Flange locking device and vacuum equipment

Abstract

The invention discloses a flange locking device and vacuum equipment. The flange locking device comprises a first locking piece, a second locking piece and a locking assembly. The first locking piece extends by a preset length in the first direction, and the first end of the first locking piece is provided with a first stopping part. The second locking piece extends in the first direction and can move relative to the first locking piece in the first direction, and a second stopping part is arranged at the end, away from the first stopping part, of the second locking piece. The locking assembly comprises a locking piece and a driving part, the locking piece is rotatably arranged on the first locking piece and the second locking piece in a penetrating mode and enables the first locking piece and the second locking piece to be connected into a whole, and the locking piece rotates to drive the driving part to drive the second locking piece to move in the first direction so as to adjust the distance between the first stopping part and the second stopping part. The problem that when the axial space of the flange is limited, a fastener is difficult to install on the flange is solved.

Description

Technical Field

[0001] The present application relates to the field of vacuum technology, and in particular to a flange locking device and vacuum equipment. Background Art

[0002] In the field of vacuum technology, bolts, nuts, clamps and other fasteners are usually used to tightly lock and connect two flanges together. However, when there are obstacles around the flanges, the axial space at the connection between the two flanges is very limited, and it is difficult for operators to install fasteners such as bolts, nuts and clamps on the flanges, thereby failing to achieve a sealed connection between the flanges. Summary of the invention

[0003] The main purpose of the present application is to provide a flange locking device and a vacuum device to solve the problem mentioned in the background art that it is difficult to install fasteners on the flange when the axial space of the flange is limited.

[0004] According to one aspect of the present application, a flange locking device is provided, comprising:

[0005] A first locking member, the first locking member extends a predetermined length along a first direction, and a first stop portion is disposed at a first end of the first locking member;

[0006] a second locking member, the second locking member extending along the first direction and being movable relative to the first locking member along the first direction, and a second stopping portion being provided at one end of the second locking member away from the first stopping portion;

[0007] A locking assembly, wherein the locking assembly includes a locking member and a driving portion, wherein the locking member is rotatably inserted into the first locking member and the second locking member and connects the first locking member and the second locking member as a whole, and the rotation of the locking member drives the driving portion to drive the second locking member to move along a first direction to adjust the distance between the first stop portion and the second stop portion.

[0008] Further, along a second direction at a predetermined angle to the first direction, a first through hole is penetrated on the second locking member, the locking member is penetrated through the first through hole and connected to the first locking member, the driving portion is mounted on the locking member and is located in the first through hole, along the first direction, a first gap exists between a side of the locking member close to the second stop portion and an inner wall surface of the first through hole, and a second gap exists between a side of the locking member away from the second stop portion and an inner wall surface of the first through hole, and a size of the second gap becomes smaller along the second direction;

[0009] The locking member rotates to drive the driving portion to move along the second direction relative to the second locking member to adjust the size of the first gap.

[0010] Furthermore, the driving unit comprises:

[0011] A wedge block, along the second direction, the size of the wedge block becomes smaller, along the first direction, the wedge block is located on the side of the locking member away from the second stop portion, the side of the wedge block away from the locking member is an arcuate surface, and the arcuate surface is in contact with the inner wall surface of the first through hole.

[0012] Further, along the second direction, a limiting flange is provided on the locking member, and the limiting flange includes two limiting flanges, the two limiting flanges are respectively located on opposite sides of the wedge block, and the wedge block is clamped between the two limiting flanges.

[0013] Further, along the first direction, an installation space is provided in the first locking member, and one end of the second locking member away from the second stop portion at least partially extends into the installation space, at least a portion of the inner wall surface of the installation space is a first plane, and at least a portion of the outer wall surface of the second locking member is a second plane, and the first plane is in contact with the second plane.

[0014] Furthermore, along the first direction, a second through hole is opened on the first stop portion, the second through hole is connected to the installation space, the second through hole is covered with an anti-slip component, the anti-slip component at least partially extends into the installation space and is fixedly connected to the end of the second locking component away from the second stop portion.

[0015] Furthermore, the locking element comprises:

[0016] a screw rod, wherein the length of the screw rod extends along the second direction;

[0017] Among them, along the second direction, a third through hole and a fourth through hole are respectively opened on opposite sides of the first locking member, and the third through hole and the fourth through hole are both connected to the installation space. The screw rod passes through the third through hole and the first through hole in sequence along the second direction and is threadedly connected with the fourth through hole. The length of the third through hole extends along the first direction, and the size of the third through hole is larger than that of the first through hole.

[0018] Furthermore, the flange locking device also includes:

[0019] An elastic member is sleeved on the second locking member along the first direction, and the elastic member abuts between an end of the first locking member away from the first stop portion and the second stop portion.

[0020] On the other hand, the present application also provides a vacuum device, the vacuum device comprising:

[0021] A flange locking device, wherein the flange locking device has an edge outer contour of the first stop portion and the second stop portion that is larger than an edge outer contour of the first locking member along the first direction;

[0022] A flange assembly includes a first flange and a second flange, wherein the first flange and the second flange are clamped between the first stop portion and the second stop portion.

[0023] Further, the first flange and the second flange both include:

[0024] body part of tube;

[0025] An outer convex ring portion, the outer convex ring portion is sleeved on the end of the tube body portion, and an installation groove is formed on the outer edge of the outer convex ring portion along the axial direction of the tube body portion;

[0026] Among them, along the axial direction of the tube body, the outer convex ring portion of the first flange and the outer convex ring portion of the second flange are in contact with each other and the mounting groove of the first flange and the mounting groove of the second flange are connected to each other, the flange locking device is at least partially embedded in the mounting groove of the first flange and the mounting groove of the second flange, and the first stop portion abuts against the end face of one of the outer convex ring portions, and the second stop portion abuts against the end face of the other outer convex ring portion.

[0027] In the present application, the relative movement of the first locking member and the second locking member is driven by the rotation of the locking member to drive the driving part, so that the flange locking device can be installed on the flange and lock or unlock the flange when the axial space of the flange is limited. When the axial space of the flange is limited, the flange locking device can still perform operations such as sealing connection between flanges. When the flange is installed between the first stopper and the second stopper, the spacing between the first stopper and the second stopper can be adjusted by rotating the locking member, so as to lock or unlock the flange. The operation difficulty of the flange locking device is relatively low, and it is easier for operators to master, which can effectively improve the connection efficiency of the flange and help save operation time. In addition, the flange locking device can also adapt to flanges of various specifications and sizes, and the flange locking device has high versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0029] Figure 1 This is a schematic structural diagram of the flange locking device disclosed in this application;

[0030] Figure 2 This is a disassembled diagram of the flange locking device disclosed in this application;

[0031] Figure 3 is a cross-sectional view of the flange locking device disclosed in the present application;

[0032] Figure 4 It is a schematic diagram of the structure of the locking assembly disclosed in this application;

[0033] Figure 5 This is a schematic structural diagram of the first locking member disclosed in this application;

[0034] Figure 6 This is a schematic diagram of the structure of the vacuum equipment disclosed in this application.

[0035] The above drawings include the following reference numerals:

[0036] 10. First locking member; 11. First stop portion; 12. First plane; 13. Second through hole; 131. Anti-slip member; 14. Third through hole; 15. Fourth through hole; 20. Second locking member; 21. Second stop portion; 22. First through hole; 221. First gap; 222. Second gap; 23. Second plane; 24. Threaded hole; 30. Locking assembly; 31. Locking member; 311. Limiting flange; 32. Driving unit; 40. Elastic member; 50. Flange assembly; 51. First flange; 510. Tube body; 511. Outer convex ring; 512. Mounting groove; 52. Second flange; 53. Obstacle. DETAILED DESCRIPTION

[0037] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0038] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0039] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0040] like Figures 1 to 6 As shown, the present application provides a flange locking device. The flange locking device includes a first locking member 10, a second locking member 20 and a locking assembly 30. The first locking member 10 extends along a first direction for a predetermined length, and a first stopper 11 is provided at a first end of the first locking member 10. The second locking member 20 extends along the first direction and can be relative to the first locking member 10 along the first direction (such as Figure 3 The second locking member 20 moves in the direction indicated by the arrow X in the middle, specifically the length direction of the second locking member 20, and the second stop portion 21 is provided at one end of the second locking member 20 away from the first stop portion 11. The locking assembly 30 includes a locking member 31 and a driving portion 32. The locking member 31 is rotatably provided through the first locking member 10 and the second locking member 20 and connects the first locking member 10 and the second locking member 20 as a whole. The rotation of the locking member 31 drives the driving portion 32 to drive the second locking member 20 to move along the first direction to adjust the spacing between the first stop portion 11 and the second stop portion 21.

[0041] In this embodiment, the relative movement of the first locking member 10 and the second locking member 20 is driven by the rotation of the locking member 31 to drive the driving part 32, so that the flange locking device can be installed on the flange and lock or unlock the flange when the axial space of the flange is limited. When the axial space of the flange is limited, the flange locking device can still perform operations such as sealing connection between flanges. When the flange is installed between the first stopper 11 and the second stopper 21, the spacing between the first stopper 11 and the second stopper 21 can be adjusted by rotating the locking member 31, so as to lock or unlock the flange. The operation difficulty of the flange locking device is relatively low, and it is easier for operators to master, which can effectively improve the connection efficiency of the flange and help save operation time. In addition, the flange locking device can also adapt to flanges of various specifications and sizes, and the flange locking device has high versatility.

[0042] Further, along the second direction at a predetermined angle to the first direction, the second locking member 20 is provided with a first through hole 22. The locking member 31 is provided through the first through hole 22 and connected to the first locking member 10, and the driving part 32 is installed on the locking member 31 and located in the first through hole 22. Along the first direction, there is a first gap 221 between the side of the locking member 31 close to the second stopper 21 and the inner wall surface of the first through hole 22, and there is a second gap 222 between the side of the locking member 31 away from the second stopper 21 and the inner wall surface of the first through hole 22, and the size of the second gap 222 decreases along the second direction. The rotation of the locking member 31 drives the driving part 32 to move relative to the second locking member 20 along the second direction to adjust the size of the first gap 221. The locking member 31 passes through the first through hole 22 and is connected to the first locking member 10, and the first locking member 10 and the second locking member 20 can be fixedly connected together. The first locking member 10 can move along the second direction, and the first locking member 10 will drive the driving member to move along the second direction, and the driving member gradually squeezes into the second gap 222, and the driving member moves from a position where the second gap 222 has a larger space to a position where the second gap 222 has a smaller space. Along the first direction, during the process of the driving member squeezing into the second gap 222, the second gap 222 gradually becomes larger, and the first gap 221 gradually becomes smaller, and the driving member drives the second locking member 20 and the second stop portion 21 to move relative to the first locking member 10 in a direction close to the first stop portion 11, thereby reducing the distance between the first stop portion 11 and the second stop portion 21, thereby achieving the purpose of locking the flange.

[0043] When the locking member 31 moves in the opposite direction of the second direction, the driving member also moves in the opposite direction of the locking member 31, and the driving member moves from a position where the second gap 222 has a smaller space to a position where the second gap 222 has a larger space. In the process of the driving member moving in the opposite direction of the second direction with the locking member 31, the second gap 222 gradually becomes smaller, and the first gap 221 gradually becomes larger. The driving member drives the second locking member 20 and the second stop portion 21 to move in a direction away from the first stop portion 11 relative to the first locking member 10, so as to increase the distance between the first stop portion 11 and the second stop portion 21, thereby achieving the purpose of unlocking the flange. By controlling the movement of the locking member 31 in the radial space of the flange, the distance between the first stop portion 11 and the second stop portion 21 can be adjusted to achieve locking or unlocking of the flange. In the case where the axial space of the flange is limited, the present application can still be installed on the flange and achieve the locking and unlocking operations of the flange. In this embodiment, the second direction is Figure 3 The second direction is the direction indicated by the arrow Y in the middle, and is a direction perpendicular to the first direction. In actual situations, the second direction may also be set to other directions, and this embodiment does not make a sole limitation.

[0044] Furthermore, the driving part 32 includes a wedge block. Along the second direction, the size of the wedge block becomes smaller. Along the first direction, the wedge block is located on the side of the locking member 31 away from the second stopper 21, and the side of the wedge block away from the locking member 31 is an arc surface, and the arc surface is in contact with the inner wall surface of the first through hole 22. When the locking member 31 rotates to drive the wedge block to move along the second direction, the larger part of the wedge block gradually enters the space with a smaller size of the second gap 222, and the wedge block can effectively drive the second gap 222 to gradually increase, while the first gap 221 gradually decreases, and then the wedge block drives the second locking member 20 to move along the first direction. The wedge block can stably drive the second locking member 20 to move, ensuring that the locking operation of the flange can be carried out smoothly.

[0045] In addition, the arc surface of the wedge block fits with the inner wall surface of the first through hole 22, so that the wedge block can slide smoothly along the inner wall surface of the first through hole 22 during the movement relative to the first through hole 22, reducing the unstable conditions such as shaking and jamming during the movement of the wedge block. This arrangement can not only ensure the accuracy and stability of the wedge block when driving the second locking member 20 to move, but also allow the flange locking device to maintain stable and reliable performance during frequent operation or long-term use, effectively reducing the wear between the wedge block and the inner wall surface of the first through hole 22, and helping to extend the service life of the flange locking device.

[0046] Furthermore, along the second direction, a limiting flange 311 is provided on the locking member 31. The limiting flange 311 includes two, and the two limiting flanges 311 are respectively located on opposite sides of the wedge block, and the wedge block is clamped between the two limiting flanges 311. The two limiting flanges 311 limit the wedge block in the second direction, ensuring that the wedge block can move with the locking member 31, and ensuring that the wedge block can accurately and reliably drive the second locking member 20 to move along the first direction. The limiting flange 311 can also effectively prevent the locking member 31 from shaking, loosening, and falling off, and ensure that the locking member 31 can accurately adjust the spacing between the first stopper 11 and the second stopper 21. The two limiting flanges 311 also provide a clear guide for the installation of the wedge block. When installing the wedge block, it is only necessary to clamp the wedge block between the two limiting flanges 311 to ensure that the wedge block can be accurately installed on the locking member 31, which effectively improves the installation efficiency of the wedge block. There is also a certain gap between the wedge block and the locking member 31, and the locking member 31 can rotate relative to the wedge block. Specifically, the two limiting flanges 311 are respectively arranged on opposite sides of the wedge block along the second direction.

[0047] Furthermore, along the first direction, an installation space is provided in the first locking member 10. One end of the second locking member 20 away from the second stopper 21 at least partially extends into the installation space, at least a portion of the inner wall surface of the installation space is the first plane 12, at least a portion of the outer wall surface of the second locking member 20 is the second plane 23, and the first plane 12 fits with the second plane 23. The first locking member 10 is sleeved on the second locking member 20, which effectively improves the compactness of the flange locking device, improves the integration of the flange locking device, can reduce the volume of the flange locking device, and ensures that the flange locking device can be installed on the flange. The first plane 12 fits with the second plane 23, providing an accurate installation guide for the second locking member 20 to extend into the installation space, and the second plane 23 can accurately slide into a predetermined position in the installation space along the first plane 12. At the same time, the mutual contact between the first plane 12 and the second plane 23 also has a certain anti-rotation effect, which effectively ensures that the second locking member 20 will not rotate during installation, ensures the stability of the second locking member 20, and is conducive to the second locking member 20 being able to move more stably along the first direction. In addition, during the movement of the second locking member 20 along the second plane 23, the friction between the second plane 23 and the first plane 12 is small, which is more conducive to ensuring the stability and reliability of the second locking member 20.

[0048] Alternatively, the first locking member 10 may also be installed on one side of the second locking member 20 along the second direction, and the locking member 31 passes through the first through hole 22 and is fixedly connected to the first locking member 10. The movement of the locking member 31 along the second direction drives the wedge block to move along the second direction, and the wedge block squeezes the inner wall surface of the first through hole 22 to drive the second locking member 20 and the second stop portion 21 to move along the first direction toward or away from the first stop portion 11.

[0049] Further, along the first direction, a second through hole 13 is provided on the first stopper 11. The second through hole 13 is in communication with the installation space, and the second through hole 13 is covered with an anti-slip member 131. The anti-slip member 131 at least partially extends into the installation space and is fixedly connected to the end of the second locking member 20 away from the second stopper 21. The anti-slip member 131 is fixedly connected to the second locking member 20, and the anti-slip member 131 can prevent the second locking member 20 from escaping from the installation space, and can also effectively prevent the second locking member 20 from rotating relative to the first locking member 10. The anti-slip member 131 can limit and fix the second locking member 20 from multiple directions, thereby enhancing the stability of the connection between the first locking member 10 and the second locking member 20, and ensuring that the flange locking device can lock the flange stably for a long time. In addition, the anti-slip component 131 covers the second through hole 13, which can effectively prevent foreign objects such as dust and impurities from entering the installation space, reduce the risk of failure of the flange locking device due to factors such as impurity accumulation and wear, and also help maintain a good sealing environment inside the flange to ensure the sealing of the flange.

[0050] A threaded hole 24 is provided at the end of the second locking member 20 close to the second through hole 13 , and the anti-slipping member 131 is threadedly matched with the threaded hole 24 to connect the anti-slipping member 131 and the second locking member 20 as a whole.

[0051] Further, the locking member 31 includes a screw. The length of the screw extends along the second direction. Wherein, along the second direction, the third through hole 14 and the fourth through hole 15 are respectively opened on the opposite sides of the first locking member 10. The third through hole 14 and the fourth through hole 15 are both connected to the installation space, and the screw sequentially penetrates the third through hole 14 and the first through hole 22 along the second direction and is threadedly connected with the fourth through hole 15. The length of the third through hole 14 extends along the first direction, and the size of the third through hole 14 is larger than the size of the first through hole 22. The screw sequentially penetrates the third through hole 14 and the first through hole 22 along the second direction and is threadedly connected with the fourth through hole 15, and the second locking member 20 can be fixed in the first locking member 10, so that the first locking member 10 and the second locking member 20 can be reliably connected together, thereby ensuring the stability and reliability of the flange locking device. When assembling the flange locking device, first clamp the wedge block between the two limiting flanges 311 to connect the wedge block and the screw rod as one, and extend the second locking member 20 into the installation space to connect the third through hole 14, the first through hole 22 and the fourth through hole 15 accordingly, and then insert the screw rod and the wedge block connected as one into the installation space from the third through hole 14, so that the end of the screw rod is threadedly engaged with the fourth through hole 15. By rotating the screw rod, the spacing between the first stopper 11 and the second stopper 21 can be adjusted. The size of the third through hole 14 is larger than that of the first through hole 22, so that the screw rod and the wedge block installed as one are installed in the first through hole 22 after passing through the third through hole 14.

[0052] Furthermore, the flange locking device further includes an elastic member 40. Along the first direction, the elastic member 40 is sleeved on the second locking member 20, and the elastic member 40 abuts between the end of the first locking member 10 away from the first stopper 11 and the second stopper 21. The elastic member 40 has a tendency to move the second stopper 21 away from the first locking member 10, and has a certain pre-tightening effect. When the screw is rotated to lock the flange, the second stopper 21 moves against this tendency, which is conducive to improving the locking effect of the second stopper 21. When the screw is rotated to unlock the flange, the elastic member 40 drives the second stopper 21 away from the first stopper 11, so that the second stopper 21 can automatically return to a position away from the first stopper 11, and prepare for the next use of the flange locking device. The elastic member 40 can also absorb vibration during the movement of the second stopper 21, and further ensure the stability of the second stopper 21 and the first stopper 11. In this embodiment, the elastic member 40 is a spring, and may also be other flexible structures with elasticity, such as rubber, etc., which is not limited to this embodiment.

[0053] On the other hand, Figure 6 As shown, the embodiment of the present application also provides a vacuum device. The vacuum device includes the above-mentioned flange locking device and a flange assembly 50. Along the first direction, the edge outer contour of the first stopper 11 and the second stopper 21 is larger than the edge outer contour of the first locking member 10. The flange assembly 50 includes a first flange 51 and a second flange 52. The first flange 51 and the second flange 52 are clamped between the first stopper 11 and the second stopper 21. The vacuum device includes all the technical effects of the above-mentioned flange locking device. An obstacle 53 exists in the axial space between the first flange 51 and the second flange 52. The first stopper 11 and the second stopper 21 protrude from the first locking member 10, ensuring that the first flange 51 and the second flange 52 can be clamped between the first stopper 11 and the second stopper 21, so that the first flange 51 and the second flange 52 are not easy to be lateral deflected or disengaged when being locked, ensuring the stability of the connection between the first flange 51 and the second flange 52. A sealing ring is arranged between the first flange 51 and the second flange 52.

[0054] Furthermore, the first flange 51 and the second flange 52 both include a tube body 510 and an outer convex ring 511. The outer convex ring 511 is sleeved on the end of the tube body 510, and a mounting groove 512 is provided on the outer edge of the outer convex ring 511 along the axial direction of the tube body 510. In particular, along the axial direction of the tube body 510, the outer convex ring 511 of the first flange 51 and the outer convex ring 511 of the second flange 52 are attached to each other, and the mounting groove 512 of the first flange 51 and the mounting groove 512 of the second flange 52 are connected to each other. The flange locking device is at least partially embedded in the mounting groove 512 of the first flange 51 and the mounting groove 512 of the second flange 52, and the first stopper 11 abuts against the end face of one of the outer convex rings 511, and the second stopper 21 abuts against the end face of the other outer convex ring 511. After the mounting groove 512 of the first flange 51 is spliced ​​with the mounting groove 512 of the second flange 52, the first stopper 11 and the second stopper 21 of the flange locking device are located outside the mounting groove 512, and the first locking member 10 of the flange locking device is located inside the mounting groove 512. The outer convex ring portion 511 of the first flange 51 and the outer convex ring portion 511 of the second flange 52 are tightly clamped between the first stopper 11 and the second stopper 21. The mounting groove 512 provides an installation guide for the flange locking assembly, and the operator can accurately and quickly install the flange locking device in the mounting groove 512. The mounting groove 512 can also reduce the additional installation space occupied by the flange locking device outside the first flange 51 and the second flange 52, further reducing the occupied space of the flange locking device. When the installation space of the flange assembly 50 is limited, the flange locking device can be easily installed on the flange assembly 50 and lock and seal the first flange 51 and the second flange 52.

[0055] The mounting grooves 512 are evenly spaced along the circumference of the outer convex ring, and the multiple mounting grooves 512 of the first flange 51 are spliced ​​one-to-one with the multiple mounting grooves 512 of the second flange 52. The multiple mounting grooves 512 are evenly spaced, which can ensure that the flange mounting device can apply a uniform locking force to the first flange 51 and the second flange 52, and ensure better sealing between the first flange 51 and the second flange 52.

[0056] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0057] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0058] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A flange locking device, characterized in that: include: A first locking member (10), the first locking member (10) extending along a first direction by a predetermined length, and a first stop portion (11) being provided at a first end of the first locking member (10); a second locking member (20), the second locking member (20) extending along a first direction and being movable relative to the first locking member (10) along the first direction, and a second stop portion (21) being provided at one end of the second locking member (20) facing away from the first stop portion (11); A locking assembly (30), the locking assembly (30) comprising a locking member (31) and a driving portion (32), the locking member (31) being rotatably inserted into the first locking member (10) and the second locking member (20) and connecting the first locking member (10) and the second locking member (20) as a whole, the locking member (31) rotating to drive the driving portion (32) to drive the second locking member (20) to move along a first direction to adjust the distance between the first stop portion (11) and the second stop portion (21).

2. The flange locking device according to claim 1, characterized in that: A first through hole (22) is provided on the second locking member (20) along a second direction which is at a predetermined angle to the first direction, the locking member (31) is provided in the first through hole (22) and is connected to the first locking member (10), the driving portion (32) is mounted on the locking member (31) and is located in the first through hole (22), along the first direction, a first gap (221) exists between a side of the locking member (31) close to the second stop portion (21) and an inner wall surface of the first through hole (22), and a second gap (222) exists between a side of the locking member (31) away from the second stop portion (21) and an inner wall surface of the first through hole (22), and the size of the second gap (222) decreases along the second direction; The locking member (31) rotates to drive the driving portion (32) to move along the second direction relative to the second locking member (20) to adjust the size of the first gap (221).

3. The flange locking device according to claim 2, characterized in that: The driving unit (32) comprises: A wedge block, wherein the size of the wedge block decreases along the second direction, and wherein the wedge block is located on the side of the locking member (31) away from the second stop portion (21) along the first direction, and wherein the side of the wedge block away from the locking member (31) is an arcuate surface, and the arcuate surface is in contact with the inner wall surface of the first through hole (22).

4. The flange locking device according to claim 3, characterized in that: Along the second direction, a limiting flange (311) is provided on the locking member (31), and the limiting flange (311) includes two limiting flanges (311), the two limiting flanges (311) are respectively located on opposite sides of the wedge block, and the wedge block is clamped between the two limiting flanges (311).

5. The flange locking device according to claim 1, characterized in that: Along the first direction, an installation space is provided in the first locking member (10), one end of the second locking member (20) away from the second stop portion (21) at least partially extends into the installation space, at least a portion of the inner wall surface of the installation space is a first plane (12), at least a portion of the outer wall surface of the second locking member (20) is a second plane (23), and the first plane (12) is in contact with the second plane (23).

6. The flange locking device according to claim 5, characterized in that: A second through hole (13) is provided on the first stop portion (11) along the first direction, the second through hole (13) is communicated with the installation space, the second through hole (13) is covered with an anti-slip component (131), the anti-slip component (131) at least partially extends into the installation space and is fixedly connected to the end of the second locking component (20) away from the second stop portion (21).

7. The flange locking device according to claim 2, characterized in that: The locking member (31) comprises: a screw rod, wherein the length of the screw rod extends along the second direction; Wherein, along the second direction, a third through hole (14) and a fourth through hole (15) are respectively opened on opposite sides of the first locking member (10), and the third through hole (14) and the fourth through hole (15) are both connected to the installation space, and the screw rod passes through the third through hole (14) and the first through hole (22) in sequence along the second direction and is threadedly connected with the fourth through hole (15), the length of the third through hole (14) extends along the first direction, and the size of the third through hole (14) is larger than the size of the first through hole (22).

8. The flange locking device according to any one of claims 1 to 7, characterized in that: The flange locking device also includes: An elastic member (40) is sleeved on the second locking member (20) along the first direction, and the elastic member (40) abuts between an end of the first locking member (10) away from the first stop portion (11) and the second stop portion (21).

9. A vacuum device, characterized in that: The vacuum equipment comprises: A flange locking device, wherein the flange locking device is the flange locking device according to any one of claims 1 to 8, wherein along the first direction, the edge outer contours of the first stop portion (11) and the second stop portion (21) are larger than the edge outer contour of the first locking member (10); A flange assembly (50), the flange assembly (50) comprising a first flange (51) and a second flange (52), the first flange (51) and the second flange (52) being clamped between the first stop portion (11) and the second stop portion (21).

10. The vacuum device according to claim 9, characterized in that The first flange (51) and the second flange (52) both include: Pipe body part(510); An outer convex ring portion (511), the outer convex ring portion (511) is sleeved on the end of the tube body portion (510), and an installation groove (512) is provided on the outer edge of the outer convex ring portion (511) along the axial direction of the tube body portion (510); In which, along the axial direction of the tube body (510), the outer convex ring portion (511) of the first flange (51) and the outer convex ring portion (511) of the second flange (52) are in contact with each other and the mounting groove (512) of the first flange (51) and the mounting groove (512) of the second flange (52) are connected to each other, and the flange locking device is at least partially embedded in the mounting groove (512) of the first flange (51) and the mounting groove (512) of the second flange (52), and the first stop portion (11) abuts against the end face of one of the outer convex ring portions (511), and the second stop portion (21) abuts against the end face of the other outer convex ring portion (511).

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