Silicon through hole measuring device based on white light interference technology

Abstract

The invention discloses a through-silicon-via measuring device based on white light interference technology, and particularly relates to the technical field of through-silicon-via measuring equipment.The through-silicon-via measuring device comprises a shell, a moving part is arranged at the bottom of an inner cavity of the shell, a mounting table is arranged on the upper portion of the moving part, and the upper end of the mounting table is flush with the top wall of the inner cavity of the shell; a plurality of fixing devices are arranged in the middle of an inner cavity of the mounting table, a mounting disc is arranged on the upper portion of the inner cavity of the mounting table, and a plurality of positioning devices are arranged in the middle of the mounting disc in an array mode. According to the through-silicon-via measuring device based on the white light interference technology, through the arrangement of the fixing device, when some objects with uneven surfaces are fixed, the objects can be fixed together through a plurality of fixing mechanisms on the two sides, so that the device can solve the problem that due to the fact that the appearances of the objects needing to be detected cannot be fixed, the detection accuracy is high. Therefore, the problem that the object with the uneven surface cannot be detected is solved, and the reliability of the device is improved.

Description

Technical Field

[0001] The invention relates to the technical field of through silicon via measurement equipment, and in particular to a through silicon via measurement device based on white light interferometry technology. Background Art

[0002] The through silicon via (TSV) measurement device based on white light interferometry mainly uses the principle of white light interferometry to accurately measure various parameters of the through silicon via. White light interferometry has the characteristics of high precision and non-contact measurement, and is very effective for measuring tiny structures such as through silicon vias.

[0003] Chinese patent public number CN220472470U discloses a threaded hole pass / stop measuring device, comprising a machine platform, a longitudinal translation mechanism and a gantry are arranged on the machine platform, a carrier plate is arranged at the moving end of the longitudinal translation mechanism, the carrier plate is used to place a workpiece to be measured, the workpiece has a threaded hole, the gantry is arranged across the longitudinal translation mechanism and the two sides of the carrier plate, a transverse translation mechanism is arranged on the gantry, a lifting mechanism is arranged at the moving end of the transverse translation mechanism, a rotating mechanism is arranged at the moving end of the lifting mechanism, a pass / stop measuring head for measuring the threaded hole is arranged at the rotating end of the rotating mechanism, the device not only has the function of automatic threaded hole measurement, but also facilitates loading and unloading based on the cooperation of the longitudinal translation mechanism and the carrier plate, and better meets the application requirements, but in actual use, the device can only meet the fixing requirements of a small part of the objects to be detected, and cannot meet the fixing requirements of most objects, so it is necessary to add corresponding fixing components for assistance, which increases the use cost of the device. Summary of the invention

[0004] The main purpose of the present invention is to provide a through silicon via measurement device based on white light interferometry technology, which can effectively solve the problem that it cannot meet the fixing requirements of most objects, so it is necessary to add corresponding fixing components for assistance, which increases the use cost of the device.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] A through silicon via measurement device based on white light interferometry technology comprises a shell, a mounting frame is arranged on one side of the upper end of the shell, a measuring component is arranged on the upper end face of the mounting frame, a placement hole is opened in the middle of the upper end of the shell, a moving component is arranged at the bottom of the inner cavity of the shell, a mounting platform is arranged on the upper part of the moving component, the upper end of the mounting platform is flush with the top wall of the inner cavity of the shell, a plurality of fixing devices are arranged in the middle of the inner cavity of the mounting platform, a mounting plate is arranged on the upper part of the inner cavity of the mounting plate, and a plurality of positioning devices are arranged in an array in the middle of the mounting plate.

[0007] Specifically, in the process of measuring the corresponding object, the object to be measured needs to be fixed by a fixing device first. After the corresponding object is fixed, the staff controls the moving component to drive the fixing device installed on the mounting table to move in the horizontal direction, and then moves the object to be measured fixed by the fixing device to the corresponding measurement position, so that the measuring component can measure the object to be measured. After that, the moving component drives the object to be measured to move slowly in one direction, so that the measuring component can detect the object to be detected.

[0008] Preferably, the mounting platform includes a mounting frame, which is slidably mounted on both sides of the inner cavity of the outer shell, and the lower end of the mounting frame is fixedly connected to the upper part of the longitudinal braking mechanism in the moving part, and a containing frame is provided on both sides of the mounting frame, and a support frame is provided on both sides of the outer surface of the mounting frame.

[0009] Preferably, the fixing device includes two limiting slides, and the two limiting slides are fixedly installed on the bottom wall of the inner cavity of the installation frame. Installation mechanisms are slidably installed on both sides of the two limiting slides, and connecting mechanisms are rotatably installed on the upper parts of the two installation mechanisms. A fixing mechanism is arranged at one end of the two connecting mechanisms close to each other.

[0010] Specifically, when fixing the measuring object that needs to be fixed, the staff can lift the multiple connecting mechanisms required for fixing from the inner cavity of the containing frame, and then push the corresponding installation mechanism to slide on the limiting slide, move the connecting mechanism to the corresponding position for the corresponding object, and at the same time, the staff can fix the installation mechanism on the limiting slide.

[0011] Preferably, the mounting mechanism comprises two support plates, the lower parts of the two support plates are slidably connected to the inner cavities of the two limiting slides, respectively, a U-shaped plate is slidably mounted on one side of the outer surfaces of the two support plates, limiting blocks are arranged on both sides of the lower ends of the U-shaped plates, the two limiting blocks are adapted for use with the limiting slides, a limiting frame is arranged on the lower part of the side of the outer surfaces of the two support plates close to each other, an elastic plate is arranged on the lower part of the inner cavity of the limiting frame, positioning blocks are arranged on both sides of the upper ends of the elastic plates, and connecting rods are arranged on the side of the outer surfaces of the two positioning blocks away from each other, and the ends of the two connecting rods away from each other extend to the outsides of the two support plates respectively.

[0012] Preferably, the connecting mechanism includes a Z-shaped rod, which is rotatably installed between two support plates, and the Z-shaped rod can be placed in the inner cavity of the containing frame, and two rows of arc blocks are provided on the outer surface of the Z-shaped rod close to the support plate, and the two rows of arc blocks are respectively adapted for use with two positioning blocks, and a mounting rod is slidably installed on the inner wall of the Z-shaped rod away from the support plate, one end of the mounting rod is provided with a spring, and the other end of the mounting rod extends to the outside of the Z-shaped rod, and the other end of the mounting rod is fixedly connected to the middle part of the outer surface of the fixing mechanism, and a limiting tooth ring is provided on the outer surface of the mounting rod close to the fixing mechanism, and the limiting tooth ring is adapted for use with the inner wall of the Z-shaped rod.

[0013] Specifically, before fixing the required object, the staff pushes the Z-shaped rod to rotate. In the process of pushing the Z-shaped rod out of the inner cavity of the containing frame, the Z-shaped rod can be fixed by the action of the arc block and the positioning block, and then the fixing mechanism is pulled to make the fixing mechanism drive the installation rod to move, so that the limiting tooth ring is out of contact with the inner wall of the Z-shaped rod. At this time, the staff can rotate the fixing mechanism so that the fixing mechanism can be rotated to the corresponding fixed angle as needed.

[0014] Furthermore, after adjusting the fixing mechanism and the Z-shaped rod to corresponding angles, the staff can push the installation mechanism to slide on the limiting slide, and move the connecting mechanism and the fixing mechanism to corresponding fixed positions through the installation mechanism, so that the fixing mechanism can fix the object to be inspected. At the same time, after the fixing mechanism fixes the object, the staff can push the U-shaped plate downward so that the U-shaped plate drives the limiting blocks on both sides to be inserted into the fixing grooves on the upper part of the limiting slide. At this time, the support plate cannot move, and the connecting mechanism and the fixing mechanism are also restricted to this position until the inspection is completed.

[0015] Furthermore, after the inspection is completed, the staff will pull the U-shaped plate upwards to release the restriction on the support plate, and then push the support plate back to the initial position. After that, the staff will press the connecting rod on the side of the support plate. At this time, the two positioning blocks in the inner cavity of the limit frame will move toward each other, so that the two positioning blocks no longer contact the arc blocks, and then the support plate can be rotated downward and replaced in the inner cavity of the containing frame.

[0016] Furthermore, the above fixing scheme is a fixing method for testing some objects with irregular shapes. When testing some objects with flat surfaces that are easy to place, they can be directly placed on the upper end of the installation plate.

[0017] Preferably, the mounting plate includes a mounting plate, which is fixedly mounted on the upper part of the inner cavity of the mounting frame, a plurality of mounting holes are opened in the middle of the mounting plate, a plurality of strip holes are also opened in the middle of the mounting plate, the plurality of strip holes are grouped in twos, and the plurality of groups of strip holes are evenly distributed among the plurality of mounting holes, and the inner surfaces of the two strip holes in the same group are respectively slidably connected to the outer surfaces of four support plates in a fixing device.

[0018] Preferably, the positioning device includes a braking member, which is fixedly mounted on the bottom wall of the inner cavity of the mounting frame, an elastic hydraulic ring is provided at the upper end of the braking member, a rubber ring is provided at the upper end of the elastic hydraulic ring, the upper part of the rubber ring extends from the mounting hole to the upper part of the mounting plate, a ratchet is provided on the lower side of the middle part of the inner cavity of the elastic hydraulic ring, a limiting member is provided on the inner side of the ratchet, a suction cup is provided on the upper part of the inner cavity of the limiting member, and the suction cup is slidably mounted on the bottom wall of the inner cavity of the braking member.

[0019] Specifically, after placing an object with a flat surface on the upper end of the mounting plate, the staff can lightly press the object with a flat surface. During this process, the object to be inspected will push the elastic hydraulic ring to move downward, thereby allowing the hydraulic oil in the inner cavity of the elastic hydraulic ring to enter the inner cavity of the brake part, and the brake part is driven to operate through the flow of hydraulic oil, so that the brake part drives the limit part to rotate through the ratchet, and the rotation of the limit part will drive the suction cup to move downward. During this process, since the surface of the object is always in contact with the upper part of the rubber ring, when the suction cup moves downward, negative pressure will be generated in the space between the suction cup and the surface of the object, thereby adsorbing the object on the positioning device, thereby completing the fixation of the object to be inspected.

[0020] Preferably, the braking member includes a brake frame, which is fixedly mounted on the bottom wall of the inner cavity of the mounting frame, a brake fan is provided on the outer side of the inner cavity of the brake frame, two connecting pipes are provided on the outer side of the brake frame, and the two connecting pipes are used to connect the elastic hydraulic ring and the inner cavity of the brake frame, an isolation ring is provided at the upper end of the brake fan, and the isolation ring is slidably mounted on the lower part of the inner surface of the elastic hydraulic ring.

[0021] Preferably, the limiting member includes a limiting ring, the outer surface of the limiting ring is fixedly connected to the inner surface of the ratchet, the inner surface of the limiting ring is provided with two inclined slides and two horizontal slides, the two horizontal slides are distributed up and down, the inner cavities of the two inclined slides and the two horizontal slides are connected, and the inclined slides and the inclined slides are adapted for use with the suction cup.

[0022] Specifically, after the staff places the object with a flat surface on the upper end of the mounting plate, they lightly press the object to push the rubber ring and the elastic hydraulic ring downward, so that the hydraulic oil in the inner cavity of the elastic hydraulic ring enters into the inner cavity of the brake frame through two connecting pipes, and the brake fan is driven to rotate by the flowing hydraulic oil. When the brake fan rotates, it drives the limit member to rotate through the ratchet. When the limit member rotates, the slider on the suction cup will pass from the horizontal slide located on the upper part through the inclined slide located on one side and enter into the inner cavity of the horizontal slide located on the lower side. During this process, the suction cup will move downward, so that a certain negative pressure will be generated between the upper end of the suction cup and the object, thereby fixing the object to be inspected.

[0023] Furthermore, after the object is fixed, the staff no longer applies force to the object. At this time, the installation mechanism moves upward under the action of its internal spring and pushes the object upward. During this process, the fixing mechanism cannot operate, thereby increasing the negative pressure between the fixing mechanism and the object, thereby making the object more firmly fixed on the positioning device.

[0024] Furthermore, during the upward movement of the installation mechanism, the installation mechanism will suck the hydraulic oil that has entered the inner cavity of the limit slide back into its inner cavity. During this process, the brake fan will also be driven to rotate, but at this time the ratchet will not transmit the rotation of the brake fan to the limit member.

[0025] Furthermore, after the inspection of the object to be inspected is completed, the staff can lightly press the object to be inspected again, so that it pushes the elastic hydraulic ring downward again. At this time, the elastic hydraulic ring drives the limiter to rotate again through the brake part, so that the slider on the suction cup passes through the inner cavity of the upper horizontal slideway through the inclined slideway on the other side and enters the inner cavity of the upper horizontal slideway again. At this time, the suction cup moves up and down to release the fixed state of the object.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] 1. In the present invention, by providing a fixing device, when fixing some objects with uneven surfaces, they can be fixed together by multiple fixing mechanisms on both sides, so that the device can solve the problem that objects with uneven surfaces cannot be detected because the shape of the required detection object cannot be fixed, thereby increasing the reliability of the device.

[0028] 2. In the present invention, by providing a positioning device, when inspecting some objects with flat surfaces, they can be fixed by the positioning device to avoid slight movement caused by the moving parts, which affects the detection accuracy. At the same time, the positioning device can quickly fix the objects with flat surfaces, thereby improving the detection efficiency.

[0029] 3. In the present invention, two different fixing means are used to meet the fixing requirements of most objects during detection, which is convenient for staff to use. At the same time, it avoids the need to add other fixing components and reduces the use cost of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0031] Figure 2 It is a cross-sectional view of the overall structure of the present invention;

[0032] Figure 3 It is a schematic diagram of the overall structure of the present invention after removing the mounting plate and the positioning device;

[0033] Figure 4 It is a schematic diagram of the assembly of the mounting plate and the positioning device of the present invention;

[0034] Figure 5 It is a schematic diagram of the structure of the fixing device of the present invention;

[0035] Figure 6 It is a schematic diagram of the installation mechanism structure of the present invention;

[0036] Figure 7 It is a schematic diagram of the connection mechanism structure of the present invention;

[0037] Figure 8 For the present invention Figure 7 A partial enlarged view of the middle part;

[0038] Fig. 9 It is a schematic diagram of the structure of the installation disk of the present invention;

[0039] Fig.10 The structure of the positioning device of the present invention is shown in FIG. Figure 1 ;

[0040] Fig.11 The structure of the positioning device of the present invention is shown in FIG. Figure 2 ;

[0041] Fig.12 It is a schematic diagram of the structure of the limiting member of the present invention.

[0042] In the figure: 1, housing; 2, mounting frame; 3, measuring component; 4, moving component; 5, mounting table; 51, mounting frame; 52, containing frame; 53, supporting frame; 6, fixing device; 61, limiting slide; 62, mounting mechanism; 621, supporting plate; 622, U-shaped plate; 623, limiting block; 624, limiting frame; 625, positioning block; 626, connecting rod; 63, connecting mechanism; 631, Z-shaped rod; 632, arc block; 633, Mounting rod; 634, limiting tooth ring; 64, fixing mechanism; 7, mounting plate; 71, mounting plate; 72, strip hole; 73, mounting hole; 8, positioning device; 81, brake member; 811, brake frame; 812, brake fan; 813, connecting pipe; 814, isolation ring; 82, elastic hydraulic ring; 83, rubber ring; 84, suction cup; 85, ratchet; 86, limiting member; 861, limiting ring; 862, inclined slide; 863, horizontal slide. DETAILED DESCRIPTION

[0043] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0044] Embodiment 1

[0045] like Figure 1 - Figure 4 As shown, this embodiment discloses a through silicon via measurement device based on white light interferometry technology, including a shell 1, a mounting frame 2 is arranged on one side of the upper end of the shell 1, a measuring component 3 is arranged on the upper end face of the mounting frame 2, a placement hole is opened in the middle of the upper end of the shell 1, a moving component 4 is arranged at the bottom of the inner cavity of the shell 1, a mounting platform 5 is arranged on the upper part of the moving component 4, a plurality of fixing devices 6 are arranged in the middle of the inner cavity of the mounting platform 5, and a mounting plate 7 is arranged on the upper part of the inner cavity of the mounting platform 5.

[0046] Specifically, in the process of measuring the corresponding object, the object to be measured needs to be fixed by the fixing device 6 first. After the corresponding object is fixed, the staff controls the moving component 4 to drive the fixing device 6 installed on the mounting table 5 to move in the horizontal direction, and then moves the object to be measured fixed by the fixing device 6 to the corresponding measurement position, so that the measuring component 3 can measure the object to be measured. After that, the moving component 4 drives the object to be measured to move slowly in one direction, so that the measuring component 3 can detect the object to be detected.

[0047] In order to facilitate the installation of the fixing device 6, at the same time, the moving component 4 can drive the fixing device 6 to move through the mounting platform 5, and then the fixing device 6 can drive the object to be measured fixed thereon to move, so that the measuring component 3 can measure the object to be measured, such as Figure 5As shown, the mounting platform 5 includes a mounting frame 51, which is slidably mounted on both sides of the inner cavity of the outer shell 1, and the lower end of the mounting frame 51 is fixedly connected to the upper part of the longitudinal braking mechanism in the moving part 4, and a containing frame 52 is arranged on both sides of the mounting frame 51, and a supporting frame 53 is arranged on both sides of the outer surface of the mounting frame 51.

[0048] In order to fix the object to be measured, such as Figure 5 As shown, the fixing device 6 includes two limiting slides 61, and the two limiting slides 61 are fixedly installed on the bottom wall of the inner cavity of the installation frame 51. Installation mechanisms 62 are slidably installed on both sides of the two limiting slides 61, and connecting mechanisms 63 are rotatably installed on the upper parts of the two installation mechanisms 62. A fixing mechanism 64 is arranged at one end of the two connecting mechanisms 63 close to each other.

[0049] Specifically, when fixing the measuring object that needs to be fixed, the staff can lift the multiple connecting mechanisms 63 required for fixing from the inner cavity of the containing frame 52, and then push the corresponding installation mechanism 62 to slide on the limiting slide 61, and move the connecting mechanism 63 to the corresponding position for the corresponding object. At the same time, the staff can fix the installation mechanism 62 on the limiting slide 61.

[0050] In order to fix the object to be measured, Figure 6 As shown, the mounting mechanism 62 includes two support plates 621, and the lower parts of the two support plates 621 are respectively slidably connected to the inner cavities of the two limiting slides 61, and a U-shaped plate 622 is slidably installed on one side of the outer surface of the two support plates 621, and limiting blocks 623 are arranged on both sides of the lower end of the U-shaped plate 622. The two limiting blocks 623 are adapted for use with the limiting slides 61, and a limiting frame 624 is arranged at the lower part of the side of the outer surfaces of the two support plates 621 that are close to each other, and an elastic plate is arranged at the lower part of the inner cavity of the limiting frame 624, and positioning blocks 625 are arranged on both sides of the upper end of the elastic plate, and connecting rods 626 are arranged on the side of the outer surfaces of the two positioning blocks 625 that are away from each other, and the ends of the two connecting rods 626 that are away from each other extend to the outside of the two support plates 621 respectively.

[0051] Further, such as Figure 7 and Figure 8As shown, the connecting mechanism 63 includes a Z-shaped rod 631, which is rotatably installed between the two support plates 621. The Z-shaped rod 631 can be placed in the inner cavity of the containing frame 52. Two rows of arc blocks 632 are arranged on the outer surface of the Z-shaped rod 631 close to the support plate 621. The two rows of arc blocks 632 are respectively matched with the two positioning blocks 625. A mounting rod 633 is slidably installed on the inner wall of the side of the Z-shaped rod 631 away from the support plate 621. A spring is arranged at one end of the mounting rod 633, and the other end of the mounting rod 633 extends to the outside of the Z-shaped rod 631. The other end of the mounting rod 633 is fixedly connected to the middle part of the outer surface of the fixing mechanism 64. A limiting tooth ring 634 is arranged on the outer surface of the mounting rod 633 close to the fixing mechanism 64. The limiting tooth ring 634 is matched with the inner wall of the Z-shaped rod 631.

[0052] Specifically, before fixing the required object, the staff pushes the Z-shaped rod 631 to rotate. In the process of pushing the Z-shaped rod 631 out of the inner cavity of the containing frame 52, the Z-shaped rod 631 can be fixed by the action of the arc block 632 and the positioning block 625, and then the fixing mechanism 64 is pulled to make the fixing mechanism 64 drive the installation rod 633 to move, so that the limiting tooth ring 634 is out of contact with the inner wall of the Z-shaped rod 631. At this time, the staff can rotate the fixing mechanism 64, so that the fixing mechanism 64 can be rotated to the corresponding fixed angle as needed.

[0053] Furthermore, after adjusting the fixing mechanism 64 and the Z-shaped rod 631 to the corresponding angles, the staff can push the installation mechanism 62 to slide on the limiting slide 61, and move the connecting mechanism 63 and the fixing mechanism 64 to the corresponding fixed positions through the installation mechanism 62, so that the fixing mechanism 64 can fix the object to be inspected. At the same time, after the fixing mechanism 64 fixes the object, the staff can push the U-shaped plate 622 downward, so that the U-shaped plate 622 drives the limiting blocks 623 on both sides to be inserted into the fixing grooves on the upper part of the limiting slide 61. At this time, the support plate 621 cannot move, and the connecting mechanism 63 and the fixing mechanism 64 are also restricted to this position until the inspection is completed.

[0054] Furthermore, after the inspection is completed, the staff will pull the U-shaped plate 622 upwards to release the restriction on the support plate 621, and then push the support plate 621 back to the initial position. Thereafter, the staff will press the connecting rod 626 on the side of the support plate 621. At this time, the two positioning blocks 625 in the inner cavity of the limit frame 624 will move toward each other, so that the two positioning blocks 625 no longer contact the arc block 632, thereby enabling the support plate 621 to rotate downward and be replaced in the inner cavity of the containing frame 52.

[0055] Furthermore, the above fixing scheme is a fixing method for testing some objects with irregular shapes. When testing some objects with flat surfaces that are easy to place, they can be directly placed on the upper end of the mounting plate 7.

[0056] Embodiment 2

[0057] This embodiment further improves the positioning device 8 on the basis of the first embodiment, such as Figure 1 - Figure 4 As shown, when some objects with flat surfaces are placed on the upper end of the mounting plate 7 for inspection, the moving component 4 may produce slight movement when driving it to move, affecting the detection accuracy. Therefore, the objects with flat surfaces need to be fixed. At the same time, in order to improve the staff's efficiency in fixing objects with flat surfaces, the mounting plate 7 is improved and corresponding components are added to enable it to fix objects with flat surfaces. A plurality of positioning devices 8 are arranged in the middle array of the mounting plate 7.

[0058] In order to facilitate the installation of the positioning device 8, Fig. 9 As shown, the mounting plate 7 includes a mounting plate 71, which is fixedly mounted on the upper part of the inner cavity of the mounting frame 51. A plurality of mounting holes 73 are opened in the middle of the mounting plate 71. A plurality of strip holes 72 are also opened in the middle of the mounting plate 71. The plurality of strip holes 72 are grouped in twos, and the plurality of groups of strip holes 72 are evenly distributed between the plurality of mounting holes 73. The inner surfaces of the two strip holes 72 in the same group are respectively slidably connected to the outer surfaces of four support plates 621 in a fixing device 6.

[0059] In order to facilitate the staff to fix the flat objects to be measured, such as Fig.10 and Fig.11 As shown, the positioning device 8 includes a brake member 81, which is fixedly mounted on the bottom wall of the inner cavity of the mounting frame 51. An elastic hydraulic ring 82 is provided at the upper end of the brake member 81, and a rubber ring 83 is provided at the upper end of the elastic hydraulic ring 82. The upper part of the rubber ring 83 extends from the mounting hole 73 to the upper part of the mounting plate 71. A ratchet 85 is provided on the lower side of the middle part of the inner cavity of the elastic hydraulic ring 82, and a limiting member 86 is provided on the inner side of the ratchet 85. A suction cup 84 is provided on the upper part of the inner cavity of the limiting member 86, and the suction cup 84 is slidably mounted on the bottom wall of the inner cavity of the brake member 81.

[0060] Specifically, after placing an object with a flat surface on the upper end of the mounting plate 71, the staff can lightly press the object with a flat surface. During this process, the object to be inspected will push the elastic hydraulic ring 82 to move downward, thereby allowing the hydraulic oil in the inner cavity of the elastic hydraulic ring 82 to enter the inner cavity of the brake member 81, and the flow of the hydraulic oil will drive the brake member 81 to operate, so that the brake member 81 drives the limit member 86 to rotate through the ratchet 85, and the rotation of the limit member 86 will drive the suction cup 84 to move downward. During this process, since the surface of the object is always in contact with the upper part of the rubber ring 83, when the suction cup 84 moves downward, a negative pressure will be generated in the space between the suction cup 84 and the surface of the object, thereby adsorbing the object on the positioning device 8, thereby completing the fixation of the object to be inspected.

[0061] In order to achieve the above-mentioned purpose of fixing the object to be measured with a flat shape, as Fig.11 As shown, the brake member 81 includes a brake frame 811, which is fixedly mounted on the bottom wall of the inner cavity of the mounting frame 51, a brake fan 812 is arranged on the outer side of the inner cavity of the brake frame 811, and two connecting pipes 813 are arranged on the outer side of the brake frame 811, and the two connecting pipes 813 are used to connect the elastic hydraulic ring 82 and the inner cavity of the brake frame 811, and an isolation ring 814 is arranged on the upper end of the brake fan 812, and the isolation ring 814 is slidably mounted on the lower part of the inner surface of the elastic hydraulic ring 82.

[0062] Further, such as Fig.12 As shown, the limiting member 86 includes a limiting ring 861, the outer surface of the limiting ring 861 is fixedly connected to the inner surface of the ratchet 85, the inner surface of the limiting ring 861 is provided with two inclined slides 862 and two horizontal slides 863, the two horizontal slides 863 are distributed up and down, the inner cavities of the two inclined slides 862 and the two horizontal slides 863 are connected, and the inclined slides 862 and the inclined slides 862 are adapted for use with the suction cup 84.

[0063] Specifically, after the staff places the object with a flat surface on the upper end of the mounting plate 7, they lightly press the object so that it pushes the rubber ring 83 and the elastic hydraulic ring 82 to move downward, so that the hydraulic oil in the inner cavity of the elastic hydraulic ring 82 enters the inner cavity of the brake frame 811 through the two connecting pipes 813, and the brake fan 812 is driven to rotate by the flowing hydraulic oil. When the brake fan 812 rotates, it drives the limit member 86 to rotate through the ratchet 85. When the limit member 86 rotates, the slider on the suction cup 84 passes through the inclined slide 862 on one side and enters the inner cavity of the horizontal slide 863 on the lower side. During this process, the suction cup 84 moves downward, thereby generating a certain negative pressure between the upper end of the suction cup 84 and the object, thereby fixing the object to be inspected.

[0064] Furthermore, after the object is fixed, the staff no longer applies force to the object. At this time, the installation mechanism 62 moves upward under the action of its internal spring and pushes the object upward. During this process, the fixing mechanism 64 cannot operate, thereby increasing the negative pressure between the fixing mechanism 64 and the object, thereby making the object more firmly fixed on the positioning device 8.

[0065] Furthermore, during the upward movement of the mounting mechanism 62, the mounting mechanism 62 will suck the hydraulic oil that has entered the inner cavity of the limiting slide 61 back into its inner cavity. During this process, the brake fan 812 will also be driven to rotate, but at this time the ratchet 85 will not transmit the rotation of the brake fan 812 to the limiting member 86.

[0066] Furthermore, after the inspection of the object to be inspected is completed, the staff can lightly press the object to be inspected again, so that it pushes the elastic hydraulic ring 82 downward again. At this time, the elastic hydraulic ring 82 drives the limit member 86 to rotate again through the brake member 81, so that the slider on the suction cup 84 passes through the inner cavity of the upper horizontal slide 863 through the inclined slide 862 on the other side and re-enters the inner cavity of the upper horizontal slide 863. At this time, the suction cup 84 moves up and down to release the fixed state of the object.

[0067] It should be noted that the specific installation method, circuit arrangement and connection method, and control method of the measuring component 3 and the moving component 4 used in the above-mentioned embodiment 1 are conventional designs in the prior art and will not be elaborated in detail in the present invention.

[0068] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A through silicon via measurement device based on white light interferometry technology, comprising a housing (1), characterized in that: A mounting frame (2) is arranged on one side of the upper end of the shell (1), a measuring component (3) is arranged on the upper end surface of the mounting frame (2), a placement hole is opened in the middle of the upper end of the shell (1), a moving component (4) is arranged at the bottom of the inner cavity of the shell (1), a mounting platform (5) is arranged on the upper part of the moving component (4), the upper end of the mounting platform (5) is flush with the top wall of the inner cavity of the shell (1), a plurality of fixing devices (6) are arranged in the middle of the inner cavity of the mounting platform (5), a mounting plate (7) is arranged on the upper part of the inner cavity of the mounting plate (5), and a plurality of positioning devices (8) are arranged in an array in the middle of the mounting plate (7).

2. The through silicon via measurement device based on white light interferometry technology according to claim 1, characterized in that: The mounting platform (5) comprises a mounting frame (51), the mounting frame (51) being slidably mounted on both sides of the inner cavity of the outer shell (1), and the lower end of the mounting frame (51) being fixedly connected to the upper part of the longitudinal braking mechanism in the moving component (4), and containing frames (52) being arranged on both sides of the mounting frame (51), and supporting frames (53) being arranged on both sides of the outer surface of the mounting frame (51).

3. The through silicon via measurement device based on white light interferometry technology according to claim 2, characterized in that: The fixing device (6) comprises two limiting slideways (61), the two limiting slideways (61) are fixedly mounted on the bottom wall of the inner cavity of the mounting frame (51), mounting mechanisms (62) are slidably mounted on both sides of the two limiting slideways (61), connecting mechanisms (63) are rotatably mounted on the upper parts of the two mounting mechanisms (62), and a fixing mechanism (64) is provided at one end of the two connecting mechanisms (63) close to each other.

4. The through silicon via measurement device based on white light interferometry technology according to claim 3, characterized in that: The mounting mechanism (62) comprises two support plates (621), the lower parts of the two support plates (621) are respectively slidably connected to the inner cavities of the two limiting slideways (61), a U-shaped plate (622) is slidably mounted on one side of the outer surface of the two support plates (621), limiting blocks (623) are arranged on both sides of the lower end of the U-shaped plate (622), the two limiting blocks (623) are adapted for use with the limiting slideways (61), a limiting frame (624) is arranged at the lower part of the side of the outer surfaces of the two support plates (621) close to each other, an elastic plate is arranged at the lower part of the inner cavity of the limiting frame (624), positioning blocks (625) are arranged on both sides of the upper end of the elastic plate, and a connecting rod (626) is arranged on the side of the outer surfaces of the two positioning blocks (625) away from each other, and the ends of the two connecting rods (626) away from each other extend to the outer sides of the two support plates (621).

5. The through silicon via measurement device based on white light interferometry technology according to claim 4, characterized in that: The connecting mechanism (63) comprises a Z-shaped rod (631), the Z-shaped rod (631) is rotatably mounted between the two support plates (621), the Z-shaped rod (631) can be placed in the inner cavity of the containing frame (52), and two rows of arc blocks (632) are arranged on the outer surface of the Z-shaped rod (631) close to the support plate (621), and the two rows of arc blocks (632) are respectively matched with the two positioning blocks (625). A mounting rod (633) is slidably mounted on the side inner wall, one end of the mounting rod (633) is provided with a spring, the other end of the mounting rod (633) extends to the outside of the Z-shaped rod (631), the other end of the mounting rod (633) is fixedly connected to the middle part of the outer surface of the fixing mechanism (64), and a limiting toothed ring (634) is provided on the side of the outer surface of the mounting rod (633) close to the fixing mechanism (64), and the limiting toothed ring (634) is adapted for use with the inner wall of the Z-shaped rod (631).

6. The through silicon via measurement device based on white light interferometry technology according to claim 5, characterized in that: The mounting plate (7) comprises a mounting plate (71), the mounting plate (71) being fixedly mounted on the upper part of the inner cavity of the mounting frame (51), a plurality of mounting holes (73) being provided in the middle of the mounting plate (71), a plurality of strip holes (72) being further provided in the middle of the mounting plate (71), the plurality of strip holes (72) being grouped in pairs, the plurality of groups of strip holes (72) being evenly distributed between the plurality of mounting holes (73), the inner side surfaces of the two strip holes (72) in the same group being respectively slidably connected to the outer surfaces of four support plates (621) in a fixing device (6).

7. The through silicon via measurement device based on white light interferometry technology according to claim 6, characterized in that: The positioning device (8) comprises a brake member (81), the brake member (81) is fixedly mounted on the bottom wall of the inner cavity of the mounting frame (51), an elastic hydraulic ring (82) is arranged at the upper end of the brake member (81), a rubber ring (83) is arranged at the upper end of the elastic hydraulic ring (82), the upper part of the rubber ring (83) extends from the mounting hole (73) to the upper part of the mounting plate (71), a ratchet (85) is arranged at the lower side of the middle part of the inner cavity of the elastic hydraulic ring (82), a limiting member (86) is arranged on the inner side of the ratchet (85), a suction cup (84) is arranged at the upper part of the inner cavity of the limiting member (86), and the suction cup (84) is slidably mounted on the bottom wall of the inner cavity of the brake member (81).

8. The through silicon via measurement device based on white light interferometry technology according to claim 7, characterized in that: The brake component (81) comprises a brake frame (811), the brake frame (811) is fixedly mounted on the bottom wall of the inner cavity of the mounting frame (51), a brake fan (812) is arranged on the outer side of the inner cavity of the brake frame (811), two connecting pipes (813) are arranged on the outer side of the brake frame (811), the two connecting pipes (813) are used to connect the elastic hydraulic ring (82) and the inner cavity of the brake frame (811), an isolation ring (814) is arranged at the upper end of the brake fan (812), and the isolation ring (814) is slidably mounted on the lower part of the inner surface of the elastic hydraulic ring (82).

9. The through silicon via measurement device based on white light interferometry technology according to claim 8, characterized in that: The limiting member (86) comprises a limiting ring (861), the outer surface of the limiting ring (861) is fixedly connected to the inner surface of the ratchet (85), the inner surface of the limiting ring (861) is provided with two inclined slideways (862) and two horizontal slideways (863), the two horizontal slideways (863) are distributed up and down, the inner cavities of the two inclined slideways (862) and the two horizontal slideways (863) are communicated, and the inclined slideways (862) and the inclined slideways (862) are adapted for use with the suction cup (84).

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