Sample transfer system under ultrahigh vacuum high-temperature working conditions

Abstract

The invention discloses a sample transfer system under ultrahigh vacuum high-temperature working conditions. The sample transfer system comprises a sample injection cavity; a sample introduction platform assembly; a process chamber; a process platform assembly; an isolation valve; a first lifting device; a second lifting device; and a direct-acting operation lever. According to the sample transfer system under the ultrahigh vacuum high-temperature working condition, sample transfer is relatively smooth, and therefore reliability is relatively good.

Description

Technical Field

[0001] The present invention relates to a sample transfer system under ultra-high vacuum and high temperature conditions, wherein ultra-high vacuum (UHV) is a standardized term and high temperature conditions are a custom term, which is also common in the field of nanodevice technology and corresponds to a temperature range of 500°C to 700°C. Background Art

[0002] The full name of nanodevices is nanoelectronic devices, which refer to electronic devices with nanoscale dimensions and specific functions that are designed and prepared using nanoscale processing and preparation technologies, such as lithography, epitaxy, microfabrication, self-assembly growth, and molecular synthesis technology. There are two main ways to prepare nanodevices. One is to further extend existing electronic devices and integrated circuits to miniaturization, and to research and develop processing technologies with smaller line widths to process smaller electronic devices, which is the so-called "top-down" approach. The other way is to use advanced nanotechnology and the quantum effects of nanostructures to directly construct a new quantum device and quantum structure system, which is the so-called "bottom-up" approach.

[0003] Among them, the "bottom-up" preparation method includes many processing techniques such as metal organic chemical vapor deposition and molecular beam epitaxy. Since these processes need to reach the molecular level, they require extremely high processing environment, especially ultra-high vacuum conditions, which are often necessary technical conditions.

[0004] Furthermore, it is necessary to provide a vacuum system for the preparation of nanodevices, and transferring samples in the vacuum system is a booster in the field of nanodevice research. The existing parts for transferring samples in ultra-high vacuum systems mainly include a sample injection chamber, a process chamber, a vacuum pump system, a sample trolley, and a transmission mechanism. In order to meet the technical requirements of the process, the existing ultra-high vacuum has further increased the process temperature environment requirements, and the corresponding process temperature is 500℃~700℃. When the process temperature environment requirements are not increased, the reliability of the sample trolley is relatively good, but the sample trolley is very prone to jamming in a high temperature environment. Especially in a high temperature environment, the existing sample trolley is not rigid enough and is easily deformed, and stable sample transfer cannot be achieved.

[0005] Another problem with the sample cart is its driving problem under high temperature conditions, especially the electric drive. In high temperature environments, its reliability is relatively poor, or even unable to work properly. The lubrication problem under high temperature conditions is currently a difficult problem to control. Although some solid lubricants can be used in high temperature environments, such as graphite, the maximum operating temperature of graphite-based lubricants is usually not higher than 450°C. When the sample cart lacks lubrication and runs at high temperatures, jamming is only one of the more extreme problems. Jamming is another common problem. Once jamming occurs, it is very easy for the sample to slip due to inertia. Summary of the invention

[0006] The object of the present invention is to provide a sample transfer system under ultra-high vacuum and high temperature conditions, which can transfer samples relatively smoothly and thus has relatively good reliability.

[0007] According to an embodiment of the present invention, a sample transfer system under ultra-high vacuum and high temperature conditions is provided, comprising: The injection chamber is arranged horizontally, has an operation port at one end, a first communication port aligned with the operation port at the other end, and a first lifting port at the bottom; The injection platform assembly is located in the injection chamber and directly above the first lifting port; The process chamber is arranged horizontally, and a second connecting port is opened at one end opposite to the injection chamber to be connected through a connecting pipe, and a second lifting port is opened at the bottom; A process platform assembly is located in the process chamber and directly above the second lift port; An isolation valve is provided on the connecting pipe to control the opening and closing between the injection chamber and the process chamber; A first lifting device, connected to the first lifting port, for lifting the sample on the injection platform assembly; A second lifting device, disposed at the second lifting port, for lifting the sample on the process platform assembly; and A direct-acting operating rod is installed at the operating port and has a moving rod in the connecting direction between the injection chamber and the process chamber, and a material taking finger is arranged on the moving rod; Among them, high temperature refers to 500℃~700℃.

[0008] Optionally, the direct-acting operating rod is a magnetic rod; The magnetic rod has a flange connection portion, the operation port is provided with an intervention tube having an intervention port flange, and the magnetic rod and the intervention port are correspondingly connected by a flange.

[0009] Optionally, the power machines of the first lifting device and the second lifting device are mounted outside the chamber of the injection chamber or the process chamber through a bracket so that the power machines are separated from the corresponding chamber by a predetermined distance; Correspondingly, the bracket has a dynamic sealing structure for dynamic sealing cooperation with the lifting component of the corresponding lifting device.

[0010] Optionally, the dynamic sealing structure is configured as follows: An interface flange is provided at the lift port of the corresponding chamber; A bellows is provided, one end of which is connected to the interface flange by a static sealing connection structure, and the other end of the bellows is connected to the part of the lifting component located outside the corresponding chamber by a second static sealing connection structure.

[0011] Optionally, the second static sealing connection structure is configured as: A flange plate for connecting with the bellows is provided at the lower part of the corresponding lifting member when the lifting member is at the lowering stop point; Providing at least one pair of guide rods arranged parallel to the lifting direction of the lifting member; The flange is mounted on a slide seat guided by the guide rod.

[0012] Optionally, a first-level seal is formed between the lifting member and the lifting port; The bellows is used to construct a secondary seal.

[0013] Optionally, the inner end of the lift port is provided with a sealing cover; Correspondingly, when the corresponding lifting device is in the lower stop position, the upper end of the lifting member is lower than the sealing cover; Correspondingly, the sealing cover is driven by the passive cover of the lifting member.

[0014] Optionally, a roller is provided on one side where the sealing cover cooperates with the lifting member.

[0015] Optionally, a main chamber cover for entering and exiting samples is provided on the upper side of the injection chamber; A sub-chamber cover is provided on the upper side of the process chamber.

[0016] Optionally, the injection chamber and the process chamber are respectively provided with independent vacuum pipe interfaces and corresponding pressure relief valves.

[0017] According to the sample transfer system under ultra-high vacuum and high temperature working conditions of the embodiment of the present invention, the horizontal sample transfer method is adopted based on the horizontal setting of the injection chamber and the process chamber. Specifically, one end of the injection chamber has an operation port for connecting the direct-acting operating rod, and the other end has a first connecting port for connecting with the process chamber. Furthermore, a first lifting port is opened at the bottom of the injection chamber, and an injection platform component aligned with the first lifting port is provided inside, and a second lifting port is opened in the process chamber, and a process platform component aligned with the second lifting port is provided inside. Then, a first lifting device is configured for the injection chamber through the first lifting port, and a second lifting device is configured for the process chamber through the second lifting port. When the sample is transported, for example, the first lifting device is first raised to lift the sample located on the injection platform component, and the material-collecting finger of the direct-acting operating rod runs to the top of the injection platform component, but is located below the sample lifted by the first lifting device, and the first lifting device descends, and the sample is supported on the material-collecting finger. Then, the linear operating rod continues to move and reaches the top of the process platform assembly. The second lifting device starts to lift the sample upward and separate it from the support of the material picking fingers. The linear operating rod resets, and the second lifting device descends to place the sample on the process platform assembly. In this process, whether the linear operating rod is bent or deformed does not affect the accuracy of picking and placing materials. The positions of the two lifting devices determine that the accuracy of picking and placing materials is easy to control and is basically unaffected by the process environment. In addition, since there are no rotating parts in the chamber, there is no need to face lubrication problems under high temperature conditions, the working reliability is good, and the sample transportation is relatively smooth. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the structure of a sample transfer system under ultra-high vacuum and high temperature conditions in one embodiment.

[0019] In the figure: 1. magnetic rod, 2. sleeve rod, 3. flange connection, 4. intervention tube, 5. first exhaust port, 6. material picking finger, 7. injection window, 8. injection heating plate, 9. injection chamber, 10. connecting pipe, 11. isolation valve, 12. exhaust port, 13. process heating plate, 14. process window, 15. process chamber, 16. second interface flange, 17. second bellows, 18. second cylinder, 19. second bracket, 20. first cylinder, 21. first bracket, 22. first bellows, 23. first interface flange. DETAILED DESCRIPTION

[0020] In the embodiment of the present invention, the injection chamber 9 and the process chamber 15 are both horizontally arranged, and the main configurations are basically the same. Therefore, when the same parts are involved below, the configuration of one of the chambers is described in detail, and the configuration of the other chamber is applicable by reference and will not be repeated.

[0021] In addition, in the embodiment of the present invention, the horizontal type specifically refers to lying flat, and the magnetic rod 1 illustrated in the figure is horizontally arranged. Correspondingly, the lifting of the two lifting devices is lifting in the vertical direction.

[0022] For unified description of identical or substantially identical components, in the following text, for example, a lifting device is collectively referred to as a first lifting device and a second lifting device, a lifting opening is collectively referred to as a first lifting opening and a second lifting opening, and so on.

[0023] It should also be noted that, in the embodiments of the present invention, the main thing is to transform the pure horizontal sample transfer into horizontal combined with vertical sample picking and transfer, and the rest of the sample transfer system is not changed. The following description focuses on the part of the sample transfer system used to achieve sample transfer, as well as related parts. As other parts are not related to the improved parts of the present invention, they are only schematically described.

[0024] Figure 1 In the embodiment of the present invention, the basic shape of the injection chamber 9 does not change due to the change of the sample transfer method in the embodiment of the present invention. The injection chamber 9 usually has an injection chamber cover, which is mainly used for the entry and exit of samples, but can only enter the injection chamber and exit the process chamber.

[0025] Accordingly, the process chamber may be equipped with a sub-chamber cover.

[0026] The injection chamber cover is usually arranged on the upper side of the injection chamber 9 , and may also be arranged on the side of the injection chamber 9 .

[0027] The same is true for the process chamber 15, which will not be described in detail here. The injection chamber 9 and the process chamber 15 are both arranged horizontally, wherein an operation port is provided at one end of the injection chamber 9 and a first connecting port is provided at the other end, wherein "end" is mainly for the convenience of describing the defined orientation, with the rod direction of the magnetic rod 1 as a reference datum.

[0028] In addition, the direction of the magnetic rod 1 determines the running direction of the inner rod. Correspondingly, the operation port on the injection cavity 9 is aligned with the first communication port to meet the requirement of the inner rod of the magnetic rod 1 to pass through.

[0029] The magnetic rod 1 is a preferred direct-acting operating rod, which has a relatively long working stroke and a relatively thin inner rod. For example, a pneumatic cylinder, a hydraulic cylinder, an electric cylinder or an electric push rod can provide a linear motion rod, but the rod diameter is generally larger.

[0030] The above-mentioned pneumatic cylinders and the like are only inferior to the magnetic rod 1 , but the use of pneumatic cylinders, hydraulic cylinders and other direct-acting operating rods is not excluded in the embodiments of the present invention.

[0031] The magnetic rod 1 is a component specially used for long-distance linear transmission in a vacuum environment, and its inner rod can rotate. However, in the embodiment of the present invention, this function of the magnetic rod 1 is not required, and it only needs to be able to provide long-distance linear transmission in a vacuum environment.

[0032] The inner rod end of the currently commercially available magnetic rod 1 is also equipped with an independent manipulator, which can realize direct grasping of samples, etc., but in the embodiments of the present invention, the focus is on the use of the linear transmission function of the magnetic rod 1. The existence of the manipulator often requires the adaptation of a rotating pair, which is not intended to be used in the embodiments of the present invention. The main reason is that most rotating pairs require lubrication. As described in the background technology section, lubrication is often difficult to reliably guarantee in a high temperature environment.

[0033] Furthermore, one of the working environments applicable to the embodiments of the present invention is the high temperature environment, i.e., 500°C~700°C. Commercially available lubricating oils (liquid lubricants) or greases are difficult to be reliable and practical. Even high-temperature resistant solid lubricants (graphite-based lubricants) generally have an operating temperature lower than 450°C. Therefore, in the embodiments of the present invention, components with rotating pairs are avoided as much as possible. Obviously, the rotating pair is a rotating pair that needs to work in the chamber, and the rotating pair located outside the chamber is not subject to this restriction.

[0034] Correspondingly, for example, the magnetic rod 1 is matched with the operation port opened at one end of the injection chamber 7. Obviously, as mentioned above, the magnetic rod 1 is a component dedicated to long-distance vacuum transmission, so its structure for matching with the vacuum chamber is its inherent configuration. It is generally installed on one side of the corresponding vacuum chamber in a flange connection manner.

[0035] exist Figure 1 In the illustrated structure, an intervention tube 4 is pre-installed at the operation port, the intervention tube 4 and the injection chamber 7 can be connected by welding, and the magnetic rod 1 and the intervention tube 4 are connected by flange connection.

[0036] In conjunction with the magnetic rod 1, for example, the injection chamber 7 has a first lifting port at the bottom for the intervention of the actuating part of the first lifting device.

[0037] Correspondingly, a sample injection platform assembly is provided in the sample injection chamber 7, such as Figure 1 The sample injection heating plate 8 is included in the sample injection chamber 7 for supporting the sample.

[0038] Based on the above description, it can be understood that the existence of the injection platform assembly does not affect the lifting of the first lifting device, and its supporting table surface can be a platform such as a T-slot platform, that is, its supporting surface has gaps, holes and other structures to facilitate the passage of components lifted from below.

[0039] Correspondingly, the injection platform assembly is located directly above the first lifting port. Based on the aforementioned movement relationship, it should reserve a hole or a slit or other structure for the first lifting component in the first lifting device to pass through. It can also be a frame structure, so that the frame structure will have a larger channel in the vertical direction, which is beneficial to the lifting and lowering of the lifting component in the first lifting device.

[0040] The same is true for the second lifting device, which is referred to the configuration of the first lifting device, and will not be described here. Correspondingly, a second lifting port is provided at the bottom of the process chamber 15 to adapt to the access of the second lifting device. A process platform assembly is provided in the process chamber 15, and in terms of positional relationship, the process platform assembly is located above the second lifting port.

[0041] Correspondingly, a second communication port is opened at one end of the horizontal process chamber 15 opposite to the injection chamber 9, and the second communication port is obviously aligned with the first communication port. The process chamber 15 is connected to the injection chamber 9 through a communication pipe 10, and the communication pipe 10 is welded to the two communication ports.

[0042] In some implementations, the process chamber 15 is provided with a second pipe joint corresponding to the second connecting port, and the injection chamber 9 is provided with a first pipe joint corresponding to the first connecting port, and the first connector and the second pipe joint are connected by flange connection.

[0043] In particular, since the process chamber 15 often has relatively higher technical requirements, an isolation valve 11 is provided on the connecting pipe 10. The isolation valve 11 itself is often also equipped with a pipe joint, so that the aforementioned first connector and the second connector are respectively connected to the isolation valve 11 by flange connection.

[0044] The isolation valve 11 is used to open and close the connecting pipe 10 between the process chamber 15 and the injection chamber 9, and is closed under normal circumstances and needs to be opened only when the sample is transferred.

[0045] Here is how the samples are delivered: Regarding the first lifting device and the second lifting device, based on "lifting", it can be known that the movement form of its output component is vertical movement. Different from the overhang that will bend due to gravity, the vertical component will not bend as a result, but can ensure the posture stability of the lifted object, regardless of whether the direct-acting operating rod remains strictly horizontal after it is in place.

[0046] Furthermore, under normal use conditions, the injection chamber cover of the injection chamber 9 is opened, the sample is placed on the injection platform assembly, and then the injection chamber 9 is evacuated. At the later stage of evacuation, the injection heating plate 8 is started to heat the injection chamber, with the focus on heating the sample to perform processing on the injection chamber side.

[0047] After the processing on the injection chamber side is completed, the first lifting device moves upward to lift the sample to a predetermined height and wait for the direct-acting operating rod to be in place.

[0048] The direct-acting operating lever is activated, and the driven material-picking finger 6 moves to the first lifting device. In terms of positional relationship, the material-picking finger 6 is now located between the sample held by the first lifting device and the sample-injection platform assembly. Then, the first lifting device descends, and the sample gradually falls on the material-picking finger 6, and the first lifting device continues to descend to its position.

[0049] The isolation valve 11 is opened, and the direct-acting operating rod continues to operate until the driven material-picking finger 6 reaches the top of the process platform assembly, and the second lifting device is started until the second lifting member of the second lifting device lifts the sample, and the direct-acting operating rod is reset. The second lifting device moves downward, and the sample falls onto the process platform assembly.

[0050] Then, the isolation valve 11 is closed, the process chamber 15 is evacuated to a vacuum degree required by a predetermined process, and the temperature in the process chamber 15 or the temperature of the sample is heated to reach a predetermined process temperature.

[0051] It should be noted that, due to the fact that thermal convection is basically suppressed under ultra-high vacuum conditions, the heating of the sample is mainly induction heating (suitable for induction heating samples) or thermal radiation heating. In some implementations, contact heating, for example, can also be used. This is a conventional configuration in the field and will not be elaborated here.

[0052] The material picking finger 6 is a common component in the art, and its basic shape can be simply understood as a U-shape, roughly like a common two-pronged fork, and is mainly used to hold the sample. The space between the two arms of the U-shape can be used, for example, for the intervention of the first lifting member, so as to realize the lifting or lowering of the sample supported by the material picking finger 6.

[0053] In order to reduce the thermal impact of the heating device in the chamber on the two lifting devices, the power machines of the first lifting device and the second lifting device are installed outside the injection chamber 9 or the process chamber 15 through a bracket so that the power machines are separated from the corresponding chamber by a predetermined distance.

[0054] Correspondingly, the bracket has a dynamic sealing structure for dynamic sealing cooperation with the lifting member of the corresponding lifting device. Specifically, since the power machine needs to be arranged outside the corresponding chamber, the push rod directly provided by the power machine or the ejector driven by the push rod needs to be connected to the power machine outside the chamber, and the sealing performance between the push rod or the ejector and the corresponding lifting port needs to be ensured.

[0055] Furthermore, in some implementations, the dynamic sealing structure is configured as follows: An interface flange is provided at the lift port of the corresponding chamber; A bellows is provided, one end of which is connected to the interface flange by a static sealing connection structure, and the other end of the bellows is connected to the part of the lifting component located outside the corresponding chamber by a second static sealing connection structure.

[0056] The presence of bellows can transform dynamic seals into static seals, making it easier to ensure the sealing level under the condition of the presence of moving parts. Figure 1 As shown, if a dynamic seal is used between the first push rod of the first cylinder 20 or the first ejector driven by the first push rod and the first lift port, the airtightness is difficult to adapt to the sealing under ultra-high vacuum conditions. Therefore, if a first bellows 22 is used, one end of the first bellows 22 is connected to the first lift port through the first interface flange 23, and the other end of the first bellows 22 is statically sealed with, for example, the first push rod, then the dynamic seal between the first push rod or the first ejector and the first lift port is generally expressed as a static seal connected at both ends of the first bellows 22, and it is easier to achieve a relatively high sealing level.

[0057] Since the power machine is relatively far from the corresponding chamber, such as Figure 1 The first cylinder 20 shown in FIG. 1 has a relatively large distance from the injection chamber 9. In order to ensure the smooth operation of the first cylinder 20, a guide device needs to be provided for the first cylinder 20. Figure 1 In the illustrated structure, a guide rod guidance method is adopted.

[0058] Specifically, a flange for connecting with the bellows is provided at the lower part of the corresponding lifting component when it is lowered to the stop point; furthermore, at least one pair of guide rods arranged parallel to the lifting direction of the lifting component are provided; the flange is installed on a slide guided by the guide rods, and the lifting and lowering of the sample can become relatively smooth by relying on the alignment of a pair or more guide rods.

[0059] In addition, in some embodiments, a first-level seal is formed between the lifting member and the lifting port. Even if the first-level seal adopts a non-reliable contact dynamic seal or a labyrinth seal, it can still reduce the difficulty of configuring the second-level seal, and it should be known that a composite sealing method can more easily obtain a higher level of sealing. Under this condition, the bellows is used to construct the second-level seal.

[0060] In addition, in a more preferred embodiment, the inner end of the lifting port is provided with a sealing cover; accordingly, when the corresponding lifting device is in the lower stop position, the upper end of the lifting component is lower than the sealing cover; the sealing cover is driven by the passive cover of the lifting component.

[0061] The passive cover can provide primary sealing, and the condition for achieving sealing is that the lifting component is in the reset state (in the lower stop state), the upper end of the lifting component is located below the sealing cover and cannot interfere with the sealing cover in the reset state.

[0062] The sealing cover can be mounted on one side of the lift port using a side hinge and reset by means of a torsion spring, for example. It should be noted that although the sealing cover uses a revolving pair, unlike a revolving pair that moves continuously, its movement form is relatively simple and only needs to meet the opening and closing requirements.

[0063] In a movement range after the lifting member comes into contact with the sealing cover, one side edge of the sealing cover comes into contact with the lifting member. In order to reduce the damping of the lifting member, a roller is provided on one side of the sealing cover and the lifting member.

[0064] The reliability requirement for the roller shaft is not high. Even if the roller shaft is stuck, the friction force generated by the cooperation between the sealing cover and the lifting component is relatively small.

[0065] In addition, as a conventional configuration, the injection chamber 9 and the process chamber 15 are respectively provided with independent vacuum pipe interfaces and corresponding pressure relief valves. However, in some implementations, the pressure relief valve may be provided only on the process chamber 15 side.

Claims

1. A sample transfer system under ultra-high vacuum and high temperature conditions, characterized in that: include: The injection chamber is arranged horizontally, has an operation port at one end, a first communication port aligned with the operation port at the other end, and a first lifting port at the bottom; The injection platform assembly is located in the injection chamber and directly above the first lifting port; The process chamber is arranged horizontally, and a second connecting port is opened at one end opposite to the injection chamber to be connected through a connecting pipe, and a second lifting port is opened at the bottom; A process platform assembly is located in the process chamber and directly above the second lift port; An isolation valve is provided on the connecting pipe to control the opening and closing between the injection chamber and the process chamber; A first lifting device, connected to the first lifting port, for lifting the sample on the injection platform assembly; A second lifting device is disposed at the second lifting port to lift the sample on the process platform assembly; as well as A direct-acting operating rod is installed at the operating port and has a moving rod in the connecting direction between the injection chamber and the process chamber, and a material taking finger is arranged on the moving rod; Among them, high temperature refers to 500℃~700℃.

2. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 1, characterized in that: The direct-acting operating rod is a magnetic rod; The magnetic rod has a flange connection portion, the operation port is provided with an intervention tube having an intervention port flange, and the magnetic rod and the intervention port are correspondingly connected by a flange.

3. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 1, characterized in that: The power machines of the first lifting device and the second lifting device are installed outside the injection chamber or the process chamber through a bracket so that the power machines are separated from the corresponding chamber by a predetermined distance; Correspondingly, the bracket has a dynamic sealing structure for dynamic sealing cooperation with the lifting component of the corresponding lifting device.

4. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 3, characterized in that: The dynamic sealing structure is configured as follows: An interface flange is provided at the lift port of the corresponding chamber; A bellows is provided, one end of which is connected to the interface flange by a static sealing connection structure, and the other end of the bellows is connected to the part of the lifting component located outside the corresponding chamber by a second static sealing connection structure.

5. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 4, characterized in that: The second static sealing connection structure is configured as follows: A flange plate for connecting with the bellows is provided at the lower part of the corresponding lifting member when the lifting member is at the lowering stop point; Providing at least one pair of guide rods arranged parallel to the lifting direction of the lifting member; The flange is mounted on a slide seat guided by the guide rod.

6. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 5, characterized in that: A first-level seal is formed between the lifting member and the lifting port; The bellows is used to construct a secondary seal.

7. The sample transfer system under ultra-high vacuum and high temperature conditions according to any one of claims 4 to 6, characterized in that: The inner end of the lift port is provided with a sealing cover; Correspondingly, when the corresponding lifting device is in the lower stop position, the upper end of the lifting member is lower than the sealing cover; Correspondingly, the sealing cover is driven by the passive cover of the lifting member.

8. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 7, characterized in that: A roller shaft is arranged on one side where the sealing cover cooperates with the lifting component.

9. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 1, characterized in that: A main chamber cover for entering and exiting samples is disposed on the upper side of the injection chamber; A sub-chamber cover is arranged on the upper side of the process chamber.

10. The sample transfer system under ultra-high vacuum and high temperature conditions according to claim 1, characterized in that: The injection chamber and the process chamber are respectively provided with independent vacuum pipe interfaces and corresponding pressure relief valves.

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