Light spot detection, adjustment and tracking element based on intermediate infrared detector array and application of light spot detection, adjustment and tracking element

Abstract

The invention discloses a light spot detection, adjustment and tracking element based on an intermediate infrared detector array, which comprises a TO-can TO8 base, a detector gasket, 12 independent intermediate infrared detector units and a tube cap, and the detector units are bonded on the detector gasket through elargol according to a specific arrangement mode. The 12 detector units are arranged in a specific geometric layout to form various arrays. When light irradiates the detector unit array, each detector unit can receive different light beam intensities according to different positions of the cross section of a light spot and generate corresponding electric signals, and the electric signals accurately reflect information such as the diameter, the center position, the intensity distribution, the moving direction and the moving speed of the light spot. Therefore, the method can be widely applied to various application scenes needing to accurately measure the size, the position or the motion of the light spot and the like. Therefore, the engineering requirements of light spot analysis, adjustment and tracking during collimation of the intermediate infrared laser beam can be met.

Description

Technical Field

[0001] The present invention relates to the technical field of laser spectrum gas sensors, and in particular to a spot detection adjustment tracking element based on a novel mid-infrared detector array, a use method thereof, and an application device thereof. Background Art

[0002] In laser gas detection, by using many narrow-bandwidth absorption lines of the gas absorption spectrum and tuning high-precision lasers, independent absorption peaks can be detected, which is the basis of laser gas detection. By using the relationship between gas concentration and absorption intensity (Lambert-Beer law), infrared gas sensors can identify gas components and determine their concentrations. This tunable diode laser absorption spectroscopy (TDLAS) technology has the advantages of high sensitivity, high selectivity, and rapid detection.

[0003] In order to use TDLAS technology to detect different types of gases, it is necessary to select lasers of different wavelengths as detection light sources according to the spectral absorption characteristics of various gases. The laser wavelengths of currently commercialized lasers are basically in the near-infrared and mid-infrared range. The application of near-infrared spectroscopy in gas detection is mainly based on the near-infrared spectral selective absorption characteristics of different gas molecules, such as detecting the concentration of combustible gases such as natural gas and methane. However, since near-infrared mainly involves the frequency doubling and sum frequency absorption of group vibrations, the gas absorption capacity is weak and the measurement sensitivity is low.

[0004] In contrast, the fundamental frequency of the vibration energy level in the mid-infrared band has strong absorption capacity and high sensitivity. The mid-infrared radiation can interact with the fundamental frequency vibration of the gas, providing stronger spectral characteristics and more identification features. For gas molecules, the central absorption cross section in the mid-infrared band is generally several orders of magnitude higher than its central absorption cross section in the near-infrared region. Since the mid-infrared band covers the baseband absorption peaks of a large number of gas molecules, its absorption intensity is 2-3 orders of magnitude higher than that of the near-infrared band.

[0005] In order to obtain higher sensitivity and realize trace gas detection, the mid-infrared tunable semiconductor laser absorption spectroscopy (TDLAS) can be used to detect a variety of gases. For example, the absorption peak of methane (CH4) molecules in coal mines is located at 3260nm, the absorption peak of carbon monoxide (CO) molecules is located at 4610nm, the absorption peak of carbon dioxide (CO2) molecules is located at 4230nm, the absorption peak of hydrogen chloride (HCl) molecules is located at 3395nm, the absorption peak of hydrogen bromide (HBr) molecules is located at 4020nm, the absorption peak of nitrogen oxides (NOx) molecules is located at 2860nm and 3420nm, the absorption peak of sulfur dioxide (SO2) molecules is located at 4020nm, the absorption peak of ethane (C2H6) molecules is located at 3360nm, etc. In addition, the mid-infrared band can also be used in the fields of industrial process control monitoring, medical clinical respiratory diagnosis, infrared scene projection, medical treatment and chemical and biological threat detection; it can also be used as an optical transmitter for space communication and as a carrier for information transmission in free space. Therefore, the absorption spectroscopy technology using mid-infrared lasers can not only achieve high-sensitivity detection of gas types, concentrations and other information, but also has important application value in environmental monitoring, mineral development, medical diagnosis, interstellar exploration and other fields.

[0006] As we all know, in a laser gas sensor, the light beam emitted by the selected laser needs to be collimated, interact with the measured gas in the gas absorption cell, and then be received by the photodetector and converted into an electrical signal. By analyzing the measured electrical signal, the concentration of the measured gas can be inverted. For the collimation of the mid-infrared laser beam, a mid-infrared spot analyzer is usually used as a detection device. This spot analyzer usually uses a high-resolution mid-infrared micro-bolometer in the wavelength range of 2 to 16μm as a detection element, with 640x480 pixels of 17μm in size, and the entire detection effective area is 10.8x 8.2mm. Its advantages are high resolution, high sensitivity, high integration, and the ability to perform beam propagation analysis and beam divergence measurement, which is very convenient for beam analysis applications in laboratories; its disadvantages are that as a precision optical measuring instrument, it is expensive, complicated to use and maintain; especially because its pixels are too dense, a large amount of invalid information is generated during spot analysis, adjustment and tracking.

[0007] It can be seen that how to simplify the detection device, reduce costs, and provide effective information during spot analysis, adjustment, and tracking are technical challenges that need to be solved in actual engineering applications. Summary of the invention

[0008] In order to avoid the use of expensive laboratory precision instruments such as mid-infrared beam analyzers during the collimation of mid-infrared laser beams, and to efficiently solve the engineering needs of spot analysis, adjustment and tracking during the collimation of mid-infrared laser beams, the present invention uses 12 independent photovoltaic detector units made of mid-infrared InAs / GaSbⅡ type superlattice materials, which are packaged in a TO8 TO-can, where each detector unit can independently sense the intensity of the light beam irradiated on its photosensitive surface and convert it into an electrical signal output. After amplification, these 12 electrical signals are converted into digital signals respectively and sent to the computer display screen through the data serial port. These 12 detection units are arranged in a specific geometric layout to form various 12 detector arrays; when the light spot is irradiated on the TO-can incident window, the detector array can display the cross section of the laser spot in an integrated form, achieving the purpose of simultaneously capturing, analyzing and tracking the cross-sectional information of the light spot.

[0009] In actual applications, when light shines on the mid-infrared array photodetector, each detection unit will receive different beam intensities according to its different positions in the cross-section of the light spot and generate corresponding electrical signals. After processing, these electrical signals can accurately reflect the diameter size, center position, intensity distribution, moving direction, moving speed and other information of the light spot on the computer.

[0010] Therefore, this new 12-unit mid-infrared photodetector can be widely used in various application scenarios that require precise measurement of spot size, position or motion.

[0011] The purpose of the present invention is achieved through the following technical solutions:

[0012] A spot detection adjustment and tracking element based on a mid-infrared detector array comprises a 13-pin TO-can TO8 base, a detector gasket, 12 independent mid-infrared detector units and a cap with a plane oblique window; the detector gasket is bonded to the TO-can TO8 base by silver glue, the 12 independent mid-infrared detector units are bonded to the detector gasket by silver glue in a specific arrangement, the positive electrodes of the 12 independent mid-infrared detector units are respectively connected to the 12 pins of the TO-can TO8 base by gold wires, and the negative electrodes of the mid-infrared detector units are connected to the 13th pin by the detector gasket; the cap with the plane oblique window is arranged on the TO-can TO8 base by a resistance welding sealing cover; at least one of the 12 independent mid-infrared detector units is arranged at the center of the element, and when the center of a Gaussian light beam coincides with the mid-infrared detector unit at the center, the light intensity detected by the unit will be higher than the light intensity of the mid-infrared detector units at other positions, and at this time the light beam is in a position aligned with the center of the detector array.

[0013] Furthermore, the 12 independent mid-infrared detector units are arranged in a manner of radiating from the center to the surroundings.

[0014] Furthermore, the density of the 12 independent mid-infrared detector units arranged at the center of the element is greater than that at the periphery of the element.

[0015] Specifically, the 12 independent mid-infrared detector units are bonded to the detector gasket in a "M" shape; one mid-infrared detector unit is arranged at the center position, four mid-infrared detector units are arranged at the four corners of the detector unit close to the center, and seven mid-infrared detector units are arranged at the outermost periphery.

[0016] Specifically, the 12 independent mid-infrared detector units are bonded to the detector gasket in an "Archimedes spiral" pattern, and the photosensitive surfaces of the 12 independent infrared detector units are substantially continuously distributed in the radial direction of TO8.

[0017] Specifically, the 12 independent mid-infrared detector units are bonded to the detector gasket in a "four-quadrant extended all around" pattern, and four mid-infrared detector units are arranged in close contact with each other in a four-quadrant arrangement at the center position, and four independently extended mid-infrared detector units are respectively arranged at the four corners of the four-quadrant detector unit located in the center, and four independent mid-infrared detector units are also arranged at the outermost periphery.

[0018] Specifically, the 12 independent mid-infrared detector units are bonded to the detector gasket in a "cross-extended four-quadrant" pattern, and four mid-infrared detector units close to each other are arranged in the center according to a four-quadrant arrangement. Four independently extended mid-infrared detector units are respectively arranged on the four sides of the four-quadrant detector unit located in the center, and four independent mid-infrared detector units are also arranged at the outermost periphery. The mid-infrared detector units on the four sides of the four-quadrant detector unit located in the center and the mid-infrared detector units located at the outermost periphery are respectively connected to form a cross arrangement as a whole.

[0019] Specifically, the 12 independent mid-infrared detector units are photovoltaic detector units made of InAs / GaSbⅡ type superlattice materials, and each mid-infrared detector unit can independently sense the intensity of the light beam irradiated on its photosensitive surface and convert it into an electrical signal output.

[0020] Another technical solution of the present invention to solve the above technical problems is:

[0021] A method for using the above-mentioned spot detection adjustment and tracking element based on the mid-infrared detector array, when adjusting the focus of the spot, when the center of the spot of a beam with a Gaussian distribution of cross-sectional light intensity coincides with the center of the array formed by the 12 independent mid-infrared detector units, the light intensity of the mid-infrared detector unit located at the center is the strongest, the light intensity of the mid-infrared detector unit close to the center is relatively weak, and the light intensity of the mid-infrared detector unit at the outermost periphery is even weaker; when the adjustment spot is gradually reduced, the light intensity of the mid-infrared detector unit at the outermost periphery gradually decreases until it is zero, and the spot diameter at this time is about 4.6mm; then continue to adjust the focus, the light intensity of the mid-infrared detector unit close to the center position gradually decreases and finally becomes zero, and at this time only the light intensity of the mid-infrared detector unit located at the center position is the largest, and the spot diameter at this time is about 1mm to 2mm.

[0022] Furthermore, when tracking the movement of the light spot, the diameter of the light spot should be between 1 mm and 2 mm. When the light spot moves, it will move from the position of the mid-infrared detector unit at time t1 to the position of another mid-infrared detector unit at time t2. Since the distance and relative orientation between the two mid-infrared detector units are fixed, the speed and direction of the light spot movement can be calculated.

[0023] The present invention also provides a light spot detection adjustment tracking device based on a mid-infrared detector array, including the light spot detection adjustment tracking element based on a mid-infrared detector array and a computer display screen, each mid-infrared detector unit can independently sense light and convert it into an electrical signal output, and the 12 electrical signals formed are amplified and processed, and are converted into digital signals respectively and sent to the computer display screen through a data serial port. Each detection unit will receive different light beam intensities according to its different positions in the cross section of the light spot, and generate corresponding electrical signals. After these electrical signals are processed, they can accurately reflect the diameter size, center position, intensity distribution, moving direction, moving speed and other information of the light spot on the computer.

[0024] The present invention also provides a spot detection, adjustment and tracking device based on a mid-infrared detector array, comprising two of the above-mentioned spot detection, adjustment and tracking elements based on the mid-infrared detector array and a spectrometer, wherein the arrangement of the mid-infrared detector units of the two or more spot detection, adjustment and tracking elements is different; the spectrometer is used to split light, and the split light spots are respectively incident on the two or more spot detection, adjustment and tracking elements to simultaneously realize spot detection, adjustment, analysis and tracking.

[0025] Compared with the prior art, the spot detection, adjustment and tracking element based on the mid-infrared detector array of the present invention is provided with 12 independent mid-infrared detector units, and these 12 detector units are arranged in a specific geometric layout to form various arrays. When the light is irradiated onto the detector unit array, each detector unit will receive different beam intensities according to its different positions in the cross section of the spot, and generate corresponding electrical signals, which accurately reflect the diameter size, center position, intensity distribution, moving direction, moving speed and other information of the spot. Therefore, the present invention can be widely used in various application scenarios that require accurate measurement of spot size, position or movement. In order to meet the engineering needs of spot analysis, adjustment and tracking during the collimation of the mid-infrared laser beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of the structure of the light spot detection adjustment tracking element of Example 1;

[0027] Figure 2 Schematic diagram of the mid-infrared detector unit array of Example 1;

[0028] Figure 3 This is a schematic diagram of the detection light intensity of the mid-infrared detector unit array of Example 1;

[0029] Figure 4 is a schematic diagram of a mid-infrared detector unit array of Example 2;

[0030] Figure 5 This is a schematic diagram of the detection light intensity of the mid-infrared detector unit array of Example 2;

[0031] Figure 6 is a schematic diagram of a mid-infrared detector unit array of Example 3;

[0032] Figure 7 This is a schematic diagram of the detection light intensity of the mid-infrared detector unit array of Example 3;

[0033] Figure 8 is a schematic diagram of a mid-infrared detector unit array of Example 4;

[0034] Fig. 9 Schematic diagram of the detection light intensity of the mid-infrared detector unit array of Example 4 Figure 4 ;

[0035] Fig.10 This is a schematic diagram of the structure of Example 5.

[0036] In the figure: 10 - spot detection adjustment tracking element; 11 - TO-can TO8 base; 12 - detector gasket; 13 - mid-infrared detector unit; 14 - tube cap; 20 - spectroscope. DETAILED DESCRIPTION

[0037] The following is combined with Figure 1-10 , the advantages of the spot detection, adjustment and tracking element based on the mid-infrared detector array, its use method and its application device of the present invention are further described in detail. The description here is only used to explain the design of the present invention and is not used to limit the present invention. It should be emphasized that the following detailed descriptions are illustrative, and the specific structure and features of the present invention are described, which should not constitute any limitation on the present invention. At the same time, any of the technical features mentioned below (including implicit or disclosed), as well as those directly displayed or implied in Figure 1-10 Any technical feature in the present invention may be combined or deleted between these technical features (or their equivalents) to form more other embodiments that may not be directly or indirectly mentioned in the present invention. Unless otherwise specified, all technical and scientific terms used in this document have the same meanings as those commonly understood by ordinary technicians in the technical field to which this application belongs.

[0038] Example 1

[0039] like Figure 1-3 As shown, the spot detection adjustment and tracking element 10 based on the mid-infrared detector array of this embodiment 1 includes a 13-pin TO-can TO8 base 11, a detector gasket 12, 12 independent mid-infrared detector units 13 and a tube cap 14 with a flat inclined window.

[0040] The detector gasket 12 is bonded to the TO-can TO8 base 11 by silver glue, and 12 independent mid-infrared detector units 13 are bonded to the detector gasket 12 by silver glue in a specific arrangement. The positive electrodes of the 12 independent mid-infrared detector units 13 are respectively connected to the 12 pins of the TO-can TO8 base 11 by gold wires, and the negative electrode of the mid-infrared detector unit 13 is connected to the 13th pin through the detector gasket 12. The cap 14 with a flat inclined window is arranged on the TO-can TO8 base 11 by a resistance welding sealing cover. At least one of the 12 independent mid-infrared detector units 13 is arranged at the center of the element 10, and the light intensity detected by the mid-infrared detector unit 13 at the center is higher than the light intensity of the mid-infrared detector units 13 at other positions.

[0041] Specifically, 12 independent photovoltaic detector units made of mid-infrared InAs / GaSbⅡ type superlattice materials are the core of the detector, which is used to receive and sense the light intensity of the mid-infrared light spot. Since there are 12 independent photovoltaic detector units, each unit is amplified and shaped by the signal, and then converted into a digital signal by ADC and sent to the computer for display.

[0042] The TO-can TO8 base 11 is a conventional TO-can base 11 of TO8 with 13 pins, so that 12 independent mid-infrared detector units 13 can be connected to the 12 pins respectively with gold wires. In order to prevent the external environment from affecting the detector unit, a TO8 cap 14 is used to protect the mid-infrared light sensitive element and other internal components. The material of the cap 14 should have good sealing and corrosion resistance, and the base 11 is sealed and welded with resistance welding.

[0043] The cap 14 has a flat inclined window, which is the infrared radiation incident window of the TO-can and a transparent window of the detector, allowing infrared radiation to pass through and irradiate the infrared sensitive element. The incident window is usually made of a material with high transmittance to mid-infrared light and made into an inclined window.

[0044] Figure 2 This is a schematic diagram of a TO8 of this embodiment 1, in which 12 independent mid-infrared detector units 13 are arranged in a cross shape. The diameter of the photosensitive surface of each mid-infrared detector unit 13 is 1 mm, and the diameter of the light spot covered by the array of detector units 13 arranged in the cross shape is 9.2 mm. The advantage of the cross shape arrangement is that there is a central detector unit 13 positioned at the center, and the other detector units 13 are distributed divergently along the cross shape. The distance between the centers of two detector units 13 in the horizontal and vertical directions is 3.2 mm; the distance between the centers of two detector units 13 in the 45° and vertical 135° directions is 2.3 mm.

[0045] In the present embodiment 1, when adjusting the focus of the light spot, when a light beam with a Gaussian distribution of light intensity is irradiated on the detector unit array, the center of the light spot coincides with the center of the detector unit array. At this time, the light intensity of the detector unit 13 located at the center is the strongest, the light intensity of the four detector units 13 close to the four corners of the center detector unit 13 is relatively weak, and the light intensity of the seven detector units 13 at the outermost periphery is even weaker. Figure 3 shown.

[0046] When the focal length of the light spot is adjusted gradually, the light intensity of the light spot in the 7 outermost detector units 13 gradually weakens until it reaches zero, and the diameter of the light spot is about 4.6mm at this time; then continue to adjust the focus, the light intensity of the light spot in the 4 detector units 13 at the four corners of the central detector unit 13 gradually weakens, and finally reaches zero, at this time only the light intensity of the central detector unit 13 is the largest, and the diameter of the laser spot is about 1mm.

[0047] When tracking the movement of the light spot, the diameter of the light spot should be 1-2mm. When the light spot moves, the light spot will move from the position of the detector unit 13 at time t1 to the position of another detector unit 13 at time t2. Since the distance between the two detector units 13 is fixed, the speed and direction of the light spot movement can be calculated. In practical applications, the light spot may not completely coincide with a certain detector unit 13, but the positioning accuracy of the light spot position can be improved by using some fitting formulas.

[0048] Example 2

[0049] The structure of Example 2 is substantially the same as that of Example 1, except that the arrangement of the 12 independent mid-infrared detector units 13 is different.

[0050] Figure 4 FIG. 1 is a schematic diagram of a TO8 of Example 2 in which 12 independent mid-infrared detector units are arranged in an Archimedean spiral array. The characteristic of the Archimedean spiral array is that the photosensitive surfaces of the 12 infrared detector units 13 are basically continuously distributed in the radial direction of the TO8. Since the intensity of the laser beam is a Gaussian distribution, the Archimedean spiral array can gradually detect the intensity cross section of the laser beam from the center of the TO8 along the radial direction, such as Figure 5 shown.

[0051] Example 3

[0052] The structure of Example 3 is substantially the same as that of Example 1, except that the arrangement of the 12 independent mid-infrared detector units is different.

[0053] Figure 6 FIG. 1 is a schematic diagram of arranging 12 independent mid-infrared detector units into an extended four-quadrant array according to Example 3. Figure 6 As shown, four mid-infrared detector units 13 are arranged in a four-quadrant arrangement at the center, and four independently extended mid-infrared detector units 13 are respectively arranged at the four corners of the four-quadrant detector unit 13 at the center. Four independent mid-infrared detector units 13 are also arranged at the outermost periphery. This design can make the adjustment and tracking of the light spot easier and meet some specific application requirements, such as Figure 7 shown.

[0054] Example 4

[0055] The structure of Example 4 is substantially the same as that of Example 1, except that the arrangement of the 12 independent mid-infrared detector units is different.

[0056] Figure 8 FIG. 4 is a schematic diagram of arranging 12 independent mid-infrared detector units into a cross-shaped four-quadrant array according to Example 4. Figure 8 As shown, four mid-infrared detector units 13 are arranged in a four-quadrant arrangement at the center, and four independently extended mid-infrared detector units 13 are arranged on the four sides of the four-quadrant detector unit 13 at the center. Four independent mid-infrared detector units 13 are also arranged at the outermost part. The detector units 13 at the four sides and the detector units 13 at the outermost part are connected to form a cross arrangement as a whole. This design can be used to track both small and large light beams. Fig. 9 shown.

[0057] Example 5

[0058] In some applications, it is necessary to detect the radial intensity distribution of the light spot and track the movement of the light spot. In this case, a TO8 cross-shaped 12-detector array and a TO8 Archimedean spiral 12-detector array can be combined, and a spectroscope can be used to achieve these two detection requirements. Fig.10 The schematic diagram of the structure of the spot detection adjustment tracking device based on two mid-infrared detector arrays is shown. Embodiment 5 includes two spot detection adjustment tracking elements 10 based on mid-infrared detector arrays and a spectroscope 20, and the two spot detection adjustment tracking elements 10 are respectively a mid-infrared detector unit 13 in a cross-shaped array and an Archimedean spiral mid-infrared detector unit 13. The spectroscope 20 is used to split the light, and the split light spots are respectively incident on the detector unit arrays of the two spot detection adjustment tracking elements 10.

[0059] According to different practical application requirements, two or more different spot detection, adjustment and tracking elements based on mid-infrared detector arrays can be combined to achieve simultaneous spot detection, adjustment, analysis and tracking using appropriate optical designs.

[0060] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. For ordinary technicians in this field, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A spot detection, adjustment and tracking element based on a mid-infrared detector array, characterized in that: It comprises a 13-pin TO-can TO8 base, a detector gasket, 12 independent mid-infrared detector units and a cap with a plane oblique window; the detector gasket is bonded to the TO-can TO8 base by silver glue, the 12 independent mid-infrared detector units are bonded to the detector gasket by silver glue in a specific arrangement, the positive electrodes of the 12 independent mid-infrared detector units are respectively connected to the 12 pins of the TO-can TO8 base by gold wires, and the negative electrodes of the mid-infrared detector units are connected to the 13th pin by the detector gasket; the cap with the plane oblique window is arranged on the TO-can TO8 base by a resistance welding sealing cover; At least one of the 12 independent mid-infrared detector units is arranged at the center position of the element. When the center of a Gaussian light beam coincides with the mid-infrared detector unit located at the center position, the light intensity detected by the unit will be higher than the light intensity of the mid-infrared detector units at other positions. At this time, the light beam is in an aligned position with the detector array at the center.

2. The spot detection adjustment tracking element based on the mid-infrared detector array as claimed in claim 1, characterized in that: The 12 independent mid-infrared detector units are arranged in a manner of radiating from the center to the surroundings.

3. The spot detection adjustment tracking element based on the mid-infrared detector array as claimed in claim 2, characterized in that: The density of the 12 independent mid-infrared detector units arranged at the center of the element is greater than that at the periphery of the element.

4. The spot detection adjustment tracking element based on the mid-infrared detector array as claimed in claim 2, characterized in that: The 12 independent mid-infrared detector units are bonded to the detector gasket in a "M" shape; one mid-infrared detector unit is arranged at the center, four mid-infrared detector units are arranged at the four corners of the detector unit close to the center, and seven mid-infrared detector units are arranged at the outermost periphery.

5. The spot detection adjustment tracking element based on the mid-infrared detector array as claimed in claim 1, characterized in that: The 12 independent mid-infrared detector units are bonded to the detector gasket in an "Archimedes spiral" pattern, and the photosensitive surfaces of the 12 independent infrared detector units are substantially continuously distributed in the radial direction of TO8; or, The 12 independent mid-infrared detector units are bonded to the detector gasket in a "four-quadrant extended all around" pattern, and four mid-infrared detector units are arranged in close contact with each other in a four-quadrant arrangement at the center, and four independently extended mid-infrared detector units are respectively arranged at the four corners of the four-quadrant detector unit located in the center, and four independent mid-infrared detector units are also arranged at the outermost periphery; or, The 12 independent mid-infrared detector units are bonded to the detector gasket in a "cross-extended four-quadrant" pattern, and four mid-infrared detector units are arranged in close contact with each other in the center according to a four-quadrant arrangement. Four independently extended mid-infrared detector units are respectively arranged on the four sides of the four-quadrant detector unit located in the center, and four independent mid-infrared detector units are also arranged at the outermost edge. The mid-infrared detector units on the four sides of the four-quadrant detector unit located in the center and the mid-infrared detector units located at the outermost edge are respectively connected to form a cross arrangement as a whole.

6. The spot detection adjustment tracking element based on the mid-infrared detector array as claimed in claim 2, characterized in that: The 12 independent mid-infrared detector units are photovoltaic detector units made of InAs / GaSbⅡ type superlattice materials. Each mid-infrared detector unit can independently sense the intensity of the light beam irradiated on its photosensitive surface and convert it into an electrical signal output.

7. A method for using the spot detection adjustment tracking element based on the mid-infrared detector array according to claim 1, characterized in that: When adjusting the focus of the light spot, when the center of the light spot of a beam with a Gaussian distribution of cross-sectional light intensity coincides with the center of the array formed by the 12 independent mid-infrared detector units, the light intensity of the mid-infrared detector unit located at the center is the strongest, the light intensity of the mid-infrared detector unit close to the center is relatively weak, and the light intensity of the mid-infrared detector unit at the outermost periphery is even weaker; when the light spot is adjusted to gradually decrease, the light intensity of the mid-infrared detector unit at the outermost periphery gradually decreases until it is zero, and the diameter of the light spot is about 4.6 mm at this time; then continue to adjust the focus, the light intensity of the mid-infrared detector unit close to the center gradually decreases and finally becomes zero, and only the light intensity of the mid-infrared detector unit located at the center is the largest, and the diameter of the light spot is about 1 mm to 2 mm.

8. The method for using the spot detection and adjustment tracking element based on the mid-infrared detector array as claimed in claim 7, characterized in that: When tracking the movement of the light spot, the diameter of the light spot should be between 1mm and 2mm. When the light spot moves, it will move from the position of the mid-infrared detector unit at time t1 to the position of another mid-infrared detector unit at time t2. Since the distance and relative orientation between the two mid-infrared detector units are fixed, the speed and direction of the light spot movement can be calculated.

9. A spot detection, adjustment and tracking device based on a mid-infrared detector array, characterized in that: It includes the spot detection, adjustment and tracking element based on the mid-infrared detector array and the computer display screen as described in claim 1, each mid-infrared detector unit can independently sense light and convert it into electrical signal output, and the 12 electrical signals formed are amplified and converted into digital signals respectively and sent to the computer display screen through the data serial port.

10. A spot detection, adjustment and tracking device based on a mid-infrared detector array, characterized in that: The method comprises two or more spot detection, adjustment and tracking elements and spectroscopes based on mid-infrared detector arrays as described in claim 1, wherein the mid-infrared detector units of the two or more spot detection, adjustment and tracking elements are arranged in different ways; the spectroscope is used to split light, and the split light spots are respectively incident on the two or more spot detection, adjustment, analysis and tracking elements, so as to realize spot detection, adjustment, analysis and tracking simultaneously.

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