10 toward the outside of the second main surface 12. The operator or the operating robot can peel off the second laminate film 31 and the first substrate 10 while grasping the second pull-tab. The corners of the second pull-tab are preferably chamfered.

[0067] like Figure 7 , Figure 8 As shown, the second laminate film 30 may include a second laminate film 31 and a second outer film 34 disposed outside the second laminate film 31 on one side of the second carrier film 32. In addition, the second alignment mark 33 is provided on the second outer film 34.

[0068] like Figure 8 As shown, the second laminate film 30 is half-cut in advance, and has a slit 37 that divides the second laminate film 31 and the second outer film 34. The slit 37 may reach one side of the second carrier film 32, but not the opposite side of the second carrier film 32. The slit 37 only needs to not penetrate the second carrier film 32. The slit 37 is formed over the entire periphery of the second laminate film 31.

[0069] like Fig. 9 As shown in FIG. 1 , after the second laminate film 31 and the first substrate 10 are bonded together, a portion of the second main surface 12 of the first substrate 10 is exposed from the second laminate film 31. In this case, Fig.11As shown, the second outer film 34 preferably passes through the pair of first laminating rollers 311 and 312 while being in contact with the first substrate 10 and the first laminating roller 312. This can suppress contact between the first substrate 10 and the first laminating roller 312, and can suppress friction and transfer of dirt.

[0070] like Figure 8 As shown, the second outer film 34 has a base film 34a and an adhesive layer 34b, and the adhesive layer 34b is bonded to a single surface of the second carrier film 32 with the second outer film 34a facing the second carrier film 32. After the second outer film 34 is peeled off from a single surface of the second carrier film 32, as shown in FIG. Fig.11 As shown, the second outer film 34 passes through a pair of first laminating rollers 311 and 312. Then, the second outer film 34 is recovered to the second recovery unit 226 (see Figure 1 ). The second recovery unit 226 may also include a second recovery shaft for winding up the second outer film 34 .

[0071] Next, refer again to Figure 1-2 , the details of the upstream region of the laminating apparatus 100 will be described. The laminating apparatus 100 includes, for example, a first substrate conveying unit 110, a first film conveying unit 210, a second film conveying unit 220, a first laminating unit 310, and a control unit 190.

[0072] The control unit 190 is, for example, a computer, and includes a computing unit such as a CPU (Central Processing Unit) and a storage unit such as a memory. The storage unit stores a program for controlling various processes performed in the bonding device 100. The control unit 190 controls the operation of the bonding device 100 by causing the computing unit to execute the program stored in the storage unit.

[0073] The control unit 190 includes electronic circuits such as a CPU, FPGA (Field Programmable Gate Array) or ASIC (Application Specific Integrated Circuit), and performs various control actions described in the present application specification by executing command codes stored in a memory or by circuit design for special purposes.

[0074] The first substrate conveying unit 110 forms a conveying path for the first substrate 10. Fig. 9 As shown, the first substrate 10 has a first main surface 11 and a second main surface 12 opposite to the first main surface 11. The first main surface 11 is the upper surface, and the second main surface 12 is the lower surface. A plurality of first substrates 10 are arranged at intervals in the positive direction of the X-axis, and are transported in the positive direction of the X-axis together or individually.

[0075] like Figure 1As shown, the first substrate conveying unit 110 includes a plurality of first conveying rollers 111. The plurality of first conveying rollers 111 are arranged at intervals in the X-axis direction. The first conveying roller 111 includes, for example, a metal roller and a resin film covering the outer peripheral surface of the metal roller. The resin film is in contact with the first substrate 10. Thus, it is possible to prevent the first substrate 10 from being damaged.

[0076] The first substrate conveying unit 110 has a first conveying motor (not shown). The first conveying motor rotates the first conveying roller 111. A plurality of first conveying motors may rotate a plurality of first conveying rollers 111 individually. Alternatively, a single first conveying motor may rotate a plurality of first conveying rollers 111 simultaneously. The first substrate conveying unit 110 may not rotate all of the first conveying rollers 111 simultaneously.

[0077] The first substrate conveying unit 110 conveys the first substrate 10 in the positive direction of the X axis by rotating the plurality of first conveying rollers 111. The conveying speed of the first substrate 10 is equal to the peripheral speed of the first conveying rollers 111. The peripheral speed is the product of the circumference and the rotation speed (rpm).

[0078] The first substrate conveying unit 110 may also have a function of adjusting the first substrate 10 in the Y-axis direction and the θ Z The positioning portion is a not-shown positioning portion for adjusting the position in the direction. The positioning portion has, for example, a plurality of (e.g., four) rollers connected or separated with respect to the end surface of the first substrate 10 at intervals along the periphery of the first substrate 10. Preferably, after the positioning portion adjusts the position of the first substrate 10, the first laminating portion 310 laminates the first laminate film 21 and the second laminate film 31 with respect to the first substrate 10.

[0079] The first film conveying unit 210 forms, for example, a conveying path for the first laminate film 21 and a conveying path for the first carrier film 22. The first laminate film 21 is bonded to the first main surface 11 of the first substrate 10. The first carrier film 22 holds the plurality of first laminate films 21 at intervals in the conveying direction thereof.

[0080] The first film conveying unit 210 includes, for example, a first unwinding shaft 211, a first peeling body 212, and a first winding shaft 213. The first unwinding shaft 211 unwinds the first laminate film 20 that has been previously wound into a roll. The first peeling body 212 peels the first carrier film 22 and the first laminate film 21 by folding the first carrier film 22 back at a position before the first confluence point in the conveying path of the first carrier film 22. The first peeling body 212 has, for example, a wedge-shaped front end, and peels the first carrier film 22 and the first laminate film 21 at the front end. The first winding shaft 213 winds up the first carrier film 22 that has been folded back by the first peeling body 212 into a roll.

[0081] The first film conveying unit 210 may also include first relay rollers 214 and 215. The first relay roller 214 switches the conveying direction of the first laminate film 20 between the first unwinding shaft 211 and the first peeling body 212. A plurality of first relay rollers 214 may be provided. The first relay roller 215 switches the conveying direction of the first carrier film 22 between the first peeling body 212 and the first winding shaft 213. A plurality of first relay rollers 215 may be provided.

[0082] Preferably, a mechanism for sandwiching the first carrier film 22 between two rollers (not shown) and conveying the first carrier film 22 independently of the first winding shaft 213 is provided between the first peeling body 212 and the first winding shaft 213 of the first film conveying unit 210. The two rollers may be rollers in which one is driven by the other.

[0083] like Figure 2 As shown, the first film conveying unit 210 may also include a first separate adjustment unit 217. The first separate adjustment unit 217 is different from the first driving unit 102 described later, and moves a part of the first film conveying unit 210 instead of moving the entire first film conveying unit 210. The first separate adjustment unit 217 moves, for example, the first peeling body 212. The first separate adjustment unit 217 moves the first peeling body 212 in the positive direction of the Y axis and the negative direction of the Y axis. In addition, the first separate adjustment unit 217 moves the first peeling body 212 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Z axis, and the negative direction of the Z axis, and moves the first peeling body 212 in the θ Y Rotate in direction.

[0084] like Figure 1 As shown, the second film conveying unit 220 forms a conveying path for the second laminate film 31 and a conveying path for the second carrier film 32. The second laminate film 31 is attached to the second main surface 12 of the first substrate 10. The second carrier film 32 holds the plurality of second laminate films 31 at intervals in the conveying direction thereof.

[0085] The second film conveying unit 220 includes, for example, a second unwinding shaft 221, a second peeling body 222, and a second winding shaft 223. The second unwinding shaft 221 unwinds the second laminated film 30 that has been previously wound into a roll. The second peeling body 222 peels off the second carrier film 32 and the second laminated film 31 by folding the second carrier film 32 back at a position closer to the first confluence point in the conveying path of the second carrier film 32. The second peeling body 222 has, for example, a wedge-shaped front end, and peels off the second carrier film 32 and the second laminated film 31 at the front end. The second winding shaft 223 winds up the second carrier film 32 folded back by the second peeling body 222 into a roll.

[0086] The second film conveying unit 220 may also include second relay rollers 224 and 225. The second relay roller 224 switches the conveying direction of the second laminated film 30 between the second unwinding shaft 221 and the second peeling body 222. A plurality of second relay rollers 224 may be provided. The second relay roller 225 switches the conveying direction of the second carrier film 32 between the second peeling body 222 and the second winding shaft 223. A plurality of second relay rollers 225 may be provided.

[0087] Preferably, a mechanism for sandwiching the second carrier film 32 between two rollers (not shown) and conveying the second carrier film 32 independently of the second winding shaft 223 is provided between the second peeling body 222 and the second winding shaft 223 of the second film conveying unit 220. The two rollers may be rollers in which one is driven by the other.

[0088] like Figure 2 As shown, the second film conveying unit 220 may also include a second independent adjustment unit 227. The second independent adjustment unit 227 is different from the second driving unit 105 described later, and moves a part of the second film conveying unit 220 instead of moving the entire second film conveying unit 220. The second independent adjustment unit 227 moves, for example, the second peeling body 222. The second independent adjustment unit 227 moves the second peeling body 222 in the positive direction of the Y axis and the negative direction of the Y axis. In addition, the second independent adjustment unit 227 moves the second peeling body 222 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Z axis, and the negative direction of the Z axis, and moves the second peeling body 222 in the θ Y Rotate in direction.

[0089] The first laminating unit 310 laminates the first laminate film 21 and the second laminate film 31 to the first substrate 10 at the first confluence point to produce the second substrate 10A. The second substrate 10A includes the first laminate film 21 and the second laminate film 31 disposed with the first substrate 10 interposed therebetween.

[0090] The first laminating unit 310 includes, for example, a pair of first laminating rollers 311 and 312. The pair of first laminating rollers 311 and 312 sequentially sandwich the first laminating film 21, the first substrate 10, and the second laminating film 31 from the upper side to the lower side and deliver them. In addition, the first laminating unit 310 may be configured similarly to the second laminating unit 320 described later.

[0091] The first laminating unit 310 conveys the second substrate 10A in the positive direction of the X axis by, for example, rotating a pair of first laminating rollers 311 and 312. The conveying speed of the second substrate 10A is equal to the circumferential speed of the pair of first laminating rollers 311 and 312. The circumferential speed is the product of the circumference and the rotation speed (rpm). In addition, the circumferential speeds of the pair of first laminating rollers 311 and 312 are equal.

[0092] like Fig.11 As shown, the first laminating unit 310 has, for example, a pair of first rotating motors 313 and 314. The first rotating motor 313 rotates the first laminating roller 311. The first rotating motor 314 rotates the first laminating roller 312. In addition, one of the first rotating motors 313 and 314 may be absent. One of the pair of first laminating rollers 311 and 312 may also rotate in a driven manner as the other rotates.

[0093] like Figure 1 As shown, the laminating apparatus 100 includes a first mark detection unit 101. The first mark detection unit 101 detects the first alignment mark 23 before the first merging point in the conveyance path of the first lamination film 21. The detection position is preferably as close as possible to the first merging point.

[0094] The first mark detection unit 101 includes, for example, a photoelectric sensor. The photoelectric sensor includes a light emitting element and a light receiving element that receives light emitted from the light emitting element. In addition, the light emitting element may be a laser, and the photoelectric sensor may be a laser sensor.

[0095] The light emitting element and the light receiving element are provided, for example, on one side of the first laminate film 20. The light receiving element receives light reflected by the first laminate film 20. When the first alignment mark 23 is a through hole as described later, when the first alignment mark 23 passes through the optical path of light from the light emitting element toward the light receiving element, the amount of light received by the light receiving element is reduced.

[0096] In addition, the light emitting element and the light receiving element may be provided with the first stacked film 20 interposed therebetween, and the light receiving element may receive light that has passed through the first stacked film 20. When the first alignment mark 23 is a through hole as described later, when the first alignment mark 23 passes through the optical path of light from the light emitting element toward the light receiving element, the amount of light received by the light receiving element increases.

[0097] The first alignment mark 23 is, for example, a through hole. Alternatively, the first alignment mark 23 may be a notch. The through hole and the notch are formed by penetrating the first laminate film 20 along its thickness direction. Thus, the amount of light received by the light receiving element is easily changed, and the first alignment mark 23 can be detected with high precision.

[0098] In addition, the first mark detection unit 101 is not limited to a photoelectric sensor. A proximity sensor may be used instead of a photoelectric sensor. In addition, the first mark detection unit 101 may also include an imaging sensor and an image processing device. The image processing device detects the first alignment mark 23 by processing an image captured by the imaging sensor. The first alignment mark 23 may also be printed with ink.

[0099] The control unit 190 controls the conveyance of the first laminating film 21 based on the detection result of the first mark detection unit 101. The control object includes at least one of the conveyance distance, conveyance speed, and conveyance time. Thus, the positional deviation of the first laminating film 21 and the first substrate 10 in the X-axis direction can be suppressed at the beginning of lamination, and the first laminating film 21 and the first substrate 10 can be laminated with high precision.

[0100] It is also possible to suppress positional deviation of the first laminate film 21 and the first substrate 10 in the Y-axis direction at the start of lamination. Figure 1 As shown, the laminating device 100 may also include a first driving unit 102 and a first edge detection unit 103. The first driving unit 102 moves the first film conveying unit 210 in the positive direction of the Y axis and the negative direction of the Y axis. The first driving unit 102 includes, for example, a motor and a ball screw that converts the rotational motion of the motor into the linear motion of the first film conveying unit 210.

[0101] The first driving unit 102 moves the components of the first film conveying unit 210, such as the first unwinding shaft 211, the first peeling body 212, and the first winding shaft 213. The conveying path of the first laminating film 21 and the conveying path of the first carrier film 22 can be moved relative to the conveying path of the first substrate 10 while maintaining the relative positions of these components.

[0102] The first edge detection unit 103 detects the end of the first laminate film 20 in at least one direction of the positive direction of the Y axis and the negative direction of the Y axis (in the present embodiment, in both directions). The detected portion is, for example, the end of the first carrier film 22. The first edge detection unit 103 has, for example, a laser displacement sensor. Alternatively, the first edge detection unit 103 may also have an imaging sensor and an image processing device. The image processing device detects the end of the first laminate film 20 by processing the image captured by the imaging sensor.

[0103] The control unit 190 controls the first driving unit 102 based on the detection result of the first edge detection unit 103, thereby controlling the first laminate film 21 to move to a desired position in the positive direction of the Y axis or the negative direction of the Y axis. As a result, the positional deviation of the first laminate film 21 and the first substrate 10 in the Y axis direction can be suppressed at the start of lamination, and the first laminate film 21 and the first substrate 10 can be laminated with high precision.

[0104] The first driving unit 102 and the first edge detection unit 103 can also be used for θ Z The first driving unit 102 can also adjust the position of the first laminating film 21 and the first substrate 10 in the θ direction. ZIn addition, the first edge detection unit 103 may detect one end of the first laminated film 20 in the width direction at a plurality of locations spaced apart in the length direction of the first laminated film 20. In addition, the first edge detection unit 103 may detect the other end of the first laminated film 20 in the width direction at a plurality of locations spaced apart in the length direction of the first laminated film 20. Figure 1 As shown, a plurality of first edge detection units 103 may be provided at intervals in the longitudinal direction of the first stacked film 20. The first edge detection unit 103 detects the inclination of the first stacked film 20 relative to the reference direction, and the first driving unit 102 moves the first film conveying unit 210 in θ based on the detection result. Z Alternatively, the first edge detection unit 103 may detect the inclination of the first laminate film 20 relative to the reference direction, and the first position adjustment unit 316 described later may adjust the first substrate 10 in the θ direction based on the detection result. Z Rotate in direction.

[0105] The control unit 190 controls the first drive unit 102 based on the detection result of the first edge detection unit 103, thereby causing the first laminate film 21 to move at θ Z Alternatively, the control unit 190 controls the first position adjustment unit 316 based on the detection result of the first edge detection unit 103, thereby moving the first substrate 10 in the θ direction to a desired position. Z Thus, the θ can be controlled to rotate to the desired position at the beginning of bonding. Z By eliminating the positional deviation of the first laminate film 21 and the first substrate 10 in the direction, the first laminate film 21 and the first substrate 10 can be bonded together with high accuracy.

[0106] The laminating device 100 includes a second mark detection unit 104. The second mark detection unit 104 detects the second alignment mark 33 before the first merging point in the conveying path of the second laminating film 31. The detection position is preferably as close as possible to the first merging point. The second mark detection unit 104 is configured similarly to the first mark detection unit 101.

[0107] The second alignment mark 33 is, for example, a through hole. Alternatively, the second alignment mark 33 may be a notch. The through hole and the notch are formed by penetrating the second laminate film 30 in the thickness direction thereof. Thus, the amount of light received by the light receiving element is easily changed, and the second alignment mark 33 can be detected with high precision.

[0108] The control unit 190 controls the conveyance of the second laminate film 31 based on the detection result of the second mark detection unit 104. The control object includes at least one of the conveyance distance, conveyance speed, and conveyance time. Thus, the positional deviation of the second laminate film 31 and the first substrate 10 in the X-axis direction can be suppressed at the beginning of lamination, and the second laminate film 31 and the first substrate 10 can be laminated with high precision.

[0109] It is also possible to suppress positional deviation of the second laminate film 31 and the first substrate 10 in the Y-axis direction at the start of lamination. Figure 1 As shown, the laminating device 100 may also include a second drive unit 105 and a second edge detection unit 106. The second drive unit 105 moves the second film conveying unit 220 in the positive direction of the Y axis and the negative direction of the Y axis. The second drive unit 105 includes, for example, a motor and a ball screw that converts the rotational motion of the motor into the linear motion of the second film conveying unit 220.

[0110] The second driving unit 105 moves the components of the second film conveying unit 220, such as the second unwinding shaft 221, the second peeling body 222, and the second winding shaft 223. The conveying path of the second laminating film 31 and the conveying path of the second carrier film 32 can be moved relative to the conveying path of the first substrate 10 while maintaining the relative positions of these components.

[0111] The second edge detection unit 106 detects the end of the second laminate film 30 in at least one direction of the Y-axis positive direction and the Y-axis negative direction (in this embodiment, in both directions). The detected portion is, for example, the end of the second carrier film 32. The second edge detection unit 106 is configured similarly to the first edge detection unit 103.

[0112] The control unit 190 controls the second driving unit 105 based on the detection result of the second edge detection unit 106, thereby controlling the second laminate film 31 to move to a desired position in the positive direction of the Y axis or the negative direction of the Y axis. As a result, the positional deviation of the second laminate film 31 and the first substrate 10 in the Y axis direction can be suppressed at the start of lamination, and the second laminate film 31 and the first substrate 10 can be laminated with high precision.

[0113] The second driving unit 105 and the second edge detection unit 106 can also be used for θ Z The second driving unit 105 can also adjust the position of the second laminating film 31 and the first substrate 10 in the θ direction. ZIn addition, the second edge detection unit 106 may detect one end of the second laminated film 30 in the width direction at multiple locations spaced apart in the length direction of the second laminated film 30. In addition, the second edge detection unit 106 may detect the other end of the second laminated film 30 in the width direction at multiple locations spaced apart in the length direction of the second laminated film 30. Figure 1 As shown, a plurality of second edge detection units 106 may be provided at intervals in the longitudinal direction of the second laminated film 30. The second edge detection unit 106 detects the inclination of the second laminated film 30 relative to the reference direction, and the second driving unit 105 moves the second film conveying unit 220 in θ based on the detection result. Z Alternatively, the second edge detection unit 106 may detect the inclination of the second stacked film 30 relative to the reference direction, and the first position adjustment unit 316 described later may adjust the first substrate 10 in the θ direction based on the detection result. Z Rotate in direction.

[0114] The control unit 190 controls the second drive unit 105 based on the detection result of the second edge detection unit 106, thereby causing the second laminate film 31 to move at θ Z Alternatively, the control unit 190 controls the first position adjustment unit 316 based on the detection result of the second edge detection unit 106, thereby moving the first substrate 10 in the θ direction to a desired position. Z Thus, the θ can be controlled to rotate to the desired position at the beginning of bonding. Z By eliminating the positional deviation of the second laminate film 31 and the first substrate 10 in the direction, the second laminate film 31 and the first substrate 10 can be bonded together with high accuracy.

[0115] The first laminating unit 310 may also include a first adsorption plate 315. The first adsorption plate 315 adsorbs the first substrate 10. For example, the first adsorption plate 315 vacuum adsorbs the first substrate 10. Preferably, the first adsorption plate 315 adsorbs the first substrate 10 after the first substrate conveying unit 110 adjusts the position of the first substrate 10 using a roller or the like.

[0116] The first adsorption plate 315 adsorbs the first substrate 10 from the first substrate conveying unit 110 until at least one pair of first laminating rollers 311 and 312 sandwich the first substrate 10. The first adsorption plate 315 can suppress the position of the first substrate 10 from being shifted due to the impact when the pair of first laminating rollers 311 and 312 sandwich the first substrate 10.

[0117] The first adsorption plate 315 is, for example, disposed opposite to the second main surface 12 of the first substrate 10. The first adsorption plate 315 includes, for example, a metal plate and a resin film covering the surface of the metal plate opposite to the first substrate 10. The resin film is in contact with the first substrate 10. Thus, it is possible to prevent the first substrate 10 from being damaged. For example, Figure 3 As shown, the first suction plate 315 is disposed in a space formed by dividing the first conveying roller 111 along the Y-axis direction.

[0118] like Figure 2 As shown, the first adsorption plate 315 can continue to adsorb the first substrate 10 during the period when the pair of first laminating rollers 311 and 312 clamp and deliver the first substrate 10. The first adsorption plate 315 can stabilize the posture of the first substrate 10. During this period, in order to suppress the generation of sliding friction caused by the difference in conveying speed and suppress damage or adhesion of dirt, the control unit 190 controls the circumferential speed of the pair of first laminating rollers 311 and 312 and the moving speed of the first adsorption plate 315 to the same speed. Here, the same conveying speed means that the conveying speed of one side (for example, the circumferential speed of the first laminating rollers 311 and 312) is 95% to 105% of the conveying speed of the other side (for example, the moving speed of the first adsorption plate 315).

[0119] Before the first adsorption plate 315 collides with the first laminating roller 312, the first adsorption plate 315 may also stop moving in the positive direction of the X-axis to release the adsorption of the first substrate 10. During this period, the rotation of the pair of first laminating rollers 311 and 312 is stopped so as not to generate sliding friction. Then, the pair of first laminating rollers 311 and 312 rotate again, sandwiching the first substrate 10 and sending it out.

[0120] In addition, when the first adsorption plate 315 releases the adsorption of the first substrate 10, if the movement of the first adsorption plate 315 and the rotation of the pair of first laminating rollers 311 and 312 are stopped, a trace indicating the bonding position at that moment remains. Therefore, the first adsorption plate 315 may also release the adsorption of the first substrate 10 while continuing to move in the positive direction of the X axis. It is preferred that the movement speed of the first adsorption plate 315 be decelerated before the first adsorption plate 315 releases the adsorption of the first substrate 10.

[0121] like Figure 1 As shown, the first laminating unit 310 may also have a first position adjusting unit 316 and a first position detecting unit 317. The first position adjusting unit 316 moves the first adsorption plate 315 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Y axis, the negative direction of the Y axis, the positive direction of the Z axis, and the negative direction of the Z axis, and moves the first adsorption plate 315 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Y axis, the negative direction of the Y axis, the positive direction of the Z axis, and the negative direction of the Z axis. ZThe first position detection unit 317 detects the position of the first substrate 10 after the first suction plate 315 suctions the first substrate 10 and before the pair of first laminating rollers 311 and 312 sandwich the first substrate 10 .

[0122] The first position detection unit 317 detects the position of the first substrate 10 by, for example, detecting the positions of a plurality of feature points of the first substrate 10. The feature points of the first substrate 10 are, for example, the angle of the periphery of the first main surface 11 of the first substrate 10, or the angle of the boundary line between the transparent area A1 and the light shielding area A2. The first position detection unit 317 includes, for example, an imaging sensor and an image processing device. The image processing device detects the positions of the feature points by processing the image captured by the imaging sensor. The first position detection unit 317 detects, for example, the positions of the first substrate 10 in the X-axis direction, the Y-axis direction, and the θ-axis direction. Z Position in direction.

[0123] The control unit 190 controls the first position adjustment unit 316 based on the detection result of the first position detection unit 317, thereby controlling the first substrate 10 to move or rotate to a desired position. Z The position in the direction is controlled to be a desired position. Therefore, the first laminate film 21 and the first substrate 10 can be bonded together with high accuracy.

[0124] The laminating device 100 may also include a second substrate conveying unit 120. The second substrate conveying unit 120 forms a conveying path for the second substrate 10A manufactured by the first laminating unit 310. The second substrate conveying unit 120 is, for example, disposed on an extension line of the first substrate conveying unit 110. A plurality of second substrates 10A are arranged at intervals in the positive direction of the X-axis, and are conveyed in the positive direction of the X-axis together or individually.

[0125] The second substrate conveying unit 120 includes a plurality of second conveying rollers 121. The plurality of second conveying rollers 121 are arranged at intervals in the X-axis direction. The second conveying rollers 121 include, for example, a metal roller and a resin film covering the outer peripheral surface of the metal roller. The resin film is in contact with the second substrate 10A. Thus, it is possible to prevent the second substrate 10A from being damaged.

[0126] The second substrate conveying unit 120 has a second conveying motor (not shown). The second conveying motor rotates the second conveying rollers 121. A plurality of second conveying motors may rotate a plurality of second conveying rollers 121 individually. Alternatively, a single second conveying motor may rotate a plurality of second conveying rollers 121 simultaneously. The second substrate conveying unit 120 may not rotate all the second conveying rollers 121 simultaneously.

[0127] The second substrate conveying unit 120 conveys the second substrate 10A in the positive direction of the X axis by rotating the plurality of second conveying rollers 121. The conveying speed of the second substrate 10A is equal to the peripheral speed of the second conveying rollers 121. The peripheral speed is the product of the circumference and the rotation speed (rpm).

[0128] The second substrate conveying unit 120 may also have a function of adjusting the second substrate 10A in the Y-axis direction and the θ Z The positioning portion is a non-illustrated positioning portion for adjusting the position in the direction. The positioning portion has, for example, a plurality of (e.g., four) rollers connected or separated relative to the end surface of the second substrate 10A at intervals along the periphery of the second substrate 10A. Preferably, after the positioning portion adjusts the position of the second substrate 10A, the second bonding portion 320 described later bonds the second substrate 10A and the third laminating film 41.

[0129] However, after laminating the laminated film, dirt and damage are often found on the surface of the laminated film and the surface of the substrate. Since the dirt and damage are mostly tiny, it is difficult to find them visually and it is difficult to determine their causes. Therefore, the inventors conducted a number of laminating tests to investigate the shape, position, range and regularity of the dirt and scratches, and found that the main cause is the speed difference between the laminating roller and the conveying unit.

[0130] Therefore, the control unit 190 controls the conveying speed of the second substrate 10A in the first laminating unit 310 and the second substrate conveying unit 120 separately. Fig.14 As shown, the control unit 190 preferably controls the first laminating unit 310 and the second substrate conveying unit 120 to operate at the same conveying speed until the second substrate 10A is separated from the pair of first laminating rollers 311 and 312. Here, the same conveying speed means that the conveying speed of one side (for example, the conveying speed VL of the first laminating unit 310) is 95% to 105% of the conveying speed of the other side (for example, the conveying speed VS of the second substrate conveying unit).

[0131] As described above, the control unit 190 controls the first laminating unit 310 and the second substrate conveying unit 120 to operate at the same conveying speed until the second substrate 10A is separated from the pair of first laminating rollers 311 and 312. Therefore, the generation of sliding friction caused by the difference in conveying speeds VL and VS can be suppressed, and damage or dirt adhesion can be suppressed. In particular, if Fig.12 and Fig.13 As shown, when the second lamination film 31 is not attached to the second main surface 12 of the first substrate 10 and the first lamination roller 312 is in contact with the second main surface 12 of the first substrate 10 , the effect of suppressing damage or adhesion of dirt can be easily obtained.

[0132] like Fig.13As shown, when the first laminating roller 312 is in contact with the second main surface 12 of the first substrate 10, the first laminating section 310 preferably has a cleaning roller 318. During the period when the outer peripheral surface of the first laminating roller 312 is in contact with the first substrate 10, the cleaning roller 318 is in contact with the outer peripheral surface of the first laminating roller 312 and removes foreign matter from the outer peripheral surface. Thus, the outer peripheral surface of the first laminating roller 312 can be kept clean without stopping the laminating operation, and dirt can be prevented from being attached to the first substrate 10. In addition, even when the first substrate 10 is continuously laminated, it is not necessary to stop the laminating operation, which helps to shorten the cycle.

[0133] like Fig.14 As shown, the control unit 190 stops the rotation of the pair of first laminating rollers 311 and 312 after the second substrate 10A completely passes through the pair of first laminating rollers 311 and 312. The control unit 190 does not stop the rotation of the pair of first laminating rollers 311 and 312 at the moment of completion of the bonding of the first laminating film 21 and the first substrate 10, but continues the rotation. Thus, the generation of sliding friction caused by the difference in conveying speed can be suppressed, and the attachment of damage or dirt can be suppressed.

[0134] Reference Figure 15-16 , the operation of the upstream area of ​​the bonding device 100 is described. The first adsorption plate 315 is in advance on standby below the conveying path of the first substrate 10. When the first substrate 10 moves to a specified position in the positive direction of the X-axis and stops, the first adsorption plate 315 rises and adsorbs the lower surface of the first substrate 10. The first adsorption plate 315 further rises to separate the first substrate 10 upward from the first conveying roller 111. Next, in a state where the first adsorption plate 315 adsorbs the first substrate 10, the first position detection unit 317 detects the position of the first substrate 10. Next, the control unit 190 controls the first position adjustment unit 316 based on the detection result of the first position detection unit 317, thereby adjusting the first substrate 10 in the X-axis direction, the Y-axis direction and the θ direction. Z The position in the direction is controlled to the desired position.

[0135] Next, the first adsorption plate 315 moves in the positive direction of the X axis while adsorbing the first substrate 10, and inserts the first substrate 10 between the pair of first laminating rollers 311 and 312. Next, the upper first laminating roller 311 descends, and the lower first laminating roller 312 rises. Then, the pair of first laminating rollers 311 and 312 sequentially sandwich the first laminating film 21, the first substrate 10, and the second laminating film 31 from the upper side to the lower side.

[0136] Next, if Fig.16As shown, a pair of first laminating rollers 311 and 312 sandwich the first substrate 10 and deliver it. During this period, the first adsorption plate 315 can also continue to adsorb the first substrate 10. The first adsorption plate 315 can stabilize the posture of the first substrate 10. During this period, the control unit 190 controls the circumferential speed of the pair of first laminating rollers 311 and 312 and the moving speed of the first adsorption plate 315 to the same speed in order to suppress the generation of sliding friction caused by the difference in conveying speed.

[0137] Before the first adsorption plate 315 collides with the first laminating roller 312, the first adsorption plate 315 stops moving in the positive direction of the X-axis and releases the adsorption of the first substrate 10. During this period, the rotation of the pair of first laminating rollers 311 and 312 is stopped. Then, the pair of first laminating rollers 311 and 312 rotate again, sandwiching the first substrate 10 and sending it out.

[0138] In addition, when the first adsorption plate 315 releases the adsorption of the first substrate 10, if the movement of the first adsorption plate 315 and the rotation of the pair of first laminating rollers 311 and 312 are stopped, a trace indicating the bonding position at that moment remains. Therefore, the first adsorption plate 315 may also release the adsorption of the first substrate 10 while continuing to move in the positive direction of the X axis. It is preferred that the movement speed of the first adsorption plate 315 be decelerated before the first adsorption plate 315 releases the adsorption of the first substrate 10.

[0139] After the first laminating film 21, the first substrate 10 and the second laminating film 31 are bonded, the obtained second substrate 10A is moved in the positive direction of the X axis by the second substrate conveying unit 120. In addition, after the first adsorption plate 315 releases the adsorption of the first substrate 10, it moves to the original position and waits below the conveying path of the first substrate 10.

[0140] During the repeated bonding of the first laminating film 21, the first substrate 10, and the second laminating film 31, the first mark detection unit 101 detects the first alignment mark 23 at a position closer to the first junction. The control unit 190 controls the conveyance of the first laminating film 21 based on the detection result of the first mark detection unit 101. The object of control includes at least one of the conveyance distance, the conveyance speed, and the conveyance time. Thus, the positional deviation of the first laminating film 21 and the first substrate 10 in the X-axis direction can be suppressed at the start of bonding, and the first laminating film 21 and the first substrate 10 can be bonded with high precision.

[0141] In addition, during the repeated bonding of the first laminate film 21, the first substrate 10, and the second laminate film 31, the second mark detection unit 104 detects the second alignment mark 33 at a position closer to the first junction. The control unit 190 controls the conveyance of the second laminate film 31 based on the detection result of the second mark detection unit 104. The control object includes at least one of the conveyance distance, the conveyance speed, and the conveyance time. As a result, the positional deviation of the second laminate film 31 and the first substrate 10 in the X-axis direction can be suppressed at the start of bonding, and the second laminate film 31 and the first substrate 10 can be bonded with high precision.

[0142] Next, the main reference Fig.17 , an overview of the midstream area of ​​the laminating device 100 involved in one embodiment is described. The laminating device 100, for example, includes a second substrate conveying unit 120, a third film conveying unit 230, and a second laminating unit 320. The second substrate conveying unit 120 forms a conveying path for the second substrate 10A. The third film conveying unit 230 forms at least a conveying path for the third laminating film 41. The third laminating film 41 replaces the second laminating film 31 and is laminated to the second main surface 12 of the first substrate 10. Sometimes the place where the conveying path of the second substrate 10A and the conveying path of the third laminating film 41 merge is recorded as a second confluence location. The second laminating unit 320 produces the third substrate 10B by laminating the second substrate 10A and the third laminating film 41 at the second confluence location.

[0143] The second laminating section 320 can perform laminating of the third laminating film 41 and the first substrate 10 independently of laminating of the first laminating film 21 and the first substrate 10 after laminating of the first laminating film 21 and the first substrate 10. Thus, even if the third laminating film 41 protrudes by more than 5 mm from at least a portion of the periphery of the second main surface 12 of the first substrate 10, and the protruding portion shakes toward the first main surface 11, since the first outer film 24 has been recovered and removed by the first recovery section 216 in the first laminating section 310 of the front section of the laminating device 100, the adhesive layer 41b of the third laminating film 41 will not adhere to the adhesive layer 24b of the first outer film 24. Thus, it is possible to prevent the peripheral portion of the third laminating film from adhering to the first outer laminating film, thereby preventing a defect from occurring during the laminating operation, or preventing dirt or damage from occurring on the glass substrate.

[0144] Furthermore, assuming that the first laminate film 21 is laminated to the first main surface 11 of the first substrate 10 and the third laminate film 41 is laminated to the second main surface 12 of the first substrate 10 at the first laminating section 310, when the protruding portion of the third laminate film 41 is shaken toward the first main surface 11, the adhesive layer 41b of the protruding portion adheres to the adhesive layer 24b of the first outer film 24. As a result, the first substrate 10 and the third laminate film 41 are dragged to the first outer film 24, making it difficult to continue the laminating operation at the first laminating section 310. In addition, the third laminate film 41 may protrude by more than 5 mm over the entire periphery of the second main surface 12 of the first substrate 10.

[0145] Next, the main reference Figure 18 to Figure 21 , the third stacked film 40 is described. Fig.18 As shown, the third laminate film 40 includes a third laminate film 41 and a third carrier film 42 for holding a plurality of third laminate films 41 at intervals in the conveying direction thereof. On one surface of the third carrier film 42, a plurality of third laminate films 41 are provided at intervals in the longitudinal direction of the third carrier film 42.

[0146] The third laminate film 40 has a third alignment mark 43 indicating the position of the third laminate film 41 for each third laminate film 41. The third alignment mark 43 indicates the position of the third laminate film 41 in the length direction of the third carrier film 42. One or more third alignment marks 43 are provided for each third laminate film 41. The third alignment mark 43 may also be provided on both sides of the third laminate film 41, that is, the Y-axis positive direction side and the Y-axis negative direction side.

[0147] like Fig.19 As shown, the third laminate film 41 has a base film 41a and an adhesive layer 41b, and the adhesive layer 41b is bonded to a single surface of the third carrier film 42 with the third carrier film 42 facing the third laminate film 41. After the third laminate film 41 is peeled off from a single surface of the third carrier film 42, as shown in FIG. Fig. 20 As shown, the adhesive layer 41 b is attached to the second main surface 12 of the first substrate 10 with the adhesive layer 41 b facing the first substrate 10 .

[0148] like Fig.21 As shown, when viewed from a direction perpendicular to the first main surface 11 or the second main surface 12 of the first substrate 10, the third laminate film 41 may not have a shape similar to the first substrate 10, and may have a rectangular shape, for example. The third laminate film 41 may be larger than the first substrate 10. The third laminate film 41 may also protrude over the entire periphery of the first substrate 10.

[0149] The third laminate film 41 is larger than the first substrate 10. Therefore, after the third laminate film 41 and the first substrate 10 are attached, it is easy to peel the third laminate film 41 and the first substrate 10. The operator or the operating robot can peel the third laminate film 41 and the first substrate 10 while grasping the portion of the third laminate film 41 protruding from the first substrate 10. Therefore, the third laminate film 41 does not need to have a pull tab.

[0150] like Fig.18 , Fig.19 As shown, the third laminate film 40 may include a third laminate film 41 and a third outer film 44 disposed outside the third laminate film 41 on one side of a third carrier film 42. In addition, the third alignment mark 43 is provided on the third outer film 44.

[0151] like Fig.19 As shown, the third laminate film 40 is half-cut in advance, and has a slit 47 that separates the third laminate film 41 and the third carrier film 42. The slit 47 may reach one side of the third carrier film 42, but not the opposite side of the third carrier film 42. The slit 47 only needs to not penetrate the third carrier film 42. The slit 47 is formed over the entire periphery of the third laminate film 41.

[0152] like Fig.19 As shown, the third outer film 44 has a base film 44a and an adhesive layer 44b, and the adhesive layer 44b is bonded to one side of the third carrier film 42 toward the third carrier film 42. The third outer film 44 is not peeled off from one side of the third carrier film 42, but is wound together with the third carrier film 42 on the third winding shaft 233 (see Fig.17 ).

[0153] Next, refer again to Fig.17 , the details of the midstream area of ​​the laminating apparatus 100 will be described. The laminating apparatus 100 includes, for example, a second substrate conveying unit 120, a third film conveying unit 230, a second laminating unit 320, and a control unit 190.

[0154] The third film conveying unit 230 forms, for example, a conveying path for the third laminate film 41 and a conveying path for the third carrier film 42. The third laminate film 41 is bonded to the second main surface 12 of the first substrate 10. The third carrier film 42 holds a plurality of third laminate films 41 at intervals in the conveying direction thereof.

[0155] The third film conveying unit 230 includes, for example, a third unwinding shaft 231, a third peeling body 232, and a third winding shaft 233. The third unwinding shaft 231 unwinds the third laminate film 40 that has been previously wound into a roll. The third peeling body 232 peels the third carrier film 42 and the third laminate film 41 by folding the third carrier film 42 back at a position before the second confluence point in the conveying path of the third carrier film 42. The third peeling body 232 has, for example, a wedge-shaped front end, and peels the third carrier film 42 and the third laminate film 41 at the front end. The third winding shaft 233 winds up the third carrier film 42 folded back by the third peeling body 232 into a roll.

[0156] The third stripping body 232 folds the third outer film 44 back together with the third carrier film 42. The third winding shaft 233 winds up the third outer film 44 folded back together with the third carrier film 42 by the third stripping body 232 into a roll together with the third carrier film 42. The third outer film 44 may not pass through the second confluence point. This is because, if Fig. 22 As shown, since the third lamination film 41 is larger than the first substrate 10 , it covers the entire second main surface 12 of the first substrate 10 , so that the first substrate 10 and the second lamination roller 322 do not contact each other.

[0157] like Fig.17 As shown, the third film conveying unit 230 may also include third relay rollers 234 and 235. The third relay roller 234 converts the conveying direction of the third laminated film 40 between the third unwinding shaft 231 and the third peeling body 232. A plurality of third relay rollers 234 may be provided. The third relay roller 235 converts the conveying direction of the third carrier film 42 between the third peeling body 232 and the third winding shaft 233. A plurality of third relay rollers 235 may be provided.

[0158] Preferably, a mechanism for sandwiching the third carrier film 42 between two rollers (not shown) and conveying the third carrier film 42 independently of the third winding shaft 233 is provided between the third peeling body 232 and the third winding shaft 233 of the third film conveying unit 230. The two rollers may be rollers in which one is driven by the other.

[0159] The third film conveying unit 230 may also be provided with a third independent adjustment unit (not shown) similarly to the second film conveying unit 220. The third independent adjustment unit is different from the third driving unit 108 described later, and moves a part of the third film conveying unit 230 instead of moving the entire third film conveying unit 230. The third independent adjustment unit moves, for example, the third peeling body 232. The third independent adjustment unit moves the third peeling body 232 in the positive direction of the Y axis and the negative direction of the Y axis. In addition, the third independent adjustment unit moves the third peeling body 232 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Z axis, and the negative direction of the Z axis, and moves the third peeling body 232 in the θ Y Rotate in direction.

[0160] The second laminating unit 320 laminates the second substrate 10A and the third laminate film 41 at the second junction to produce the third substrate 10B. The third substrate 10B includes the first laminate film 21 and the third laminate film 41 disposed with the first substrate 10 interposed therebetween.

[0161] The second laminating unit 320, for example, includes a second laminating roller 322 and a second adsorption plate 325. The second laminating roller 322 and the second adsorption plate 325 are arranged to sandwich the conveying path of the second substrate 10A. The second laminating roller 322 is in contact with the third laminating film 41. The second adsorption plate 325 does not contact the first substrate 10, but only adsorbs the first laminating film 21 attached to the first main surface 11 of the first substrate 10 so as not to damage or contaminate the first substrate 10 in the second substrate 10A, and receives the second substrate 10A from the second substrate conveying unit 120.

[0162] In a state where the second laminating roller 322 and the second adsorption plate 325 sandwich the second substrate 10A and the third laminating film 41 and the second adsorption plate 325 adsorbs the second substrate 10A, the second adsorption plate 325 moves toward the positive direction of the X axis relative to the second laminating roller 322. Fig. 22 As shown, the second rotation motor 324 rotates the second laminating roller 322 . Thus, the third laminating film 41 can be bonded to the second main surface 12 of the first substrate 10 .

[0163] When the second adsorption plate 325 moves in the positive direction of the X-axis, the second laminating roller 322 is rotated at the same circumferential speed as the moving speed of the second adsorption plate 325. It is sufficient as long as the conveying speed of one side (for example, the circumferential speed of the second laminating roller 322) is 95% to 105% of the conveying speed of the other side (for example, the moving speed of the second adsorption plate 325). This control is performed until the third substrate 10B is separated from the second laminating roller 322. After the third substrate 10B is separated from the second laminating roller 322, the control unit 190 stops the rotation of the second laminating roller 322. At the moment when the lamination of the third laminating film 41 and the second substrate 10A is completed, the control unit 190 does not stop the rotation of the second laminating roller 322, but continues the rotation. In this way, the generation of sliding friction caused by the difference in conveying speed can be suppressed, and the adhesion of damage or dirt can be suppressed.

[0164] like Fig.17As shown, the second adsorption plate 325 adsorbs the second substrate 10A. For example, the second adsorption plate 325 performs vacuum adsorption on the second substrate 10A. The second adsorption plate 325, for example, has a metal plate and a resin film covering the opposite surface of the metal plate to the second substrate 10A. The resin film is in contact with the second substrate 10A. Thus, damage to the second substrate 10A can be suppressed. The second adsorption plate 325 is, for example, set on the side opposite to the third film conveying part 230 (for example, the upper side) with the second substrate conveying part 120 as a reference.

[0165] The second laminating unit 320 may also include a second position adjusting unit 326 and a second position detecting unit 327. The second position adjusting unit 326 moves the second adsorption plate 325 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Y axis, the negative direction of the Y axis, the positive direction of the Z axis, and the negative direction of the Z axis, and moves the second adsorption plate 325 in the positive direction of the X axis, the negative direction of the X axis, the positive direction of the Y axis, the negative direction of the Y axis, the positive direction of the Z axis, and the negative direction of the Z axis. Z The second position detection unit 327 detects the position of the second substrate 10A after the second suction plate 325 suctions the second substrate 10A and before the second suction plate 325 and the second laminating roller 322 sandwich the second substrate 10A.

[0166] The second position detection unit 327 detects the position of the second substrate 10A, for example, by detecting the positions of each of a plurality of feature points of the second substrate 10A (more specifically, the first substrate 10 included in the second substrate 10A). The feature point of the second substrate 10A is, for example, the angle of the periphery of the second main surface 12 of the first substrate 10, or the angle of the boundary line between the transparent area A1 and the light shielding area A2. The second position detection unit 327 includes, for example, an imaging sensor and an image processing device. The image processing device detects the position of the feature point by processing the image captured by the imaging sensor. The second position detection unit 327 detects, for example, the position of the second substrate 10A in the X-axis direction, the Y-axis direction, and the θ direction. Z Position in direction.

[0167] The control unit 190 controls the second position adjustment unit 326 based on the detection result of the second position detection unit 327, thereby controlling the second substrate 10A to move or rotate to a desired position. In this way, the second substrate 10A (more specifically, the first substrate 10 included in the second substrate 10A) can be moved in the X-axis direction, the Y-axis direction, and the θ direction. Z The position in the direction is controlled to be a desired position. Therefore, the third laminate film 41 and the second substrate 10A can be bonded together with high accuracy.

[0168] like Fig.17As shown, the laminating device 100 includes a third mark detection unit 107. The third mark detection unit 107 detects the third alignment mark 43 at a position before the second merging point in the conveying path of the third laminating film 41. The detection position is preferably as close to the second merging point as possible. The third mark detection unit 107 is configured similarly to the first mark detection unit 101.

[0169] The third alignment mark 43 is, for example, a through hole. Alternatively, the third alignment mark 43 may be a notch. The through hole and the notch are formed by penetrating the third laminate film 40 in the thickness direction thereof. Thus, the amount of light received by the light receiving element is easily changed, and the third alignment mark 43 can be detected with high precision.

[0170] The control unit 190 controls the conveyance of the third laminate film 41 based on the detection result of the third mark detection unit 107. The control object includes at least one of the conveyance distance, the conveyance speed, and the conveyance time. Thus, the positional deviation of the third laminate film 41 and the first substrate 10 in the X-axis direction can be suppressed at the beginning of lamination, and the third laminate film 41 and the first substrate 10 can be laminated with high precision.

[0171] At the start of lamination, the positional deviation between the third laminate film 41 and the first substrate 10 in the Y-axis direction can also be suppressed. Fig.17 As shown, the laminating device 100 may also include a third driving unit 108 and a third edge detection unit 109. The third driving unit 108 moves the third film conveying unit 230 in the positive direction of the Y axis and the negative direction of the Y axis. The third driving unit 108 includes, for example, a motor and a ball screw that converts the rotational motion of the motor into the linear motion of the third film conveying unit 230.

[0172] The third driving unit 108 moves the components of the third film conveying unit 230, such as the third unwinding shaft 231, the third peeling body 232, and the third winding shaft 233. While maintaining the relative positions of these components, the conveying path of the third laminating film 41 and the conveying path of the third carrier film 42 can be moved relative to the conveying path of the second substrate 10A (including the first substrate 10).

[0173] The third edge detection unit 109 detects the end of the third laminate film 40 in at least one direction of the Y-axis positive direction and the Y-axis negative direction (in this embodiment, in both directions). The detected portion is, for example, the end of the third carrier film 42. The third edge detection unit 109 is configured similarly to the first edge detection unit 103.

[0174] The control unit 190 controls the third driving unit 108 based on the detection result of the third edge detection unit 109, thereby controlling the third laminate film 41 to move to a desired position in the positive direction of the Y axis or the negative direction of the Y axis. As a result, the positional deviation of the third laminate film 41 and the second substrate 10A in the Y axis direction can be suppressed at the start of lamination, and the third laminate film 41 and the second substrate 10A can be laminated with high precision.

[0175] The third driving unit 108 and the third edge detection unit 109 may also be used for θ Z The third driving unit 108 can also adjust the position of the third laminate film 41 and the second substrate 10A in the θ direction. Z In addition, the third edge detection unit 109 may detect one end of the third laminated film 40 in the width direction at a plurality of locations spaced apart in the length direction of the third laminated film 40. In addition, the third edge detection unit 109 may detect the other end of the third laminated film 40 in the width direction at a plurality of locations spaced apart in the length direction of the third laminated film 40. Fig.17 As shown, a plurality of third edge detection units 109 may be provided at intervals in the longitudinal direction of the third laminated film 40. The third edge detection unit 109 detects the inclination of the third laminated film 40 relative to the reference direction, and the third driving unit 108 moves the third film conveying unit 230 in θ based on the detection result. Z Alternatively, the third edge detection unit 109 may detect the inclination of the third stacked film 40 relative to the reference direction, and the second position adjustment unit 326 described later may adjust the second substrate 10A in the θ direction based on the detection result. Z Rotate in direction.

[0176] The control unit 190 controls the third driving unit 108 based on the detection result of the third edge detection unit 109, thereby causing the third laminate film 41 to move at θ Z Alternatively, the control unit 190 controls the second position adjustment unit 326 based on the detection result of the third edge detection unit 109, thereby moving the second substrate 10A in the θ direction. Z Thus, the θ can be controlled to rotate to the desired position at the beginning of bonding. Z The third laminate film 41 and the second substrate 10A are shifted in position in the direction, and the third laminate film 41 and the second substrate 10A can be bonded together with high accuracy.

[0177] Next, refer to Fig.23, the action of the midstream area of ​​the bonding device 100 is described. The second adsorption plate 325 is in advance on standby above the conveying path of the second substrate 10A. When the second substrate 10A moves to a specified position in the positive direction of the X-axis and stops, the second adsorption plate 325 descends and adsorbs the upper surface of the second substrate 10A. Next, the second adsorption plate 325 rises to separate the second substrate 10A upward from the second conveying roller 121. Next, in a state where the second adsorption plate 325 adsorbs the second substrate 10A, the second position detection unit 327 detects the position of the second substrate 10A (more specifically, the first substrate 10 included in the second substrate 10A). Next, the control unit 190 controls the second position adjustment unit 326 based on the detection result of the second position detection unit 327, thereby adjusting the second substrate 10A (more specifically, the first substrate 10 included in the second substrate 10A) in the X-axis direction, the Y-axis direction and the θ direction. Z The position in the direction is controlled to the desired position.

[0178] Next, the second adsorption plate 325 moves in the positive direction of the X-axis while adsorbing the second substrate 10A, and then moves in the negative direction of the Z-axis. In addition, the second laminating roller 322 moves in the positive direction of the Z-axis. Then, in the state where the second laminating roller 322 and the second adsorption plate 325 clamp the second substrate 10A and the third laminating film 41, and the second adsorption plate 325 adsorbs the second substrate 10A, the second adsorption plate 325 moves in the positive direction of the X-axis relative to the second laminating roller 322. At this time, the second rotary motor 324 rotates the second laminating roller 322. Thereby, the third laminating film 41 can be bonded to the second main surface 12 of the first substrate 10. During the bonding of the third laminating film 41 to the second main surface 12 of the first substrate 10, in order to prevent contamination, it is preferred to form a gap between the first substrate 10 and the second conveying roller 121. In addition, while the third laminate film 41 is bonded to the second main surface 12 of the first substrate 10 , it is preferable to form a gap between the third laminate film 41 and the third transport roller 131 in order to prevent contamination.

[0179] When the third substrate 10B moves in the positive direction of the X-axis together with the second adsorption plate 325, the second laminating roller 322 is rotated at the same circumferential speed as their moving speed. This control is performed until the third substrate 10B is separated from the second laminating roller 322. After the third substrate 10B is separated from the second laminating roller 322, the control unit 190 stops the rotation of the second laminating roller 322. At the moment when the lamination of the third laminating film 41 and the second substrate 10A is completed, the control unit 190 does not stop the rotation of the second laminating roller 322, but continues the rotation. In this way, the generation of sliding friction caused by the difference in conveying speed can be suppressed, and the adhesion of damage or dirt can be suppressed.

[0180] After the lamination of the third laminating film 41 and the second substrate 10A is completed, the second adsorption plate 325 moves in the negative direction of the Z axis, so that the third substrate 10B is lowered onto the third substrate conveying unit 130. Then, the second adsorption plate 325 releases the adsorption of the third substrate 10B and then moves in the positive direction of the Z axis. Then, the third substrate conveying unit 130 moves the third substrate 10B in the positive direction of the X axis. In addition, after moving in the positive direction of the Z axis, the second adsorption plate 325 moves in the negative direction of the X axis and waits at the original position. Then, when the next second substrate 10A moves to the positive direction of the X axis to a specified position and stops, the second adsorption plate 325 descends again and adsorbs the upper surface of the second substrate 10A.

[0181] During the repeated bonding of the third laminate film 41 and the second substrate 10A, the third mark detection unit 107 detects the third alignment mark 43 at a position closer to the second junction. The control unit 190 controls the conveyance of the third laminate film 41 based on the detection result of the third mark detection unit 107. The control object includes at least one of the conveyance distance, the conveyance speed, and the conveyance time. Thus, the positional deviation of the third laminate film 41 and the second substrate 10A in the X-axis direction can be suppressed at the start of bonding, and the third laminate film 41 and the second substrate 10A can be bonded with high precision.

[0182] Next, the main reference Fig.24 , an overview of the downstream area of ​​the laminating device 100 involved in one embodiment is described. The laminating device 100, for example, includes a third substrate conveying unit 130, a fourth film conveying unit 240, a fifth film conveying unit 250 and a third laminating unit 330. The third substrate conveying unit 130 forms a conveying path for the second substrate 10A. The fourth film conveying unit 240 forms at least a conveying path for the fourth laminating film 51. The fourth laminating film 51 is laminated to a single surface (e.g., the upper surface) of the second substrate 10A. The fifth film conveying unit 250 is arranged on the side opposite to the fourth film conveying unit 240 with the third substrate conveying unit 130 as a reference, and has a structure that flips the fourth film conveying unit 240 upside down. The fifth film conveying unit 250 forms at least a conveying path for the fifth laminating film 61. The fifth laminating film 61 is laminated to the opposite surface (e.g., the lower surface) of the second substrate 10A. The point where the conveyance paths of the second substrate 10A, the fourth laminating film 51, and the fifth laminating film 61 merge is sometimes described as a third merging point. The third laminating unit 330 laminates the second substrate 10A, the fourth laminating film 51, and the fifth laminating film 61 at the third merging point to produce the fourth substrate 10C.

[0183] Next, the main reference Figure 25 to Figure 28 , the fourth stacked film 50 and the fifth stacked film 60 are described.

[0184] like Fig.25As shown, the fourth laminate film 50, for example, includes a fourth laminate film 51 and a fourth carrier film 52 that holds the fourth laminate film 51. The fourth laminate film 51 is provided on one side of the fourth carrier film 52. The fourth laminate film 51 and the fourth carrier film 52 may also have the same width (the same Y-axis direction dimension). The fourth laminate film 50 may not be half-cut. Therefore, the fourth carrier film 52 may not be provided, and the fourth laminate film 50 may only include the fourth laminate film 51.

[0185] like Fig.25 As shown in FIG. 1 , the fourth laminate film 51 includes a base film 51a and an adhesive layer 51b, and the adhesive layer 51b is bonded to a single surface of the fourth carrier film 52 with the adhesive layer 51b facing the fourth carrier film 52. After the fourth laminate film 51 is peeled off from a single surface of the fourth carrier film 52, as shown in FIG. Fig. 27 As shown, the adhesive layer 51b is attached to one side of the second substrate 10A toward the second substrate 10A, and the adhesive layer 51b is attached to one side of the second substrate 10A by a cutting machine 339 (see Fig.24 ) is cut into the desired size. After cutting, Fig.28 As shown, when viewed from a direction perpendicular to a single surface of the second substrate 10A, the fourth laminate film 51 may not have a shape similar to the first substrate 10, and may have a rectangular shape, for example. The fourth laminate film 51 may be larger than the first substrate 10, and may protrude over the entire periphery of the first substrate 10.

[0186] like Fig.26 As shown, the fifth laminated film 60, for example, includes a fifth laminated film 61 and a fifth carrier film 62 that holds the fifth laminated film 61. The fifth laminated film 61 is provided on one side of the fifth carrier film 62. The fifth laminated film 61 and the fifth carrier film 62 may also have the same width (the same Y-axis direction dimension). The fifth laminated film 60 may not be half-cut. Therefore, the fifth carrier film 62 may not be provided, and the fifth laminated film 60 may only include the fifth laminated film 61.

[0187] like Fig.26 As shown in FIG. 1 , the fifth laminate film 61 includes a base film 61a and an adhesive layer 61b, and the adhesive layer 61b is bonded to one side of the fifth carrier film 62 with the fifth carrier film 62 facing the fifth laminate film 61. After the fifth laminate film 61 is peeled off from one side of the fifth carrier film 62, as shown in FIG. Fig. 27 As shown, the adhesive layer 61b is attached to the opposite side of the second substrate 10A toward the second substrate 10A, and the adhesive layer 61b is attached to the opposite side of the second substrate 10A by a cutting machine 339 (see Fig.24 ) is cut into a desired size. After cutting, when viewed from a direction perpendicular to the opposite surface of the second substrate 10A, the fifth laminate film 61 may not have a shape similar to the first substrate 10, and may have a rectangular shape, for example. The fifth laminate film 61 may be larger than the first substrate 10, and may protrude over the entire periphery of the first substrate 10.

[0188] Next, refer again to Fig.24 , the details of the downstream area of ​​the laminating apparatus 100 will be described. The laminating apparatus 100 includes, for example, a third substrate conveying unit 130, a fourth film conveying unit 240, a fifth film conveying unit 250, and a third laminating unit 330.

[0189] The third substrate conveyor 130 is connected to the second substrate conveyor 120 to form a conveying path for the second substrate 10A. In addition, the second substrate conveyor 120 can also serve as the third substrate conveyor 130. In this embodiment, Fig. 27 As shown, the second substrate 10A has the first substrate 10 and the first laminate film 21, but does not have the second laminate film 31 or the third laminate film 41. However, the second substrate 10A may also have the second laminate film 31 or the third laminate film 41. A plurality of second substrates 10A are arranged at intervals in the positive direction of the X-axis, and are transported in the positive direction of the X-axis together or individually.

[0190] like Fig.24 As shown, the third substrate conveying unit 130 includes a plurality of third conveying rollers 131. The plurality of third conveying rollers 131 are arranged at intervals in the X-axis direction. The third conveying roller 131 includes, for example, a metal roller and a resin film covering the outer peripheral surface of the metal roller. The resin film is in contact with the second substrate 10A. Thus, it is possible to prevent the second substrate 10A from being damaged.

[0191] The third substrate conveying unit 130 has a third conveying motor (not shown). The third conveying motor rotates the third conveying rollers 131. A plurality of third conveying motors may rotate a plurality of third conveying rollers 131 individually. Alternatively, a single third conveying motor may rotate a plurality of third conveying rollers 131 together. The third substrate conveying unit 130 may not rotate all the third conveying rollers 131 simultaneously.

[0192] The third substrate conveying unit 130 conveys the second substrate 10A in the positive direction of the X axis by rotating the third conveying rollers 131. The conveying speed of the second substrate 10A is equal to the peripheral speed of the third conveying rollers 131. The peripheral speed is the product of the circumference and the rotation speed (rpm).

[0193] The third substrate conveying unit 130 may also be configured to adjust the second substrate 10A in the Y-axis direction and the θ Z The positioning unit 330 preferably has a third laminating unit 330 that laminates the fourth laminate film 51 and the fifth laminate film 61 relative to the second substrate 10A after the positioning unit adjusts the position of the second substrate 10A.

[0194] The fourth film conveying unit 240 forms, for example, a conveying path for the fourth laminate film 51 and a conveying path for the fourth carrier film 52 . The fourth laminate film 51 is bonded to one surface (eg, the upper surface) of the second substrate 10A. The fourth carrier film 52 holds the fourth laminate film 51 .

[0195] The fourth film conveying unit 240 includes, for example, a fourth unwinding shaft 241, a fourth peeling body 242, and a fourth winding shaft 243. The fourth unwinding shaft 241 unwinds the fourth laminate film 50 that has been wound up in a roll. The fourth peeling body 242 peels the fourth carrier film 52 and the fourth laminate film 51 at a position before the third confluence point in the conveying path of the fourth carrier film 52. The fourth peeling body 242 includes, for example, a pair of rollers. The fourth winding shaft 243 winds up the fourth carrier film 52 peeled by the fourth peeling body 242 into a roll.

[0196] The fourth film conveying unit 240 may also include fourth relay rollers 244, 245, and 246. The fourth relay roller 244 converts the conveying direction of the fourth laminated film 50 between the fourth unwinding shaft 241 and the fourth peeling body 242. A plurality of fourth relay rollers 244 may be provided. The fourth relay roller 245 converts the conveying direction of the fourth carrier film 52 between the fourth peeling body 242 and the fourth winding shaft 243. A plurality of fourth relay rollers 245 may be provided. The fourth relay roller 246 converts the conveying direction of the fourth laminated film 51 between the fourth peeling body 242 and the third laminating unit 330. A plurality of fourth relay rollers 246 may be provided.

[0197] The fifth film transport unit 250 forms, for example, a transport path for the fifth laminate film 61 and a transport path for the fifth carrier film 62 . The fifth laminate film 61 is attached to the opposite surface (eg, the lower surface) of the second substrate 10A. The fifth carrier film 62 holds the fifth laminate film 61 .

[0198] The fifth film conveying unit 250 includes, for example, a fifth unwinding shaft 251, a fifth peeling body 252, and a fifth winding shaft 253. The fifth unwinding shaft 251 unwinds the fifth laminate film 60 that has been previously wound into a roll. The fifth peeling body 252 peels the fifth carrier film 62 and the fifth laminate film 61 at a position before the third confluence point in the conveying path of the fifth carrier film 62. The fifth peeling body 252 includes, for example, a pair of rollers. The fifth winding shaft 253 winds up the fifth carrier film 62 peeled by the fifth peeling body 252 into a roll.

[0199] The fifth film conveying unit 250 may also include fifth relay rollers 254, 255, and 256. The fifth relay roller 254 switches the conveying direction of the fifth laminate film 60 between the fifth unwinding shaft 251 and the fifth peeling body 252. A plurality of fifth relay rollers 254 may be provided. The fifth relay roller 255 switches the conveying direction of the fifth carrier film 62 between the fifth peeling body 252 and the fifth winding shaft 253. A plurality of fifth relay rollers 255 may be provided. The fifth relay roller 256 switches the conveying direction of the fifth laminate film 61 between the fifth peeling body 252 and the third laminating unit 330. A plurality of fifth relay rollers 256 may be provided.

[0200] The third laminating unit 330 laminates the fourth laminate film 51 and the fifth laminate film 61 to the second substrate 10A at the third junction to produce the fourth substrate 10C. The fourth substrate 10C includes the fourth laminate film 51 and the fifth laminate film 61, which are arranged with the second substrate 10A interposed therebetween.

[0201] The third laminating unit 330 includes, for example, a pair of third laminating rollers 331 and 332. The pair of third laminating rollers 331 and 332 sequentially sandwich the fourth laminating film 51, the second substrate 10A, and the fifth laminating film 61 from the upper side to the lower side and deliver them.

[0202] like Fig.29 As shown, the third laminating unit 330 conveys the second substrate 10A in the positive direction of the X axis by, for example, rotating a pair of third laminating rollers 331 and 332. The conveying speed of the second substrate 10A is equal to the circumferential speed of the pair of third laminating rollers 331 and 332. The circumferential speed is the product of the circumference and the rotation speed (rpm). In addition, the circumferential speeds of the pair of third laminating rollers 331 and 332 are equal.

[0203] The third laminating unit 330 includes, for example, a pair of third rotating motors 333 and 334. The third rotating motor 333 rotates the third laminating roller 331. The third rotating motor 334 rotates the third laminating roller 332. In addition, one of the third rotating motors 333 and 334 may be omitted. One of the pair of third laminating rollers 331 and 332 may rotate in a driven manner as the other rotates.

[0204] After the third laminating unit 330 laminates the fourth laminate film 51 and the fifth laminate film 61 to the second substrate 10A, the cutting machine 339 cuts the fourth laminate film 51 and the fifth laminate film 61. In the case of cutting after laminating, the position accuracy of the fourth laminate film 51 relative to the second substrate 10A and the position accuracy of the fifth laminate film 61 relative to the second substrate 10A can also be relaxed during laminating.

[0205] In this way, by disposing the third laminating section 330 in series connection on the downstream side of the first laminating section 310, the fourth laminating film 51 and the fifth laminating film 61 can be continuously laminated to the second substrate 10A and a plurality of fourth substrates 10C can be manufactured in a short time, which helps to shorten the cycle. In addition, the chance of contact between the device parts and the hands of a person and the second substrate 10A caused by discontinuous lamination and intermittent lamination of the fourth laminating film 51 and the fifth laminating film 61 after the second substrate 10A is manufactured can be reduced, and dirt and damage to the second substrate 10A and the first substrate 10 can be suppressed. In addition, even if the second laminating section 320 is disposed between the first laminating section 310 and the third laminating section 330, it will not hinder the shortening of the cycle.

[0206] In addition, since the operation of the downstream area of ​​the bonding device 100 is a general operation, the illustration and description are omitted.

[0207] Regarding the above-mentioned embodiment and the like, the following supplementary notes are disclosed.

[0208] [Note 1]

[0209] A laminating device, comprising:

[0210] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0211] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0212] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0213] The first laminate film and the first carrier film constitute a first laminate film.

[0214] The first laminate film has a first alignment mark indicating a position of the first laminate film for each of the first laminate films.

[0215] The above-mentioned laminating device comprises:

[0216] A first mark detection unit detects the first alignment mark at a position before the first merging point in the conveyance path of the first laminate film; and

[0217] The control unit controls the conveyance of the first laminate film based on the detection result of the first mark detection unit.

[0218] [Note 2]

[0219] According to the laminating device described in Appendix 1,

[0220] The first alignment mark is a through hole or a notch, and is formed by penetrating the first laminate film in the thickness direction thereof.

[0221] [Note 3]

[0222] The laminating device according to Appendix 1 or 2,

[0223] The first film conveying unit comprises: a first unwinding shaft for unwinding the first laminated film previously wound into a roll; a first peeling body for peeling the first carrier film and the first laminated film by folding the first carrier film back at a position closer to the first confluence point in the conveying path of the first carrier film; and a first winding shaft for winding the first carrier film folded back by the first peeling body into a roll.

[0224] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0225] The above-mentioned bonding device comprises: a first driving unit, which moves the above-mentioned first film conveying unit along the above-mentioned third direction and the above-mentioned fourth direction; a first edge detection unit, which detects the end of the above-mentioned first laminated film in at least one direction of the above-mentioned third direction and the above-mentioned fourth direction; and a control unit, which controls the above-mentioned first driving unit based on the detection result of the above-mentioned first edge detection unit, thereby controlling the above-mentioned first laminated film to move to a desired position along the above-mentioned third direction or the above-mentioned fourth direction.

[0226] [Note 4]

[0227] According to the laminating device described in Appendix 3,

[0228] The first driving unit rotates the first film transport unit when viewed from the fifth direction or the sixth direction.

[0229] The control unit controls the first drive unit based on the detection result of the first edge detection unit, thereby performing control to rotate the first laminate film to a desired position.

[0230] [Note 5]

[0231] The laminating device according to any one of appendices 1 to 4,

[0232] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0233] The first film conveying section includes: a first peeling body that peels the first carrier film and the first laminated film by folding the first carrier film back at a position in front of the first confluence point in the conveying path of the first carrier film; and a first separate adjustment section that moves the first peeling body along the third direction and the fourth direction.

[0234] [Note 6]

[0235] The laminating device according to any one of appendices 1 to 5,

[0236] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0237] The first film conveying section includes: a first peeling body that peels the first carrier film and the first laminated film by folding the first carrier film back at a position in front of the first confluence point in the conveying path of the first carrier film; and a first separate adjustment section that moves the first peeling body in the first direction, the second direction, the fifth direction, and the sixth direction, and rotates the first peeling body when viewed from the third direction or the fourth direction.

[0238] [Note 7]

[0239] The laminating device according to any one of appendices 1 to 6,

[0240] The first laminating unit includes: a pair of first laminating rollers for sandwiching the first substrate and the first laminating film and delivering them; and a first adsorption plate for adsorbing the first substrate.

[0241] The first suction plate suctions the first substrate from the time when the first suction plate receives the first substrate from the first substrate conveying portion until the time when the at least one pair of first laminating rollers sandwiches the first substrate.

[0242] [Note 8]

[0243] According to the laminating device described in Appendix 7,

[0244] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0245] The first laminating section comprises: a first position adjusting section, which moves the first adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and rotates the first adsorption plate when viewed from the fifth direction or the sixth direction; and a first position detecting section, which detects the position of the first substrate after the first adsorption plate adsorbs the first substrate and before the pair of first laminating rollers clamp the first substrate.

[0246] The bonding apparatus includes a control unit configured to control the first position adjustment unit based on a detection result of the first position detection unit to thereby perform control to move or rotate the first substrate to a desired position.

[0247] [Note 9]

[0248] The laminating device according to any one of appendices 1 to 8,

[0249] The first laminating section includes a pair of first laminating rollers for feeding the first substrate and the first laminating film while sandwiching the first substrate and the first laminating film.

[0250] The laminating device comprises: a second substrate conveying unit forming a conveying path for the second substrate produced by the first laminating unit; and a control unit controlling the conveying speed of the second substrate separately in the first laminating unit and the second substrate conveying unit.

[0251] The control unit performs control to operate the pair of first laminating rollers and the second substrate conveying unit at the same conveying speed until the second substrate is separated from the pair of first laminating rollers.

[0252] [Note 10]

[0253] The laminating device according to any one of appendices 1 to 9,

[0254] The first laminating section includes a pair of first laminating rollers for feeding the first substrate and the first laminating film while sandwiching the first substrate and the first laminating film.

[0255] The first laminate film includes the first laminate film and a first outer film disposed on the outer side of the first laminate film on one side of the first carrier film.

[0256] After the first substrate and the first laminate film are bonded together, in a case where a portion of the first main surface of the first substrate is exposed from the first laminate film,

[0257] The bonding device includes a first recovery unit that recovers the first outer film separately from the first substrate and the first laminating film after the first outer film and the first laminating film are in contact with the first substrate and the first laminating roller at the same time and pass through a pair of the first laminating rollers.

[0258] [Note 11]

[0259] The laminating device according to any one of appendices 1 to 10,

[0260] The first laminating section comprises: a first laminating roller in contact with the second main surface of the first substrate; and a cleaning roller in contact with the outer peripheral surface of the first laminating roller and removing foreign matter from the outer peripheral surface while the outer peripheral surface of the first laminating roller is in contact with the first substrate.

[0261] [Note 12]

[0262] The laminating device according to any one of appendices 1 to 10,

[0263] A second film conveying unit is provided, the second film conveying unit forming a conveying path for a second laminate film bonded to the second main surface of the first substrate and a conveying path for a second carrier film for holding a plurality of the second laminate films at intervals in a conveying direction thereof,

[0264] The first laminating section includes a pair of first laminating rollers for feeding the first laminating film, the first substrate, and the second laminating film while sandwiching the first laminating film, the first laminating rollers, and the second laminating film.

[0265] The second substrate includes the first laminate film and the second laminate film, and the first laminate film and the second laminate film are arranged with the first substrate interposed therebetween.

[0266] [Note 13]

[0267] The laminating device according to any one of Supplementary Notes 1 to 11, comprising:

[0268] A second substrate conveying unit, forming a conveying path for the second substrate manufactured by the first laminating unit;

[0269] A third film conveying section forming a conveying path for a third laminate film bonded to the second main surface of the first substrate and a conveying path for a third carrier film for holding a plurality of the third laminate films at intervals in a conveying direction thereof; and

[0270] The second laminating unit laminates the second substrate and the third laminating film at a second confluence point where the conveying path of the second substrate and the conveying path of the third laminating film merge to produce a third substrate.

[0271] The third laminate film protrudes from at least a portion of the periphery of the second main surface of the first substrate by 5 mm or more.

[0272] [Note 14]

[0273] According to the laminating device described in Appendix 13,

[0274] The third laminate film and the third carrier film constitute a third laminate film.

[0275] The third laminate film comprises the third laminate film and a third outer film disposed on the outer side of the third laminate film on one side of the third carrier film.

[0276] The third film conveying section comprises: a third unwinding shaft for unwinding the third laminated film previously wound into a roll; a third peeling body for peeling the third carrier film and the third laminated film by folding the third carrier film back at a position closer to the second confluence point in the conveying path of the third carrier film; and a third winding shaft for winding the third outer film folded back by the third peeling body together with the third carrier film into a roll.

[0277] [Note 15]

[0278] The laminating device according to Supplement 13 or 14,

[0279] The second laminating unit comprises: a second adsorption plate that adsorbs the first laminating film without contacting the first substrate and receives the second substrate from the second substrate conveying unit; and a second laminating roller that contacts the third laminating film.

[0280] The second suction plate moves relative to the second laminating roller in a state where the second suction plate and the second laminating roller sandwich the second substrate and the third laminating film and the second suction plate adsorbs the second substrate.

[0281] [Note 16]

[0282] According to the laminating device described in Appendix 15,

[0283] When the conveying direction of the second substrate in the second substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0284] The second laminating section comprises: a second position adjusting section, which moves the second adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and rotates the second adsorption plate when viewed from the fifth direction or the sixth direction; and a second position detecting section, which detects the position of the second substrate after the second adsorption plate adsorbs the second substrate and before the second adsorption plate and the second laminating roller clamp the second substrate.

[0285] The bonding device includes a control unit that controls the second position adjustment unit based on the detection result of the second position detection unit, thereby performing control to move or rotate the second adsorption plate to a desired position.

[0286] [Note 17]

[0287] The laminating device according to any one of Supplementary Notes 1 to 16, comprising:

[0288] A third substrate conveying unit, forming a conveying path for the second substrate manufactured by the first laminating unit;

[0289] a fourth film conveying section forming a conveying path for a fourth laminating film bonded to a single surface of the second substrate;

[0290] a fifth film conveying section forming a conveying path for a fifth lamination film to be attached to the opposite surface of the second substrate; and

[0291] The third laminating unit laminates the fourth laminate film and the fifth laminate film relative to the second substrate at a third confluence point where the conveying path of the second substrate, the conveying path of the fourth laminate film, and the conveying path of the fifth laminate film converge to produce a fourth substrate.

[0292] The third laminating section includes a pair of third laminating rollers for feeding out the fourth laminating film, the second substrate, and the fifth laminating film while sandwiching the fourth laminating film, the second substrate, and the fifth laminating film.

[0293] [Note 18]

[0294] A laminating method comprising the step of laminating the first substrate and the first laminate film using the laminating apparatus according to any one of Supplementary Notes 1 to 17.

[0295] [Note 19]

[0296] A laminating device, comprising:

[0297] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0298] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0299] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0300] The first laminate film and the first carrier film constitute a first laminate film.

[0301] The first film conveying unit comprises: a first unwinding shaft for unwinding the first laminated film previously wound into a roll; a first peeling body for peeling the first carrier film and the first laminated film by folding the first carrier film back at a position closer to the first confluence point in the conveying path of the first carrier film; and a first winding shaft for winding the first carrier film folded back by the first peeling body into a roll.

[0302] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0303] The above-mentioned bonding device comprises: a first driving unit, which moves the above-mentioned first film conveying unit along the above-mentioned third direction and the above-mentioned fourth direction; a first edge detection unit, which detects the end of the above-mentioned first laminated film in at least one direction of the above-mentioned third direction and the above-mentioned fourth direction; and a control unit, which controls the above-mentioned first driving unit based on the detection result of the above-mentioned first edge detection unit, thereby controlling the above-mentioned first laminated film to move to a desired position along the above-mentioned third direction or the above-mentioned fourth direction.

[0304] [Note 20]

[0305] According to the laminating device described in Appendix 19,

[0306] The first driving unit rotates the first film transport unit when viewed from the fifth direction or the sixth direction.

[0307] The control unit controls the first drive unit based on the detection result of the first edge detection unit, thereby performing control to rotate the first laminate film to a desired position.

[0308] [Note 21]

[0309] A laminating device, comprising:

[0310] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0311] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0312] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0313] The first laminate film and the first carrier film constitute a first laminate film.

[0314] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0315] The first film conveying section includes: a first peeling body that peels the first carrier film and the first laminated film by folding the first carrier film back at a position in front of the first confluence point in the conveying path of the first carrier film; and a first separate adjustment section that moves the first peeling body along the third direction and the fourth direction.

[0316] [Note 22]

[0317] According to the laminating device described in Appendix 21,

[0318] The first individual adjustment section moves the first peeling body in the first direction, the second direction, the fifth direction, and the sixth direction, and rotates the first peeling body when viewed from the third direction or the fourth direction.

[0319] [Note 23]

[0320] A laminating device, comprising:

[0321] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0322] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0323] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0324] The first laminate film and the first carrier film constitute a first laminate film.

[0325] The first laminating unit includes: a pair of first laminating rollers for sandwiching the first substrate and the first laminating film and delivering them; and a first adsorption plate for adsorbing the first substrate.

[0326] The first suction plate suctions the first substrate from the time when the first suction plate receives the first substrate from the first substrate conveying unit to the time when at least one pair of first laminating rollers sandwiches the first substrate.

[0327] [Note 24]

[0328] According to the laminating device described in Appendix 23,

[0329] When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0330] The first laminating section comprises: a first position adjusting section, which moves the first adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and rotates the first adsorption plate when viewed from the fifth direction or the sixth direction; and a first position detecting section, which detects the position of the first substrate after the first adsorption plate adsorbs the first substrate and before the pair of first laminating rollers clamp the first substrate.

[0331] The bonding apparatus includes a control unit configured to control the first position adjustment unit based on a detection result of the first position detection unit to thereby perform control to move or rotate the first substrate to a desired position.

[0332] [Note 25]

[0333] A laminating device, comprising:

[0334] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0335] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0336] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0337] The first laminate film and the first carrier film constitute a first laminate film.

[0338] The first laminating section includes a pair of first laminating rollers for feeding the first substrate and the first laminating film while sandwiching the first substrate and the first laminating film.

[0339] The first laminate film includes the first laminate film and a first outer film disposed on the outer side of the first laminate film on one side of the first carrier film.

[0340] After the first substrate and the first laminate film are bonded together, in a case where a portion of the first main surface of the first substrate is exposed from the first laminate film,

[0341] The bonding device includes a first recovery unit that recovers the first outer film separately from the first substrate and the first laminating film after the first outer film and the first laminating film are in contact with the first substrate and the first laminating roller at the same time and pass through a pair of the first laminating rollers.

[0342] [Note 26]

[0343] A laminating device, comprising:

[0344] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0345] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0346] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0347] The first laminate film and the first carrier film constitute a first laminate film.

[0348] The first laminating section comprises: a first laminating roller in contact with the second main surface of the first substrate; and a cleaning roller in contact with the outer peripheral surface of the first laminating roller and removing foreign matter from the outer peripheral surface while the outer peripheral surface of the first laminating roller is in contact with the first substrate.

[0349] [Note 27]

[0350] A laminating device, comprising:

[0351] A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface;

[0352] a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film that holds a plurality of the first laminate films at intervals in a conveying direction thereof; and

[0353] The first laminating unit laminates the first substrate and the first laminating film at a first merging point where the conveying path of the first substrate and the conveying path of the first laminating film merge to form a second substrate.

[0354] The first laminate film and the first carrier film constitute a first laminate film.

[0355] The above-mentioned laminating device comprises:

[0356] A second substrate conveying unit, forming a conveying path for the second substrate manufactured by the first laminating unit;

[0357] A third film conveying section forming a conveying path for a third laminate film bonded to the second main surface of the first substrate and a conveying path for a third carrier film for holding a plurality of the third laminate films at intervals in a conveying direction thereof; and

[0358] The second laminating unit laminates the second substrate and the third laminating film at a second confluence point where the conveying path of the second substrate and the conveying path of the third laminating film merge to produce a third substrate.

[0359] The third laminate film protrudes from at least a portion of the periphery of the second main surface of the first substrate by 5 mm or more.

[0360] [Note 28]

[0361] According to the laminating device described in Appendix 27,

[0362] The third laminate film and the third carrier film constitute a third laminate film.

[0363] The third laminate film comprises the third laminate film and a third outer film disposed on the outer side of the third laminate film on one side of the third carrier film.

[0364] The third film conveying section comprises: a third unwinding shaft for unwinding the third laminated film previously wound into a roll; a third peeling body for peeling the third carrier film and the third laminated film by folding the third carrier film back at a position closer to the second confluence point in the conveying path of the third carrier film; and a third winding shaft for winding the third outer film folded back by the third peeling body together with the third carrier film into a roll.

[0365] [Note 29]

[0366] The laminating device according to Supplementary Note 27 or 28,

[0367] The second laminating unit comprises: a second adsorption plate that adsorbs the first laminating film without contacting the first substrate and receives the second substrate from the second substrate conveying unit; and a second laminating roller that contacts the third laminating film.

[0368] The second suction plate moves relative to the second laminating roller in a state where the second suction plate and the second laminating roller sandwich the second substrate and the third laminating film and the second suction plate adsorbs the second substrate.

[0369] [Note 30]

[0370] According to the laminating device described in Appendix 29,

[0371] When the conveying direction of the second substrate in the second substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction,

[0372] The second laminating section comprises: a second position adjusting section, which moves the second adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and rotates the second adsorption plate when viewed from the fifth direction or the sixth direction; and a second position detecting section, which detects the position of the second substrate after the second adsorption plate adsorbs the second substrate and before the second adsorption plate and the second laminating roller clamp the second substrate.

[0373] The bonding device includes a control unit that controls the second position adjustment unit based on the detection result of the second position detection unit, thereby performing control to move or rotate the second adsorption plate to a desired position.

[0374] [Note 31]

[0375] A laminating method comprising the step of laminating the first substrate and the first laminate film using the laminating apparatus according to any one of Supplementary Notes 19 to 30.

[0376] The above is a description of the laminating device and laminating method involved in the present disclosure, but the present disclosure is not limited to the above-mentioned embodiments, etc. Various changes, modifications, substitutions, additions, deletions and combinations can be made within the scope of the claims, which of course also belong to the technical scope of the present disclosure.

[0377] While the present invention has been described in detail and with reference to specific embodiments thereof, it will be apparent to one skilled in the art that various modifications and variations can be made therein without departing from the spirit and scope of the present invention.

[0378] This application is based on Japanese Patent Application No. 2023-154210 filed on September 21, 2023 and Japanese Patent Application No. 2024-102237 filed on June 25, 2024, the contents of which are incorporated herein by reference.

Claims

1. A laminating device, characterized in that: have: A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface; a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film for holding a plurality of the first laminate films at intervals in a conveying direction thereof; as well as The first laminating unit laminates the first substrate and the first laminating film at a first confluence point where the conveying path of the first substrate and the conveying path of the first laminating film merge to produce a second substrate. The first laminating film and the first carrier film constitute a first stacked film, The first laminate film has a first alignment mark indicating a position of the first laminate film for each of the first laminate films, The laminating device comprises: a first mark detection unit configured to detect the first alignment mark in a conveyance path of the first laminate film before the first merging point; and The control unit controls the conveyance of the first laminate film based on the detection result of the first mark detection unit.

2. The laminating device according to claim 1, characterized in that: The first alignment mark is a through hole or a notch formed by penetrating the first stacked film in the thickness direction thereof.

3. The laminating device according to claim 1 or 2, characterized in that: The first film conveying unit comprises: a first unwinding shaft for unwinding the first laminated film previously wound into a roll; a first peeling body for peeling the first carrier film and the first laminated film by folding the first carrier film back at a position closer to the first confluence point in the conveying path of the first carrier film; and a first winding shaft for winding the first carrier film folded back by the first peeling body into a roll. When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction, The laminating device comprises: a first driving unit for moving the first film conveying unit along the third direction and the fourth direction; a first edge detecting unit for detecting an end of the first laminated film in at least one of the third direction and the fourth direction; and a control unit that controls the first drive unit based on the detection result of the first edge detection unit to move the first laminate film to a desired position along the third direction or the fourth direction.

4. The laminating device according to claim 3, characterized in that: The first driving unit rotates the first film transport unit when viewed from the fifth direction or the sixth direction. The control unit controls the first drive unit based on the detection result of the first edge detection unit, thereby performing control to rotate the first laminate film to a desired position.

5. The laminating device according to claim 1 or 2, characterized in that: When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction, The first film conveying section includes: a first peeling body that peels the first carrier film and the first laminated film by folding the first carrier film back at a position in front of the first confluence point in the conveying path of the first carrier film; and a first separate adjustment section that moves the first peeling body along the third direction and the fourth direction.

6. The laminating device according to claim 1 or 2, characterized in that: When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction, The first film conveying section includes: a first peeling body that peels the first carrier film and the first laminated film by folding the first carrier film back at a position in front of the first confluence point in the conveying path of the first carrier film; and a first separate adjustment section that moves the first peeling body in the first direction, the second direction, the fifth direction, and the sixth direction, and rotates the first peeling body when viewed from the third direction or the fourth direction.

7. The laminating device according to claim 1 or 2, characterized in that: The first laminating unit includes: a pair of first laminating rollers for sandwiching the first substrate and the first laminating film and delivering them; and a first adsorption plate for adsorbing the first substrate. The first suction plate suctions the first substrate from the time when the first suction plate receives the first substrate from the first substrate conveying unit to the time when at least one pair of the first laminating rollers sandwiches the first substrate.

8. The laminating device according to claim 7, characterized in that: When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction, The first laminating unit comprises: a first position adjusting unit for moving the first adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and for rotating the first adsorption plate when viewed from the fifth direction or the sixth direction; and a first position detecting unit for detecting the position of the first substrate after the first adsorption plate adsorbs the first substrate and before a pair of the first laminating rollers clamp the first substrate. The bonding apparatus includes a control unit configured to control the first position adjustment unit based on a detection result of the first position detection unit, thereby performing control to move or rotate the first substrate to a desired position.

9. The laminating device according to claim 1 or 2, characterized in that: The first laminating unit includes a pair of first laminating rollers that sandwich the first substrate and the first laminating film and deliver them. The laminating device comprises: a second substrate conveying unit forming a conveying path of the second substrate produced by the first laminating unit; and a control unit controlling the conveying speed of the second substrate separately in the first laminating unit and the second substrate conveying unit. The control unit performs control to operate the pair of the first laminating rollers and the second substrate conveying unit at the same conveying speed until the second substrate is separated from the pair of the first laminating rollers.

10. The laminating device according to claim 1 or 2, characterized in that: The first laminating unit includes a pair of first laminating rollers that sandwich the first substrate and the first laminating film and deliver them. The first laminate film includes the first laminate film and a first outer film disposed on the outer side of the first laminate film on one side of the first carrier film. After the first substrate and the first laminate film are bonded together, in a case where a portion of the first main surface of the first substrate is exposed from the first laminate film, The laminating device includes a first recovery unit that recovers the first outer film separately from the first substrate and the first laminating film after the first outer film and the first laminating film pass through a pair of the first laminating rollers while simultaneously contacting the first substrate and the first laminating roller.

11. The laminating device according to claim 1 or 2, characterized in that: The first laminating section includes a first laminating roller in contact with the second main surface of the first substrate, and a cleaning roller in contact with the outer peripheral surface of the first laminating roller and removing foreign matter from the outer peripheral surface while the outer peripheral surface of the first laminating roller is in contact with the first substrate.

12. The laminating device according to claim 1 or 2, characterized in that: A second film conveying unit is provided, the second film conveying unit forming a conveying path for a second laminate film bonded to the second main surface of the first substrate and a conveying path for a second carrier film for holding a plurality of the second laminate films at intervals in the conveying direction thereof, The first laminating unit includes a pair of first laminating rollers for feeding the first laminating film, the first substrate, and the second laminating film while sandwiching the first laminating film, the first laminating rollers, and the second laminating film. The second substrate includes the first laminate film and the second laminate film, and the first laminate film and the second laminate film are arranged with the first substrate interposed therebetween.

13. The laminating device according to claim 1 or 2, characterized in that: have: A second substrate conveying unit, forming a conveying path for the second substrate manufactured by the first laminating unit; a third film conveying section forming a conveying path for a third laminate film bonded to the second main surface of the first substrate and a conveying path for a third carrier film for holding a plurality of the third laminate films at intervals in the conveying direction thereof; as well as The second laminating unit laminates the second substrate and the third laminating film at a second confluence point where the conveying path of the second substrate and the conveying path of the third laminating film merge to produce a third substrate. The third laminate film protrudes by 5 mm or more from at least a portion of the periphery of the second main surface of the first substrate.

14. The laminating device according to claim 13, characterized in that: The third laminating film and the third carrier film constitute a third laminated film, The third laminate film includes the third laminate film and a third outer film disposed on the outer side of the third laminate film on one side of the third carrier film. The third film conveying section includes: a third unwinding shaft for unwinding the third laminated film previously wound into a roll; a third peeling body for peeling the third carrier film and the third laminated film by folding the third carrier film back at a position closer to the second confluence point in the conveying path of the third carrier film; and a third winding shaft for winding up the third outer film folded back by the third peeling body together with the third carrier film into a roll.

15. The laminating device according to claim 13, characterized in that: The second laminating unit comprises: a second suction plate for sucking the first laminate film without contacting the first substrate and receiving the second substrate from the second substrate conveying unit; and a second laminating roller, in contact with said third laminating film, The second adsorption plate moves relative to the second lamination roller in a state where the second adsorption plate and the second lamination roller sandwich the second substrate and the third lamination film and the second adsorption plate adsorbs the second substrate.

16. The laminating device according to claim 15, characterized in that: When the conveying direction of the second substrate in the second substrate conveying unit is set as a first direction, a direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction, The second laminating section comprises: a second position adjusting section, which moves the second adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and rotates the second adsorption plate when viewed from the fifth direction or the sixth direction; and a second position detecting section, which detects the position of the second substrate after the second adsorption plate adsorbs the second substrate and before the second adsorption plate and the second laminating roller clamp the second substrate. The bonding device includes a control unit that controls the second position adjustment unit based on the detection result of the second position detection unit, thereby performing control to move or rotate the second adsorption plate to a desired position.

17. The laminating device according to claim 1 or 2, characterized in that: have: a third substrate conveying unit, forming a conveying path for the second substrate manufactured by the first laminating unit; a fourth film conveying section forming a conveying path for a fourth laminating film bonded to a single surface of the second substrate; a fifth film conveying section forming a conveying path for a fifth laminating film attached to the opposite surface of the second substrate; as well as The third laminating unit laminates the fourth laminate film and the fifth laminate film relative to the second substrate at a third confluence point where the conveying path of the second substrate, the conveying path of the fourth laminate film, and the conveying path of the fifth laminate film converge to produce a fourth substrate. The third laminating section includes a pair of third laminating rollers for feeding out the fourth laminating film, the second substrate, and the fifth laminating film while sandwiching them.

18. A laminating device, characterized in that: have: A first substrate conveying section forming a conveying path for a first substrate having a first main surface and a second main surface opposite to the first main surface; a first film conveying section forming a conveying path for a first laminate film bonded to the first main surface of the first substrate and a conveying path for a first carrier film for holding a plurality of the first laminate films at intervals in a conveying direction thereof; as well as The first laminating unit laminates the first substrate and the first laminating film at a first confluence point where the conveying path of the first substrate and the conveying path of the first laminating film merge to produce a second substrate. The first laminating film and the first carrier film constitute a first stacked film, The first laminating unit includes: a pair of first laminating rollers for sandwiching the first substrate and the first laminating film and delivering them; and a first adsorption plate for adsorbing the first substrate. The first suction plate suctions the first substrate from the time when the first suction plate receives the first substrate from the first substrate conveying unit to the time when at least one pair of the first laminating rollers sandwiches the first substrate.

19. The laminating device according to claim 18, characterized in that: When the conveying direction of the first substrate in the first substrate conveying unit is set as a first direction, the direction opposite to the first direction is set as a second direction, a direction parallel to the first main surface of the first substrate and perpendicular to the first direction is set as a third direction, a direction opposite to the third direction is set as a fourth direction, a direction perpendicular to the first main surface of the first substrate is set as a fifth direction, and a direction opposite to the fifth direction is set as a sixth direction, The first laminating unit comprises: a first position adjusting unit for moving the first adsorption plate along the first direction, the second direction, the third direction, the fourth direction, the fifth direction and the sixth direction, and for rotating the first adsorption plate when viewed from the fifth direction or the sixth direction; and a first position detecting unit for detecting the position of the first substrate after the first adsorption plate adsorbs the first substrate and before a pair of the first laminating rollers clamp the first substrate. The bonding apparatus includes a control unit configured to control the first position adjustment unit based on a detection result of the first position detection unit, thereby performing control to move or rotate the first substrate to a desired position.

20. A bonding method, characterized in that: The bonding method includes the step of bonding the first substrate and the first laminate film using the bonding apparatus according to claim 1 , 2 , 18 , or 19 .

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