Focusing device

Abstract

The invention relates to a focusing device which comprises a base, a first adjusting device, a second adjusting device, a first piezoelectric deformable mirror and a second piezoelectric deformable mirror, the first adjusting device and the second adjusting device are both arranged on the base, the first piezoelectric deformable mirror is arranged on the first adjusting device, and the second piezoelectric deformable mirror is arranged on the second adjusting device. The second piezoelectric deformable mirror is arranged on the second adjusting device, and the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are sequentially arranged in the Y direction; the first adjusting device is used for enabling the first piezoelectric deformable mirror to rotate around the X direction, and the second adjusting device is used for enabling the second piezoelectric deformable mirror to rotate around the X direction, rotate around the Y direction and move along the Z direction; the surface type of the first piezoelectric deformable mirror and the surface type of the second piezoelectric deformable mirror are adjustable. According to the focusing device, the focus position and the focal spot size can be adjusted according to requirements, and the focusing device is suitable for any type of Wolter I, Wolter II and Wolter III.

Description

Technical Field

[0001] The present invention relates to the field of X-ray optical wavefront correction, and more particularly to a focusing device. Background Art

[0002] In the hard X-ray band, since the refractive index of the material is close to 1, a reflective element with a very small grazing incidence angle is required to achieve high reflectivity. As an important type of grazing incidence reflective element, the Wolter-type focusing system has been widely used in hard X-ray imaging and focusing fields since it was proposed by Wolter in 1952 because it can eliminate chromatic aberration, reduce coma and increase numerical aperture. The Wolter-type focusing system is an optical system composed of two coaxial and confocal rotating conic surfaces, including three types: Wolter I, II, and III. Each type has its specific advantages. For example, the Wolter-I type can increase the numerical aperture of the system, the Wolter-II type can provide a wider field of view and better imaging uniformity, and the Wolter-III type can significantly improve the angular stability of the system.

[0003] However, the traditional Wolter-type focusing system can only achieve one of the three types of Wolter I, II, and III, and cannot change the focal position and focal spot size. Summary of the invention

[0004] The object of the present invention is to provide a focusing device, which can adjust the focal position and the focal spot size according to requirements and is suitable for any type of Wolter I, II, and III.

[0005] Based on the above purpose, the present invention provides a focusing device, including a base, a first adjustment device, a second adjustment device, a first piezoelectric deformable mirror and a second piezoelectric deformable mirror, the first adjustment device and the second adjustment device are both arranged on the base, the first piezoelectric deformable mirror is arranged on the first adjustment device, and the second piezoelectric deformable mirror is arranged on the second adjustment device, and the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are arranged in sequence along the Y direction; the first adjustment device is used to rotate the first piezoelectric deformable mirror around the X direction, and the second adjustment device is used to rotate the second piezoelectric deformable mirror around the X direction, around the Y direction and move along the Z direction; the surface shapes of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are set to be adjustable.

[0006] Furthermore, the first adjustment device is fixed on the base, and the second adjustment device includes a support platform and an angle adjustment platform, the support platform is arranged on the base and can move relative to the base along the Z direction, the angle adjustment platform is arranged on the support platform, and the second piezoelectric deformable mirror is fixed on the angle adjustment platform; the angle adjustment platform is used to rotate the second piezoelectric deformable mirror around the Y direction and around the X direction, and the support platform is used to move the angle adjustment platform and the second piezoelectric deformable mirror along the Z direction.

[0007] Furthermore, it also includes a driving mechanism, which is arranged on the base and connected to the support platform, and is used to drive the support platform to move along the Z direction.

[0008] Furthermore, the first piezoelectric deformable mirror includes a first reflector and two first piezoelectric ceramics, the first reflector is fixed on the first adjustment platform, the two first piezoelectric ceramics are arranged relatively on the upper surface of the first reflector along the X direction, the area of ​​the first reflector located between the two first piezoelectric ceramics is provided with a first optical reflective film and formed as a first reflective surface, and the first piezoelectric ceramic is provided with a first actuating electrode.

[0009] Furthermore, the second piezoelectric deformable mirror includes a second reflector and two second piezoelectric ceramics, the second reflector is fixed on the second adjustment platform, the two second piezoelectric ceramics are arranged relatively on the upper surface of the second reflector along the X direction, the area of ​​the second reflector located between the two second piezoelectric ceramics is provided with a second optical reflective film and formed as a second reflective surface, and a second actuating electrode is provided on the second piezoelectric ceramic.

[0010] Furthermore, the second actuating electrode includes a plurality of separate sub-electrodes, and each sub-electrode is fixed at a different position of the second piezoelectric ceramic.

[0011] Furthermore, the first actuating electrode is connected to a first wire, and the second actuating electrode is connected to a second wire.

[0012] Furthermore, a first clamping device is provided on the first adjustment platform, a second clamping device is provided on the second adjustment platform, the first piezoelectric deformable mirror is fixed on the first clamping device, and the second piezoelectric deformable mirror is fixed on the second clamping device.

[0013] Further, the first clamping device comprises a first shell, the first shell has a first installation cavity, a plurality of first flexible clamping elements are arranged on the first shell, and each first flexible clamping element clamps the first piezoelectric deformable mirror in the first installation cavity;

[0014] The second clamping device comprises a second shell having a second mounting cavity. A plurality of second flexible clamping elements are arranged on the second shell, and each second flexible clamping element clamps the second piezoelectric deformable mirror in the second mounting cavity.

[0015] Furthermore, the first clamping device further comprises two first covers, which are fixedly connected to the first shell and are respectively located above the two first piezoelectric ceramics;

[0016] The second clamping device also includes two second covers, which are fixedly connected to the second shell and are respectively located above the two second piezoelectric ceramics.

[0017] The focusing device of the present invention forms a convex or concave surface shape of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror, and adjusts the posture and position of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror by the first adjusting device and the second adjusting device, thereby achieving the adjustment of the focal position and the focal spot size; the first reflecting mirror and the second reflecting mirror with variable thickness are deformed to form the required surface shape, and the local residual surface shape error is compensated by the linearly arranged sub-electrodes on the second reflecting mirror, and the relative position between the two piezoelectric deformable mirrors is adjusted by the movement of the support platform along the Z direction to adjust the focusing system to the required geometric relationship, so that when the grazing incidence angle of the first piezoelectric deformable mirror changes, the position of the second piezoelectric deformable mirror can also change accordingly, so that the focus after the secondary reflection remains unchanged when the numerical aperture changes. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of a focusing device according to an embodiment of the present invention;

[0019] Figure 2 is a schematic structural diagram of a first piezoelectric deformable mirror and a second piezoelectric deformable mirror of a focusing device according to an embodiment of the present invention;

[0020] Figure 3 To remove Figure 2 A schematic diagram of the structure after the first drive board and the second drive board;

[0021] Figure 4 It is a schematic structural diagram of a focusing device according to an embodiment of the present invention after removing the first cover body and the second cover body;

[0022] Figure 5 To remove Figure 4 A schematic diagram of the structure behind the first piezoelectric deformable mirror and the second piezoelectric deformable mirror;

[0023] Figure 6 Schematic diagram of the positional relationship between the first piezoelectric deformable mirror and the second piezoelectric deformable mirror of Wolter I type;

[0024] Figure 7 A schematic diagram of the positional relationship between a first piezoelectric deformable mirror and a second piezoelectric deformable mirror of a Wolter II type;

[0025] Figure 8 Schematic diagram of the positional relationship between the first piezoelectric deformable mirror and the second piezoelectric deformable mirror of the Wolter III type;

[0026] Fig. 9 is the relationship between the curvature of the first piezoelectric deformable mirror and the curvature of the second piezoelectric deformable mirror and the position along the optical axis in the case of Wolter I type. DETAILED DESCRIPTION

[0027] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0028] In the present invention, the XYZ axes are three coordinate axes in a three-dimensional Cartesian coordinate system, wherein the Y axis direction is a direction parallel to the incident X-ray.

[0029] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, an embodiment of the present invention provides a focusing device, including a base 100, a first adjusting device 200, a second adjusting device 300, a first piezoelectric deformable mirror 400 and a second piezoelectric deformable mirror 500. The first adjusting device 200 is fixed on the base 100, the second adjusting device 300 is arranged on the base 100, the first piezoelectric deformable mirror 400 is arranged on the first adjusting device 200, the second piezoelectric deformable mirror 500 is arranged on the second adjusting device 300, and the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 are arranged in sequence along the Y direction; the first adjusting device 200 is used to make the first piezoelectric deformable mirror 400 move around the X direction, and the second adjusting device 300 is used to make the second piezoelectric deformable mirror 400 rotate around the Y direction, rotate around the X direction and move along the Z direction; the surface shapes of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 are arranged to be adjustable.

[0030] In some embodiments, the second adjustment device 300 includes a support platform 310 and an angle adjustment platform 320. The support platform 310 is disposed on the base 100 and can move relative to the base 100 along the Z direction. The angle adjustment platform 320 is disposed on the support platform 310. The second piezoelectric deformable mirror 500 is disposed on the angle adjustment platform 320. The angle adjustment platform 320 is used to rotate the second piezoelectric deformable mirror 500 around the Y direction and the X direction. The support platform 310 is used to move the angle adjustment platform 320 and the second piezoelectric deformable mirror 500 along the Z direction to adjust the height of the second piezoelectric deformable mirror 500. By adjusting the height of the second piezoelectric deformable mirror 500, the X-rays can be focused on the same point after passing through the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 even after the incident angle changes.

[0031] In some embodiments, the focusing device may further include a driving mechanism 330, which is disposed on the base 100 and connected to the support table 310, and is used to drive the support table 310 to move along the Z direction. The driving mechanism 330 may be any suitable driving mechanism, such as a motor, a hydraulic mechanism, a cylinder, etc., as long as it can drive the support table 310 to move along the Z direction.

[0032] In some embodiments, the first piezoelectric deformable mirror 400 includes a first reflecting mirror 410 and two first piezoelectric ceramics 420. The first reflecting mirror 410 is fixed on the first adjustment platform 200. The two first piezoelectric ceramics 420 are arranged relatively on the upper surface of the first reflecting mirror 410 along the X direction. The area of ​​the first reflecting mirror 410 located between the two first piezoelectric ceramics 420 is provided with a first optical reflecting film and formed as a first reflecting surface 430. The first piezoelectric ceramic 420 is provided with a first actuating electrode 440. By applying a voltage to the first actuating electrode 440, the first piezoelectric ceramic 420 can be deformed and mechanical displacement can be generated. Since the first piezoelectric ceramic 420 is fixedly connected to the first reflecting mirror 410 (usually bonded by conductive glue), the first reflecting mirror 410 will also be deformed. By controlling the voltage of the first actuating electrode 440, the deformation amount of the first reflecting mirror 410 can be controlled, so that the first reflecting mirror 410 has different surface shapes. The second piezoelectric deformable mirror 500 includes a second reflecting mirror 510 and two second piezoelectric ceramics 520. The second reflecting mirror 510 is fixed on the second adjustment platform 300. The two second piezoelectric ceramics 520 are arranged on the upper surface of the second reflecting mirror 510 relatively along the X direction. The area of ​​the second reflecting mirror 510 located between the two second piezoelectric ceramics 520 is provided with a second optical reflecting film and forms a second reflecting surface 530. The second piezoelectric ceramic 520 is provided with a second actuating electrode 540. By applying a voltage to the second actuating electrode 540, the second piezoelectric ceramic 520 can be deformed and produce mechanical displacement. Since the second piezoelectric ceramic 520 is fixedly connected to the second reflecting mirror 510 (usually bonded by conductive glue), the second reflecting mirror 510 will also be deformed. By controlling the voltage of the second actuating electrode 540, the deformation amount of the second reflecting mirror 510 can be controlled, so that the second reflecting mirror 510 has different surface shapes.

[0033] In some embodiments, the curvature of the first reflector 410 and the second reflector 510 may be changed by adjusting the voltage applied to the first actuating electrode 440 and the second actuating electrode 540 , thereby changing the focal position.

[0034] In some embodiments, the two first ceramics 420 can be symmetrically arranged relative to the center line of the first reflector 410 (extending along the Y direction), and the voltage applied to the two first actuating electrodes 440 is the same, so that the deformation of the positions symmetrical relative to the center line on both sides of the X phase of the first reflector 410 is the same, that is, the shape of the first reflector 410 is symmetrical relative to the center line.

[0035] In some embodiments, the second actuating electrode 540 includes a plurality of separated sub-electrodes 541, each of which is fixed at a different position of the second piezoelectric ceramic 520 and arranged linearly. By applying an actuating voltage to each sub-electrode 541, the curvature of the local area corresponding to the position of each sub-electrode 541 can be adjusted, thereby correcting the slight difference between the overall curvature of the second reflector 510 and the actual theoretical design curvature.

[0036] In some embodiments, each sub-electrode 541 can be divided into two groups, namely a first group and a second group, the first group and the second group each include the same number of sub-electrodes, each sub-electrode of the first group corresponds to each sub-electrode of the second group one by one, and each sub-electrode of the first group is symmetrically arranged with respect to the center line (extending along the Y direction) of the second reflector 510 with respect to the corresponding sub-electrode of the second group; the voltages applied to the two sub-electrodes symmetrical with respect to the center line of the second reflector 510 are set to be the same, so that the deformations of the positions symmetrical with respect to the center line on both sides of the X phase of the second reflector 510 are the same, that is, the shape of the second reflector 510 is symmetrical with respect to the center line.

[0037] In some embodiments, the first actuation electrode 440 is connected to the first wire 450, and the second actuation electrode 450 is connected to the second wire 550. The first actuation electrode 440 and the second actuation electrode 540 can be connected to an external controller through the first wire 450 and the second wire 550, so that an actuation voltage is applied to the first actuation electrode 440 and the second actuation electrode 540. A first circuit board 460 is provided above the first piezoelectric ceramic 420, and the first wire 450 is electrically connected to the first circuit board 460, and the first circuit board 460 is electrically connected to the external controller, so that a voltage is applied to the first actuation electrode 440 through the external controller; a second circuit board 560 is provided above the second piezoelectric ceramic 520, and the second wire 550 is electrically connected to the second circuit board 560, and the second circuit board 560 is electrically connected to the external controller, so that a voltage is applied to the second actuation electrode 540 through the external controller. When the second actuation electrode 540 includes a plurality of sub-electrodes 541, each sub-electrode 541 is connected to the external controller through a second wire 550, so that an actuation voltage is applied to each sub-electrode independently.

[0038] In some embodiments, a first clamping device 700 is disposed on the first adjustment platform 200, a second clamping device 800 is disposed on the second adjustment platform 300, the first piezoelectric deformable mirror 400 is fixed on the first clamping device 700, and the second piezoelectric deformable mirror 500 is fixed on the second clamping device 800. Figure 5As shown, the first clamping device 700 includes a first housing 710, the first housing 710 has a first mounting cavity 711, the first piezoelectric deformable mirror 400 is located in the first mounting cavity 711, and a plurality of first flexible clamping elements 720 are provided on the first housing 710, each of which clamps the first piezoelectric deformable mirror 400 in the first mounting cavity 711. The second clamping device 800 includes a second housing 810, the second housing 810 has a second mounting cavity 811, the second piezoelectric deformable mirror 500 is located in the second mounting cavity 811, and a plurality of second flexible clamping elements 820 are provided on the second housing 810, each of which clamps the second piezoelectric deformable mirror 500 in the second mounting cavity 811. Fixing the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 by the flexible clamping elements can prevent the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 from generating additional deformation. The first flexible clamping element 720 and the second flexible clamping element 820 may both include flexible components (such as springs, plastics, rubber or other flexible materials). When clamping the piezoelectric deformable mirror, the flexible components may apply an elastic force to the piezoelectric deformable mirror to achieve flexible clamping and avoid additional deformation.

[0039] In some embodiments, the first clamping device 700 may further include two first covers 730, which are fixedly connected to the first shell 710 and are respectively located above the two first piezoelectric ceramics 420 to play a protective role. There is a gap between the two first covers 730, which is located above the first reflection surface 530, and the incident X-rays can be incident to the first reflection surface 430 from the gap, and after being reflected by the first reflection surface 430, they move away from the first reflection surface 430 from the gap. The second clamping device 800 may further include two second covers 830, which are fixedly connected to the second shell 810 and are respectively located above the two second piezoelectric ceramics 520 to play a protective role. There is a gap between the two second covers 830, which is located above the second reflection surface 530, and the incident X-rays can be incident to the second reflection surface 530 from the gap, and after being reflected by the second reflection surface 530, they move away from the second reflection surface 530 from the gap.

[0040] In some embodiments, the first reflector 410 and the second reflector 510 are both plane mirrors with variable thickness, and the thicknesses thereof are different along the Y direction. For example, the thickness of the first reflector 410 gradually increases in the direction away from the second reflector 510, and the thickness of the second reflector 510 gradually increases in the direction away from the first reflector 410. Such a variable thickness mirror can make the mirror surface produce a non-cylindrical surface such as an ellipse, a parabola, or a hyperbolic cylinder under the action of voltage.

[0041] The method of using the focusing device of the embodiment of the present invention is as follows:

[0042] When you need to implement the Wolter I type, such as Figure 6 As shown, by applying a voltage to the actuating electrode, the surface shape of the first piezoelectric deformable mirror 400 can be changed into a parabolic cylinder, and the surface shape of the second piezoelectric deformable mirror 500 can be changed into a hyperbolic cylinder, so that the positions of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 are then adjusted by the first adjusting device 200 and the second adjusting device 300 to meet the requirements of the Wolter I focusing system. When the Wolter I focusing system is formed, the first reflecting surface 430 of the first piezoelectric deformable mirror 400 and the second reflecting surface 530 of the second piezoelectric deformable mirror 500 are both facing the same direction, for example, both facing upward; in subsequent use, the curvature of the two piezoelectric deformable mirrors can be changed by changing the magnitude of the voltage, thereby changing the focal position, and the relative positions of the two piezoelectric deformable mirrors can be changed by the first adjusting device 200 and the second adjusting device 300, thereby changing the grazing incidence angle θ of the X-ray and the focal spot size.

[0043] like Figure 7 and Figure 8 As shown in FIG. 1 , when it is necessary to implement the Wolter II type and the Wolter III type, the first reflection surface 430 of the first piezoelectric deformable mirror 400 and the second reflection surface 530 of the second piezoelectric deformable mirror 500 need to face different directions, for example, one facing upward and the other facing downward. At this time, the first piezoelectric deformable mirror 400 can be fixed on the first adjustment device 20 with the first reflection surface 430 facing upward, and the second piezoelectric deformable mirror 500 can be fixed on the second adjustment device 300 with the second reflection surface 530 facing downward; then, according to the requirements of the Wolter II type, the surface shape of the first piezoelectric deformable mirror 400 is changed to a parabolic cylinder, and the surface shape of the second piezoelectric deformable mirror 500 is changed to a hyperbolic cylinder, or according to the requirements of the Wolter III type, the surface shape of the first piezoelectric deformable mirror 400 is changed to a parabolic cylinder, and the surface shape of the second piezoelectric deformable mirror 500 is changed to an elliptical cylinder; similar to the Wolter I type, the Wolter II type and the Wolter III type are fixed to the first adjustment device 20 with the first reflection surface 430 facing upward, and the second piezoelectric deformable mirror 500 is fixed to the second adjustment device 300 with the second reflection surface 530 facing downward. In type III, the curvature of the two piezoelectric deformable mirrors can also be changed by changing the voltage, thereby changing the focal position, and the relative position of the two piezoelectric deformable mirrors can be changed by the first adjustment device 200 and the second adjustment device 300, thereby changing the grazing incidence angle θ of the X-ray and the focal spot size.

[0044] Figure 6-Figure 8 In, L 1 is the length of the first piezoelectric deformable mirror 400, L 2 is the length of the second piezoelectric deformable mirror 500.

[0045] like Fig. 9As shown in FIG. 1 , in Wolter I mode, the relationship between the curvature of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 and the position along the optical axis (i.e., the Y axis) is changed, wherein the black line on the left represents the first piezoelectric deformable mirror 400, and the red line on the right represents the second piezoelectric deformable mirror 500. In Wolter I mode, in order to meet the same focus, the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 need to satisfy the following equation:

[0046]

[0047] Among them, f 1 is the focal length of the first piezoelectric deformable mirror 400, f 2 is the focal length of the second piezoelectric deformable mirror 500, L is the length of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 along the Y direction, L=L 1 =L 2 , θ is the angle of incidence.

[0048] The focusing device of the embodiment of the present invention forms a convex or concave surface of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500, and adjusts the posture and position of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror by the first adjustment device 200 and the second adjustment device 300, so as to adjust the focal position and the focal spot size; the first reflecting mirror 410 and the second reflecting mirror 510 with variable thickness are deformed to form the desired surface shape, and the local residual surface error is compensated by the linearly arranged sub-electrodes 541 on the second reflecting mirror 510, and the relative position between the two piezoelectric deformable mirrors is adjusted by the movement of the support platform 310 along the Z direction to adjust the focusing system to the desired geometric relationship, so that when the grazing incidence angle of the first piezoelectric deformable mirror 400 changes, the position of the second piezoelectric deformable mirror 500 can also change accordingly, so that the focus after the secondary reflection remains unchanged when the numerical aperture changes.

[0049] The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The above embodiment of the present invention can also be modified in various ways. That is, all simple, equivalent changes and modifications made according to the claims and the description of the present invention fall within the scope of protection of the claims of the present invention. The contents not described in detail in the present invention are all conventional technical contents.

Claims

1. A focusing device, characterized in that: The invention comprises a base, a first adjusting device, a second adjusting device, a first piezoelectric deformable mirror and a second piezoelectric deformable mirror, wherein the first adjusting device and the second adjusting device are both arranged on the base, the first piezoelectric deformable mirror is arranged on the first adjusting device, and the second piezoelectric deformable mirror is arranged on the second adjusting device, and the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are arranged in sequence along the Y direction; the first adjusting device is used to rotate the first piezoelectric deformable mirror around the X direction, and the second adjusting device is used to rotate the second piezoelectric deformable mirror around the X direction, around the Y direction and move along the Z direction; the surface shapes of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are arranged to be adjustable.

2. The focusing device according to claim 1, characterized in that: The first adjustment device is fixed on the base, and the second adjustment device includes a support platform and an angle adjustment platform. The support platform is arranged on the base and can move relative to the base along the Z direction. The angle adjustment platform is arranged on the support platform, and the second piezoelectric deformable mirror is fixed on the angle adjustment platform; the angle adjustment platform is used to rotate the second piezoelectric deformable mirror around the Y direction and around the X direction, and the support platform is used to move the angle adjustment platform and the second piezoelectric deformable mirror along the Z direction.

3. The focusing device according to claim 2, characterized in that: It also includes a driving mechanism, which is arranged on the base and connected to the supporting platform, and is used to drive the supporting platform to move along the Z direction.

4. The focusing device according to claim 1, characterized in that: The first piezoelectric deformable mirror includes a first reflector and two first piezoelectric ceramics. The first reflector is fixed on the first adjustment platform. The two first piezoelectric ceramics are arranged relatively on the upper surface of the first reflector along the X direction. The area of ​​the first reflector located between the two first piezoelectric ceramics is provided with a first optical reflective film and formed as a first reflective surface. The first piezoelectric ceramic is provided with a first actuating electrode.

5. The focusing device according to claim 4, characterized in that: The second piezoelectric deformable mirror includes a second reflector and two second piezoelectric ceramics. The second reflector is fixed on the second adjustment platform. The two second piezoelectric ceramics are arranged opposite to each other on the upper surface of the second reflector along the X direction. The area of ​​the second reflector located between the two second piezoelectric ceramics is provided with a second optical reflective film and formed into a second reflective surface. A second actuating electrode is provided on the second piezoelectric ceramic.

6. The focusing device according to claim 5, characterized in that: The second actuating electrode includes a plurality of separate sub-electrodes, and each sub-electrode is fixed at a different position of the second piezoelectric ceramic.

7. The focusing device according to claim 5, characterized in that: The first actuating electrode is connected to a first wire, and the second actuating electrode is connected to a second wire.

8. The focusing device according to claim 5, characterized in that: The first adjustment platform is provided with a first clamping device, the second adjustment platform is provided with a second clamping device, the first piezoelectric deformable mirror is fixed on the first clamping device, and the second piezoelectric deformable mirror is fixed on the second clamping device.

9. The focusing device according to claim 8, characterized in that: The first clamping device comprises a first shell, the first shell has a first installation cavity, a plurality of first flexible clamping elements are arranged on the first shell, and each first flexible clamping element clamps the first piezoelectric deformable mirror in the first installation cavity; The second clamping device comprises a second shell having a second mounting cavity. A plurality of second flexible clamping elements are arranged on the second shell, and each second flexible clamping element clamps the second piezoelectric deformable mirror in the second mounting cavity.

10. The focusing device according to claim 9, characterized in that: The first clamping device further includes two first covers, which are fixedly connected to the first shell and are respectively located above the two first piezoelectric ceramics; The second clamping device also includes two second covers, which are fixedly connected to the second shell and are respectively located above the two second piezoelectric ceramics.

Images