Inclination indicating device and method for PECVD equipment package transportation

Abstract

The invention discloses an inclination indicating device and method for PECVD equipment packaging piece transportation, the inclination indicating device comprises a comb-shaped body, the comb-shaped body is provided with a square starting part, a placing hole is formed in the center of the long side of the square starting part, the included angle between the diagonal line of the square starting part and the long side is 30 degrees, and the angle between the diagonal line of the square starting part and the long side is 30 degrees; the long edge of the square starting part serves as the starting direction, a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove are sequentially formed in one side of the square starting part, and the interiors of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove communicate with one another to form a light ball movement channel. The device has the advantages that the problem that large PECVD equipment is inverted or inclined in the long-distance transportation process or the marine transportation process in the carrying, transportation and storage processes in the prior art is solved, and faults caused by inversion are effectively recorded.

Description

Technical Field

[0001] The invention relates to the technical field of PECVD, and in particular to a tilt indicating device for transporting PECVD equipment packages. Background Art

[0002] With the rise of new energy technology, domestic PECVD equipment for heterojunction is increasingly trusted by foreign manufacturers, and the company's foreign orders are coming in one after another. After shipment, it needs to be transported to the customer company by truck, ship, or even air. Such long-distance transportation, such as large PECVD equipment, is not allowed to be inverted or tilted during handling, transportation and storage. This is because once inverted or tilted, the gas box electrode or even the vacuum degree will be lost, and the lubricating oil in the vacuum pump will flow to other parts, causing the compressor to lack oil and thus cause product failure.

[0003] With the rise of new energy technology, domestic PECVD equipment for heterojunction is increasingly trusted by foreign manufacturers, and the company's foreign orders are coming in one after another. After shipment, it needs to be transported to the customer company by truck, ship, or even air. Such long-distance transportation, such as large PECVD equipment, is not allowed to be inverted or tilted during handling, transportation and storage. This is because once inverted or tilted, the gas box electrode or even the vacuum degree will be lost, and the lubricating oil in the vacuum pump will flow to other parts, causing the compressor to lack oil and thus cause product failure. Summary of the invention

[0004] The present invention proposes a tilt indicating device for transporting PECVD equipment packages, which solves the technical problems existing in the above-mentioned prior art.

[0005] According to one aspect of the present invention, a tilt indicating device for transporting PECVD equipment packaging is provided, characterized in that it comprises: a comb-shaped body, the comb-shaped body having a square starting portion, a receiving hole being arranged at the central position of the long side of the square starting portion, the angle between the diagonal of the square starting portion and the long side being 30°, taking the long side of the square starting portion as the starting direction, a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove being arranged in sequence on one side of the square starting portion, the angle between the groove edge of the first branch groove and the diagonal being 40° The angle between the groove edge of the second branch groove and the diagonal is 50°, the angle between the groove edge of the third branch groove and the diagonal is 60°, the angle between the groove edge of the fourth branch groove and the diagonal is 70°, and the angle between the groove edge of the fifth branch groove and the diagonal is 80°. The grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are connected to each other to form a passage for the movement of the lightweight ball. The widths of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are the same as the diameter of the lightweight ball, and are arranged in a fan shape.

[0006] Furthermore, an upper portion of the first branch groove forms a first step relative to the square starting portion.

[0007] Furthermore, an upper portion of the second branch groove forms a second step relative to the first branch groove.

[0008] Furthermore, an upper portion of the third branch groove forms a third step relative to the second branch groove.

[0009] Furthermore, an upper portion of the fourth branch groove forms a fourth step relative to the third branch groove.

[0010] Furthermore, the upper portion of the fifth branch groove and the upper portion of the fourth branch groove form an isoplanar structure.

[0011] Further, the height of the first step is smaller than that of the second step, the height of the second step is smaller than that of the third step, and the height of the third step is smaller than that of the fourth step.

[0012] Furthermore, the comb-shaped body is provided with a fragile sticker on the adhesive back.

[0013] Furthermore, the other long side of the square starting portion is used as a starting direction, and symmetrical branch grooves with different angles are sequentially arranged.

[0014] Another object of the present invention is to provide a tilt indication method for transporting PECVD equipment packaging, characterized in that it includes: providing a comb-shaped body, the comb-shaped body having a square starting portion, a placement hole being arranged at the central position of the long side of the square starting portion, the angle between the diagonal of the square starting portion and the long side being 30°, taking the long side of the square starting portion as the starting direction, and sequentially arranging a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove on one side of the square starting portion, the angle between the groove edge of the first branch groove and the diagonal being 40°, the angle between the groove edge of the second branch groove and the diagonal being 50°, the angle between the groove edge of the third branch groove and the diagonal being 60°, the angle between the groove edge of the third branch groove and the diagonal being 70°, the angle between the groove edge of the fourth branch groove and the diagonal being 90°, the angle between the groove edge of the fourth branch groove and the diagonal being 100°, the angle between the groove edge of the fifth branch groove and the diagonal being 200°, and the angle between the groove edge of the fifth branch groove and the diagonal being 30°. The angle between the diagonal line is 60°, the angle between the groove edge of the fourth branch groove and the diagonal line is 70°, the angle between the groove edge of the fifth branch groove and the diagonal line is 80°, the grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are interconnected to form a passage for the movement of the lightweight ball, the width of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove is the same as the diameter of the lightweight ball, and they are arranged in a fan shape; the comb-shaped body is installed on the packaging box of the PECVD equipment, and the inclination degree of the packaging box is determined according to the position of the lightweight ball in the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove.

[0015] It can be seen from the technical solution provided by the present invention that the present invention includes a comb-shaped body, a channel provided on the comb-shaped body and a lightweight ball located in the channel, the channel includes a connected 30° channel, a 40° channel, a 50° channel, a 60° channel, a 70° channel, and an 80° channel, which can accurately record the degree of tilt, use fragile labels to avoid human intervention, set a symmetrical tilt, record the tilt indications of the box in different directions, the tilt of the X-axis and the Y-axis, and solve the problem of inversion or tilting of large PECVD equipment during long-distance transportation or sea transportation during handling, transportation and storage in the prior art, and effectively record the faults caused by inversion.

[0016] The above description is only an overview of the technology of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By reading the detailed description of the preferred embodiment below, various other advantages and benefits will become clear to those of ordinary skill in the art. The accompanying drawings are only used for the purpose of illustrating the preferred embodiment and are not considered to be limitations of the present invention. In addition, the same reference symbols are used to represent the same components throughout the accompanying drawings.

[0018] Figure 1 It is a schematic structural diagram of a first embodiment of a tilt indication device for transporting PECVD equipment packaging according to the present invention.

[0019] Figure 2 It is a schematic structural diagram of a second embodiment of a tilt indicating device for transporting PECVD equipment packaging according to the present invention.

[0020] In the attached drawings, 10 is an inserting hole, 11 is a first branch groove, 12 is a second branch groove, 13 is a third branch groove, 14 is a fourth branch groove, 15 is a fifth branch groove, 16 is a first step, 17 is a second step, 18 is a third step, 19 is a fourth step, and 20 is a light ball. DETAILED DESCRIPTION

[0021] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to enable the scope of the present invention to be fully communicated to those skilled in the art.

[0022] The present invention provides a PECVD equipment package transportation tilt indicator device. The contents not described in detail in the embodiments of the present invention belong to the prior art known to professionals in the field. If no specific conditions are specified in the embodiments of the present invention, the conventional conditions in the field or the conditions recommended by the manufacturer shall be followed.

[0023] See also Figure 1 The present invention provides a tilt indicator device for transporting PECVD equipment packaging, comprising a comb-shaped body, the comb-shaped body having a square starting portion, a receiving hole 19 being arranged at the center of the long side of the square starting portion, the angle between the diagonal of the square starting portion and the long side being 30°, taking the long side of the square starting portion as the starting direction, and sequentially arranging a first branch groove 11, a second branch groove 12, a third branch groove 13, a fourth branch groove 14 and a fifth branch groove 15 on one side of the square starting portion, wherein the first branch groove 11 has a The angle between the groove edge and the diagonal is 40°, the angle between the groove edge of the second branch groove 12 and the diagonal is 50°, the angle between the groove edge of the third branch groove 13 and the diagonal is 60°, the angle between the groove edge of the fourth branch groove 14 and the diagonal is 70°, and the angle between the groove edge of the fifth branch groove 15 and the diagonal is 80°. The grooves of the first branch groove 11, the second branch groove 12, the third branch groove 13, the fourth branch groove 14 and the fifth branch groove 15 are connected to each other to form a passage for the movement of the lightweight ball 20.

[0024] As a specific embodiment, the upper portion of the first branch groove forms a first step relative to the square starting portion.

[0025] As a specific embodiment, the upper portion of the second branch groove forms a second step relative to the first branch groove.

[0026] As a specific embodiment, the upper portion of the third branch groove forms a third step relative to the second branch groove.

[0027] As a specific embodiment, the upper portion of the fourth branch groove forms a fourth step relative to the third branch groove.

[0028] As a specific embodiment, the upper portion of the fifth branch groove and the upper portion of the fourth branch groove form an isoplanar structure.

[0029] As a specific embodiment, it includes a comb-shaped body, a channel arranged on the comb-shaped body and a lightweight ball located in the channel, and the channel includes a connected 30° channel, a 40° channel, a 50° channel, a 60° channel, a 70° channel and an 80° channel.

[0030] As a specific embodiment, the 30° channel, 40° channel, 50° channel, 60° channel, 70° channel, and 80° channel are interconnected and have a certain depth.

[0031] As a specific embodiment, the 30° channel, the 40° channel, the 50° channel, the 60° channel, the 70° channel, and the 80° channel all have a highest end and a lowest end.

[0032] As a specific embodiment, the 30° channel, 40° channel, 50° channel, 60° channel, 70° channel, and 80° channel are connected at the highest end, and the ball is located at the lowest point of the 30° channel connection.

[0033] As a specific embodiment, the lightweight ball in the 30° channel can move automatically by gravity when it is inverted or tilted at the lowest end.

[0034] As a specific embodiment, the 30° channel is provided with an insertion hole, into which a lightweight ball can be inserted before use.

[0035] As a specific embodiment, the adhesive backing of the comb-shaped body is set to be fragile and difficult to be removed after being pasted; if it is removed, relevant traces can be clearly seen, which is conducive to the preservation of evidence.

[0036] As a specific embodiment, the comb-shaped body channel is made by the vacuum forming process, so that the lightweight balls can move freely.

[0037] As a specific embodiment, the device also has symmetrical channels, the purpose of which is to record the tilt indications of the box in different directions, the tilt of the X axis and the Y axis.

[0038] As a specific example, please refer to Figure 2 The comb-shaped body of the present invention can also be designed into a circular structure in which the branch grooves are connected end to end to have a 180° tilting record.

[0039] With the present invention, once tilted or inverted, the 30° channel automatically rolls under the action of gravity, and the lightweight ball automatically rolls into the 40° channel, 50° channel, 60° channel, 70° channel, and 80° channel at the lowest end along the 30° channel according to the different degrees of tilt under the action of gravity. When the box is inverted and the tilt recording device is placed upright again, the ball is at the lowest end of the channel under the action of gravity, so that it can be judged whether it is tilted or inverted during handling, transportation and storage according to the position of the ball. When it is applied to PECVD equipment packaging boxes, once the PECVD equipment is found to be tilted or inverted, the user or customer can refuse to accept the goods, and confirm the acceptance after the technicians check the inside of the product to see if there is any oil leakage or repair it. In this way, not only fraud is avoided, but also the handling personnel are prompted to be more careful during the handling and transportation process, avoiding losses caused by improper handling.

[0040] It should be clear that the present invention is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

Claims

1. A tilt indicator device for transporting PECVD equipment packages, characterized in that: include: The comb-shaped body has a square starting portion, a receiving hole is arranged at the central position of the long side of the square starting portion, the angle between the diagonal of the square starting portion and the long side is 30°, the long side of the square starting portion is used as the starting direction, and the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are arranged in sequence on one side of the square starting portion, the angle between the groove side of the first branch groove and the diagonal is 40°, the angle between the groove side of the second branch groove and the diagonal is 50°, and the angle between the groove side of the second branch groove and the diagonal is 50°. °, the angle between the groove edge of the third branch groove and the diagonal is 60°, the angle between the groove edge of the fourth branch groove and the diagonal is 70°, the angle between the groove edge of the fifth branch groove and the diagonal is 80°, the grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are connected to each other to form a passage for the movement of the lightweight ball, the width of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove is the same as the diameter of the lightweight ball, and they are arranged in a fan shape.

2. The tilt indicator device for transporting PECVD equipment packages according to claim 1, characterized in that: An upper portion of the first branch groove forms a first step relative to the square starting portion.

3. The tilt indicator device for transporting PECVD equipment packages according to claim 2, characterized in that: An upper portion of the second branch groove forms a second step relative to the first branch groove.

4. The tilt indicator device for transporting PECVD equipment packages according to claim 3, characterized in that: An upper portion of the third branch groove forms a third step relative to the second branch groove.

5. The tilt indicator device for transporting PECVD equipment packages according to claim 4, characterized in that: An upper portion of the fourth branch groove forms a fourth step relative to the third branch groove.

6. The tilt indicator device for transporting PECVD equipment packages according to claim 1, characterized in that: The upper portion of the fifth branch groove and the upper portion of the fourth branch groove form an isoplanar structure.

7. The tilt indicator device for transporting PECVD equipment packages according to claim 4, characterized in that: The height of the first step is smaller than that of the second step, the height of the second step is smaller than that of the third step, and the height of the third step is smaller than that of the fourth step.

8. The tilt indicator device for transporting PECVD equipment packages according to claim 1, characterized in that: The comb-shaped body is provided with a fragile sticker on the back adhesive.

9. The tilt indicator device for transporting PECVD equipment packages according to claim 1, characterized in that: The other long side of the square starting portion is used as the starting direction, and symmetrical branch grooves with different angles are sequentially arranged.

10. A method for indicating the tilt of a PECVD equipment package for transportation, characterized in that: include: A comb-shaped body is provided, wherein the comb-shaped body has a square starting portion, a receiving hole is arranged at the central position of the long side of the square starting portion, the angle between the diagonal of the square starting portion and the long side is 30°, and the long side of the square starting portion is used as the starting direction, and a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove are arranged in sequence on one side of the square starting portion, the angle between the groove side of the first branch groove and the diagonal is 40°, the angle between the groove side of the second branch groove and the diagonal is 50°, the angle between the groove side of the third branch groove and the diagonal is 60°, the angle between the groove side of the fourth branch groove and the diagonal is 60°, and the angle between the groove side of the fourth branch groove and the diagonal is 60°. The angle between the diagonal line is 70°, the angle between the groove edge of the fifth branch groove and the diagonal line is 80°, the grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are connected to each other to form a passage for the movement of the lightweight ball, the width of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove is the same as the diameter of the lightweight ball, and they are arranged in a fan shape; the comb-shaped body is installed on the packaging box of the PECVD equipment, and the inclination degree of the packaging box is determined according to the position of the lightweight ball in the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove.

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