Pipe furnace deformation detection method, deformation detection assembly and deformation detection system

Abstract

The embodiment of the application discloses a kind of pipe furnace deformation detection method, deformation detection component and deformation detection system.The method is adjusted to the light emitting device in deformation detection component, so that the illumination light emitted by light emitting device is shot into the inner cavity of pipe furnace from the first end of pipe furnace, and is reflected to the preset position at the second end of pipe furnace at the inner cavity wall of pipe furnace, while controlling light emitting device to move at least once along the circumferential direction of pipe furnace, to obtain the first residence position of illumination light at the second end each time, and finally according to the preset position and the first residence position, it can be accurately known whether pipe furnace is deformed, and then wafer can be smoothly taken out from the pipe.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and in particular to a deformation detection method, a deformation detection assembly and a deformation detection system of a tube furnace. BACKGROUND

[0002] The quartz tube is a special industrial technology glass made of silicon dioxide, which has a series of excellent physical and chemical properties. The quartz tube has excellent high-temperature resistance, and the softening point temperature is 1730 DEG C. It can be used for a long time below 1100 DEG C, and the maximum use temperature can reach 1450 DEG C for a short time.

[0003] In the related art, the wafer needs to be placed in the quartz tube for heat treatment to perform alloying, diffusion or annealing process. In actual semiconductor product production, the quartz tube needs to run for 24 hours, and usually needs to be heated continuously for several hours, and the temperature often reaches more than 1100 DEG C. Long-term high-temperature operation can cause the tube body of the quartz tube to deform, and the wafer may not be smoothly taken out from the tube. At the same time, the wafer may collide mechanically with the inner wall of the furnace tube during the taking process, increasing the risk of the furnace tube cracking. In addition, the deformation of the tube body can change the placement position of the wafer in the tube, which can affect the process consistency of the wafer.

[0004] However, after the quartz tube is placed in the heating cavity, only the two ends are visible, and the cavity wall of the heating cavity is thick. If the inside of the quartz tube deforms due to high temperature, it is difficult to determine whether the quartz tube deforms before it is taken out. SUMMARY

[0005] In view of the deficiencies of the prior art, the present application provides a deformation detection method, a deformation detection assembly and a deformation detection system of a tube furnace, which can accurately know whether the tube furnace deforms, and thus can avoid the wafer being unable to be smoothly taken out from the tube.

[0006] In a first aspect, the present application provides a deformation detection method of a tube furnace, comprising:

[0007] Adjusting the light emitting device in the deformation detection assembly, so that the illumination light emitted by the light emitting device is incident into the inner cavity of the tube furnace from the first end of the tube furnace, and is reflected at the inner cavity wall to the preset position of the second end of the tube furnace;

[0008] Controlling the light emitting device to move at least once along the circumferential direction of the tube furnace to obtain the first residence position of the illumination light at the second end each time;

[0009] According to the preset position and the first residence position, it is determined whether the tube furnace deforms.

[0010] Further, in the deformation detection method of the tubular furnace provided in the present application, according to the preset position and the first stopping position, whether the tubular furnace is deformed is determined, comprising:

[0011] A first offset between the first stopping position of the irradiation light and the preset position is obtained after the light emitting device moves along the circumferential direction of the tubular furnace each time;

[0012] If the first offset after each movement is less than a preset first threshold value, the light emitting device is controlled to move along the radial direction of the tubular furnace, and the pitch of the light emitting device is adjusted so that the irradiation light is reflected by the inner cavity wall to the preset position;

[0013] The light emitting device is controlled to move along the circumferential direction at least once to obtain a second stopping position of the irradiation light at the second end each time;

[0014] According to the preset position and the second stopping position, whether the tubular furnace is deformed is determined.

[0015] Further, in the deformation detection method of the tubular furnace provided in the present application, the method further comprises:

[0016] At the first time, a first distance between the third stopping position of the irradiation light at the second end of the tubular furnace and the inner cavity wall of the tubular furnace is obtained;

[0017] At the second time, a second distance between the fourth stopping position of the irradiation light at the second end of the tubular furnace and the inner cavity wall of the tubular furnace is obtained;

[0018] According to the first distance and the second distance, whether the tubular furnace is deformed is determined.

[0019] Further, in the deformation detection method of the tubular furnace provided in the present application, according to the first distance and the second distance, whether the tubular furnace is deformed is determined, comprising:

[0020] According to the first distance and the second distance, a second offset between the third stopping position and the fourth stopping position is determined;

[0021] If the second offset is less than a preset second threshold value, the light emitting device is controlled to move along the circumferential direction at least once to obtain a fifth stopping position of the irradiation light at the second end of the tubular furnace;

[0022] According to the preset position and the fifth stopping position, whether the tubular furnace is deformed is determined.

[0023] Further, in the deformation detection method of the tubular furnace provided in the present application, the method further comprises:

[0024] At the third moment, the light-emitting device is adjusted in pitch to obtain a sixth stopping position of the irradiation light reflected from a plurality of reflection points on the inner cavity wall to the second end; wherein the plurality of reflection points are arranged along the axial direction of the tubular furnace;

[0025] The first position information of the light-emitting device corresponding to the plurality of reflection points is determined;

[0026] At the fourth moment, the seventh stopping position of the irradiation light at the second end is obtained based on the first position information;

[0027] According to the sixth stopping position and the seventh stopping position, it is determined whether the tubular furnace is deformed.

[0028] Further, in the deformation detection method of the tubular furnace provided in the present application, according to the sixth stopping position and the seventh stopping position, it is determined whether the tubular furnace is deformed, comprising:

[0029] The third offset between the sixth stopping position and the seventh stopping position corresponding to each reflection point at the third moment and the fourth moment is obtained respectively;

[0030] If the third offset is greater than or equal to a preset third threshold, it is determined that the tubular furnace is deformed;

[0031] If the offset is less than the third threshold, it is determined that the tubular furnace is not deformed.

[0032] Further, in the deformation detection method of the tubular furnace provided in the present application, the method further comprises:

[0033] If the first end and the second end of the tubular furnace are both open, the movement trajectory of the irradiation light at the second end is determined according to the photoelectric sensor placed at the second end;

[0034] According to the movement trajectory, it is determined whether the tubular furnace is deformed.

[0035] Further, in the deformation detection method of the tubular furnace provided in the present application, the method further comprises:

[0036] If the first end of the tubular furnace is open, after the irradiation light is reflected from the inner cavity wall to the center position of the second end of the tubular furnace, the third distance between the light-emitting port of the light-emitting device and the axis of the tubular furnace is obtained;

[0037] According to the third distance, the inner diameter and the length of the tubular furnace, the second position information of the reflection point of the irradiation light on the inner cavity wall is determined;

[0038] According to the second position information, the inner diameter and the length of the tubular furnace, the fourth offset of the irradiation light at the center position after the light-emitting device moves along the circumferential direction based on the reflection point is determined;

[0039] According to the fourth offset, it is determined whether the tubular furnace is deformed.

[0040] In a second aspect, the present application also provides a deformation detection assembly of a tube furnace, which is applied to the deformation detection method of the tube furnace provided in the first aspect, and the deformation detection assembly comprises:

[0041] a light emitting device configured to perform pitch adjustment and rotation along the circumferential direction of the tube furnace;

[0042] The illumination light emitted by the light emitting device is configured to be emitted into the inner cavity of the tube furnace from the first end of the tube furnace and reflected at the inner cavity wall of the tube furnace to the second end of the tube furnace, and the first end and the second end are two corresponding ends of the tube furnace.

[0043] In a third aspect, the present application also provides a deformation detection system, which comprises the deformation detection method of the tube furnace provided in the first aspect or the deformation detection assembly of the tube furnace provided in the second aspect.

[0044] The deformation detection method of the tube furnace provided in the present application adjusts the light emitting device in the deformation detection assembly, so that the illumination light emitted by the light emitting device is emitted into the inner cavity of the tube furnace from the first end of the tube furnace and reflected at the inner cavity wall of the tube furnace to the preset position of the second end of the tube furnace, and the light emitting device is controlled to move along the circumferential direction of the tube furnace at least once to obtain the first residence position of the illumination light at the second end each time. Finally, according to the preset position and the first residence position, it can be accurately known whether the tube furnace is deformed, and then the wafer cannot be smoothly taken out from the tube. BRIEF DESCRIPTION OF DRAWINGS

[0045] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0046] Figure 1 The first schematic block diagram of the deformation detection assembly of the tube furnace provided in the embodiment of the present application;

[0047] Figure 2 The second schematic block diagram of the deformation detection assembly of the tube furnace provided in the embodiment of the present application;

[0048] Figure 3 The first flowchart of the deformation detection method of the tube furnace provided in the embodiment of the present application;

[0049] Figure 4 The second flowchart of the deformation detection method of the tube furnace provided in the embodiment of the present application;

[0050] Figure 5 A third flowchart of a pipe furnace deformation detection method according to an embodiment of the present application is provided;

[0051] Figure 6 A fourth flowchart of a pipe furnace deformation detection method according to an embodiment of the present application is provided;

[0052] Figure 7 A fifth flowchart of a pipe furnace deformation detection method according to an embodiment of the present application is provided;

[0053] Figure 8 A sixth flowchart of a pipe furnace deformation detection method according to an embodiment of the present application is provided;

[0054] Figure 9 A seventh flowchart of a pipe furnace deformation detection method according to an embodiment of the present application is provided;

[0055] Figure 10 An eighth flowchart of a pipe furnace deformation detection method according to an embodiment of the present application is provided.

[0056] Reference Signs:

[0057] 10, pipe furnace; 11, first end; 12, second end; 100, light emitting device; 201, rotating arm; 300, fixing member. DETAILED DESCRIPTION

[0058] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0059] It should be understood that, when used in the specification and the appended claims, the terms "comprise" and "include" indicate the presence of the described features, integers, steps, operations, elements, and / or components, but do not exclude one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0060] It should also be understood that the terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in the specification and the appended claims of the present application, the singular forms "a", "an" and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0061] It should also be further understood that the term "and / or" used in the specification and the appended claims herein, refers to any combination of one or more of the associated listed items, and all possible combinations, and includes these combinations.

[0062] In addition, in the present application, unless otherwise explicitly specified or limited in the embodiments, the terms "mounting", "connecting", "connecting" and "fixing" and the like appearing in the embodiments should be understood broadly, for example, the connection can be a fixed connection, or a detachable connection, or integrated, which can be understood, or can be a mechanical connection, an electrical connection, etc. Of course, it can also be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two elements, or the interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific implementation situation.

[0063] The embodiments of the present application provide a deformation detection method, a deformation detection assembly and a deformation detection system of a tubular furnace.

[0064] For the convenience of understanding, first introduce the deformation detection assembly, and then introduce the deformation detection method and system of the tubular furnace in detail on the basis of the deformation detection assembly.

[0065] Please refer to Figure 1 , Figure 1 The schematic block diagram of the deformation detection assembly of the tubular furnace 10 provided by the embodiments of the present application is shown in FIG. 1. As shown in FIG. 1, the present application provides a deformation detection assembly of a tubular furnace 10, which comprises: Figure 1

[0066] The light emitting device 100 is configured to perform pitch adjustment and rotation along the circumferential direction of the tubular furnace 10.

[0067] The illumination light emitted by the light emitting device 100 is configured to be incident into the inner cavity of the tubular furnace 10 from the first end 11 of the tubular furnace 10, and reflected at the inner cavity wall of the tubular furnace 10 to the second end 12 of the tubular furnace 10, the first end 11 and the second end 12 are the two corresponding ends of the tubular furnace 10 respectively.

[0068] In the present embodiment, the inner cavity wall of the tubular furnace 10 has a reflection function, which can reflect the illumination light incident from the first end 11 of the tubular furnace 10 to the second end 12 of the tubular furnace 10, and then the position of the light spot at the second end 12 of the tubular furnace 10 can be observed to determine whether the tubular furnace 10 is deformed.

[0069] The tubular furnace 10 can be a high-temperature horizontal furnace, and the light emitting device 100 can be a laser pen, which can emit laser light and can be reflected on the inner cavity wall of the tubular furnace 10.

[0070] ​Specifically, when the deformation of the tubular furnace 10 needs to be detected, the light emitting device 100 only needs to be adjusted at the first end 11 of the tubular furnace 10, that is, the pitch angle of the light emitting device 100 is adjusted, so that the irradiation light can be emitted from the first end 11 of the tubular furnace 10 into the inner cavity of the tubular furnace 10, and reflected at the inner cavity wall of the tubular furnace 10 to the second end 12 of the tubular furnace 10, while the light emitting device 100 is controlled to rotate along the circumferential direction of the tubular furnace 10, so as to determine whether the light spot at the second end 12 of the tubular furnace 10 is offset, and then whether the tubular furnace 10 is deformed can be determined.

[0071] Meanwhile, in order to improve the accuracy of detection, as shown in Figure 2 The present application can also determine two reflection points on the inner cavity wall of the tubular furnace 10 in advance, which are reflection point a and reflection point b.

[0072] Exemplarily, the light emitting device 100 can be first adjusted in pitch for the first time, so that the irradiation light can be reflected at the reflection point a to the preset position (such as the center point) of the second end 12, and then the light emitting device 100 is controlled to rotate along the circumferential direction of the tubular furnace 10, so as to determine whether the light spot at the second end 12 is offset, if not, the light emitting device 100 can be adjusted in pitch for the second time, so that the irradiation light can be reflected at the reflection point b to the preset position (such as the center point) of the second end 12, and then the light emitting device 100 is controlled to rotate along the circumferential direction of the tubular furnace 10, so as to determine whether the light spot at the second end 12 is offset, and whether the offset is large, and then whether the tubular furnace 10 is deformed can be determined.

[0073] It should be noted that the number of reflection points determined by the present application is not limited to one or two, and the present application can also determine more than three reflection points, so as to more accurately determine whether the tubular furnace 10 is deformed.

[0074] Further, after the deformation of the tubular furnace 10 is determined, the deformation amount of the tubular furnace 10 can be calculated by determining the position of the reflection point, the distance between the light emitting device 100 and the inner cavity wall of the tubular furnace 10, the radius of the inner cavity of the tubular furnace 10, the length (dimension along the axial direction) of the tubular furnace 10 before deformation, and the offset between the light spot at the second end 12 and the center position of the second end 12. The deformation amount of the tubular furnace 10 can be represented by the bending amount of the inner cavity wall.

[0075] Specifically, as shown in Figure 1As shown, according to the reflection principle, the irradiation light is emitted from the first end 11 of the tube furnace 10, and after being reflected on the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, it satisfies the following formula: h1 / h2=x1 / x2, h1 is the vertical distance between the light emitting point of the light emitting device 100 and the inner cavity wall of the tube furnace 10, h2 is the inner cavity radius of the tube furnace 10, x1 is the distance between the reflection point and the first end 11 of the tube furnace 10, and x2 is the distance between the reflection point and the second end 12 of the tube furnace 10.

[0076] Wherein, h1 can be calculated by the inner cavity radius of the tube furnace 10 and the position of the rotating arm 201, h2 is known, and x1+x2 is the length of the tube furnace 10. After transformation of the above formula, x1=x*h1 / (h1+h2) can be obtained, x is the length of the tube furnace 10, and then the distance between the reflection point and the first end of the tube furnace 10 can be calculated, so that the position of the reflection point can be determined.

[0077] After determining the position of the reflection point, the light emitting device 100 can be controlled to rotate along the circumferential direction of the tube furnace 10. During the rotation, if the light spot is not at the center position of the second end 12, the distance between the light spot and the center position can be calculated by the above formula since h1, x1 and x2 are known. According to the distance, it can be determined whether the tube furnace 10 is deformed.

[0078] The deformation detection assembly of the tube furnace 10 provided in the present application includes a light emitting device 100, which is configured to rotate along the circumferential direction of the tube furnace 10. The irradiation light emitted by the light device is configured to be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10 and reflected on the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Whether the light spot reflected on the second end 12 of the tube furnace 10 is offset can be used to determine whether the tube furnace 10 is deformed, thereby improving the accuracy of detecting whether the tube furnace 10 is deformed, and avoiding the wafer from being unable to be smoothly taken out from the tube.

[0079] In some embodiments, the deformation detection assembly further includes a rotating assembly; wherein the rotating assembly is connected with the light emitting device 100, and the rotating assembly is configured to rotate along the circumferential direction of the tube furnace 10 to drive the light emitting device 100 to rotate along the circumferential direction of the tube furnace 10.

[0080] In the present embodiment, the light emitting device 100 can be arranged on the rotating assembly, i.e. the rotating assembly is connected with the light emitting device 100. After the rotating assembly is configured to rotate along the circumferential direction of the tube furnace 10, the light emitting device 100 can rotate along the circumferential direction of the tube furnace 10 with the rotating assembly.

[0081] In some embodiments, as shown in FIG. 6, the light emitting device 100 can be arranged on the rotating assembly, i.e. the rotating assembly is connected with the light emitting device 100. After the rotating assembly is configured to rotate along the circumferential direction of the tube furnace 10, the light emitting device 100 can rotate along the circumferential direction of the tube furnace 10 with the rotating assembly. Figure 1As shown, the rotating assembly comprises a slide rail; wherein the light emitting device 100 is configured to slide on the slide rail to move in the radial direction of the tube furnace 10.

[0082] In this embodiment, the rotating assembly is provided with a slide rail, and the light emitting device 100 can be arranged on the slide rail and can move in the radial direction of the tube furnace 10 on the slide rail, while the light emitting device 100 can be adjusted in pitch, so that the irradiation light can enter the inner cavity of the tube furnace 10 from the first end 11 of the tube furnace 10 and be reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, thereby determining whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0083] In some embodiments, as shown in Figure 1 As shown, the deformation detection assembly further comprises a fixing member 300; wherein the rotating assembly is configured to rotate on the fixing member 300 in the circumferential direction of the tube furnace 10.

[0084] In this embodiment, the fixing member 300 can carry the rotating assembly and the light emitting device 100, so that the irradiation light can enter the inner cavity of the tube furnace 10 from the first end 11 of the tube furnace 10 at different positions and be reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, thereby determining whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0085] In some embodiments, as shown in Figure 1 As shown, the rotating assembly comprises a rotating arm 201; wherein the rotating arm 201 is configured to rotate on the fixing member 300 in the circumferential direction of the tube furnace 10.

[0086] In this embodiment, the rotating arm 201 can be arranged on the fixing member 300 and can rotate on the fixing member 300 in the circumferential direction of the tube furnace 10, while the rotating arm 201 can be provided with a slide rail, and the light emitting device 100 can move on the slide rail in the radial direction of the tube furnace 10, and the light emitting device 100 can be adjusted in pitch, so that the irradiation light can enter the inner cavity of the tube furnace 10 from the first end 11 of the tube furnace 10 and be reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, thereby determining whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0087] In some embodiments, the fixing member 300 is fixedly connected with the tube furnace 10.

[0088] Specifically, the fixing member 300 is provided at the first end 11 of the tube furnace 10 and can be fixedly connected to the tube furnace 10. The rotating assembly is configured to rotate in a circumferential direction on the fixing member 300, so that the optical device 100 can rotate in the circumferential direction of the tube furnace 10. At the same time, the tube furnace 10 moves in a radial direction and can be pitch-adjusted. As a result, the irradiation light can be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10 and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, so as to determine whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0089] In addition, the fixing member 300 can also be separately provided from the tube furnace 10 , that is, the fixing member 300 can be a floor stand, and the rotating arm 201 can be directly provided on the floor stand.

[0090] In some embodiments, as Figure 1 As shown, the tube furnace 10 includes a furnace body and a furnace tube; wherein the furnace tube is placed in the cavity of the furnace body from the first end 11 of the furnace body, and the irradiation light is configured to be emitted from the first end 11 of the furnace tube into the inner cavity of the furnace tube, and reflected at the inner cavity wall of the furnace tube to the second end 12 of the furnace tube.

[0091] In this embodiment, the tubular furnace 10 can be a high-temperature horizontal furnace, which is provided with a furnace body and a furnace tube. The furnace body is provided with a first cavity, and the furnace tube is provided with a second cavity. The furnace tube can be arranged in the first cavity along a preset axial direction. The second cavity can be understood as the inner cavity of the tubular furnace 10 mentioned in this application.

[0092] Specifically, the furnace tubes are placed horizontally on the furnace body to form a high-temperature horizontal furnace. The high-temperature horizontal furnace is used for heat treatment, sintering and annealing, which is crucial for the development and testing of new materials. The electronics manufacturing industry can use the tube furnace to perform processes such as carburizing, carbonitriding and cleaning to ensure precise heat treatment.

[0093] The deformation detection assembly of the tube furnace 10 provided in the present application includes a light emitting device 100, which is configured to rotate along the circumferential direction of the tube furnace 10. At the same time, the irradiation light emitted by the light device is configured to be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Whether the tube furnace 10 is deformed can be determined by whether the light spot reflected at the second end 12 of the tube furnace 10 is offset, thereby improving the accuracy of detecting whether the tube furnace 10 is deformed, thereby avoiding the situation where the wafer cannot be smoothly removed from the tube.

[0094] It can be understood that the deformation detection assembly of the tubular furnace 10 provided in the above embodiment is only an example, and the deformation detection assembly of the tubular furnace 10 described in the embodiments of the present application is to more clearly illustrate the technical solutions of the deformation detection method of the tubular furnace provided in the embodiments of the present application, and does not constitute a limitation on the technical solutions provided in the embodiments of the present application. It can be known by those skilled in the art that, with the evolution of the system and the appearance of new business scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems. The deformation detection method of the tubular furnace is described in detail below.

[0095] It should be noted that the description order of the following embodiments does not constitute a limitation on the preferred order of the embodiments. The deformation detection method of the tubular furnace is described in detail below.

[0096] In some embodiments, as shown in Figure 3 The present application provides a deformation detection method of a tubular furnace, which comprises steps S110, S120 and S130.

[0097] S110, adjusting the light emitting device in the deformation detection assembly, so that the illumination light emitted by the light emitting device is incident into the inner cavity of the tubular furnace at the first end of the tubular furnace, and is reflected at the inner cavity wall of the tubular furnace to the preset position at the second end of the tubular furnace;

[0098] S120, controlling the light emitting device to move at least once along the circumferential direction of the tubular furnace, to obtain a first stopping position of the illumination light at the second end each time;

[0099] S130, determining whether the tubular furnace is deformed according to the preset position and the first stopping position.

[0100] In the present embodiment, the preset position can be the center point of the second end, and the light emitting device can be a laser pen, which can emit laser light at the first end of the tubular furnace and be reflected at the inner cavity wall of the tubular furnace to the second end of the tubular furnace.

[0101] Specifically, when the tubular furnace is deformed, the position of the tubular furnace that needs to be deformed can be determined in advance, i.e. a reflection point of the inner cavity wall of the tubular furnace, and then the light emitting device is adjusted in pitch to make the illumination light of the light emitting device reflected at the reflection point to the center point of the second end of the tubular furnace. Then, based on the position of the light emitting device at this time, the light emitting device is controlled to move along the circumferential direction of the tubular furnace. At this time, the reflection point also moves along the circumferential direction. Thus, it can be determined whether the light spot reflected at the second end of the tubular furnace deviates from the center point of the second end during the movement of the reflection point along the circumferential direction, i.e. whether there is a large deviation between the plurality of first stopping positions and the preset position, so as to determine whether the tubular furnace is deformed.

[0102] It should be noted that the preset position can also not be the center position of the second end. Before the tube furnace is deformed, if the light emitting device moves in the circumferential direction, the preset position can be understood as any point on a circle around the center point of the second end.

[0103] The deformation detection method of the tube furnace provided in the application adjusts the light emitting device in the deformation detection assembly, so that the irradiation light emitted by the light emitting device is incident into the inner cavity of the tube furnace at the first end of the tube furnace and is reflected at the inner cavity wall to the preset position at the second end of the tube furnace, at the same time, the light emitting device is rotated at least once in the circumferential direction of the tube furnace to obtain the first residence position of the irradiation light at the second end each time, and finally, whether the tube furnace is deformed is determined according to the preset position and the first residence position, so that it can be known accurately whether the quartz tube is deformed, and then the wafer can be smoothly taken out from the tube.

[0104] In some embodiments, as shown in FIG. 1, Figure 4 Step S130 includes steps S131, S132, S133 and S134.

[0105] S131, the first offset between the first residence position of the irradiation light and the preset position after the light emitting device is moved each time in the circumferential direction of the tube furnace is obtained;

[0106] S132, if the first offset after each movement is less than a preset first threshold, the light emitting device is controlled to move in the radial direction of the tube furnace, and the light emitting device is pitch-adjusted, so that the irradiation light is reflected by the inner cavity wall to the preset position;

[0107] S133, the light emitting device is controlled to move at least once in the circumferential direction to obtain the second residence position of the irradiation light at the second end each time;

[0108] S134, whether the tube furnace is deformed is determined according to the preset position and the second residence position.

[0109] In the embodiment, after the light emitting device is pitch-adjusted at a certain position of the first end and moved in the circumferential direction, the first residence position of the irradiation light at the second end each time can be obtained, then whether each first offset between the first residence position each time and the preset position is greater than a preset first threshold can be determined, and then whether the tube furnace is deformed can be determined.

[0110] Specifically, the first residence position can be understood as a point on the second end, the preset position can be understood as the center point of the second end, and the first offset can be understood as the distance between the two points, so that whether the tube furnace is deformed can be determined by judging whether the distance exceeds the preset first threshold.

[0111] Further, when the first offset after each movement is less than the preset first threshold, it is not necessarily determined that the tube furnace is deformed at this time, so it is necessary to further confirm whether the tube furnace is deformed. Therefore, it is necessary to control the light emitting device to move along the radial direction of the tube furnace, and to adjust the pitch of the light emitting device, so that the irradiation light is reflected by the inner cavity wall to a preset position, and then the light emitting device is adjusted in pitch at the position to move at least once in the circumferential direction, and then the second residence position of the irradiation light at the second end each time is obtained, and then a plurality of offsets between the preset position and the second residence position can be obtained, and it is determined whether the plurality of offsets appear to be greater than the preset first threshold. If it appears, it can be determined that the tube furnace is deformed; if it does not appear, steps S131-S134 can be repeated multiple times to accurately determine whether the tube furnace is deformed.

[0112] It should be noted that the deformation of the tube furnace mentioned in the present application is a reference standard whether the wafer can be taken out from the inner cavity of the tube furnace. Therefore, when the tube furnace is deformed, the deformation detection of the tube furnace can be performed before the wafer is put into the tube furnace, and timely processing can be performed when it is determined that the tube furnace is about to be deformed, thereby avoiding the problem that the wafer cannot be taken out from the tube furnace.

[0113] In some embodiments, as shown in Figure 5 the deformation detection method of the tube furnace further comprises steps S210, S220 and S230.

[0114] S210, at a first time, obtaining a third residence position of irradiation light at a second end of a tube furnace and a first distance between the third residence position and an inner cavity wall of the tube furnace;

[0115] S220, at a second time, obtaining a fourth residence position of irradiation light at the second end of the tube furnace and a second distance between the fourth residence position and the inner cavity wall of the tube furnace;

[0116] S230, determining whether the tube furnace is deformed according to the first distance and the second distance.

[0117] Specifically, when the tube furnace is deformed, the tube furnace can also be detected according to the state of the tube furnace at different times. The first time can be understood as the time when the tube furnace is not deformed, the second time can be understood as the time when the tube furnace is about to be deformed or has been deformed, the reflection point corresponding to the third residence position and the reflection point corresponding to the fourth residence position are the same, and the position of the light emitting device is not changed at the first time and the second time. Therefore, the distance difference between the first distance and the second distance can be used to determine whether the tube furnace is deformed between the first time and the second time.

[0118] In the embodiment, the third and fourth stop positions can be understood as the stop points of the irradiation light at the second end at the first and second time points, respectively; the first distance can be calculated according to the distance between the third stop position and the center point at the second end and the inner diameter of the tube furnace, and the second distance can be calculated according to the distance between the fourth stop position and the center point at the second end and the inner diameter and length of the tube furnace, and then whether the tube furnace is deformed is determined by calculating the distance difference between the first distance and the second distance and judging whether the distance difference exceeds the preset second threshold.

[0119] In some embodiments, as shown in FIG. 13, step S230 includes steps S231, S232 and S233. Figure 6

[0120] S231, determining a second offset between the third and fourth stop positions according to the first and second distances;

[0121] S232, if the second offset is less than the preset second threshold, controlling the light emitting device to move at least once in the circumferential direction to obtain a fifth stop position of the irradiation light at the second end of the tube furnace;

[0122] S233, determining whether the tube furnace is deformed according to the third and fifth stop positions.

[0123] In the embodiment, at the first and second time points, if the second distance from the same reflection point to the second end does not exceed the preset second threshold, it does not necessarily mean that the tube furnace is not deformed, so further confirmation of whether the tube furnace is deformed is needed.

[0124] Specifically, the light emitting device can be controlled to move at least once in the circumferential direction to obtain a fifth stop position of the irradiation light at the second end of the tube furnace, and then a plurality of second offsets between the fifth stop position and the preset position (the center point of the second end) are obtained, and whether the tube furnace is deformed can be determined by judging whether the plurality of second offsets exceed the preset second threshold.

[0125] In some embodiments, as shown in FIG. 13, the deformation detection method of the tube furnace further includes steps S310, S320, S330 and S340. Figure 7

[0126] S310, at a third time point, adjusting the pitch of the light emitting device to obtain a sixth stop position of the irradiation light reflected from a plurality of reflection points on the inner cavity wall to the second end; wherein the plurality of reflection points are arranged along the axial direction of the tube furnace;

[0127] S320, determining first position information of the light emitting device corresponding to the plurality of reflection points; ​​

[0128] S330, at the fourth time, based on the first position information, a seventh stay position of the irradiation light at the second end is obtained;

[0129] S340, whether the tube furnace is deformed is determined according to the sixth stay position and the seventh stay position.

[0130] Specifically, when the tube furnace is deformed, the present application can also determine whether the tube furnace is deformed according to the state of the tube furnace at different times and the stay position of the reflection points on the inner cavity wall of the tube furnace in the axial direction at the second end. The third time can be understood as the time when the tube furnace is not deformed, and the fourth time can be understood as the time when the tube furnace is about to be deformed or has been deformed.

[0131] In this embodiment, the present application can determine a plurality of reflection points at the third time, the irradiation light can be reflected to the sixth stay position (such as the center point of the second end) at the second end at the plurality of reflection points, and then the position of the irradiation light corresponding to each reflection point, i.e. the position of the light emitting device, is determined. Then, at the fourth time, based on the position of the light emitting device corresponding to each reflection point, i.e. the first position information, the light emitting device is started to emit light at the first end and enters the inner cavity of the tube furnace, and is reflected to the second end, i.e. the seventh stay position, through the inner cavity wall of the tube furnace. Then, according to the offset between the sixth stay position and the seventh stay position, whether the tube furnace is deformed can be determined.

[0132] In some embodiments, as shown in Figure 8 S340 includes steps S341, S342 and S343.

[0133] S341, a third offset between the sixth stay position and the seventh stay position corresponding to each reflection point at the third time and the fourth time respectively is obtained;

[0134] S342, if each third offset is greater than or equal to a preset third threshold, it is determined that the tube furnace is deformed;

[0135] S343, if each third offset is less than the preset third threshold, it is determined that the tube furnace is not deformed.

[0136] Specifically, there is a third offset between the sixth stay position and the seventh stay position corresponding to each reflection point at the third time and the fourth time respectively, i.e. there are a plurality of third offsets. After obtaining a plurality of third offsets, the relationship between each third offset and the preset third threshold can be determined, and then whether the tube furnace is deformed can be determined.

[0137] It should be noted that the first threshold, the second threshold and the third threshold mentioned in the present application can be understood as the deformation amount of the tube furnace when the wafer cannot be taken out of the inner cavity of the tube furnace.

[0138] In some embodiments, as shown in Figure 9 the deformation detection method of the tube furnace further comprises steps S410 and S420.

[0139] S410, if both the first end and the second end of the tube furnace are open, the movement track of the irradiation light at the second end is determined according to the photoelectric sensor placed at the second end;

[0140] S420, whether the tube furnace is deformed is determined according to the movement track.

[0141] In the present embodiment, both ends of the tube furnace are open, i.e. both the first end and the second end of the tube furnace are open, at this time both ends of the tube furnace are visible. In order to accurately detect whether the tube furnace is deformed, the present application can place the light emitting device at the first end and the photoelectric sensor at the second end. When it is necessary to detect the deformation of the tube furnace, the pitch adjustment and the movement in the circumferential direction of the light emitting device at the first end are only needed, at this time the photoelectric sensor can detect the movement track of the irradiation light at the second end, by comparing the movement track with the movement track before deformation, whether the tube furnace is deformed can be determined.

[0142] It should be noted that the present application can also place the photoelectric sensor at the first end of the tube furnace and the light emitting device at the second end of the tube furnace, the placement manner can be selected according to actual application, which is not limited in the present application.

[0143] In some embodiments, as shown in Figure 10 the deformation detection method of the tube furnace further comprises steps S430, S440, S450 and S460.

[0144] S430, if the first end of the tube furnace is open, the third distance between the light emitting port of the light emitting device and the axis of the tube furnace is obtained after the irradiation light is reflected from the inner cavity wall to the central position of the second end of the tube furnace;

[0145] S440, the second position information of the reflection point of the irradiation light on the inner cavity wall is determined according to the third distance, the inner diameter and the length of the tube furnace;

[0146] S450, the fourth offset amount of the irradiation light at the central position after the light emitting device moves in the circumferential direction based on the reflection point is determined according to the second position information, the inner diameter and the length of the tube furnace;

[0147] S460, whether the tube furnace is deformed is determined according to the fourth offset amount.

[0148] In the embodiment, the tubular furnace can only have one end opening, i.e., the first end opening, and thus the tubular furnace can only be visualized from one end. In this case, the photoelectric sensor cannot detect the moving track of the irradiation light at the second end, and thus the third distance between the light outlet of the light emitting device and the axis of the tubular furnace needs to be obtained after the irradiation light is reflected from the inner cavity wall to the center position of the second end of the tubular furnace. The distance h1 between the light outlet and the inner cavity wall can be calculated by the radius of the inner cavity of the tubular furnace and the third distance, and since the length of the tubular furnace and the radius of the inner cavity are known, the distances x1 and x2 of the reflection points from the first end and the second end, i.e., the second position information, can be calculated by the formula h1 / h2=x1 / x2. Then, the light emitting device can be controlled to move along the circumferential direction to obtain a plurality of stopping points at the second end. The plurality of stopping points can be calculated according to x1, x2 and h1, i.e., can be characterized by the distance between the stopping points and the inner cavity wall. Then, whether the tubular furnace is deformed can be determined by judging whether each fourth offset exceeds a preset offset based on the fourth offset between the plurality of stopping points and the center position of the second end.

[0149] In some embodiments, the application further provides a deformation detection system, which comprises the deformation detection method or the deformation detection assembly of the tubular furnace provided by the application.

[0150] It should be noted that the pitch adjustment of the light emitting device and the movement along the radial direction of the tubular furnace can be performed by a controller or manually. The movement of the rotating arm along the circumferential direction of the tubular furnace can also be performed by a controller or manually, and the specific implementation mode can be selected according to the actual application, which is not limited in the application.

[0151] The above merely provides specific embodiments of the application, but the protection scope of the application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope disclosed by the application, and these modifications or replacements shall be encompassed in the protection scope of the application. Therefore, the protection scope of the application shall be subject to the protection scope of the claims.

Claims

1. A method for detecting deformation of a tube furnace, characterized in that: include: Adjusting the light emitting device in the deformation detection assembly so that the illumination light emitted by the light emitting device is emitted from the first end of the tube furnace into the inner cavity of the tube furnace and is reflected by the inner cavity wall of the tube furnace to a preset position at the second end of the tube furnace; Controlling the light emitting device to move at least once along the circumferential direction of the tube furnace to obtain a first stop position of the irradiation light at the second end each time; determining whether the tube furnace is deformed according to the preset position and the first stop position; The step of determining whether the tube furnace is deformed according to the preset position and the first stop position includes: acquiring a first offset between a first stop position of the irradiation light and the preset position after the light emitting device moves along the circumferential direction of the tube furnace each time; If the first offset after each movement is less than a preset first threshold, controlling the light emitting device to move along the radial direction of the tube furnace, and performing pitch adjustment on the light emitting device so that the irradiation light is reflected by the inner cavity wall to the preset position; controlling the light emitting device to move at least once along the circumferential direction to obtain a second stop position of the illumination light at the second end each time; determining whether the tube furnace is deformed according to the preset position and the second stop position; The deformation detection component includes: A light emitting device is configured to be adjusted in pitch and to rotate along the circumference of the tube furnace; The illumination light emitted by the light emitting device is configured to be incident from the first end of the tube furnace into the inner cavity of the tube furnace, and reflected at the inner cavity wall of the tube furnace to the second end of the tube furnace, wherein the first end and the second end are the corresponding two ends of the tube furnace respectively.

2. The deformation detection method of a tube furnace according to claim 1, characterized in that: The method further comprises: At a first moment, obtaining a first distance between a third stop position of the irradiation light at the second end of the tube furnace and an inner cavity wall of the tube furnace; At a second moment, obtaining a second distance between a fourth stop position of the irradiation light at the second end of the tube furnace and an inner cavity wall of the tube furnace; Whether the tube furnace is deformed is determined according to the first distance and the second distance.

3. The deformation detection method of a tube furnace according to claim 2, characterized in that: The determining whether the tube furnace is deformed according to the first spacing and the second spacing includes: determining a second offset between the third stop position and the fourth stop position according to the first distance and the second distance; If the second offset is less than a preset second threshold, controlling the light emitting device to move at least once along the circumferential direction to obtain a fifth stop position of the irradiation light at the second end of the tube furnace; Whether the tube furnace is deformed is determined according to the preset position and the fifth stop position.

4. The deformation detection method of a tube furnace according to claim 1, characterized in that: The method further comprises: At a third moment, the light emitting device is pitch-adjusted to obtain that the illumination light is reflected from a plurality of reflection points on the inner cavity wall to a sixth stop position at the second end; wherein the plurality of reflection points are arranged along the axial direction of the tube furnace; Determining first position information of light emitting devices corresponding to the plurality of reflection points; At a fourth moment, based on the first position information, obtaining a seventh stop position of the illumination light at the second end; Whether the tube furnace is deformed is determined according to the sixth stop position and the seventh stop position.

5. The deformation detection method of a tube furnace according to claim 4, characterized in that: The determining whether the tube furnace is deformed according to the sixth stop position and the seventh stop position includes: Obtaining a third offset between the sixth stop position and the seventh stop position corresponding to each reflection point at the third moment and the fourth moment respectively; If each of the third offsets is greater than or equal to a preset third threshold, determining that the tube furnace is deformed; If each of the third offsets is smaller than the third threshold, it is determined that the tube furnace is not deformed.

6. The method for detecting deformation of a tube furnace according to any one of claims 1 to 5, characterized in that: The method further comprises: If both the first end and the second end of the tube furnace are open, determining a moving trajectory of the irradiation light at the second end according to a photoelectric sensor placed at the second end; Determine whether the tube furnace is deformed according to the movement trajectory.

7. The method for detecting deformation of a tube furnace according to any one of claims 1 to 5, characterized in that: The method further comprises: If the first end of the tube furnace is open, after the irradiation light is reflected by the inner cavity wall to the center position of the second end of the tube furnace, obtaining a third distance between the light outlet of the light emitting device and the axis of the tube furnace; determining second position information of a reflection point of the irradiation light on the inner cavity wall according to the third distance, the inner diameter and the length of the tube furnace; determining, based on the second position information and the inner diameter and length of the tube furnace, a fourth offset of the illumination light at the center position after the light emitting device moves along the circumferential direction based on the reflection point; It is determined whether the tube furnace is deformed according to the fourth offset.

8. A deformation detection system, characterized in that: A method for detecting deformation of a tube furnace comprising the method according to any one of claims 1 to 7.

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